WO2003019168A1 - Capteur de gaz mos - Google Patents

Capteur de gaz mos Download PDF

Info

Publication number: WO2003019168A1
Authority: WO; WIPO (PCT)
Prior art keywords: substrate; metal oxide; gas sensor; high frequency; depressurizing
Prior art date: 2001-08-27

Application number

PCT/JP2002/006808

Other languages

English (en)

French (fr)

Inventor

Teruaki Katsube

Kousei Onoue

Original Assignee

Uchiya Thermostat Co., Ltd.

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

2001-08-27

Filing date

2002-07-04

Publication date

2003-03-06

2002-07-04 Application filed by Uchiya Thermostat Co., Ltd. filed Critical Uchiya Thermostat Co., Ltd.

2003-03-06 Publication of WO2003019168A1 publication Critical patent/WO2003019168A1/ja

Links

229910044991 metal oxide Inorganic materials 0.000 title abstract 4
150000004706 metal oxides Chemical class 0.000 title abstract 4
239000004065 semiconductor Substances 0.000 title abstract 2
239000000758 substrate Substances 0.000 abstract 6
239000000843 powder Substances 0.000 abstract 4
239000000523 sample Substances 0.000 abstract 3
238000009413 insulation Methods 0.000 abstract 2
238000007751 thermal spraying Methods 0.000 abstract 2
238000000151 deposition Methods 0.000 abstract 1
238000004519 manufacturing process Methods 0.000 abstract 1
238000000034 method Methods 0.000 abstract 1
230000002093 peripheral effect Effects 0.000 abstract 1

Classifications

- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
- G01N27/04—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance
- G01N27/12—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating resistance of a solid body in dependence upon absorption of a fluid; of a solid body in dependence upon reaction with a fluid, for detecting components in the fluid

Landscapes

Chemical & Material Sciences (AREA)
Chemical Kinetics & Catalysis (AREA)
Electrochemistry (AREA)
Physics & Mathematics (AREA)
Health & Medical Sciences (AREA)
Life Sciences & Earth Sciences (AREA)
Analytical Chemistry (AREA)
Biochemistry (AREA)
General Health & Medical Sciences (AREA)
General Physics & Mathematics (AREA)
Immunology (AREA)
Pathology (AREA)
Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)

PCT/JP2002/006808 2001-08-27 2002-07-04 Capteur de gaz mos WO2003019168A1 (fr)

Applications Claiming Priority (2)

Application Number	Priority Date	Filing Date	Title
JP2001255541A JP4659295B2 (ja)	2001-08-27	2001-08-27	金属酸化物半導体ガスセンサ
JP2001-255541		2001-08-27

Publications (1)

Publication Number	Publication Date
WO2003019168A1 true WO2003019168A1 (fr)	2003-03-06

Family

ID=19083494

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
PCT/JP2002/006808 WO2003019168A1 (fr)	2001-08-27	2002-07-04	Capteur de gaz mos

Country Status (2)

Country	Link
JP (1)	JP4659295B2 (ja)
WO (1)	WO2003019168A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JP2006023224A (ja) *	2004-07-09	2006-01-26	Uchiya Thermostat Kk	ガス検知素子及びその製造方法
EP1820005B1 (en) *	2004-11-24	2019-01-09	Sensirion Holding AG	Method for applying selectively a layer to a structured substrate by the usage of a temperature gradient in the substrate
JP4845469B2 (ja) *	2005-10-07	2011-12-28	富士電機株式会社	薄膜ガスセンサ
DE602006006897D1 (de) *	2006-03-31	2009-07-02	Sony Deutschland Gmbh	System zum Nachweis eines Lecks in einer Batterie
JP2007322184A (ja) *	2006-05-31	2007-12-13	Ngk Spark Plug Co Ltd	アンモニアガスセンサ
JP5638765B2 (ja) *	2009-03-25	2014-12-10	ウチヤ・サーモスタット株式会社	ナノ粒子を含む堆積膜の製造方法
JP6687931B2 (ja) *	2016-08-25	2020-04-28	フィガロ技研株式会社	ＳｎＯ２系ガスセンサ
CN113447530B (zh) *	2021-02-26	2022-09-09	河南大学	一种气体传感装置

Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59119253A (ja) *	1982-12-25	1984-07-10	Ngk Spark Plug Co Ltd	ガス感応体素子
JPH055713A (ja) *	1991-10-31	1993-01-14	New Cosmos Electric Corp	ガス検知素子の製造方法
JPH06160324A (ja) *	1992-10-23	1994-06-07	Yamatake Honeywell Co Ltd	窒素酸化物検出素子およびその製造方法
JPH06288953A (ja) *	1993-02-05	1994-10-18	Fuji Electric Co Ltd	厚膜ガスセンサ
JPH08109463A (ja) *	1994-10-12	1996-04-30	Agency Of Ind Science & Technol	超高速プラズマジェット発生装置及び該装置を用いた溶射被膜製造方法
WO2001031324A1 (fr) *	1999-10-27	2001-05-03	Ngk Spark Plug Co., Ltd.	Detecteur d'oxygene et procede de fabrication d'un element de detection

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS58131551A (ja) *	1982-02-01	1983-08-05	Shinei Kk	センサ
JPS594113A (ja) *	1982-06-30	1984-01-10	松下電器産業株式会社	湿度検出素子の製造法
JPH0552790A (ja) *	1991-08-28	1993-03-02	Ricoh Co Ltd	ガスセンサ
JPH05322818A (ja) *	1992-05-25	1993-12-07	Takeo Oki	温・湿度セラミックセンサとその製造方法
DE69922776T2 (de) *	1999-01-21	2005-12-08	Sony International (Europe) Gmbh	Nanoteilchenstruktur zur Anwendung in einer elektronischen Anordnung, insbesondere in einem chemischen Sensor
JP3812215B2 (ja) *	1999-04-02	2006-08-23	富士電機機器制御株式会社	薄膜ガスセンサ

2001
- 2001-08-27 JP JP2001255541A patent/JP4659295B2/ja not_active Expired - Lifetime
2002
- 2002-07-04 WO PCT/JP2002/006808 patent/WO2003019168A1/ja active Application Filing

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number	Priority date	Publication date	Assignee	Title
JPS59119253A (ja) *	1982-12-25	1984-07-10	Ngk Spark Plug Co Ltd	ガス感応体素子
JPH055713A (ja) *	1991-10-31	1993-01-14	New Cosmos Electric Corp	ガス検知素子の製造方法
JPH06160324A (ja) *	1992-10-23	1994-06-07	Yamatake Honeywell Co Ltd	窒素酸化物検出素子およびその製造方法
JPH06288953A (ja) *	1993-02-05	1994-10-18	Fuji Electric Co Ltd	厚膜ガスセンサ
JPH08109463A (ja) *	1994-10-12	1996-04-30	Agency Of Ind Science & Technol	超高速プラズマジェット発生装置及び該装置を用いた溶射被膜製造方法
WO2001031324A1 (fr) *	1999-10-27	2001-05-03	Ngk Spark Plug Co., Ltd.	Detecteur d'oxygene et procede de fabrication d'un element de detection

Also Published As

Publication number	Publication date
JP2003065989A (ja)	2003-03-05
JP4659295B2 (ja)	2011-03-30

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2003-03-06	AK	Designated states	Kind code of ref document: A1 Kind code of ref document: A1 Designated state(s): US
2003-03-06	AL	Designated countries for regional patents	Kind code of ref document: A1 Designated state(s): DE GB
2003-05-02	121	Ep: the epo has been informed by wipo that ep was designated in this application
2003-05-22	DFPE	Request for preliminary examination filed prior to expiration of 19th month from priority date (pct application filed before 20040101)
2004-10-06	122	Ep: pct application non-entry in european phase