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WO2009008032A1 - プラズマディスプレイパネルの製造方法 - Google Patents

プラズマディスプレイパネルの製造方法 Download PDF

Info

Publication number
WO2009008032A1
WO2009008032A1 PCT/JP2007/000754 JP2007000754W WO2009008032A1 WO 2009008032 A1 WO2009008032 A1 WO 2009008032A1 JP 2007000754 W JP2007000754 W JP 2007000754W WO 2009008032 A1 WO2009008032 A1 WO 2009008032A1
Authority
WO
WIPO (PCT)
Prior art keywords
oxide film
magnesium oxide
exposed
atmosphere
display panel
Prior art date
Application number
PCT/JP2007/000754
Other languages
English (en)
French (fr)
Inventor
Hideki Harada
Original Assignee
Hitachi, Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi, Ltd. filed Critical Hitachi, Ltd.
Priority to PCT/JP2007/000754 priority Critical patent/WO2009008032A1/ja
Publication of WO2009008032A1 publication Critical patent/WO2009008032A1/ja

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/34Vessels, containers or parts thereof, e.g. substrates
    • H01J11/40Layers for protecting or enhancing the electron emission, e.g. MgO layers
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/10AC-PDPs with at least one main electrode being out of contact with the plasma
    • H01J11/12AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided on both sides of the discharge space
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Manufacturing & Machinery (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

 酸化マグネシウム膜(18)を有するプラズマディスプレイパネル(1)の製造方法は、酸化マグネシウム膜(18)をその成膜から内部空間の密閉まで一貫して大気から隔離し、それにおいて成膜された酸化マグネシウム膜(18)を成膜時と比べて酸素分圧の大きい酸素含有雰囲気に晒す処理(71)と、酸素含有雰囲気に晒された酸化マグネシウム膜(18)を酸素含有雰囲気よりも真空度の高い減圧雰囲気に晒す処理(73)とを含んでおり、酸化マグネシウム膜(18)を減圧雰囲気に晒した後に内部空間の密閉を行う。
PCT/JP2007/000754 2007-07-11 2007-07-11 プラズマディスプレイパネルの製造方法 WO2009008032A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/000754 WO2009008032A1 (ja) 2007-07-11 2007-07-11 プラズマディスプレイパネルの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/000754 WO2009008032A1 (ja) 2007-07-11 2007-07-11 プラズマディスプレイパネルの製造方法

Publications (1)

Publication Number Publication Date
WO2009008032A1 true WO2009008032A1 (ja) 2009-01-15

Family

ID=40228229

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/000754 WO2009008032A1 (ja) 2007-07-11 2007-07-11 プラズマディスプレイパネルの製造方法

Country Status (1)

Country Link
WO (1) WO2009008032A1 (ja)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000156160A (ja) * 1998-11-19 2000-06-06 Ulvac Japan Ltd 真空装置、及びプラズマディスプレイ装置の製造方法
JP2002140986A (ja) * 2000-10-31 2002-05-17 Matsushita Electric Ind Co Ltd ガス放電パネルおよびその製造方法
JP2004087433A (ja) * 2002-08-29 2004-03-18 Fujitsu Hitachi Plasma Display Ltd プラズマディスプレイパネルパネルの製造方法
JP2006318740A (ja) * 2005-05-12 2006-11-24 Tsutae Shinoda 保護膜安定化装置及びpdp製造装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000156160A (ja) * 1998-11-19 2000-06-06 Ulvac Japan Ltd 真空装置、及びプラズマディスプレイ装置の製造方法
JP2002140986A (ja) * 2000-10-31 2002-05-17 Matsushita Electric Ind Co Ltd ガス放電パネルおよびその製造方法
JP2004087433A (ja) * 2002-08-29 2004-03-18 Fujitsu Hitachi Plasma Display Ltd プラズマディスプレイパネルパネルの製造方法
JP2006318740A (ja) * 2005-05-12 2006-11-24 Tsutae Shinoda 保護膜安定化装置及びpdp製造装置

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