WO2009008032A1 - プラズマディスプレイパネルの製造方法 - Google Patents
プラズマディスプレイパネルの製造方法 Download PDFInfo
- Publication number
- WO2009008032A1 WO2009008032A1 PCT/JP2007/000754 JP2007000754W WO2009008032A1 WO 2009008032 A1 WO2009008032 A1 WO 2009008032A1 JP 2007000754 W JP2007000754 W JP 2007000754W WO 2009008032 A1 WO2009008032 A1 WO 2009008032A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- oxide film
- magnesium oxide
- exposed
- atmosphere
- display panel
- Prior art date
Links
- 238000000034 method Methods 0.000 title abstract 3
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 abstract 6
- 239000000395 magnesium oxide Substances 0.000 abstract 6
- AXZKOIWUVFPNLO-UHFFFAOYSA-N magnesium;oxygen(2-) Chemical compound [O-2].[Mg+2] AXZKOIWUVFPNLO-UHFFFAOYSA-N 0.000 abstract 6
- 230000008021 deposition Effects 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 1
- 229910052760 oxygen Inorganic materials 0.000 abstract 1
- 239000001301 oxygen Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/20—Constructional details
- H01J11/34—Vessels, containers or parts thereof, e.g. substrates
- H01J11/40—Layers for protecting or enhancing the electron emission, e.g. MgO layers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J11/00—Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
- H01J11/10—AC-PDPs with at least one main electrode being out of contact with the plasma
- H01J11/12—AC-PDPs with at least one main electrode being out of contact with the plasma with main electrodes provided on both sides of the discharge space
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
- H01J9/02—Manufacture of electrodes or electrode systems
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Manufacturing & Machinery (AREA)
- Gas-Filled Discharge Tubes (AREA)
Abstract
酸化マグネシウム膜(18)を有するプラズマディスプレイパネル(1)の製造方法は、酸化マグネシウム膜(18)をその成膜から内部空間の密閉まで一貫して大気から隔離し、それにおいて成膜された酸化マグネシウム膜(18)を成膜時と比べて酸素分圧の大きい酸素含有雰囲気に晒す処理(71)と、酸素含有雰囲気に晒された酸化マグネシウム膜(18)を酸素含有雰囲気よりも真空度の高い減圧雰囲気に晒す処理(73)とを含んでおり、酸化マグネシウム膜(18)を減圧雰囲気に晒した後に内部空間の密閉を行う。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/000754 WO2009008032A1 (ja) | 2007-07-11 | 2007-07-11 | プラズマディスプレイパネルの製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/JP2007/000754 WO2009008032A1 (ja) | 2007-07-11 | 2007-07-11 | プラズマディスプレイパネルの製造方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009008032A1 true WO2009008032A1 (ja) | 2009-01-15 |
Family
ID=40228229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2007/000754 WO2009008032A1 (ja) | 2007-07-11 | 2007-07-11 | プラズマディスプレイパネルの製造方法 |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2009008032A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000156160A (ja) * | 1998-11-19 | 2000-06-06 | Ulvac Japan Ltd | 真空装置、及びプラズマディスプレイ装置の製造方法 |
JP2002140986A (ja) * | 2000-10-31 | 2002-05-17 | Matsushita Electric Ind Co Ltd | ガス放電パネルおよびその製造方法 |
JP2004087433A (ja) * | 2002-08-29 | 2004-03-18 | Fujitsu Hitachi Plasma Display Ltd | プラズマディスプレイパネルパネルの製造方法 |
JP2006318740A (ja) * | 2005-05-12 | 2006-11-24 | Tsutae Shinoda | 保護膜安定化装置及びpdp製造装置 |
-
2007
- 2007-07-11 WO PCT/JP2007/000754 patent/WO2009008032A1/ja active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000156160A (ja) * | 1998-11-19 | 2000-06-06 | Ulvac Japan Ltd | 真空装置、及びプラズマディスプレイ装置の製造方法 |
JP2002140986A (ja) * | 2000-10-31 | 2002-05-17 | Matsushita Electric Ind Co Ltd | ガス放電パネルおよびその製造方法 |
JP2004087433A (ja) * | 2002-08-29 | 2004-03-18 | Fujitsu Hitachi Plasma Display Ltd | プラズマディスプレイパネルパネルの製造方法 |
JP2006318740A (ja) * | 2005-05-12 | 2006-11-24 | Tsutae Shinoda | 保護膜安定化装置及びpdp製造装置 |
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