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WO2009066672A1 - 干渉計 - Google Patents

干渉計 Download PDF

Info

Publication number
WO2009066672A1
WO2009066672A1 PCT/JP2008/070974 JP2008070974W WO2009066672A1 WO 2009066672 A1 WO2009066672 A1 WO 2009066672A1 JP 2008070974 W JP2008070974 W JP 2008070974W WO 2009066672 A1 WO2009066672 A1 WO 2009066672A1
Authority
WO
WIPO (PCT)
Prior art keywords
planar light
inspecting object
light source
interferometer
shape
Prior art date
Application number
PCT/JP2008/070974
Other languages
English (en)
French (fr)
Inventor
Zhigiang Liu
Original Assignee
Nikon Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corporation filed Critical Nikon Corporation
Priority to JP2009542560A priority Critical patent/JP5353708B2/ja
Priority to CN200880113315XA priority patent/CN101836072B/zh
Publication of WO2009066672A1 publication Critical patent/WO2009066672A1/ja
Priority to US12/780,826 priority patent/US8339612B2/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02055—Reduction or prevention of errors; Testing; Calibration
    • G01B9/02056—Passive reduction of errors
    • G01B9/02057—Passive reduction of errors by using common path configuration, i.e. reference and object path almost entirely overlapping

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Testing Of Optical Devices Or Fibers (AREA)

Abstract

　被検面と参照面との面形状の差が大きくても、被検物の面形状を測定することのできる干渉計。被検物（９）の面形状を測定する干渉計は、低空間コヒーレント特性を有する面光源と、面光源と被検物とを光学的に共役に配置する導光光学系（６，８）と、被検物と光学的に共役な位置に配置された検出面を有する光検出器（１３）とを備えている。面光源は、互いに低干渉性を有する複数の微小面光源を有する。
PCT/JP2008/070974 2007-11-19 2008-11-19 干渉計 WO2009066672A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009542560A JP5353708B2 (ja) 2007-11-19 2008-11-19 干渉計
CN200880113315XA CN101836072B (zh) 2007-11-19 2008-11-19 干涉仪
US12/780,826 US8339612B2 (en) 2007-11-19 2010-05-14 Shape-measuring interferometer having low-coherence source conjugate to the examined object

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007298744 2007-11-19
JP2007-298744 2007-11-19

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/780,826 Continuation US8339612B2 (en) 2007-11-19 2010-05-14 Shape-measuring interferometer having low-coherence source conjugate to the examined object

Publications (1)

Publication Number Publication Date
WO2009066672A1 true WO2009066672A1 (ja) 2009-05-28

Family

ID=40667494

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070974 WO2009066672A1 (ja) 2007-11-19 2008-11-19 干渉計

Country Status (4)

Country Link
US (1) US8339612B2 (ja)
JP (1) JP5353708B2 (ja)
CN (1) CN101836072B (ja)
WO (1) WO2009066672A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020169952A (ja) * 2019-04-05 2020-10-15 キヤノンマシナリー株式会社 測定装置および測定方法

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8606341B2 (en) 2011-04-05 2013-12-10 Microsoft Corporation Twisted track interferometer for producing magic states
JP5971965B2 (ja) * 2012-02-07 2016-08-17 キヤノン株式会社 面形状計測方法、面形状計測装置、プログラム、および、光学素子の製造方法
CN109470454B (zh) * 2018-12-05 2020-09-04 陕西理工大学 一种曲面微透镜阵列面形检测装置
CN114565948A (zh) * 2022-02-11 2022-05-31 业泓科技(成都)有限公司 光学辨识装置

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08252256A (ja) * 1995-03-17 1996-10-01 Seitai Hikari Joho Kenkyusho:Kk 断層撮影装置
JP2002191060A (ja) * 2000-12-22 2002-07-05 Olympus Optical Co Ltd ３次元撮像装量
JP2005017127A (ja) * 2003-06-26 2005-01-20 Institute Of Physical & Chemical Research 干渉計および形状測定装置
JP2007298281A (ja) * 2006-04-27 2007-11-15 Nikon Corp 被検体の面形状の測定方法及び測定装置

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
JPH05340726A (ja) * 1992-06-05 1993-12-21 Olympus Optical Co Ltd ３次元形状測定装置の非接触式プローブ
US5923466A (en) * 1993-10-20 1999-07-13 Biophysica Technologies, Inc. Light modulated confocal optical instruments and method
JP2826265B2 (ja) * 1994-03-28 1998-11-18 株式会社生体光情報研究所 断層像撮影装置
US5816325A (en) * 1996-11-27 1998-10-06 Future Energy, Llc Methods and apparatus for enhanced recovery of viscous deposits by thermal stimulation
JP3628582B2 (ja) * 2000-03-24 2005-03-16 独立行政法人科学技術振興機構 鉛直断面画像測定装置
US6722429B2 (en) * 2000-04-24 2004-04-20 Shell Oil Company In situ thermal processing of a hydrocarbon containing formation leaving one or more selected unprocessed areas
AU2001263178A1 (en) * 2000-05-16 2001-11-26 Andrew M. Ashby Method and apparatus for hydrocarbon subterranean recovery
US6951247B2 (en) * 2001-04-24 2005-10-04 Shell Oil Company In situ thermal processing of an oil shale formation using horizontal heat sources
US7319229B2 (en) * 2003-12-29 2008-01-15 Kla-Tencor Technologies Corporation Illumination apparatus and methods
JP4920196B2 (ja) * 2004-04-02 2012-04-18 株式会社菱晃 医用ｘ線写真観察器
JP2006017485A (ja) * 2004-06-30 2006-01-19 Nikon Corp 面形状測定装置および測定方法、並びに、投影光学系の製造方法、投影光学系及び投影露光装置
CA2605734A1 (en) * 2005-04-22 2006-11-02 Shell Internationale Research Maatschappij B.V. Systems and processes for use in treating subsurface formations
US7743826B2 (en) * 2006-01-20 2010-06-29 American Shale Oil, Llc In situ method and system for extraction of oil from shale
US7460248B2 (en) * 2006-05-15 2008-12-02 Carestream Health, Inc. Tissue imaging system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08252256A (ja) * 1995-03-17 1996-10-01 Seitai Hikari Joho Kenkyusho:Kk 断層撮影装置
JP2002191060A (ja) * 2000-12-22 2002-07-05 Olympus Optical Co Ltd ３次元撮像装量
JP2005017127A (ja) * 2003-06-26 2005-01-20 Institute Of Physical & Chemical Research 干渉計および形状測定装置
JP2007298281A (ja) * 2006-04-27 2007-11-15 Nikon Corp 被検体の面形状の測定方法及び測定装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2020169952A (ja) * 2019-04-05 2020-10-15 キヤノンマシナリー株式会社 測定装置および測定方法
JP7300871B2 (ja) 2019-04-05 2023-06-30 キヤノンマシナリー株式会社 測定装置および測定方法

Also Published As

Publication number Publication date
CN101836072A (zh) 2010-09-15
US20100220336A1 (en) 2010-09-02
JP5353708B2 (ja) 2013-11-27
CN101836072B (zh) 2013-04-17
JPWO2009066672A1 (ja) 2011-04-07
US8339612B2 (en) 2012-12-25

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