+

WO2010006764A3 - Faseroptisches mehrwellenlängeninterferometer (mwli) zur absoluten vermessung von abständen und topologien von oberflächen in grossem arbeitsabstand - Google Patents

Faseroptisches mehrwellenlängeninterferometer (mwli) zur absoluten vermessung von abständen und topologien von oberflächen in grossem arbeitsabstand Download PDF

Info

Publication number
WO2010006764A3
WO2010006764A3 PCT/EP2009/005111 EP2009005111W WO2010006764A3 WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3 EP 2009005111 W EP2009005111 W EP 2009005111W WO 2010006764 A3 WO2010006764 A3 WO 2010006764A3
Authority
WO
WIPO (PCT)
Prior art keywords
fibre
optic
distances
mwli
topologies
Prior art date
Application number
PCT/EP2009/005111
Other languages
English (en)
French (fr)
Other versions
WO2010006764A2 (de
Inventor
Ralf Nicolaus
Jürgen Petter
Theo Tschudi
André Noack
Original Assignee
Luphos Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luphos Gmbh filed Critical Luphos Gmbh
Publication of WO2010006764A2 publication Critical patent/WO2010006764A2/de
Publication of WO2010006764A3 publication Critical patent/WO2010006764A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

Die Erfindung betrifft eine Sensoreinrichtung zur Messung von Abständen mit zumindest zwei Strahlungsquellen (101), welche zur Erzeugung optischer Signale (112) unterschiedlicher Wellenlängen ausgebildet sind, und deren optische Signale über eine faseroptische Kopplung (102, 103) einem Sensorkopf (104; 124) zuführbar sind, wobei die optischen Signale (112) der zumindest zwei Strahlungsquellen (101) mittels zumindest einer optischen Multiplexereinrichtung (102) in einer gemeinsamen Faser (110) zusammenführbar und mittels dieser Faser (110) dem Sensorkopf (104; 124) zuführbar sind.
PCT/EP2009/005111 2008-07-18 2009-07-14 Faseroptisches mehrwellenlängeninterferometer (mwli) zur absoluten vermessung von abständen und topologien von oberflächen in grossem arbeitsabstand WO2010006764A2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008033942.3 2008-07-18
DE102008033942A DE102008033942B3 (de) 2008-07-18 2008-07-18 Faseroptisches Mehrwellenlängeninterferometer (MWLI) zur absoluten Vermessung von Abständen und Topologien von Oberflächen in großem Arbeitsabstand

Publications (2)

Publication Number Publication Date
WO2010006764A2 WO2010006764A2 (de) 2010-01-21
WO2010006764A3 true WO2010006764A3 (de) 2010-11-18

Family

ID=41395556

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2009/005111 WO2010006764A2 (de) 2008-07-18 2009-07-14 Faseroptisches mehrwellenlängeninterferometer (mwli) zur absoluten vermessung von abständen und topologien von oberflächen in grossem arbeitsabstand

Country Status (2)

Country Link
DE (1) DE102008033942B3 (de)
WO (1) WO2010006764A2 (de)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011011065B4 (de) 2011-02-11 2013-04-04 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
DE102012212663A1 (de) * 2012-07-19 2014-01-23 Carl Zeiss Smt Gmbh Projektionsbelichtungsanlage für die Mikrolithographie mit einer optischen Abstandsmessvorrichtung
DE102012017015B4 (de) 2012-08-20 2015-03-19 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
EP2806246B1 (de) 2013-05-24 2019-11-20 Attocube Systems AG Doppellaserinterferometer
DE102015201754A1 (de) 2015-02-02 2016-08-04 Picofine GmbH Vorrichtung und Verfahren zur Justierung eines Laserinterferometers
DE102015209567B3 (de) * 2015-05-26 2016-10-27 Carl Zeiss Industrielle Messtechnik Gmbh Optischer Mehrwellenlängen-Sensor zur Messung von Abständen zu einer Oberfläche und entsprechendes Messgerät
DE202016100211U1 (de) 2016-01-18 2017-04-19 Friedrich Vollmer Feinmessgerätebau Gmbh Abstandsmessgerät
DE102016100745B3 (de) * 2016-01-18 2017-03-09 Friedrich Vollmer Feinmessgerätebau Gmbh Verfahren zur optischen Abstandsmessung sowie ein Abstandsmessgerät
EP3401634A1 (de) * 2017-05-12 2018-11-14 Taylor Hobson Limited Abstandsmessanordnung zur bestimmung eines abstandes zu einem objekt
EP3789727B1 (de) 2019-09-04 2024-04-10 Taylor Hobson Limited Interferometrische messvorrichtung
DE102021112120A1 (de) * 2021-05-10 2022-11-10 Carl Mahr Holding Gmbh Faseroptische Punktsonde und Distanzmesssystem mit einer faseroptischen Punktsonde
GB2622565A (en) 2022-07-15 2024-03-27 Taylor Hobson Ltd A collision protection apparatus

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2848664A1 (fr) * 2002-12-11 2004-06-18 Micro Module Detecteur de position, forme et reflectivite d'une surface
WO2005001445A2 (en) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systems and methods for phase measurements

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552457A (en) * 1983-02-01 1985-11-12 Giallorenzi Thomas G Fiber optic interferometer using two wavelengths or variable wavelength
JPS62106306A (ja) * 1985-11-01 1987-05-16 Olympus Optical Co Ltd 多波長干渉計
DE4139865C2 (de) * 1991-12-03 1994-03-10 Deutsche Aerospace Abstimmbarer Zwei-Wellenlängen-Laser für Superheterodyn-Interferometer
TW367407B (en) * 1997-12-22 1999-08-21 Asml Netherlands Bv Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
US6781699B2 (en) * 2002-10-22 2004-08-24 Corning-Tropel Two-wavelength confocal interferometer for measuring multiple surfaces
DE102005042733B3 (de) * 2005-09-05 2007-01-25 Universität Stuttgart Verfahren und Anordnung zur Spektral-Interferometrie mit chromatischer Tiefenaufspaltung, insbesondere auch Mirau-Interferometer
JP2007047043A (ja) * 2005-08-10 2007-02-22 Pentax Corp 多波長干渉計
WO2007087301A2 (en) * 2006-01-23 2007-08-02 Zygo Corporation Interferometer system for monitoring an object

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005001445A2 (en) * 2001-12-18 2005-01-06 Massachusetts Institute Of Technology Systems and methods for phase measurements
FR2848664A1 (fr) * 2002-12-11 2004-06-18 Micro Module Detecteur de position, forme et reflectivite d'une surface

Also Published As

Publication number Publication date
WO2010006764A2 (de) 2010-01-21
DE102008033942B3 (de) 2010-04-08

Similar Documents

Publication Publication Date Title
WO2010006764A3 (de) Faseroptisches mehrwellenlängeninterferometer (mwli) zur absoluten vermessung von abständen und topologien von oberflächen in grossem arbeitsabstand
WO2008084637A1 (ja) 対象物の温度分布測定方法及びセンサユニット
WO2007087040A3 (en) Demodulation method and apparatus for fiber optic sensors
MY158827A (en) A novel sensor array configuration for extending useful sensing length of a swept-wavelength interferometry based system
WO2008073486A3 (en) Multiple-degree of freedom interferometer with compensation for gas effects
WO2009140617A3 (en) Oct combining probes and integrated systems
GB2442486B (en) Measuring brillouin backscatter from an optical fibre using a tracking signal
GB2455259A (en) Fiber optic sensors in mwd applications
WO2014014584A3 (en) Surgical instrument with fiber bragg grating
MY172743A (en) System and method of distributed fiber optic sensing including integrated reference path
TW200951399A (en) Accurate image acquisition for structured-light system for optical shape and positional measurements
TW201129775A (en) Fiber-based interferometer system for monitoring an imaging interferometer
GB201020827D0 (en) Distrubuted optical fibre sensor
EP2600114A3 (de) Multi-Point Messverfahren von FBG-Sensor und Multi-Point Messapparatur
WO2013177577A3 (en) Optical fiber pressure sensor
GB201320077D0 (en) Laser tracker that combines two different wavelengths with a fiber-optic coupler
GB2445697A (en) Monitoring device for rotating body
GB0912851D0 (en) Distributed optical fibre sensing
WO2008105974A3 (en) Ultrasonic pressure sensor and method of operating the same
WO2010080732A3 (en) Scatterometry metrology target design optimization
WO2012075013A8 (en) Laser confocal sensor metrology system
WO2014076128A3 (de) Messung einer faserrichtung eines kohlefaserwerkstoffes und herstellung eines objekts in kohlefaserverbundbauweise
WO2009028332A1 (ja) 波面収差計測装置および方法、並びに波面収差調整方法
GB2484647A (en) Fiber optic current sensing system with temperature compensation
WO2006118911A3 (en) Method of estimating and measuring longitudinal dispersion in optical fibers

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 09777181

Country of ref document: EP

Kind code of ref document: A2

122 Ep: pct application non-entry in european phase

Ref document number: 09777181

Country of ref document: EP

Kind code of ref document: A2

点击 这是indexloc提供的php浏览器服务，不要输入任何密码和下载