WO2009031420A1 - 透明板体内部の微小異物を検出する方法及びその装置 - Google Patents
透明板体内部の微小異物を検出する方法及びその装置 Download PDFInfo
- Publication number
- WO2009031420A1 WO2009031420A1 PCT/JP2008/065041 JP2008065041W WO2009031420A1 WO 2009031420 A1 WO2009031420 A1 WO 2009031420A1 JP 2008065041 W JP2008065041 W JP 2008065041W WO 2009031420 A1 WO2009031420 A1 WO 2009031420A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- transparent plate
- foreign matter
- light beam
- micro foreign
- produced
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/958—Inspecting transparent materials or objects, e.g. windscreens
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
- G01N2021/8905—Directional selective optics, e.g. slits, spatial filters
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
- G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
- G01N2021/8967—Discriminating defects on opposite sides or at different depths of sheet or rod
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/94—Investigating contamination, e.g. dust
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Engineering & Computer Science (AREA)
- Textile Engineering (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880104499.3A CN101790679B (zh) | 2007-09-04 | 2008-08-22 | 检测透明板体内部的微小异物的方法及其装置 |
JP2009531186A JPWO2009031420A1 (ja) | 2007-09-04 | 2008-08-22 | 透明板体内部の微小異物を検出する方法及びその装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-229468 | 2007-09-04 | ||
JP2007229468 | 2007-09-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009031420A1 true WO2009031420A1 (ja) | 2009-03-12 |
Family
ID=40428740
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/065041 WO2009031420A1 (ja) | 2007-09-04 | 2008-08-22 | 透明板体内部の微小異物を検出する方法及びその装置 |
Country Status (3)
Country | Link |
---|---|
JP (3) | JPWO2009031420A1 (ja) |
CN (1) | CN101790679B (ja) |
WO (1) | WO2009031420A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010249552A (ja) * | 2009-04-13 | 2010-11-04 | Central Glass Co Ltd | ガラス板の欠陥識別方法および装置 |
WO2012077683A1 (ja) * | 2010-12-09 | 2012-06-14 | 旭硝子株式会社 | ガラスリボン内欠陥測定方法およびガラスリボン内欠陥測定システム |
WO2012077542A1 (ja) * | 2010-12-09 | 2012-06-14 | 旭硝子株式会社 | ガラス基板 |
JP2015135266A (ja) * | 2014-01-17 | 2015-07-27 | 旭硝子株式会社 | ガラス板内部の微小異物を検出する方法及びその装置 |
WO2015162303A1 (de) * | 2014-04-25 | 2015-10-29 | Boraident Gmbh | Verfahren und vorrichtung zum erkennen von nickelsulfid-einschlüssen in einer glasplatte |
EP2895847A4 (en) * | 2012-09-14 | 2016-05-25 | Luoyang Landglass Tech Co Ltd | DETECTION SYSTEM BASED ON MODULATION OF A GLASS IMAGE PRODUCED BY STRUCTURED LASER LIGHT IN LINE |
CN111487191A (zh) * | 2020-04-26 | 2020-08-04 | 山东创策电气科技有限公司 | 基于图像处理的钢化玻璃自爆隐患检测方法及装置 |
CN111721774A (zh) * | 2020-06-23 | 2020-09-29 | 湖南正中制药机械有限公司 | 一种用于自动灯检机的灯检检测方法 |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5791101B2 (ja) * | 2011-05-16 | 2015-10-07 | 芝浦メカトロニクス株式会社 | 貼り合せ板状体検査装置及び方法 |
CN104634789A (zh) * | 2014-04-24 | 2015-05-20 | 东旭集团有限公司 | 一种对超薄玻璃基板的上表面进行异物检查的系统及方法 |
CN105699400A (zh) * | 2014-11-28 | 2016-06-22 | 中电电气(上海)太阳能科技有限公司 | 一种钢化玻璃外观检验装置 |
CN106770315A (zh) * | 2016-11-30 | 2017-05-31 | 浙江宜佳新材料股份有限公司 | 一种胶膜纸的胶膜层激光监测装置 |
CN106932406A (zh) * | 2017-04-28 | 2017-07-07 | 许迪 | 一种检测透明物体缺陷的装置 |
WO2019041087A1 (zh) * | 2017-08-28 | 2019-03-07 | 深圳市兴华炜科技有限公司 | 透明物体的测试方法及相关产品 |
US10053059B1 (en) * | 2017-10-04 | 2018-08-21 | Ford Global Technologies, Llc | Detection and identification of opaqueness of vehicle windows |
RU2764903C1 (ru) * | 2018-03-07 | 2022-01-24 | ГАРДИАН ГЛАСС, ЭлЭлСи | Способ и система для обнаружения включений в термополированном стекле на основе анализа длин волн |
CN109632828B (zh) * | 2018-10-29 | 2021-11-09 | 彩虹显示器件股份有限公司 | 一种平板玻璃缺陷复检系统及复检方法 |
CN110082361B (zh) * | 2019-05-27 | 2024-04-30 | 成都领益科技有限公司 | 一种物体外观与裂纹检测装置与检测方法 |
CN111451188A (zh) * | 2020-04-13 | 2020-07-28 | 徐洪 | 用于镜头的除尘装置及其使用方法 |
JP7077523B2 (ja) * | 2020-06-03 | 2022-05-31 | 株式会社東京精密 | 亀裂検出装置及び亀裂検出方法 |
CN113310993B (zh) * | 2021-06-24 | 2024-10-22 | 宗子凯 | 一种透明板材点状缺陷检测系统及方法 |
CN116282869B (zh) * | 2023-03-24 | 2023-09-29 | 南京我乐家居股份有限公司 | 钢化玻璃的智能生产控制方法与系统 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11242001A (ja) * | 1997-07-17 | 1999-09-07 | Hoya Corp | 透光性物質の不均一性検査方法及びその装置並びに透明基板の選別方法 |
JPH11316197A (ja) * | 1998-05-06 | 1999-11-16 | Matsushita Electric Works Ltd | 平板材の内部検査方法及び装置 |
JP2005300275A (ja) * | 2004-04-08 | 2005-10-27 | Central Glass Co Ltd | 透明板の欠陥検出方法およびその装置 |
JP2006071284A (ja) * | 2004-08-31 | 2006-03-16 | Central Glass Co Ltd | ガラス基板欠陥の表裏識別方法 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54106289A (en) * | 1978-02-07 | 1979-08-21 | Nippon Sheet Glass Co Ltd | Defect detector for glass sheet |
FR2681429B1 (fr) * | 1991-09-13 | 1995-05-24 | Thomson Csf | Procede et dispositif d'inspection du verre. |
JPH0882602A (ja) * | 1994-09-13 | 1996-03-26 | Nippon Electric Glass Co Ltd | 板ガラスの欠点検査方法及び装置 |
JP2769797B2 (ja) * | 1995-03-15 | 1998-06-25 | 東洋ガラス株式会社 | 透明物体中の微小欠陥検出方法 |
AUPQ262299A0 (en) * | 1999-09-02 | 1999-09-23 | Resolve Engineering Pty Ltd | Detection of inclusions in glass |
-
2008
- 2008-08-22 WO PCT/JP2008/065041 patent/WO2009031420A1/ja active Application Filing
- 2008-08-22 JP JP2009531186A patent/JPWO2009031420A1/ja active Pending
- 2008-08-22 CN CN200880104499.3A patent/CN101790679B/zh not_active Expired - Fee Related
-
2013
- 2013-10-18 JP JP2013217159A patent/JP2014044209A/ja active Pending
- 2013-10-18 JP JP2013217158A patent/JP5696984B2/ja not_active Expired - Fee Related
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11242001A (ja) * | 1997-07-17 | 1999-09-07 | Hoya Corp | 透光性物質の不均一性検査方法及びその装置並びに透明基板の選別方法 |
JPH11316197A (ja) * | 1998-05-06 | 1999-11-16 | Matsushita Electric Works Ltd | 平板材の内部検査方法及び装置 |
JP2005300275A (ja) * | 2004-04-08 | 2005-10-27 | Central Glass Co Ltd | 透明板の欠陥検出方法およびその装置 |
JP2006071284A (ja) * | 2004-08-31 | 2006-03-16 | Central Glass Co Ltd | ガラス基板欠陥の表裏識別方法 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010249552A (ja) * | 2009-04-13 | 2010-11-04 | Central Glass Co Ltd | ガラス板の欠陥識別方法および装置 |
WO2012077683A1 (ja) * | 2010-12-09 | 2012-06-14 | 旭硝子株式会社 | ガラスリボン内欠陥測定方法およびガラスリボン内欠陥測定システム |
WO2012077542A1 (ja) * | 2010-12-09 | 2012-06-14 | 旭硝子株式会社 | ガラス基板 |
EP2895847A4 (en) * | 2012-09-14 | 2016-05-25 | Luoyang Landglass Tech Co Ltd | DETECTION SYSTEM BASED ON MODULATION OF A GLASS IMAGE PRODUCED BY STRUCTURED LASER LIGHT IN LINE |
JP2015135266A (ja) * | 2014-01-17 | 2015-07-27 | 旭硝子株式会社 | ガラス板内部の微小異物を検出する方法及びその装置 |
WO2015162303A1 (de) * | 2014-04-25 | 2015-10-29 | Boraident Gmbh | Verfahren und vorrichtung zum erkennen von nickelsulfid-einschlüssen in einer glasplatte |
CN111487191A (zh) * | 2020-04-26 | 2020-08-04 | 山东创策电气科技有限公司 | 基于图像处理的钢化玻璃自爆隐患检测方法及装置 |
CN111721774A (zh) * | 2020-06-23 | 2020-09-29 | 湖南正中制药机械有限公司 | 一种用于自动灯检机的灯检检测方法 |
Also Published As
Publication number | Publication date |
---|---|
JP5696984B2 (ja) | 2015-04-08 |
JP2014006271A (ja) | 2014-01-16 |
CN101790679A (zh) | 2010-07-28 |
CN101790679B (zh) | 2012-05-09 |
JPWO2009031420A1 (ja) | 2010-12-09 |
JP2014044209A (ja) | 2014-03-13 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009031420A1 (ja) | 透明板体内部の微小異物を検出する方法及びその装置 | |
CN103119420B (zh) | 折射率测定装置和折射率测定方法 | |
SG169987A1 (en) | Plane position detecting apparatus, exposure apparatus and device manufacturing method | |
DE602004017349D1 (de) | Faseroptische assay-vorrichtung auf der basis der phasenverschiebungs-interferometrie | |
EP1757962A3 (en) | Illumination system for flat panel display device | |
WO2010010311A3 (fr) | Dispositif optique et procede de mesure de rotation d'un objet | |
WO2005015120A3 (en) | Method and arrangement for focusing detection in an optical measurement and method and arrangement for migitating the effect of surface reflection | |
DE502007000136D1 (de) | Verfahren und Vorrichtung zur Erfassung der Oberflächenform einer teilspiegelnden Oberfläche | |
EP1616524A4 (en) | OPTICAL ELEMENT FOR MEASURING BIOLOGICAL INFORMATION AND THIS USING BIOLOGICAL INFORMATION MEASURING INSTRUMENT | |
JP2006267109A (ja) | 光学レンズの屈折特性を測定するための測定装置 | |
ATE342498T1 (de) | Transmissive optische platte für physische messungen | |
US20190310189A1 (en) | Apparatus and method for determining a refractive index | |
EP0953836A3 (en) | Surface plasmon sensor | |
ATE426146T1 (de) | Verfahren und vorrichtung zur bestimmung der position eines ersten teils relativ zu einem zweiten | |
EP1906171A3 (en) | Detection apparatus, detection method, and optically transparent member | |
WO2009066672A1 (ja) | 干渉計 | |
JP2006267108A (ja) | 光学レンズの屈折特性を測定するための測定装置 | |
EP3044538B1 (en) | Optical surface roughness measurement | |
ATE368839T1 (de) | Vorrichtung und verfahren zur messung der dicke einer transparenten probe | |
TW200712437A (en) | Displacement measuring device and shape inspecting device using the same | |
ATE467114T1 (de) | Streumesser und verfahren zur untersuchung einer oberfläche | |
WO2005022127A3 (de) | Vorrichtung zur vermessung eines flächigen elementes | |
TR200402066T4 (tr) | Kırılma elemanına sahip olan gerçeklik özelliklerinin değerlendirilmesi için cihaz | |
EP2108941A3 (en) | Surface plasmon sensor | |
JP6435737B2 (ja) | 採光部材評価装置及び採光部材評価方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880104499.3 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08829589 Country of ref document: EP Kind code of ref document: A1 |
|
ENP | Entry into the national phase |
Ref document number: 2009531186 Country of ref document: JP Kind code of ref document: A |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08829589 Country of ref document: EP Kind code of ref document: A1 |