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WO2008106928A3 - Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane - Google Patents

Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane Download PDF

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Publication number
WO2008106928A3
WO2008106928A3 PCT/DE2008/000313 DE2008000313W WO2008106928A3 WO 2008106928 A3 WO2008106928 A3 WO 2008106928A3 DE 2008000313 W DE2008000313 W DE 2008000313W WO 2008106928 A3 WO2008106928 A3 WO 2008106928A3
Authority
WO
WIPO (PCT)
Prior art keywords
membranes
membrane
layer
particles
magnetic
Prior art date
Application number
PCT/DE2008/000313
Other languages
German (de)
French (fr)
Other versions
WO2008106928A2 (en
Inventor
Thomas Otto
Andreas Morschhauser
Joerg Nestler
Thomas Gessner
Sebastian Voigt
Original Assignee
Fraunhofer Ges Forschung
Univ Chemnitz Tech
Thomas Otto
Andreas Morschhauser
Joerg Nestler
Thomas Gessner
Sebastian Voigt
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Ges Forschung, Univ Chemnitz Tech, Thomas Otto, Andreas Morschhauser, Joerg Nestler, Thomas Gessner, Sebastian Voigt filed Critical Fraunhofer Ges Forschung
Publication of WO2008106928A2 publication Critical patent/WO2008106928A2/en
Publication of WO2008106928A3 publication Critical patent/WO2008106928A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/00698—Electrical characteristics, e.g. by doping materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/016—Switches characterised by the shape having a bridge fixed on two ends and connected to one or more dimples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/036—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Soft Magnetic Materials (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

The present invention relates to a method for the production of membranes that can be electrically and/or magnetically activated, particularly for switches or pumps. In the method, microparticles and/or nanoparticles (5) having magnetic and/or electric properties are mixed with a matrix material in a flowable state, which has elastic properties after solidification. The matrix material is applied to a substrate as a layer (1), and a distribution of the particles in the layer (1) is selectively modified by means of one or more electric and/or magnetic fields in order to achieve an accumulation (2, 3) of the particles (5) on one or a plurality of locations in the layer (1). The layer (1) is subsequently solidified using the accumulated particles in order to form one or more membranes (16). The invention also relates to a magnetic actuator having such a membrane. The method enables the use of elastic membranes having magnetic, or magnetizable, particles incorporated therein, without having an adverse influence on the elastic properties in certain regions of the membrane.
PCT/DE2008/000313 2007-03-07 2008-02-22 Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane WO2008106928A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007010951 2007-03-07
DE102007010951.4 2007-03-07
DE102007051977A DE102007051977A1 (en) 2007-03-07 2007-10-31 Process for the preparation of electrically and / or magnetically controllable membranes and magnetic actuator with such a membrane
DE102007051977.1 2007-10-31

Publications (2)

Publication Number Publication Date
WO2008106928A2 WO2008106928A2 (en) 2008-09-12
WO2008106928A3 true WO2008106928A3 (en) 2009-01-22

Family

ID=39678107

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE2008/000313 WO2008106928A2 (en) 2007-03-07 2008-02-22 Method for the production of membranes that can be electrically and/or magnetically activated, and magnetic actuator having such a membrane

Country Status (2)

Country Link
DE (1) DE102007051977A1 (en)
WO (1) WO2008106928A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2947813B1 (en) * 2009-07-07 2011-12-16 Centre Nat Rech Scient SYNTHETIC JET GENERATING MICROSYSTEM, MANUFACTURING METHOD AND CORRESPONDING FLOW CONTROL DEVICE.
US9579434B2 (en) * 2010-03-03 2017-02-28 The Secretary Of Atomic Energy, Govt. Of India Flexible magnetic membrane based actuation system and devices involving the same
ITTO20110347A1 (en) 2011-04-20 2012-10-21 Fond Istituto Italiano Di Tecnologia MAGNETIC ACTUATOR WITH NANOCOMPOSITE MEMBRANE
DE102014201898B4 (en) * 2014-02-03 2018-05-17 Universität Kassel Method of making micro objects and micro object
DE102014003357A1 (en) * 2014-03-06 2015-09-10 Robert Bosch Gmbh Process for the preparation of surface-modified silicone layers
DE102014226138A1 (en) 2014-12-16 2016-06-16 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing a device with a three-dimensional magnetic structure
DE102016215617A1 (en) 2016-08-19 2018-02-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for producing a cavity with a porous structure
US20200066963A1 (en) * 2016-12-09 2020-02-27 Koninklijke Philips N.V. Actuator device and method
WO2020068243A1 (en) * 2018-07-02 2020-04-02 Trustees Of Tufts College Systems and methods for a remote control actuator
FI130275B (en) * 2020-06-23 2023-05-31 Teknologian Tutkimuskeskus Vtt Oy A flow device, a flow system, a method for making an actuator magnet on a substrate, and a method for making a flow device
US12060262B2 (en) 2021-04-23 2024-08-13 Otowahr Technology Inc. Electromagnetic microspeaker, its coil module, speaker/coil module array and preparation method thereof

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0650142A1 (en) * 1993-10-22 1995-04-26 Tomoegawa Paper Co. Ltd. Magnetic recording medium and method of manufacture of same
US5472539A (en) * 1994-06-06 1995-12-05 General Electric Company Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components
EP0756272A2 (en) * 1995-07-28 1997-01-29 Eastman Kodak Company Magnetic medium having permanent magnetic feature
EP1398296A2 (en) * 2002-09-06 2004-03-17 C.R.F. Società Consortile per Azioni A method for making three-dimensional structures having nanometric and micrometric dimensions

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0650142A1 (en) * 1993-10-22 1995-04-26 Tomoegawa Paper Co. Ltd. Magnetic recording medium and method of manufacture of same
US5472539A (en) * 1994-06-06 1995-12-05 General Electric Company Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components
EP0756272A2 (en) * 1995-07-28 1997-01-29 Eastman Kodak Company Magnetic medium having permanent magnetic feature
EP1398296A2 (en) * 2002-09-06 2004-03-17 C.R.F. Società Consortile per Azioni A method for making three-dimensional structures having nanometric and micrometric dimensions

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NAGEL J J ET AL: "Magnetically actuated micropumps using an Fe-PDMS composite membrane", PROCEEDINGS OF SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING - SMART STRUCTURES AND MATERIALS 2006 - SMART ELECTRONICS, MEMS, BIOMEMS, AND NANOTECHNOLOGY 2006 SPIE US, vol. 6172, 2006, XP007906232 *

Also Published As

Publication number Publication date
WO2008106928A2 (en) 2008-09-12
DE102007051977A1 (en) 2008-09-11

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