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WO2008000573A2 - Revêtement résistant à l'usure et son procédé de fabrication - Google Patents

Revêtement résistant à l'usure et son procédé de fabrication Download PDF

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Publication number
WO2008000573A2
WO2008000573A2 PCT/EP2007/055229 EP2007055229W WO2008000573A2 WO 2008000573 A2 WO2008000573 A2 WO 2008000573A2 EP 2007055229 W EP2007055229 W EP 2007055229W WO 2008000573 A2 WO2008000573 A2 WO 2008000573A2
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WO
WIPO (PCT)
Prior art keywords
coating according
layer
coating
hydrogen
following
Prior art date
Application number
PCT/EP2007/055229
Other languages
German (de)
English (en)
Other versions
WO2008000573A3 (fr
Inventor
Frank Himsel
Tim Matthias Hosenfeldt
Yashar Musayev
Roland Tap
Daniel Geist
Original Assignee
Schaeffler Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schaeffler Kg filed Critical Schaeffler Kg
Priority to JP2009517069A priority Critical patent/JP5669390B2/ja
Priority to CN2007800246584A priority patent/CN101479401B/zh
Publication of WO2008000573A2 publication Critical patent/WO2008000573A2/fr
Publication of WO2008000573A3 publication Critical patent/WO2008000573A3/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/046—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with at least one amorphous inorganic material layer, e.g. DLC, a-C:H, a-C:Me, the layer being doped or not
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/048—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material with layers graded in composition or physical properties
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L1/00—Valve-gear or valve arrangements, e.g. lift-valve gear
    • F01L1/02—Valve drive
    • F01L1/04—Valve drive by means of cams, camshafts, cam discs, eccentrics or the like
    • F01L1/047—Camshafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L1/00—Valve-gear or valve arrangements, e.g. lift-valve gear
    • F01L1/12—Transmitting gear between valve drive and valve
    • F01L1/14—Tappets; Push rods
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L1/00—Valve-gear or valve arrangements, e.g. lift-valve gear
    • F01L1/12—Transmitting gear between valve drive and valve
    • F01L1/14—Tappets; Push rods
    • F01L1/143—Tappets; Push rods for use with overhead camshafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L1/00—Valve-gear or valve arrangements, e.g. lift-valve gear
    • F01L1/12—Transmitting gear between valve drive and valve
    • F01L1/14—Tappets; Push rods
    • F01L1/16—Silencing impact; Reducing wear
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L1/00—Valve-gear or valve arrangements, e.g. lift-valve gear
    • F01L1/12—Transmitting gear between valve drive and valve
    • F01L1/18—Rocking arms or levers
    • F01L1/185—Overhead end-pivot rocking arms
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L1/00—Valve-gear or valve arrangements, e.g. lift-valve gear
    • F01L1/20—Adjusting or compensating clearance
    • F01L1/22—Adjusting or compensating clearance automatically, e.g. mechanically
    • F01L1/24—Adjusting or compensating clearance automatically, e.g. mechanically by fluid means, e.g. hydraulically
    • F01L1/2405—Adjusting or compensating clearance automatically, e.g. mechanically by fluid means, e.g. hydraulically by means of a hydraulic adjusting device located between the cylinder head and rocker arm
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L2301/00—Using particular materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L2303/00—Manufacturing of components used in valve arrangements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01L—CYCLICALLY OPERATING VALVES FOR MACHINES OR ENGINES
    • F01L2305/00—Valve arrangements comprising rollers

Definitions

  • the invention is in the field of tribology and is concerned with the coating of machine parts to reduce friction losses and wear.
  • the present invention is basically applicable to many different types of machine parts that are subject to abrasive wear.
  • a particularly advantageous example is the use in parts of internal combustion engines, in particular in valve train components such as tappets used.
  • an application for industrial use such as in bearings and linear guides is also conceivable.
  • cam follower devices are incorporated, for example, in reciprocating piston engine engines having air intake and exhaust valves that open and close in phase with, or in synchronism with, the rotation of the crankshaft.
  • a valve drive mechanism is used to transmit the movement of the camshaft mounted cam to the valves as the camshaft rotates with the crankshaft of the engine.
  • the cam of the camshaft is in frictional contact with a running surface of the associated tappet.
  • valve train components such as, for example, cup and pump tappets
  • valve train components are subject to increasing demands.
  • the reasons for the need for increased wear resistance lie in the ever-increasing loads and stresses of the tribological system, consisting of control cams and tappets.
  • the causes for this are new engine concepts, such as gasoline and diesel direct injection systems, with constantly increasing injection pressures, an increasing proportion of abrasive particles in the lubricant, lack of oil supply to the friction partners, which results in an increased proportion of mixed friction, and Increasing use of tribologically unfavorable steel cams for cost and mass reduction.
  • An important contribution to the conservation of resources is the reduction of friction losses in the valve train, resulting in fuel savings while increasing the life of the entire valve train. In order to effectively reduce the friction losses, it is necessary to reduce the friction torque over a wide speed range.
  • tappets for the valve control of an internal combustion engine as a light metal plunger, which body has a tappet body and a seated on the contact surface for the control cam of the valve control steel plate with a hardened surface.
  • a disadvantage of this approach has turned out to be the fact that such bucket tappets are exposed in operation relatively large temperature fluctuations of -30 ° C at cold start up to about 130 ° C during operation of an internal combustion engine.
  • the problem here is the different thermal expansion of the materials used.
  • the steel plate inserted as an insert into a light-metal ram has good wear properties, it tends to detach under corresponding thermal stress. The thermal capacity is therefore limited.
  • Another technical disadvantage is that the space is lost in the form of a relatively wide edge as a functional surface or as a cam contact surface, which is contacted by the control cam of a valve control.
  • wear protection layers which, depending on the application, preferably consist of electroplated metals or metals and / or metal alloys applied with a thermal spraying process, optionally with additions of hard material.
  • thermally sprayed metal layers have a relatively weak strength
  • it is therefore known to reflow the metal layers after application for example by plasma jets, laser beams, electron beams or by an arc in order to improve the strength in that the spray materials mix and alloy in a molten state with the base material melted down simultaneously in the surface area.
  • the thermally sprayed and thus rough coatings must be mechanically reworked to have good trochological properties.
  • inhomogeneous zones of different composition arise in which both the base material and the layer material can predominate.
  • the layer wear will be too high, and with a low base material content there will be a risk of macrocracking in the case of different layer combinations, so that such layers can not be used. In such a case Friction stresses can cause undesirable adhesive wear on the layers.
  • a reduction in friction in the valve train is a necessary contribution to saving fuel and conserving resources.
  • This goal can be achieved by reducing the field of solid and mixed friction and thus increasing the field of fluid friction with complete separation of materials. This is achieved by optimizing the overall roughness of the tribological system consisting of bucket tappets and camshaft.
  • the surface In order to obtain the necessary optimal surface structure of the tappet over the entire life, it is necessary to make the surface so that it has a high wear resistance, a low adhesive tendency to the counter body and low reactivity to the environment. Furthermore, the surface may preferably not contain any abrasive particles such as droplets.
  • the tappets made of iron-carbon alloys do not achieve the requisite wear resistances and tribologically favorable surface conditions. If, for example, nitride layers are treated mechanically, in particular by (fine) grinding, lapping, polishing, blasting, etc., in addition to the surface structure, the chemical composition and reactivity of the surface are also changed. On the one hand, these changes are subject to a great deal of variation, which means that no consistent quality can be achieved. On the other hand, topographically affine surfaces have less favorable tribological properties and tend to adhere to the counterpart body.
  • the hard droplets lead to abrasive wear of the counter body or at least to a random polishing of the counter body, which results in unfavorable consequences which are not to be foreseen.
  • the droplets break during operation from the layer, resulting in a layer damage and free, abrasive particles.
  • the object of the present invention is to provide a coating and a production method for such a coating which eliminate the abovementioned disadvantages and in particular reduce the frictional torque over the entire area of use and increase the service life of the coated machine part and of the counterpart body.
  • this object is achieved by a wear-resistant coating with the features of patent claim 1 and by a method having the features of patent claim 21.
  • the functional layer is based on hydrogen-containing carbon is, and in cross-section areas of different consistency, the extent of which in at least one direction 20 nm, better still 10nm, below, a nanostructured layer is formed, in which the areas of different consistency, that is, for example, from different materials, different modification, can fulfill different tasks with different proportions of material or even with different crystal orientation, which are very difficult to meet by a single substance of homogeneous nature. Due to the nanostructuring, however, the friction partner in the functional layer is confronted with different areas at the same time, for example to reduce the sliding friction and to generate the necessary material hardness.
  • the functional layer is formed at least partially by layers which are essentially parallel to the surface and which form the regions of different consistency.
  • a hybrid surface is created in which different layers are exposed at different points.
  • the surface of the functional layer thus offers the friction partner different surface areas with different hardness, different friction properties, adhesion tendency and different toughness.
  • nanostructuring is additionally formed by the inhomogeneities, a high crack resistance to chipping and peeling of the layer. It can be achieved by suitable design and arrangement of the layers also increased corrosion resistance or increased or decreased wettability with lubricants. Measurements have shown that by the invention the reduction of friction moments by 30% and hardnesses between 15 and 70 GP can be achieved.
  • one or more of the layers are advantageously thinner than 10 nm.
  • the number of layers is typically greater than 2 and may be up to several tens, in particular more than 50 or more than 100, so that the total thickness of the layer is up to 10 May be micrometer.
  • Adjacent layers each have a different consistency in that, for example, at least two adjacent layers each have different of the following three consistencies: amorphous, metal-free, hydrogen-containing carbon, amorphous, metal-containing, hydrogen-containing carbon, amorphous, at least one nonmetal-containing, Hydrogen-containing carbon. In principle, process-adjusted impurities of less than 1% may be contained.
  • non-metals containing hydrogen-containing carbon typically has the property to reduce frictional forces and, for example, if fluorine, silicon or oxygen is stored, also the property of favoring a low wettability with lubricants. As a result, a thinner oil film is favored, which brings advantages, in particular in the case of rapid relative movements of the friction partners, that is, for example, in valve trains.
  • the metal-containing amorphous, hydrogen-containing hydrocarbons typically have the properties of hardness and abrasion resistance.
  • Adjacent layers may also differ only in that they are doped with different materials or that the extent of doping is different.
  • the doping can be used specifically to produce certain mechanical properties, the properties thus produced also depend on the nature and size of the doping atoms.
  • the nature of the resulting crystalline structure depends on the amount of doping atoms insofar as crystalline transformations take place above a certain degree of doping or mixed phases arise from different modifications.
  • even adjacent layers that differ only by the type or the extent of doping differ have completely different mechanical or tribological properties.
  • adjacent layers can also differ by the percentage of hydrogen in the amorphous carbon.
  • the hydrogen content in the carbon also strongly influences the fundamental tribological properties. Hydrogen contents below 20%, in particular between 5% and 20%, tend to make the hydrogen-containing amorphous carbon harder and are advantageous for the embodiment according to the invention.
  • the percentage ratio of sp 3 - and sp 2 -hybhdrawen carbon can distinguish two adjacent layers from each other. This concerns the carbon which is present in diamond and graphite modification which, as is known, have different mechanical properties. Accordingly, the thus different adjacent layers also have different tribological properties. It is particularly advantageous if the proportion of sp 3 " hybridized carbon atoms is greater than 50% of the carbon atoms.
  • At least one layer at least one of the parameters: hydrogen content, proportion of the sp 3 -hybridized C atoms, doping perpendicular to the surface of the coating has a gradient.
  • the qualities of the surface can be permanently adjusted for a wide variety of tribological requirements by the proportion of each exposed at the surface areas with high hardness, high toughness or effective friction Reduction predominates or is less weighted.
  • the invention enables an individual adjustment to customer-specific requirements.
  • the regions are at least partially formed by nanoparticles.
  • These may for example be formed from one or more of the materials: nitride, boride, carbide, silicide.
  • chromium nitride, titanium nitride, silicon nitride, silicon carbide or titanium carbide are conceivable.
  • Such nanoparticles can be co-deposited with, for example, in the course of a deposition process together with or before or after the deposition of corresponding hydrogen-containing carbon layers.
  • the corresponding necessary substances are temporarily brought into the gas phase in the separation device, either by sputtering or other known methods and by the process parameters, the crystallization of the particles is promoted. This results in nanodisperse, self-organized regions, either of different crystallites or crystallites of the same structure with different orientations.
  • nitride formers such as chromium, titanium and other unstable nitride-forming elements such as copper may be deposited together, wherein, for example, when copper and chromium nitride, the copper content compared to the chromium content may be below 2%. Chromium nitride then forms in a copper matrix as a nanocrystal.
  • titanium nitride and a very low boron content it also being possible to use titanium carbide instead of titanium nitride and, in any case, to crystallize the corresponding nitride or carbide in a quasi-amorphous boron matrix.
  • the corresponding nanoparticles can either be embedded in an amorphous layer consisting of hydrogen-containing carbon or form a nanoparticle layer between the carbon layers.
  • the layer formed is thin or the particles are finely distributed, so that at the surface of the functional layer in each case the exposed areas of the nanoparticles occupy only part of the surface and thus other parts through areas of different consistency with other mechanical or tribological properties be occupied.
  • the coating below the functional layer has at least one adhesion-promoting layer which consists of chromium, tungsten or titanium or of borides, carbides or nitrides of the transition metals.
  • an adhesion promoter stabilizes the overall structure of the coated machine part with the functional layer and in particular prevents detachment of the functional layer.
  • Suitable materials suitable for the machine parts are conventional readily processable and cost-effective materials (16Mn Cr5, C45, 100 Cr6, 31 Cr Mo V9, 80 Cr2 and so forth).
  • As a friction partner iron / carbon alloys are conceivable in the sense of lightweight construction for weight saving.
  • a support layer below the functional layer of a metal-containing or non-metal-containing, hydrogen-containing carbon layer which contains one or more of the components tungsten, tantalum, chromium, vanadium, hafnium, titanium or nickel on the one hand or silicon, oxygen, fluorine, nitrogen on the other hand contains.
  • Such a supporting layer has the task of absorbing large mechanical force loads acting on the functional layer, so that no excessive ge deformation of the functional layer occurs, which could lead to the detachment of substrates or destruction of the functional layer by cracking and chipping.
  • the intermediate layer is extremely strong, with neither low frictional resistance nor wear resistance. Therefore, the support layer can be designed specifically so that it has a low compliance or is adjusted in the compliance such that it creates an optimal transition between the functional layer and the actual machine part.
  • the invention further relates to a method for producing a coating according to claim 1 or one of the following, wherein in a deposition process for applying the areas to the surface, the process parameters are changed at successive times such that the size of the areas formed by deposition in cross section the coating falls below 20 nm. It is particularly advantageous if the size of the regions falls below 10 nm.
  • At least one of the parameters pressure, temperature, admixture of dopants, hydrogen content, rotational speed of carbon content can be changed abruptly or continuously during the production of the functional layer.
  • a process temperature of 250 ° C. is advantageously not exceeded because the hardening of the base material of the machine part is thus retained and reworking, for example by inductive hardening, does not have to take place.
  • the deposition takes place in the context of known PVD (physical vapor diposition) and (PA) CVD (plasma assisted chemical vapor diposition) method.
  • a starting material such as graphite
  • a jet of high-energy carbon ions from the Imitating graphite and accelerated in the direction of the surface to be coated in a field In a PVD process, a starting material, such as graphite, heated so that a jet of high-energy carbon ions from the Imitating graphite and accelerated in the direction of the surface to be coated in a field.
  • a gas mixture is introduced into the process chamber with the aid of a plasma, in which the material parts to be coated are located.
  • the (PA) CVD process is a further development of the CVD process and combines the advantages of the CVO process (unrated process) and the PVD process (low temperatures).
  • the layer deposition takes place by chemical reaction from the gas phase at temperatures of less than 200 ° C with a targeted plasma support.
  • the structure of the resulting coating is determined.
  • certain parameter limits there are also sudden changes in the consistency of the deposited layer, since certain, in particular, crystalline configurations can only be formed up to certain material fractions of individual substances. If these components are not present, then another crystal or another modification or a mixed phase is formed.
  • the invention also relates to machine parts which are provided with the coating according to the invention, in particular to a valve tappet for a cam-actuatable valve of an internal combustion engine.
  • Figure 1 is a front view of a friction pair, consisting of Tassenstö- and camshaft for the operation of a valve of an internal combustion engine;
  • Figure 2 is a perspective view of the tappet of Figure 1;
  • Figure 3 is a perspective view of a hydraulic support element, which is connected via a rolling bearing component with a finger lever in connection;
  • Figure 4 is a schematic cross-sectional view of a machine part with wear-resistant coating according to an embodiment of the present invention.
  • FIG. 5 representation of a functional layer.
  • FIG. 1 illustrates a friction pairing consisting of a tappet 5 with a cam contact surface 50 and a cup skirt 51 as well as a cam 6.
  • the tappet 5 is shown in greater detail in FIG. 2 in a perspective view.
  • the tappet 5 is generally connected for machine parts in internal combustion engines with the shaft 7 of a valve which opens or closes the valve by moving the cam surface against the cam contact surface 50 of the tappet 5.
  • valve train components such as, for example, cup and pump tappets
  • wear resistance and resource conservation in particular with regard to contact area 50.
  • FIG. 4 illustrates a schematic cross-sectional view of a wear-resistant coating for a machine part 1, for example for a bucket tappet 5, according to a preferred embodiment of the present invention
  • the tappet 5 is coated with a wear-resistant coating according to the invention for a reduction of the coefficient of friction and for an increase of the wear resistance in the region of the cam contact surface 50 or, if required, in the region of the cam contact surface 50 and the cup 51.
  • a wear-resistant coating for a reduction of the coefficient of friction and for an increase of the wear resistance in the region of the cam contact surface 50 or, if required, in the region of the cam contact surface 50 and the cup 51.
  • a partial coating of the cup 51 can take place.
  • the area 2 to be coated i. in the present case the cam contact surface 50 of the tappet 5, is preferably case hardened or carbonized and tempered before coating.
  • the base body in the present case, the cam contact surface 50 of the tappet 5, which advantageously consists of a cost-effective steel material, such as 16MnCr5, C45, 100Cr6, 31 CrMoV9, 80Cr2 or the like, is first coated with an adhesion-promoting layer 3 according to the present embodiment.
  • the adhesion-promoting layer 3 may, for example, each consist of a metal-containing carbon, for example a compound of tungsten and carbon, but also of metallic materials (eg Cr, Ti), as well as borides, carbides, nitrides and suicides of the transition metals.
  • An additional support layer above the primer layer may consist of an amorphous carbon containing a metal or non-metal such as W, Ta, Cr, V, Hf, Ti, Ni or Si, O, F, N and hydrogen.
  • the adhesion-promoting and the supporting layer can be used in connection with a heat treatment, for example case-hardening, Carbonitriding, nitrocarburizing, by a thermochemical process, for example nitriding, boriding, by a galvanic process, for example by applying a chromium-containing layer, or by a PVD process, for example, application of Me-C, carbides and nitrides of the transition metals, are formed.
  • the support layer is intended to increase the fatigue strength of the overall coating, i. plastic deformation, cracking, growth and fractures of the layer system can be prevented. Such fatigue operations can be caused by the load on the cam and the material stress of the bucket tappet 5 induced therefrom as well as by different degrees of hardness, moduli of elasticity, deformability of the individual layers or of the main body and of the wear-resistant coating.
  • a formation of the layer 3 as a support layer 3 either alone or in combination with a suitable adhesion-promoting layer is preferable.
  • a wear-resistant coating 4 is formed over the backing and / or the primer layer 3.
  • the functional layer 4 is shown there as schematically constructed from many individual nanosheets, wherein the size ratios are reproduced only schematically and not to scale.
  • the functional layer is shown to scale greatly enlarged.
  • the variants are shown in the left half of the figure, which have different superimposed less than 10 nm thick layers, each consisting of a hydrogen-containing amorphous carbon with different consistency, while on the right side of the figure a variant with additional nanodisperse particles is shown.
  • the scale is widely spaced because of the small thickness of the nanosheets in the direction perpendicular to the surface.
  • the wavy line at the Surface represents the real surface that self-adjusts due to irregularities in manufacturing or after use.
  • the waviness is in reality not as great as shown but appears exaggerated by the uniaxial magnification of the scale perpendicular to the friction surface. Nevertheless, the effect achieved with the invention can be explained on the basis of this illustration.
  • the individual layers 60, 61, 62 are hatched differently at least in the upper area toward the surface and can therefore be distinguished.
  • the individual layers differ at least partially in relation to the consistency, that is to say the hydrogen content, the type and amount of added, doped substances or crystal modifications and orientations. At the same time, some or many of the layers are open at the surface.
  • nanoparticles 63, 64 are introduced into the carbon matrix.
  • the corresponding nanoparticles which may be formed, for example, as borides, carbides or nitrides, form where they come to the surface, so for example in the case of the particles 63, 64 hard and wear-resistant areas and thus also prevent the removal of the surrounding material the carbon matrix. This, in turn, contributes somewhat to a reduction in the coefficient of friction, depending on the composition on the surface, for example. If something is removed from the surface of the functional layer in the course of material wear, new nanoparticles are exposed, which then again perform the stated task of ensuring hardness and wear resistance.
  • the nanoparticles can also be concentrated in different layers. This can be offered, for example, in the context of the deposition process by introducing between the deposition of the remaining layers during the PVD or PACVD process certain metal nitrides, borides or carbides which are deposited in mixing ratios which automatically form different phases lead. This then leads to the formation of hard nanoparticles in the relevant layer.
  • the described invention provides a novel coating which, by selection of the particles and the individual nanolayers, allows adaptation to the present tribological requirements in a very accurate manner, whereby macro-range parameters can be set by the mixture of regions with different surface textures can be achieved with any known homogeneous material.
  • the invention also provides a simple production process for such a functional layer, which does not require any constructive changes compared with the production means used hitherto in PVD and (PA) CVD coating.
  • the maximum coating temperature is preferably 250 ° C, so that in a coating process, the base material is not tempered.
  • FIG. 3 illustrates a perspective view of a hydraulic support element 8 which has a piston 9 and a housing 10.
  • the hydraulic support element 8 is coupled to a drag lever 11, wherein the drag lever 1 1 is pivotally mounted via a rolling bearing 12.
  • the piston 9 has a contact region 90 between the piston 9 and the drag lever 11.
  • the piston 9 has a contact region 91 between the piston 9 and the housing 10.
  • the contact region 90 is likewise provided with a nanostructured functional layer 4 according to the invention.
  • the contact region 91 between the piston 9 and the housing 10 can also be coated with such a coating 3, 4 depending on the application and manufacturing technology.
  • the overall service life of the illustrated tribological system is increased, as a result of which a failure of the individual machine parts during operation is reduced and thus overall costs can be saved.
  • components of the rolling bearing 12 for example, the rolling elements, the inner and outer rings of the rolling bearing 12, the rolling bearing cages, the axial discs or the like also to increase the wear resistance and friction reduction with the functional layer 4 according to the invention with the interposition of, for example, a support and / or primer layer 3 are coated.
  • the layer system described above is also suitable for other structural and functional units, such as valve stems or valve stem supports, supporting and inserting elements, roller bearing components, release bearings, piston pins, bearing bushings, control pistons for, for example, injection nozzles in the engine area, linear guides and other mechanical and tribological devices. highly stressed parts suitable.
  • the functional layer 4 can also be deposited directly on the main body of the machine part to be coated, without a support layer 3 or adhesion-promoting layer 3 being applied therebetween.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Lubricants (AREA)
  • Chemical Vapour Deposition (AREA)
  • Laminated Bodies (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

L'invention concerne un revêtement résistant à l'usure destiné à une pièce de machine exposée à une usure par friction. Ledit revêtement comporte une couche fonctionnelle (4) à base de carbone, contenant de l'hydrogène, cette couche étant nanostructurée, par exemple au moyen de diverses couches consécutives (60, 61, 62) présentant des épaisseurs de l'ordre du nanomètre, ou contenant des nanoparticules (63, 64) intégrées aux couches.
PCT/EP2007/055229 2006-06-27 2007-05-30 Revêtement résistant à l'usure et son procédé de fabrication WO2008000573A2 (fr)

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JP2009517069A JP5669390B2 (ja) 2006-06-27 2007-05-30 耐摩耗性コーティングならびにこのための製造法
CN2007800246584A CN101479401B (zh) 2006-06-27 2007-05-30 耐磨覆层及其制造方法

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DE102006029415.7A DE102006029415B4 (de) 2006-06-27 2006-06-27 Verschleißfeste Beschichtung sowie Herstellverfahren hierfür

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DE102011076410A1 (de) * 2011-05-24 2012-11-29 Schaeffler Technologies AG & Co. KG Maschinenelement
CN102865220A (zh) * 2012-09-28 2013-01-09 武汉大学 氮化碳基纳米复合涂层发动机燃油泵柱塞及其制备方法
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US10131988B2 (en) 2009-11-02 2018-11-20 Federal-Mogul Burscheid Gmbh Sliding element, in particular piston ring, and combination of a sliding element with a mating running element
US20200040996A1 (en) * 2017-04-12 2020-02-06 Mahle Metal Leve S/A Piston ring for internal combustion engines
US11143302B2 (en) * 2016-06-30 2021-10-12 Mahle Metal Leve S/A Sliding element for internal combustion engines
US11198932B2 (en) 2017-06-07 2021-12-14 Schaeffler Technologies AG & Co. KG Method for producing a sliding surface

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WO2009062877A3 (fr) * 2007-11-14 2009-11-26 Schaeffler Kg Revêtement résistant à la corrosion et procédé d'élaboration correspondant
EP2264217A1 (fr) * 2007-11-14 2010-12-22 Schaeffler Technologies AG & Co. KG Revêtement résistante à la corrosion
US10131988B2 (en) 2009-11-02 2018-11-20 Federal-Mogul Burscheid Gmbh Sliding element, in particular piston ring, and combination of a sliding element with a mating running element
DE102011076410A1 (de) * 2011-05-24 2012-11-29 Schaeffler Technologies AG & Co. KG Maschinenelement
CN102865220A (zh) * 2012-09-28 2013-01-09 武汉大学 氮化碳基纳米复合涂层发动机燃油泵柱塞及其制备方法
DE102016206838A1 (de) * 2016-04-22 2017-10-26 Schaeffler Technologies AG & Co. KG Schlepphebel für eine Brennkraftmaschine
US11143302B2 (en) * 2016-06-30 2021-10-12 Mahle Metal Leve S/A Sliding element for internal combustion engines
US20200040996A1 (en) * 2017-04-12 2020-02-06 Mahle Metal Leve S/A Piston ring for internal combustion engines
US10995857B2 (en) * 2017-04-12 2021-05-04 Mahle International Gmbh Piston ring for internal combustion engines
US11198932B2 (en) 2017-06-07 2021-12-14 Schaeffler Technologies AG & Co. KG Method for producing a sliding surface

Also Published As

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WO2008000573A3 (fr) 2008-04-24
JP5669390B2 (ja) 2015-02-12
DE102006029415A1 (de) 2008-01-03
CN101479401B (zh) 2013-05-08
JP2009542902A (ja) 2009-12-03
CN101479401A (zh) 2009-07-08
DE102006029415B4 (de) 2023-07-06

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