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WO2008128849A1 - Procédé d'application d'un revêtement résistant à l'usure - Google Patents

Procédé d'application d'un revêtement résistant à l'usure Download PDF

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Publication number
WO2008128849A1
WO2008128849A1 PCT/EP2008/053679 EP2008053679W WO2008128849A1 WO 2008128849 A1 WO2008128849 A1 WO 2008128849A1 EP 2008053679 W EP2008053679 W EP 2008053679W WO 2008128849 A1 WO2008128849 A1 WO 2008128849A1
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WO
WIPO (PCT)
Prior art keywords
plasma
layer
coating
upper layer
layers
Prior art date
Application number
PCT/EP2008/053679
Other languages
German (de)
English (en)
Inventor
Tim Matthias Hosenfeldt
Yashar Musayev
Original Assignee
Schaeffler Kg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Schaeffler Kg filed Critical Schaeffler Kg
Priority to EP08735536A priority Critical patent/EP2140039A1/fr
Publication of WO2008128849A1 publication Critical patent/WO2008128849A1/fr

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
    • C23C16/515—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using pulsed discharges

Definitions

  • the invention is in the field of tribology and deals with a method for coating machine parts to reduce friction losses and wear.
  • the present invention is basically applicable to many different types of machine parts that are subject to abrasive wear.
  • a particularly advantageous example is the use in parts of internal combustion engines, in particular in valve train components such as tappets used.
  • an application in industrial applications such as in rolling bearings and linear guides and hydraulic support components is also conceivable.
  • some of the requirements may be met by coatings of a specific nature, such as hardness or low friction.
  • coatings of a specific nature such as hardness or low friction.
  • other properties of the tribological system regularly suffer.
  • cam follower devices are incorporated, for example, in reciprocating piston engine engines having air intake and exhaust valves which open and close in phase with, or in synchronism with, the rotation of the crankshaft.
  • a valve drive mechanism is used to transmit the movement of the camshaft mounted cam to the valves as the camshaft rotates with the crankshaft of the engine. In this case, the cam of the camshaft comes into frictional contact with a running surface of the associated tappet.
  • valve train components such as, for example, cup and pump tappets
  • valve train components are subject to increasing demands.
  • the reasons for the necessity of increased wear resistance lie in the ever-increasing loads and stresses of the tribological system, consisting of control cams and tappets.
  • the reasons for this are new engine concepts, such as gasoline and diesel direct injection systems, with constantly increasing injection pressures, an increasing proportion of abrasive particles in the lubricant, lack of oil supply to the friction partners, which results in an increased proportion of mixed friction, and increasing use of tribologically unfavorable steel cams for cost and mass reduction.
  • An important contribution to the conservation of resources is the reduction of friction losses in the valve train, resulting in fuel savings while increasing the life of the entire valve train. In order to effectively reduce the friction losses, it is necessary to reduce the friction torque over a wide speed range.
  • tappets for the valve control of an internal combustion engine as a light metal tappet, which has a plunger base body and an inserted at the contact surface for the control cam of the valve control steel plate with a hardened surface.
  • a disadvantage of this approach has been found to be the fact that such tappets in operation relatively large temperature fluctuations of -30 0 C. are exposed during cold start up to about 130 0 C during operation of an internal combustion engine.
  • the problem here is the different thermal expansion of the materials used.
  • the steel plate inserted as an insert into a light metal ram has good wear properties, it tends to detach with corresponding thermal stress. The thermal capacity is therefore limited.
  • Another technical disadvantage is that the space is lost in the form of a relatively wide edge as a functional surface or as a cam contact surface, which is contacted by the control cam of a valve control.
  • wear protection layers which, depending on the application, preferably consist of electroplated metals or of metals and / or metal alloys applied optionally with additions of hard material in a thermal spraying process.
  • thermally sprayed metal layers have a relatively weak strength
  • plasma jets laser beams
  • electron beams or arc
  • inhomogeneous zones of different composition arise in which both the base material and the layer material can predominate. If the base material content is too high, then the layer wear will be too high, and with a low base material content there will be a risk of macrocracking in the case of different layer combinations, so that such layers can not be used. In such a case, frictional stresses can cause undesirable adhesive wear on the layers.
  • ASP 23 Hard metals and high-speed steels (ASP 23) are known from the state of the art as coating materials, but in addition to an unsatisfactory coefficient of friction and unsatisfactory wear resistance, they additionally have a disadvantageously high mass.
  • the surface In order to obtain the required low roughness of the tappet over the entire life, it is necessary to design the surface so that it has a high wear resistance, a low adhesive tendency to the counter body and low reactivity to the environment. Furthermore, the surface may preferably not contain any abrasive particles such as droplets.
  • the tappets made of iron-carbon alloys do not achieve the necessary wear resistance and tribologically favorable surface conditions. If, for example, nitride layers are treated mechanically, in particular by (fine) grinding, lapping, polishing, blasting, etc., in addition to the surface structure, the chemical composition and reactivity of the surface are also changed. On the one hand, these changes are subject to wide variations, which means that no consistent quality can be achieved. On the other hand, topographically affine surfaces have less favorable tribological properties and tend to adhere to the counterpart body. Furthermore, residual stresses in the near-surface areas are induced by grinding and polishing processes, which add up to the already existing high compressive stresses of the hard material layer.
  • the induced dislocations and the ruptured droplets result in voids and microcracks, thus reducing the local fatigue strength of the layer in cup tappets and decreasing the adhesive strength to potential spalling during post-processing of the layer.
  • the hard droplets lead to abrasive wear of the counter-body or at least to random polishing of the counter-body, which results in unfavorable consequences.
  • the droplets break during operation from the layer, resulting in a layer damage and free, abrasive particles.
  • DE 102004043550 A1 discloses a constellation in which the wear-resistant coating consists of at least one nanocrystalline functional layer comprising at least two CrN x phases for reducing friction and for increasing the wear resistance of the predetermined surface of the machine part.
  • this coating does not meet all tribological requirements in an ideal way.
  • DE 102005 029 360 A1 discloses a method for plasma treatment, in particular also for plasma coating of a component under approximately atmospheric pressure, in which a CVD coating can be applied by means of suitable precursors using a high voltage of a few KV.
  • a method for applying chemically functionalized surfaces to functional elements is known from DE 10 2004 057 155 A1, whereby the plasma-assisted coating with precursors, such as acrylic acid, allylamine, diamino cyclohexane, and the resulting functionalizations of the surface are discussed in particular. Further, the document relates to the plasma polymerization.
  • DE 10 2005 034 764 A1 relates to a process for plasma polymerization for the production of fluorocarbon polymer layers. There is a low-pressure high-frequency plasma at pressures between 0.03 mbar and 1 mbar applied at frequencies in the MHz range.
  • a device for plasma-assisted carbon deposition is known from DE 10 2004 029 526, whereby a spatially distributed arrangement of base points for an arc is sought by a correspondingly optimized design of ignition devices for the plasma.
  • a coating of a carbon in a diamond-like structure is known for ball bearings in principle in order to improve the overall friction properties and in particular the dry-running properties.
  • EP 454616 discloses a rolling bearing which is partially coated with a chemically deposited diamond material in order to improve the dry running properties, to increase the load capacity and the service life.
  • DE 69812389 T2 a coating of sp3 and sp2 hybridized carbon compounds, which contains 5 to 25% silicon, is known for rolling element bearings (cf. JP06341445A).
  • the present invention has for its object to provide a method for applying a coating that eliminates the above-mentioned disadvantages, in particular simple and inexpensive to apply and leads to coated components that low friction with a long service life of the respective component and also connect the opposite body.
  • the coating process should be possible at the lowest possible temperatures.
  • the basic idea is to use a direct current (DC) plasma-assisted CVD coating process, both for an undercoat layer to be applied, which typically contains a carbide, a boride or a nitride of a transition metal, as well as for a layer above it Upper layer containing amorphous carbon and / or hydrocarbons.
  • DC direct current
  • the Plasma Assisted CVD (PACVD) process developed out of a desire to combine the advantages of both processes.
  • This substrates with complex geometries in three dimensions at temperatures of 400 - 500 0 C are coated with a low technical expenditure vacuum at pressures in the range mbar-.
  • the known plasma-assisted CVD processes no longer use purely thermal energy to activate the chemical reactions, but instead activate the process by means of a plasma in the reactor.
  • This targeted energy input is realized, for example, by:
  • Pulsed or unpulsed DC plasmas either unipolar or bipolar, RF plasmas, low- or high-frequency, microwave plasmas acting directly or indirectly on the surface, as well as laser-induced plasmas or UV excitation.
  • the method is suitable for applying various successive layers Layers with the same process, in the same coating chamber and with the same device.
  • halogen-containing precursors conventionally used in CVD processes, ie starting materials which are introduced into the plasma and form the basis for the substances introduced into the coating, generate halogens or halogen compounds during the process, which more or less depend on the experimental parameters the layers are incorporated. These halogen corporations can cause undesirable effects.
  • a low process temperature leads to increasing chlorine incorporation and higher wear of the coatings.
  • steels with low tempering temperatures and light metals in automotive engine construction requires due to the low wear resistance and high friction of the materials used a tailor-made coating of the component surfaces at the lowest possible temperatures, particularly advantageous below 180 0 C.
  • nitrides or borides of About - serve transition metals, such as hard Ti (C, N) layers can be prepared from organometallic precursors at temperatures below 160 0 C partially.
  • Organometallic compounds can be used particularly advantageously because of the lower binding energy of the metal-carbon or metal-heteroatom-carbon bond at low temperatures as a precursor in the PACVD process. These molecules have a high reactivity, so that low substrate temperatures are sufficient for the formation of a CVD layer.
  • the carbon or hydrocarbon layers can also be deposited from these or similar precursors (eg methane). It should be noted that the coating of a substrate exclusively with a carbon or hydrocarbon layer in the pulsed DC plasma method with an organometallic precursor is conceivable.
  • Amorphous hydrocarbon layers are characterized by a low coefficient of friction, in particular against steel, high hardness and wear resistance, and a high chemical inertness.
  • Typical fields of application are tribological systems in mechanical engineering, such as plain bearings, rolling bearings, shafts, axles, gears, guides and forming tools.
  • Hydrocarbon layers can be differentiated by their chemical composition into pure amorphous hydrocarbon layers (DLC, a-C: H), modified amorphous hydrocarbon layers (a-C: H: X), and metal-containing amorphous hydrocarbon layers (a-C: H: Me).
  • DLC pure amorphous hydrocarbon layers
  • a-C modified amorphous hydrocarbon layers
  • a-C metal-containing amorphous hydrocarbon layers
  • Me metal-containing amorphous hydrocarbon layers
  • the amorphous or metal-containing amorphous hydrocarbon layers are generally prepared according to the prior art in the HF-PACVD or PVD process. According to the invention, however, the respective layers are to be produced in the DC-PACV D method, in particular unipolar or bipolar pulsed.
  • the advantage lies in the continuous process control of the coating, since the deposition can be carried out inexpensively in the same plant as the deposition of the sublayers. This eliminates the need for an adapter for H F-P AC V D processes.
  • the coating process can be carried out with reduced effort in a much shorter time than before.
  • tetrakis (diorganylamino) titanium compounds are used as precursors for the preparation of the carbon layers, although CC or CH top layers are formed on the Ti (C; N) layers, low-friction, harder DLC or aC: H: Me upper layers are deposited at temperatures ⁇ 180 0 C by means of CH 4 or tetramethylsilane as precursors. Therefore, the topsheet or, if the topsheet is not the topsheet, a topsheet disposed above the topsheet can be applied using CH 4 or tetramethylsilane as precursors.
  • a silicon-containing hydrocarbon layer can be applied as a bonding agent to compensate for the mechanical stresses.
  • the individual layers in the process described in sub advantageously be strattemperaturen below 180 0 C, particularly advantageously applied even below 160 0 C.
  • pulse ratios of pulse duration to pulse interval between 0.01 and 15 can be selected depending on the desired or permissible energy input.
  • the DC plasma can be pulsed unipolar or bipolar.
  • Advantageous voltages of the plasma are between 450 and 650 volts, advantageous frequency range is below 50 kHz, preferably between 20 and 50 kHz.
  • a further advantageous method step lies in a plasma treatment preceding the coating, in particular plasma cleaning of the surface of the substrate.
  • a major focus is on the environmental compatibility of the pretreatment, since many previously used methods must be replaced due to their pollution.
  • the invention relates not only to the described method for producing a coating but also to the coating obtained and to machine parts which have been coated by the method according to the invention, in particular to a valve tappet for a cam-actuated valve of an internal combustion engine and to a roller bearing.
  • Figure 1 is a front view of a friction pair consisting of tappets and camshaft for the operation of a valve of an internal combustion engine;
  • Figure 2 is a perspective view of the tappet of Figure 1;
  • Figure 3 is a perspective view of a hydraulic support element, which is connected via a roller bearing with a cam follower in connection;
  • Figure 4 in cross section a layer sequence on a base body / substrate.
  • Fig. 1 shows a friction pairing with a tappet 5 with a cam contact surface 50 and a cup shirt 51 and a cam 6.
  • the tappet 5 is shown below in more detail in Fig. 2 in a perspective view.
  • the tappet 5 is generally connected for machine parts in internal combustion engines with the shaft 7 of a valve, not shown, which opens or closes the valve by moving the cam surface against the cam contact surface 50 of the tappet 5.
  • valve train components of the automotive industry such as, for example, cup and pump tappets, are subject to high requirements with respect to wear resistance and resource conservation, in particular at the contact surface 50.
  • FIG. 4 illustrates a schematic cross-sectional view of a wear-resistant coating for a machine part 1, for example for a cup tappet 5, according to a preferred embodiment of the present invention
  • FIG. 4 illustrates a schematic cross-sectional view of a wear-resistant coating for a machine part 1, for example for a cup tappet 5, according to a preferred embodiment of the present invention
  • the tappet 5 is provided with a wear-resistant and low-friction coating according to the invention for reducing the coefficient of friction and for increasing the wear resistance in the region of the cam contact surface 50 or, if required, in the region of the cam contact surface 50 and the cup 51.
  • a wear-resistant and low-friction coating according to the invention for reducing the coefficient of friction and for increasing the wear resistance in the region of the cam contact surface 50 or, if required, in the region of the cam contact surface 50 and the cup 51.
  • a wear-resistant and low-friction coating according to the invention for reducing the coefficient of friction and for increasing the wear resistance in the region of the cam contact surface 50 or, if required, in the region of the cam contact surface 50 and the cup 51.
  • in the Trap high deformations of the cup 51 of the tappet 50 in the open side can optionally also be a partial coating of the cup 51 done.
  • the area 2 to be coated i. in the present case the cam contact surface 50 of the tappet 5, can be case hardened or carbonitrided and tempered before coating.
  • This may consist of a carbide, a nitride or boride of a transition metal, preferably of TiN or TiC and be applied in a pulsed DC-PACVD method using a tetrakis (diorganylamino) titanium compound as a precursor.
  • an adhesion-promoting layer 3 can optionally be applied to the underlayer.
  • the adhesion-promoting layer 3 can consist, for example, of a metal-containing carbon or hydrocarbon, for example in each case in conjunction with tungsten, but preferably of a silicon-containing hydrocarbon.
  • the underlayer 13 is intended to increase the fatigue strength of the overall coating, i. it should be plastic deformation, cracking, growth and fractures of the layer system can be prevented. Such fatigue operations can be caused by the load on the cam and the material stress of the bucket tappet 5 induced therefrom as well as by different degrees of hardness, moduli of elasticity, deformability of the individual layers or of the main body and of the wear-resistant coating. In this case, formation of the layer 13 as a subbing layer, either alone or in combination with a suitable primer layer 3, is preferable.
  • a wear-resistant layer 4 is formed over the undercoat and / or the adhesion promoting layer 3 as a top or top layer.
  • the layer 4 is shown there schematically, wherein the size ratios are not reproduced to scale.
  • the functional layer or upper layer 4 which may also be identical to the cover layer, is characterized by a carbon-containing layer, a hydrocarbon-containing layer Layer, a modified or a metal-containing amorphous hydrocarbon layer is formed, in which the carbon is present in sp2 and sp3 hybridized form and the sp3 bonds are advantageously more than 50%.
  • the substrates are therefore advantageously subjected to a solvent-free ultrasound treatment and in addition to a plasma cleaning.
  • the plasma cleaning takes place in the form of a "sputter cleaning" with variation of plasma voltage and gas mixture in the same device as the subsequent coating.
  • the described invention provides a novel coating process which requires only manageable structural changes with respect to the necessary coating device compared with the previously used production means in PVD and (PA) CVD coating.
  • the maximum coating temperature is preferably from 180 0 C, so that the base material is not annealed at a coating operation.
  • the coating is preferably formed with a thickness of about 0.5 ⁇ m to about 10.0 ⁇ m, preferably 2.0 ⁇ m.
  • FIG. 3 illustrates a perspective view of a hydraulic support element 8 which has a piston 9 and a housing 10.
  • the hydraulic support element 8 is coupled to a drag lever 1 1, wherein the drag lever 1 1 is pivotally mounted via a rolling bearing 12.
  • the piston 9 has a frictional contact region 90 the drag lever 1 1 on.
  • the piston 9 has a frictional contact region 91 between the lateral surface of the piston 9 and the housing 10.
  • the contact region 90 is likewise provided with a coating 13, 4 according to the invention, optionally with a bonding agent layer 3.
  • the contact region 91 between the piston 9 and the housing 10 can also be coated with such a coating 13, 4.
  • the overall service life of the illustrated tribological system is increased, whereby a failure of the individual machine parts can be reduced during operation and thus a total cost can be saved.
  • components of the rolling bearing 12 for example, the rolling elements, the inner and outer rings of the rolling bearing 12, the rolling bearing cages, the axial discs or the like can also be provided to increase the wear resistance and to reduce friction with the coating of the invention.
  • the layer system described above is of course also for other construction and functional units, such as valve stems or valve stem supports, support and plug-in elements, rolling bearing components, release bearing, piston pin, bushings, control piston for example injectors in the engine area, linear guides and other mechanical and tribologically highly stressed parts suitable.
  • the following parameters are adapted and controlled during coating:
  • Coating temperature 160-180 ° C. Pressure: 50-300 Pa
  • Plasma parameters Voltage U 450 - 650 V Bipolar pulsed 20 - 5O kHz
  • Duty cycle PD / PP 0.01 - 15
  • Precursor / evaporator temperature Ti (NMe 2 ) 4 : 35-55 0 C Ti (NEt 2 ) 4 : 75-100 0 C CH 4 TMS 35 0 C

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

Conformément à l'invention, lors de l'application d'une couche tribologique sur un composant, laquelle couche comprend au moins une couche supérieure (4) contenant un carbone amorphe ou un hydrocarbure, il est prévu, pour simplifier le procédé d'application, d'appliquer l'une après l'autre une couche inférieure (13) et une couche supérieure (4) différente, en employant un procédé de dépôt chimique en phase vapeur (CVD) assisté par plasma à courant continu (DC), éventuellement en modifiant les paramètres du processus et en utilisant des précurseurs différents.
PCT/EP2008/053679 2007-04-20 2008-03-27 Procédé d'application d'un revêtement résistant à l'usure WO2008128849A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP08735536A EP2140039A1 (fr) 2007-04-20 2008-03-27 Procédé d'application d'un revêtement résistant à l'usure

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710018716 DE102007018716A1 (de) 2007-04-20 2007-04-20 Verfahren zum Aufbringen einer verschleißfesten Beschichtung
DE102007018716.7 2007-04-20

Publications (1)

Publication Number Publication Date
WO2008128849A1 true WO2008128849A1 (fr) 2008-10-30

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EP (1) EP2140039A1 (fr)
DE (1) DE102007018716A1 (fr)
WO (1) WO2008128849A1 (fr)

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US10005171B2 (en) 2013-06-24 2018-06-26 3M Innovative Properties Company Abrasive particles, method of making abrasive particles, and abrasive articles

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DE102008045381A1 (de) * 2008-09-02 2010-03-04 Schaeffler Kg Verschleiß- und korrosionshemmender Schichtverbund
DE102009028504C5 (de) 2009-08-13 2014-10-30 Federal-Mogul Burscheid Gmbh Kolbenring mit einer Beschichtung
DE102011114588A1 (de) * 2011-09-30 2013-04-04 Thyssenkrupp Presta Teccenter Ag Ventiltrieb für Brennkraftmaschinen mit verstellbarer Nockenwelle
DE102018009275A1 (de) 2018-11-26 2020-05-28 Daimler Ag Ventilführung für eine Hubkolbenmaschine, insbesondere eines Kraftfahrzeugs

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EP0454616A1 (fr) 1990-04-27 1991-10-30 Saphirwerk Industrieprodukte AG Elément de roulement, procédé de fabrication d'un tel élément, et roulement ou palier lisse
JPH06341445A (ja) 1991-10-14 1994-12-13 Shojiro Miyake 転がり軸受
US5237967A (en) 1993-01-08 1993-08-24 Ford Motor Company Powertrain component with amorphous hydrogenated carbon film
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