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WO2018177695A3 - Ventil, insbesondere vakuumventil - Google Patents

Ventil, insbesondere vakuumventil Download PDF

Info

Publication number
WO2018177695A3
WO2018177695A3 PCT/EP2018/055435 EP2018055435W WO2018177695A3 WO 2018177695 A3 WO2018177695 A3 WO 2018177695A3 EP 2018055435 W EP2018055435 W EP 2018055435W WO 2018177695 A3 WO2018177695 A3 WO 2018177695A3
Authority
WO
WIPO (PCT)
Prior art keywords
valve
connecting section
closing member
particular vacuum
valve plunger
Prior art date
Application number
PCT/EP2018/055435
Other languages
English (en)
French (fr)
Other versions
WO2018177695A2 (de
Inventor
Michael Zickar
Original Assignee
Vat Holding Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vat Holding Ag filed Critical Vat Holding Ag
Priority to JP2019546307A priority Critical patent/JP7220663B2/ja
Priority to KR1020197027420A priority patent/KR102478909B1/ko
Priority to CN201880022166.XA priority patent/CN110520636A/zh
Priority to US16/495,551 priority patent/US11215296B2/en
Publication of WO2018177695A2 publication Critical patent/WO2018177695A2/de
Publication of WO2018177695A3 publication Critical patent/WO2018177695A3/de

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
    • F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30—Details
    • F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16B—DEVICES FOR FASTENING OR SECURING CONSTRUCTIONAL ELEMENTS OR MACHINE PARTS TOGETHER, e.g. NAILS, BOLTS, CIRCLIPS, CLAMPS, CLIPS OR WEDGES; JOINTS OR JOINTING
    • F16B2200/00—Constructional details of connections not covered for in other groups of this subclass
    • F16B2200/89—Use of a hydraulic action
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
    • F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
    • F16K3/188—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members by means of hydraulic forces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
    • F16K31/122—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a piston
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67126—Apparatus for sealing, encapsulating, glassing, decapsulating or the like

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Lift Valve (AREA)
  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
  • Clamps And Clips (AREA)
  • Check Valves (AREA)
  • Self-Closing Valves And Venting Or Aerating Valves (AREA)

Abstract

Ventil (1), insbesondere Vakuumventil, mit zumindest einem Verschlussorgan (2) zum Verschließen einer Ventilöffnung (3) und mit zumindest einer Ventilstange (4), wobei in oder an der Ventilstange (4) zumindest ein erster Verbindungsabschnitt (5) angeordnet ist und in oder an dem Verschlussorgan (2) zumindest ein zweiter Verbindungsabschnitt (6) angeordnet ist und das Verschlussorgan (2) durch Verbinden des ersten Verbindungsabschnitts (5) mit dem zweiten Verbindungsabschnitt (6) an der Ventilstange (4) befestigbar oder befestigt ist, wobei der erste Verbindungsabschnitt (5) und/oder der zweite Verbindungsabschnitt (6) zumindest eine, von zumindest einer elastisch deformierbaren Begrenzungswand (7) begrenzte, Druckkammer (8) für ein Fluid aufweist bzw. aufweisen und die Begrenzungswand (7) zur Ausbildung einer klemmenden Verbindung des ersten Verbindungsabschnitts (5) mit dem zweiten Verbindungsabschnitt (6) mittels des in der Druckkammer (8) angeordneten Fluids elastisch deformierbar ist.
PCT/EP2018/055435 2017-03-31 2018-03-06 Ventil, insbesondere vakuumventil WO2018177695A2 (de)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2019546307A JP7220663B2 (ja) 2017-03-31 2018-03-06 バルブ
KR1020197027420A KR102478909B1 (ko) 2017-03-31 2018-03-06 밸브, 특히 진공밸브
CN201880022166.XA CN110520636A (zh) 2017-03-31 2018-03-06 阀特别是真空阀
US16/495,551 US11215296B2 (en) 2017-03-31 2018-03-06 Valve, in particular vacuum valve

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
AT1352017 2017-03-31
ATA135/2017 2017-03-31

Publications (2)

Publication Number Publication Date
WO2018177695A2 WO2018177695A2 (de) 2018-10-04
WO2018177695A3 true WO2018177695A3 (de) 2019-02-28

Family

ID=61627079

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2018/055435 WO2018177695A2 (de) 2017-03-31 2018-03-06 Ventil, insbesondere vakuumventil

Country Status (6)

Country Link
US (1) US11215296B2 (de)
JP (1) JP7220663B2 (de)
KR (1) KR102478909B1 (de)
CN (1) CN110520636A (de)
TW (1) TWI761465B (de)
WO (1) WO2018177695A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111828663A (zh) * 2020-08-05 2020-10-27 合肥中科离子医学技术装备有限公司 一种可高压差启动的真空插板阀
DE102021102284A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Ventilplatte für eine Verschlusseinrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
DE102021102283A1 (de) 2021-02-01 2022-08-04 Vat Holding Ag Verschlussvorrichtung zum vakuumdichten Verschließen einer Öffnung in einer Wand
CN113719624A (zh) * 2021-09-30 2021-11-30 洛阳明远石化技术有限公司 密封件、密封组件和密封阀
DE102023103080A1 (de) * 2023-02-08 2024-08-08 Vat Holding Ag Verschlussorgan

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3202432A (en) * 1963-03-07 1965-08-24 Gordon N Cameron Hydraulically actuated arbor and chuck construction
EP0753368A1 (de) * 1995-07-13 1997-01-15 Fritz Schunk GmbH Fabrik für Spann- und Greifwerkzeuge Spannvorrichtung zum genauen gegenseitigen Fixieren zweier Bauteile
DE102006018598A1 (de) * 2006-04-21 2007-10-25 Schaeffler Kg Zwangssteuerung für ein Hubventil einer Brennkraftmaschine
DE102006018587A1 (de) * 2006-04-21 2007-10-25 Schaeffler Kg Ventilbetätigungsvorrichtung, insbesondere für Gaswechselventile von Hubkolbenbrennkraftmaschinen
US20110140328A1 (en) * 2006-11-17 2011-06-16 Hydra-Lock Corporation Hydrostatically Actuated Workholding Apparatus with High Expansion and Recovery Sleeve
DE102010009172A1 (de) * 2010-02-24 2011-08-25 Schunk GmbH & Co. KG Spann- und Greiftechnik, 74348 Dehnspanndorn und Dehnspannfutter
US20120061605A1 (en) * 2010-09-10 2012-03-15 Applied Materials, Inc. Gate valve
DE202013004696U1 (de) * 2013-05-22 2014-08-26 Schunk Gmbh & Co. Kg Spann- Und Greiftechnik Dehnspanneinrichtung
US20150014556A1 (en) * 2013-07-10 2015-01-15 Smc Corporation Non-sliding gate valve

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3720281A1 (de) 1987-06-19 1989-01-05 Gelenkwellenbau Gmbh Loesbare spannvorrichtung
JPH0263906U (de) * 1988-11-01 1990-05-14
US4964432A (en) 1990-03-19 1990-10-23 Keystone International, Inc. Method and means for mounting valve member on valve stem
US5195838A (en) * 1990-04-17 1993-03-23 Sidney Katz Hydraulically securable and angularly adjustable gears
JP3771797B2 (ja) * 2000-12-27 2006-04-26 Ｓｍｃ株式会社 ゲートバルブ
DE10112087A1 (de) 2001-03-12 2002-10-02 Voith Safeset Ab Hudiksvall Verfahren zum Druckaufbau in Verbindungskupplungen und Verbindungskupplung
EP1529585B1 (de) * 2003-11-05 2006-03-01 Schunk GmbH & Co. KG Spann- und Greiftechnik Dehnspanneinrichtung
US20050191122A1 (en) 2004-03-01 2005-09-01 Gethmann Douglas P. Locking mechanism for a threaded connection
KR100960030B1 (ko) 2004-03-12 2010-05-28 배트 홀딩 아게 진공 게이트 밸브
JP2006046489A (ja) * 2004-08-04 2006-02-16 Nippon Valqua Ind Ltd 真空用ゲート弁
CH699258B1 (de) 2006-07-11 2010-02-15 Vat Holding Ag Vakuumventil und Verschlussteller
DE102007059039A1 (de) 2007-12-06 2009-06-18 Vat Holding Ag Vakuumventil
EP2146122A1 (de) 2008-07-18 2010-01-20 VAT Holding AG Vakuumventil und Verschlussteller für ein Vakuumventil
JP5811320B2 (ja) 2011-04-21 2015-11-11 Smc株式会社 ゲートバルブ
KR101357104B1 (ko) 2012-10-24 2014-02-12 주식회사 에이엠지 챔버용 게이트밸브 구동장치
EP2913573A1 (de) * 2014-02-26 2015-09-02 VAT Holding AG Vakuumventil
SE1551222A1 (en) 2015-09-23 2017-03-24 Etp Trans Ab Hydraulic clamping device, system comprising such device andmethod of interconnecting a hub and a shaft

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3202432A (en) * 1963-03-07 1965-08-24 Gordon N Cameron Hydraulically actuated arbor and chuck construction
EP0753368A1 (de) * 1995-07-13 1997-01-15 Fritz Schunk GmbH Fabrik für Spann- und Greifwerkzeuge Spannvorrichtung zum genauen gegenseitigen Fixieren zweier Bauteile
DE102006018598A1 (de) * 2006-04-21 2007-10-25 Schaeffler Kg Zwangssteuerung für ein Hubventil einer Brennkraftmaschine
DE102006018587A1 (de) * 2006-04-21 2007-10-25 Schaeffler Kg Ventilbetätigungsvorrichtung, insbesondere für Gaswechselventile von Hubkolbenbrennkraftmaschinen
US20110140328A1 (en) * 2006-11-17 2011-06-16 Hydra-Lock Corporation Hydrostatically Actuated Workholding Apparatus with High Expansion and Recovery Sleeve
DE102010009172A1 (de) * 2010-02-24 2011-08-25 Schunk GmbH & Co. KG Spann- und Greiftechnik, 74348 Dehnspanndorn und Dehnspannfutter
US20120061605A1 (en) * 2010-09-10 2012-03-15 Applied Materials, Inc. Gate valve
DE202013004696U1 (de) * 2013-05-22 2014-08-26 Schunk Gmbh & Co. Kg Spann- Und Greiftechnik Dehnspanneinrichtung
US20150014556A1 (en) * 2013-07-10 2015-01-15 Smc Corporation Non-sliding gate valve

Also Published As

Publication number Publication date
KR20190131490A (ko) 2019-11-26
JP2020515776A (ja) 2020-05-28
TW201839303A (zh) 2018-11-01
US11215296B2 (en) 2022-01-04
CN110520636A (zh) 2019-11-29
JP7220663B2 (ja) 2023-02-10
KR102478909B1 (ko) 2022-12-16
WO2018177695A2 (de) 2018-10-04
TWI761465B (zh) 2022-04-21
US20200096133A1 (en) 2020-03-26

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