+

WO2018163704A1 - Détecteur de nombre de microparticules - Google Patents

Détecteur de nombre de microparticules Download PDF

Info

Publication number
WO2018163704A1
WO2018163704A1 PCT/JP2018/004386 JP2018004386W WO2018163704A1 WO 2018163704 A1 WO2018163704 A1 WO 2018163704A1 JP 2018004386 W JP2018004386 W JP 2018004386W WO 2018163704 A1 WO2018163704 A1 WO 2018163704A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
collection
charged
fine particles
charge generation
Prior art date
Application number
PCT/JP2018/004386
Other languages
English (en)
Japanese (ja)
Inventor
京一 菅野
和幸 水野
英正 奥村
Original Assignee
日本碍子株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本碍子株式会社 filed Critical 日本碍子株式会社
Publication of WO2018163704A1 publication Critical patent/WO2018163704A1/fr

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/62Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode
    • G01N27/68Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the ionisation of gases, e.g. aerosols; by investigating electric discharges, e.g. emission of cathode using electric discharge to ionise a gas

Definitions

  • the present invention relates to a particle number detector.
  • ions are generated by a corona discharge in a charge generation element, the particles in the gas to be measured are charged by the ions, the charged particles are collected by a collecting electrode, and the collected particles are collected.
  • the number measuring device measures the number of fine particles based on the amount of electric charge is known (for example, see Patent Document 1).
  • the present invention has been made to solve such a problem, and has as its main object to suppress the influence of noise generated by discharge in the charge generation section on measurement accuracy.
  • the particle number detector of the present invention is A charge generation unit that adds charged charges generated by discharge to the fine particles in the gas introduced into the vent pipe to form charged fine particles; Provided on the downstream side of the gas flow with respect to the charge generation unit, a collection electrode is disposed between the pair of collection electric field generation electrodes, and a collection voltage is applied between the pair of collection electric field generation electrodes A charged particulate collection unit that collects the charged particulates on the collection electrode; A number detection unit that detects the number of the charged fine particles based on a physical quantity that varies according to the number of the charged fine particles collected by the collection electrode; A shielding part provided at least between the charge generation part and the number detection part; It is equipped with.
  • the charge generated by the discharge is added to the particles in the gas introduced into the vent tube to form charged particles.
  • the charged fine particles are collected by a collection electrode provided on the downstream side of the gas flow with respect to the charge generation unit.
  • the number detection unit detects the number of fine particles in the gas based on a physical quantity that changes according to the number of charged fine particles collected by the collection electrode.
  • a shielding part is provided between the charge generation part and the number detection part. Even if noise (for example, noise caused by electromagnetic induction or noise caused by electrostatic induction) is generated by electric discharge in the charge generation unit, the noise is shielded by the shielding unit and thus hardly affects the number detection unit. Therefore, it is possible to suppress the influence of noise generated by the discharge on the measurement accuracy.
  • charge includes positive charges and negative charges as well as ions.
  • Detecting the number of fine particles determines whether or not the number of fine particles falls within a predetermined numerical range (for example, whether or not a predetermined threshold value is exceeded) in addition to measuring the number of fine particles. Including cases.
  • the “physical quantity” may be a parameter that changes based on the number of charged fine particles (charge quantity), and examples thereof include current.
  • the shielding part may be integrated with a grounded electrode of the pair of collecting electric field generating electrodes.
  • the number of components can be reduced as compared with the case where the shielding portion is provided separately from the pair of collection electric field generation electrodes.
  • the charge generation unit includes a discharge electrode and a counter electrode that is opposed to the discharge electrode and grounded, and the shielding unit is integrated with the counter electrode. Also good. In this case, the number of parts can be reduced as compared with the case where the shielding portion is provided separately from the counter electrode.
  • the shielding part may surround at least the entire periphery of the charge generation part. By doing so, the effects of electromagnetic shielding and electrostatic shielding are further enhanced.
  • the particle number detector of the present invention is provided between the charge generation unit and the charged particle collection unit, a removal electrode is disposed between a pair of removal electric field generation electrodes, and the pair of removal electric field generation electrodes When a removal voltage lower than the collection voltage is applied between them, an excess charge that has not been added to the fine particles is collected by the removal electrode, and the shielding unit includes the pair of The removal electric field generation electrode may be integrated with a grounded electrode. In this way, in the fine particle number detector provided with the surplus charge removing unit, the number of parts can be reduced as compared with the case where the shielding unit is provided separately from the pair of removed electric field generating electrodes.
  • an upstream end of the gas flow in the shielding portion protrudes from the ventilation pipe to form a protrusion, and is connected to an exhaust pipe that discharges the gas by the protrusion. It may be possible. In this way, it is not necessary to separately provide an attachment portion for attaching the particle number detector to the exhaust pipe.
  • the fine particle number detector of the present invention is used in, for example, atmospheric environment surveys, indoor environment surveys, pollution surveys, combustion particle measurement of automobiles, particle generation environment monitoring, particle synthesis environment monitoring, and the like.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of the particle number detector 10.
  • FIG. 2 is a cross-sectional view taken along the line AA in FIG.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of a particle number detector 110.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of a particle number detector 210.
  • FIG. 3 is a cross-sectional view illustrating a schematic configuration of a particle number detector 310.
  • FIG. 4 is a cross-sectional view illustrating a schematic configuration of a particle number detector 410.
  • FIG. 6 is a cross-sectional view of a modified example of the particle number detector 10.
  • FIG. 6 is an explanatory diagram of the charge generation element 120.
  • FIG. 1 is a cross-sectional view showing a schematic configuration of the particle number detector 10
  • FIG. 1 is a cross-sectional view showing a schematic configuration of the particle number detector 10
  • the fine particle number detector 10 measures the number of fine particles contained in a gas (for example, exhaust gas from an automobile). As shown in FIG. 1, the fine particle number detector 10 includes a charge generating element 20, a collecting device 40, a detector main body 50, and a shield 60 in a ceramic vent pipe 12.
  • the vent pipe 12 has a gas inlet 12a for introducing gas into the vent pipe 12 and a gas outlet 12b for discharging the gas that has passed through the vent pipe 12.
  • the charge generation element 20 includes a needle electrode 22 and a counter electrode 24 provided so as to be exposed on a wall facing the needle electrode 22, provided on the side of the vent pipe 12 close to the gas inlet 12 a. is doing.
  • the counter electrode 24 forms part of the shield 60.
  • the needle electrode 22 and the counter electrode 24 are connected to a discharge power source 26 that applies a voltage Vp (for example, a pulse voltage).
  • Vp for example, a pulse voltage
  • the charge generating element 20 generates an air discharge due to a potential difference between the two electrodes when a voltage Vp is applied between the needle-like electrode 22 and the counter electrode 24.
  • the fine particles 16 in the gas are added with charges 18 (here, negative charges) to become charged fine particles P.
  • the collection device 40 is a device that collects the charged fine particles P, and is provided in the hollow portion 12 c in the vent pipe 12.
  • the collection device 40 has a pair of collection electric field generation electrodes (application electrode 42 and ground electrode 44) and a collection electrode 46.
  • the application electrode 42 and the ground electrode 44 are embedded at positions facing each other on the wall of the vent pipe 12.
  • the application electrode 42 is an electrode having a negative potential ⁇ V1.
  • the level of the negative potential ⁇ V1 is from the ⁇ mV order to ⁇ several tens of volts.
  • the ground electrode 44 is an electrode connected to the ground.
  • the ground electrode 44 forms part of the shield 60.
  • the collection electrode 46 is disposed between the application electrode 42 and the ground electrode 44, and is exposed on the wall of the hollow portion 12 c in which the ground electrode 44 is embedded. As a result, an electric field from the ground electrode 44 toward the application electrode 42 is generated inside the hollow portion 12c. Therefore, the charged fine particles P (negatively charged) that have entered the hollow portion 12c are attracted to the ground electrode 44 by the generated electric field and collected by the collecting electrode 46 installed in the middle thereof.
  • the detector main body 50 includes a series circuit unit 52 and a number measuring device 56.
  • the series circuit unit 52 is provided between the collecting electrode 46 and the number measuring device 56.
  • a capacitor 53, a resistor 54, and a switch (preferably a semiconductor switch) 55 are connected in series to the series circuit portion 52 from the collecting electrode 46 side.
  • the number measuring device 56 is a device that measures the number of the fine particles 16 based on the charge amount of the charged fine particles P collected by the collecting electrode 46.
  • the switch 55 is turned on, a current based on the charge 18 of the charged fine particles P collected by the collecting electrode 46 is transmitted to the number measuring device 56 as a transient response through a series circuit including the capacitor 53 and the resistor 54. Is done.
  • the number measuring device 56 measures an electric current value using an ammeter, and calculates the number of fine particles 16 based on the electric current value.
  • the shield 60 is made of a conductive material (for example, a metal such as copper, aluminum, or an aluminum alloy).
  • the shield 60 is formed in a cylindrical shape having a rectangular cross section including the first shield plate 61 and the second shield plate 62 (see FIG. 2), and is grounded to the ground.
  • the first shielding plate 61 is disposed in the wall of the vent pipe 12 so as to partition the charge generating element 20 and the detector main body 50.
  • the first shielding plate 61 is formed so as to cover the entire detector main body 50 by extending the ground electrode 44 of the collection device 40 to the downstream side in the gas flow direction, and the counter electrode 24 of the charge generation element 20. It is formed so as to be integrated.
  • the second shielding plate 62 is embedded on the side of the wall of the vent pipe 12 close to the outer surface so as to cover the needle electrode 22 of the charge generation element 20 and the application electrode 42 of the collection device 40.
  • the cylindrical shield 60 surrounds the entire periphery of the charge generation element 20 and the collection electrode 46.
  • the particulate number detector 10 When measuring particulates contained in the exhaust gas of an automobile, the particulate number detector 10 is attached in the exhaust pipe of the engine. At this time, the particulate matter detector 10 is attached so that the exhaust gas is introduced into the vent pipe 12 from the gas inlet 12a of the particulate detector 10 and discharged from the gas outlet 12b.
  • the fine particles 16 contained in the exhaust gas introduced into the vent pipe 12 from the gas introduction port 12a are charged with the charge 18 (negative charge in this case) generated by the discharge of the charge generation element 20, and then become the charged fine particles P. Enter 12c.
  • the shield 60 prevents the noise from leaking to the detector body 50 side.
  • the charged fine particles P entering the hollow portion 12c reach the collection device 40, they are attracted to the ground electrode 44 and collected by the collection electrode 46 installed in the middle thereof.
  • a current based on the charge 18 of the charged fine particles P attached to the collecting electrode 46 is transmitted to the number measuring device 56 as a transient response through a series circuit including a capacitor 53 and a resistor 54.
  • the number measuring device 56 integrates (accumulates) the current value over a period during which the switch 55 is turned on (switch-on period) to obtain an integrated value (accumulated charge amount) of the current value. After the switch-on period, the accumulated charge amount is divided by the elementary charge to obtain the total number of charges (collected charge number), and the collected charge number is divided by the average value of the number of charges added to one fine particle 16. Thus, the number of fine particles 16 attached to the collecting electrode 46 over a certain time (for example, 5 to 15 seconds) can be obtained.
  • the number measuring device 56 repeats and accumulates calculations for calculating the number of the fine particles 16 in a predetermined time over a predetermined period (for example, 1 to 5 minutes), so that the fine particles attached to the collecting electrode 46 over the predetermined period.
  • the number of 16 can be calculated. Further, by using the transient response by the capacitor 53 and the resistor 54, it is possible to measure even with a small current, and the number of the fine particles 16 can be detected with high accuracy.
  • a minute current at a pA (picoampere) level or an nA (nanoampere) level for example, a minute current can be measured by increasing the time constant using the resistor 54 having a large resistance value.
  • the charge generation element 20 of this embodiment corresponds to a charge generation unit of the present invention
  • the collection device 40 corresponds to a charged particle collection unit
  • the detector main body 50 corresponds to a number detection unit
  • the shield 60 shields. It corresponds to the part.
  • the shielding body 60 since the shielding body 60 is provided, even if noise is generated by discharge in the charge generation element 20, the noise is shielded by the shielding body 60. The Therefore, it is possible to suppress the influence of noise generated by the discharge on the measurement accuracy. Particularly, since the shield 60 is cylindrical and surrounds the entire periphery of the charge generation element 20 and the collection electrode 46, the effect of electromagnetic shielding and electrostatic shielding is further enhanced.
  • the shield 60 is integrated with the counter electrode 24 of the charge generation element 20 and the ground electrode 44 of the collection device 40. Therefore, the number of parts can be reduced as compared with the case where the shield 60 is provided separately from the counter electrode 24 and the ground electrode 44.
  • the shield 60 integrated with the counter electrode 24 of the charge generation element 20 and the ground electrode 44 of the collection device 40 is used.
  • a shield 160 may be employed.
  • the shield 160 is formed in a cylindrical shape including the first shield plate 161 and the second shield plate 62.
  • the first shielding plate 161 is integrated with the ground electrode 44 of the collection device 40, but is formed separately from the counter electrode 24 of the charge generation element 20.
  • the shield 160 is arranged so as to partition the charge generating element 20 and the detector main body 50, the influence on the measurement accuracy of noise generated by the discharge in the charge generating element 20 can be suppressed. it can. Further, since the shield 160 is integrated with the ground electrode 44 of the collection device 40, the number of parts can be reduced as compared with the case where the shield 160 is provided separately from the ground electrode 44.
  • a shield 260 may be employed instead of the shield 60 as in the particle number detector 210 shown in FIG.
  • the shield 260 is formed in a cylindrical shape including the first shield plate 261 and the second shield plate 62.
  • the first shielding plate 261 is integrated with the counter electrode 24 of the charge generation element 20, but is formed separately from the ground electrode 44 of the collection device 40. Even in this case, since the shield 260 is disposed so as to partition the charge generation element 20 and the detector main body 50, the influence on the measurement accuracy of noise generated by the discharge in the charge generation element 20 can be suppressed. it can. Further, since the shield 260 is integrated with the counter electrode 24 of the charge generation element 20, the number of components can be reduced as compared with the case where the shield 260 is provided separately from the counter electrode 24.
  • the particle number detector 310 of FIG. 5 is an example in which the surplus charge removing device 30 is provided between the charge generating element 20 and the collecting device 40.
  • the surplus charge removing device 30 has a pair of removing electric field generating electrodes (applying electrode 32 and ground electrode 34) and a removing electrode 36.
  • the application electrode 32 and the ground electrode 34 are embedded in positions facing each other on the wall of the vent pipe 12.
  • the application electrode 32 is an electrode having a negative potential ⁇ V2.
  • the absolute value of the negative potential ⁇ V2 is one digit or more smaller than the absolute value of the negative potential ⁇ V1 of the collection device 40.
  • the ground electrode 34 is an electrode connected to the ground.
  • the removal electrode 36 is disposed between the application electrode 32 and the ground electrode 34, and is exposed on the wall of the hollow portion 12 c in which the ground electrode 34 is embedded. As a result, a weak electric field is generated between the application electrode 32 and the ground electrode 34 of the surplus charge removing device 30. Therefore, of the electric charges 18 generated by the electric charge generating element 20, the excessive electric charges 18 that have not been added to the fine particles 16 are attracted to the ground electrode 34 by this weak electric field, captured by the removal electrode 36, and then discarded to the ground. .
  • the shield 360 is formed in a cylindrical shape including the first shield plate 361 and the second shield plate 62.
  • the 1st shielding board 361 is arrange
  • the detector body 50 is isolated from other devices by a shield 360. Therefore, it is possible to suppress the influence of noise generated by the discharge in the charge generation element 20 on the measurement accuracy.
  • the shield 360 in FIG. 5 is provided separately from each of the counter electrode 24 of the charge generation element 20, the ground electrode 34 of the surplus charge removing device 30, and the ground electrode 44 of the collection device 40. However, the shield 360 is integrated with at least one of these. May be used.
  • the particle number detector 410 in FIG. 6 is an example in which the first shielding plate 461 constituting the shielding body 460 is integrated with the counter electrode 24, the ground electrode 34, and the ground electrode 44.
  • the same components as those in the above-described embodiment are denoted by the same reference numerals. In this way, the number of parts can be reduced as compared with the shield 360 of FIG.
  • the protruding portion 60 a is formed by protruding the upstream end portion of the gas flow in the cylindrical shield 60 from the vent pipe 12. It may be formed. This protrusion 60a can be connected to an exhaust pipe 70 for discharging gas. In this way, it is not necessary to separately provide an attachment portion for attaching the particle number detector 10 to the exhaust pipe 70. 3 to 6 may be similar to this.
  • the needle-like electrode 22 is provided so that the tip protrudes into the hollow portion 12c.
  • the present invention is not particularly limited to this.
  • a flat needle electrode may be provided by printing on the inner wall surface of the vent pipe 12 at a position facing the counter electrode 24.
  • the acicular electrode 22 and the counter electrode 24 are used as the charge generating element 20, but the present invention is not particularly limited thereto.
  • a charge generating element 120 in which an induction electrode 124, a dielectric layer 123, and a discharge electrode 122 are laminated in this order on the inner surface of the vent pipe 12 may be used.
  • the discharge electrode 122 preferably includes a plurality of protrusions 122a on the outer periphery.
  • the induction electrode 124 is integrated with the first shielding plate 61. Even when the voltage of the discharge power supply 26 is applied between the discharge electrode 122 and the induction electrode 124, electric charges are generated by air discharge. Even if noise is generated during the discharge, the noise is shielded by the shield 60 and thus hardly affects the detector body 50 (see FIG. 1). Therefore, it is possible to suppress the influence of noise generated by the discharge in the charge generation element 20 on the measurement accuracy.
  • the cylindrical shielding body 60 including the first shielding plate 61 and the second shielding plate 62 is adopted, but the lower first shielding plate 61 and the upper second shielding plate 62 are connected. It may be provided separately, or only the lower first shielding plate 61 may be provided. The same applies to FIGS.
  • a pipe having a rectangular cross section is used as the vent pipe 12, but a pipe having a circular cross section may be used.
  • the shield 60 is also formed in a cylindrical shape having a circular cross section.
  • the case of measuring the number of negatively charged fine particles P has been described, but the number of fine particles 16 can be similarly measured even for positively charged fine particles P.
  • a positive voltage may be applied to the applying electrode 42 to collect the charged fine particles P on the collecting electrode 46.
  • the present invention can be used to detect the number of fine particles in exhaust gas from a power machine such as an automobile.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Dispersion Chemistry (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

L'invention concerne un détecteur de nombre de microparticules 10 qui est pourvu d'un élément de génération de charge électrique 20, d'un dispositif de collecte 40, d'un dispositif de détection de nombre 56 et d'un corps de blindage 60. L'élément de génération de charge électrique 20 ajoute des charges électriques générées par une décharge électrique à des microparticules 16 dans un gaz pour convertir ainsi les microparticules en microparticules chargées P. Le dispositif de collecte 40 collecte les microparticules chargées P dans une électrode de précipitation 46 lorsqu'une tension électrique est appliquée entre une électrode d'application 42 et une électrode de masse 44. Le dispositif de mesure de nombre 56 détecte le nombre des microparticules chargées P sur la base d'un courant variant en fonction du nombre de microparticules chargées P collectées par l'électrode de précipitation 46. Le corps de blindage 60 est disposé entre l'élément de génération de charge électrique 20 et le dispositif de mesure de nombre 56. Même lorsque du bruit dû à une décharge électrique est généré à partir de l'élément de génération de charge électrique 20, le bruit est bloqué par le corps de blindage 60, et il est ainsi difficile pour le bruit d'affecter le dispositif de mesure de nombre 56.
PCT/JP2018/004386 2017-03-10 2018-02-08 Détecteur de nombre de microparticules WO2018163704A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017045634 2017-03-10
JP2017-045634 2017-03-10

Publications (1)

Publication Number Publication Date
WO2018163704A1 true WO2018163704A1 (fr) 2018-09-13

Family

ID=63447620

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/004386 WO2018163704A1 (fr) 2017-03-10 2018-02-08 Détecteur de nombre de microparticules

Country Status (1)

Country Link
WO (1) WO2018163704A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019025236A1 (fr) * 2017-08-03 2019-02-07 Robert Bosch Gmbh Capteur de particules et procédé pour le faire fonctionner

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007514923A (ja) * 2003-06-24 2007-06-07 デカティ オイ 燃焼機関の排気ガスからの粒子放出を測定する方法およびセンサ装置
JP2012510051A (ja) * 2008-11-25 2012-04-26 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 浮遊粒子を感知するセンサ
JP2014035292A (ja) * 2012-08-09 2014-02-24 Ngk Spark Plug Co Ltd 微粒子検知システム
WO2015146456A1 (fr) * 2014-03-26 2015-10-01 日本碍子株式会社 Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007514923A (ja) * 2003-06-24 2007-06-07 デカティ オイ 燃焼機関の排気ガスからの粒子放出を測定する方法およびセンサ装置
JP2012510051A (ja) * 2008-11-25 2012-04-26 コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ 浮遊粒子を感知するセンサ
JP2014035292A (ja) * 2012-08-09 2014-02-24 Ngk Spark Plug Co Ltd 微粒子検知システム
WO2015146456A1 (fr) * 2014-03-26 2015-10-01 日本碍子株式会社 Dispositif de mesure de nombre de particules fines et procédé de mesure de nombre de particules fines

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2019025236A1 (fr) * 2017-08-03 2019-02-07 Robert Bosch Gmbh Capteur de particules et procédé pour le faire fonctionner

Similar Documents

Publication Publication Date Title
US10488316B2 (en) Fine-particle number measurement device and fine-particle number measurement method
US9606038B2 (en) Particle count measurement device
JP2007514923A (ja) 燃焼機関の排気ガスからの粒子放出を測定する方法およびセンサ装置
JP6321551B2 (ja) 承認空気流を生成するための装置及び方法、並びに承認空気流中の粒子濃度測定におけるこのような装置の使用
JP2019163975A (ja) 微粒子検出器
TWI588784B (zh) 用於偵測於一離子室中煙霧之方法及設備
WO2014033040A1 (fr) Procédé et dispositif de mesure d'aérosol
JP6858135B2 (ja) 粒子センサ及び検知方法
WO2018139345A1 (fr) Dispositif de détection du nombre de particules fines
US20190145858A1 (en) Fine-particle number detector
WO2018163704A1 (fr) Détecteur de nombre de microparticules
JP6420525B1 (ja) 微粒子検出素子及び微粒子検出器
JP2019163976A (ja) 微粒子検出器
WO2019155920A1 (fr) Détecteur de particules fines
JP2018151381A (ja) 微粒子数検出器
JP2017223471A (ja) 微粒子数検出器
JP6688257B2 (ja) 帯電プレートモニタ装置
WO2020090438A1 (fr) Détecteur de microparticules
JPWO2019049570A1 (ja) 微粒子数検出器
JP2019045504A (ja) 微粒子検出素子及び微粒子検出器
WO2020137416A1 (fr) Élément de détection de particules fines et détecteur de particules fines
RU2707270C1 (ru) Спектрометр заряженных частиц
WO2020137418A1 (fr) Détecteur de particules fines
WO2018163661A1 (fr) Détecteur de nombre de microparticules
WO2020036092A1 (fr) Détecteur de particules fines

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 18764262

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 18764262

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP

点击 这是indexloc提供的php浏览器服务,不要输入任何密码和下载