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WO2018034363A1 - Dispositif de nettoyage collecteur de poussière ayant une structure pour éviter les interférences - Google Patents

Dispositif de nettoyage collecteur de poussière ayant une structure pour éviter les interférences Download PDF

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Publication number
WO2018034363A1
WO2018034363A1 PCT/KR2016/009090 KR2016009090W WO2018034363A1 WO 2018034363 A1 WO2018034363 A1 WO 2018034363A1 KR 2016009090 W KR2016009090 W KR 2016009090W WO 2018034363 A1 WO2018034363 A1 WO 2018034363A1
Authority
WO
WIPO (PCT)
Prior art keywords
dust collecting
air
open space
cleaner
air knife
Prior art date
Application number
PCT/KR2016/009090
Other languages
English (en)
Korean (ko)
Other versions
WO2018034363A8 (fr
Inventor
황창배
Original Assignee
(주)엔티케이코퍼레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)엔티케이코퍼레이션 filed Critical (주)엔티케이코퍼레이션
Priority to CN201680087016.8A priority Critical patent/CN109414737B/zh
Priority to PCT/KR2016/009090 priority patent/WO2018034363A1/fr
Publication of WO2018034363A1 publication Critical patent/WO2018034363A1/fr
Publication of WO2018034363A8 publication Critical patent/WO2018034363A8/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Definitions

  • the present invention relates to a dust collecting cleaner of an interference avoiding structure, and more particularly, to a dust collecting cleaner of an interference avoiding structure capable of removing various types of foreign substances generated during a surface processing of a substrate by an optical device such as a laser.
  • Various types of fine particles can be generated in the processing of a product by an optical device such as a laser and directly or indirectly affect the quality of the product.
  • Various dust collectors or cleaners for the removal of such fine particles are known in the art, and for example devices such as air knives can be applied for the removal of fine dust.
  • Korea Patent Registration No. 10-0766522 is coupled to the first block to form an air flow passage together with the first block and the first block disposed inclined with respect to the axis perpendicular to the substrate above the substrate, such as an LCD panel And a second block disposed to be inclined with respect to an axis perpendicular to the substrate to spray the air introduced into the air flow passage to the substrate, thereby removing the cleaning material remaining on the substrate. It starts.
  • Korean Patent Publication No. 2010-0019156 discloses an air knife device including a main body, a plurality of chambers, and a plurality of discharge slits for injecting air in different directions.
  • Fine dust generated during the processing of the surface of the substrate by an optical device such as a laser device may affect the quality of the product, and to prevent this, the fine dust is quickly removed and at the same time hindering the operation of the optical device. It is necessary to have a structure that does not. However, the prior art or known cleaner does not disclose a dust cleaner having such a structure.
  • the present invention is to solve the problems of the prior art has the following object.
  • An object of the present invention is to provide an anti-dusting cleaner having an interference avoiding structure which is generated by air introduced from the outside and at the same time particulates are introduced into the dust collecting path so as not to interfere with the operation of the processing apparatus.
  • a dust collecting cleaner having an interference avoiding structure includes a dust collecting housing having an open space formed in a central portion in a vertical direction with respect to a workpiece; An air knife unit disposed below the dust collecting housing; And a dust collecting path formed at the front of the air knife unit, wherein gas that is introduced and sprayed from above the open space and the air knife unit is introduced into the dust collecting path.
  • the dust collecting housing has a pair of chamber structures facing each other, and an open space is formed between the pair of chambers.
  • the dust collecting housing has an annular chamber structure, and an open space is formed inside the annular.
  • a fluid guide surface formed on the surface in contact with the dust collecting path is formed in the air knife unit.
  • a dispersion nozzle unit for directing air flow below the open space.
  • a dust collecting path in the form of an air curtain is formed to smoothly remove smoke or fine particles generated during processing of a workpiece.
  • the dust collecting cleaner according to the present invention increases the fine particle removal effect by inducing air to flow along the surface of the air knife.
  • the air knife according to the present invention is formed in a chamber or an annular structure having an open space therein, and is installed at various positions according to an arrangement structure of an associated device such as a laser marking device or a semiconductor device, thereby preventing interference between the device and the air knife. To prevent it.
  • the air knife according to the present invention to increase the dust collection efficiency by preventing the generation of the area that is not collected by the dispersion nozzle.
  • FIG. 1A and 1B illustrate an embodiment of a dust collector cleaner having a pair of opposite chamber structures according to the present invention.
  • FIGS. 2A and 2B illustrate an embodiment of a dust collecting cleaner having an annular structure according to the present invention.
  • Figure 3 illustrates an embodiment of a dispersion nozzle unit applied to the dust collecting cleaner according to the present invention.
  • Figure 4 shows an embodiment of the operation of the dust collecting cleaner of the annular structure according to the present invention.
  • FIG. 1A and 1B show an embodiment of a dust collecting cleaner 10 of a pair of opposite chamber structures according to the present invention.
  • the dust collecting cleaner 10 includes dust collecting housings 11a and 11b in which an open space 12 is formed at a center portion in a vertical direction with respect to the workpiece WP; Air knife units 15a and 15b disposed below the dust collecting housings 11a and 11b; And a dust collecting path (DP) formed in front of the air knife units (15a, 15b), wherein the gas that is introduced and sprayed from above the open space (12) and the air knife units (15a, 15b) is collected in the dust collecting path. (DP) flows in.
  • the dust collecting housings 11a and 11b may be polygonal or cylindrical in shape with a predetermined height as a whole, and may be formed of the first dust collecting housing 11a and the second dust collecting housing 11b having a chamber structure facing each other. Surfaces facing each other may form a separation gap, and the open space 12 may be formed by the separation gap.
  • the laser can reach the workpiece WP disposed below the dust collecting housings 11a and 11b from the processing device LA such as the laser marking device through the open space 12.
  • the width of the open space 12 may be adjusted by a pair of gap adjusting units 121 formed at both ends of the facing surface.
  • the gap adjusting unit 121 may have a plate shape coupled to both sides of each of the dust collecting housings 11a and 11b, and the open space 12 may be adjusted by adjusting a fixed position of the plurality of gap adjusting bolts 121a. The width of can be adjusted.
  • Air above the open space 12 flows into the surface of the workpiece WP disposed below the dust collecting housings 11a and 11b through the open space 12 and disposed inside the dust collecting housings 11a and 11b.
  • An air stream can be formed with the compressed air sprayed from the knife units 15a, 15b.
  • Each of the dust collecting housings 11a and 11b is formed on one side of the chamber body 111 and the chamber body 111 in which an accommodating space is formed, and receives air containing foreign substances introduced into the chamber body 111. It may include a discharge port 112 for discharging to the outside and the suction port 113 for supplying compressed air to the air knife unit (15a, 15b) or the dispersion nozzle unit (17a, 17b) disposed therein.
  • air knife units 15a and 15b may be disposed in the chamber body 111 to remove foreign matters generated from the surface of the workpiece WP.
  • Dispersion nozzle units 17a and 17b can be arranged to direct the flow in a defined direction.
  • the workpiece WP may be disposed below the dust collecting housings 11a and 11b and processed by a laser flowing through the open space 12 by the processing apparatus LA.
  • foreign matter such as particulates or smoke may be generated and attached to the workpiece WP or may float around the workpiece WP.
  • Such foreign matters may affect the quality of the workpiece WP, so it is advantageous to remove them at the same time as they occur.
  • such foreign matter can be removed by the fluid flow formed by the air knife units 15a and 15b or the dispersion nozzle units 17a and 17b.
  • the air knife units 15a and 15b may be disposed to face each other below each of the dust collecting housings 11a and 11b or the chamber body 111. Specifically, it may be disposed on both sides with respect to the open space 12.
  • An air gap G may be formed in the air knife units 15a and 15b to guide the flow of air from the inside to the outside, and the end portions of the air gaps G may be formed in front of the air knife units 15a and 15b.
  • the fluid guide surface 151 may be formed to guide the flow of air discharged to the outside.
  • the air gap G is formed to extend along the surface of the workpiece WP, and the fluid guide surface 151 may be formed to extend upward from the end of the air gap G in a curved structure.
  • the flow restriction surface 152 may be formed in a curved structure below the air gap G.
  • the flow restriction face 152 and the fluid guide face 151 may be made of a curved structure that extends while inclined toward the center of the open space 12 as a whole.
  • the flow restriction surface 152 or the fluid guide surface 151 may include a plurality of planes or curved surfaces.
  • the flow restriction surface 152 and the fluid guide surface 151 may generate an air flow in which compressed air sprayed from the air gap G is guided to the dust collecting path DP.
  • the foreign matter generated during the processing of the workpiece WP may be introduced into the dust collecting path DP together with the flow of air to the dust collecting path DP.
  • Compressed air supplied from the outside through the suction port 113 flows into the inlets 154a and 154b formed in the air knife units 15a and 15b. Thereafter, the compressed air is discharged through the air gap G while being made at a constant pressure inside the air knife units 15a and 15b to form a fluid flow while flowing along the fluid guide surface 151.
  • the fluid guide surface 151 or the flow restricting surface 152 formed in the air knife units 15a and 15b may generate an effect similar to the Coanda effect, and the similar structure may have an open space 12. It may be formed in the inlet portion of the open space 12 is formed.
  • Inflow guide surface 111a of a curved shape facing the center of the open space 12 in the upper portion of the chamber body 111 forming the inlet of the open space 12 as shown in an enlarged view in the upper right portion of FIG. , 111b) may be formed. 1
  • the inflow guide surface 111a is large so that the air flowing into the open space 12 is led to the inner wall surface of the chamber body 111 forming the open space 12 while expanding the inlet of the open space 12. It can be made into a curved shape having a radius of curvature.
  • the second inflow guide surface 111b has a small radius of curvature so that the outside air introduced along the first inflow guide surface 111a flows along the wall surface of the open space 12 and is smoothly connected to the wall surface of the open space 12. Can be formed. As such, the outside air flowing into the open space 12 may flow along the wall of the open space 12 to form an air curtain. Such an air curtain can be effectively formed by the dispersion nozzle units 17a and 17b.
  • a pair of dispersion nozzle units 17a and 17b may be disposed to face each other in an upper portion of the open space 12.
  • the dispersion nozzle units 17a and 17b are fixed to the inlet block 171 through which the compressed air is introduced from the suction port 113 and the chamber body 111 to maintain the compressed air introduced at a uniform pressure.
  • a discharge path 173 connecting the interior of the fixing block 172 and the open space 12.
  • the discharge path 173 may be formed in a downwardly inclined shape, and may direct compressed air inside the fixing block 172 to flow along the wall surface of the open space 12.
  • a step guide surface 173a may be formed at an interface where the discharge path 173 and the open space 12 meet.
  • the stepped induction surface 173a may be formed such that a step is formed downward with respect to the extending direction of the discharge path 173, and the compressed air discharged through the discharge path 173 by the formation of the step surface is an open space. Flowing along the wall of (12) forms an air curtain.
  • the step guidance surface 173a may be made of various structures that can produce effects similar to the Coanda effect, and the present invention is not limited to the embodiments shown.
  • the compressed air sprayed from the air knife units 15a and 15b may be introduced into the dust collecting path DP together with the air around the workpiece WP including the foreign matter.
  • compressed air discharged from the dispersion nozzle units 17a and 17b may flow downward along the wall surface of the open space 12 to form an air curtain and then flow into the dust collecting path DP.
  • the dust collecting path DP may be formed between the air knife units 15a and 15b and the open space 12 and extend along the chamber body 111 to be connected to the discharge port 112.
  • the dust collection path DP forms a wide inlet, and the fluid guide surface 151 of the air knife unit 15a, 15b and air
  • the front faces of the knife units 15a and 15b form one wall of the dust collecting path DP, and the side wall of the open space 12 forms the other wall of the dust collecting path DP.
  • air forms an upwardly rising flow and may then be connected to the discharge port 112 through an appropriate induction path.
  • the dust collecting path DP may be formed in various structures and the present invention is not limited to the embodiments shown.
  • the dust collecting housings 11a and 11b are formed of a pair of chamber bodies 111 facing each other, but the dust collecting housings 11a and 11b may be made of a single body.
  • FIGS. 2A and 2B illustrate an embodiment of a dust collecting cleaner 20 having an annular structure according to the present invention.
  • the dust collecting cleaner 20 of the annular structure includes a dust collecting housing 21 having an open space 22 formed in a vertical direction with respect to a workpiece in a central portion thereof; An air knife unit 25 disposed below the dust collecting housing 21; And a dust collecting path (DP) formed in front of the air knife unit (25), and the gas flowing into and sprayed from the upper portion of the open space (22) and the air knife unit (25) to the dust collecting path (DP). Inflow.
  • the dust collecting cleaner 20 having an annular structure may be applied to the removal of fine particles that are generated during the processing of the workpiece and adhere to or float on the workpiece.
  • the dust collecting cleaner 20 may be used to remove fine dust generated during the laser marking process, but is not limited thereto and may be applied to various processing processes.
  • the dust collecting cleaner 20 includes a dust collecting housing 21 for spraying a fluid such as air to induce an upward air flow; And an open space 22 formed in the central portion of the dust collecting housing 21.
  • the dust collecting housing 21 may include a chamber body 211 having a ring, donut, torus, ring, or similar shape, and an air knife unit 25 disposed below the chamber body 211.
  • the dust collection hood M may be coupled to the upper portion of the chamber body 211, and the discharge port 28 may be coupled to the dust collection hood M.
  • an air suction tab AI may be disposed in the chamber body 211 or the dust collection hood M to supply compressed air to the air knife unit 25 or the dispersion nozzle unit 27.
  • the air knife unit 25 is disposed below the chamber body 211 and has an air gap G for spraying compressed air to the upper surface of the workpiece and a fluid guide surface 251 for directing the flow of air in the upward direction. It may include.
  • the air gap G may be formed, for example, between the knife body 254 and the lid 255 of the air knife unit 25 and connected to the air intake tab AI inside the knife body 254. Flow spaces can be formed.
  • the air knife unit 25 may be annular in accordance with the shape of the chamber body 211 as a whole, the curved flow restriction surface 252 is connected to the fluid guide surface 251 below the air gap (G) Can be formed. If necessary, a guide hole 29 may be selectively installed on a lower surface of the open space 22 to guide air introduced into the open space 22 to the dust collecting path DP.
  • a pair of spray nozzle units 27a and 27b facing each other in the upper portion of the open space 22 can be arranged to spray compressed air onto the surface of the workpiece.
  • the pair of spray nozzle units 27a and 27b may have a function of forming an air curtain inside the open space 22, as described above.
  • the pair of spray nozzle units 27a and 27b may have a function of injecting compressed air from the surface of the workpiece to areas where dust collection is difficult by the air knife unit 25 to separate foreign matter from the surface of the workpiece. have.
  • the pair of spray nozzle units 27a and 27b may have an auxiliary function of preventing the generation of a region in which foreign substances generated on the surface of the workpiece are not removed.
  • Each spray nozzle unit 27a, 27b may be composed of an inclined arrangement surface 272 formed in the supply block and a nozzle 271 fixed to the inclined arrangement surface 272.
  • the compressed air injected from the air knife unit 25 or the spray nozzle units 27a and 27b captures foreign matter and enters the dust collecting path DP and passes through the discharge port 28 via the interior of the chamber body 211. It can be discharged to the outside.
  • the dust collecting path DP may be formed between the air knife unit 25 and the open space 22, and specifically, the front wall 245a and the open body of the knife body 245 of the air knife unit 25. 22 may be formed by the perimeter wall 212.
  • the inlet of the dust collecting path DP having a wide width may be formed by the flow restricting surface 252, and the air flow rising upward from the dust collecting path DP may be induced by the fluid inducing surface 251. .
  • the dust collecting cleaner 20 may be fixed to the processing facility by the fixing bracket FB, and the discharge port 28 may be connected to the dust collecting reservoir through the dust collecting tube.
  • Figure 3 illustrates an embodiment of a dispersion nozzle unit applied to the dust collecting cleaner according to the present invention.
  • the injection nozzle unit 27a may include a fastening block 274 coupled to the chamber body and a nozzle 271 disposed on the fastening block 274.
  • a corresponding curved surface 274a corresponding to the circumferential surface of the open space may be formed on one surface of the fastening block 274, and an inclined arrangement surface 272 to which the nozzle 271 is coupled may be formed below the fastening block 274. Can be formed.
  • An inlet block 32 may be formed on one side of the fastening block 274, and an inlet unit 31 for inlet of compressed air may be coupled to the inlet block 32.
  • the fastening block 274 may be fixed to the upper wall surface 214a of the open space wall surface 214, and the nozzle 271 may be fixed to the inclination arrangement surface 272 of the nozzle bracket 271a and the fastening block 274.
  • the nozzle 271 may be composed of a nozzle tip (271b) for spraying the compressed air supplied to the inside.
  • the nozzle 271 may be disposed to be inclined downward to spray compressed air, and the inclination angle of the nozzle 271 may be a nozzle bracket ( 271a).
  • the nozzle 271 may be formed to spray air along the wall of the open space, similar to the embodiment shown in FIGS. 1A and 1B.
  • the spray nozzle unit 27a can be made in various structures and the present invention is not limited to the embodiments shown.
  • Figure 4 shows an embodiment of the operation of the dust collecting cleaner of the annular structure according to the present invention.
  • one air stream F41 may be introduced into the open space 22, and the first air stream F41 flows along the open space 22 to reach the upper portion of the workpiece.
  • the inner two air streams F421 may be induced together with the one air stream while the outer two air streams F422 are guided by the air knife unit 25.
  • foreign substances generated during the processing of the workpiece by the laser L of the inner 2 air stream F421 and the outer 2 air stream F422 are captured and introduced into the dust collecting path DP to generate 3 air streams F43. You can.
  • the three air streams F43 may then generate four air streams F44 outward of the discharge port 28 along a suitable path formed in the chamber body 211.
  • an auxiliary air stream F411 may be generated from the spray nozzle units 27a and 27b to be combined with the inner two air streams F421.
  • the air flow may be made in various forms and guided to the dust collecting path DP and the present invention is not limited to the embodiments shown.
  • a dust collecting path in the form of an air curtain is formed to smoothly remove smoke or fine particles generated during processing of a workpiece.
  • the dust collecting cleaner according to the present invention increases the fine particle removal effect by inducing air to flow along the surface of the air knife.
  • the air knife according to the present invention is formed in a chamber or an annular structure having an open space therein, and is installed at various positions according to an arrangement structure of an associated device such as a laser marking device or a semiconductor device, thereby preventing interference between the device and the air knife. To prevent it.
  • the air knife according to the present invention to increase the dust collection efficiency by preventing the generation of the area that is not collected by the dispersion nozzle.

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Cleaning In General (AREA)
  • Prevention Of Fouling (AREA)

Abstract

La présente invention concerne un dispositif de nettoyage collecteur de poussière qui possède une structure qui permet d'éviter les interférences et, plus particulièrement, un dispositif de nettoyage collecteur de poussière qui possède une structure qui permet d'éviter les interférences et qui permet d'éliminer les matières étrangères sous diverses formes, générées pendant un processus de traitement de surface d'un substrat au moyen d'un appareil optique tel qu'un laser. Le dispositif de nettoyage collecteur de poussière ayant une structure qui permet d'éviter les interférences comprend : des boîtiers collecteurs de poussière (11a, 11b, 21) ayant des espaces ouverts (12, 22) formés sur la partie centrale de ceux-ci dans la direction verticale par rapport à un objet à traiter ; des unités de lame d'air (15a, 15b, 25) disposées au-dessous des boîtiers collecteurs de poussière (11a, 11b, 21) ; un trajet collecteur de poussière (DP) formé à l'avant des unités de lame d'air (15a, 15b, 25), un gaz qui s'écoule dans l'espace ouvert (12) et qui est pulvérisé depuis le dessus de celui-ci et à partir des unités de lame d'air (15a, 15b, 25) s'écoulant dans le trajet collecteur de poussière (DP).
PCT/KR2016/009090 2016-08-18 2016-08-18 Dispositif de nettoyage collecteur de poussière ayant une structure pour éviter les interférences WO2018034363A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201680087016.8A CN109414737B (zh) 2016-08-18 2016-08-18 抗干扰构造集尘系统
PCT/KR2016/009090 WO2018034363A1 (fr) 2016-08-18 2016-08-18 Dispositif de nettoyage collecteur de poussière ayant une structure pour éviter les interférences

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2016/009090 WO2018034363A1 (fr) 2016-08-18 2016-08-18 Dispositif de nettoyage collecteur de poussière ayant une structure pour éviter les interférences

Publications (2)

Publication Number Publication Date
WO2018034363A1 true WO2018034363A1 (fr) 2018-02-22
WO2018034363A8 WO2018034363A8 (fr) 2019-04-25

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WO (1) WO2018034363A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111299822A (zh) * 2020-04-03 2020-06-19 苏州科韵激光科技有限公司 烟尘收集机构
CN114765926A (zh) * 2021-01-14 2022-07-19 重庆方正高密电子有限公司 Pcb板清洁设备

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JP2007300129A (ja) * 2001-11-12 2007-11-15 Tokyo Electron Ltd 基板処理装置
JP2008174246A (ja) * 2007-01-16 2008-07-31 Shintaku Kogyo Kk 容器の水滴除去装置及び水滴除去装置用のリング状エアノズル
KR100965914B1 (ko) * 2008-12-30 2010-06-24 (주)브이엘시스템 집진기능을 가지는 팬 모듈과 이에 사용되는 집진장치
KR20160068607A (ko) * 2014-12-07 2016-06-15 (주)엔티케이코퍼레이션 집진 영역 확장 구조의 환형 에어나이프

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CN2577998Y (zh) * 2002-10-17 2003-10-08 逢开有限公司 风刀集尘器
CN104343096B (zh) * 2014-10-10 2016-04-20 西安工程大学 环卫车用拖吸式路面清洁装置
CN106340473B (zh) * 2015-07-06 2020-03-06 芝浦机械电子株式会社 基板处理装置及基板处理方法
CN207328401U (zh) * 2017-08-28 2018-05-08 广东华能机电有限公司 一种列车吹扫设备
CN207929684U (zh) * 2017-11-15 2018-10-02 太仓市意欣塑胶有限公司 一种使用静电除尘的高效除尘台

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11121435A (ja) * 1997-10-08 1999-04-30 Fujitsu Ltd 基板処理装置及び基板処理方法
JP2007300129A (ja) * 2001-11-12 2007-11-15 Tokyo Electron Ltd 基板処理装置
JP2008174246A (ja) * 2007-01-16 2008-07-31 Shintaku Kogyo Kk 容器の水滴除去装置及び水滴除去装置用のリング状エアノズル
KR100965914B1 (ko) * 2008-12-30 2010-06-24 (주)브이엘시스템 집진기능을 가지는 팬 모듈과 이에 사용되는 집진장치
KR20160068607A (ko) * 2014-12-07 2016-06-15 (주)엔티케이코퍼레이션 집진 영역 확장 구조의 환형 에어나이프

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111299822A (zh) * 2020-04-03 2020-06-19 苏州科韵激光科技有限公司 烟尘收集机构
CN114765926A (zh) * 2021-01-14 2022-07-19 重庆方正高密电子有限公司 Pcb板清洁设备

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CN109414737A (zh) 2019-03-01
WO2018034363A8 (fr) 2019-04-25
CN109414737B (zh) 2021-08-27

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