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WO2018034363A8 - Dust collecting cleaner having interference avoidance structure - Google Patents

Dust collecting cleaner having interference avoidance structure Download PDF

Info

Publication number
WO2018034363A8
WO2018034363A8 PCT/KR2016/009090 KR2016009090W WO2018034363A8 WO 2018034363 A8 WO2018034363 A8 WO 2018034363A8 KR 2016009090 W KR2016009090 W KR 2016009090W WO 2018034363 A8 WO2018034363 A8 WO 2018034363A8
Authority
WO
WIPO (PCT)
Prior art keywords
dust collecting
interference avoidance
avoidance structure
cleaner
air knife
Prior art date
Application number
PCT/KR2016/009090
Other languages
French (fr)
Korean (ko)
Other versions
WO2018034363A1 (en
Inventor
황창배
Original Assignee
(주)엔티케이코퍼레이션
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)엔티케이코퍼레이션 filed Critical (주)엔티케이코퍼레이션
Priority to CN201680087016.8A priority Critical patent/CN109414737B/en
Priority to PCT/KR2016/009090 priority patent/WO2018034363A1/en
Publication of WO2018034363A1 publication Critical patent/WO2018034363A1/en
Publication of WO2018034363A8 publication Critical patent/WO2018034363A8/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B11/00—Cleaning flexible or delicate articles by methods or apparatus specially adapted thereto
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells

Landscapes

  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laser Beam Processing (AREA)
  • Cleaning In General (AREA)
  • Prevention Of Fouling (AREA)

Abstract

The present invention relates to a dust collecting cleaner having an interference avoidance structure and, more particularly, to a dust collecting cleaner, having an interference avoidance structure, enabling removal of foreign materials in various forms generated during a surface treatment process for a substrate by means of an optical apparatus such as a laser. The dust collecting cleaner having an interference avoidance structure comprises: dust collecting housings (11a, 11b, 21) having open spaces (12, 22) formed on the central part thereof in the vertical direction with respect to an object to be treated; air knife units (15a, 15b, 25) disposed below the dust collecting housings (11a, 11b, 21); and a dust collecting path (DP) formed in front of the air knife units (15a, 15b, 25), wherein a gas flowing in and being sprayed from above the open space (12) and from the air knife units (15a, 15b, 25) flows into the dust collecting path (DP).
PCT/KR2016/009090 2016-08-18 2016-08-18 Dust collecting cleaner having interference avoidance structure WO2018034363A1 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN201680087016.8A CN109414737B (en) 2016-08-18 2016-08-18 Anti-interference structure dust collecting system
PCT/KR2016/009090 WO2018034363A1 (en) 2016-08-18 2016-08-18 Dust collecting cleaner having interference avoidance structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2016/009090 WO2018034363A1 (en) 2016-08-18 2016-08-18 Dust collecting cleaner having interference avoidance structure

Publications (2)

Publication Number Publication Date
WO2018034363A1 WO2018034363A1 (en) 2018-02-22
WO2018034363A8 true WO2018034363A8 (en) 2019-04-25

Family

ID=61196697

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2016/009090 WO2018034363A1 (en) 2016-08-18 2016-08-18 Dust collecting cleaner having interference avoidance structure

Country Status (2)

Country Link
CN (1) CN109414737B (en)
WO (1) WO2018034363A1 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111299822B (en) * 2020-04-03 2024-09-03 苏州科韵激光科技有限公司 Smoke dust collecting mechanism
CN114765926B (en) * 2021-01-14 2024-07-30 重庆方正高密电子有限公司 PCB cleaning equipment

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5347677A (en) * 1993-02-12 1994-09-20 Prentice William H Apparatus for cleaning isolated surfaces
JPH11121435A (en) * 1997-10-08 1999-04-30 Fujitsu Ltd Substrate processing apparatus and substrate processing method
JP4579268B2 (en) * 2001-11-12 2010-11-10 東京エレクトロン株式会社 Substrate processing equipment
CN2577998Y (en) * 2002-10-17 2003-10-08 逢开有限公司 Air knife dust collector
JP2008174246A (en) * 2007-01-16 2008-07-31 Shintaku Kogyo Kk Waterdrop removing apparatus for container, and ring-shaped air nozzle for waterdrop removing apparatus
KR100965914B1 (en) * 2008-12-30 2010-06-24 (주)브이엘시스템 Fan module which can separate dust and dust separating device for the same
CN104343096B (en) * 2014-10-10 2016-04-20 西安工程大学 Sanitation truck drags suction road surface cleaning device
KR101659334B1 (en) * 2014-12-07 2016-09-23 (주)엔티케이코퍼레이션 A Ring Type of an Air Knife Capable of Extending an Area of Dust Collection
CN106340473B (en) * 2015-07-06 2020-03-06 芝浦机械电子株式会社 Substrate processing apparatus and substrate processing method
CN207328401U (en) * 2017-08-28 2018-05-08 广东华能机电有限公司 A kind of train purger
CN207929684U (en) * 2017-11-15 2018-10-02 太仓市意欣塑胶有限公司 A kind of high-effective dust-removing platform using electrostatic precipitation

Also Published As

Publication number Publication date
WO2018034363A1 (en) 2018-02-22
CN109414737A (en) 2019-03-01
CN109414737B (en) 2021-08-27

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