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WO2013018467A1 - Film de revêtement en carbone sous forme de diamant amorphe qui présente une structure inclinée, procédé de fabrication de ce dernier, déflecteur de lumière noire et lame d'obturateur utilisant ce dernier - Google Patents

Film de revêtement en carbone sous forme de diamant amorphe qui présente une structure inclinée, procédé de fabrication de ce dernier, déflecteur de lumière noire et lame d'obturateur utilisant ce dernier Download PDF

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Publication number
WO2013018467A1
WO2013018467A1 PCT/JP2012/066255 JP2012066255W WO2013018467A1 WO 2013018467 A1 WO2013018467 A1 WO 2013018467A1 JP 2012066255 W JP2012066255 W JP 2012066255W WO 2013018467 A1 WO2013018467 A1 WO 2013018467A1
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Prior art keywords
film
carbon
black
diamond
coating film
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PCT/JP2012/066255
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English (en)
Japanese (ja)
Inventor
勝史 小野
水沼　昌平
Original Assignee
住友金属鉱山株式会社
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Priority to TW101126930A priority Critical patent/TW201309821A/zh
Publication of WO2013018467A1 publication Critical patent/WO2013018467A1/fr

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    • G02B1/105—
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • G02B1/111—Anti-reflection coatings using layers comprising organic materials
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/14—Protective coatings, e.g. hard coatings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/003—Light absorbing elements
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B9/00—Exposure-making shutters; Diaphragms

Definitions

  • the present invention relates to a diamond-like carbon (hereinafter sometimes referred to as DLC) gradient structure black coating film, a method for producing the same, a black light shielding plate, and a shutter blade material using the same, and more specifically, a surface of an optical member.
  • DLC diamond-like carbon
  • the present invention relates to a method and a shutter blade using the method.
  • a shutter opens and closes by rotating and moving a plurality of blades called shutter blades, but in order to increase the shutter speed, the shutter blades are lightened so that they can be stopped and operated in a very short time, and Requires high slidability.
  • the shutter blade has a role of blocking light by covering the front surface of a photosensitive material such as a film or an image pickup device such as a CCD or CMOS, and needs to be completely shielded from light.
  • the shutter blades have a low light reflectance on the blade surface to prevent leakage light between the blades, that is, high blackness. desired.
  • a small-sized mechanical shutter has begun to be mounted on a lens unit so that a mobile phone having a shooting function, that is, a mobile phone with a camera, can perform high-quality shooting with high pixels.
  • the mechanical shutter incorporated in the mobile phone is required to operate with less power than a general digital camera. For this reason, the weight reduction of the shutter blade is particularly strongly required.
  • shutter blades have been used in the past because many methods have been used to fix each component using an ultraviolet curable resin such as an epoxy resin or acrylic resin. In addition to low reflectivity, blackness, and lightness, UV resistance is required to prevent deformation and discoloration even when irradiated with ultraviolet rays.
  • a metal thin plate, a ceramic thin plate, a glass plate, a resin plate, a resin film, or the like is generally used as the base material of the light shielding plate used for the shutter blade described above according to the required characteristics.
  • a metal thin plate such as SUS, SK material, Al, Ti or the like can be used as the base material of the light shielding film.
  • Patent Document 1 discloses a light shielding material in which a hard carbon film is formed on the surface of a metal blade material such as an aluminum alloy.
  • a metal blade material such as an aluminum alloy.
  • a high shutter speed cannot be expected.
  • the low reflection characteristic of the light shielding material cannot be realized, and the generation of stray light due to reflected light may be unavoidable.
  • Patent Document 2 proposes a light-shielding plate using a matted resin film to reduce surface reflection, and a film-shaped light-shielding plate with matteness formed by forming a large number of fine uneven surfaces.
  • Patent Document 3 proposes a light-shielding film in which a thermosetting resin containing a matte paint is coated on a resin film.
  • PET polyethylene terephthalate
  • Patent Document 4 proposes coating a base material with a coating film containing acicular or granular fine material such as titanium oxide.
  • Patent Document 5 a thin film made of a single metal, a mixture or a compound formed on a resin film by a sputtering method or the like, and a single element or a compound of a specific element satisfying the properties of conductivity, lubricity and scratch resistance, etc.
  • a light shielding blade material obtained by sequentially laminating thin films (protective films) is proposed.
  • the effect of the protective film shows only the effect of carbon related to scratch resistance, and does not show the specific film thickness and composition.
  • Patent Document 6 proposes a shutter blade material having a diamond-like carbon film (DLC) formed on the surface of a magnesium alloy and having improved rigidity and lubricity.
  • DLC diamond-like carbon film
  • the characteristics of diamond-like carbon depend greatly on the production method and the abundance ratio of sp2-bonded carbon and sp3-bonded carbon. Here, it does not show an optimum diamond-like carbon production method and composition that can provide high rigidity and high lubricity.
  • there are coating film materials for reducing the reflectance and blackening of the surfaces of optical components such as shutter blades but none of them has been found to have excellent slidability and water repellency.
  • a metal thin plate or resin film having a relatively small weight such as SUS, SK material, Al, Ti or the like is used as the base material, and the torque and power consumption of the drive motor for driving the blades can be suppressed, and the shutter
  • a shutter blade material that can increase speed, has no noise due to contact between the blades, and has both sufficient light-shielding property, low reflection property, and water repellency in the visible range.
  • the present invention provides a coating material capable of improving the low reflectivity, blackness, lightness, slidability, and water repellency of a shutter blade, that is, a diamond-like carbon (DLC) gradient structure black coating film.
  • a coating material capable of improving the low reflectivity, blackness, lightness, slidability, and water repellency of a shutter blade that is, a diamond-like carbon (DLC) gradient structure black coating film.
  • DLC diamond-like carbon
  • the present inventors have made the surface of optical components such as shutter blades have high light-shielding properties, low reflectance, and blackening.
  • the above-mentioned performance can be achieved by forming a black light-shielding plate in which a metal light-shielding film is further formed and laminated on the substrate surface. The inventors have found that the characteristics are not impaired even in a high humidity environment, and have completed the present invention.
  • the first invention of the present invention is a diamond-like carbon gradient structure black coating film (A) containing titanium, carbon, and oxygen, formed by sputtering, and this diamond-like carbon gradient structure black coating film.
  • the carbon content of the coating (A) is 2.0 to 30.0 as the C / Ti atomic ratio
  • the oxygen content is 0.8 to 2.2 as the O / Ti atomic ratio
  • C / Ti The diamond-like carbon gradient structure black coating film has a structure in which the atomic ratio and the O / Ti atomic ratio are continuously changed in the film thickness direction, and the film thickness is 20 nm or more.
  • the oxygen and titanium contents increase in the film thickness direction from the film surface on the sputtering side of the diamond-like carbon gradient structure black coating film (A) in the first invention, and the carbon content Is a diamond-like carbon gradient structure black coating film characterized by a decrease in
  • a diamond-like carbon gradient structure black wherein the diamond-like carbon gradient structure black coating film (A) in the first and second inventions has a thickness of 20 to 200 nm. It is a coating film.
  • the carbon composition in the diamond-like carbon gradient structure black coating film (A) in the first to third inventions is a mixture of sp2 bonded carbon and sp3 bonded carbon.
  • a diamond-like carbon gradient structure black coating film characterized by the following.
  • a fifth aspect of the present invention is a diamond-like carbon (DLC) characterized in that the diamond-like carbon gradient structure black coating film according to the first to fourth aspects has a static contact angle with respect to water of 90 ° or more. ) An inclined structure black coating film.
  • DLC diamond-like carbon
  • the sixth invention of the present invention is the diamond-like carbon gradient structure black coating, wherein the dynamic friction coefficient of the diamond-like carbon gradient structure black coating film in the first to fifth inventions is 0.1 or less. It is a membrane.
  • the arithmetic average height (Ra) in the region of 1 ⁇ m ⁇ 1 ⁇ m, measured with an atomic force microscope of the diamond-like carbon gradient structure black coating film in the first to sixth inventions It is a diamond-like carbon gradient structure black coating film characterized by being 0.8 nm or more.
  • the parallel light transmittance at a wavelength of 380 to 780 nm of the diamond-like carbon gradient structure black coating film formed on the glass substrate according to the first to seventh inventions by sputtering is 20 on average.
  • the ninth aspect of the present invention is a film formation of 1.5 Pa or more using a sputtering target selected from a combination of a titanium sintered body and a carbon sintered body, or a combination of a titanium carbide sintered body and a carbon sintered body.
  • a diamond-like carbon gradient structure black coating film is formed by sputtering with a gas pressure to form a diamond-like carbon gradient structure black coating film on a substrate.
  • a tenth invention of the present invention is a dual magnetron cathode using a target selected from the combination of the titanium sintered body and the carbon sintered body or the combination of the titanium carbide sintered body and the carbon sintered body in the ninth invention.
  • a diamond-like carbon gradient structure black coating film is formed by sputtering with a double magnetron cathode to form a diamond-like carbon gradient structure black coating film on a substrate.
  • the eleventh aspect of the present invention is a composition comprising a target selected from a combination of a titanium sintered body and a carbon sintered body or a combination of a titanium carbide sintered body and a carbon sintered body in the ninth to tenth inventions.
  • Oxygen gas is not introduced as a film formation gas into the film, and an inert gas mainly containing argon or helium is introduced to form a sputtering film.
  • Oxygen contained in the sintered body or residual gas in the film formation chamber It is a method for producing a diamond-like carbon gradient structure black coating film characterized by incorporating either oxygen or both into the film.
  • the twelfth aspect of the present invention is a black light shielding plate comprising a base material (B), a metal light shielding film (C), and a black coating film, wherein the base material (B) has fine irregularities on the surface.
  • a metal light-shielding film (C) having a film thickness of 40 nm or more provided on at least one surface of the base material (B), and a metal light-shielding film (C).
  • a black light shielding plate, wherein the black coating film provided on the surface of C) is the diamond-like carbon gradient structure black coating film (A) of any one of the first to eighth inventions.
  • the base material (B) in the twelfth aspect is a thin metal plate of stainless steel, SK (carbon steel), Al, Ti, alumina, magnesia, silica, zirconia ceramic thin plate, glass plate,
  • the black light-shielding plate is any one selected from a resin plate and a resin film.
  • the resin film according to the thirteenth aspect is a polyimide, polyamideimide, polyetheretherketone, polyethylene terephthalate, polyphenylene sulfide, polyethylene naphthalate, polyethersulfone having a thickness of 5 to 200 ⁇ m,
  • the black light-shielding plate is any one selected from polycarbonate.
  • the metal light-shielding film (C) in the twelfth to fourteenth aspects is selected from titanium, tantalum, tungsten, cobalt, nickel, niobium, iron, zinc, copper, aluminum, and silicon. It is a black light shielding plate characterized by being a metal material mainly composed of one or more kinds of elements.
  • a sixteenth aspect of the present invention is a black light shielding plate, wherein the metal light shielding film (C) in the twelfth to fifteenth aspects is any one of a titanium film, a titanium carbide film, and a titanium carbide oxide film. is there.
  • the black light shielding plate according to the twelfth to sixteenth aspects has the same film thickness and the same composition on both surfaces of any one of a resin film, a resin plate, a metal thin plate, and a ceramic thin plate.
  • a metal light-shielding film (C), and a diamond-like carbon gradient structure black coating film (A) having the same film thickness and the same composition on the surface of the metal light-shielding film (C). It is a black light shielding plate characterized by having a symmetrical structure with a center.
  • the black light shielding plate according to the twelfth to seventeenth aspects is an arithmetic average of the diamond-like carbon gradient structure black coating film (A) formed on the surface of the metal light shielding film (C).
  • a colored resin film is used as a base material (B), the metal light-shielding film (C) is provided on at least one surface thereof, and the metal light-shielding film (C) is provided on the surface thereof.
  • the black light-shielding plate is characterized in that the average regular reflectance on the surface of the black light-shielding plate at 380 to 780 nm is 1% or less.
  • 21st invention of this invention is a black light-shielding board characterized by the colored resin film in 20th invention having surface unevenness
  • a black light shielding plate wherein the diamond-like carbon gradient structure black coating film (A) in the twentieth and twenty-first aspects has a thickness of 20 to 200 nm.
  • a twenty-third aspect of the present invention is a black light-shielding plate, wherein the metal light-shielding film (C) in the twentieth to twenty-second aspects has a thickness of 20 to 200 nm.
  • a metal light-shielding film (C) is provided on the colored resin film in the twentieth to twenty-third aspects, and a diamond-like carbon gradient structure black coating is provided on the surface of the metal light-shielding film (C).
  • the black light shielding plate is characterized in that the lightness (L * ) of the black light shielding plate obtained by forming a film is 25 to 45.
  • a black light shielding plate wherein the colored resin film according to the twentieth to twenty-fourth aspects has a thickness of 20 to 200 ⁇ m.
  • the twenty-sixth invention of the present invention is a shutter blade obtained by punching the black light shielding plate in the twelfth to twenty-fifth inventions.
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention is a diamond-like carbon (DLC) thin film mainly composed of titanium, carbon, and oxygen formed by sputtering, and has a carbon content of C / C.
  • Ti atomic ratio is 2.0-30.0
  • oxygen content is O / Ti atomic ratio 0.8-2.2
  • C / Ti atomic ratio, O / Ti atomic ratio Is a diamond-like carbon (DLC) gradient structure black coating film that continuously changes in the film thickness direction, so that coating of optical members requiring high light-shielding properties, low reflectivity, blackness, slidability, and water repellency Useful as a material.
  • it since it has high water repellency under high temperature and high humidity, it is extremely useful as a coating material for shutter blades of digital cameras and camera-equipped mobile phones.
  • the light shielding plate in which the diamond-like carbon (DLC) gradient structure black coating film of the present invention is formed on a resin film is lighter than a conventional light shielding plate based on a thin metal plate because the resin film is used as a substrate. Excellent in properties. Even if a diamond-like carbon (DLC) gradient structure black coating film is formed as a coating film, it does not impair low reflectivity, blackness, and light-shielding properties, so it is used as a shutter blade material for digital cameras and mobile phones with cameras. Industrial value is extremely high.
  • the black light-shielding plate of the present invention is also effective for shutter blades of high-speed shutters, because even if the thickness of the resin film substrate is reduced to 38 ⁇ m or less in order to reduce weight, sufficient light-shielding properties are not impaired. Therefore, the drive motor can be miniaturized, and there are advantages such as the miniaturization of the mechanical shutter.
  • FIG. 1 It is the schematic which shows the cross section of the black light-shielding board of this invention which formed the metal light-shielding film and the diamond-like carbon (DLC) gradient structure black coating film on both surfaces of the coloring base material.
  • FIG. 2 is a photograph of the surface of a diamond-like carbon (DLC) gradient structure black coating film obtained in Comparative Example 1 observed with an AFM.
  • 2 is a photograph of the surface of a diamond-like carbon (DLC) gradient structure black coating film obtained in Example 1 observed with an AFM.
  • Diamond-like carbon (DLC) gradient structure black coating film A
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention is mainly composed of titanium, carbon, and oxygen, and has an oxygen content of 0.8 to 2.2 in terms of the number of O / Ti atoms.
  • the amount is 2.0 to 30.0 as the C / Ti atomic ratio, and the C / Ti and O / Ti atomic ratios are continuously changed in the film thickness direction.
  • the diamond-like carbon (DLC) gradient structure black coating film has a yellowish or brown color, and the low reflectivity and blackness are impaired. It will be. Even when the C / Ti atomic ratio exceeds 30.0, the color of the film is yellow or brown, which is not preferable because low reflectivity and blackness are impaired.
  • DLC diamond-like carbon
  • the oxygen content is less than 0.8 in terms of the O / Ti atomic ratio
  • the light transmittance of the film is low and the light blocking property due to light absorption is increased, while the blackness is impaired and low reflectivity is obtained. I can't.
  • the O / Ti atomic ratio exceeds 2.2, the water repellency is excellent, but the light transmittance is high, the film color is yellow or brown, and the blackness is inferior.
  • the C / Ti atomic ratio and the O / Ti atomic ratio in the black coating film can be analyzed using, for example, XPS (X-ray photoelectron spectrometer). Since the outermost surface of the film is bonded with a lot of oxygen, it is removed by sputtering to a depth of about 10 nm in a vacuum, and then the C / Ti atomic ratio and O / Ti atomic ratio in the film are quantified if measured afterwards.
  • the low reflectivity and blackness of the film depend on the film thickness, and when the film thickness is 20 nm or more, the film absorbs light sufficiently, resulting in low reflectivity and blackness. Can demonstrate its sexuality.
  • the film thickness capable of exhibiting slidability and water repellency is 20 nm or more, preferably 50 nm or more.
  • the C / Ti atomic ratio and the O / Ti atomic ratio change continuously in the film thickness direction of the diamond-like carbon (DLC) gradient structure black coating film.
  • the C / Ti atomic ratio and the O / Ti atomic ratio change continuously in the film thickness direction of the diamond-like carbon (DLC) gradient structure black coating film.
  • a structure having no interface due to a difference in composition can be obtained, and the adhesion to the base film is excellent.
  • an extinction coefficient and a refractive index difference are generated in the diamond-like carbon (DLC) gradient structure black coating, and the effect of preventing light reflection on the film surface is obtained, compared with the case where a film having a single film composition is formed. Can also be reduced in reflection.
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention preferably has surface unevenness.
  • the arithmetic average height (Ra) in the region of 1 ⁇ m ⁇ 1 ⁇ m of the black coating film surface measured by an atomic force microscope is 0.8 nm or more, preferably 2.0 nm or more. Thereby, reflected light is scattered, low reflectivity can be ensured, and it becomes useful as an optical member.
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention may contain elements other than Ti, C, and O to the extent that the above characteristics are not impaired.
  • a sintering aid is added in order to improve the sintering density of a sintered body as the material.
  • elements such as Fe, Ni, Co, Zn, Cu, Mn, In, Sn, Nb, and Ta are added to the sintered body target as a sintering aid, and the added element is diamond-like carbon.
  • DLC diamond-like carbon
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention is a metal thin plate of SUS, SK, Al, Ti, a ceramic thin plate, a glass plate, a resin plate, whose main component is a metal oxide of alumina, magnesia, or silica, Alternatively, it can be made low-reflective and black when formed on a metal light-shielding film formed on the surface of a substrate such as a resin film, and is effectively used as a black coating film with excellent slidability, water repellency and UV resistance can do.
  • DLC diamond-like carbon
  • the surface of the base material forming the diamond-like carbon (DLC) gradient structure black coating film is made uneven, the surface irregularity of the diamond-like carbon (DLC) gradient structure black coating film can be further increased, A matte effect can also be obtained.
  • the base material is a thin metal plate, a ceramic thin plate or glass plate mainly composed of a metal oxide such as alumina, magnesia, or silica
  • the specified surface irregularities can be obtained by etching, nanoimprinting, or mat processing using shot material. Can be formed. In the case of mat processing, mat processing using sand as a shot material is common, but the shot material is not limited to this.
  • a resin film or a resin plate is used as a base material, it is effective to make the base material surface uneven by the above method.
  • the method for forming the diamond-like carbon (DLC) gradient structure black coating film of the present invention is not particularly limited, and is a vacuum deposition method, an ion beam assisted deposition method, a gas cluster ion beam assisted deposition method, Ion plating method, ion beam sputtering method, magnetron sputtering method, bias sputtering method, ECR (Electron Cyclotron Resonance) sputtering method, radio frequency (RF) sputtering method, thermal CVD (Chemical Vapor Deposition) method, plasma CVD method, photo CVD method A known method such as the above can be appropriately employed. Especially, it is preferable to manufacture by a sputtering method. By manufacturing by a sputtering method, a diamond-like carbon (DLC) gradient structure black coating film having high adhesion can be formed on a substrate.
  • the manufacturing apparatus by sputtering method is not specifically limited,
  • the winding type sputtering apparatus shown in FIG. 5 can be used.
  • a roll-shaped resin film substrate 11 is set on an unwinding roll 12, and after the inside of the vacuum chamber 14 in the film forming chamber is evacuated by a vacuum pump 13 such as a turbo molecular pump, the film is unloaded from the unwinding roll 12.
  • 11 is passed through the surface of the cooling can roll 15 and taken up by the take-up roll 16.
  • Two magnetron cathodes 17 are installed on the opposite side of the surface of the cooling can roll 15, and a target 18 as a film raw material is attached to each cathode.
  • the targets 18 installed on the two magnetron cathodes 17 are a titanium carbide sintered body target and a carbon sintered body target, first, on the titanium carbide sintered body target with respect to the transport direction of the resin film substrate 11, A film is formed, and then a film is formed on the carbon sintered compact target.
  • the film transport unit including the unwinding roll 12 and the winding roll 16 is separated from the vacuum chamber 14 of the film forming chamber by a partition wall 19.
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention uses a titanium sintered body and a carbon sintered body, or a titanium carbide sintered body and a carbon sintered body target. It is manufactured by performing sputtering film formation under gas pressure, and as shown in FIG. 7, high-quality titanium oxide having the above composition and structure, or diamond-like carbon combined with titanium carbide oxide ( DLC) gradient structure black coating film. Further, by forming protrusions on the surface, low reflection can be achieved on the film surface by the light scattering effect.
  • a dual magnetron cathode is used for the sputtering cathode, and the film gas pressure is changed to incline the composition with respect to the film thickness direction. A structure with a mark is obtained.
  • This dual magnetron cathode is arranged so that the extended surfaces of the surface of the target of the two magnetrons are located on substantially the same plane.
  • sputtering film formation is performed at a film forming gas pressure of 1.5 Pa or more using a titanium sintered body and a carbon sintered body target, and a titanium carbide sintered body and a carbon sintered body, Ti, O, and C are changed.
  • the main component is C / Ti atomic number ratio of 2.0 to 30.0, O / Ti atomic ratio is 0.8 to 2.2, and the atomic ratio is continuous in the film thickness direction.
  • the structure can be obtained and a diamond-like carbon (DLC) gradient structure black coating film having protrusions on the film surface can be obtained.
  • DLC diamond-like carbon
  • a sintering aid is often added to improve the sintering density of a sputtering target used as a raw material for sputtering film formation.
  • the sintered compact target used when forming the diamond-like carbon (DLC) gradient structure black coating film of the present invention includes Fe, Ni, Co, Zn, Cu, Mn, In, Sn, Nb, Ta, and the like.
  • An element can be added as a sintering aid as long as the characteristics of the black coating film of the present invention are not impaired.
  • the diamond-like carbon (DLC) gradient structure black coating film is formed by using only an inert gas mainly containing argon or helium without supplying oxygen gas as a film forming gas. It can also be manufactured.
  • oxygen contained in the sintered body target and / or oxygen in the residual gas in the sputtering film forming chamber is effectively used as the oxygen in the film.
  • the oxygen contained in the sintered compact target and the oxygen in the residual gas in the sputtering film forming chamber are very small.
  • the film forming gas pressure is increased, the ratio of taking oxygen in the film forming chamber into the film increases.
  • the film is sufficient.
  • oxygen is not contained, and in that case, the film forming gas pressure is set to 1.5 Pa or more, so that the black coating film can be obtained by sufficiently containing oxygen.
  • the film formation method using oxygen contained in the sintered compact target and oxygen in the residual gas in the sputtering film formation chamber is an extremely effective method for forming a uniform color over a large area.
  • a normal method of forming a film at a normal gas pressure by supplying oxygen gas if the supply of oxygen gas is not uniform, in the case of large-area film formation, it is caused by unevenness of oxygen content in the film. And uneven color.
  • the film formation method that uses oxygen contained in the sintered compact target and oxygen in the residual gas in the sputtering film formation chamber has oxygen uniformly on the film formation surface. Uneven taste is less likely to occur.
  • the film-forming temperature differs depending on the type of substrate and is difficult to specify. However, if it is a metal thin plate, a ceramic thin plate or glass plate mainly composed of a metal oxide such as alumina, magnesia, or silica, it is 400 ° C. or less, for example. If it is a resin film, it can be 300 degrees C or less, for example.
  • Substrate (B) As the substrate (B), a metal thin plate of stainless steel, SK (carbon steel), Al, Ti, a ceramic thin plate such as alumina, magnesia, silica, zirconia, a glass plate, a resin plate, or a resin film can be used. Among them, it is preferable to use a resin film in order to realize a lightweight black light shielding plate.
  • the resin film is preferably one kind selected from polyimide, polyamideimide, polyetheretherketone, polyethylene terephthalate, polyphenylene sulfide, polyethylene naphthalate, polyethersulfone, and polycarbonate.
  • the thickness of the resin film is preferably 5 to 200 ⁇ m, more preferably 10 to 150 ⁇ m, and most preferably 20 to 125 ⁇ m.
  • a resin film thinner than 5 ⁇ m is not preferred because it is difficult to handle due to poor handling properties, and surface defects such as scratches and creases are easily attached to the film. If the resin film is thicker than 200 ⁇ m, a plurality of light-shielding blades cannot be mounted on a diaphragm device or a light amount adjusting device that is becoming smaller in size, which is inappropriate for some applications.
  • Metal light shielding film (C) The metal light-shielding film is formed on one side or both sides of the substrate, and contains one or more elements selected from titanium, tantalum, tungsten, cobalt, nickel, niobium, iron, zinc, copper, aluminum, or silicon.
  • a metal material having a main component can be used. Among these, metal materials such as Ti, Ni, Cu, Al, or NiTi alloy are preferable.
  • nitrides, carbides, carbonitrides, carbide oxides, nitride oxides, and carbonitrides of these metals can be used.
  • metal carbide materials such as titanium carbide, tungsten carbide, and molybdenum carbide are preferable because they have excellent oxidation resistance in a high temperature environment and good heat resistance.
  • titanium carbide is particularly preferable because the surface has a relatively high degree of blackness and excellent low reflectivity, and the effect of blackening is increased.
  • the titanium carbide oxide film can be used as a metal light shielding film having excellent heat resistance.
  • the metal light-shielding film is formed by sputtering and may be formed under a gas pressure generally used such as 0.2 to 0.8 Pa.
  • Ar gas in which oxygen is slightly mixed may be used as the sputtering gas as long as the characteristics of the black light shielding plate can be satisfied.
  • the bond between an organic resin film and an inorganic metal film is weak.
  • the metal light-shielding film of the present invention is formed on the surface of the resin film.
  • it is effective to increase the film surface temperature during film formation.
  • the glass transition point and decomposition temperature are exceeded when the temperature is raised to 130 ° C. or higher, such as PET, so the surface temperature of the resin film during film formation is as low as possible.
  • Black light shielding plate The structure of the black light shielding plate of the present invention is shown in FIGS. On one side or both sides of the substrate 1 selected from a resin film, a resin plate, a metal thin plate, or a ceramic thin plate, a metal light-shielding film 3 having a film thickness of 40 nm or more and the diamond-like carbon (DLC) gradient structure black coating film 2 are sequentially formed. It is a formed structure. Here, this is referred to as a first black light shielding plate.
  • DLC diamond-like carbon
  • the metal light shielding film 3 having a film thickness of 20 nm or more and the diamond-like carbon (DLC) gradient structure black coating film 2 are formed on one surface or both surfaces of the coloring substrate 1a.
  • DLC diamond-like carbon
  • the average optical density in the visible region that is, in the wavelength range of 380 to 780 nm is larger than 4.0
  • the average regular reflectance on the surface of the black coating film in the wavelength range of 380 to 780 nm is 0.8% or less.
  • An optical member can be realized.
  • the average optical density is greater than 4.0, the transmittance is almost zero, indicating complete light shielding properties.
  • the optical density (OD) is a function of transmittance: T (%) represented by the following formula (1).
  • the regular reflectance of the surface of the black coating film represents the reflectance of light reflected from the surface at an angle equal to the incident angle of incident light according to the law of reflection.
  • first black light shielding plate and the second black light shielding plate will be described in detail.
  • a resin film, a resin plate, a metal thin plate, a ceramic thin plate, or the like is selected as the substrate.
  • a resin film is preferable.
  • the resin film examples include polyimide (PI), polyamideimide (PAI), polyetheretherketone (PEEK), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polyethylene naphthalate (PEN), polyethersulfone (A film made of one or more materials selected from PES) and polycarbonate (PC), and a film having an acrylic hard coat on the surface of these films can be used.
  • PI polyimide
  • PAI polyamideimide
  • PEEK polyetheretherketone
  • PET polyethylene terephthalate
  • PPS polyphenylene sulfide
  • PEN polyethylene naphthalate
  • PC polycarbonate
  • a metal light-shielding film having a film thickness of 40 nm or more must be formed on the surface in order to have complete light-shielding properties.
  • the thickness of the metal light shielding film is preferably 40 to 200 nm, more preferably 70 to 150 nm. If the film thickness is greater than 200 nm, it takes a long time to form the metal light-shielding film, which is not preferable because the manufacturing cost increases or the necessary film forming material increases and the material cost increases.
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention After forming the metal light shielding film, it is necessary to form the diamond-like carbon (DLC) gradient structure black coating film of the present invention. As a result, it is possible to realize a black light-shielding plate that is excellent in lightness and has sufficient light-shielding properties and blackness, low reflectivity, slidability, water repellency, and ultraviolet resistance.
  • the film thickness of the diamond-like carbon (DLC) gradient structure black coating film formed on such a substrate is 20 nm or more. Furthermore, 40 nm or more, 100 nm or more are preferable, More preferably, it is 150 nm or more.
  • the film thickness of the diamond-like carbon (DLC) gradient structure black coating film is less than 20 nm, the average optical density at wavelengths of 380 to 780 nm is greater than 4.0, and complete light-shielding properties can be obtained, but the diamond-like carbon (DLC) gradient
  • the average regular reflectance on the surface of the structural black coating film exceeds 5%, and the reflectance becomes high.
  • the film thickness exceeds 200 nm, a completely light-shielding black coating film can be obtained, but there arises a problem that the sputtering time becomes long and the cost becomes high.
  • the brightness (hereinafter referred to as L * ) of the black light shielding plate in which the diamond-like carbon (DLC) gradient structure black coating film is formed on the surface of the metal light shielding film is preferably 25 to 45, more Preferably it is 40 or less.
  • the L * value represents the lightness (monochrome degree) represented by the CIE color system of the color, is obtained from the spectral reflectance in the visible light range, and in order to make the L * value less than 25, Since the film thickness of the diamond-like carbon (DLC) gradient structure black coating film exceeds 200 nm, the blackness becomes higher, the reflection can be reduced, and complete light-shielding properties can be obtained, but the sputtering time becomes longer, The problem of high costs arises.
  • the regular reflectance can be reduced, that is, the effect of matting can be brought about. Therefore, it becomes a preferable optical member.
  • the surface roughness (arithmetic average height Ra) of the black coating film is 0.2 to 0.7 ⁇ m
  • the average regular reflectance of the black coating film surface at a wavelength of 380 to 780 nm is 0.8% or less. It is preferable because a black shading plate with very low reflection can be realized.
  • the arithmetic average height Ra is also called arithmetic average roughness
  • the reference length is extracted from the roughness curve in the direction of the average line, and the absolute value of the deviation from the average line of the extracted portion to the measurement curve is calculated. It is a value obtained by adding up and averaging.
  • the irregularities on the surface of the base material can be formed into predetermined irregularities by nanoimprinting or mat processing using a shot material.
  • mat processing mat processing using sand as a shot material is common, but the shot material is not limited to this.
  • the resin film when a resin film is used as the substrate, the resin film is soft, and thus is easily deformed by the influence of the stress of the film formed on the surface. In order to avoid this, it is effective to form films having the same configuration and the same film thickness on both sides of the resin film symmetrically on the film.
  • the diamond-like carbon (DLC) gradient structure black coating with the same composition and the same film thickness on both surfaces (on the metal light-shielding film) A black light shielding plate obtained by forming a film is preferable because it is less deformed.
  • the second black light-shielding plate of the present invention is a metal light-shielding film having a thickness of 20 nm or more on one side or both sides of a colored resin film as a base material 1.
  • the diamond-like carbon (DLC) gradient structure black coating film 2 is formed on the surface of the metal light-shielding film.
  • the colored resin film is preferably colored black, brown or black brown.
  • the colored resin film include polyimide (PI), polyamideimide (PAI), polyetheretherketone (PEEK), polyethylene terephthalate (PET), polyphenylene sulfide (PPS), polyethylene naphthalate (PEN), and polyethersulfone.
  • PI polyimide
  • PAI polyamideimide
  • PEEK polyetheretherketone
  • PET polyethylene terephthalate
  • PPS polyphenylene sulfide
  • PEN polyethylene naphthalate
  • PES polyethersulfone
  • a film composed of one or more materials selected from polycarbonate (PC) is used as a base material, and black particles such as carbon black, titanium black, and aniline black are contained inside to reduce transmittance. Film can be used.
  • the colored resin film preferably has a light transmittance of 1% or less at a wavelength of 380 to 780 nm, more preferably 0.1% or less.
  • the thickness of the colored resin film is preferably in the range of 20 to 200 ⁇ m, more preferably 30 to 150 ⁇ m, and most preferably 50 to 125 ⁇ m.
  • a colored resin film thinner than 20 ⁇ m is not preferable because it has poor handling properties and is difficult to handle, is susceptible to surface defects such as scratches and creases, and has low rigidity. If the colored resin film is thicker than 200 ⁇ m, it is not preferable because a plurality of light shielding blades cannot be mounted on a shutter blade device that is becoming smaller in size, and it becomes unsuitable depending on the application.
  • the colored resin film is not transparent, the light transmittance at a wavelength of 380 to 780 nm in the visible light region is lower than that of a transparent resin plate or a transparent resin film having high transparency, and the metal formed on the substrate.
  • the film thickness of the light shielding film and the diamond-like carbon (DLC) gradient structure black coating film can be made thinner than that of the first black light shielding plate.
  • the thickness of the metal light-shielding film formed on the colored resin film is preferably in the range of 20 to 200 nm, more preferably 30 to 100 nm.
  • the optical density at a wavelength of 380 to 780 nm of the black light-shielding plate is 4 even when the diamond-like carbon (DLC) gradient structure black coating film formed on the metal light-shielding film is formed with a thickness of 200 nm.
  • DLC diamond-like carbon
  • the film thickness of the diamond-like carbon (DLC) gradient structure black coating film is preferably in the range of 20 to 200 nm, more preferably 50 to 150 nm.
  • the thickness of the black coating film is 20 nm or less, the lightness (L * value) of the black light-shielding plate is increased even when a colored resin film having a light transmittance of 380 to 780 nm and a light transmittance of 0.1% or less is used.
  • the film thickness exceeds 200 nm, the lightness (L * value) of the black light-shielding plate is very low, but the film formation rate of the diamond-like carbon (DLC) gradient structure black coating film is low, so the sputtering time.
  • the manufacturing cost increases, and as a manufacturing problem, the processing start time of one batch is shifted from batch to batch, and stable routineization cannot be performed.
  • the L * value of a black light shielding plate formed by forming a metal light shielding film and a diamond-like carbon (DLC) gradient structure black coating film on a colored resin film is preferably 25 to 45, more preferably 25 to 45. 40.
  • the L * value of the black light-shielding plate is less than 25, the blackness becomes higher and the reflection is reduced and complete light-shielding properties are obtained, but the film thickness of the black coating film exceeds 200 nm. Therefore, the problem that sputtering time becomes long and cost becomes high arises.
  • the L * value exceeds 45 the blackness is insufficient, and there is a problem that the regular reflectance on the surface of the diamond-like carbon (DLC) gradient structure black coating film increases, which is not preferable.
  • the diamond-like carbon (DLC) gradient structure black coating film of the present invention can be applied as a surface coating film of an optical member, and the black light shielding plate does not cause end face cracks. It can be used as a shutter blade for digital cameras and digital video cameras by punching into a specific shape.
  • the present invention is described in detail below using examples.
  • Titanium metal, titanium carbide, and carbon target were each prepared by hot press sintering using powder. Furthermore, metal targets such as a NiTi target (containing 3 wt% Ti), a Cu target, and an Al target were also prepared using the melt casting method.
  • Metallic titanium (purity 4N, 64 ⁇ 600 ⁇ 6 mmt) and carbon sintered body target (purity 4N, 64 ⁇ 600 ⁇ 6 mmt), or titanium carbide (purity 2N, 64 ⁇ 600 ⁇ 6 mmt) and carbon sintered body target was used to prepare a diamond-like carbon (DLC) gradient structure black coating film by dual magnetron sputtering or double magnetron sputtering.
  • the composition of the membrane was adjusted by changing the deposition gas pressure in the case of a dual magnetron cathode and changing the input power and gas pressure at each cathode in the case of a double magnetron cathode.
  • a diamond-like carbon (DLC) gradient structure black coating film by sputtering was produced by the following procedure.
  • the sputtering target was attached to a dual magnetron cathode or a double magnetron cathode of a take-up magnetron sputtering apparatus, and a substrate was attached so as to face the target.
  • a titanium metal target and a carbon sintered compact target, or a titanium carbide sintered compact target and a carbon sintered compact target are arrange
  • the distance between the target and the substrate is 75 mm, and when the degree of vacuum in the chamber reaches 2 ⁇ 10 ⁇ 4 to 1 ⁇ 10 ⁇ 4 Pa, Ar gas having a purity of 99.9999% is introduced into the chamber.
  • the gas pressure was 0.3 to 8.0 Pa.
  • AC power was 1000 to 2000 W
  • the target input DC power density was 0.7 to 5.2 W / cm 2 to generate plasma.
  • a film having a predetermined film thickness was formed on the substrate while the substrate was running without heating the substrate.
  • the regular reflectance of light of the black coating film refers to the reflectance of light reflected from the surface at an angle equal to the incident angle of incident light according to the law of reflection. The incident angle was measured at 5 °.
  • the parallel light transmittance means a parallel component of light rays that pass through the diamond-like carbon (DLC) gradient structure black coating film, and is expressed by the following equation.
  • TEM high-resolution transmission electron microscope
  • Diamond-like carbon (DLC) gradient structure black coating film obtained by using Micro Laser Raman (SENTERRA) manufactured by Bruker Optics The mixed state of sp2-bonded carbon and sp3-bonded carbon of the component of the carbon in the inside was investigated. From the Raman spectrum, the Raman peaks of sp2-bonded carbon and sp3-bonded carbon derived from carbon were evaluated by performing peak fitting with a Gaussian waveform.
  • the sputtering film formation was performed in the same manner as in Example 1 except that the film formation gas pressure was set to 3.0 Pa.
  • the measurement results of the film properties are shown in Table 1.
  • the sputtering film formation was performed in the same manner as in Example 1 except that the film formation gas pressure was 6.0 Pa.
  • the measurement results of the film properties are shown in Table 1.
  • the sputtering film formation was performed in the same manner as in Example 1 except that the AC power was maintained at 2000 W and the film formation gas pressure was 8.0 Pa.
  • the measurement results of the film properties are shown in Table 1.
  • Example 1 Sputter deposition was performed in the same manner as in Example 1 except that the AC power was maintained at 2000 W and the deposition gas pressure was 1.4 Pa. The measurement results of the produced film characteristics are shown in Table 1.
  • Example 1 to 4 the film was formed by introducing only Ar gas at a film forming gas pressure of 1.5 to 8.0 Pa. As shown in Table 1, the composition in the film thickness direction was C / Ti atomic ratio. It was 2.05 to 29.00. On the other hand, the O / Ti atomic ratio was 0.80 to 2.20. In each of Examples 1 to 4, the C / Ti atomic ratio and the O / Ti atomic ratio were low on the substrate side and high on the film surface side.
  • the average specular light reflectance at a wavelength of 380 to 780 nm was as low as 10.8 to 15.1%, and a black film having an average transmittance of 21.8 to 53.4% was obtained.
  • the carbon bonding state in the film was a mixture of sp2 bonded carbon and sp3 bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10 or less.
  • the contact angle with respect to water was 96 to 115 ° and 90 ° or more for any film, indicating excellent water repellency.
  • the arithmetic average height Ra of the film surface was 0.92 to 3.01 nm, and irregularities were formed on the film surface.
  • Such a film is very useful as a surface coating film for shutter blades because it is black and has a low average specular reflectance, a very small coefficient of dynamic friction, and excellent water repellency and UV resistance. .
  • Comparative Example 1 in which sputtering film formation was performed under the conditions of AC power 2000 W and gas pressure 1.4 Pa, the C / Ti atomic ratio was 1.58 to 5.10 as compared with the films of Examples 1 to 4.
  • the O / Ti atomic ratio was as low as 0.53 to 0.75, and the film color was brown.
  • the average regular reflectance at wavelengths of 380 to 780 nm was 19.4%, which was higher than those of Examples 1 to 4, and the average transmittance was 19.7%, which was smaller.
  • the surface roughness (Ra) of the film was 0.75 nm, which was smaller than Example 1 and flat.
  • the contact angle with water was 85 °, which was small compared to Examples 1 to 4, and the coefficient of dynamic friction was as large as 0.14.
  • the UV resistance was good with no discoloration as in Examples 1 to 4.
  • Example 1 Except for using a titanium carbide target and a sintered carbon target as a target combination, the AC power value, the deposition gas pressure, the duty ratio at the dual magnetron cathode, and the film thickness were the same as in Example 1. A film was formed on top. The measurement results of the film properties are shown in Table 1.
  • the AC power value, the deposition gas pressure, the duty ratio at the dual magnetron cathode, and the film thickness were the same as in Example 2, and the glass substrate A film was formed on top.
  • the measurement results of the film properties are shown in Table 1.
  • the film forming gas pressure, the duty ratio at the dual magnetron cathode, and the film thickness were the same as in Example 3, and the film was formed on the glass substrate. Formed.
  • the measurement results of the film properties are shown in Table 1.
  • Example 2 Sputter deposition was performed in the same manner as in Example 5 except that the AC power was maintained at 2000 W and the deposition gas pressure was 1.4 Pa. The measurement results of the film properties are shown in Table 1.
  • Example 3 A sputtering film was formed in the same manner as in Example 5 except that the AC power was maintained at 1000 W and the film forming gas pressure was 8.0 Pa. The measurement results of the film properties are shown in Table 1.
  • the C / Ti atom number ratio in the film was 2.05 to 30.00, and the O / Ti atom number ratio was 0.80 to 2.10.
  • the Ti atom number ratio was low on the substrate side and high on the film surface side, and the O / Ti atom number ratio was low on the substrate side and high on the film surface side.
  • An average regular reflectance at a wavelength of 380 to 780 nm was as low as 10.6 to 16.9%, and a black film having an average transmittance of 22.4 to 34.6% was obtained.
  • the surface roughness (Ra) of the film was 3.42 to 4.11 nm, and irregularities were formed on the film surface.
  • the carbon bonding state in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10 or less, and the contact angle with water was 98 to 124 ° and 90 ° or more for all films, indicating that the film was excellent in water repellency.
  • Such a film is very useful as a surface coating film for shutter blades because it is black and has a low average specular reflectance, a very small coefficient of dynamic friction, and excellent water repellency and UV resistance. .
  • the C / Ti atom number ratio in the film is 1.95 to 18.70, compared with the films of Examples 5 to 7 formed at a gas pressure of 1.5 Pa or more, and the O / Ti atom ratio.
  • the average regular reflectance at wavelengths of 380 to 780 nm was as high as 18.6%, and the average transmittance was as low as 18.9%.
  • the surface roughness (Ra) of the film was 0.78 nm, which was smaller than Example 1 and was flat.
  • the contact angle with water was 88 °, which was smaller than those in Examples 5 to 7, and the dynamic friction coefficient was as large as 0.17.
  • the UV resistance was good with no discoloration as in Examples 5-7.
  • Comparative Example 3 As can be seen from Table 1, the C / Ti atomic number ratio in the film was 4.37 to 31.20, and the O / Ti atomic number ratio was 1.78 to 2.28.
  • the film surface portion was higher than ⁇ 7, the average regular reflectance was low, and the average transmittance was high.
  • the film surface was uneven and the arithmetic average height Ra was large, the kinetic friction coefficient and water repellency were inferior because the convex portion had a rounded shape.
  • the average regular reflectance is high, the blackness is low, the contact angle with water is small, and the dynamic friction coefficient is high.
  • Comparative Example 3 the optical characteristics are good, but the contact angle is small. Since the coefficient of dynamic friction is also high, it was not suitable as a surface coating film for shutter blade materials.
  • the target type and film forming gas pressure were prepared in the same manner as in Example 3 except that the thickness of the diamond-like carbon (DLC) gradient structure black coating film was 20 nm.
  • the measurement results of the film properties are shown in Table 1.
  • the C / Ti atomic ratio in the film is 2.96 to 24.3 and the O / Ti atomic ratio is 0.95 to 1.55. Both the C / Ti atomic ratio and the O / Ti atomic ratio are on the film surface. Got higher on the side.
  • a black film having an average regular reflectance of 17.8% and an average transmittance of 48.6% at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film wavelength was obtained.
  • the surface roughness (Ra) of the film was 0.84 nm, and irregularities were formed on the film surface.
  • the carbon bonding state in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.09, the contact angle with water was 91 °, and it was found that water repellency was excellent.
  • Such a film is very useful as a surface coating film for shutter blades because it is black and has a low average specular reflectance, a very small coefficient of dynamic friction, and excellent water repellency and UV resistance. .
  • Example 4 The target type and deposition gas pressure were prepared in the same manner as in Example 3 except that the thickness of the diamond-like carbon (DLC) gradient structure black coating film was 17 nm.
  • the measurement results of the film properties are shown in Table 1.
  • the C / Ti atomic ratio in the film was 3.04 to 21.5, the O / Ti atomic ratio was 0.62 to 0.79, and the O / Ti atomic ratio was lower than that in Example 3. .
  • the obtained diamond-like carbon (DLC) graded black coating film has an average regular reflectance of 21.4% and an average transmittance of 52.3% at a wavelength of 380 to 780 nm, which is higher than that of Example 3. became.
  • the color of the obtained film was brown.
  • the surface roughness (Ra) of the film was 0.78 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.09, and the contact angle with water was 84 °. Furthermore, there was no discoloration of the film after the UV resistance test. Therefore, the dynamic friction coefficient and ultraviolet resistance are the same as in Example 3, but the film of Comparative Example 4 having a small contact angle with water, a brown film color, and a high average regular reflectance and a high average transmittance is low in reflection and It is inappropriate as a surface coating film for shutter blades where black is desired.
  • the target type and film forming gas pressure were prepared in the same manner as in Example 7 except that the thickness of the diamond-like carbon (DLC) gradient structure black coating film was 20 nm.
  • the measurement results of the film properties are shown in Table 1.
  • the C / Ti atomic ratio in the film is 2.38 to 29.4 and the O / Ti atomic ratio is 0.88 to 1.45. Both the C / Ti atomic ratio and the O / Ti atomic ratio are on the film surface. Got higher on the side.
  • a black film having an average regular reflectance of 16.2% and an average transmittance of 49.1% at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film wavelength was obtained.
  • the surface roughness (Ra) of the film was 0.93 nm, and irregularities were formed on the film surface.
  • the carbon bonding state in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10, the contact angle with water was 93 °, and it was found that water repellency was excellent.
  • Such a film is very useful as a surface coating film for shutter blades because it is black and has a low average specular reflectance, a very small coefficient of dynamic friction, and excellent water repellency and UV resistance. .
  • Example 5 The target type and film forming gas pressure were prepared in the same manner as in Example 7 except that the film thickness of the diamond-like carbon (DLC) gradient structure black coating film was 17 nm.
  • the measurement results of the film properties are shown in Table 1.
  • the C / Ti atomic ratio in the film was 2.21 to 27.3, the O / Ti atomic ratio was 0.52 to 0.70, and the O / Ti atomic ratio was lower than that in Example 7. .
  • the obtained diamond-like carbon (DLC) gradient structure black coating film had an average regular reflectance of 20.7% and an average transmittance of 50.4% at a wavelength of 380 to 780 nm, both of which were higher than those of Example 7. became.
  • the color of the obtained film was brown.
  • the surface roughness (Ra) of the film was 0.74 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.09, and the contact angle with water was 87 °. Furthermore, there was no discoloration of the film after the UV resistance test. Therefore, the dynamic friction coefficient, water repellency, and UV resistance are the same as in Example 7, but the film of Comparative Example 5 having a brown film color and high average regular reflectance and high average transmittance is low reflective and black. It is unsuitable as a surface coating film for a shutter blade material for which water repellency is desired.
  • a titanium target and a sintered carbon target were used as the sputtering target, and the cathode system used for film formation was changed to a double magnetron cathode.
  • Film formation was performed with an input power density of the titanium target of 5.2 W / cm 2 and an input power density of the carbon sintered body target of 1.3 W / cm 2 .
  • the film thickness was about 200 nm, the film forming gas pressure was 1.5 Pa, and a diamond-like carbon (DLC) gradient structure black coating film was formed on a glass substrate.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 2.32 to 7.50, which was higher on the film surface side. Further, the O / Ti atomic ratio was 0.85 to 0.96, and the O / Ti atomic ratio was higher on the film surface side.
  • the average regular reflectance at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film was 17.6%.
  • a black film having an average transmittance of 35.0% was obtained.
  • the surface roughness (Ra) of the film was 0.99 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10.
  • the contact angle with water was 93 °, and it was found that the water repellency was excellent.
  • the film of Example 10 which is black and has a low average regular reflectance, a very small dynamic friction coefficient, and excellent water repellency and UV resistance, is very useful as a surface coating film for shutter blade materials.
  • a diamond-like carbon (DLC) gradient structure black coating film was produced on a glass substrate under the same conditions as in Example 10 except that the film forming gas pressure was 6.0 Pa.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atom number ratio in the film was 2.69 to 21.53, which was higher on the film surface side.
  • the O / Ti atomic ratio was 1.25 to 1.94, and the O / Ti atomic ratio was higher on the film surface side.
  • the obtained diamond-like carbon (DLC) gradient structure black coating film had a wavelength of 380 to 780 nm with an average regular reflectance of 14.2%, and a black film with an average transmittance of 47.1% was obtained. .
  • the surface roughness (Ra) of the film was 2.77 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10, the contact angle with water was 108 °, and it was found that water repellency was excellent. Furthermore, there was no discoloration of the film after the UV resistance test.
  • Such a film of Example 11 which is black and has a low average specular reflectance, a very small dynamic friction coefficient, and excellent water repellency and UV resistance is very useful as a surface coating film of a shutter blade material.
  • a diamond-like carbon (DLC) gradient structure black coating film was produced on a glass substrate in the same manner as in Example 10 except that the gas pressure was changed to 8.0 Pa.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 4.28 to 28.70, which was higher on the film surface side.
  • the O / Ti atomic ratio was 1.64 to 2.20, and the O / Ti atomic ratio was higher on the film surface side.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film obtained a black film having an average regular reflectance of 12.7% and an average transmittance of 50.3% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 3.17 nm, and uneven projections were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.08, the contact angle with water was 120 °, and it was found that water repellency was excellent. Furthermore, there was no discoloration of the film after the UV resistance test.
  • Example 6 A diamond-like carbon (DLC) gradient structure black coating film was produced in the same manner as in Example 10 except that the film forming gas pressure was changed to 0.3 Pa, in the same manner as in Example 10.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 0.95 to 10.52, which was higher on the film surface side.
  • the O / Ti atom number ratio was 0.45 to 0.62, which was higher on the film surface side as in the C / Ti atom number ratio.
  • the O / Ti atomic ratio was smaller than that in Example 10.
  • the average regular reflectance at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film was 24.5%, and the average transmittance was 4.5%. Compared to Example 10, the average regular reflectance was high and the average transmittance was low.
  • the film color was yellow or brown and was not black.
  • the surface roughness (Ra) of the film was 0.74 nm, which was smaller than that of Example 10, and the film surface was flat.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.28, which was larger than that of Example 10.
  • the contact angle with water was less than 90 °, indicating that the water repellency was poor.
  • the film of Comparative Example 6 is low reflection and black and has low dynamic friction. It is inappropriate as a surface coating film for a shutter blade material for which a coefficient is desired.
  • Example 7 A diamond-like carbon (DLC) gradient structure black coating film was produced in the same manner as in Example 10 except that the film forming gas pressure was changed to 1.4 Pa. The measurement results of the film properties are shown in Table 2.
  • DLC diamond-like carbon
  • the C / Ti atomic ratio in the film was 1.48 to 15.88, which was higher on the film surface side. Further, the O / Ti atom number ratio was 0.67 to 0.78, which was higher on the film surface side as in the C / Ti atom number ratio. The O / Ti atomic ratio was smaller than that in Example 10.
  • the average regular reflectance at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film was 18.9%, and the average transmittance was 15.7%.
  • the average regular reflectance was high and the average transmittance was low.
  • the film color was yellow or brown and was not black.
  • the surface roughness (Ra) of the film was 0.45 nm, which was smaller than that of Example 10, and the film surface was flat.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.13, which was larger than that of Example 10.
  • the contact angle with water was less than 90 °, indicating that the water repellency was poor.
  • the film of Comparative Example 7 is low in reflection and black and has low dynamic friction. It is inappropriate as a surface coating film for a shutter blade material for which a coefficient is desired.
  • Example 8 A diamond-like carbon (DLC) gradient structure black coating film was produced on a glass substrate in the same manner as in Example 12 except that the input power density of the target 2 was changed to 0.7 W / cm 2 .
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 4.50 to 29.90, which was higher on the film surface side.
  • the O / Ti atomic ratio was 1.84 to 2.38, and the O / Ti atomic ratio was higher on the film surface side.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film had a black film having an average regular reflectance of 10.2% and an average transmittance of 52.7% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 3.87 nm, and irregularities were formed on the film surface.
  • the tip of the convex portion was rounder than that of Example 12.
  • the carbon bonding state in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.17, and the contact angle with water was 88 °, which was inferior to that of Example 12.
  • Film formation was performed in the same manner as in Example 10 except that the titanium carbide target and the carbon sintered body target were used as the sputtering target, and the film formation gas pressure, target input power density, and film thickness were the same.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 2.25 to 20.30, which was higher on the film surface side. Further, the O / Ti atomic ratio was 0.82 to 0.94, which was higher on the film surface side.
  • the obtained diamond-like carbon (DLC) gradient structure black coating film had a black film having an average regular reflectance of 15.6% and an average transmittance of 24.6% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 1.24 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10, the contact angle with water was 103 °, and it was found that water repellency was excellent. Furthermore, there was no discoloration of the film after the UV resistance test.
  • Example 13 Except that the film forming gas pressure was changed to 6.0 Pa, the target type, target input power density, and film thickness were formed in the same manner as in Example 13. The measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 2.75 to 28.60, which was higher on the film surface side. Further, the O / Ti atomic ratio was 1.15 to 2.05, which was higher on the film surface side.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film obtained a black film having an average regular reflectance of 11.5% and an average transmittance of 38.6% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 2.66 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.08, the contact angle with water was 119 °, and it was found that water repellency was excellent. Furthermore, there was no discoloration of the film after the UV resistance test.
  • Such a film of Example 14 which is black and has a low average specular reflectance, a very small dynamic friction coefficient, and excellent water repellency and UV resistance is very useful as a surface coating film for a shutter blade material.
  • Example 9 A diamond-like carbon (DLC) gradient structure black coating film was produced in the same manner as in Example 13 except that the film forming gas pressure was changed to 0.3 Pa, in the same manner as in Example 13.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 1.36 to 9.20, which was higher on the film surface side.
  • the O / Ti atomic ratio was 0.35 to 0.52, which was higher on the film surface side as in the C / Ti atomic ratio.
  • the O / Ti atomic ratio was small.
  • the average regular reflectance at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film was 21.6%, and the average transmittance was 8.7%. Compared to Example 13, the average regular reflectance was high and the average transmittance was low. The film color was yellow or brown and was not black. The surface roughness (Ra) of the film was 0.66 nm, which was smaller than that of Example 13, and the film surface was flat.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.21, which was larger than that of Example 13.
  • the contact angle with water was less than 90 °, indicating that the water repellency was poor.
  • Such a film color is not black, the average regular reflectance is high, the average transmittance is low, the dynamic friction coefficient is large, and the film of Comparative Example 9 having poor water repellency is low reflection and black and has a low dynamic friction coefficient. Is inappropriate as a surface coating film for a desired shutter blade material.
  • Example 10 A diamond-like carbon (DLC) gradient structure black coating film was produced in the same manner as in Example 13 except that the film forming gas pressure was changed to 1.4 Pa.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atom number ratio in the film was 1.88 to 27.62, which was higher on the film surface side.
  • the O / Ti atomic ratio was 0.54 to 0.76, which was higher on the film surface side as in the C / Ti atomic ratio.
  • the O / Ti atomic ratio was small.
  • the average regular reflectance at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film was 19.4%, and the average transmittance was 18.3%. Compared to Example 13, the average regular reflectance was high and the average transmittance was low. The film color was yellow or brown and was not black. The surface roughness (Ra) of the film was 0.76 nm, which was smaller than that of Example 13, and the film surface was flat.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient on the film surface was 0.15, which was larger than that in Example 13.
  • the contact angle with water was less than 90 °, indicating that the water repellency was poor.
  • the film of Comparative Example 10 is low reflective and black and has a low dynamic friction coefficient. Is inappropriate as a surface coating film for a desired shutter blade material.
  • the film was formed in the same manner as in Example 11 except that the input power density, film formation gas pressure, and target type of the target were the same. .
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 2.96 to 24.30, which was higher on the film surface side. Further, the O / Ti atomic ratio was 0.95 to 1.55, which was higher on the film surface side.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film obtained a black film having an average regular reflectance of 17.8% and an average transmittance of 48.6% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 0.84 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.09, the contact angle with water was 91 °, and it was found that water repellency was excellent. Furthermore, there was no discoloration of the film after the UV resistance test.
  • the film of Example 15 which is black and has a low average regular reflectance, a very small dynamic friction coefficient, and excellent water repellency and UV resistance is very useful as a surface coating film for a shutter blade material.
  • the film thickness of the diamond-like carbon (DLC) gradient structure black coating film was changed to 20 nm
  • the film was formed in the same manner as in Example 14 except that the input power density, film formation gas pressure, and target type of the target were the same.
  • the C / Ti atomic ratio in the film was 2.38 to 29.4, which was higher on the film surface side.
  • the O / Ti atom number ratio was 0.88 to 1.45, which was higher on the film surface side.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film obtained a black film having an average regular reflectance of 16.2% and an average transmittance of 49.1% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 0.93 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10, the contact angle with water was 93 °, and it was found that water repellency was excellent. Furthermore, there was no discoloration of the film after the UV resistance test.
  • the film of Example 16 which is black and has a low average regular reflectance, a very small dynamic friction coefficient, and excellent water repellency and UV resistance, is very useful as a surface coating film for a shutter blade material.
  • Film formation was performed in the same manner as in Example 10 except that the input power density of the target 1 was changed to 3.9 W / cm 2 , and the film formation gas pressure, the target type, and the film thickness.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 2.79 to 22.53, which was higher on the film surface side. Further, the O / Ti atomic ratio was 1.15 to 2.06, which was higher on the film surface side.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film had a black film having an average regular reflectance of 15.3% and an average transmittance of 30.0% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 1.15 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10, the contact angle with water was 93 °, and it was found that water repellency was excellent. Furthermore, there was no discoloration of the film after the UV resistance test.
  • Such a film of Example 17 which is black and has a low average specular reflectance, a very small dynamic friction coefficient, and excellent water repellency and UV resistance is very useful as a surface coating film of a shutter blade material.
  • Film formation was performed in the same manner as in Example 13 except that the input power density of the target was changed to 3.9 W / cm 2 , and the film formation gas pressure, the target type, and the film thickness.
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atom number ratio in the film was 2.68 to 21.53, which was higher on the film surface side. Further, the O / Ti atomic number ratio was 1.35 to 2.10, which was higher on the film surface side.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film obtained a black film having an average regular reflectance of 14.1% and an average transmittance of 40.5% at a wavelength of 380 to 780 nm.
  • the surface roughness (Ra) of the film was 1.27 nm, and irregularities were formed on the film surface.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10.
  • the contact angle with water was 95 °, and it was found that the water repellency was excellent.
  • Such a film of Example 18 which is black and has a low average regular reflectance, a very small dynamic friction coefficient, and excellent water repellency and UV resistance is very useful as a surface coating film of a shutter blade material.
  • Example 11 Film formation was performed in the same manner as in Example 10 except that the film thickness of the diamond-like carbon (DLC) gradient structure black coating film was changed to 17 nm, and the film formation gas pressure, target type, and target input power density were the same. .
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 3.27 to 21.5, and the O / Ti atomic ratio was 0.43 to 0.69.
  • the C / Ti atom number ratio and the O / Ti atom number ratio increased on the film surface side. Compared to Example 10, the O / Ti atomic ratio was small.
  • the resulting diamond-like carbon (DLC) gradient structure black coating film had an average regular reflectance of 22.5% at a wavelength of 380 to 780 nm and an average transmittance of 48.2%. Compared to Example 10, the average regular reflectance was high. Moreover, the film color was brown and not black. The surface roughness (Ra) of the film was 0.62 nm, which was smaller than that of Example 10, and the film surface was flat.
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10, the contact angle with water was 81 °, and it was found that the water repellency was poor.
  • Such a film color is not black, the average regular reflectance is high, and the film of Comparative Example 11 having poor water repellency is not suitable as a surface coating film of a shutter blade material that is desired to be low reflection and black. is there.
  • Example 12 Film formation was performed in the same manner as in Example 13 except that the film thickness of the diamond-like carbon (DLC) gradient structure black coating film was changed to 17 nm, and the film formation gas pressure, target type, and target input power density were the same. .
  • the measurement results of the film properties are shown in Table 2.
  • the C / Ti atomic ratio in the film was 2.91 to 23.40, and the O / Ti atomic ratio was 0.50 to 0.73.
  • the C / Ti atom number ratio and the O / Ti atom number ratio increased on the film surface side. Compared to Example 13, the O / Ti atomic ratio was small.
  • the average regular reflectance at a wavelength of 380 to 780 nm of the obtained diamond-like carbon (DLC) gradient structure black coating film was 21.4%, and the average transmittance was 51.7%. Compared to Example 13, the average regular reflectance was high. Moreover, the film color was brown and not black. The surface roughness (Ra) of the film was 0.71 nm, which was smaller than that of Example 13, and the film surface was flat.
  • DLC diamond-like carbon
  • the bonding state of carbon in the film was confirmed to be a mixture of sp2-bonded carbon and sp3-bonded carbon.
  • the dynamic friction coefficient of the film surface was 0.10, and the contact angle with water was 80 °.
  • Such a film color is not black, the average regular reflectance is high, and the film of Comparative Example 12 having poor water repellency is not suitable as a surface coating film of a shutter blade material that is desired to be low reflection and black. is there.
  • the substrate type is replaced with a SUS substrate having a thickness of 50 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.25 ⁇ m, and diamond-like carbon (DLC) gradient structure black coating film is formed on the surface of both surfaces of the substrate.
  • the film of Example 1 was formed to a thickness of 20 nm. Table 3 shows the measurement results of the film characteristics.
  • Example 19 When the film shown in Example 19 was formed, the surface thereof was black and exhibited low reflection characteristics. Further, both of the contact angles with water showed high water repellency, the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and an optical member having excellent water repellency and dynamic coefficient of friction could be obtained.
  • the surface of the substrate is a diamond-like carbon (DLC) gradient structure black coating film on both surfaces of the substrate.
  • DLC diamond-like carbon
  • Example 20 When the film shown in Example 20 was formed, the surface thereof was black and exhibited low reflection characteristics. Further, both of the contact angles with water showed high water repellency, the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and an optical member having excellent water repellency and dynamic coefficient of friction could be obtained.
  • the film according to Example 1 was formed to a thickness of 20 nm in the same manner as in Example 19 except that the type of the substrate was changed to a Ti substrate having a thickness of 50 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.23 ⁇ m. Produced.
  • the film property evaluation is shown in Table 3.
  • the film surface was black and exhibited low reflection characteristics.
  • the contact angle with water showed high water repellency
  • the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and the optical member was excellent in water repellency and dynamic coefficient of friction. .
  • the film of Example 5 was formed to a thickness of 100 nm in the same manner as in Example 20, except that the type of substrate was changed to a Ti substrate having a thickness of 50 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.23 ⁇ m. Produced.
  • the film property evaluation is shown in Table 3.
  • the film surface was black and exhibited low reflection characteristics.
  • the contact angle with water showed high water repellency
  • the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and the optical member was excellent in water repellency and dynamic coefficient of friction. .
  • the film of Example 1 was formed to a thickness of 20 nm in the same manner as in Example 19 except that the type of substrate was changed to an Al substrate having a thickness of 50 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.26 ⁇ m. Produced.
  • the evaluation results of the film properties are shown in Table 3.
  • Example 19 the surface was black and exhibited low reflection characteristics. Further, both of the contact angles with water showed high water repellency, the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and an optical member having excellent water repellency and dynamic coefficient of friction could be obtained.
  • the film of Example 5 was formed to a thickness of 100 nm in the same manner as Example 20, except that the type of substrate was changed to an Al substrate having a thickness of 50 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.26 ⁇ m. Produced.
  • the evaluation results of the film properties are shown in Table 3.
  • Example 20 the surface was black and exhibited low reflection characteristics. Further, both of the contact angles with water showed high water repellency, the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and an optical member having excellent water repellency and dynamic coefficient of friction could be obtained.
  • the type of the substrate was changed to a polyimide film having a thickness of 38 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.50 ⁇ m, and the film of Example 5 was formed to a thickness of 20 nm on the surface.
  • Table 3 shows the measurement results of the film characteristics.
  • the type of the substrate was changed to a polyimide film having a thickness of 50 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.50 ⁇ m, and the film of Example 5 was formed to a thickness of 20 nm on the surface.
  • the evaluation results of the film properties are shown in Table 3.
  • the type of the substrate was changed to a polyimide film having a thickness of 75 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.50 ⁇ m, and the film of Example 5 was formed to a thickness of 200 nm on the surface.
  • Table 3 shows the measurement results of the film characteristics.
  • the films of Examples 25 to 27 were both black in surface and exhibited low reflection characteristics. Further, both of the contact angles with water showed high water repellency, the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and an optical member having excellent water repellency and dynamic coefficient of friction could be obtained.
  • the substrate was replaced with a PET film having a thickness of 38 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.60 ⁇ m, and the film of Example 5 was formed on the surface thereof to a thickness of 20 nm.
  • Table 3 shows the measurement results of the film characteristics.
  • the substrate was replaced with a PET film having a thickness of 50 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.60 ⁇ m, and the film of Example 5 was formed on the surface thereof to a thickness of 20 nm.
  • Table 3 shows the measurement results of the film characteristics.
  • the substrate was replaced with a PET film having a thickness of 75 ⁇ m and a surface roughness (arithmetic average height Ra) of 0.60 ⁇ m, and the film of Example 5 was formed on the surface thereof to a thickness of 200 nm.
  • Table 3 shows the measurement results of the film characteristics.
  • the films of Examples 28 to 30 both had a black surface and exhibited low reflection characteristics. Further, both of the contact angles with water showed high water repellency, the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration due to ultraviolet irradiation, and an optical member having excellent water repellency and dynamic coefficient of friction could be obtained.
  • a titanium carbide film (film thickness: 100 nm) was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m. Then, as a second layer film on the surface of the metal light shielding film, the film of Example 1 was formed by 100 nm to produce a black light shielding plate. In both cases, the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed. Was made. The measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film (film thickness: 100 nm) was formed as a first metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m. Then, as a second layer film on the surface of the metal light shielding film, the film of Example 2 was formed by 103 nm to produce a black light shielding plate. In both cases, the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed. Was made. The measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film (thickness: 100 nm) was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m. Then, as the second layer film on the surface of the metal light-shielding film, the film of Example 3 was formed to a thickness of 105 nm to produce a black light-shielding plate. In both cases, the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed. Was made. The measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film (thickness: 100 nm) is formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m.
  • the film of Comparative Example 1 was formed by 110 nm. The measurement results of the characteristics are shown in Table 4.
  • the produced black light shielding plates of Examples 31 to 33 all had an average optical density greater than 4.0 at wavelengths of 380 to 780 nm, and exhibited complete light shielding properties.
  • the average regular reflectance was 0.46 to 0.65%.
  • the arithmetic average height (Ra) of the film surface was 0.20 ⁇ m, and the water contact angle was 96 to 105 °, indicating excellent water repellency.
  • the dynamic friction coefficient was 0.10 or less, and there was no deformation or discoloration of the film due to UV resistance.
  • the lightness (L * value) of the black light shielding plate was 36 to 40, indicating that the blackness was high. Therefore, the black light-shielding plates of Examples 31 to 33 are very useful as shutter blade materials because they are excellent in light-shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • the black light shielding plate of Comparative Example 13 had an average optical density greater than 4.0 and complete light shielding properties as in Examples 31 to 33, and the arithmetic average height Ra of the film surface was 0.20 ⁇ m.
  • the average regular reflectance was 2.80%, which was higher than those of Examples 31 to 33.
  • the lightness (L * value) of the black light shielding plate was as high as 56, and the blackness was low.
  • the contact angle with respect to water was 88 degrees and less than 90 degrees, and the dynamic friction coefficient was 0.19. Therefore, the black light-shielding plate of Comparative Example 13 is not suitable as a shutter blade material because it has poor average regular reflectance, lightness (L * value), water repellency, and slipperiness.
  • Table 4 shows the type of substrate, film configuration, and evaluation results.
  • a titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.32 ⁇ m and a thickness of 25 ⁇ m.
  • the film of Example 1 was formed to a thickness of 105 nm to produce a black light shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.32 ⁇ m and a thickness of 25 ⁇ m. Then, as the second layer film on the surface of the metal light-shielding film, the film of Example 3 was formed to a thickness of 105 nm to produce a black light-shielding plate. In both cases, the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed. Was made. The measurement results of the characteristics are shown in Table 4.
  • Comparative Example 14 an arithmetic average height (Ra) is 0.32 ⁇ m, and a titanium carbide film (film thickness: 100 nm) is formed as a first-layer metal light-shielding film on the surface of a polyimide film having a thickness of 25 ⁇ m.
  • a film of Comparative Example 1 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film. The measurement results of the characteristics are shown in Table 4.
  • the produced black light-shielding plates of Examples 34 and 35 both had an average optical density greater than 4.0 at wavelengths of 380 to 780 nm and exhibited complete light-shielding properties. Further, the average regular reflectance was 0.52 to 0.77%, which was 0.8% or less.
  • the arithmetic average height (Ra) of the film surface was 0.22 ⁇ m, and the water contact angle was 105 to 118 °, indicating excellent water repellency.
  • the dynamic friction coefficient was 0.10. There was no film deformation or discoloration due to UV resistance.
  • the lightness (L * value) of the black light shielding plate was 38 to 40, indicating that the blackness was high. Therefore, the black light-shielding plates of Examples 34 and 35 are extremely useful as shutter blade materials because they are excellent in light-shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • the black light-shielding plate of Comparative Example 14 had an average optical density greater than 4.0 as in Examples 34 and 35, had a complete light-shielding property, and the arithmetic average height Ra of the film surface was 0.22 ⁇ m. However, the average regular reflectance was 2.03%, which was higher than those in Examples 34 and 35.
  • the lightness (L * value) of the black light shielding plate was as high as 49, and the blackness was low.
  • the contact angle with respect to water was 76 ° and less than 90 °, and the dynamic friction coefficient was 0.20.
  • the black light-shielding plate of Comparative Example 14 is not suitable as a shutter blade material because it has poor average regular reflectance, lightness (L * value), water repellency, and slipperiness.
  • Table 4 shows the type of substrate, film configuration, and evaluation results.
  • a titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.43 ⁇ m and a thickness of 38 ⁇ m.
  • a film of Example 1 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.43 ⁇ m and a thickness of 38 ⁇ m.
  • a film of Example 3 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • Comparative Example 15 In Comparative Example 15, an arithmetic average height (Ra) is 0.43 ⁇ m, and a titanium carbide film (film thickness: 100 nm) is formed as a first-layer metal light-shielding film on the surface of the polyimide film having a thickness of 38 ⁇ m. A film of Comparative Example 1 having a thickness of 105 nm was formed as a second layer film on the surface of the metal light-shielding film. The measurement results of the characteristics are shown in Table 4.
  • the produced black light-shielding plates of Examples 36 and 37 both had an average optical density greater than 4.0 at wavelengths of 380 to 780 nm and exhibited complete light-shielding properties.
  • the average regular reflectance was 0.47 to 0.72%, which was 0.8% or less.
  • the arithmetic average height (Ra) of the film surface was 0.35 ⁇ m, and the contact angle with water was 105 to 120 °, indicating excellent water repellency.
  • the dynamic friction coefficient was 0.10, and there was no deformation or discoloration of the film due to UV resistance.
  • the lightness (L * value) of the black light shielding plate was 33 to 36, indicating that the blackness was high. Therefore, the black light-shielding plates of Examples 36 and 37 are extremely useful as shutter blade materials because they are excellent in light-shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • the black light-shielding plate of Comparative Example 15 had an average optical density greater than 4.0 as in Examples 36 and 37, had a complete light-shielding property, and the arithmetic average height Ra of the film surface was 0.35 ⁇ m.
  • the average regular reflectance was as high as 1.72%.
  • the lightness (L * value) of the black light shielding plate was as high as 50, and the blackness was low.
  • the contact angles with respect to water were 80 ° and less than 90 °, and the dynamic friction coefficient was 0.23. Therefore, the black light-shielding plate of Comparative Example 15 is inadequate as a shutter blade material because it has poor average regular reflectance, lightness (L * value), water repellency, and slipperiness.
  • Table 4 shows the type of substrate, film configuration, and evaluation results.
  • a titanium carbide film having a thickness of 100 nm was formed on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m as a first-layer metal light-shielding film.
  • a film of Example 1 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film having a thickness of 100 nm was formed on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m as a first-layer metal light-shielding film.
  • a film of Example 3 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • Comparative Example 16 a titanium carbide film (film thickness: 100 nm) was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m.
  • a film of Comparative Example 1 having a thickness of 105 nm was formed as a second layer film on the surface of the light shielding film. The measurement results of the characteristics are shown in Table 4.
  • the produced black light shielding plates of Examples 38 and 39 both showed an average optical density greater than 4.0 at a wavelength of 380 to 780 nm and exhibited complete light shielding properties.
  • the average regular reflectance was 0.21 to 0.31%, which was 0.8% or less.
  • the arithmetic average height (Ra) of the film surface was 0.73 ⁇ m, and the contact angle with water was 110 to 120 °, indicating excellent water repellency.
  • the dynamic friction coefficient was 0.10, and there was no deformation or discoloration of the film due to UV resistance.
  • the lightness (L * value) of the black light shielding plate was 28 to 30, indicating that the blackness was high. Therefore, the black light-shielding plates of Examples 38 and 39 are very useful as shutter blade materials because they are excellent in light-shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • the black light-shielding plate of Comparative Example 16 had an average optical density greater than 4.0 as in Examples 38 and 39, had a complete light-shielding property, and the arithmetic average height Ra of the film surface was 0.73 ⁇ m.
  • the average regular reflectance was 1.25%, which was higher than those in Examples 38 and 39.
  • the lightness (L * value) of the black light shielding plate was as high as 47, and the blackness was low.
  • the contact angle with respect to water was 89 degrees and less than 90 degrees, and the dynamic friction coefficient was 0.24.
  • the black light-shielding plate of Comparative Example 16 is not suitable as a shutter blade material because it has poor average regular reflectance, lightness (L * value), water repellency, and slipperiness.
  • Table 4 shows the type of substrate, film configuration, and evaluation results.
  • a titanium carbide film having a thickness of 40 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m.
  • a film of Example 3 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film having a thickness of 200 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m.
  • a film of Example 3 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • Example 17 A titanium carbide film having a thickness of 38 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m.
  • a film of Example 3 having a thickness of 105 nm was formed as a second film on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • the produced black light-shielding plates of Examples 40 and 41 both had an average optical density greater than 4.0 at wavelengths of 380 to 780 nm and exhibited complete light-shielding properties.
  • the average regular reflectance was 0.31 to 0.36%, which was 0.8% or less.
  • the arithmetic average height (Ra) of the film surface was 0.38 to 0.40 ⁇ m, and the water contact angle was 95 to 103 °, indicating excellent water repellency.
  • the coefficient of dynamic friction was 0.09 to 0.10, and there was no deformation or discoloration of the film due to UV resistance.
  • the lightness (L * value) of the black light shielding plate was 35 to 38, indicating that the blackness was high. Therefore, the black light-shielding plates of Examples 40 and 41 are very useful as shutter blade materials because they are excellent in light-shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • the black light-shielding plate of Comparative Example 17 had the same average regular reflectance, brightness (L * value), arithmetic average height Ra of the film, contact angle with water, and UV resistance as those of Examples 40 and 41.
  • the average optical density was 3.89, which was not completely light-shielding, and the dynamic friction coefficient was as large as 0.20. Therefore, the black light shielding plate of Comparative Example 17 is not suitable as a shutter blade material because it lacks light shielding properties and sliding properties.
  • Table 4 shows the type of substrate, film configuration, and evaluation results.
  • a titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m.
  • the film of Example 3 was formed with a thickness of 20 nm (a black light-shielding plate was produced. Both were the same film on both sides of the polyimide film.
  • a film-shaped black light-shielding plate without warpage was produced by symmetrically forming a first-layer film having the same thickness and a second-layer film having the same type and the same film thickness. This is shown in FIG.
  • a titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m.
  • the film of Example 3 was formed with a thickness of 53 nm to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • a titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m.
  • the film of Example 3 was formed with a thickness of 200 nm to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • Example 18 A titanium carbide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 38 ⁇ m.
  • the film of Example 3 was formed with a thickness of 17 nm to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • Each of the produced black light shielding plates of Examples 42 to 44 had an average optical density greater than 4.0 at a wavelength of 380 to 780 nm, and exhibited complete light shielding properties.
  • the average regular reflectance was 0.43 to 0.73%, which was 0.8% or less.
  • the arithmetic average height (Ra) of the film surface was 0.20 ⁇ m for all, and the water contact angle was 105 to 107 °, indicating excellent water repellency.
  • the dynamic friction coefficient was 0.10, and there was no deformation or discoloration of the film due to UV resistance.
  • the lightness (L * value) of the black light shielding plate was 43 to 45, indicating that the blackness was high. Therefore, the black light shielding plates of Examples 42 to 44 are very useful as shutter blade materials because they are excellent in light shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • the black light-shielding plate of Comparative Example 18 had an average optical density, an arithmetic average height Ra of the film, a contact angle with water, and an ultraviolet resistance that were the same as those of Examples 42 to 44, but the average regular reflectance was high. Also, the lightness (L * value) was insufficient in blackness. Therefore, the black light-shielding plate of Comparative Example 18 is not suitable as a shutter blade material because the average regular reflectance is poor and the blackness is insufficient.
  • Table 4 shows the type of substrate, film configuration, and evaluation results.
  • a titanium carbide oxide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m.
  • the film of Example 1 was formed to a thickness of 105 nm to produce a black light shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • a titanium carbide oxide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m.
  • the film of Example 2 was formed to a thickness of 105 nm to produce a black light shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • a titanium carbide oxide film having a thickness of 100 nm was formed as a first-layer metal light-shielding film on the surface of a polyimide film having an arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 50 ⁇ m.
  • a film of Example 3 having a thickness of 105 nm was formed as a second layer on the surface of the metal light-shielding film to produce a black light-shielding plate.
  • the first film having the same film thickness and the second film having the same film thickness are formed symmetrically on both surfaces of the polyimide film, so that the film-like black shading plate without warping is formed.
  • the measurement results of the characteristics are shown in Table 4.
  • Each of the produced black light shielding plates of Examples 45 to 47 had an average optical density greater than 4.0 at a wavelength of 380 to 780 nm, and exhibited complete light shielding properties.
  • the average regular reflectance was 0.20 to 0.50%, which was 0.8% or less.
  • the arithmetic average height (Ra) of the film surface was 0.75 ⁇ m for all, and the water contact angle was 96 to 113 °, indicating excellent water repellency.
  • the coefficient of dynamic friction was 0.10 or less, and there was no deformation or discoloration of the film due to UV resistance.
  • the lightness (L * value) of the black light shielding plate was 34 to 42, indicating that the blackness was high.
  • the black light-shielding plates of Examples 45 to 47 are very useful as shutter blade materials because they are excellent in light-shielding properties, low reflectivity, water repellency, slipperiness and ultraviolet resistance.
  • Table 4 shows the type of substrate, film configuration, and evaluation results.
  • the produced black light shielding plates of Comparative Example 19 all had an average optical density of greater than 4.0 at a wavelength of 380 to 780 nm, exhibited complete light shielding properties, and good ultraviolet resistance.
  • the average regular reflectance is 0.9%
  • the lightness L * is 49
  • the arithmetic average height (Ra) of the film surface is 0.13 ⁇ m
  • the dynamic friction coefficient is 0.18
  • the contact angle with water is 70 °.
  • the characteristic was worse than Example 43 of the same structure except the conditions at the time of film-forming of a 2nd layer differing.
  • the adhesion of the film was evaluated based on JIS C0021, but a part of the film was peeled off at the interface with the underlying TiC film, and the adhesion was poor.
  • the black light-shielding plate of Comparative Example 19 is excellent in light-shielding properties and UV resistance, but has poor reflectance, brightness, water repellency, slipperiness, and film adhesion, so that it is a shutter blade material used under high temperature and high humidity. Cannot be used.
  • NiTi target containing 3 wt% Ti
  • a NiTi film (Ti content 2.98 wt%)
  • a metal light-shielding film was formed with a thickness of 110 nm, and a black light-shielding plate was produced in the same manner as in Example 3.
  • the metal light shielding film was formed by a direct current sputtering method with a deposition gas pressure of 0.3 Pa.
  • the film of Example 3 was formed to a thickness of about 105 nm as the second layer film.
  • a film-shaped black shading plate without warping is produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film. did.
  • the measurement results of the characteristics are shown in Table 5.
  • a metal light-shielding film of a Cu film having a thickness of 110 nm is formed on the surface of a polyimide film having a surface arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 25 ⁇ m using a Cu target, as in Example 3.
  • a black light shielding plate was produced.
  • the metal light shielding film was formed by a direct current sputtering method with a deposition gas pressure of 0.3 Pa.
  • the film of Example 3 was formed to a thickness of about 105 nm as the second layer film.
  • a film-shaped black shading plate without warping is produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film. did. Table 5 shows the characteristics.
  • An arithmetical average height (Ra) of the surface is 0.25 ⁇ m, and a metal light-shielding film of Al film is formed to a thickness of 110 nm using an Al target on the surface of a polyimide film having a thickness of 25 ⁇ m.
  • a black light shielding plate was produced.
  • the metal light shielding film was formed by a direct current sputtering method with a deposition gas pressure of 0.3 Pa.
  • the film of Example 3 was formed to a thickness of about 105 nm as the second layer film.
  • a film-shaped black shading plate without warping is produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film. did. Table 5 shows the characteristics.
  • a metal light-shielding film of Ti film is formed only by 110 nm.
  • a black shading plate was produced.
  • the metal light shielding film was formed by a direct current sputtering method with a deposition gas pressure of 0.3 Pa.
  • the film of Example 3 was formed to a thickness of about 105 nm as the second layer film.
  • a film-shaped black shading plate without warping is produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film. did. Table 5 shows the characteristics.
  • a metal light-shielding film of Ti film is formed only by 110 nm.
  • a black shading plate was produced.
  • the metal light shielding film was formed by a direct current sputtering method with a deposition gas pressure of 0.3 Pa.
  • the film of Example 8 was formed to a thickness of about 105 nm as the second layer film.
  • a film-shaped black shading plate without warping is produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film. did. Table 5 shows the characteristics.
  • the average regular reflectance of the obtained black light shielding plate was 0.29 to 0.48% in Examples 48 to 52, and the reflection was low.
  • the average optical density was all greater than 4.0 and had complete light shielding properties.
  • the arithmetic average height Ra of the film surface is 0.20 ⁇ m, the contact angle with water is 100 to 124 °, the lightness (L * value) is 30 to 37, the dynamic friction coefficient is 0.1, and the UV resistance is deformation of the film. No discoloration was seen. Therefore, the black light-shielding plates of Examples 48 to 52 are very useful as shutter blade materials because they are excellent in light-shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • Comparative Example 20 Using a NiTi target (containing 3 wt% Ti) on the surface of a polyimide film having a surface arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 25 ⁇ m, a metal of NiTi film (Ti content 2.98 wt%) A light shielding film having a thickness of 110 nm was formed, and a black light shielding plate was produced in the same manner as in Example 48. The metal light shielding film was formed by the direct current sputtering method under the sputtering film formation conditions (film formation gas pressure) shown in Example 48. Next, a film of Comparative Example 1 having a thickness of about 105 nm was formed as a second layer film. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 21 Using a Cu target, a metal light-shielding film of Cu film having a thickness of 110 nm was formed on the surface of a polyimide film having a surface arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 25 ⁇ m. Thus, a black light shielding plate was produced.
  • the metal light shielding film was formed by the direct current sputtering method under the sputtering film formation conditions (film formation gas pressure) shown in Example 49.
  • the film of Comparative Example 1 was formed to a thickness of about 105 nm as the second layer film. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 22 On the surface of a polyimide film having a surface arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 25 ⁇ m, a metal light-shielding film of Al film is formed to a thickness of 110 nm using an Al target. A black shading plate was produced.
  • the metal light shielding film was formed by the direct current sputtering method under the sputtering film formation conditions (film formation gas pressure) shown in Example 50.
  • the film of Comparative Example 1 was formed to a thickness of about 105 nm as the second layer film. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 23 Using a Ti target on the surface of a polyimide film having an arithmetic average height (Ra) of 0.25 ⁇ m and a thickness of 25 ⁇ m, a metal light-shielding film of Ti film having a thickness of 110 nm was formed in the same manner as in Example 51. Thus, a black light shielding plate was produced.
  • the metal light-shielding film was formed by the direct current sputtering method under the sputtering film formation conditions (film formation gas pressure) shown in Example 51.
  • the film of Comparative Example 1 was formed to a thickness of about 105 nm as the second layer film. The measurement results of the characteristics are shown in Table 5.
  • a film-shaped black shading plate without warping is produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film.
  • Each of the obtained black light shielding plates had an average optical density at a wavelength of 380 to 780 nm of greater than 4.0 and exhibited complete light shielding properties.
  • the average regular reflectance at wavelengths of 380 to 780 nm was 1.17 to 1.57% in Comparative Examples 20 to 23, the L * value was as high as 48 to 52, and the black light shielding plate had a low blackness.
  • the arithmetic average height Ra on the film surface was 0.20 ⁇ m, and the UV resistance was good without any discoloration or deformation, but the water contact angle was 76 to 86 ° and the water repellency was small.
  • the coefficient of dynamic friction was as large as 0.21 to 0.31 and was found to be inferior in slipperiness. Therefore, although the black light shielding plates of Comparative Examples 20 to 23 have complete light shielding properties and ultraviolet resistance, they are not suitable as shutter blade materials because of poor reflectivity, water repellency, and slipperiness.
  • Example 48 On the surface of a PET film having a surface arithmetic average height (Ra) of 0.42 ⁇ m and a thickness of 75 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 48. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • Example 49 On the surface of a PET film having a surface arithmetic average height (Ra) of 0.42 ⁇ m and a thickness of 75 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 49. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • Example 50 On the surface of a PET film having a surface arithmetic average height (Ra) of 0.42 ⁇ m and a thickness of 75 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 50. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • Example 51 On the surface of a PET film having a surface arithmetic average height (Ra) of 0.42 ⁇ m and a thickness of 75 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 51. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • a film-shaped black light-shielding plate having no warp was produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film.
  • Each of the obtained black light shielding plates had an average optical density at a wavelength of 380 to 780 nm of greater than 4.0 and exhibited complete light shielding properties. Further, the average specular reflectance at wavelengths of 380 to 780 nm was very low reflection of 0.23 to 0.30% in Examples 53 to 56, the L * value was also low to 32 to 35, and black color was exhibited. .
  • the black light shielding plates of Examples 53 to 56 are extremely useful as shutter blade materials because they are excellent in light shielding properties, low reflection properties, water repellency, slipperiness, and ultraviolet resistance.
  • Comparative Example 24 A black light-shielding plate was produced in the same manner as in Example 53 except that the second layer film was changed to the film of Comparative Example 1. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 25 A black light-shielding plate was produced in the same manner as in Example 54 except that the second layer film was changed to the film of Comparative Example 1. The measurement results of the characteristics are shown in Table 5.
  • Each of the obtained black light shielding plates had an average optical density at a wavelength of 380 to 780 nm of greater than 4.0 and exhibited complete light shielding properties.
  • the average regular reflectance at wavelengths of 380 to 780 nm was 1.56 to 1.95% in Comparative Examples 24 to 27, the L * value was as high as 50 to 52, and the black light shielding plate had a low blackness.
  • the arithmetic average height Ra of the film surface was 0.38 ⁇ m, and the UV resistance was good without any discoloration or deformation, but the water contact angle was 74 to 86 ° and the water repellency was small. .
  • the coefficient of dynamic friction was as large as 0.21 to 0.28, indicating that the slipperiness was poor. Therefore, although the black light shielding plates of Comparative Examples 24 to 27 have complete light shielding properties and ultraviolet resistance, they are unsuitable as shutter blade materials because of poor reflectivity, water repellency, and slipperiness.
  • Example 48 On the surface of the PEN film having a surface arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 100 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 48. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • Example 49 On the surface of the PEN film having a surface arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 100 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 49. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • Example 50 On the surface of a PEN film having a surface arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 100 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 50. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • Example 51 On the surface of a PEN film having a surface arithmetic average height (Ra) of 0.90 ⁇ m and a thickness of 100 ⁇ m, the types, film thicknesses, and film forming conditions of the first and second layers are as in Example 51. Similarly, a black light shielding plate was produced. The measurement results of the characteristics are shown in Table 5.
  • a film-shaped black light-shielding plate having no warp was produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film.
  • Each of the obtained black light shielding plates had an average optical density at a wavelength of 380 to 780 nm of greater than 4.0 and exhibited complete light shielding properties. Further, the average regular reflectance at wavelengths of 380 to 780 nm is very low reflection of 0.21 to 0.32% in Examples 57 to 60, the L * value is also low to 32 to 34, and black color is exhibited. It was.
  • the black light shielding plates of Examples 57 to 60 are very useful as shutter blade materials because they have high blackness and are excellent in light shielding properties, low reflection properties, water repellency, slipping properties, and ultraviolet resistance.
  • Comparative Example 28 A black light-shielding plate was produced in the same manner as in Example 57 except that the second layer film was changed to the film of Comparative Example 1. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 29 A black light-shielding plate was produced in the same manner as in Example 58 except that the second layer film was changed to the film of Comparative Example 1. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 30 A black light-shielding plate was produced in the same manner as in Example 59 except that the second layer film was changed to the film of Comparative Example 1. The measurement results of the characteristics are shown in Table 5.
  • Each of the obtained black light shielding plates had an average optical density at a wavelength of 380 to 780 nm of greater than 4.0 and exhibited complete light shielding properties. Further, the average regular reflectance at wavelengths of 380 to 780 nm was 1.06 to 1.37% in Comparative Examples 28 to 31, and the L * value was 46 to 47, which was a black light shielding plate with low blackness. Further, the arithmetic average height Ra of the film surface was 0.68 ⁇ m. Its UV resistance was good with no discoloration or deformation, but the water contact angle was 75-86 °, water repellency was small, and the coefficient of dynamic friction was large, 0.25-0.28. I understood. Therefore, although the black light shielding plates of Comparative Examples 28 to 31 have complete light shielding properties and UV resistance, they are unsuitable as shutter blade materials because of their low blackness and poor reflectivity, water repellency, and slipperiness. .
  • a film-shaped black light-shielding plate having no warp was produced by symmetrically forming a first layer film of the same thickness and a second layer film of the same type and thickness on both sides of the film.
  • the obtained black light shielding plate had an average optical density at a wavelength of 380 to 780 nm larger than 4.0, and exhibited a complete light shielding property. Further, the average regular reflectance at wavelengths of 380 to 780 nm was as low as 0.58% in Example 61, the L * value was as low as 43, and black color was exhibited.
  • the black light shielding plate of Example 61 is very useful as a shutter blade material because it has high blackness and is excellent in light shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • Comparative Example 32 the average optical density was higher than 4.0, but the average regular reflectance was as high as 1.42%, the lightness (L * value) was 48, and the blackness was low.
  • the arithmetic average height Ra of the film surface was 0.20 ⁇ m, the contact angle with water was 85 °, the dynamic friction coefficient was 0.26, and the film was neither deformed nor discolored with respect to UV resistance. Therefore, although the black light shielding plate of Comparative Example 32 has good light shielding properties and UV resistance, it is unsuitable as a shutter blade material because it has low blackness and low reflectivity, water repellency, and slipperiness.
  • a black polyimide film having a surface arithmetic average height Ra of 0.40 ⁇ m and a thickness of 38 ⁇ m was used as the type of base material, the thickness of the first TiC film was 50 nm, and the second layer film of Example 3 was used.
  • a black shading plate having a film thickness of 200 nm was prepared. The measurement results of the characteristics are shown in Table 5.
  • a black polyimide film having a surface arithmetic average height Ra of 0.40 ⁇ m and a thickness of 38 ⁇ m was used as the type of base material, the thickness of the first TiC film was 50 nm, and the second layer film of Example 3 was used.
  • a black shading plate having a film thickness of 20 nm was prepared. The measurement results of the characteristics are shown in Table 5.
  • the black light-shielding plate of Example 62 had an average optical density at wavelengths of 380 to 780 nm of greater than 4.0, and exhibited complete light-shielding properties. Further, the average regular reflectance was as low as 0.34%, and the lightness (L * value) was 31 and the blackness was high.
  • the arithmetic average height Ra of the film surface was 0.30 ⁇ m, the contact angle with water was 94 °, the dynamic friction coefficient was 0.07, and no deformation or discoloration of the film was observed with respect to UV resistance.
  • Example 63 As shown in Table 5, the average regular reflectance was as low as 0.37%, lightness (L * value) was 40, which was lower than that of Example 61, and blackness was high. The characteristics were the same as in Example 61. Therefore, the black light shielding plates of Examples 62 to 63 are very useful as shutter blade materials because of their high blackness and excellent light shielding properties, low reflectivity, water repellency, slipperiness, and ultraviolet resistance.
  • the black light-shielding plate of Comparative Example 33 had an average optical density of 3.5 and was not completely light-shielding. Moreover, it was found that the dynamic friction coefficient was as large as 0.25 and the slipperiness was poor.
  • each characteristic was the same as that in Example 62.
  • the thickness of the second layer was increased, and the film formation rate of the diamond-like carbon (DLC) gradient structure black coating film was small, so that it was thicker than 200 nm.
  • the sputtering time becomes very long, a problem in terms of manufacturing cost and a sputtering start time due to the batch are generated, and the routine cannot be made. It is inappropriate as a shutter blade material. Therefore, although the black light shielding plate of Comparative Example 33 has UV resistance, it is inadequate as a shutter blade material because of its poor light shielding properties, and the black light shielding plate of Comparative Example 34 has good characteristics. Since the second layer is thick, there is a problem in terms of manufacturing cost.
  • a black light-shielding plate was produced in the same manner as in Example 62 except that the base material was changed to a black PET film having a surface arithmetic average height Ra of 0.40 ⁇ m and a thickness of 38 ⁇ m.
  • the measurement results of the characteristics are shown in Table 5.
  • the first layer is the same except that the base material is changed to a black PET film having an arithmetic average height Ra of 0.40 ⁇ m and a thickness of 38 ⁇ m, and the film thickness of the second layer is changed to 20 nm.
  • a black light-shielding plate was produced in the same manner as in Example 63 with respect to the type and thickness of the film. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 35 A black light shielding plate was produced in the same manner as in Comparative Example 33, except that the type of substrate was changed to a black PET film having a surface arithmetic average height Ra of 0.40 ⁇ m and a thickness of 38 ⁇ m. The measurement results of the characteristics are shown in Table 5.
  • Comparative Example 36 A black light-shielding plate was produced in the same manner as in Comparative Example 34 except that the type of the substrate was changed to a black PET film having a surface arithmetic average height Ra of 0.40 ⁇ m and a thickness of 38 ⁇ m. The measurement results of the characteristics are shown in Table 5.
  • the black light-shielding plate of Example 64 had an average optical density at wavelengths of 380 to 780 nm of greater than 4.0, and exhibited complete light-shielding properties. Further, the average regular reflectance was as low as 0.35%, and the lightness (L * value) was 32 and the blackness was high.
  • the arithmetic average height Ra of the film surface was 0.30 ⁇ m, the contact angle with water was 93 °, the dynamic friction coefficient was 0.09, and the film was neither deformed nor discolored with respect to UV resistance.
  • Example 65 The characteristics of Example 65 were substantially the same as those of Example 64 except that the brightness (L * value) was as high as 40 as shown in the table. Therefore, the black light shielding plates of Examples 64 to 65 are very useful as shutter blade materials because they have high blackness and are excellent in light shielding properties, low reflection properties, water repellency, slipping properties, and ultraviolet resistance.
  • the black light-shielding plate of Comparative Example 35 had an average optical density of 3.4 and was not completely light-shielding. Moreover, it was found that the coefficient of dynamic friction was as large as 0.24 and the slipperiness was poor. Therefore, although the black light-shielding plate of Comparative Example 35 has ultraviolet resistance, it is inadequate as a shutter blade material because of its poor light-shielding properties.
  • each characteristic was the same as that in Example 64.
  • the deposition rate of the second diamond-like carbon (DLC) gradient structure black coating film was small, the sputtering time was very large when the thickness was greater than 200 nm. Since it becomes long, a problem in terms of manufacturing cost and a sputtering start time between batches occur, and it becomes impossible to make a routine, so it is not suitable as a shutter blade material.
  • DLC diamond-like carbon

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Laminated Bodies (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Diaphragms For Cameras (AREA)

Abstract

La présente invention se rapporte à un film de revêtement en carbone sous forme de diamant amorphe (DLC pour Diamond-Like Carbon) qui présente une structure inclinée, pour améliorer la faible réflectivité, des propriétés de couleur noire, un poids léger, des propriétés de glissement et des propriétés hydrofuges d'une lame d'obturateur. La présente invention se rapporte également à un déflecteur de lumière noire qui présente un poids réduit et d'excellentes caractéristiques à température élevée/humidité élevée, qui utilise un film de résine ou analogue comme matériau de base et comprend le film de revêtement en carbone DLC qui présente une structure inclinée comme couche superficielle de ce dernier. Un film de revêtement en carbone sous forme de diamant amorphe (DLC) (A) ayant une structure inclinée, formé par un procédé de pulvérisation et qui contient du titane, du carbone et de l'oxygène, est caractérisé par le fait qu'il présente une structure pour laquelle la teneur en carbone du film de revêtement en carbone DLC (A) ayant une structure inclinée varie entre 2,0 et 30,0 pour ce qui est du rapport entre les atomes de carbone (C) et de titane (Ti), la teneur en oxygène varie entre 0,8 et 2,2 pour ce qui est du rapport entre les atomes d'oxygène (O) et de titane (Ti) et le rapport entre les atomes de carbone (C) et de titane (Ti) ainsi que le rapport entre les atomes d'oxygène (O) et de titane (Ti) varient sans cesse dans le sens de l'épaisseur du film, l'épaisseur du film du film de revêtement en carbone DLC (A) ayant une structure inclinée faisant au moins 20 nm.
PCT/JP2012/066255 2011-07-29 2012-06-26 Film de revêtement en carbone sous forme de diamant amorphe qui présente une structure inclinée, procédé de fabrication de ce dernier, déflecteur de lumière noire et lame d'obturateur utilisant ce dernier WO2013018467A1 (fr)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018052044A1 (fr) * 2016-09-16 2018-03-22 ソマール株式会社 Élément de blocage de lumière pour dispositifs optiques
US20230046475A1 (en) * 2019-12-27 2023-02-16 Somar Corporation Black light shielding member

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI676852B (zh) * 2018-10-31 2019-11-11 白金科技股份有限公司 遮光片

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0291624A (ja) * 1988-09-28 1990-03-30 Canon Inc 高速用シヤツタ
JPH02116837A (ja) * 1988-10-27 1990-05-01 Nikon Corp 遮光羽根
JP2000075353A (ja) * 1998-09-02 2000-03-14 Nidec Copal Corp 光学機器用遮光羽根材
JP2006138974A (ja) * 2004-11-11 2006-06-01 Nidec Copal Corp 遮光羽根材料
JP2010008786A (ja) * 2008-06-27 2010-01-14 Sumitomo Metal Mining Co Ltd フィルム状遮光板、及び、それを用いた絞り、光量調整用絞り装置、又はシャッター
JP2010096842A (ja) * 2008-10-14 2010-04-30 Sumitomo Metal Mining Co Ltd 耐熱遮光フィルムとその製造方法、及びそれを用いた絞り又は光量調整装置
JP2010134159A (ja) * 2008-12-04 2010-06-17 Canon Electronics Inc シャッタ羽根及びシャッタ装置

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0291624A (ja) * 1988-09-28 1990-03-30 Canon Inc 高速用シヤツタ
JPH02116837A (ja) * 1988-10-27 1990-05-01 Nikon Corp 遮光羽根
JP2000075353A (ja) * 1998-09-02 2000-03-14 Nidec Copal Corp 光学機器用遮光羽根材
JP2006138974A (ja) * 2004-11-11 2006-06-01 Nidec Copal Corp 遮光羽根材料
JP2010008786A (ja) * 2008-06-27 2010-01-14 Sumitomo Metal Mining Co Ltd フィルム状遮光板、及び、それを用いた絞り、光量調整用絞り装置、又はシャッター
JP2010096842A (ja) * 2008-10-14 2010-04-30 Sumitomo Metal Mining Co Ltd 耐熱遮光フィルムとその製造方法、及びそれを用いた絞り又は光量調整装置
JP2010134159A (ja) * 2008-12-04 2010-06-17 Canon Electronics Inc シャッタ羽根及びシャッタ装置

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018052044A1 (fr) * 2016-09-16 2018-03-22 ソマール株式会社 Élément de blocage de lumière pour dispositifs optiques
JPWO2018052044A1 (ja) * 2016-09-16 2018-09-13 ソマール株式会社 光学装置用遮光部材
CN109791229A (zh) * 2016-09-16 2019-05-21 索马龙株式会社 光学设备用遮光部件
CN109791229B (zh) * 2016-09-16 2020-07-28 索马龙株式会社 光学设备用遮光部件
US11125917B2 (en) 2016-09-16 2021-09-21 Somar Corporation Light-shading material for optical device
US20230046475A1 (en) * 2019-12-27 2023-02-16 Somar Corporation Black light shielding member
US11614571B2 (en) * 2019-12-27 2023-03-28 Somar Corporation Black light shielding member

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