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WO2010146709A1 - Système et procédé de transfert de pièces électroniques - Google Patents

Système et procédé de transfert de pièces électroniques Download PDF

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Publication number
WO2010146709A1
WO2010146709A1 PCT/JP2009/061212 JP2009061212W WO2010146709A1 WO 2010146709 A1 WO2010146709 A1 WO 2010146709A1 JP 2009061212 W JP2009061212 W JP 2009061212W WO 2010146709 A1 WO2010146709 A1 WO 2010146709A1
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WO
WIPO (PCT)
Prior art keywords
tray
electronic component
interval
trays
component transfer
Prior art date
Application number
PCT/JP2009/061212
Other languages
English (en)
Japanese (ja)
Inventor
浩光 堀野
浩樹 池田
Original Assignee
株式会社アドバンテスト
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社アドバンテスト filed Critical 株式会社アドバンテスト
Priority to JP2011519386A priority Critical patent/JPWO2010146709A1/ja
Priority to PCT/JP2009/061212 priority patent/WO2010146709A1/fr
Priority to TW099113240A priority patent/TWI409204B/zh
Publication of WO2010146709A1 publication Critical patent/WO2010146709A1/fr

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/67333—Trays for chips
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

Definitions

  • the present invention relates to an electronic component transfer device for transferring electronic components such as semiconductor integrated circuit elements between trays, an electronic component transfer method, an electronic component handling device including the electronic component transfer device, and an electronic component test. Relates to the device.
  • DUT Device Under Test
  • the DUT is removed from the customer tray.
  • a technique of transferring to a test tray and testing the DUT in a state in which the DUT is accommodated in the test tray see, for example, Patent Document 1.
  • the pitch between the DUTs is always wide.
  • the entire electronic component testing apparatus is increased in size. There was a problem.
  • the problem to be solved by the present invention is to provide an electronic component transfer apparatus and an electronic component transfer method capable of downsizing an electronic component test apparatus.
  • an electronic component transfer apparatus characterized in that a plurality of electronic components are collectively transferred between at least one first tray and a plurality of second trays. (See claim 1).
  • a reversing unit that substantially overlaps the at least one first tray and the plurality of second trays is provided. ).
  • the reversing unit holds the plurality of second trays side by side on substantially the same plane (see claim 3).
  • a convex portion is formed on one side surface of the second tray, and a concave portion corresponding to the convex portion is formed on the other side surface of the second tray.
  • the adjacent second trays are connected to each other by fitting the convex portions and the concave portions (see claim 4).
  • the first tray has a plurality of first accommodating portions that can accommodate the electronic components
  • the second tray has a plurality of accommodating electronic components.
  • the reversing unit substantially includes the first tray and the second tray in a state where the first storage portion and the second storage portion are opposed to each other. Inversion is preferable (see claim 5).
  • the arrangement of a part of the first accommodating portion in the first tray and the entire arrangement of the second accommodating portion in the second tray are substantially It is preferable that they are the same (see claim 6).
  • the pitch between the first accommodating portions along the first direction in the first tray is the second pitch along the first direction in the second tray.
  • the pitch between the first receiving portions along the second direction in the first tray is substantially the same as the pitch between the receiving portions in the second tray. It is preferable that the pitch is substantially the same as the pitch between the second accommodating portions along (see claim 7).
  • the number of the first accommodating portions along the first direction in the first tray and the second along the first direction in the second tray is different (see claim 8).
  • an electronic component handling device for handling electronic components, wherein the interval between the electronic component transfer device and the plurality of second trays is set to a first interval or a second interval.
  • an electronic component handling device comprising an interval changing means for changing to an interval (see claim 9).
  • the second interval corresponds to the arrangement of the plurality of electronic components housed in the plurality of second trays and the arrangement of the contact portions in the test head, respectively.
  • the pressing means presses the electronic component against the contact portion in a state where the interval between the plurality of second trays is the second interval. reference).
  • the electronic component transfer device is a first electronic component that collectively transfers a plurality of the electronic components from at least one first tray to a plurality of second trays.
  • a transfer device; and a second electronic component transfer device that collectively transfers a plurality of the electronic components from a plurality of the second trays to at least one of the first trays. Receives the second tray from the first electronic component moving mounting device, and changes the interval between the plurality of second trays from the first interval to the second interval.
  • a second means for changing the interval between the plurality of second trays from the second interval to the first interval and delivering the second tray to the second electronic component transfer device An interval change means, and including the movement
  • the stage receives the second tray from the first interval changing means, moves the second tray to the facing position, and delivers the second tray to the pressing means. And receiving the second tray from the pressing means at the facing position, moving the second tray to the delivery position, and delivering the second tray to the second interval changing means. It is preferable that the moving means is included (see claim 12).
  • an electronic component testing apparatus including the above-described electronic component handling apparatus and a test head (see claim 13).
  • an electronic component transfer method characterized in that a plurality of electronic components are collectively transferred between at least one first tray and a plurality of second trays. (See claim 14).
  • At least one of the first tray and the plurality of second trays are superposed, at least one of the first tray and the plurality of second trays. It is preferable to have the process of reversing (refer Claim 15).
  • the first tray has a plurality of first accommodating portions that can accommodate the electronic components
  • the second tray has a plurality of accommodating electronic components. It is preferable that the first tray and the second tray are reversed with the second storage portion in a state where the first storage portion and the second storage portion face each other. 16).
  • the electronic component testing apparatus can be downsized.
  • FIG. 1 is a schematic plan view showing the overall configuration of an electronic component testing apparatus according to an embodiment of the present invention.
  • FIG. 2 is a plan view showing the customer tray in the embodiment of the present invention.
  • FIG. 3 is a side view of FIG.
  • FIG. 4 is a cross-sectional view taken along line IV-IV in FIG.
  • FIG. 5 is a plan view showing the contact plate in the embodiment of the present invention.
  • FIG. 6 is a plan view showing a state in which the contact plates shown in FIG. 5 are connected.
  • FIG. 9 is a side view of the first device transfer apparatus in the embodiment of the present invention.
  • FIG. 10 is a plan view of FIG. FIG.
  • FIG. 11 is a perspective view of the holding mechanism of the first device transfer apparatus shown in FIG.
  • FIG. 12 is a plan view of a reinforcing plate in the embodiment of the present invention.
  • FIG. 13 is a side view of FIG. 14 is a plan view showing a state in which a contact plate is mounted on the reinforcing plate shown in FIG.
  • FIG. 15 is a side view of FIG.
  • FIG. 16 is a side view (part 1) illustrating the operation of the first device transfer apparatus according to the embodiment of the present invention.
  • FIG. 17 is a side view (part 2) illustrating the operation of the first device transfer apparatus according to the embodiment of the present invention.
  • FIG. 18 is a side view (No. 3) showing the operation of the first device transfer apparatus in the embodiment of the present invention.
  • FIG. 19 is a cross-sectional view showing the operation of placing the contact plate on the customer tray in the embodiment of the present invention.
  • FIG. 20 is a cross-sectional view showing a state in which the contact plate is placed on the customer tray in the embodiment of the present invention.
  • FIG. 21 is a side view (No. 4) showing the operation of the first device transfer apparatus in the embodiment of the present invention.
  • FIG. 22 is a cross-sectional view showing the operation of inverting the contact plate and the customer tray in the embodiment of the present invention.
  • FIG. 23 is a side view (No. 5) showing the operation of the first device transfer apparatus in the embodiment of the present invention.
  • FIG. 24 is a cross-sectional view showing the operation of removing the customer tray from the contact plate after inversion in the embodiment of the present invention.
  • FIG. 25 is a plan view showing a first interval changing device in the embodiment of the present invention.
  • FIG. 26 is a side view of FIG.
  • FIG. 27 is a side view showing the movable head of the first interval changing device in the embodiment of the present invention.
  • FIG. 28 is a plan view of the movable head as seen from a view A in FIG.
  • FIG. 29 is a plan view (part 1) illustrating a contact plate conveying operation by the first interval changing device according to the embodiment of the present invention.
  • FIG. 30 is a plan view (part 2) illustrating the contact plate transfer operation by the first interval changing device according to the embodiment of the present invention.
  • FIG. 31 is a plan view showing the setting operation of the contact plate by the first interval changing device in the embodiment of the present invention.
  • FIG. 32 is a side view showing the plate moving device and the pressing device in the embodiment of the present invention.
  • FIG. 33 is a plan view showing the plate moving device and the pressing device in the embodiment of the present invention.
  • FIG. 34 is a side view (No. 1) showing the operation of the plate moving device and the pressing device in the embodiment of the present invention.
  • FIG. 35 is a side view (part 2) illustrating the operation of the plate moving device and the pressing device according to the embodiment of the present invention.
  • FIG. 36 is a side view (No. 3) showing operations of the plate moving device and the pressing device according to the embodiment of the present invention.
  • FIG. 37 is a cross-sectional view showing the operation of bringing the DUT housed in the contact plate closer to the socket of the test head.
  • FIG. 38 is a cross-sectional view showing a state in which the DUT accommodated in the contact plate is brought into contact with the socket of the test head.
  • FIG. 39 is a side view (No. 4) showing the operation of the plate moving device and the pressing device in the embodiment of the present invention.
  • FIG. 40 is a side view (No. 5) showing the operation of the plate moving device and the pressing device in the embodiment of the present invention.
  • FIG. 41 is a side view (No. 6) illustrating operations of the plate moving device and the pressing device according to the embodiment of the present invention.
  • FIG. 42 is a plan view showing a second gap changing device in the embodiment of the present invention.
  • FIG. 43 is a plan view showing a second device transfer apparatus in the embodiment of the present invention.
  • FIG. 1 is a schematic plan view showing the overall configuration of the electronic component testing apparatus in the present embodiment.
  • the electronic component test apparatus 1 in this embodiment is an apparatus for testing an electronic device under test (DUT) such as a semiconductor integrated circuit element. As shown in FIG. 1, a handler 20 for handling a DUT, and a test are performed. A test head 10 that is in electrical contact with the DUT and a tester body 5 (see FIG. 32) that executes the DUT test are provided.
  • DUT electronic device under test
  • the handler 20 in the present embodiment includes a first device transfer device 30, a first interval changing device 40, a plate moving device 50, a pressing device 60, a second interval changing device 70, 2 device transfer device 80, plate return device 90, and tray transfer device 95, and a plurality (four in this example) of contact plates 110 (first) from one customer tray 100 (first tray).
  • the plurality of DUTs are collectively transferred to the second tray), and the DUTs are handled in the handler 20 in a state where the DUTs are accommodated in the contact plates 110.
  • the handling of the contact plate 110 by the handler 20 will be outlined.
  • the first device transfer device 30 has a plurality of DUTs placed on one contact tray 110 from one customer tray 100. Are transferred in bulk.
  • the first interval changing device 40 transfers the contact plate 110 from the first device transfer device 30 to the plate moving device 50 while increasing the interval between the contact plates 110.
  • the reason why the space between the contact plates 110 is increased is to secure an area necessary for wiring or the like between the sockets 12 (see FIG. 33) on the test head 10.
  • the plate moving device 50 supplies the contact plate 110 to the pressing device 60, the pressing device 60 presses the DUT accommodated in the contact plate 110 against the socket 12 of the test head 10, and the tester body 5 is connected to the test head. DUT test through 10.
  • the contact plate 110 after the test is discharged from the pressing device 60 by the plate moving device 50, and the second device 70 is moved from the plate moving device 50 to the second device transfer device while the second interval changing device 70 narrows the interval between the contact plates 110.
  • the contact plate 110 is transferred to 80.
  • the second device transfer device 80 transfers the DUT from the contact plate 110 to the customer tray 100.
  • the used contact plate 110 is returned from the second device transfer device 80 to the first device transfer device 30 by the plate return device 90.
  • the customer tray 100 in which the DUT is empty is sent from the first device transfer device 30 to the second device transfer device 80 by the tray transfer device 95.
  • FIGS. 5 to 7 show a contact plate in the present embodiment.
  • FIG. 8 is a sectional view taken along line VIII-VIII in FIG.
  • the customer tray 100 in this embodiment includes a flat tray body 101.
  • a large number (136 in this example) of through holes 102 are formed on the main surface of the tray body 101.
  • a large number of through holes 102 are arranged in a matrix (8 rows and 17 columns in this example) with a pitch in the X direction P 1 and a pitch in the Y direction P 2 .
  • the through holes 102 each have a substantially rectangular opening 102a.
  • substantially cross-shaped ribs 103 are erected.
  • the first accommodating portion 104 is partitioned by the four ribs 103 surrounding the opening 102 a, and the DUT can be accommodated in the first accommodating portion 104.
  • engagement holes 105 for engaging the first arms of the device transfer devices 30 and 80 are formed.
  • the contact plate 110 includes a strip-shaped plate body 111 as shown in FIGS. As shown in FIG. 5, a convex portion 116 is formed on one side surface of the plate body 111, and a concave portion 117 is formed on the other side surface. By fitting the convex portion 116 of the contact plate 110 into the concave portion 117 of another contact plate 110, the contact plates 110 can be coupled to each other as shown in FIG.
  • a large number (34 in this example) of through holes 112 are formed in the main surface of the plate body 111. These through holes 112 are arranged in a matrix (2 rows and 17 columns in this example) with a pitch of P 3 in the X direction and a pitch of P 4 in the Y direction. Further, in the present embodiment, as shown in FIG. 6, even when connecting the contact plate 110 to each other, the pitch between the through-hole 112 of an adjacent contact plate 110 is in the P 3.
  • the through-holes 112 each have a substantially rectangular opening 112a. Ribs 113 are erected on four sides of the opening 112a.
  • the second accommodating portion 114 is partitioned by four ribs 113 surrounding the opening 112a, and the DUT can be accommodated in the second accommodating portion 114.
  • the number of second accommodating portions 114 is equal to the number of first accommodating portions 104 in one customer tray 100.
  • the first storage part 104 and the second storage part 114 have the same arrangement. Therefore, a large number (136 in this example) of DUTs are simultaneously transferred between the customer tray 100 and the contact plate 110 by superimposing and inverting the four contact plates 110 on one customer tray 100. It is possible.
  • the number of contact plates corresponding to one customer tray is not particularly limited. Further, the DUTs may be collectively transferred from the M customer trays to the N contact plates (however, M and N are natural numbers, and M ⁇ N). Further, the number of first accommodating portions formed on the customer tray and the number of second accommodating portions formed on the contact plate are not particularly limited.
  • a groove 119 into which a shaft 123 of a reinforcing plate 120 described later is inserted is formed on the back surface of the plate body 111. Also. As shown in the figure, on both side surfaces of the plate main body 111, engagement holes 115 for engaging the second arms of the device transfer devices 30 and 80 are formed. Further, as shown in FIG. 5, insertion holes 118 into which the holding pins of the plate moving device 50 are inserted are formed in the vicinity of both ends of the plate main body 111.
  • FIGS. 9 and 10 are a side view and a plan view of the first device transfer apparatus according to the present embodiment
  • FIG. 11 is a perspective view showing a holding mechanism of the first device transfer apparatus shown in FIG. 9
  • FIGS. 13 is a plan view and a side view of the reinforcing plate in the present embodiment
  • FIGS. 14 and 15 are a plan view and a side view showing a state in which the contact plate is mounted on the reinforcing plate.
  • the first device transfer device 30 of the handler 20 includes a holding mechanism 31 that holds the customer tray 100 and the contact plate 110 in an overlapping manner, and a reversing mechanism 36 that reverses the holding mechanism 31.
  • An elevating mechanism 37 that elevates and lowers the reversing mechanism 36.
  • the holding mechanism 31 and the reversing mechanism 36 in the present embodiment correspond to an example of the reversing unit in the present invention.
  • the first device transfer device 30 inverts the contact plate 110 and the customer tray 100 in a state where the contact plate 110 is mounted on the reinforcing plate 120 shown in FIGS.
  • the reinforcing plate 120 can mount four contact plates 110, and blocks 122 are provided at both upper and lower ends, and a shaft 123 is bridged between the blocks 122.
  • the shaft 123 can be inserted into a groove 119 formed on the back surface of the contact plate 110.
  • engagement holes 124 that can be engaged with the second arm 33 of the first device transfer device 30 are formed.
  • the second device transfer apparatus 80 described later also uses the same material as the reinforcing plate 120.
  • the holding mechanism 31 of the first device transfer device 30 includes a first arm 32 that grips the customer tray 100 and a substantially parallel arrangement with the first arm 32, and the four contact plates 110 are reinforced. And a second arm 33 for holding the plate 120.
  • the first arm 32 has a pair of arm members 321 and 322 arranged to face each other with a predetermined interval.
  • a gripping claw 323 that can be engaged with the engagement hole 105 of the customer tray 100 protrudes from the inner surface of each of the arm members 321 and 322.
  • the pair of arm members 321 and 322 can be moved toward and away from each other by the two first opening / closing cylinders 34, and the pair of arm members 321 and 322 sandwich the customer tray 100 therebetween. As a result, the customer tray 100 is gripped by the first arm 32.
  • the customer trays 100 are stacked and set in the first device transfer apparatus 30, and the uppermost customer tray 100 is positioned at a predetermined height by the elevator 39. It has become.
  • the first arm 32 grips the customer tray 100 located at the uppermost stage.
  • the second arm 33 also has a pair of arm members 331 and 332 arranged to face each other with a predetermined interval. Grip claws 333 and 334 that can be engaged with the engagement holes 115 and 124 of the contact plate 110 and the reinforcing plate 120 protrude from the inner surfaces of the arms 331 and 332, respectively.
  • the pair of arm members 331 and 332 included in the second arm 33 can be moved toward and away from each other by the two second opening / closing cylinders 35.
  • the second arm 33 grips the four contact arms 110 and the reinforcing plate 120 by sandwiching the contact plate 110 and the reinforcing plate 120 supported by the support base 38 between the pair of arm members 331 and 332. .
  • the reversing mechanism 36 of the first device transfer device 30 can rotate the holding mechanism 31 180 degrees by a motor or the like.
  • the elevating mechanism 37 can elevate and lower the holding mechanism 31 and the reversing mechanism 36 with an air cylinder or the like.
  • 16 to 24 are diagrams for explaining the operation of the first device transfer apparatus according to the present embodiment.
  • the lifting device 37 lowers the holding mechanism 31 positioned above the reinforcing plate 120 and the contact plate 110 supported by the support base 38.
  • the lifting mechanism 37 raises the holding mechanism 31 and the reversing mechanism 36 holds, as shown in FIG.
  • the mechanism 31 is rotated 180 degrees.
  • the elevating mechanism 37 lowers the holding mechanism 31 and superimposes the contact plate 110 on the customer tray 100 as shown in FIGS.
  • the lifting mechanism 37 raises the holding mechanism 31, and the reversing mechanism 36 rotates the holding mechanism 31 again by 180 degrees. Let By this rotation, as shown in FIG. 22, all the DUTs accommodated in the first accommodating part 104 of one customer tray 100 are collectively put in the second accommodating parts 114 of the four contact plates 110. Are transferred.
  • the elevating mechanism 37 lowers the holding mechanism 31 to place the reinforcing plate 120 on the support base 38, and the second arm 33 releases the reinforcing plate 120 and the contact plate 110.
  • the lifting mechanism 37 raises the holding mechanism 31, and the reversing mechanism 36 rotates the holding mechanism 31 again by 180 degrees. Thereby, as shown in FIG. 24, the customer tray 100 is removed from the contact plate 110.
  • the customer tray 100 in which the DUT is empty, as shown in FIG. 1 is transferred from the first device transfer device 30 to the second device transfer by a tray forwarding device 95 including a pick-and-place device or the like. It is forwarded to the device 80.
  • FIGS. 25 and 26 are a plan view and a side view showing the first interval changing device in the present embodiment
  • FIGS. 27 and 28 are a side view and a plan view showing the movable head of the first interval changing device.
  • the first interval changing device 40 of the handler 20 includes a pair of Y-direction rails 41, a movable arm 42, an elevating actuator 43, and a movable head 45.
  • the Y direction rail 41 is bridged between the first device transfer device 30 and the plate moving device 50 along the Y direction.
  • the Y-direction rail 41 supports a movable arm 42, and the movable arm 42 can move in the Y direction.
  • the movable arm 42 is provided with a lifting actuator 43 constituted by an air cylinder or the like, and this lifting actuator 43 can move in the X direction.
  • a movable head 45 is attached to the tip of the lift actuator 43, and the movable head 45 can be moved up and down by the lift actuator 43.
  • the movable head 45 includes a base member 46, a holding member 47 that holds the contact plate 110, an interval changing mechanism 48 that changes the interval between the holding members 47, the base member 46, and the like. And a connecting mechanism 49 that connects the holding member 47.
  • the base member 46 is fixed to the tip of the drive shaft of the lift actuator 43. Then, four holding members 47 are attached to the base member 46 via an interval changing mechanism 48 and a connecting mechanism 49.
  • Each holding member 47 has a strip shape corresponding to each contact plate 110, and gripping claws 471 for gripping the contact plate 110 are provided at both ends thereof so as to be openable and closable.
  • the number of holding members 47 included in the movable head 45 is not particularly limited to the above number, and is set according to the number of contact plates 110 corresponding to one customer tray 100, for example.
  • the interval changing mechanism 48 includes an air cylinder 481 provided on the base member 46, a cam plate 482 fixed to the tip of a drive shaft of the air cylinder 481, and a cam follower 472 provided on the upper surface of each contact plate 110. , Is composed of.
  • the cam plate 482 has four cam grooves 482a.
  • Pitch of cam groove 482a has a pitch S 1 of the relatively narrow first, continuously varies between a relatively wide second pitch S 2.
  • Cam followers 472 protruding from the upper surface of each contact plate 110 are slidably inserted into the four cam grooves 482a.
  • the connecting mechanism 49 includes a connecting member 491 extending downward from the base member 46, and a linear guide 492 provided at the tip of the connecting member 491.
  • the linear guide 492 is provided on the guide rail 493 fixed to the distal end of the connecting member 491 and the upper surface of each holding member 47, and is slidably engaged with the guide rail 493 along the X direction. And is composed of.
  • the connecting mechanism 49 connects the holding member 47 to the base member 46 while allowing the interval changing mechanism 48 to change the interval between the holding members 47.
  • FIG. 29 and FIG. 30 are plan views showing the contact plate conveying operation by the first interval changing device in the present embodiment
  • FIG. 31 is a plan view showing the contact plate setting operation by the first interval changing device in the present embodiment. It is.
  • the movable arm 42 moves on the Y-direction rail 41.
  • the distance changing mechanism 48 of the movable head 45 by widening the pitch between the cam follower 472 from the first pitch S 1 in the second pitch S 2, increase the distance between the holding member 47.
  • the movable arm 42 stops, and the elevating actuator 43 lowers the movable head 45 so that the four contact arms 110 are moved to the plate moving device 50. Placed on.
  • the first interval changing device 40 uses the plate returning device 90 constituted by, for example, a rotating belt to transfer the four contact plates 110 returned from the second device transfer device 80 to the first device. It is also possible to move it onto the reinforcing plate 120 of the device transfer device 30.
  • 32 and 33 are a side view and a plan view showing a plate moving device and a pressing device according to this embodiment.
  • the plate moving device 50 of the handler 20 includes a pair of X direction rails 51 and two sets of moving bodies 52 and 55 as shown in FIGS. 32 and 33.
  • the pair of X-direction rails 51 includes a first position L 1 (delivery position) for receiving the contact plate 110 from the first interval changing device 40 and a second position for delivering the contact plate 110 to the second interval changing device 70. It is provided substantially parallel to L 3 (delivery position) at a predetermined interval.
  • a pressing device 60 is provided at a substantially central portion (second position L 2 (opposing position)) of the X-direction rail 51, and the test head 10 is moved upward in the handler 20 so as to face the pressing device 60. I'm coming from.
  • the first moving body 52 (first moving means) includes a pair of holding members 53 and 54 provided on the X direction rail 51 so as to be slidable along the X direction.
  • the holding members 53 and 54 are each provided with four holding pins 531 and 541 that can be inserted into the insertion holes 118 of the contact plate 110. Therefore, the first moving body 52 can hold the four contact plates 110 simultaneously.
  • the second moving body 55 (second moving means) includes a pair of holding members 56 and 57 provided on the X direction rail 51 so as to be slidable along the X direction.
  • Four holding pins 561 and 571 that can be inserted into the insertion holes 118 of the contact plate 110 are provided on 56 and 57, respectively. Therefore, the second moving body 55 can also hold the four contact plates 110 simultaneously.
  • the number of contact plates 110 that can be simultaneously held by the first and second moving bodies 52 and 55 is not particularly limited to the above number, and for example, the number of contact plates 110 corresponding to one customer tray 100. Is set according to
  • the first movable member 52 moves the contact plate 110 between a first position L 1 and the second position L 2.
  • the second moving body 55 moves the contact plate 110 and a second position L 2 and the third position L 3. Further, the first moving body 52 and the second moving body 55 can move on the X-direction rail 51 independently of each other.
  • the pressing device 60 includes a pressing plate 61 that presses the contact plate 110 against the test head 10, and a Z-direction actuator 62 that moves the pressing plate 61 up and down.
  • the pressing device 60 is disposed between the pair of X-direction rails 61 in a plan view. Even when the pressing plate 61 is moved up and down by the Z-direction actuator 62, the pressing plate 61 and the X-direction rail 51 interfere with each other. There is nothing.
  • the upper part (lower part in FIG. 32) of the test head 10 is provided with HiFix 11 (interface device) on which a large number (136 in this example) of sockets 12 are mounted.
  • the contact plates 110 are arranged so as to correspond to the DUTs held on the contact plates 110. When the contact plate 110 is pressed toward the HiFix 11 of the test head 10 by the pressing device 60, the terminal HB of the DUT and the contact pin 13 of the socket 12 are in electrical contact (see FIGS. 37 and 38).
  • 34 to 41 are diagrams for explaining the operation of the plate moving device and the pressing device in this embodiment.
  • the first movable member 52 located in the first position L 1 on the X-direction rails 51, the four contact plate 110 To do. Then, as shown in FIG. 35, the first movable member 52 is moved on the X-direction rails 51 from the first position L 1 to the second position L 2.
  • the pressing device 60 raises the pressing plate 61 by the Z-direction actuator 62, and the pressing plate 61 receives the four contact plates 110 from the first moving body 52, and the Z-direction actuator 62. Further raises the pressing plate 61.
  • the DUT accommodated in the contact plate 110 is pressed against the socket 12 of the HiFix 11, and the terminal HB of the DUT and the contact pin 13 of the socket 12 are in electrical contact.
  • the tester body 5 inputs / outputs a test signal to / from the DUT via the test head 10, thereby causing the DUT to be tested.
  • the tester body 5 While the tester body 5 is running a test of the DUT, as shown in FIG. 39, the first moving body 52 is retracted from the second position L 2 to the first position L 1, the second mobile 55 moves from the third position L 3 to the second position L 2.
  • the Z-direction actuator 62 of the pressing device 60 lowers the pressing plate 61, and the second moving body 55 removes the tested contact plate 110 from the pressing plate 61. receive.
  • the second moving body 55 moves from the second position L 2 to the third position L 3 , and the second interval changing device 70 moves from the second moving body 55 to 4.
  • the contact plates 110 are transferred to the second device transfer device 80.
  • FIG. 42 is a plan view showing a second interval changing apparatus in the present embodiment
  • FIG. 43 is a plan view showing a second device transfer apparatus in the present embodiment.
  • the second interval changing device 70 of the handler 20 has a pair of Y-direction rails 71 and a Y-direction rail 71 along the Y direction, like the first interval changing device 40 described above.
  • a movable arm 72 supported so as to be movable, a lift actuator supported so as to be movable along the X direction on the movable arm 72, and a movable head 75 movable up and down by the lift actuator are provided.
  • the movable head 75 has an interval changing mechanism that changes the interval of the holding member that holds the contact plate 110, and moves the contact plate 110. While moving from the device 50 to the second device transfer device 80, the distance between the contact plates 110 can be reduced.
  • the second interval changing device 70 includes a part of the plate returning device 90 in the operable range
  • the contact plate 110 in which the DUT is empty is replaced with the second device transfer device 80. It is also possible to move from the reinforcing plate onto the plate return device 90.
  • the second device transfer device 80 of the handler 20 has a holding mechanism that overlaps and inverts the contact plate 110 and the customer tray 100 in the same manner as the first device transfer device 30 described above. 81, a reversing mechanism 86 for reversing the holding mechanism 81, and a lifting mechanism for lifting and lowering the reversing mechanism 86.
  • the second interval changing device 70 transfers the contact plate 110 from the plate moving device 50 to the second device transfer device 80 while narrowing the interval between the four contact plates 110. Then, the second device transfer device 80 superimposes the customer tray 100 on the four contact plates 110 and inverts them, thereby reversing all of the ones accommodated in the second accommodation portions 114 of the four contact plates 110. Are collectively transferred to the first accommodating portion 104 of the customer tray 100.
  • the customer tray 100 in which the DUT is empty is forwarded from the first device transfer device 30 to the second device transfer device 80 by the tray transfer device 95 as shown in FIG.
  • the used contact plate 110 is returned from the second device transfer device 80 to the first device transfer device 30 by the plate return device 90.
  • the customer tray 100 in which the tested DUT is accommodated is stored in a state of being stacked on the second device transfer device 80.
  • the customer trays 100 are taken out from the handler 20 and inserted into, for example, a dedicated classification machine.
  • DUTs are classified into categories according to the results of tests performed by the tester body 5 of the electronic component test apparatus 1.
  • a plurality of DUTs are collectively transferred between at least one customer tray 100 and a plurality of contact plates 110, and the contact plates 110 are routed in the handler 20. . Since the strip-shaped contact plate 110 can be narrowed until the strip-shaped contact plate 110 is conveyed to the vicinity of the test head 10, the electronic component testing apparatus 1 can be downsized as compared with the case where the test tray is used. Can be planned.
  • the plate moving device 50 moves the distance between the contact plates 110. May be narrowed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Specific Conveyance Elements (AREA)
  • Attitude Control For Articles On Conveyors (AREA)

Abstract

Système de transfert de pièces électroniques (30) permettant de transférer une pluralité de pièces électroniques (dispositif à l'essai) d'un boc ente un plateau client (100) et une pluralité de plaques de contact (110).
PCT/JP2009/061212 2009-06-19 2009-06-19 Système et procédé de transfert de pièces électroniques WO2010146709A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2011519386A JPWO2010146709A1 (ja) 2009-06-19 2009-06-19 電子部品移載装置及び電子部品の移載方法
PCT/JP2009/061212 WO2010146709A1 (fr) 2009-06-19 2009-06-19 Système et procédé de transfert de pièces électroniques
TW099113240A TWI409204B (zh) 2009-06-19 2010-04-27 Electronic component processing device and electronic component testing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2009/061212 WO2010146709A1 (fr) 2009-06-19 2009-06-19 Système et procédé de transfert de pièces électroniques

Publications (1)

Publication Number Publication Date
WO2010146709A1 true WO2010146709A1 (fr) 2010-12-23

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Country Status (3)

Country Link
JP (1) JPWO2010146709A1 (fr)
TW (1) TWI409204B (fr)
WO (1) WO2010146709A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI631348B (zh) * 2017-12-29 2018-08-01 鴻勁精密股份有限公司 電子元件轉載裝置及其應用之測試分類設備
JP2019048661A (ja) * 2017-09-12 2019-03-28 富士ゼロックス株式会社 部品移載治具及び部品移載方法
JP2020018975A (ja) * 2018-08-01 2020-02-06 株式会社Ｆｕｊｉ ノズルステーション対応のノズル洗浄用治具
CN110950025A (zh) * 2019-12-26 2020-04-03 深圳市世铎自动化设备有限公司 一种翻转装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112079110B (zh) * 2020-09-02 2022-01-11 上海克来机电自动化工程股份有限公司 一种传输夹具
CN113816118B (zh) * 2021-11-19 2022-02-11 四川明泰电子科技有限公司 一种ic芯片检测上料工装
TWI843278B (zh) * 2022-11-08 2024-05-21 鴻勁精密股份有限公司 載運機構及輸送裝置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007135710A1 (fr) * 2006-05-18 2007-11-29 Advantest Corporation Appareil de contrôle de composants électroniques
WO2008139853A1 (fr) * 2007-05-09 2008-11-20 Advantest Corporation Appareil de vérification de composants électroniques, système de vérification de composants électroniques, et procédé de vérification de composants électroniques
JP2009049347A (ja) * 2007-08-22 2009-03-05 Secron Co Ltd テストハンドラーのバッファトレイピッチを調節する方法及び装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007135710A1 (fr) * 2006-05-18 2007-11-29 Advantest Corporation Appareil de contrôle de composants électroniques
WO2008139853A1 (fr) * 2007-05-09 2008-11-20 Advantest Corporation Appareil de vérification de composants électroniques, système de vérification de composants électroniques, et procédé de vérification de composants électroniques
JP2009049347A (ja) * 2007-08-22 2009-03-05 Secron Co Ltd テストハンドラーのバッファトレイピッチを調節する方法及び装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019048661A (ja) * 2017-09-12 2019-03-28 富士ゼロックス株式会社 部品移載治具及び部品移載方法
TWI631348B (zh) * 2017-12-29 2018-08-01 鴻勁精密股份有限公司 電子元件轉載裝置及其應用之測試分類設備
JP2020018975A (ja) * 2018-08-01 2020-02-06 株式会社Ｆｕｊｉ ノズルステーション対応のノズル洗浄用治具
JP7104581B2 (ja) 2018-08-01 2022-07-21 株式会社Fuji ノズルステーション対応のノズル洗浄用治具
CN110950025A (zh) * 2019-12-26 2020-04-03 深圳市世铎自动化设备有限公司 一种翻转装置

Also Published As

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JPWO2010146709A1 (ja) 2012-11-29
TWI409204B (zh) 2013-09-21
TW201100311A (en) 2011-01-01

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