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WO2009072360A1 - ＣｌＯ３Ｆの除去方法 - Google Patents

ＣｌＯ３Ｆの除去方法 Download PDF

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Publication number
WO2009072360A1
WO2009072360A1 PCT/JP2008/069352 JP2008069352W WO2009072360A1 WO 2009072360 A1 WO2009072360 A1 WO 2009072360A1 JP 2008069352 W JP2008069352 W JP 2008069352W WO 2009072360 A1 WO2009072360 A1 WO 2009072360A1
Authority
WO
WIPO (PCT)
Prior art keywords
gas
clo3f
aqueous solution
reducing agent
removal
Prior art date
Application number
PCT/JP2008/069352
Other languages
English (en)
French (fr)
Inventor
Akiou Kikuchi
Isamu Mori
Original Assignee
Central Glass Company, Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Central Glass Company, Limited filed Critical Central Glass Company, Limited
Priority to US12/745,831 priority Critical patent/US20100247412A1/en
Priority to CN2008801191032A priority patent/CN101883623A/zh
Priority to KR1020107010513A priority patent/KR101171023B1/ko
Priority to EP08856278.0A priority patent/EP2218492B1/en
Publication of WO2009072360A1 publication Critical patent/WO2009072360A1/ja

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • B01D53/68—Halogens or halogen compounds
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/01—Chlorine; Hydrogen chloride
    • C01B7/07—Purification ; Separation
    • C01B7/0706—Purification ; Separation of hydrogen chloride
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B7/00—Halogens; Halogen acids
    • C01B7/19—Fluorine; Hydrogen fluoride
    • C01B7/191—Hydrogen fluoride
    • C01B7/195—Separation; Purification
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/30—Alkali metal compounds
    • B01D2251/304—Alkali metal compounds of sodium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/30—Alkali metal compounds
    • B01D2251/306—Alkali metal compounds of potassium
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2251/00—Reactants
    • B01D2251/60—Inorganic bases or salts
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2257/00—Components to be removed
    • B01D2257/20—Halogens or halogen compounds
    • B01D2257/204—Inorganic halogen compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2258/00—Sources of waste gases
    • B01D2258/02—Other waste gases
    • B01D2258/0216—Other waste gases from CVD treatment or semi-conductor manufacturing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
    • B01D53/77—Liquid phase processes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Environmental & Geological Engineering (AREA)
  • Biomedical Technology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Gas Separation By Absorption (AREA)
  • Treating Waste Gases (AREA)

Abstract

【課題】　本発明の課題は、ガス中のＣｌＯ3Ｆを除去できる安価な除去方法を提供することである。 【解決手段】　ＣｌＯ3Ｆを不純物として含むガスを還元剤と反応させることにより、ガス中の不純物であるＣｌＯ3Ｆを安価に除去することが可能となる。または、水溶液中の標準電極電位が－０．０９２Ｖ以下である還元剤を用いるか、 還元剤を水溶液の状態で反応に用いることにより、ガス中の不純物であるＣｌＯ3Ｆを安価に除去することが可能となる。
PCT/JP2008/069352 2007-12-03 2008-10-24 ＣｌＯ３Ｆの除去方法 WO2009072360A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
US12/745,831 US20100247412A1 (en) 2007-12-03 2008-10-24 Method for Removal of CIO3F
CN2008801191032A CN101883623A (zh) 2007-12-03 2008-10-24 C1o3f的除去方法
KR1020107010513A KR101171023B1 (ko) 2007-12-03 2008-10-24 ＣｌＯ３Ｆ의 제거방법
EP08856278.0A EP2218492B1 (en) 2007-12-03 2008-10-24 METHOD FOR REMOVAL OF ClO3F

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007312218A JP5417705B2 (ja) 2007-12-03 2007-12-03 ＣｌＯ３Ｆの除去方法
JP2007-312218 2007-12-03

Publications (1)

Publication Number Publication Date
WO2009072360A1 true WO2009072360A1 (ja) 2009-06-11

Family

ID=40717541

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/069352 WO2009072360A1 (ja) 2007-12-03 2008-10-24 ＣｌＯ３Ｆの除去方法

Country Status (6)

Country Link
US (1) US20100247412A1 (ja)
EP (1) EP2218492B1 (ja)
JP (1) JP5417705B2 (ja)
KR (1) KR101171023B1 (ja)
CN (1) CN101883623A (ja)
WO (1) WO2009072360A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010105825A (ja) * 2008-10-28 2010-05-13 Central Glass Co Ltd ハロゲンまたはハロゲン化合物を不純物として含む三フッ化窒素の精製方法
EP3384975A4 (en) * 2015-12-01 2019-08-07 Showa Denko K.K. PROCESS FOR TREATMENT OF EXHAUST GASES WITH ELEMENTARY FLUOR

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261210A (ja) 1988-04-12 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
JPH04122420A (ja) * 1989-12-07 1992-04-22 Man Technol Gmbh ガスから弗素及び／又は無機弗化物を除去する方法及び装置
JPH09108537A (ja) 1995-10-16 1997-04-28 Jiyomo Technical Res Center:Kk 窒素酸化物除去用還元剤および窒素酸化物の除去方法
JP2006231105A (ja) * 2005-02-22 2006-09-07 Fujitsu Ltd 酸化性ガスの除去方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2942948A (en) * 1956-12-21 1960-06-28 Pennsalt Chemicals Corp Chemical process for the purification of perchloryl fluoride and recovery of fluosulfonic acid
US3140934A (en) * 1961-03-13 1964-07-14 Pennsalt Chemicals Corp Perchloryl fluoride purification process
US4042585A (en) * 1976-03-22 1977-08-16 Eli Lilly And Company Process for preparation of 3-halomethylcephems
CN100528292C (zh) * 2004-10-07 2009-08-19 日本派欧尼株式会社 排气的处理方法和处理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01261210A (ja) 1988-04-12 1989-10-18 Mitsui Toatsu Chem Inc 三弗化窒素ガスの精製方法
JPH04122420A (ja) * 1989-12-07 1992-04-22 Man Technol Gmbh ガスから弗素及び／又は無機弗化物を除去する方法及び装置
JPH09108537A (ja) 1995-10-16 1997-04-28 Jiyomo Technical Res Center:Kk 窒素酸化物除去用還元剤および窒素酸化物の除去方法
JP2006231105A (ja) * 2005-02-22 2006-09-07 Fujitsu Ltd 酸化性ガスの除去方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
CHEM. ENG., vol. 84, 1977, pages 116
See also references of EP2218492A4

Also Published As

Publication number Publication date
EP2218492A1 (en) 2010-08-18
US20100247412A1 (en) 2010-09-30
KR101171023B1 (ko) 2012-08-08
CN101883623A (zh) 2010-11-10
JP5417705B2 (ja) 2014-02-19
JP2009136709A (ja) 2009-06-25
KR20100072353A (ko) 2010-06-30
EP2218492A4 (en) 2011-04-13
EP2218492B1 (en) 2013-05-08

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