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WO2009066968A3 - Procédé permettant de disposer des nanostructures et de fabriquer des nanodispositifs à l'aide de celles-ci - Google Patents

Procédé permettant de disposer des nanostructures et de fabriquer des nanodispositifs à l'aide de celles-ci Download PDF

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Publication number
WO2009066968A3
WO2009066968A3 PCT/KR2008/006927 KR2008006927W WO2009066968A3 WO 2009066968 A3 WO2009066968 A3 WO 2009066968A3 KR 2008006927 W KR2008006927 W KR 2008006927W WO 2009066968 A3 WO2009066968 A3 WO 2009066968A3
Authority
WO
WIPO (PCT)
Prior art keywords
same
nanostructures
manufacturing nano
nano devices
arranging
Prior art date
Application number
PCT/KR2008/006927
Other languages
English (en)
Other versions
WO2009066968A2 (fr
Inventor
Seung-Hun Hong
Byung-Yang Lee
Original Assignee
Seoul Nat Univ Ind Foundation
Seung-Hun Hong
Byung-Yang Lee
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seoul Nat Univ Ind Foundation, Seung-Hun Hong, Byung-Yang Lee filed Critical Seoul Nat Univ Ind Foundation
Priority claimed from KR1020080116785A external-priority patent/KR101027517B1/ko
Publication of WO2009066968A2 publication Critical patent/WO2009066968A2/fr
Publication of WO2009066968A3 publication Critical patent/WO2009066968A3/fr

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/0019—Flexible or deformable structures not provided for in groups B81C1/00142 - B81C1/00182
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0292—Sensors not provided for in B81B2201/0207 - B81B2201/0285
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning
    • B81C2201/0102—Surface micromachining
    • B81C2201/0105—Sacrificial layer
    • B81C2201/0109—Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Micromachines (AREA)

Abstract

La présente invention a trait à un procédé permettant de disposer des nanostructures et à un procédé de fabrication d'un nanodispositif. Le procédé permettant de disposer des nanostructures dans une direction certaine comprend les étapes consistant à : former une structure sacrificielle dotée d'une surface dans la direction certaine sur un substrat ; former les nanostructures au moins sur la surface de la direction certaine de la structure sacrificielle ; et supprimer la structure sacrificielle.
PCT/KR2008/006927 2007-11-23 2008-11-24 Procédé permettant de disposer des nanostructures et de fabriquer des nanodispositifs à l'aide de celles-ci WO2009066968A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20070120021 2007-11-23
KR10-2007-0120021 2007-11-23
KR1020080116785A KR101027517B1 (ko) 2007-11-23 2008-11-24 나노 구조체의 배치 방법 및 이를 이용한 나노 소자의 제조방법
KR10-2008-0116785 2008-11-24

Publications (2)

Publication Number Publication Date
WO2009066968A2 WO2009066968A2 (fr) 2009-05-28
WO2009066968A3 true WO2009066968A3 (fr) 2009-08-20

Family

ID=40668012

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2008/006927 WO2009066968A2 (fr) 2007-11-23 2008-11-24 Procédé permettant de disposer des nanostructures et de fabriquer des nanodispositifs à l'aide de celles-ci

Country Status (1)

Country Link
WO (1) WO2009066968A2 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6515339B2 (en) * 2000-07-18 2003-02-04 Lg Electronics Inc. Method of horizontally growing carbon nanotubes and field effect transistor using the carbon nanotubes grown by the method
US6611178B1 (en) * 1999-07-16 2003-08-26 Japan Science And Technology Corporation Nanometer-order mechanical vibrator, production method thereof and measuring device using it
US6867443B2 (en) * 2001-07-26 2005-03-15 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6611178B1 (en) * 1999-07-16 2003-08-26 Japan Science And Technology Corporation Nanometer-order mechanical vibrator, production method thereof and measuring device using it
US6515339B2 (en) * 2000-07-18 2003-02-04 Lg Electronics Inc. Method of horizontally growing carbon nanotubes and field effect transistor using the carbon nanotubes grown by the method
US6867443B2 (en) * 2001-07-26 2005-03-15 The Board Of Trustees Of The University Of Illinois Parallel, individually addressable probes for nanolithography

Also Published As

Publication number Publication date
WO2009066968A2 (fr) 2009-05-28

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