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WO2009056420A3 - Micromechanical system - Google Patents

Micromechanical system Download PDF

Info

Publication number
WO2009056420A3
WO2009056420A3 PCT/EP2008/063116 EP2008063116W WO2009056420A3 WO 2009056420 A3 WO2009056420 A3 WO 2009056420A3 EP 2008063116 W EP2008063116 W EP 2008063116W WO 2009056420 A3 WO2009056420 A3 WO 2009056420A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromechanical system
base
micromechanical
suspension
substrate
Prior art date
Application number
PCT/EP2008/063116
Other languages
German (de)
French (fr)
Other versions
WO2009056420A2 (en
Inventor
Tjalf Pirk
Axel Franke
Kersten Kehr
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to CN200880113985A priority Critical patent/CN101842313A/en
Publication of WO2009056420A2 publication Critical patent/WO2009056420A2/en
Publication of WO2009056420A3 publication Critical patent/WO2009056420A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)

Abstract

The invention relates to a micromechanical system (1) which comprises a substrate (100), a suspension (130), a base (140) and a micromechanical sensor (150), the suspension (130) movably carrying the base (140) above the substrate (100) and the micromechanical sensor (150) being located on the base (140).
PCT/EP2008/063116 2007-11-02 2008-10-01 Micromechanical system WO2009056420A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200880113985A CN101842313A (en) 2007-11-02 2008-10-01 Micromechanical system

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007052367.1 2007-11-02
DE200710052367 DE102007052367A1 (en) 2007-11-02 2007-11-02 Micromechanical system

Publications (2)

Publication Number Publication Date
WO2009056420A2 WO2009056420A2 (en) 2009-05-07
WO2009056420A3 true WO2009056420A3 (en) 2009-10-22

Family

ID=40514303

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/063116 WO2009056420A2 (en) 2007-11-02 2008-10-01 Micromechanical system

Country Status (4)

Country Link
CN (1) CN101842313A (en)
DE (1) DE102007052367A1 (en)
TW (1) TWI471258B (en)
WO (1) WO2009056420A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9227835B2 (en) * 2010-11-23 2016-01-05 Honeywell International Inc. Vibration isolation interposer die
DE102012200929B4 (en) * 2012-01-23 2020-10-01 Robert Bosch Gmbh Micromechanical structure and method for manufacturing a micromechanical structure
DE102013216898B4 (en) * 2013-08-26 2023-02-09 Robert Bosch Gmbh Micromechanical component and method for producing a micromechanical component
DE102013216901A1 (en) * 2013-08-26 2015-02-26 Robert Bosch Gmbh Micromechanical component and method for producing a micromechanical component
CN104891419B (en) * 2015-06-29 2016-11-09 歌尔股份有限公司 A MEMS inertial sensor and its manufacturing method
DE102016215829B4 (en) 2016-08-23 2025-03-27 Robert Bosch Gmbh Micromechanical component
TWI663403B (en) * 2017-05-08 2019-06-21 日商村田製作所股份有限公司 Capacitive micromechanical accelerometer and method for performing a self-test in the same
DE102021202573B3 (en) 2021-03-16 2022-07-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein MEMS TRANSDUCER WITH CUTS AND PROJECTIONS

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5721377A (en) * 1995-07-22 1998-02-24 Robert Bosch Gmbh Angular velocity sensor with built-in limit stops
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US20010048784A1 (en) * 2000-03-24 2001-12-06 Behrang Behin Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6632698B2 (en) * 2001-08-07 2003-10-14 Hewlett-Packard Development Company, L.P. Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
KR100431004B1 (en) * 2002-02-08 2004-05-12 삼성전자주식회사 Rotation type MEMS gyroscpoe of a decoupled structure
US20050066728A1 (en) * 2003-09-25 2005-03-31 Kionix, Inc. Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
US7187100B2 (en) * 2004-04-20 2007-03-06 Advanced Numicro Systems, Inc. Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
KR100652952B1 (en) * 2004-07-19 2006-12-06 삼성전자주식회사 MEMS gyroscopes with coupling springs

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5721377A (en) * 1995-07-22 1998-02-24 Robert Bosch Gmbh Angular velocity sensor with built-in limit stops
US20010048784A1 (en) * 2000-03-24 2001-12-06 Behrang Behin Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing

Also Published As

Publication number Publication date
DE102007052367A1 (en) 2009-05-07
CN101842313A (en) 2010-09-22
TWI471258B (en) 2015-02-01
TW200927637A (en) 2009-07-01
WO2009056420A2 (en) 2009-05-07

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