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WO2009056420A3 - Mikromechanisches system - Google Patents

Mikromechanisches system Download PDF

Info

Publication number
WO2009056420A3
WO2009056420A3 PCT/EP2008/063116 EP2008063116W WO2009056420A3 WO 2009056420 A3 WO2009056420 A3 WO 2009056420A3 EP 2008063116 W EP2008063116 W EP 2008063116W WO 2009056420 A3 WO2009056420 A3 WO 2009056420A3
Authority
WO
WIPO (PCT)
Prior art keywords
micromechanical system
base
micromechanical
suspension
substrate
Prior art date
Application number
PCT/EP2008/063116
Other languages
English (en)
French (fr)
Other versions
WO2009056420A2 (de
Inventor
Tjalf Pirk
Axel Franke
Kersten Kehr
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to CN200880113985A priority Critical patent/CN101842313A/zh
Publication of WO2009056420A2 publication Critical patent/WO2009056420A2/de
Publication of WO2009056420A3 publication Critical patent/WO2009056420A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)

Abstract

Ein mikromechanisches System 1 umfasst ein Substrat 100, eine Aufhängung 130, eine Basis 140 und einen mikromechanischen Sensor 150, wobei die Aufhängung 130 die Basis 140 über dem Substrat 100 beweglich trägt und wobei der mikromechanische Sensor 150 an der Basis 140 angeordnet ist.
PCT/EP2008/063116 2007-11-02 2008-10-01 Mikromechanisches system WO2009056420A2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN200880113985A CN101842313A (zh) 2007-11-02 2008-10-01 微机械系统

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007052367.1 2007-11-02
DE200710052367 DE102007052367A1 (de) 2007-11-02 2007-11-02 Mikromechanisches System

Publications (2)

Publication Number Publication Date
WO2009056420A2 WO2009056420A2 (de) 2009-05-07
WO2009056420A3 true WO2009056420A3 (de) 2009-10-22

Family

ID=40514303

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/063116 WO2009056420A2 (de) 2007-11-02 2008-10-01 Mikromechanisches system

Country Status (4)

Country Link
CN (1) CN101842313A (de)
DE (1) DE102007052367A1 (de)
TW (1) TWI471258B (de)
WO (1) WO2009056420A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9227835B2 (en) * 2010-11-23 2016-01-05 Honeywell International Inc. Vibration isolation interposer die
DE102012200929B4 (de) * 2012-01-23 2020-10-01 Robert Bosch Gmbh Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur
DE102013216898B4 (de) * 2013-08-26 2023-02-09 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
DE102013216901A1 (de) * 2013-08-26 2015-02-26 Robert Bosch Gmbh Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements
CN104891419B (zh) * 2015-06-29 2016-11-09 歌尔股份有限公司 一种mems惯性传感器及其制造方法
DE102016215829B4 (de) 2016-08-23 2025-03-27 Robert Bosch Gmbh Mikromechanisches Bauelement
TWI663403B (zh) * 2017-05-08 2019-06-21 日商村田製作所股份有限公司 一種電容式微機械加速度計以及一種用於在此電容式微機械加速度計中執行一自我測試之方法
DE102021202573B3 (de) 2021-03-16 2022-07-07 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein Mems-schallwandler mit ausnehmungen und auskragungen

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5721377A (en) * 1995-07-22 1998-02-24 Robert Bosch Gmbh Angular velocity sensor with built-in limit stops
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US20010048784A1 (en) * 2000-03-24 2001-12-06 Behrang Behin Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6632698B2 (en) * 2001-08-07 2003-10-14 Hewlett-Packard Development Company, L.P. Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS
KR100431004B1 (ko) * 2002-02-08 2004-05-12 삼성전자주식회사 회전형 비연성 멤스 자이로스코프
US20050066728A1 (en) * 2003-09-25 2005-03-31 Kionix, Inc. Z-axis angular rate micro electro-mechanical systems (MEMS) sensor
US7187100B2 (en) * 2004-04-20 2007-03-06 Advanced Numicro Systems, Inc. Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth
KR100652952B1 (ko) * 2004-07-19 2006-12-06 삼성전자주식회사 커플링 스프링을 구비한 멤스 자이로스코프

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5726073A (en) * 1993-06-01 1998-03-10 Cornell Research Foundation, Inc. Compound stage MEM actuator suspended for multidimensional motion
US5721377A (en) * 1995-07-22 1998-02-24 Robert Bosch Gmbh Angular velocity sensor with built-in limit stops
US20010048784A1 (en) * 2000-03-24 2001-12-06 Behrang Behin Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing

Also Published As

Publication number Publication date
DE102007052367A1 (de) 2009-05-07
CN101842313A (zh) 2010-09-22
TWI471258B (zh) 2015-02-01
TW200927637A (en) 2009-07-01
WO2009056420A2 (de) 2009-05-07

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