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WO2009050990A1 - 圧電マイクロブロア - Google Patents

圧電マイクロブロア Download PDF

Info

Publication number
WO2009050990A1
WO2009050990A1 PCT/JP2008/067236 JP2008067236W WO2009050990A1 WO 2009050990 A1 WO2009050990 A1 WO 2009050990A1 JP 2008067236 W JP2008067236 W JP 2008067236W WO 2009050990 A1 WO2009050990 A1 WO 2009050990A1
Authority
WO
WIPO (PCT)
Prior art keywords
blower
opening
wall
outside
inlet path
Prior art date
Application number
PCT/JP2008/067236
Other languages
English (en)
French (fr)
Inventor
Atsuhiko Hirata
Gaku Kamitani
Original Assignee
Murata Manufacturing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co., Ltd. filed Critical Murata Manufacturing Co., Ltd.
Priority to EP08839629A priority Critical patent/EP2096309A4/en
Priority to JP2009507635A priority patent/JP5012889B2/ja
Publication of WO2009050990A1 publication Critical patent/WO2009050990A1/ja
Priority to US12/476,332 priority patent/US7972124B2/en

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00Machines, pumps, or pumping installations having flexible working members
    • F04B43/02Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04Pumps having electric drive
    • F04B43/043Micropumps
    • F04B43/046Micropumps with piezoelectric drive
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B39/00Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
    • F04B39/10Adaptations or arrangements of distribution members
    • F04B39/1093Adaptations or arrangements of distribution members the members being low-resistance valves allowing free streaming
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B45/00Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
    • F04B45/04Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
    • F04B45/047Pumps having electric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Multimedia (AREA)
  • Reciprocating Pumps (AREA)

Abstract

【課題】逆止弁を使用せずに大流量の圧縮性流体を輸送でき、外部に漏れ出す騒音を抑制できる圧電マイクロブロアを提供する。 【解決手段】ブロア本体1に第1壁部12と第2壁部10とを設け、ダイヤフラム2の中央部と対向する壁部の位置に開口部12a,10aを形成する。両壁部の間に、開口部12a,10aと外部とを連通させる流入通路11bを形成する。圧電素子22に電圧を印加してダイヤフラム2を振動させると、開口部12a周辺の第1壁部12が振動し、流入通路11bから気体を吸い込み、開口部10aから気体を排出することができる。流入通路11bの途中に吸音用の複数の枝路11cを接続し、開口部10a付近で発生する騒音が流入口4から漏れ出るのを防止する。
PCT/JP2008/067236 2007-10-16 2008-09-25 圧電マイクロブロア WO2009050990A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP08839629A EP2096309A4 (en) 2007-10-16 2008-09-25 PIEZOELECTRIC MICRO FAN
JP2009507635A JP5012889B2 (ja) 2007-10-16 2008-09-25 圧電マイクロブロア
US12/476,332 US7972124B2 (en) 2007-10-16 2009-06-02 Piezoelectric micro-blower

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-268501 2007-10-16
JP2007268501 2007-10-16

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/476,332 Continuation US7972124B2 (en) 2007-10-16 2009-06-02 Piezoelectric micro-blower

Publications (1)

Publication Number Publication Date
WO2009050990A1 true WO2009050990A1 (ja) 2009-04-23

Family

ID=40567263

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/067236 WO2009050990A1 (ja) 2007-10-16 2008-09-25 圧電マイクロブロア

Country Status (5)

Country Link
US (1) US7972124B2 (ja)
EP (1) EP2096309A4 (ja)
JP (1) JP5012889B2 (ja)
CN (1) CN101568728A (ja)
WO (1) WO2009050990A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009148008A1 (ja) * 2008-06-03 2009-12-10 株式会社村田製作所 圧電マイクロブロア
US20220088288A1 (en) * 2018-12-26 2022-03-24 Kci Licensing, Inc. Piezoelectric pump adapter for negative-pressure therapy

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US8526651B2 (en) * 2010-01-25 2013-09-03 Sonion Nederland Bv Receiver module for inflating a membrane in an ear device
DE102011078882A1 (de) * 2011-07-08 2013-01-10 Osram Ag Erzeugung eines Gasstroms mittels Schwingungen
JP5505559B2 (ja) 2011-10-11 2014-05-28 株式会社村田製作所 流体制御装置、流体制御装置の調整方法
JP6068886B2 (ja) * 2012-03-30 2017-01-25 日東電工株式会社 換気システム
TWI475180B (zh) 2012-05-31 2015-03-01 Ind Tech Res Inst 合成噴流裝置
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CN103016296B (zh) * 2012-12-13 2015-08-26 江苏大学 基于合成射流的压电微泵
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TWI552838B (zh) * 2013-06-24 2016-10-11 研能科技股份有限公司 微型氣壓動力裝置
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JP5907322B1 (ja) * 2014-07-11 2016-04-26 株式会社村田製作所 吸引装置
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TWI625468B (zh) 2016-09-05 2018-06-01 研能科技股份有限公司 流體控制裝置
US10943578B2 (en) 2016-12-13 2021-03-09 Ultrahaptics Ip Ltd Driving techniques for phased-array systems
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CN115154781B (zh) * 2017-04-10 2024-12-24 株式会社村田制作所 送风装置和流体控制装置
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TWI681120B (zh) * 2018-05-21 2020-01-01 研能科技股份有限公司 微型輸送裝置
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See also references of EP2096309A4 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009148008A1 (ja) * 2008-06-03 2009-12-10 株式会社村田製作所 圧電マイクロブロア
US8596998B2 (en) 2008-06-03 2013-12-03 Murata Manufacturing Co., Ltd. Piezoelectric micro-blower
US20220088288A1 (en) * 2018-12-26 2022-03-24 Kci Licensing, Inc. Piezoelectric pump adapter for negative-pressure therapy

Also Published As

Publication number Publication date
CN101568728A (zh) 2009-10-28
JP5012889B2 (ja) 2012-08-29
JPWO2009050990A1 (ja) 2011-03-03
US7972124B2 (en) 2011-07-05
EP2096309A1 (en) 2009-09-02
US20090232684A1 (en) 2009-09-17
EP2096309A4 (en) 2013-02-27

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