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WO2008136500A1 - シリコンウエハ及びその製造方法 - Google Patents

シリコンウエハ及びその製造方法 Download PDF

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Publication number
WO2008136500A1
WO2008136500A1 PCT/JP2008/058359 JP2008058359W WO2008136500A1 WO 2008136500 A1 WO2008136500 A1 WO 2008136500A1 JP 2008058359 W JP2008058359 W JP 2008058359W WO 2008136500 A1 WO2008136500 A1 WO 2008136500A1
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WO
WIPO (PCT)
Prior art keywords
silicon wafer
manufacturing
density
bmd
same
Prior art date
Application number
PCT/JP2008/058359
Other languages
English (en)
French (fr)
Inventor
Katsuhiko Nakai
Masayuki Fukuda
Original Assignee
Siltronic Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siltronic Ag filed Critical Siltronic Ag
Priority to CN2008800144138A priority Critical patent/CN101675507B/zh
Priority to EP08740998A priority patent/EP2144280B1/en
Priority to AT08740998T priority patent/ATE493755T1/de
Priority to DE602008004237T priority patent/DE602008004237D1/de
Priority to JP2009513022A priority patent/JP5256195B2/ja
Publication of WO2008136500A1 publication Critical patent/WO2008136500A1/ja
Priority to US12/605,926 priority patent/US8382894B2/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
    • H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
    • H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
    • H01L21/3225—Thermally inducing defects using oxygen present in the silicon body for intrinsic gettering
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
    • C30B29/02—Elements
    • C30B29/06—Silicon
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B33/00—After-treatment of single crystals or homogeneous polycrystalline material with defined structure
    • C30B33/02—Heat treatment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Organic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Thermal Sciences (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

　デバイス製造プロセスにおけるスリップ転位及び反りの発生を共に抑制することができるシリコンウエハ及びその製造方法を提供する。 　本発明のシリコンウエハは、ＢＭＤの形態が八面体であるシリコンウエハであり、シリコンウエハ表面から深さ５０μｍ以上の位置に存在しているＢＭＤのうち、対角長が１０ｎｍ～５０ｎｍのＢＭＤの密度が１×１０１２／ｃｍ３以上であり、ＢＳＦの密度が１×１０８／ｃｍ３以下である。また、好ましくは、格子間酸素濃度が４×１０１７ａｔｏｍｓ／ｃｍ３以上６×１０１７ａｔｏｍｓ／ｃｍ３以下であり、対角長が２００ｎｍ以上のＢＭＤの密度が１×１０７／ｃｍ３以下である。
PCT/JP2008/058359 2007-05-02 2008-05-01 シリコンウエハ及びその製造方法 WO2008136500A1 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN2008800144138A CN101675507B (zh) 2007-05-02 2008-05-01 硅晶片及其制造方法
EP08740998A EP2144280B1 (en) 2007-05-02 2008-05-01 Silicon wafer and method for manufacturing the same
AT08740998T ATE493755T1 (de) 2007-05-02 2008-05-01 Siliciumwafer und herstellungsverfahren dafür
DE602008004237T DE602008004237D1 (de) 2007-05-02 2008-05-01 Siliciumwafer und herstellungsverfahren dafür
JP2009513022A JP5256195B2 (ja) 2007-05-02 2008-05-01 シリコンウエハ及びその製造方法
US12/605,926 US8382894B2 (en) 2007-05-02 2009-10-26 Process for the preparation of silicon wafer with reduced slip and warpage

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-121773 2007-05-02
JP2007121773 2007-05-02
JP2007338842 2007-12-28
JP2007-338842 2007-12-28

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/605,926 Continuation-In-Part US8382894B2 (en) 2007-05-02 2009-10-26 Process for the preparation of silicon wafer with reduced slip and warpage

Publications (1)

Publication Number Publication Date
WO2008136500A1 true WO2008136500A1 (ja) 2008-11-13

Family

ID=39943605

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058359 WO2008136500A1 (ja) 2007-05-02 2008-05-01 シリコンウエハ及びその製造方法

Country Status (8)

Country Link
US (1) US8382894B2 (ja)
EP (1) EP2144280B1 (ja)
JP (1) JP5256195B2 (ja)
KR (1) KR101043011B1 (ja)
CN (1) CN101675507B (ja)
AT (1) ATE493755T1 (ja)
DE (1) DE602008004237D1 (ja)
WO (1) WO2008136500A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010153706A (ja) * 2008-12-26 2010-07-08 Siltronic Ag シリコンウエハ及びその製造方法
WO2013168371A1 (ja) * 2012-05-11 2013-11-14 サンケン電気株式会社 エピタキシャル基板、半導体装置及び半導体装置の製造方法
JP2014229872A (ja) * 2013-05-27 2014-12-08 シャープ株式会社 窒化物半導体エピタキシャルウェハ
JP2020526472A (ja) * 2017-07-10 2020-08-31 ジルトロニック アクチエンゲゼルシャフトＳｉｌｔｒｏｎｉｃ ＡＧ 単結晶シリコンから作られる半導体ウェハおよびその製造プロセス

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010140323A1 (ja) * 2009-06-03 2010-12-09 コバレントマテリアル株式会社 シリコンウェーハ及びシリコンウェーハの熱処理方法
US8357939B2 (en) 2009-12-29 2013-01-22 Siltronic Ag Silicon wafer and production method therefor
JP2012001379A (ja) * 2010-06-15 2012-01-05 Sharp Corp 太陽電池モジュール、シリコンリボンの製造方法および球状シリコンの製造方法
DE102010034002B4 (de) * 2010-08-11 2013-02-21 Siltronic Ag Siliciumscheibe und Verfahren zu deren Herstellung
JP5764937B2 (ja) * 2011-01-24 2015-08-19 信越半導体株式会社 シリコン単結晶ウェーハの製造方法
JP5997552B2 (ja) * 2011-09-27 2016-09-28 グローバルウェーハズ・ジャパン株式会社 シリコンウェーハの熱処理方法
JP6260100B2 (ja) * 2013-04-03 2018-01-17 株式会社Sumco エピタキシャルシリコンウェーハの製造方法
KR101472349B1 (ko) * 2013-05-21 2014-12-12 주식회사 엘지실트론 반도체용 실리콘 단결정 잉곳 및 웨이퍼
WO2015003022A1 (en) * 2013-07-01 2015-01-08 Solexel, Inc. High-throughput thermal processing methods for producing high-efficiency crystalline silicon solar cells
US9425063B2 (en) 2014-06-19 2016-08-23 Infineon Technologies Ag Method of reducing an impurity concentration in a semiconductor body, method of manufacturing a semiconductor device and semiconductor device
JP6100226B2 (ja) * 2014-11-26 2017-03-22 信越半導体株式会社 シリコン単結晶ウェーハの熱処理方法
CN105316767B (zh) * 2015-06-04 2019-09-24 上海超硅半导体有限公司 超大规模集成电路用硅片及其制造方法、应用
CN105280491A (zh) * 2015-06-17 2016-01-27 上海超硅半导体有限公司 硅片及制造方法
JP6413952B2 (ja) * 2015-06-26 2018-10-31 株式会社Sumco シリコンウェーハの良否判定方法、該方法を用いたシリコンウェーハの製造方法およびシリコンウェーハ
KR20170119155A (ko) * 2016-04-18 2017-10-26 주식회사 스탠딩에그 벌크 실리콘 멤스의 제조 방법
US10032663B1 (en) * 2017-05-24 2018-07-24 Texas Instruments Incorporated Anneal after trench sidewall implant to reduce defects
JP6717267B2 (ja) * 2017-07-10 2020-07-01 株式会社Sumco シリコンウェーハの製造方法
US11515158B2 (en) 2020-03-11 2022-11-29 Globalfoundries U.S. Inc. Semiconductor structure with semiconductor-on-insulator region and method
US11695048B2 (en) 2020-04-09 2023-07-04 Sumco Corporation Silicon wafer and manufacturing method of the same
EP3929335A1 (en) * 2020-06-25 2021-12-29 Siltronic AG Semiconductor wafer made of single-crystal silicon and process for the production thereof

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07508613A (ja) * 1992-03-31 1995-09-21 ミテル・コーポレーション 良好なイントリンシックゲッタ作用を有する半導体の製造方法
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JPH1098047A (ja) 1996-09-12 1998-04-14 Wacker Siltronic G Fuer Halbleitermaterialien Ag 低欠陥密度を有するシリコン半導体ウエハの製造方法
JPH10303208A (ja) * 1997-04-30 1998-11-13 Toshiba Corp 半導体基板およびその製造方法
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JP2006032799A (ja) * 2004-07-20 2006-02-02 Shin Etsu Handotai Co Ltd シリコンエピタキシャルウェーハおよびその製造方法
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Title
See also references of EP2144280A4

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010153706A (ja) * 2008-12-26 2010-07-08 Siltronic Ag シリコンウエハ及びその製造方法
EP2204476A3 (en) * 2008-12-26 2010-08-25 Siltronic AG Silicon wafer and method of manufacturing the same
KR101116949B1 (ko) * 2008-12-26 2012-03-14 실트로닉 아게 실리콘 웨이퍼 및 실리콘 웨이퍼 제조 방법
US8343618B2 (en) 2008-12-26 2013-01-01 Siltronic Ag Silicon wafer and method of manufacturing the same
TWI398927B (zh) * 2008-12-26 2013-06-11 Siltronic Ag 矽晶圓及其製造方法
USRE45238E1 (en) 2008-12-26 2014-11-11 Siltronic Ag Silicon wafer and method of manufacturing the same
WO2013168371A1 (ja) * 2012-05-11 2013-11-14 サンケン電気株式会社 エピタキシャル基板、半導体装置及び半導体装置の製造方法
JP2013239474A (ja) * 2012-05-11 2013-11-28 Sanken Electric Co Ltd エピタキシャル基板、半導体装置及び半導体装置の製造方法
JP2014229872A (ja) * 2013-05-27 2014-12-08 シャープ株式会社 窒化物半導体エピタキシャルウェハ
JP2020526472A (ja) * 2017-07-10 2020-08-31 ジルトロニック アクチエンゲゼルシャフトＳｉｌｔｒｏｎｉｃ ＡＧ 単結晶シリコンから作られる半導体ウェハおよびその製造プロセス

Also Published As

Publication number Publication date
KR20090129443A (ko) 2009-12-16
JPWO2008136500A1 (ja) 2010-07-29
EP2144280B1 (en) 2010-12-29
US8382894B2 (en) 2013-02-26
EP2144280A4 (en) 2010-04-21
JP5256195B2 (ja) 2013-08-07
KR101043011B1 (ko) 2011-06-21
ATE493755T1 (de) 2011-01-15
EP2144280A1 (en) 2010-01-13
CN101675507B (zh) 2011-08-03
CN101675507A (zh) 2010-03-17
DE602008004237D1 (de) 2011-02-10
US20100047563A1 (en) 2010-02-25

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