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WO2008106928A2 - Procédé pour produire des membranes à commande électrique et/ou magnétique et actionneur magnétique muni d'une telle membrane - Google Patents

Procédé pour produire des membranes à commande électrique et/ou magnétique et actionneur magnétique muni d'une telle membrane Download PDF

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Publication number
WO2008106928A2
WO2008106928A2 PCT/DE2008/000313 DE2008000313W WO2008106928A2 WO 2008106928 A2 WO2008106928 A2 WO 2008106928A2 DE 2008000313 W DE2008000313 W DE 2008000313W WO 2008106928 A2 WO2008106928 A2 WO 2008106928A2
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WO
WIPO (PCT)
Prior art keywords
nanoparticles
micro
membrane
layer
magnetic
Prior art date
Application number
PCT/DE2008/000313
Other languages
German (de)
English (en)
Other versions
WO2008106928A3 (fr
Inventor
Thomas Otto
Andreas Morschhauser
Jörg Nestler
Thomas Gessner
Sebastian Voigt
Original Assignee
Fraunhofer Gesellschaft Zur Förderung Der Angewandten Forschung E. V.
Technische Universität Chemnitz
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft Zur Förderung Der Angewandten Forschung E. V., Technische Universität Chemnitz filed Critical Fraunhofer Gesellschaft Zur Förderung Der Angewandten Forschung E. V.
Publication of WO2008106928A2 publication Critical patent/WO2008106928A2/fr
Publication of WO2008106928A3 publication Critical patent/WO2008106928A3/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00642—Manufacture or treatment of devices or systems in or on a substrate for improving the physical properties of a device
    • B81C1/00698—Electrical characteristics, e.g. by doping materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/01—Switches
    • B81B2201/012—Switches characterised by the shape
    • B81B2201/016—Switches characterised by the shape having a bridge fixed on two ends and connected to one or more dimples
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/036—Micropumps
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0127—Diaphragms, i.e. structures separating two media that can control the passage from one medium to another; Membranes, i.e. diaphragms with filtering function

Definitions

  • the present invention relates to a process for the production of electrically and / or magnetically controllable membranes, in which micro- and / or nanoparticles with magnetic and / or electrical properties, by means of which they undergo a force action in a magnetic or electric field
  • the invention also relates to a magnetic actuator based on such a membrane.
  • membranes or magnetic actuators can be used for example for magnetic switches, valves or pumps.
  • micro- and / or nanoparticles to a matrix material for the targeted influencing of material properties is a common method in the production of materials. This results in materials - so-called micro- and / or nanocomposites - that can exhibit novel, advantageous properties. Films of such materials usually have largely homogeneous properties due to the uniform distribution of the micro- and / or nanoparticles. For many applications, however, these admixtures bring not only advantages but also disadvantages that are a compromise of new ones require desired properties and unfavorable properties. For example, increasing the dielectric constant of polymers by embedding TiO 2 particles can also cause an undesirable increase in the elastic modulus.
  • the embedding of, for example, magnetic micro- and / or nanoparticles can lead to a stiffening of the membrane, which is not sustainable for the intended application.
  • a peristaltic micropump with a magnetically drivable membrane of PDMS (polydimethylsiloxane) In the diaphragm, small chambers are provided for receiving magnets made of a magnetic powder in a thermoplastic matrix material, thus avoiding deterioration of the elastic properties of the diaphragm, but the placement of the magnets in the diaphragm makes the manufacturing process expensive ,
  • the object of the present invention is to provide a method for the production of electrically and / or magnetically controllable membranes, which perform with less effort and allows the production of membranes for pumps, valves and switches. Presentation of the invention
  • Claim 10 indicates a magnetic actuator which is operated with a membrane produced according to the invention.
  • Advantageous embodiments of the method and of the actuator are the subject matter of the subclaims or can be taken from the following description and the exemplary embodiments.
  • the proposed method provides micro and / or nanoparticles having magnetic and / or electrical properties by which they undergo a force action in a magnetic or electric field.
  • the micro- and / or nanoparticles are mixed with a flowable state matrix material which has elastic properties after solidification.
  • the resulting dispersion of matrix material and micro- and / or nanoparticles is applied as a layer
  • Substrate applied This can be done for example by spin-on, Aufroäkeln, pouring or spraying.
  • the layer is then exposed to one or more electric and / or magnetic fields, by means of which the mixing of the approximately uniform distribution of the micro- and / or nanoparticles in the layer is selectively changed in order to accumulate the micro- and / or nanoparticles on a or to get several digits of the layer.
  • the layer is solidified with the corresponding accumulated micro- and / or nanoparticles to form one or more membranes.
  • the solidified layer which is both a single and several together may then be detached from the substrate and fed to the appropriate use.
  • the released layer can be bonded to a silicon substrate in which corresponding recesses have been produced, over which the one or more membranes are fastened.
  • the method can be used to produce membranes with arrays of clusters, hereinafter also referred to as membrane arrays, which are subsequently applied to a substrate with correspondingly array-shaped recesses.
  • microparticles is to be understood as meaning particles in the size range between 1 and 1000 ⁇ m, nanoparticles being particles in the size range below 1 ⁇ m.
  • the method does not exclude that among the micro- and / or nanoparticles there are also sporadic particles with a size above 1 mm. This is not desirable.
  • the microparticles and / or nanoparticles may consist of para-, ferro- or permanent magnet materials, for example.
  • the method can be used to produce membranes or membrane arrays in any dimensions.
  • the method is particularly advantageously suitable for the production of micromembranes or micromembrane arrays, for example for microvalves, micropumps or microswitch applications.
  • the proposed method makes use of the mobility of the micro- and / or nanoparticles in a still in flowable state matrix material in order to locally accumulate this targeted magnetic and / or electric fields, align and fix by solidification of the matrix material in this targeted generated distribution.
  • This presupposes that the matrix material is in a flowable state in the targeted influencing of the micro- and / or nanoparticles. This may be a liquid or a highly viscous state. If necessary, the matrix material is temporarily transferred to this state. This can be done, for example, depending on the material, by dissolving or melting or can also be achieved for example in the case of polymers as matrix material in that the matrix material is still present in at least partially uncrosslinked and thus flowable state.
  • the layer After applying the matrix material with the micro- and / or nanoparticles contained therein to the substrate, the layer is then exposed to a static and / or variable magnetic field and / or electric field, by which a force acting on the micro- and / or nanoparticles in the Layer is exercised.
  • the fields are chosen so that a targeted accumulation of micro- and / or nanoparticles takes place in the layer.
  • the choice of the fields used, ie electric or magnetic field or both, depends on the properties of the selected micro- and / or nanoparticles.
  • the layer can also be provided with a corresponding cover, which of course must permit the action of the electrical and / or magnetic fields on the layer.
  • the field generating device must be able to generate a time and / or location variable field so as to accumulate and align the particles in the desired manner.
  • movable arrangements of permanent magnets, arrangements of electrical coils and arrangements of electrically conductive tracks and layers can be used here.
  • the superimposition of static and dynamic fields is possible in order to generate spatially resolved minima or maxima of the field strength over the lateral extent of the layer.
  • the final fixation of the particles and their orientation then takes place by the solidification of the matrix material.
  • this can be achieved by cooling, evaporation of the solvents or a crosslinking reaction, induced by heat, radiation and / or a crosslinking chemical
  • the layer may continue to be exposed to the magnetic or electric field.
  • membrane regions which are required for the elastic function of the membrane in the corresponding application can be kept largely free from the stored micro- and / or nanoparticles, so that in These areas no unwanted stiffening of the membrane occurs.
  • the micro- and / or nanoparticles in the central region of the membrane be accumulated so that the edge regions, if any, have only a low concentration of these particles.
  • the local accumulation of the particles which can be produced by the method allows an increased permeability of the membrane for electrical
  • a membrane produced in this way is therefore advantageous for the applications already mentioned in valves, pumps or electrical switching elements.
  • the membrane is easy to manufacture as it does not require any additional components such as magnets.
  • the method is particularly advantageously suitable for the production of membrane arrays, since the accumulation of the microparticles and / or nanoparticles for the entire array can be carried out with a correspondingly designed device in one step.
  • the micro- and / or nanoparticles are magnetic or magnetizable particles.
  • these are preferably magnetized after solidification of the layer with the same device, with the accumulation of the
  • Examples of magnetic particles are particles of AlNiCo, barium ferrite, cobalt, CoPt 3 , CrO 2 , CuNiFe and CuNiCo alloys, Fe, Fe 2 O 3 , Fe 3 O 4 , FeCoCr alloys, NdFeB alloys, Ni, NiCuCo, NiFe , Strontium ferrite, SmCo, MnAs, EuO, iron oxide-containing pigments.
  • Examples of matrix materials are silicones or thermal plastic elastomers based on olefins, polyurethanes, styrenes and polyamides.
  • Such a membrane can be used to realize a magnetic actuator which has the preferably elastic membrane with the micro- and / or nanoparticles accumulated therein and a device for non-contact deflection of the membrane, which generates a magnetic field acting on the membrane.
  • Such a magnetic actuator can be used for example in switching elements as a magnetic switch.
  • reconfigurable antennas which can be realized for example by interconnecting smaller individual antenna elements to so-called patch antennas of various geometries. For this purpose, a larger number of separately controllable
  • Arrange switching arrays with a variety of matrix-like, magnetically actuated switches Arrange switching arrays with a variety of matrix-like, magnetically actuated switches.
  • the localization of the magnetic particles in the membrane is a great advantage, since this accumulation leads to a low electrical conductivity of the membrane. If an elastomeric membrane loaded homogeneously with magnetic, electrically conductive particles were used in such an application in high-frequency and mobile radio technology, this would act as shielding and thus significantly influence the radiation behavior of the antennas. However, if only local accumulations of the particles in the membrane are involved, significantly less or no emitted radiation is absorbed in the actuator material.
  • Another very advantageous field of application of the membranes produced by the process or the mentioned magnetic actuator is in the field of pumps and valves.
  • the accumulation of the magnetic particles in one or more areas of the membrane offers significant advantages. Due to the localization of the particles in the membrane, the usually negatively occurring stiffening of the membrane by the embedded particles is likewise restricted to these subregions only. As a result, the membrane can be deflected much more strongly in comparison with a membrane with homogeneously distributed particles of the same loading density. The deflection takes place in a known manner via an external magnetic field, by means of which the magnetic regions of the membrane can be excited to movements or also to local heating. In the field of bioanalytics, more and more manipulation systems are needed for the smallest amounts of liquid, which are generally formed in silicon technology. For many applications, however, there is a need for cheaper alternatives.
  • Micropumps and microvalves based on easily processed plastics such as thermoplastics, thermosets, elastomers or silicones, are suitable for this purpose.
  • These actuators consist of at least one elastic membrane with the localized magnetic particles.
  • at least one field-generating device such as coils or permanent magnets, an essential part of the actuator.
  • Pumps or valves furthermore have at least one chamber with inlet or outlet channels. Typical dimensions of the cross sections of the chambers and channels are preferably less than 3 mm.
  • the aktorische effect is realized by a change of the magnetic field acting on the membrane.
  • 1 shows an example of the accumulation of micro- and / or nanoparticles in a layer
  • FIG. 2 schematically shows an example of the alignment of the micro- and / or nanoparticles in the layer
  • FIG. 3 shows an example of a device for targeted accumulation of the micro- and / or nanoparticles at specific locations of a layer
  • FIG. 4 shows a further example of a device for targeted accumulation of the micro- and / or nanoparticles in a layer
  • FIG. 5 shows an example of a layer processed with the device of FIG. 3, in which the micro- and nanoparticles have accumulated at different locations in the form of an array;
  • FIG. 6 shows schematically an example of a use of the membrane as a pumping element
  • Fig. 7 shows schematically an example of an insert of the membrane as a switching element. Ways to carry out the invention
  • FIG. 1 shows in a highly schematized manner the accumulation of micro- and / or nanoparticles in a layer by magnetic and / or electrical fields, which is carried out in the proposed method.
  • a layer 1 which is approximately homogeneously mixed with microparticles and / or nanoparticles is shown.
  • Such a layer can be achieved by mixing the micro- and / or nanoparticles with the matrix material before it is applied to a corresponding substrate as a layer.
  • the distribution of the micro- and / or nanoparticles in the layer can then be selectively changed by the action of electrical and / or magnetic fields.
  • the micro- and / or nanoparticles must of course be chosen so that they experience a force under the influence of the electrical and / or magnetic fields used.
  • an accumulation of the microparticles and / or nanoparticles by the specific influence of electrical and / or magnetic fields in the layer can be recognized purely by way of example. This can be done by suitable application of the fields almost any
  • an orientation of the particles in the layer through the field is indicated schematically in FIG.
  • FIG. 3 shows a device for the targeted accumulation of magnetic or magnetizable micro- and / or nanoparticles.
  • the device consists of two forming units 6 which lie opposite one another or can be brought into this position, which in this example are realized as plates with pin-shaped elements formed thereon.
  • the pin-shaped elements are arrayed in opposite directions, in the present example as a 5x5 array, and consist of a ferroelectric material such as iron.
  • an open magnetic circuit 7 is formed, which has at least one electric coil 8 for generating a magnetic field.
  • the substrate 9 with the layer thereon (not visible in the figure) is positioned in the air gap between the two molding units 6. By generating a magnetic field via the electrical coil 8, the layer on the substrate is also exposed to a magnetic field whose distribution through the
  • Topography of the Formungseinrichtuhgen 6 is fixed. This topography produces local concentrations of the magnetic field lines in the exposed material generated, which lead to an accumulation of micro- and / or nanoparticles according to this topography in the layer.
  • a static and / or a time-varying magnetic field can be built up in the material.
  • the substrate 9 can be moved relative to the magnetic field. This can also be done in time with the variable change of the external magnetic field. In this way, different accumulations can be generated in the layer.
  • a temperature, for example a heating, of the material to be treated by the magnetic circuit receives a temperature control device, not shown in the figure 3.
  • the magnetic field form in the device of FIG. 3, after solidification of the matrix material of the layer can also be used for magnetizing the particles in the matrix material. For this purpose, the particles are exposed to a strong magnetic field through the device.
  • FIG. 4 shows a further example of a device for the local accumulation of micro- and / or nanoparticles in the layer.
  • the device consists of two carrier layers 10, 11, in each of which electrical flat coils 12 are formed.
  • the coils are realized in a Helmholtz arrangement, as can be seen in FIG.
  • the substrate with the layer applied thereon can be positioned in the intermediate space between the two carrier layers 10, 11.
  • the individual coils 12 are provided with individual connections, so that by targeted control of these coils targeted accumulations of Particles in the layer can be achieved.
  • the flat coils 12 generate directional magnetic fields which collect the magnetic particles in the material in the area of the field maxima.
  • such a device can be combined with a device for generating a static magnetic field in order to achieve a superposition of the fields. This allows for the targeted transport of magnetic nanoparticles and / or microparticles over the entire area of the layer.
  • FIG. 5 shows an example of a layer 13 on a substrate with local accumulations of micro- and / or nanoparticles, as can be generated, for example, in the device of FIG. 3 using a static magnetic field.
  • this contains an array-shaped arrangement of regions 14 accumulated with the particles, which are surrounded by a respective region 15 with a significantly reduced particle density.
  • the particles of the clusters 14 were subtracted from the regions 15 by the magnetic field. In the remaining area of the
  • Layer 13 which was not acted upon by the magnetic field, the particles are still in the original uniform distribution.
  • a layer is suitable after solidification as a membrane array, for example, for a switch or
  • a 2-component silicone (PDMS) is mixed according to the manufacturer's instructions.
  • the micro- and / or nanoparticles are then submerged as fillers, the degree of filling being dependent on the type, size and structure of the particles.
  • PDMS 2-component silicone
  • anisotropic strontium ferrite particles for example, good results are achieved with a concentration of about 35% by volume in the matrix material.
  • NdFeB as micro- and / or nanoparticles, a proportion of about 50% by volume in the matrix material is suitable.
  • the dispersion of fillers and matrix material in the desiccator is degassed for about 20 minutes.
  • this is a 100 mm wafer TOPAS ®.
  • the wafer is subsequently brought into the localization device, ie for example between the two shaping units 6 of the device of FIG. 3.
  • the localization of the microparticles and / or nanoparticles takes place by switching on the corresponding magnetic field.
  • the PDMS is crosslinked by leaving it at room temperature for about 48 hours or at 120 ° C. for about 15 minutes.
  • the solidified layer then produced has the corresponding clusters of micro and / or
  • FIG. 6 shows a highly schematic example in which the membrane 16 is bonded to the region 14 of accumulated nanoparticles on a silicon substrate 17 so that the accumulated region 14 lies above a recess 18 in the silicon substrate.
  • This recess 18 represents a pumping chamber, which is connected to in the figure, not shown, inlets and outlets for a fluid.
  • a further substrate 19 is arranged, which is connected via corresponding spacers (not shown) with the silicon substrate 17.
  • an electromagnet 20 is positioned directly above the area 14 with accumulated particles.
  • FIG. 7 is indicated.
  • at least two contact elevations 21 are arranged under the membrane 16, which are in the closed state with a contact surface 22 on the underside of the membrane 16 in contact.
  • the contact elevations 21 are designed such that they bias the membrane, so that the membrane in the idle state, ie without external magnetic or electrical forces, always with a Contact force on the contact increases presses.
  • the switching contact (s) is / are realized.
  • the membrane 16 and thus the contact 22 can be lifted from the contact elevation 21 and deflected upward, and thus transferred to the open state.
  • This state is also due to the force between the electromagnet 20 and the membrane 16 also electrolessly stable as the closed state described above. In this way, a bistable switch can be realized.
  • Corresponding conductor tracks 23 in the substrate 17 are indicated in the figure. It is also possible to apply conductor tracks, for example by means of screen printing or sputtering, to the solidified membrane 16.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Soft Magnetic Materials (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

L'invention concerne un procédé permettant de produire des membranes à commande électrique et/ou magnétique, notamment pour des commutateurs ou des pompes. Selon le procédé, des microparticules et/ou des nanoparticules (5) présentant des propriétés magnétiques et/ou électriques sont mélangées à un matériau matriciel à l'état coulant, qui présente des propriétés après solidification. Le matériau matriciel est appliqué sous forme de couche (1) sur le substrat et modifie de manière ciblée la répartition des particules dans la couche (1) avec un ou plusieurs champs électriques et/ou magnétiques, afin d'obtenir une accumulation (2, 3) des particules (5) en un ou en plusieurs points de la couche (1). Ladite couche (1) est ensuite compactée avec les particules accumulées afin de former une ou plusieurs membranes (16). L'invention concerne également un actionneur magnétique muni d'une telle membrane. Ledit procédé permet d'utiliser des membranes élastiques comportant des particules magnétiques ou magnétisables incorporées dedans, sans influer de manière négative sur les propriétés élastiques dans des zones déterminées de la membrane.
PCT/DE2008/000313 2007-03-07 2008-02-22 Procédé pour produire des membranes à commande électrique et/ou magnétique et actionneur magnétique muni d'une telle membrane WO2008106928A2 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007010951 2007-03-07
DE102007010951.4 2007-03-07
DE102007051977A DE102007051977A1 (de) 2007-03-07 2007-10-31 Verfahren zur Herstellung von elektrisch und/oder magnetisch ansteuerbaren Membranen sowie magnetischer Aktor mit einer derartigen Membran
DE102007051977.1 2007-10-31

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WO2008106928A2 true WO2008106928A2 (fr) 2008-09-12
WO2008106928A3 WO2008106928A3 (fr) 2009-01-22

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Cited By (7)

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WO2011107996A1 (fr) * 2010-03-03 2011-09-09 The Secretary, Department Of Atomic Energy, Govt. Of India Système d'actionnement à base de membrane magnétique flexible, et dispositifs comprenant ce système
ITTO20110347A1 (it) * 2011-04-20 2012-10-21 Fond Istituto Italiano Di Tecnologia Attuatore magnetico con membrana nanocomposita
CN110062963A (zh) * 2016-12-09 2019-07-26 皇家飞利浦有限公司 致动器设备和方法
US20210270253A1 (en) * 2018-07-02 2021-09-02 Trustees of Tuffs College Systems and methods for a remote control actuator
US11268122B2 (en) 2016-08-19 2022-03-08 Fraunhofer-Gesellschaft zur Foerderung der anaewandten Forschunq e.V. Method of producing a cavity having a porous structure
US11417448B2 (en) 2014-12-16 2022-08-16 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method for manufacturing a device having a three-dimensional magnetic structure
US12060262B2 (en) 2021-04-23 2024-08-13 Otowahr Technology Inc. Electromagnetic microspeaker, its coil module, speaker/coil module array and preparation method thereof

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FR2947813B1 (fr) * 2009-07-07 2011-12-16 Centre Nat Rech Scient Microsysteme de generation d'un jet synthetique, procede de fabrication et dispositif de controle d'ecoulement correspondants.
DE102014201898B4 (de) * 2014-02-03 2018-05-17 Universität Kassel Verfahren zum Herstellen vom Mikroobjekten und Mikroobjekt
DE102014003357A1 (de) * 2014-03-06 2015-09-10 Robert Bosch Gmbh Verfahren zur Herstellung oberflächenmodifizierter Silikonschichten
FI130275B (fi) * 2020-06-23 2023-05-31 Teknologian Tutkimuskeskus Vtt Oy Virtauslaite, virtausjärjestelmä, menetelmä aktuaattorimagneetin valmistamiseksi substraatille ja menetelmä virtauslaitteen valmistamiseksi

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US5480685A (en) * 1993-10-22 1996-01-02 Tomoegawa Paper Co., Ltd. Method of making a magnetic recording medium comprising two magnetic layers
US5472539A (en) * 1994-06-06 1995-12-05 General Electric Company Methods for forming and positioning moldable permanent magnets on electromagnetically actuated microfabricated components
EP0756272A3 (fr) * 1995-07-28 1997-05-07 Eastman Kodak Co Support magnétique ayant une caractéristique magnétique permanente
ITTO20020772A1 (it) * 2002-09-06 2004-03-07 Fiat Ricerche Metodo per la realizzazione di strutture tridimensionali

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011107996A1 (fr) * 2010-03-03 2011-09-09 The Secretary, Department Of Atomic Energy, Govt. Of India Système d'actionnement à base de membrane magnétique flexible, et dispositifs comprenant ce système
US9579434B2 (en) 2010-03-03 2017-02-28 The Secretary Of Atomic Energy, Govt. Of India Flexible magnetic membrane based actuation system and devices involving the same
ITTO20110347A1 (it) * 2011-04-20 2012-10-21 Fond Istituto Italiano Di Tecnologia Attuatore magnetico con membrana nanocomposita
WO2012143887A1 (fr) 2011-04-20 2012-10-26 Fondazione Istituto Italiano Di Tecnologia Vérin magnétique comportant une membrane nanocomposite
US20140035708A1 (en) * 2011-04-20 2014-02-06 Fondazione Instituto Italiano Di Tecnologia Magnetic actuators having a nanocomposite membrane
US11417448B2 (en) 2014-12-16 2022-08-16 Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.V. Method for manufacturing a device having a three-dimensional magnetic structure
US11268122B2 (en) 2016-08-19 2022-03-08 Fraunhofer-Gesellschaft zur Foerderung der anaewandten Forschunq e.V. Method of producing a cavity having a porous structure
CN110062963A (zh) * 2016-12-09 2019-07-26 皇家飞利浦有限公司 致动器设备和方法
US20210270253A1 (en) * 2018-07-02 2021-09-02 Trustees of Tuffs College Systems and methods for a remote control actuator
US12060262B2 (en) 2021-04-23 2024-08-13 Otowahr Technology Inc. Electromagnetic microspeaker, its coil module, speaker/coil module array and preparation method thereof

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DE102007051977A1 (de) 2008-09-11
WO2008106928A3 (fr) 2009-01-22

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