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WO2008152927A1 - Micro-dispositif pour affichage - Google Patents

Micro-dispositif pour affichage Download PDF

Info

Publication number
WO2008152927A1
WO2008152927A1 PCT/JP2008/060017 JP2008060017W WO2008152927A1 WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1 JP 2008060017 W JP2008060017 W JP 2008060017W WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1
Authority
WO
WIPO (PCT)
Prior art keywords
protective film
display
liquid
swelling portion
microdevice
Prior art date
Application number
PCT/JP2008/060017
Other languages
English (en)
Japanese (ja)
Inventor
Isao Shimoyama
Kiyoshi Matsumoto
Eiji Iwase
Binh-Khiem Nguyen
Original Assignee
The University Of Tokyo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The University Of Tokyo filed Critical The University Of Tokyo
Publication of WO2008152927A1 publication Critical patent/WO2008152927A1/fr

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

L'invention concerne un micro-dispositif hautement fiable pour affichage dans lequel une réduction de taille et d'épaisseur peut être atteinte grâce à un agencement simple tout en améliorant la productivité. Etant donné qu'une partie de gonflement de liquide (12) est constituée d'huile de silicone ayant une petite quantité d'évaporation même sous vide poussé, un film de protection (13) peut se former à la surface du liquide au niveau de la partie de gonflement du liquide (12) dans l'état liquide par CVD sous vide poussé. Par conséquent, une réduction de la taille et de l'épaisseur peut être obtenue grâce à un agencement simple, et étant donné qu'un processus d'assemblage compliqué nécessitant le collage d'un film de protection peut être éliminé, la productivité peut être améliorée proportionnellement. En outre, étant donné qu'un film de protection (13) est employé, on peut empêcher la partie de gonflement de liquide (12) de se déformer sous l'effet d'un choc ou de la gravité, ce qui donne un micro-dispositif (1) pour affichage plus fiable.
PCT/JP2008/060017 2007-06-15 2008-05-30 Micro-dispositif pour affichage WO2008152927A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007158685A JP5092563B2 (ja) 2007-06-15 2007-06-15 ディスプレイ用マイクロデバイス
JP2007-158685 2007-06-15

Publications (1)

Publication Number Publication Date
WO2008152927A1 true WO2008152927A1 (fr) 2008-12-18

Family

ID=40129537

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060017 WO2008152927A1 (fr) 2007-06-15 2008-05-30 Micro-dispositif pour affichage

Country Status (2)

Country Link
JP (1) JP5092563B2 (fr)
WO (1) WO2008152927A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (zh) * 2010-04-02 2012-12-12 株式会社东芝 显示装置
CN113805336A (zh) * 2021-10-21 2021-12-17 福建华佳彩有限公司 光学膜片厚度自适应设计方法及系统

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5647077B2 (ja) * 2011-06-13 2014-12-24 日本電信電話株式会社 微細構造体の液体封入パッケージの製造方法
JP6132334B2 (ja) * 2013-02-21 2017-05-24 国立大学法人 東京大学 液体アクチュエータ
JP6089196B2 (ja) * 2013-04-02 2017-03-08 スタンレー電気株式会社 光照射装置及びこれを用いた光源システム

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004046165A (ja) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp スイッチング装置
JP2004191910A (ja) * 2002-06-04 2004-07-08 Ngk Insulators Ltd 表示装置
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (ja) * 2005-09-20 2007-04-05 Sony Corp 光偏向素子および可変焦点レンズ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004191910A (ja) * 2002-06-04 2004-07-08 Ngk Insulators Ltd 表示装置
JP2004046165A (ja) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp スイッチング装置
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (ja) * 2005-09-20 2007-04-05 Sony Corp 光偏向素子および可変焦点レンズ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (zh) * 2010-04-02 2012-12-12 株式会社东芝 显示装置
US9213179B2 (en) 2010-04-02 2015-12-15 Kabushiki Kaisha Toshiba Display device
CN113805336A (zh) * 2021-10-21 2021-12-17 福建华佳彩有限公司 光学膜片厚度自适应设计方法及系统

Also Published As

Publication number Publication date
JP2008310126A (ja) 2008-12-25
JP5092563B2 (ja) 2012-12-05

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