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WO2008152927A1 - Microdevice for display - Google Patents

Microdevice for display Download PDF

Info

Publication number
WO2008152927A1
WO2008152927A1 PCT/JP2008/060017 JP2008060017W WO2008152927A1 WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1 JP 2008060017 W JP2008060017 W JP 2008060017W WO 2008152927 A1 WO2008152927 A1 WO 2008152927A1
Authority
WO
WIPO (PCT)
Prior art keywords
protective film
display
liquid
swelling portion
microdevice
Prior art date
Application number
PCT/JP2008/060017
Other languages
French (fr)
Japanese (ja)
Inventor
Isao Shimoyama
Kiyoshi Matsumoto
Eiji Iwase
Binh-Khiem Nguyen
Original Assignee
The University Of Tokyo
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by The University Of Tokyo filed Critical The University Of Tokyo
Publication of WO2008152927A1 publication Critical patent/WO2008152927A1/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/12—Fluid-filled or evacuated lenses
    • G02B3/14—Fluid-filled or evacuated lenses of variable focal length
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00015—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems
    • B81C1/00134—Manufacture or treatment of devices or systems in or on a substrate for manufacturing microsystems comprising flexible or deformable structures
    • B81C1/00158—Diaphragms, membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/04—Optical MEMS
    • B81B2201/045—Optical switches
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C2201/00—Manufacture or treatment of microstructural devices or systems
    • B81C2201/01—Manufacture or treatment of microstructural devices or systems in or on a substrate
    • B81C2201/0101—Shaping material; Structuring the bulk substrate or layers on the substrate; Film patterning

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
  • Cathode-Ray Tubes And Fluorescent Screens For Display (AREA)

Abstract

A highly reliable microdevice for display in which reduction in size and thickness can be attained through a simple arrangement while enhancing productivity. Since a liquid swelling portion (12) is formed of silicon oil having a small quantity of evaporation even in high vacuum, a protective film (13) can be formed on the liquid surface at the liquid swelling portion (12) in liquid state by high vacuum CVD. Consequently, reduction in size and thickness can be attained through a simple arrangement, and since a troublesome assembling process for sticking a protective film can be eliminated, productivity can be enhanced correspondingly. Furthermore, since a protective film (13) is employed, the liquid swelling portion (12) can be prevented from being deformed by impact or gravity resulting in a more reliable microdevice (1) for display.
PCT/JP2008/060017 2007-06-15 2008-05-30 Microdevice for display WO2008152927A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007158685A JP5092563B2 (en) 2007-06-15 2007-06-15 Microdevice for display
JP2007-158685 2007-06-15

Publications (1)

Publication Number Publication Date
WO2008152927A1 true WO2008152927A1 (en) 2008-12-18

Family

ID=40129537

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060017 WO2008152927A1 (en) 2007-06-15 2008-05-30 Microdevice for display

Country Status (2)

Country Link
JP (1) JP5092563B2 (en)
WO (1) WO2008152927A1 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (en) * 2010-04-02 2012-12-12 株式会社东芝 Display device
CN113805336A (en) * 2021-10-21 2021-12-17 福建华佳彩有限公司 Optical film thickness adaptive design method and system

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5647077B2 (en) * 2011-06-13 2014-12-24 日本電信電話株式会社 Manufacturing method of liquid-sealed package of fine structure
JP6132334B2 (en) * 2013-02-21 2017-05-24 国立大学法人 東京大学 Liquid actuator
JP6089196B2 (en) * 2013-04-02 2017-03-08 スタンレー電気株式会社 Light irradiation device and light source system using the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004046165A (en) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp Switching apparatus
JP2004191910A (en) * 2002-06-04 2004-07-08 Ngk Insulators Ltd Display device
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (en) * 2005-09-20 2007-04-05 Sony Corp Optical deflection element and variable focus lens

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030020685A1 (en) * 2001-07-26 2003-01-30 Xerox Corporation Display sheet with stacked electrode structure
JP2004191910A (en) * 2002-06-04 2004-07-08 Ngk Insulators Ltd Display device
JP2004046165A (en) * 2002-06-28 2004-02-12 Hewlett-Packard Development Co Lp Switching apparatus
US20070002413A1 (en) * 2005-06-14 2007-01-04 California Institute Of Technology Light conductive controlled shape droplet display device
JP2007086144A (en) * 2005-09-20 2007-04-05 Sony Corp Optical deflection element and variable focus lens

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102822721A (en) * 2010-04-02 2012-12-12 株式会社东芝 Display device
US9213179B2 (en) 2010-04-02 2015-12-15 Kabushiki Kaisha Toshiba Display device
CN113805336A (en) * 2021-10-21 2021-12-17 福建华佳彩有限公司 Optical film thickness adaptive design method and system

Also Published As

Publication number Publication date
JP2008310126A (en) 2008-12-25
JP5092563B2 (en) 2012-12-05

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