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WO2008149835A1 - 集積型薄膜太陽電池とその製造方法 - Google Patents

集積型薄膜太陽電池とその製造方法 Download PDF

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Publication number
WO2008149835A1
WO2008149835A1 PCT/JP2008/060132 JP2008060132W WO2008149835A1 WO 2008149835 A1 WO2008149835 A1 WO 2008149835A1 JP 2008060132 W JP2008060132 W JP 2008060132W WO 2008149835 A1 WO2008149835 A1 WO 2008149835A1
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WO
WIPO (PCT)
Prior art keywords
electrode layer
isolation trench
trench
layer isolation
semiconductor layer
Prior art date
Application number
PCT/JP2008/060132
Other languages
English (en)
French (fr)
Inventor
Toshiaki Sasaki
Original Assignee
Kaneka Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kaneka Corporation filed Critical Kaneka Corporation
Priority to JP2009517857A priority Critical patent/JP5171818B2/ja
Priority to EP08777083.0A priority patent/EP2169724B1/en
Publication of WO2008149835A1 publication Critical patent/WO2008149835A1/ja

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Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F19/00—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules
    • H10F19/30—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells
    • H10F19/31—Integrated devices, or assemblies of multiple devices, comprising at least one photovoltaic cell covered by group H10F10/00, e.g. photovoltaic modules comprising thin-film photovoltaic cells having multiple laterally adjacent thin-film photovoltaic cells deposited on the same substrate
    • H10F19/33—Patterning processes to connect the photovoltaic cells, e.g. laser cutting of conductive or active layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/20—Electrodes
    • H10F77/244—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers
    • H10F77/251—Electrodes made of transparent conductive layers, e.g. transparent conductive oxide [TCO] layers comprising zinc oxide [ZnO]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00—Energy generation through renewable energy sources
    • Y02E10/50—Photovoltaic [PV] energy

Landscapes

  • Photovoltaic Devices (AREA)

Abstract

　集積型薄膜太陽電池において、透明絶縁基板（１１）上に順次積層された透明電極層（１２）、１以上の光電変換ユニットを含む半導体層（２０）、および裏面電極層（４）が、複数の光電変換セルを形成するように直線状で互いに平行な複数の透明電極層分離溝（９０３）、半導体層分離溝（９０５）、および裏面電極層分離溝（９０４０）によってそれぞれ分割され、かつそれらの複数の光電変換セルが半導体層分離溝を介して互いに電気的に直列接続されており、透明電極層が低温で層形成可能な透明導電材料からなり、透明電極層分離溝、半導体層分離溝、および裏面電極層分離溝の少なくとも一部は所定ピッチで形成された実質的に同形状のピットのつながりによって構成されており、各ピットにおいて溝の幅方向の最大長Ｗが溝の長手方向の最大長Ｌより大きい。
PCT/JP2008/060132 2007-06-04 2008-06-02 集積型薄膜太陽電池とその製造方法 WO2008149835A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009517857A JP5171818B2 (ja) 2007-06-04 2008-06-02 集積型薄膜太陽電池の製造方法
EP08777083.0A EP2169724B1 (en) 2007-06-04 2008-06-02 Integrated thin film solar cell and method for fabricating the same

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2007-148366 2007-06-04
JP2007148366 2007-06-04
JP2007-166664 2007-06-25
JP2007166664 2007-06-25

Publications (1)

Publication Number Publication Date
WO2008149835A1 true WO2008149835A1 (ja) 2008-12-11

Family

ID=40093651

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060132 WO2008149835A1 (ja) 2007-06-04 2008-06-02 集積型薄膜太陽電池とその製造方法

Country Status (3)

Country Link
EP (1) EP2169724B1 (ja)
JP (1) JP5171818B2 (ja)
WO (1) WO2008149835A1 (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011027533A1 (ja) * 2009-09-04 2011-03-10 株式会社アルバック 薄膜太陽電池の製造方法及びその製造装置
WO2011062130A1 (ja) * 2009-11-20 2011-05-26 株式会社カネカ 薄膜光電変換装置および薄膜光電変換装置の製造方法
WO2011158645A1 (ja) * 2010-06-17 2011-12-22 株式会社カネカ 薄膜太陽電池
JP2012038956A (ja) * 2010-08-09 2012-02-23 Kaneka Corp 薄膜太陽電池モジュール
US9091133B2 (en) 2009-02-20 2015-07-28 Halliburton Energy Services, Inc. Swellable material activation and monitoring in a subterranean well
US9963598B2 (en) 2011-02-23 2018-05-08 Dexerials Corporation Transparent conductive film, information input device, and electronic device
KR20200119323A (ko) * 2018-02-15 2020-10-19 (씨엔비엠) 벵부 디자인 앤드 리서치 인스티튜트 포 글래스 인더스트리 컴퍼니 리미티드 박막 태양광 모듈을 제조하는 방법
WO2021200286A1 (ja) * 2020-03-31 2021-10-07 積水化学工業株式会社 太陽電池及び太陽電池製造方法
CN114365585A (zh) * 2019-09-13 2022-04-15 株式会社Zefa 电路成型部件以及电子设备
CN114373830A (zh) * 2021-12-29 2022-04-19 通合新能源(金堂)有限公司 一种电池片激光开槽方法及光伏电池制备方法

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8288646B2 (en) 2009-05-06 2012-10-16 UltraSolar Technology, Inc. Pyroelectric solar technology apparatus and method
US20110290314A1 (en) * 2010-05-28 2011-12-01 Andrey Kobyakov Light scattering articles using hemispherical particles
US20110290316A1 (en) * 2010-05-28 2011-12-01 Daniel Warren Hawtof Light scattering inorganic substrates by soot deposition
US20120000529A1 (en) * 2010-07-01 2012-01-05 Primestar Solar Method and system for forming a photovoltaic cell and a photovoltaic cell
KR101172195B1 (ko) * 2010-09-16 2012-08-07 엘지이노텍 주식회사 태양광 발전장치 및 이의 제조방법
KR101189432B1 (ko) * 2011-01-25 2012-10-10 엘지이노텍 주식회사 태양전지 및 이의 제조방법
WO2013164700A2 (en) * 2012-05-03 2013-11-07 Tel Solar Ag Tco layer with improved long-term stability and method for manufacturing thereof
JP2015034279A (ja) * 2013-04-10 2015-02-19 デクセリアルズ株式会社 透明導電膜形成用インク組成物、透明導電膜、透明電極の製造方法、及び画像表示装置

Citations (8)

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Publication number Priority date Publication date Assignee Title
JPH07211928A (ja) * 1994-01-24 1995-08-11 Sanyo Electric Co Ltd 集積型光電変換素子の製造方法
JP2001267613A (ja) * 2000-03-17 2001-09-28 Kanegafuchi Chem Ind Co Ltd 集積型薄膜太陽電池とその製造方法
JP2001274446A (ja) * 2000-03-23 2001-10-05 Kanegafuchi Chem Ind Co Ltd 集積型ハイブリッド薄膜太陽電池の製造方法
JP2002016269A (ja) * 2000-06-28 2002-01-18 Mitsubishi Heavy Ind Ltd 薄膜太陽電池パネルの製造方法及び製造装置
JP2002141526A (ja) * 2000-11-06 2002-05-17 Mitsubishi Heavy Ind Ltd 薄膜太陽電池の製造方法
JP2002231979A (ja) * 2001-01-30 2002-08-16 Sanyo Electric Co Ltd 光起電力装置の製造方法及び光起電力装置
JP2006054254A (ja) * 2004-08-10 2006-02-23 Kaneka Corp 光電変換装置の製造方法
JP2007005345A (ja) * 2005-06-21 2007-01-11 Mitsubishi Heavy Ind Ltd 太陽電池モジュール及び太陽電池モジュールの製造方法

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JP3436858B2 (ja) * 1997-02-27 2003-08-18 シャープ株式会社 薄膜太陽電池の製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07211928A (ja) * 1994-01-24 1995-08-11 Sanyo Electric Co Ltd 集積型光電変換素子の製造方法
JP2001267613A (ja) * 2000-03-17 2001-09-28 Kanegafuchi Chem Ind Co Ltd 集積型薄膜太陽電池とその製造方法
JP2001274446A (ja) * 2000-03-23 2001-10-05 Kanegafuchi Chem Ind Co Ltd 集積型ハイブリッド薄膜太陽電池の製造方法
JP2002016269A (ja) * 2000-06-28 2002-01-18 Mitsubishi Heavy Ind Ltd 薄膜太陽電池パネルの製造方法及び製造装置
JP2002141526A (ja) * 2000-11-06 2002-05-17 Mitsubishi Heavy Ind Ltd 薄膜太陽電池の製造方法
JP2002231979A (ja) * 2001-01-30 2002-08-16 Sanyo Electric Co Ltd 光起電力装置の製造方法及び光起電力装置
JP2006054254A (ja) * 2004-08-10 2006-02-23 Kaneka Corp 光電変換装置の製造方法
JP2007005345A (ja) * 2005-06-21 2007-01-11 Mitsubishi Heavy Ind Ltd 太陽電池モジュール及び太陽電池モジュールの製造方法

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9091133B2 (en) 2009-02-20 2015-07-28 Halliburton Energy Services, Inc. Swellable material activation and monitoring in a subterranean well
WO2011027533A1 (ja) * 2009-09-04 2011-03-10 株式会社アルバック 薄膜太陽電池の製造方法及びその製造装置
JPWO2011027533A1 (ja) * 2009-09-04 2013-01-31 株式会社アルバック 薄膜太陽電池の製造方法及びその製造装置
WO2011062130A1 (ja) * 2009-11-20 2011-05-26 株式会社カネカ 薄膜光電変換装置および薄膜光電変換装置の製造方法
JPWO2011062130A1 (ja) * 2009-11-20 2013-04-04 株式会社カネカ 薄膜光電変換装置および薄膜光電変換装置の製造方法
WO2011158645A1 (ja) * 2010-06-17 2011-12-22 株式会社カネカ 薄膜太陽電池
JP5827224B2 (ja) * 2010-06-17 2015-12-02 株式会社カネカ 薄膜太陽電池およびその製造方法
JP2012038956A (ja) * 2010-08-09 2012-02-23 Kaneka Corp 薄膜太陽電池モジュール
US9963598B2 (en) 2011-02-23 2018-05-08 Dexerials Corporation Transparent conductive film, information input device, and electronic device
US10100208B2 (en) 2011-02-23 2018-10-16 Dexerials Corporation Method of manufacturing a transparent conductive film
US10196526B2 (en) 2011-02-23 2019-02-05 Dexerials Corporation Transparent conductive film, information input device, and electronic device
KR20200119323A (ko) * 2018-02-15 2020-10-19 (씨엔비엠) 벵부 디자인 앤드 리서치 인스티튜트 포 글래스 인더스트리 컴퍼니 리미티드 박막 태양광 모듈을 제조하는 방법
JP2021514115A (ja) * 2018-02-15 2021-06-03 （シーエヌビーエム）ボンブー デザイン アンド リサーチ インスティテュート フォー グラス インダストリー カンパニー，リミティド 薄膜ソーラーモジュールの製造方法
KR102419215B1 (ko) * 2018-02-15 2022-07-11 씨엔비엠 리서치 인스티튜트 포 어드밴스드 글래스 머터리얼즈 그룹 컴퍼니 리미티드 박막 태양광 모듈을 제조하는 방법
JP7119103B2 (ja) 2018-02-15 2022-08-16 中建材硝子新材料研究院集団有限公司 薄膜ソーラーモジュールの製造方法
CN114365585A (zh) * 2019-09-13 2022-04-15 株式会社Zefa 电路成型部件以及电子设备
WO2021200286A1 (ja) * 2020-03-31 2021-10-07 積水化学工業株式会社 太陽電池及び太陽電池製造方法
CN114373830A (zh) * 2021-12-29 2022-04-19 通合新能源(金堂)有限公司 一种电池片激光开槽方法及光伏电池制备方法

Also Published As

Publication number Publication date
EP2169724A1 (en) 2010-03-31
EP2169724A4 (en) 2016-04-20
EP2169724B1 (en) 2018-12-19
JPWO2008149835A1 (ja) 2010-08-26
JP5171818B2 (ja) 2013-03-27

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