WO2006035703A1

WO2006035703A1 - Macro inspection apparatus and macro inspection method

Info

Publication number: WO2006035703A1
Application number: PCT/JP2005/017616
Authority: WO
Inventors: Hiroyuki Okahira; Nobuo Fujisaki; Hiroshi Kato
Original assignee: Olympus Corporation
Priority date: 2004-09-27
Filing date: 2005-09-26
Publication date: 2006-04-06
Also published as: KR20070037563A; JP4729499B2; TW200614412A; CN1906476B; CN1906476A; JPWO2006035703A1; KR100791132B1

Abstract

A macro inspection apparatus is provided with a substrate holder for holding a substrate to be inspected; a macro illuminating optical system for projecting illuminating light on the substrate; a substrate holder driving mechanism for supporting the substrate holder and controlling the position of the substrate holder under the condition where the substrate is illuminated by the illuminating light; a substrate transfer mechanism for transferring and receiving the substrate to and from the substrate holder; a substrate floating mechanism for floating the substrate from the substrate holder by blowing air to the substrate transferred onto the substrate holder; a substrate positioning mechanism for positioning the substrate being floated by the substrate floating mechanism at a reference position on the substrate holder; and a substrate fixing mechanism for fixing the substrate positioned by the substrate positioning mechanism on the substrate holder.

Description

Specification

Macro inspection apparatus and macro inspection method

Technical field

The present invention relates to a macro inspection apparatus used for appearance inspection of a large substrate such as a glass substrate, and a macro inspection method using the macro inspection apparatus.

This application is based on Japanese Patent Application No. 2004-279990, Japanese Patent Application No. 2004-2799991, and Japanese Patent Application No. 2004-279992, and the contents thereof are incorporated.

Background art

[0002] In the manufacturing process of flat panel displays (FPD) such as liquid crystal displays (LCDs), the appearance of a transparent substrate (eg, a master glass substrate, hereinafter simply referred to as a glass substrate) manufactured in each manufacturing process is visually inspected. There is an inspection process (macro inspection). In this inspection process, a substrate appearance inspection device enables inspection of defects on the glass substrate by irradiating a macro illumination light with an upward force while the substrate holder holding the glass substrate is raised at a predetermined angle. Is used.

[0003] A macro inspection apparatus described in Patent Document 1 below includes a substrate holder that is a rectangular frame-shaped frame cover having an opening slightly smaller than a rectangular glass substrate; and the substrate holder is directed toward an observer. And a biaxial rotation mechanism that enables vertical rotation for raising the substrate to a predetermined angle and horizontal rotation for swinging / reversing the substrate holder. In this macro inspection apparatus, the peripheral portion of the back surface of the substrate is supported on the upper surface of the substrate holder. On the upper surface of the substrate holder, an alignment mechanism is provided for holding and positioning the glass substrate. The alignment mechanism includes a plurality of reference pins that regulate the reference positions of two adjacent sides of the glass substrate that is fixed along two adjacent sides of the rectangular opening of the substrate holder; A pressing pin that is provided along the other two adjacent sides of the rectangular opening of the substrate holder and is movable toward the reference pins. With the glass substrate placed on the substrate holder, the pressing pins are pressed against the glass substrate side, so that the two sides of the glass substrate are pressed against the respective reference pins. Positioned at the reference position. [0004] A macro inspection apparatus described in Patent Document 2 includes a substrate holder that holds a glass substrate, and a push-up drive unit that is coupled to a central portion of the substrate holder, and includes a front end portion and a rear end portion of the substrate holder. The substrate holder is rotated to the front side or the back side. In this macro inspection device, the substrate holder is rotated to the front side and macro illumination is performed from above to visually observe the front surface, and the back is illuminated and back surface illumination is performed to visually observe the back surface. Can be done.

[0005] The macro inspection apparatus shown in Patent Document 3 below is an inspection apparatus for visually inspecting a very small wafer substrate of 200 mm and 300 mm compared to an FPD glass substrate (2000 mm). This macro inspection apparatus includes a robot having a wrist portion that can be rotated by twisting at the tip of an arm that is rotatably connected to a base in a horizontal direction. A wafer holder that holds and rotates the wafer substrate is attached to the tip of the wrist. The wafer substrate is conveyed by the wafer loading / unloading machine, gripped by the wafer holder, and twisted to rotate the wrist to rotate the wafer substrate to the front side or the back side to control the posture. Visual observation of the front and back surfaces is possible.

Patent Document 1: Japanese Patent Laid-Open No. 7-306153

Patent Document 2: Japanese Patent Laid-Open No. 11-94752

Patent Document 3: JP-A-8-125004

Disclosure of the invention

Problems to be solved by the invention

[0007] However, in the macro inspection system for FPD, the substrate size has been increasing year by year, and now a glass substrate has appeared! It is necessary to increase the size of the substrate holder as the size of the glass substrate increases. However, if the size of the substrate holder increases, the load on the substrate holder drive mechanism that rotates and swings the substrate holder increases. was there. In particular, an articulated arm robot was used as the substrate holder drive mechanism, and the multi-joint arm robot supported the substrate holder in a cantilevered manner, and tried to realize a macro inspection device that raised the substrate holder to a predetermined angle and visually inspected. In such a case, it was difficult to realize this because a large load was applied to the articulated arm robot. Also, as the size of the substrate holder increases, the space for swinging the substrate holder must also be increased. Therefore, there is a problem that the apparatus becomes large.

The present invention has been made in view of the above circumstances, and an object of the present invention is to reduce a burden imposed on a substrate holder driving mechanism that rotates and swings the substrate holder. Another objective is to prevent the equipment from becoming large.

[0008] In addition, in the conventional macro inspection apparatus, since the rotation shaft is provided on one side of the substrate holder and cantilevered, the heavy substrate holder is rotated and stopped as the size of the substrate holder increases. In this case, there arises a problem that the tip of the substrate holder vibrates greatly. If vibration occurs when the substrate holder is stopped, it will take a considerable amount of time to stop. As a result, the substrate cannot be transferred by the transfer device until the substrate holder is stationary, and the tact time required for the inspection increases as the waiting time increases. In particular, when trying to realize a macro inspection device that cantilever-supports a substrate holder by a multi-joint arm robot, when the substrate holder is stopped at the substrate transfer position by an articulated arm robot, it is placed at the tip of the substrate holder. This was difficult to achieve because the substrate holder vibrates due to a large rotational moment.

The present invention has been made in view of the above circumstances. The substrate holder supported by the substrate holder drive mechanism so as to rotate and swing freely can be quickly stopped at the substrate transfer position, thereby smoothly transferring the substrate. The purpose is to improve inspection efficiency by shortening the tact time. Another object of the present invention is to shorten the tact time and improve the inspection efficiency by quickly positioning the substrate on the substrate holder.

In addition, a macro inspection apparatus that supports a substrate holder in a cantilever manner with an articulated arm robot is being put into practical use so that the posture of the substrate holder can be freely controlled. For a small and lightweight substrate such as a wafer substrate, even if the substrate holder is cantilevered as shown in the above cited reference 3, the influence of the vibration of the substrate holder when the substrate holder is stopped is small, and the connection Since the load applied to the location is small, it can be handled without any problems. However, substrate holders that hold large glass substrates for FPDs tend to be large and heavy. Therefore, if an articulated arm robot that cantilever-supports the substrate holder is used to control the posture of the substrate holder in multiple directions, the joint between the arm of the articulated arm robot and the substrate holder and the tip of the substrate holder are used. Board distance increases in proportion to the board size. A new problem arises in that the balance is greatly biased toward the tip of the slider, the substrate holder vibrates greatly due to the rotational moment when stopped, and a large load is applied to the connection between the arm and the substrate holder.

Because of these various problems, we were unable to easily realize a macro inspection device using an articulated arm robot.

The present invention has been made in view of the above circumstances, and reduces the burden on the drive unit of a substrate holder drive mechanism (inspection robot equipped with a multi-joint arm robot) that moves the substrate holder. Means for solving problems aimed at realizing a macro inspection system using a robot

In order to solve the above problems, the present invention employs the following means.

That is, the macro inspection apparatus of the present invention includes: a substrate holder that holds a substrate to be inspected; a macro illumination optical system that irradiates the substrate with illumination light; and the substrate holder that supports the substrate light A substrate holder driving mechanism for controlling the posture of the substrate holder in a state illuminated by the substrate; a substrate transport mechanism for delivering the substrate to and from the substrate holder; and the substrate delivered on the substrate holder And a substrate floating mechanism that causes the substrate to float above the substrate holder by blowing air to the substrate holder; and the substrate floating mechanism positions the substrate in a floating position by the substrate floating mechanism. A substrate positioning mechanism; and a substrate fixing mechanism for fixing the substrate positioned by the substrate positioning mechanism to the substrate holder.

[0011] In this macro inspection apparatus, the substrate carrying mechanism places the substrate on the substrate holder waiting at the substrate delivery position. The substrate placed in this manner also raises the force on the substrate holder by blowing air from the substrate floating mechanism. Then, after the substrate in the floating state is positioned at the reference position by the substrate positioning mechanism, it is fixed by the substrate fixing mechanism. After the substrate is fixed on the substrate holder in this way, the substrate holder drive mechanism controls the posture of the substrate holder so that the observer can perform macro observation and control the movement of the substrate so that it is easy. Do. Therefore, according to this macro inspection apparatus, the substrate can be quickly positioned on the substrate holder, so that the tact time can be shortened. This makes it possible to improve the efficiency of inspection.

The substrate holder drive mechanism force You may have an articulated arm robot!

[0012] The substrate positioning mechanism may be provided at a position other than the substrate holder.

In this case, the substrate holder can be reduced in size and weight by the amount that the substrate positioning mechanism is not provided on the substrate holder. Therefore, the substrate holder can be moved quickly, and the inspection time can be shortened. In addition, the substrate holder driving mechanism for controlling the posture of the substrate holder can be reduced in size, and the entire macro inspection apparatus can be reduced in size and weight.

[0013] The substrate positioning mechanism may perform the positioning by sandwiching the substrate from its periphery.

A positioning member fixed at a position where the substrate positioning mechanism contacts the substrate when the reference position is reached; and a biasing device that biases the substrate toward the positioning member. .

[0014] A first cutout that avoids interference with the substrate positioning mechanism may be formed in the substrate holder.

In this case, in order to make it easier for the substrate positioning mechanism to hold the substrate, even if the size of the holding portion for holding the substrate of the substrate positioning mechanism is increased, the holding portion is formed on the substrate holder. Interference with the substrate holder due to the notch can be avoided.

[0015] The substrate positioning mechanism is provided on the substrate holder and is fixed to a position that contacts the substrate when the reference position is reached; provided at a position other than the substrate holder; And an urging device that urges the substrate toward the positioning member.

In this case, the substrate can be positioned at the reference position by placing the substrate holder on the substrate holder waiting at the substrate delivery position and then pressing the substrate against the positioning member by the biasing device. Also, since the urging device is provided outside the substrate holder, the substrate holder can be reduced in weight compared to the case where the urging device is provided on the substrate holder. As a result, it is possible to reduce the load on the substrate holder driving mechanism (that is, the rotation moment of the substrate holder). Therefore, the board holder drive mechanism is downsized. Therefore, the entire macro inspection apparatus can be reduced in size.

[0016] When the substrate holder is tilted by the substrate holder driving mechanism in a state where the substrate is floated from the substrate holder by the substrate floating mechanism, the substrate moves along the tilt of the substrate holder The substrate positioning mechanism may be provided with a positioning member that contacts when the position reaches the reference position.

In this case, after the substrate is received by the substrate holder at the transfer position, the substrate holder is tilted by the substrate holder driving mechanism in a state where the substrate is lifted by the substrate floating mechanism and air is blown up by the substrate floating mechanism. Then, the substrate moves by its own weight along the inclination of the substrate holder, and the movement is stopped by contacting the positioning member, and the positioning to the reference position is completed. In this way, components that move the substrate for positioning on the substrate holder can be omitted.

[0017] The outer dimension when the substrate holder is viewed from the front may be smaller than the outer dimension when the substrate is viewed from the front / J.

In this case, to make it easier for the substrate positioning mechanism to hold the substrate, even if the size of the holding portion that holds the substrate of the substrate positioning mechanism is increased, this holding portion will not interfere with the substrate holder. can do.

[0018] The apparatus may further include a stationary mechanism that stops the substrate holder that has moved to the substrate transfer position with respect to the substrate transport mechanism.

In this case, since the substrate holder that has moved to the delivery position is stopped by a stationary mechanism that is waiting in advance, compared with a case where the substrate holder is simply stopped at the delivery position in a cantilevered state, The swing of the substrate holder can be suppressed or prevented. As a result, the substrate holder can be stopped very quickly at a predetermined position, so that the substrate transfer operation at the substrate transfer position can be performed quickly. Therefore, it is possible to reduce the loss time unnecessary for the substrate inspection, and it is possible to greatly reduce the tact time of the substrate inspection and improve the inspection efficiency.

[0019] The stationary mechanism may include an elastic body that abuts against the substrate holder when the delivery position is reached and attenuates vibration of the substrate holder.

The stationary mechanism is a spring fixed at a fixed position so that the axis is substantially perpendicular to the substrate holder. A spring may be further provided, and the elastic body may be provided on the spring. A second notch is formed in a side portion of the substrate holder; and the stationary mechanism is provided with a locking portion for locking to the second notch of the substrate holder when the delivery position is reached. May be.

The stationary mechanism may include clamping means for clamping the substrate holder when reaching the delivery position.

A rotating member that has a recess for receiving the substrate holder when the stationary mechanism reaches the delivery position, and that rotates along a direction in which the substrate faces the delivery position; A rotation restricting member that stops the rotation member at a rotation position when the received substrate holder reaches the delivery position.

[0020] The stationary mechanism may move between a receiving position for receiving the substrate holder that has reached the transfer position and a retracted position separated from the receiving position force.

In this case, it is possible to reliably avoid the substrate holder being inspected from interfering with the stationary mechanism.

The stationary mechanism may horizontally move between the receiving position and the retracted position.

Alternatively, the stationary mechanism may rotate between the receiving position and the retracted position.

[0021] The substrate holder driving mechanism force One side of the substrate holder is supported so that the substrate holder can rotate around a first axis parallel to the one side; and the first axis is the center of rotation. A weight located on the side opposite to the position of the substrate holder may be provided on the substrate holder.

In this case, since the substrate holder and the weight are balanced with the first axis as the rotation center, the load applied to the substrate holder drive mechanism (that is, the rotation moment of the substrate holder) is compared to the case where no weight is provided. Can be reduced. As a result, the substrate holder driving mechanism can be reduced in size, so that the entire macro inspection apparatus can be reduced in size. It is also possible to employ an articulated arm robot as the substrate holder drive mechanism. [0022] The holder driving mechanism supports the substrate holder so as to be rotatable about a second axis perpendicular to the first axis and parallel to a plane formed by the substrate holder; The center of gravity position, the intersection between the first axis and the second axis, and the center of gravity of the weight may be arranged on a substantially straight line.

In this case, since the moment balance around the first axis and the moment balance around the second axis can be adjusted, the load acting on the substrate holder drive mechanism (ie, the rotational moment of the substrate holder) can be reduced. Can be reduced. As a result, the substrate holder driving mechanism can be reliably reduced in size, so that the entire macro inspection apparatus can be reduced in size.

[0023] The holder driving mechanism supports the substrate holder so as to be rotatable around a second axis perpendicular to the first axis and parallel to a plane formed by the substrate holder; In this case, a pair of weights are provided so as to be close to each other with the second axis being sandwiched therebetween. The rotational moment around the second axis can be reduced.

[0024] The macro inspection method of the present invention includes a substrate holder stop step of stopping the substrate holder at a delivery position of the substrate to be inspected; a substrate placement step of placing the substrate on the substrate holder; and the substrate A substrate floating step of blowing air to the substrate holder to lift the substrate; positioning the substrate in a floating state at a reference position on the substrate holder; and substrate positioning step A substrate fixing step of fixing the subsequent substrate to the substrate holder.

According to this macro inspection method, since the substrate can be quickly positioned on the substrate holder, the tact time can be shortened and the inspection efficiency can be improved. In the substrate positioning step, the positioning may be performed by sandwiching the substrate from its periphery.

[0025] The substrate holder is provided with a positioning member that abuts when the substrate reaches the reference position; and the substrate holder is configured to abut the substrate in a floating state against the positioning member in the substrate positioning step. It may be inclined.

In this case, if the substrate holder is tilted by the substrate holder driving mechanism, the substrate holder is tilted. The substrate moves along the oblique direction and stops moving by contacting the positioning member, and positioning to the reference position is completed. In this way, the components that move the substrate for positioning on the substrate holder can be omitted.

[0026] In the substrate holder stop step, the substrate holder may be stopped by attenuating vibration of the substrate holder moved to the delivery position.

In this case, since the substrate holder is stopped by attenuating the vibration of the substrate holder that has moved to the delivery position, it is extremely quicker than when the substrate holder is simply stopped at the delivery position in a cantilevered state. Can be stationary. Therefore, the substrate transfer operation at the substrate transfer position can be performed quickly. Therefore, it is possible to reduce a loss time unnecessary for the substrate inspection, and it is possible to greatly reduce the tact time of the substrate inspection and improve the inspection efficiency.

[0027] In the substrate holder stopping step, the substrate holder may be stopped by holding the substrate holder moved to the delivery position.

In the substrate holder stopping step, the substrate holder may be stopped by locking the substrate holder moved to the delivery position at a fixed position.

[0028] The rotational moment of the substrate holder may be offset by a weight that generates a rotational moment that balances the rotational moment.

In this case, the rotational moment due to the substrate holder balances with the rotational moment due to the weight, so that the load applied to the drive mechanism for controlling the posture of the substrate holder (i.e. (Rotation moment) can be reduced. As a result, the drive mechanism can be reduced in size, so that the entire macro inspection apparatus can be reduced in size. It is also possible to employ an articulated arm robot as the drive mechanism.

The invention's effect

[0029] According to the macro inspection apparatus and the macro inspection method of the present invention, since the substrate can be quickly positioned on the substrate holder, the tact time can be shortened and the inspection efficiency can be improved. become.

Further, according to the present invention, for example, the substrate positioning mechanism is installed at a position other than the substrate holder. In this case, the substrate holder can be reduced in size and weight as much as the substrate positioning mechanism is not provided on the substrate holder. Therefore, the burden imposed on the substrate holder driving mechanism can be reduced, so that the substrate holder driving mechanism can be reduced in size, and the entire macro inspection apparatus can be reduced in size and weight.

Further, according to the present invention, as described above, the burden on the substrate holder driving mechanism can be reduced, so that a macro inspection apparatus using an articulated arm robot as the driving mechanism can be realized. become.

Brief Description of Drawings

FIG. 1 is a side view showing a schematic configuration of a macro inspection apparatus according to a first embodiment of the present invention.

FIG. 2 is a view showing a plan view when the substrate holder provided in the macro inspection apparatus is in a horizontal position, and is a view taken along the line II-II in FIG.

[FIG. 3] FIG. 3 is a cross-sectional view of the substrate supporting portion provided in the macro inspection apparatus, taken along lines III-III and IV-IV in FIG. The right side of the drawing shows a cross-sectional view of the substrate support at the position of the suction portion, and the left side of the drawing shows a cross-sectional view of the substrate support at the position of the support pin

[FIG. 4] FIG. 4 is a side view of the macro inspection apparatus corresponding to FIG. 1 and showing a state in which the lift pins are lifted to support the substrate.

FIG. 5 is a plan view showing a transfer robot provided in the macro inspection apparatus.

FIG. 6 is a view showing a main part of a macro inspection apparatus according to a second embodiment of the present invention, and is a plan view corresponding to FIG.

FIG. 7 is a diagram showing a main part of a macro inspection apparatus according to a third embodiment of the present invention.

It is a side view of the substrate holder hold | maintained by the stationary mechanism.

FIG. 8 is a side view for explaining another example of the stationary mechanism.

FIG. 9 is a side view for explaining another example of the stationary mechanism.

FIG. 10 is a side view for explaining another example of the stationary mechanism.

FIG. 11 is a side view for explaining another example of the stationary mechanism. FIG. 12 is a side view for explaining another example of the stationary mechanism.

FIG. 13 is a side view for explaining another example of the stationary mechanism.

FIG. 14 is a view showing another example of the substrate holder of the macro inspection apparatus, and is a plan view corresponding to FIG. 2.

FIG. 15 is a side view of the substrate holder.

FIG. 16 is a view showing the substrate holder of the macro inspection apparatus according to the fourth embodiment of the present invention, and is a plan view corresponding to FIG. 2.

FIG. 17 is a side view of the substrate holder.

FIG. 18 is a plan view for explaining another example of the substrate holder.

FIG. 19 is a plan view for explaining another example of the substrate holder.

FIG. 20 is a side view of the substrate holder.

FIG. 21 is a plan view for explaining another example of the substrate holder.

FIG. 22 is a side view of the substrate holder.

Explanation of symbols

1 Macro inspection device

3 Light source (macro illumination optical system)

6, 81 Substrate holder

7e Engaging groove (second notch)

9, 11, 84 Suction part (substrate fixing mechanism)

15 Inspection robot (substrate holder drive mechanism, articulated arm robot)

20 Alignment means (substrate positioning mechanism)

21 cylinder (biasing device)

28 Transfer robot (substrate transfer mechanism)

42a, 42b Reference pin (positioning member)

43a, 43b cutout (first cutout)

50 Stationary mechanism

52 Elastic body

55 Vibration damping part (spring) 56 Engagement pin (locking part)

61, 62 Fixed bracket, movable bracket (clamping means)

72 Contact part (rotating member)

74 Stopper pin (rotation restricting member)

90 Balance weight (weight)

W substrate

X connecting shaft (first axis)

Y center axis (second axis)

BEST MODE FOR CARRYING OUT THE INVENTION

Each embodiment of the macro inspection apparatus of the present invention will be described below with reference to the drawings.

[First embodiment]

FIG. 1 is a side view showing a schematic configuration of the macro inspection apparatus according to the first embodiment of the present invention.

The macro inspection apparatus 1 includes an apparatus main body 2 that is disposed in a clean room and has a side wall that surrounds a space whose upper surface and lower surface are open. A filter (not shown) for increasing the cleanliness in the apparatus main body 2 is attached to the upper surface of the apparatus main body 2. Further, on the upper part of the apparatus body 2, as a macro illumination optical system, for example, a light source 3 for macro illumination such as a metal halide lamp and a sodium lamp, and an optical axis of illumination light emitted from the light source 3 are provided. Reflective mirror 4 is installed. Below the reflecting mirror 4, a Fresnel lens 5 that converges the illumination light of the light source 3 and guides it to the substrate W is disposed. The Fresnel lens 5 converts divergent light from the light source 3 into convergent light. Further, the transmission type liquid crystal scattering plate force having a scattering function for changing the divergent light from the light source 3 to a uniform surface light source is disposed in the vicinity of the Fresnel lens 5. The macro illumination optical system may illuminate the entire transparent substrate such as a liquid crystal display or a plasma display as a whole, or it may partially illuminate and scan the illumination light in one or two dimensions. Good.

[0033] Substrate W is a transparent substrate for a flat panel display (FPD) formed of a transparent flat plate, and is horizontally arranged by a substrate transfer device (transfer robot) as shown by a virtual line in FIG. Is loaded onto the substrate holder 6. As a transparent substrate to be inspected by the macro inspection equipment, FP There is a multi-chamfered master glass substrate capable of producing a plurality of rectangular panels for D, the outer shape is formed in a rectangular shape, and a rectangular pattern region is formed slightly inside the periphery. Hereinafter, a portion between the substrate periphery and the rectangular pattern is referred to as a “substrate periphery”.

As shown in FIG. 2, the substrate holder 6 has a rectangular frame-shaped holder body 7 in which a rectangular opening 8 smaller than the outer shape of the substrate W is formed. The holder body 7 forms an opening 8 by connecting both ends of a pair of long side portions 7a and 7b parallel to each other by a pair of short side portions 7c and 7d. The size of the opening 8 is smaller than the outer dimension of the substrate W and is formed in a rectangular size slightly larger than the rectangular pattern region. Then, the peripheral edge of the back surface of the substrate W is supported by the peripheral edge on the inner peripheral side of the holder body 7. A plurality of suction portions (substrate fixing mechanisms) 9 are arranged at predetermined intervals in a region overlapping the substrate W at the inner peripheral edge of the holder body 7. These suction parts 9 protrude slightly from the upper surface of the holder body 7 and are arranged so as to be substantially flush with the upper surface of the holder body 7 during suction; a through-hole formed in this suction node And a suction fluid pump connected via a vent pipe (not shown).

[0035] When the substrate W is positioned, the suction unit 9 is provided with, for example, the above-mentioned passage as a substrate floating means that floats the substrate W by blowing air to reduce contact resistance (friction resistance) to the substrate holder 6. An exhaust fluid pump that blows out air is connected to the trachea via a switching valve (not shown). As a result, compressed air can be blown out from each of the suction pads 9, and suction and blowing can be selectively performed by switching the valve. In this way, all the suction units 9 may have a configuration capable of suction and blowing (substrate floating mechanism), but only a part of the suction units 9 may be provided. In addition to the suction part 9, a blowing part having a nozzle hole for air blowing may be provided in the holder body 7 as a substrate floating means, and air suction and air blowing may be provided in different systems.

[0036] In the opening 8 of the holder main body 7, a plurality of substrate support portions 10 are fixed at a sufficient distance from each other. Each substrate support portion 10 is made of metal, and as shown in the left and right views of FIG. 3, the cross-sectional shape thereof is a vertically long bar shape (bar shape) whose height is longer than the width. It is smaller and lighter than the holder body 7. Details of these substrate supports 10 Similarly, as shown in the left and right views of FIG. 3, the narrow cross-sectional shape has a vertically long hexagonal shape, and at least the upper end and the lower end are illuminated with the illumination light transmitted through the substrate W. In order not to interfere with observation by being reflected at the upper end of 0, inclined surfaces 10b and 10d for reflecting the illumination light toward the outside of the observation field are formed. In the present embodiment, inclined surfaces 10b and 10b are formed on both the upper end and the lower end of each substrate support portion 10.

[0037] At the upper part of these substrate support portions 10, a suction portion (substrate fixing mechanism) 11 (the right side of FIG. And a support pin 12 (left figure in FIG. 3) that abuts against the back surface of the substrate W are vertically projected. These suction portions 11 and support pins 12 may be arranged alternately on the same substrate support portion 10 as shown in FIG. 2, or the suction portions 12 may be placed on all the substrate support portions 10. Alternatively, the support pins 12 or the suction portions 11 may be arranged alternately on each substrate support portion 10.

[0038] The suction part 11 includes a rod 11a standing on the upper surface of the substrate support part 10, and a suction pad 1 lb attached to the tip of the rod 11a. An air circulation hole (not shown) is formed in the rod 1 la and the suction pad 1 lb, and the suction fluid pump is connected to the air circulation hole via a vent pipe (not shown). .

[0039] In the suction portion 11, as the substrate floating means for reducing the contact resistance (friction resistance) to the substrate holder 6 by floating the substrate W by blowing air when positioning the substrate W, for example, the vent pipe An exhaust fluid pump that blows out air through a switching valve is connected (not shown above). Thereby, compressed air can be blown out from the suction pad l ib, and suction and blowing can be performed alternatively by switching the valve. In this way, all the suction units 11 may have a configuration capable of sucking and blowing, or only a part of the suction units 11 may be provided. In addition to the suction unit 11, as the substrate floating mechanism, a blow-up portion having a nozzle hole for air blowing may be provided in the holder body 7, and the single air suction and the air blowing may be provided in different systems.

[0040] The support pin 12 includes a rod 12b erected on the upper surface of the substrate support 10 and a reduced hardness with less wear resistance than a glass substrate such as Teflon (registered trademark) at the tip of the rod 12b. A substantially spherical contact portion 12a having a frictional force is provided. The height of the upper end position of the suction part 11 and the upper end position of the support pin 12 are both adjusted to be approximately equal to the upper surface position of the suction part 9. The

[0041] As shown in FIGS. 1 and 2, as a substrate holder driving mechanism for rotating the substrate holder 6, for example, it can freely move in multiple directions (directions A, B, C, and D in the figure). An inspection robot 15, which is an articulated arm robot in which a plurality of arms are connected, is disposed at the bottom of the apparatus body 1.

As shown in FIG. 2, one long side portion 7 a of the holder body 7 is connected to the tip arm 16 of the inspection robot 15. The inspection robot 15 is controlled by a control device (not shown), for example, from a substrate delivery position where the substrate holder 6 is held in a horizontal position as shown by a virtual line in FIG. Rotate the substrate holder 6 in the direction of arrow A to the angle, rotate the substrate holder 6 in the direction of arrow C around the axis of the tip arm 16 (Fig. 2), or move the substrate holder 6 in the direction of arrow B (Fig. 1) The substrate holder 6 can be moved up and down or moved in the direction of arrow D (Fig. 2).

[0042] By using this inspection robot 15, the substrate holder 6 can be moved up, down, left, and right with the substrate holder 6 raised to an angle suitable for observation under macro illumination. The macro illumination light can be scanned over the entire surface. When the macro illumination optical system is provided so as to be movable in the X and Y directions, a uniaxial substrate holder drive mechanism that rotates or swings the substrate holder 6 in the direction of arrow A as the inspection robot 15 or a substrate holder 6 is installed. A biaxial substrate holder drive mechanism that rotates in the direction of arrow A and arrow C may be used.

In addition, an opening (not shown) is formed in the apparatus body 2 so as to correspond to the position of the front surface of the substrate holder 6 when it is raised, so that the external appearance of the substrate W when it is raised is observed. Can be visually observed.

As shown in FIG. 2, a frame 17 is arranged around the substrate holder 6 in a state in which the posture of the substrate holder 6 is horizontally controlled at the substrate delivery position in order to receive the substrate W. The frame 17 is attached to the main body 2 of the apparatus body 2 so as to surround the holder body 7 along each side 7a, 7b, 7c, 7d of the holder body 7 except for the range in which the inspection robot 15 can swing. It is fixed against. A plurality of alignment means 20 serving as a substrate positioning mechanism for positioning the substrate W at a reference position on the holder body 7 are provided on the upper portion of the frame 17. The peripheral force of the main body 7 is also attached separately. Two of these alignment means 20 are provided on the frame 17 at a position facing the long side portions 7a, 7b and the short side portion 7d of the holder body 7, and are arranged at positions facing the short side portion 7c of the substrate holder W. There is one frame 17! / Each alignment means 20 disposed on the short side 7d side and the long side 7a, 7b side is provided to face each corner of the substrate W. However, the alignment means 20 arranged on the short side portion 7c side is provided so as to face the vicinity of the center of the left short side of the substrate W.

Each alignment means 20 includes a drive unit that also has a constant force of a cylinder 21 fixed to the frame 17, and a pressing member that also has a constant force of a rod-shaped pressing pin 22 that is supported by the cylinder 21 so as to advance and retreat. At the tip of the pressing pin 22, there is provided a cylindrical contact portion 22a, which is a friction reducing material having a smaller hardness than a glass substrate such as Teflon (registered trademark) and having excellent wear resistance. Each pressing pin 22 is arranged slightly above the upper surface position of the substrate holder 6, and an alignment position (reference position) where the contact portion 22 a of the pressing pin 22 is pressed against the side surface of the glass substrate W; As indicated by an imaginary line in FIG. 2, the abutting portion 22a of the pressing pin 22 is movable to a retracted position separated from the holder body 7 by force.

[0045] The alignment means 20 is not limited to the cylinder drive configuration, and for example, a configuration in which the contact portion 22a is advanced and retracted via a link mechanism (pressing member) in a motor (drive portion) may be adopted. In addition, the holder body 7 is formed so that the outer dimension of the holder body 7 is slightly smaller than the outer dimension of the substrate W so that the peripheral edge of the substrate W slightly protrudes from the holder body 7, and the substrate W protrudes from the holder body 7. The abutting portion 22a of each pressing pin 22 may be pressed against the periphery of

As shown in FIG. 1, a lift device 24 is disposed below the substrate holder 6 whose posture is horizontally controlled. As shown in FIG. 5, the lift device 24 is arranged in a plurality of locations so that the substrate support portions 10 of the substrate holder 6 and the comb-like fingers 31 of the substrate transfer robot 28 do not interfere with each other when viewed in plan. As shown in FIG. 1, a lift pin support bar 26 for supporting these lift pins 25 and an actuator section 27 for raising and lowering the lift pin support bar 26 are provided.

Each lift pin 25 has a lift position that protrudes to a position higher than the upper surface position of the substrate holder 6 as shown in FIG. 4, and a retreat that is lower than the lower surface position of the substrate holder 6 as shown in FIG. It can move to the avoidance position. At the tip of each lift pin 25, there is provided a substantially spherical contact portion made of an antifriction material having a hardness smaller than that of a glass substrate such as Teflon (registered trademark) and having excellent wear resistance.

FIG. 5 shows the transfer robot 28. The transfer robot 28 is used when a substrate W is loaded into the substrate holder 6 or when the substrate W is unloaded from the substrate holder 6 and includes an articulated arm robot. A robot hand 30 is attached to the tip arm 29 of the transfer robot 28. The robot hand 30 includes a plurality of fingers 31 arranged in a comb-like shape, and suction portions 32 are arranged at equal intervals on the upper surface of each finger 31 to hold the substrate W by suction.

As shown in FIG. 2, the robot hand 30 has a shape of the finger 31 so as to avoid the alignment means 20 and the lift pins 25 when inserted above the substrate holder 6 through the substrate inlet 2a of the apparatus body 2. And the arrangement is set.

[0048] The operation of the macro inspection apparatus 1 of the present embodiment will be described below.

First, after the pressing pins 22 of the aligning means 20 are retracted to the retracted position, the inspection robot 15 causes the substrate holder 6 to stand by at a horizontal substrate transfer position suitable for loading and unloading the substrate W. The transfer robot 28 sucks and holds one substrate W from a cassette (not shown), takes it out, transfers it to the upper side of the substrate holder 6, and then releases the suction to the substrate W. Thereafter, the lift device 24 drives the actuator unit 27 and moves the lift pins 25 above the fingers 31 of the transfer robot 28 to receive the substrate W. The lift pins 25 at this time are arranged so as not to interfere with the holder main body 7, the substrate support portions 10, and the comb-like fingers 31 of the transfer robot 28. Pass through between the fingers 31 of the transfer robot 28 and lift the substrate W. As a result, the substrate W placed on the transfer port bot 28 is transferred from the finger 31 of the transfer robot 28 to the lift pin 25. In this state, the robot hand 30 is not brought into contact with the holder body 7 by the transfer robot 28! After being lowered to the position, the robot node 30 is retracted from the movement path of the substrate holder 6.

Next, when the actuator unit 27 is driven and the lift pin 25 is lowered to the retracted position, the back surface of the substrate W is brought into contact with the suction unit 9 of the holder body 7, the suction unit 11 of the substrate support unit 10, and the support unit 10. The substrate W is brought into contact with the holding pins 12 and the substrate W is transferred from the lift pins 25 to the substrate holder 6. When the substrate W is placed on the substrate holder 6, the compressed air is blown out from the suction portions 9 and 11 that function as a substrate floating mechanism, and the substrate W is slightly lifted from the holder body 7. In a state where the substrate W is floated by air, each alignment means 20 is driven to project each pressing pin 22 toward the substrate W. As a result, the substrate W is sandwiched between the pressing pins 22 and aligned at the reference position. With the substrate W positioned, the compressed air supply from the suction portions 9 and 11 is stopped, and the substrate W is placed on the holder body 7 and each substrate support portion 10. Thereafter, suction is started by the suction units 8 and 11, and the positioned substrate W is sucked and held.

[0050] When positioning the substrate W, the alignment means 20 arranged on one side across the diagonal of the holder body 7 is set for positioning reference, and the contact portion 22a of the reference alignment means 20 is set as the holder. The alignment means 20 fixed to the reference position of the main body 7 and arranged on the other side is set for substrate pressing, and the substrate W is brought into contact with the reference alignment means 20 by the contact portion 22a of the pressing alignment means 20. You may make it position by pressing on the contact part 22a.

[0051] After the substrate W is positioned and held at the reference position on the holder body 7, the inspection port bot 15 observes the substrate holder 6 from the horizontal position as shown by the solid line in FIG. Make the person get up like a power. In this state, the substrate W is illuminated from above by the illumination light from the light source 3, and a macro inspection is performed by an observer. At this time, the inspection robot 15 may swing the substrate holder 6 in the vertical direction or the horizontal direction at a minute angle so as to perform the macro inspection while changing the incident angle of the illumination light with respect to the substrate W. . When performing a macro inspection of the back surface of the substrate W, the inspection robot 15 may invert the substrate W so that the back surface of the substrate W faces the illumination direction. Further, a knock light device (not shown) may be provided so that the substrate W is observed while illuminating it from the back side.

When the macro inspection is completed, the substrate holder 6 is returned to the horizontal position, and the suction holding by the suction portions 9 and 11 is released. The actuator 27 of the lift device 25 is driven again, the lift pin 25 is raised, and the substrate W is transferred from the substrate holder 6 onto the lift pin 25. In this state, the transfer robot 28 moves the robot hand 30 horizontally to insert the finger 31 between the holder body 7 and the substrate W, and lifts the robot hand 30 to lift the substrate W from the lift pin 25. After the substrate W is sucked and held by the sucking unit 32, the robot hand 30 is moved backward and carried out toward the cassette.

[0053] As described above, the macro inspection apparatus 1 of the present embodiment includes the substrate holder 6 that holds the substrate W to be inspected; the light source (macro illumination optical system) 3 that irradiates the substrate W with illumination light; An inspection robot (substrate holder drive mechanism) 15 that supports the substrate holder 6 and controls the posture of the substrate holder 6 while the substrate W is illuminated by illumination light; and transfers the substrate W between the substrate holder 6 A transfer robot (substrate transfer mechanism) 28 for performing the above-mentioned ventilation pipe, which lifts the substrate W from the substrate holder 6 by blowing air to the substrate W transferred onto the substrate holder 6; A substrate floating mechanism having the switching valve and the exhaust fluid pump; an alignment means (substrate positioning mechanism) 20 for positioning the substrate W in a floating state by the substrate floating mechanism at a reference position on the substrate holder 6; This alignment hand Comprises; more positioning wafer W on the 20 suction portion for fixing to the substrate holder 6 (substrate fixing mechanism) 9, 11 and.

[0054] According to the macro inspection apparatus 1 of the present embodiment, the alignment means 20 that functions as a positioning mechanism for aligning the substrates W is provided separately from the substrate holder 6, and thus is driven on the substrate holder 6. It is not necessary to provide the aligning means 20 having a portion. By separating the aligning means 20 that requires a large mounting space from the force on the holder body 7, the width of the holder body 7 can be reduced by the space for arranging the aligning means 20, and the substrate holder 6 can be reduced in weight. . Furthermore, the load on the inspection robot 5 that drives the substrate holder 6 can be reduced by the light weight of the substrate holder 6. As a result, a small multi-joint arm robot can be used as the inspection robot 15. Furthermore, by reducing the size of the substrate holder 6 and the inspection robot 15, the macro inspection apparatus 1 can be reduced in size and the installation space of the clean room can be reduced.

Note that the holder body 7 is pressed because the outer dimension of the holder body 7 is slightly smaller than the outer dimension of the substrate W so that the peripheral edge of the substrate W slightly protrudes from the holder body 7. Interference between the pressing pin 22 and the holder body 7 can be prevented when the pressing pin 22 of the aligning means 20 moves forward and backward. Further, since the contact portion 22a attached to the tip of the pressing pin 22 can be enlarged, even if the holder body 7 is slightly displaced in the vertical direction, these contact portions 22a can be reliably brought into contact with the substrate W and pressed. Furthermore, the outer dimensions of the holder body 7 can be reduced within the outer dimensions of the board, and further light weight can be achieved.

[0056] [Second Embodiment]

A second embodiment of the macro inspection apparatus of the present invention will be described below with reference to the drawings. The same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

As shown in FIG. 6, on the upper surface of the long side portion 7a of the holder body 7 to which the tip arm 16 of the inspection robot 15 is attached, a reference pin 42a which is a reference alignment means (reference substrate positioning mechanism) is provided. Two are fixed, and a reference pin 42b is fixed on the upper surface of the short side portion 7c. Each reference pin 42a is disposed at a position corresponding to the corner of the substrate W, and the reference pin 42b is disposed at a position corresponding to the central portion of the left edge of the substrate W.

[0057] A frame 44 and a frame 45 are attached to the apparatus main body 2 along the long side portion 7b and the short side portion 7d of the holder main body 7, and the substrate W is attached to each reference pin on the frames 44, 45. 4 Pressing alignment means (pressing board positioning mechanism) 2 0 for pressing against 2a and 42b are provided two by two.

The long side 7b and the short side 7d of the substrate holder body 7 are notched at positions corresponding to the pressing alignment means 20 so that the notches 43a and 43b are recessed from the outer peripheral surface of the substrate holder body 7 toward the opening 8. Is formed. These notches 43a and 43b are notched to a position where they enter into the inside of the substrate W by several millimeters, as shown in FIG.

In the present embodiment, the respective frames provided along the long side portion 7a and the short side portion 7c of the holder body 7 are omitted from the configuration described in the first embodiment. Then, the positioning alignment means 20 having a driving portion such as a cylinder fixed to the omitted frame is replaced with reference pins 42a and 42b having no driving portion. Furthermore, notches 43a and 43b are provided in the holder body 7 at positions facing the pressing alignment means 20. The configuration other than the points described above is the same as the configuration of the first embodiment, and a duplicate description is omitted.

[0059] The operation of the macro inspection apparatus 1 of the present embodiment will be described below. This embodiment is different from the first embodiment only in the method of positioning the substrate W. This different positioning method will be described below. After the substrate W carried by the transfer robot 28 as shown in FIG. 5 is placed on the substrate holder 6, the compressed air is blown out from the suction parts 9, 11 functioning as a substrate floating mechanism, and the substrate W is lifted. Let Next, when each alignment means 20 projects the pressing pin 22 toward the substrate W, the side surface of the substrate W is pressed, and the opposite side surface of the substrate W is pressed against the reference pins 42a and 42b for positioning. With the substrate W positioned, the supply of compressed air from the suction portions 9 and 11 is stopped and the substrate W is placed on the holder body 7 and each substrate support portion 10. Thereafter, suction is started by the suction portions 9 and 11, and the positioned substrate W is sucked and held.

[0060] According to the macro inspection apparatus of the present embodiment described above, by replacing the reference alignment means for aligning the substrates W with the inexpensive reference pins 42a and 42b having no drive unit, the manufacturing cost of the apparatus is reduced. Can be reduced. Furthermore, since the frames arranged along the long side 7a and the short side 7c of the holder body 7 can be reduced, the inspection robot 15 and the transfer robot 28 interfere with the frame, so that the inspection The operation of the robot 15 and the transport robot 28 is expanded.

Further, since the notches 43a and 43b are formed in the holder main body 7, interference between the pressing pin 22 and the holder main body 7 can be prevented when the pressing pin 22 of the pressing aligning means 20 advances and retreats. By providing the notches 43a and 43b, the size of the contact portion 22a attached to the tip of the pressing pin 22 can be increased, so that even if the holder body 7 is slightly displaced in the vertical direction, it contacts the substrate W, The substrate W can be reliably pressed. In addition, the reference pins 42a and 42b are fixed to the holder body 7, and only the pressing alignment means 20 is provided with a drive mechanism, so that all alignment means are provided with a drive mechanism as in the first embodiment. Compared to, positioning control is simplified. That is, in the first embodiment described above, it is necessary to position and control all alignment means correctly, but in this embodiment, the substrate W is pressed against the reference pins 42a and 42b by the pressing alignment means 20 so that a predetermined pressing force is obtained. When it reaches, simple positioning control that stops pressing is sufficient, so positioning can be performed more quickly. Other effects are the same as those of the first embodiment.

Note that the present invention is not limited to the second embodiment and can be widely applied. For example, for the purpose of further reducing the mechanism and further reducing the size and weight of the device

In the substrate holder 6 shown in FIG. 6, only the reference pins 42a and 42b for regulating the reference position of the substrate W may be provided without providing the pressing alignment means 20 and the notches 43a and 43b.

In this case, when the substrate W is carried in, the substrate W is transferred to the substrate holder 6 by the lift pins 25, and then the substrate W is floated by blowing air from the suction portions 9 and 11 that function as the substrate floating mechanism. The inspection robot 15 is driven, and the holder body 7 is first inclined so that the long side portion 7b is slightly higher than the long side portion 7a. As a result, the floating substrate W moves to the long side portion 7a side along the holder body 7 due to its own weight, and comes into contact with the reference pin 42a to determine the lower position of the substrate W. In this state, the inspection robot 15 is driven to tilt the holder body 7 so that the short side portion 7b is slightly higher than the short side portion 7c. As a result, the substrate W that has floated is moved to the short side portion 7c while being in contact with the two reference pins 42a, and the right side of the substrate W is determined by contacting the reference pins 42b. Thus, by tilting the holder body 7 slightly so that the reference pins 42a and 42b are at the bottom, it is possible to position the substrate W by contacting the reference pins 42a and 42b by its own weight. Become.

[0062] When an articulated arm robot capable of posture control in multiple directions is adopted as the inspection robot 15 and the substrate W is aligned, of the alignment means for aligning the substrate W, the drive unit The reference aligning means that does not need to be configured can be constituted only by inexpensive reference pins 42a and 42b having no drive mechanism. In this case, the cost can be further reduced, and all the frames for attaching the aligning means can be omitted from the periphery of the holder body 7, and the entire apparatus can be reduced in size. Other effects are the same as in the first embodiment.

[0063] When the articulated arm robot is used to align the substrate W, the inspection robot 15 has a holder body so that the corners of the long side portion 7a and the short side portion 7c are lowest at a time. 7 may be inclined, and the substrate W may be moved toward the reference pins 42a, 42a, 42b provided on both sides of the holder body 7 by its own weight. In this case, the substrate W can be adjusted IJ with one action.

In any of the above cases, the substrate holder 6 is finely moved by the inspection robot 15. You may drive it so that it may swing small. As the substrate holder 6 shakes, the substrate W moves and aligns quickly. In this case, it is not always necessary to float by blowing air.

[0064] Further, in order to reduce the mechanism portion and further reduce the size, weight, and cost of the device, the lifting mechanism 24 is removed from the lifting device 24, and the lifting device 24 is fixed as shown in FIG. The position may be fixed. In this case, the length of the lift pin 25 is set so that the tip 27a is fixed at a position lower than the lower surface of the substrate holder 6 in the horizontal position. When carrying in / out the substrate W, the inspection robot 15 is driven and the substrate holder 6 is lowered so as to be lower than the lift pins 25. As a result, the tip of the lift pin 25 protrudes from the upper surface of the substrate holder 6, so that the substrate W is transferred onto the lift pin 25 by the transfer robot 28, and after the transfer robot 28 is retracted, the inspection robot 28 By raising the substrate holder 8, the substrate W can be transferred from the transfer robot 28 to the inspection robot 15. Thereafter, when the inspection robot (articulated robot) 15 raises the substrate holder 6, the substrate W is transferred from the lift pins 25 to the substrate holder 6. The positioning, suction, and macro observation of the substrate W are performed in the same manner as described above. When unloading the substrate W, the suction holding of the substrate W is released at a position slightly higher than the lift pins 25, and then the substrate holder 6 is lowered to a position lower than the tip of the lift pins 25. As a result, since the substrate W is transferred to the lift pins 25, the substrate W can be carried out by the transfer robot 28.

[0065] When such a configuration is adopted, the inspection robot 15 is also used as the lifting function of the lift device that moves up and down horizontally with the substrate W placed on the transfer position of the substrate W. This eliminates the need to provide a mechanism for raising and lowering the lift pins 25. As a result, the apparatus can be reduced in size and weight. Other effects are the same as in the first embodiment.

The short side of the substrate holder 6 may be attached to the tip arm 16 of the inspection robot (articulated robot) 15.

The notches 43a and 43b may be omitted from the substrate holder 6 shown in FIG. Further, notches 43a and 43b may be formed in the substrate holder 6 shown in FIG. [0067] [Third embodiment]

A _third embodiment of the macro inspection apparatus of the present invention will be described below with reference to the drawings. The same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

In the present embodiment, an inspection articulated arm robot (inspection robot 15) is employed as a substrate holder driving mechanism for rotating and swinging the substrate holder 6. Then, the substrate holder 6 supported by the inspection robot 15 so as to be rotatable and swingable is quickly stopped at the substrate transfer position to smoothly transfer the substrate W, thereby reducing the tact time and inspecting efficiency. In order to improve the rate, a stationary mechanism 50 is provided. Except for the provision of the stationary mechanism 50, the second embodiment is the same as the first embodiment, and a duplicate description is omitted.

As shown in FIG. 7, the substrate holder 6 connected to the tip arm 16 of the inspection robot 15 is held in a horizontal position at the substrate transfer position. The stationary mechanism 50 has a stagger function for restricting the substrate holder 6 to the substrate delivery position, and is disposed on the front end side (free end side) of the substrate holder 6. The stationary mechanism 50 further has a stationary function that absorbs the impact of the substrate holder 6 and suppresses the vibration.

A stationary mechanism 50 shown in FIG. 7 includes a stopper 53 attached to a distal end portion (upper end portion) of a support column 51 erected in the vertical direction, for example, a rubber-based elastic body 52 such as rubber or sponge. The upper surface of the elastic body 52 is a contact portion 54. The stationary mechanism 50 is provided below the front end of the holder body 7 disposed at the substrate transfer position. When the holder body 7 is disposed at the substrate delivery position where the holder body 7 is held in a horizontal position, the lower surface of the tip end portion comes into contact with the contact portion 54 of the stopper 53.

[0069] As described in the first embodiment, the substrate holder 6 is a substrate between the transfer robot 28 when the inspection robot 15 carries in the substrate W and when the substrate W after macro inspection is carried out. It is moved to the delivery position.

[0070] When the substrate holder 6 is moved (rotated) by the inspection robot 15 to the horizontal angle of the substrate delivery position even when a predetermined angular force is observed by macro observation, the bottom surface of the tip of the holder body 7 is in contact with the contact portion of the stagger Abuts 54. As a result, the holder main body 7 quickly stops at the substrate transfer position without causing vibration at the tip. At this time, the inspection robot 15 is rotated at a high speed. The holder body 7 is gently brought into contact with the stopper 53 by slowing down the rotation just before the board transfer position, so that the impact force of the holder body 7 against the stopper 53 is reduced and the substrate holder 6 is moved at high speed. The time required for delivery of the substrate W can be reduced.

[0071] For example, a vibration sensor may be used to determine whether or not the holder body 7 that has moved to the substrate delivery position is stationary. For example, a determination may be made based on whether or not a predetermined time has passed. May be. After confirming that the holder body 7 is stationary by a sensor and time, the transfer robot 28 is driven and controlled to transfer the substrate W from the substrate holder 6. In the present embodiment, the stationary mechanism 50 supports the tip of the holder body 7 to stop the swing of the substrate holder 6. However, the support of the substrate holder 6 is not limited to the tip, but other locations. May be adopted. Specifically, with respect to the center of gravity of the substrate holder 6, if the holder body 7 is on the opposite side of the support location by the drive arm 16, that is, between the position of the center of gravity and the position of the tip. good.

As described above, according to the macro inspection apparatus 1 of the present embodiment including the stationary mechanism 50, the drive of the holder body 7 with respect to the center of gravity of the substrate holder 6 moved to the substrate delivery position. Since the side opposite to the place where the arm 16 is supported is held by the stopper 53, the substrate holder 6 can be stopped very quickly when the substrate delivery Lf is placed, and the substrate W can be transferred at the substrate delivery position. It is possible to make it happen promptly.

As a result, the loss time unnecessary for the inspection of the substrate W can be reduced, the tact time of the inspection of the substrate W can be greatly shortened, and the inspection efficiency can be improved.

In addition, by bringing the holder body 7 into contact with the pre-positioned stationary mechanism 50 at the substrate delivery position, the substrate holder 6 can be supported horizontally and accurately, and the substrate W can be delivered smoothly. .

[0073] As the stationary mechanism 50, for example, it is preferable that the column 51 can be expanded and contracted so that the height position of the contact portion 54 can be adjusted up and down. In this case, it is possible to improve the accuracy of the height position of the abutment portion 54 in the substrate delivery Lf standing. In addition, it is possible to easily cope with changes in the board delivery position.

In addition, when the abutment part 54 is provided with an attracting part or a magnet, The bottom surface of the holder body 7 is vacuum-adsorbed! / ヽ is attracted by magnetic force, so that the substrate holder 6 can be stopped at the substrate transfer position more quickly and reliably.

[0074] The stationary mechanism 50 is not limited to the structure described above, and various structures can be applied.

Here, another example of the stationary mechanism 50 will be described.

A stationary mechanism 50 shown in FIG. 8 is an example in which a vibration damping unit 55 that also has a damper and a spring force is provided at the tip of a column 51.

When such a vibration attenuating portion 55 is provided, it is possible to reliably receive vibration and impact from the holder main body 7 that abuts against the abutting portion 54, and to quickly stop the substrate holder 6.

A stationary mechanism 50 shown in FIG. 9 is an example in which an engaging portion 57 having an engaging pin 56 as an abutting portion is provided at the distal end portion of a support column 51. The engagement pin 56 protrudes toward the holder body 7 and can be engaged with an engagement groove 7e formed at the tip of the holder body 7. The engaging pin 56 has a cylindrical shape with a hemispherical tip, and is inserted into the hole of the engaging portion 57 while being connected to a coil panel (not shown). As a result, the engaging pin 56 is provided so as to be able to appear and retract with respect to the hole.

In the stationary mechanism 50, when the holder body 7 moves to the substrate delivery position, the engagement pin 56 engages with the engagement groove 7e of the holder body 7. As a result, the substrate holder 6 can be quickly stopped at the substrate delivery position.

A stationary mechanism 50 shown in FIG. 10 includes a fixed bracket 61 and a movable bracket 62 that are formed in a U-shape in a side view and are connected to one end side so as to be rotatable with respect to the distal end portion of a column 51. And a drive mechanism (not shown) for rotating the. The fixed bracket 61 is fixed to the support column 51, and an elastic body 64 is provided on the other end opposite to the connection side with the movable bracket 62, and the surface thereof is a contact portion 65. An elastic body 66 is also provided at the other end portion of the movable bracket 62, and the surface thereof serves as a clamping portion 67.

In the stationary mechanism 50, the holder main body 7 is moved to the substrate delivery position in a state where the movable bracket 62 is disposed at the position indicated by the phantom line in FIG. When the lower surface of the front end of the holder body 7 contacts the contact portion 65 of the fixed bracket 61, the movable bracket 62 is rotated clockwise (in the direction of the arrow α in the figure) by the drive mechanism. This The front end of the rudder body 7 is sandwiched between the abutment portion 65 of the fixed bracket 61 and the sandwiching portion 67 of the movable bracket 62, so that the substrate holder 6 can be quickly stopped at the substrate delivery position. .

The stationary mechanism 50 shown in FIG. 11 includes a support bracket 71 that is rotatably supported at the tip end portion of the support column 51. The support bracket 71 is formed in a V shape when viewed from the side, and the inner surface forming the V shape is a contact portion 72.

In this stationary mechanism 50, when the holder main body 7 is moved to the substrate delivery position in a state where the support bracket 71 is disposed at the position indicated by the phantom line in the drawing, The support bracket 71 is rotated clockwise about the rotation shaft 73 (in the direction of arrow β in the figure), contacts the stopper pin 74, and stops at the position indicated by the solid line in the figure. As a result, the upper and lower corners of the tip of the holder body 7 are brought into contact with the respective contact portions 72 of the support bracket 71, so that the substrate holder 6 is quickly stopped at the substrate delivery position. The

The stationary mechanism 50 shown in FIG. 12 includes a moving mechanism 75 at the lower part. This moving mechanism 75 moves the stopper 53 linearly along a rail (not shown), so that the contact portion 54 with which the substrate holder 6 abuts is placed below the tip of the holder body 7 disposed at the substrate delivery position. It is possible to dispose a position (a position indicated by an imaginary line in the figure) that deviates from the direction position. In the stationary mechanism 50 including the moving mechanism 75, the stopper 53 moves to the substrate delivery position side only when the holder body 7 moves to the substrate delivery Lf standing position, and the holder body 7 comes into contact with the contact portion 54. To be stationary.

In other words, the stationary mechanism 50 is configured such that the stopper 53 is moved to the retracted position (virtual in the figure) by the moving mechanism 75 when it is not necessary so that the stopper 53 does not interfere with the holder body 7 during inspection. To the position indicated by the line).

Note that the mechanism for moving the stopper 53 to the retracted position when it is not necessary is not limited to linearly moving horizontally, but the stopper 53 is arcuate in plan view by rotating around a predetermined axis. You may employ | adopt the rotary type moved to.

[0081] In the stationary mechanism 50 shown in Fig. 13, the column 51 constituting the stocker 53 is divided in the middle, and the stocker 53 above the divided part is rotatably connected to the lower part. In this stationary mechanism 50, only when the holder main body 7 moves to the substrate delivery Lf standing position, the support column 51 forms a straight line, and the holder main body 7 comes into contact with and rests on the contact portion 54.

In other words, even in the case of this stationary mechanism 50, the support column 51 is bent at the connecting portion and retracted when it is not necessary so that the stopper 53 does not interfere with the holder body 7 at the time of inspection. The stopper 53 moves to the position (position indicated by the phantom line in the figure).

In the present embodiment, the force substrate holder described by taking the macro inspection apparatus 1 including the substrate holder 6 formed in a frame shape as an example is not limited to the frame shape.

14 and 15 are a plan view and a side view of another substrate holder, respectively. The substrate holder 81 shown in these drawings includes a holder body 83 in which a plurality of elongated substrate support portions 82 are arranged in a comb-tooth shape. Similar suction portions 84 are arranged with a space therebetween. In the substrate holder 81, the substrate W placed on the holder main body 83 is vacuum-sucked and held by the suction portions 84 on the substrate support portions 82.

[0083] When the substrate holder 81 having such a structure is employed, the bottom surface lower side force of each substrate support portion 82 of the substrate holder 81 moved to the substrate delivery position is held by the stop 53 of the stationary mechanism 50 and quickly To be quiesced.

In particular, according to the substrate holder 81 having the above structure, the weight can be reduced and the outer dimensions can be reduced as compared with the frame-shaped substrate holder. Furthermore, it can be made still quickly.

[0084] [Fourth Embodiment]

A fourth embodiment of the macro inspection apparatus of the present invention will be described below with reference to the drawings. The same components as those in the first embodiment are denoted by the same reference numerals, and the description thereof is omitted.

16 and 17 are a plan view and a side view of another substrate holder, respectively. In this embodiment, an inspection articulated arm robot (inspection robot 15) is employed as a drive mechanism for rotating and swinging the substrate holder 6, and the load on the drive unit of the inspection robot 15 is reduced. The balance weight 90 is provided for the purpose of reducing the size of the apparatus and reducing the size of the entire apparatus. Except for the provision of the non-weight weight 90, the second embodiment is the same as the first embodiment, and a duplicate description is omitted.

[0085] At the connecting portion 7f formed on one end side of the holder body 7, the tip arm 16 of the inspection robot 15 employing the inspection articulated arm robot (substrate holder driving mechanism) is centered on the connection axis X. It is connected so that it can rotate. As a result, the substrate holder 6 is cantilevered by the inspection robot 15. For example, the inspection robot 15 moves the substrate holder 6 from the position where the posture is held horizontally as shown by the phantom line in FIG. 1 to the position where it rises to a predetermined inclination angle as shown by the solid line in FIG. It can be swung or rotated.

A pair of balance weights 90 are attached to the substrate holder 6 at the connection side end to which the tip arm 16 of the inspection robot 15 is connected. These balance weights 90 are supported at the tip of a support arm 91 fixed in the vicinity of both sides of the substrate holder 6, and are arranged on the opposite side of the substrate holder 6 with respect to the connecting axis X with the tip arm 16. Has been.

[0087] These balance weights 90 are provided separately on both sides of the center axis Y of the substrate holder 6 that passes through the connection point with the tip arm 16, and the shim is also connected to the substrate Ruda 6 is placed on the opposite side of the center of gravity G.

As a result, the rotational moment generated by the weight of the substrate holder 6 is reduced on the connecting shaft X by the rotational moment generated by the weight of the balance weight 90. Note that the weight and arrangement of the lance weight 90 may be set so that the rotational moment generated by the weight of the substrate holder 6 is substantially balanced and offset.

According to the macro inspection apparatus 1 of the present embodiment having the above-described configuration, the center of gravity G with respect to the connection axis X with the tip arm 16 is formed at the end of the inspection robot 15 on the connection side with the tip arm 16. Since the balance weight 90 is provided on the opposite side, the rotational moment around the connecting axis X caused by the weight of the substrate holder 6 can be reduced by the rotational moment around the connecting axis X caused by the weight of the lance weight 90. .

As a result, the load on the drive part of the inspection robot 15 that cantilever-supports the substrate holder 6 can be greatly reduced, and the entire apparatus can be downsized. In addition, each balance weight 90 is provided separately on both sides of the center axis Y of the substrate holder 6 that passes through the connection point with the tip arm 16, so that each balance with respect to the connection point with the tip arm 16 is provided. The balance of the rotational moment by the weight 91 can also be balanced, whereby the substrate holder 6 can be smoothly rotated about the central axis Y.

It should be noted that the balance weight 90 may be positionally adjustable along the central axis Y of the substrate holder 6 that passes through the connection point with the tip arm 16 of the inspection robot 15. In this case, by adjusting the position of the nourishment weight 90, the balance of the rotational moment on the connecting shaft X can be controlled with higher accuracy in accordance with the change in the weight of the holder body 7 and the inclination angle.

[0091] The attachment position of the balance weight 90 is not limited to the position of the present embodiment as long as the rotational moment about the connecting axis X can be reduced. Another example in which the mounting position of the balance weight 90 is different will be described below.

FIG. 18 shows a case where a pair of balance weights 90 are arranged close to the connecting portion 7f. In this case, the moment of inertia of the substrate holder 6 around the central axis Y can be minimized, and the substrate holder 6 can be smoothly rotated about the central axis Y.

FIGS. 19 and 20 show a support arm 91 in which a connecting portion 7f to which the tip arm 16 is connected is extended to the opposite side of the holder body 7 with respect to the connecting axis X, and the support arm 91. The case with one balance weight 90 supported by is shown. The tolerance weight 90 is disposed on the central axis Y of the substrate holder 6.

According to the above structure, the moment of inertia of the substrate holder 6 around the central axis Y can be further reduced, and the substrate holder 6 can be rotated more smoothly around the central axis Y.

In this case, for example, the drive arm 16 is connected so as to be substantially orthogonal to the connecting portion 7f of the holder body 7 so that the tip arm 16 does not interfere with the support arm 91 and the balance weight 90. It is preferable to limit the range of movement as much as possible.

In this modification, the macro inspection apparatus 1 including the substrate holder 6 formed in a frame shape has been described as an example. However, the substrate holder is not limited to the frame shape. is there.

FIG. 21 and FIG. 22 show the same substrate holder 81 as that shown in FIG. 14, and a plurality of elongated substrate support portions 82 are arranged in a comb-like shape, on the upper surface of each substrate support portion 82. Each of the adsorbing portions 84 is provided at a distance from each other.

Then, a pair of balance weights 90 is attached to the substrate holder 81 via a pair of support arms 91 at the connection side end portion between the tip arm 16 and the connection portion 83a of the holder body 83. These balance weights 90 force are arranged on the opposite side of the center of gravity G of the substrate holder 81 with the connecting axis X as a boundary.

As a result, the rotational moment generated by the weight of the substrate holder 81 and the rotational moment generated by the weight of the lance weight 90 are substantially balanced and offset around the connecting axis X.

[0096] In particular, according to the substrate holder 81 having the above-described structure, a smaller and lighter weight can be achieved as compared with the frame-shaped substrate holder. The size of the apparatus can be reduced.

Industrial applicability

According to the present invention, since the substrate can be quickly positioned on the substrate holder, the tact time can be shortened and the inspection efficiency can be improved.

Further, according to the present invention, for example, when the substrate positioning mechanism is provided at a position other than the substrate holder, the substrate holder can be reduced in size and weight by the amount that the substrate positioning mechanism is not provided on the substrate holder. it can. Therefore, the burden imposed on the substrate holder driving mechanism can be reduced, so that the substrate holder driving mechanism can be reduced in size, and the entire macro inspection apparatus can be reduced in size and weight.

In addition, according to the present invention, as described above, the burden on the substrate holder driving mechanism can be reduced, so that a macro inspection apparatus using an articulated arm robot can be realized as the driving mechanism. Become.

Claims

The scope of the claims

[1] a substrate holder for holding a substrate to be inspected;

A macro illumination optical system for irradiating the substrate with illumination light;

A substrate holder driving mechanism that supports the substrate holder and controls the posture of the substrate holder in a state where the substrate is illuminated by the illumination light;

A substrate transport mechanism for delivering the substrate to and from the substrate holder; and by blowing air to the substrate delivered to the substrate holder, A substrate levitation mechanism that lifts from the surface;

A substrate positioning mechanism that positions the substrate in a floating state by the substrate floating mechanism at a reference position on the substrate holder;

A substrate fixing mechanism for fixing the substrate positioned by the substrate positioning mechanism to the substrate holder;

A macro inspection apparatus comprising:

[2] The macro inspection apparatus according to claim 1,

The substrate holder driving mechanism force includes an articulated arm robot.

[3] The macro inspection apparatus according to claim 1,

The substrate positioning mechanism is provided at a position other than the substrate holder! / Speak.

[4] The macro inspection apparatus according to claim 3,

The substrate positioning mechanism performs the positioning by sandwiching the substrate from its periphery.

[5] The macro inspection apparatus according to claim 3,

A positioning member fixed at a position that contacts the substrate when the substrate positioning mechanism reaches the reference position; and a biasing device that biases the substrate toward the positioning member.

[6] The macro inspection apparatus according to claim 3,

A first notch is formed in the substrate holder to avoid interference with the substrate positioning mechanism.

[7] The macro inspection apparatus according to claim 1, A positioning member provided on the substrate holder and fixed at a position where the substrate positioning mechanism comes into contact with the substrate when the reference position is reached; provided at a position other than the substrate holder; A biasing device that biases the positioning member toward the positioning member.

[8] The macro inspection apparatus according to claim 1,

When the substrate holder is tilted by the substrate holder driving mechanism in a state where the substrate is floated from the substrate holder by the substrate floating mechanism, the substrate moving along the tilt of the substrate holder is the reference Positioning member force that contacts when the position is reached The substrate positioning mechanism is provided.

[9] The macro inspection apparatus according to claim 1,

The outer dimension when the substrate holder is viewed from the front is smaller than the outer dimension when the substrate is viewed from the front.

[10] The macro inspection apparatus according to claim 1,

The apparatus further includes a stationary mechanism for stopping the substrate holder that has moved to the substrate transfer position with respect to the substrate transport mechanism.

[11] The macro inspection apparatus according to claim 10,

The stationary mechanism includes an elastic body that abuts against the substrate holder when the delivery position is reached and attenuates vibration of the substrate holder.

[12] The macro inspection apparatus according to claim 11,

The stationary mechanism further includes a spring fixed at a fixed position so that the axis is substantially perpendicular to the substrate holder, and the elastic body is provided on the spring.

[13] The macro inspection apparatus according to claim 10,

A second notch is formed in a side of the substrate holder;

The stationary mechanism includes an engaging portion that engages with the second notch of the substrate holder when the delivery position is reached.

[14] The macro inspection apparatus according to claim 10,

The stationary mechanism includes clamping means for clamping the substrate holder when reaching the delivery position.

[15] The macro inspection apparatus according to claim 10,

[16] The macro inspection apparatus according to claim 10,

The stationary mechanism moves between a receiving position for receiving the substrate holder that has reached the transfer position, and a retracted position in which the receiving position force is also separated.

[17] The macro inspection apparatus according to claim 16,

The stationary mechanism moves horizontally between the receiving position and the retracted position.

[18] The macro inspection apparatus according to claim 16,

The stationary mechanism rotates between the receiving position and the retracted position.

[19] The macro inspection apparatus according to claim 1,

The substrate holder driving mechanism force supports one side of the substrate holder so that the substrate holder can rotate around a first axis parallel to the one side;

A weight located on the side opposite to the position of the substrate holder with the first axis as the rotation center is provided on the substrate holder.

[20] The macro inspection apparatus according to claim 19,

The holder driving mechanism supports the substrate holder so as to be rotatable about a second axis that is orthogonal to the first axis and parallel to a plane formed by the substrate holder;

The barycentric position of the substrate holder, the intersection between the first axis and the second axis, and the barycentric position of the weight are arranged on a substantially straight line.

[21] The macro inspection apparatus according to claim 19,

A pair of weights are provided so as to approach each other with the second axis interposed therebetween.

[22] Substrate holder stop step for stopping the substrate holder at the delivery position of the substrate to be inspected And

A substrate placing step of placing the substrate on the substrate holder;

A substrate floating step of blowing air to the substrate to lift the substrate on the substrate holder;

A substrate positioning step for positioning the floating substrate at a reference position on the substrate holder;

A substrate fixing step of fixing the substrate after the substrate positioning step to the substrate holder;

A macro inspection method.

[23] The macro inspection method according to claim 22,

In the substrate positioning step, the substrate is positioned from above by positioning the substrate.

[24] The macro inspection method according to claim 22,

A positioning member that contacts when the substrate reaches the reference position is provided on the substrate holder;

In the substrate positioning step, the substrate holder is inclined so that the floating substrate is brought into contact with the positioning member.

[25] The macro inspection method according to claim 22,

In the substrate holder stop step, the substrate holder is stopped by attenuating the vibration of the substrate holder moved to the delivery position.

[26] The macro inspection method according to claim 22,

In the substrate holder stopping step, the substrate holder is stopped by holding the substrate holder moved to the delivery position.

[27] The macro inspection method according to claim 22,

In the substrate holder stop step, the substrate holder is stopped by locking the substrate holder moved to the delivery position at a fixed position.

[28] The macro inspection method according to claim 22,

A rotational moment that balances the rotational moment of the substrate holder with this rotational moment. Offset by the weight to be generated.