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WO2002086949A3 - Transport box for optical masks - Google Patents

Transport box for optical masks Download PDF

Info

Publication number
WO2002086949A3
WO2002086949A3 PCT/EP2002/004305 EP0204305W WO02086949A3 WO 2002086949 A3 WO2002086949 A3 WO 2002086949A3 EP 0204305 W EP0204305 W EP 0204305W WO 02086949 A3 WO02086949 A3 WO 02086949A3
Authority
WO
WIPO (PCT)
Prior art keywords
masks
transport box
mask
angled
longitudinal edge
Prior art date
Application number
PCT/EP2002/004305
Other languages
German (de)
French (fr)
Other versions
WO2002086949A2 (en
Inventor
Eva Krueger-Velthusen
Daniel Declercq
Felix Jaeger
Original Assignee
Acr Automation In Cleanroom
Schott Glas
Zeiss Stiftung
Eva Krueger-Velthusen
Daniel Declercq
Felix Jaeger
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Acr Automation In Cleanroom, Schott Glas, Zeiss Stiftung, Eva Krueger-Velthusen, Daniel Declercq, Felix Jaeger filed Critical Acr Automation In Cleanroom
Priority to AU2002338441A priority Critical patent/AU2002338441A1/en
Publication of WO2002086949A2 publication Critical patent/WO2002086949A2/en
Publication of WO2002086949A3 publication Critical patent/WO2002086949A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

The invention relates to a transport box (10) for optical masks (11) used during the production of semiconductor substrates. Said box is provided with a closable housing composed of an upper part (13) and a lower part (12), between which the masks (11) are held in a parallel manner. A receiving element (21) comprising compartments (26) and supporting a longitudinal edge (57) of the mask (11) is provided in the lower part (12), and a holding device (30) is provided in the upper part (13). The aim of the invention is to enable the masks to be positioned in one such transport box in a vibrationless manner. To this end, the holding device (30) is formed from two angled ridges (31, 32) which are parallel to the corner regions of the masks (11); one side (37) of each angled ridge (31, 32) comprises successively arranged holding-down tongues (38), a longitudinal edge region of the mask being received in the grooves (43) of the same; and the other side (33) of each angled ridge (31, 32) comprises successively arranged lateral guiding elements.
PCT/EP2002/004305 2001-04-21 2002-04-18 Transport box for optical masks WO2002086949A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002338441A AU2002338441A1 (en) 2001-04-21 2002-04-18 Transport box for optical masks

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE20106909.1 2001-04-21
DE20106909U DE20106909U1 (en) 2001-04-21 2001-04-21 Transport box for optical masks

Publications (2)

Publication Number Publication Date
WO2002086949A2 WO2002086949A2 (en) 2002-10-31
WO2002086949A3 true WO2002086949A3 (en) 2003-02-27

Family

ID=7956039

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/004305 WO2002086949A2 (en) 2001-04-21 2002-04-18 Transport box for optical masks

Country Status (3)

Country Link
AU (1) AU2002338441A1 (en)
DE (1) DE20106909U1 (en)
WO (1) WO2002086949A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
EP0769807A2 (en) * 1995-10-19 1997-04-23 Svg Lithography Systems, Inc. Reticle container with corner holding
US5904251A (en) * 1997-05-13 1999-05-18 Zeon Kasei Co. , Ltd. Container for flat panel

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4687097A (en) * 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4697704A (en) * 1986-06-30 1987-10-06 Royal Master Systems, Inc. Storage container for floppy discs
US4696395A (en) * 1986-11-14 1987-09-29 Northrop Corporation Substrate container
US4718548A (en) * 1986-12-19 1988-01-12 Advanced Micro Devices, Inc. Protective housing for a leadless chip carrier or plastic leaded chip carrier package
US4798305A (en) * 1987-11-16 1989-01-17 National Semiconductor Corporation Adjustable shipping tray
JPH10163310A (en) * 1996-11-28 1998-06-19 Komatsu Electron Metals Co Ltd Wafer holding structure of semiconductor wafer packaging container
US5921397A (en) * 1996-12-10 1999-07-13 Empak, Inc. Disk cassette
JP3556480B2 (en) * 1998-08-17 2004-08-18 信越ポリマー株式会社 Precision substrate storage container

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
EP0769807A2 (en) * 1995-10-19 1997-04-23 Svg Lithography Systems, Inc. Reticle container with corner holding
US5904251A (en) * 1997-05-13 1999-05-18 Zeon Kasei Co. , Ltd. Container for flat panel

Also Published As

Publication number Publication date
DE20106909U1 (en) 2002-08-29
WO2002086949A2 (en) 2002-10-31
AU2002338441A1 (en) 2002-11-05

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