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WO2002086949A2 - Transport box for optical masks - Google Patents

Transport box for optical masks Download PDF

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Publication number
WO2002086949A2
WO2002086949A2 PCT/EP2002/004305 EP0204305W WO02086949A2 WO 2002086949 A2 WO2002086949 A2 WO 2002086949A2 EP 0204305 W EP0204305 W EP 0204305W WO 02086949 A2 WO02086949 A2 WO 02086949A2
Authority
WO
WIPO (PCT)
Prior art keywords
transport box
masks
box according
tongues
leg
Prior art date
Application number
PCT/EP2002/004305
Other languages
German (de)
French (fr)
Other versions
WO2002086949A3 (en
Inventor
Eva KRÜGER-VELTHUSEN
Daniel Declercq
Felix JÄGER
Original Assignee
Acr Automation In Cleanroom Gmbh
Schott Glas
Carl Zeiss Stiftung Trading As Schott Glas
Carl Zeiss Stiftung
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Acr Automation In Cleanroom Gmbh, Schott Glas, Carl Zeiss Stiftung Trading As Schott Glas, Carl Zeiss Stiftung filed Critical Acr Automation In Cleanroom Gmbh
Priority to AU2002338441A priority Critical patent/AU2002338441A1/en
Publication of WO2002086949A2 publication Critical patent/WO2002086949A2/en
Publication of WO2002086949A3 publication Critical patent/WO2002086949A3/en

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

Definitions

  • the present invention relates to a transport box for optical masks used in the production of semiconductor substrates according to the preamble of claim 1.
  • Such transport boxes are used in the manufacture, i.e. Coating of optical masks used to be able to transport them from one process to the other and to store them temporarily.
  • the object of the present invention is therefore to create a transport box of the type mentioned at the outset which enables the masks to be positioned without vibration.
  • the measures according to the invention ensure that the holding device not only enables the masks to be held down and aligned, but also enables the masks to be aligned laterally within the transport box. Since the side guides align the masks in the lateral direction when the upper part is placed on the lower part, the masks aligned in this way are then also arranged in a direction transverse and perpendicular to the tongues.
  • the tongues are preferably designed with the features according to claim 2, which leads to a resilient pressing independently of dimensional tolerances.
  • the features according to claim 3 and / or 4 are expediently provided, in the latter case achieving that the optical surface of the masks is touched as little as possible by the holding device.
  • a preferred embodiment of the side guides is provided and ensures that the optical surfaces of the masks are not touched.
  • a latching connection of the upper part placed on the lower part can be achieved. This is done in a simple manner by the connecting slide which can be pushed over and which holds the upper part and lower part together and which is therefore not inadvertently detachable.
  • FIG. 1 shows a schematic longitudinal section of a transport box for optical masks, according to a preferred embodiment of the present invention
  • FIG. 2 in a schematic cross-sectional illustration, the transport box according to FIG. 1 in a section perpendicular to it,
  • FIG. 3 shows a perspective view of a holding device used in the transport box
  • Figure 4 shows an enlarged view of a detail Circular section IV of FIG. 2,
  • 5A u. 5B is a partial perspective view according to arrow V of FIG. 1 of the connecting device of the lower and upper parts of the box in the open and closed state and
  • the transport box 10 shown in the drawing is used to hold a plurality of optical masks 11 used in the production of semiconductor substrates, which are essentially rectangular in shape and consist of a quartz glass of, for example, 6 to 8 mm thick.
  • the transport box 10 has a lower part 12 and an upper part 13 which can be placed on one another in a parting plane 14.
  • the base of the transport box 10 or of the lower part 12 and upper part 13 is approximately rectangular.
  • Lower part 12 and upper part 13 each have a bottom 16 or 18 and circumferential trapezoidal walls 17 and 19, which can be placed one on top of the other at their free open ends.
  • an insert 21 with its base plate 22 is immovably inserted into the lower part 12.
  • the Base plate 22 has two high parallel side walls 23, between which low parallel webs 24 are provided, which form receiving grooves 26 with one another and with the side walls 23, in which lower longitudinal edge regions of the masks 11 are received.
  • the receiving grooves 26 of the insert 21 in the lower part 12 the masks are inserted one behind the other or side by side with the upper part 13 removed.
  • the receiving grooves 26 are closed at their ends by a low wall web 27 according to FIG.
  • the upper part 13 is equipped with a holding device 30 aligning and fixing the masks 11, which essentially consists of two angular strips 31 and 32 arranged at a distance and parallel to one another, which are fastened to the inside of the bottom 18 of the upper part 13 in a symmetrically mirror-image arrangement and are identical are trained.
  • the angle bar 31, 32 has in Figure 3 an uninterrupted leg 33, which is formed at intervals corresponding to the arrangement of the masks 11 with side guides 34 inform of knobs extending transversely to the longitudinal extension of the leg 33.
  • Each knob 34 is facing the free edge of the leg 33 with an insertion bevel 36 ( Figure 1).
  • the approximately to the unbroken leg 33 perforated legs 37 arranged at right angles is provided with resilient tongues 38, between each of which a slot 39 is provided, as a result of which the tongues 38 of the angle bar 31, 32, which is made entirely of plastic, is resiliently movable.
  • Each tongue 38 is held by an arm 41 on a continuous web 42 which is integral with the unbroken leg 33.
  • the front free end of the tongues 38 is designed in the manner of a groove 43 which is provided with inclined surfaces 44 which taper towards one another and are spaced apart.
  • the assignment of the guide knobs 34 to the tongues 38 is such that the guide knobs 34 are arranged approximately in the longitudinal center plane of the tongues 38 or their groove 43.
  • the masks 11 are inserted into the insert 21 of the lower part 12 when the upper part 13 is removed.
  • the side guide knobs 34 of the angle strips 31 and 32 first reach the upright transverse edges 51 and 52 of the corner regions of the masks 11, so that the masks 11 are aligned in the longitudinal direction.
  • the guide knobs 34 rest on the flat end faces 53 of the transverse edges 51, 52.
  • Tongues 38 overlap the upper longitudinal edges 56 in such a way that the inclined surfaces 44, 45 of the groove 43 reach the bevels 54 and 55, which are arranged between the flat end surface of the upper longitudinal edges 56 and the flat optical surfaces 58, 59, in other words the masks 11 are held and centered by the holding device 30 or the tongues 38 in a region, namely the edge chamfers 54 and 55, which lies outside the region of the optical surfaces 58, 59.
  • the transport box 10 is also with a
  • Locking device 61 provided in the region of the parting plane 14 for the latching connection and holding together of the upper part 13 on the lower part 12.
  • the lower part 12 and upper part 13 are provided in the area of the separation plane 14 with a circumferential thickening 62 and 63, which according to FIG. 1 are provided with an undercut widening 64 and 65 on the two transverse sides.
  • the undercuts are designed in the manner of a dovetail.
  • the matching dovetail is provided on the inside of a connecting slide 66 (FIG. 6).
  • the dovetail groove 67 is located on the side slide strips 68.
  • the connecting slide 66 serves to hold the upper part 13 and lower part 12 together in the area of the undercut thickened extensions 64 and 65.
  • the thickenings 62 and 63 are provided at the level of the undercut extensions 64 and 65, each adjacent to the parting plane 14, with a profiled strip 71 which has a run-up or drain surface 72, 73 at both ends and between these two inclined surfaces 72 and 73 has a recess 74.
  • the connecting slide 66 has a web-shaped locking knob 76 in the center on its inside, which extends transversely to the direction of movement of the double arrow A of the connecting slide 66.
  • the connecting slide 66 can be pushed with its locking knobs 76 into the locking recess 74 while holding the lower part and the upper part 12, 13 together.
  • the connecting slide 66 is slid over against the resilient resistance of the tongues 38 resting on the masks 11 and leads to a joint-free closure between the upper part 13 and lower part 12 at the parting plane 14 of the transport bos 10.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)

Abstract

The invention relates to a transport box (10) for optical masks (11) used during the production of semiconductor substrates. Said box is provided with a closable housing composed of an upper part (13) and a lower part (12), between which the masks (11) are held in a parallel manner. A receiving element (21) comprising compartments (26) and supporting a longitudinal edge (57) of the mask (11) is provided in the lower part (12), and a holding device (30) is provided in the upper part (13). The aim of the invention is to enable the masks to be positioned in one such transport box in a vibrationless manner. To this end, the holding device (30) is formed from two angled ridges (31, 32) which are parallel to the corner regions of the masks (11); one side (37) of each angled ridge (31, 32) comprises successively arranged holding-down tongues (38), a longitudinal edge region of the mask being received in the grooves (43) of the same; and the other side (33) of each angled ridge (31, 32) comprises successively arranged lateral guiding elements.

Description

Transportbox für optische Masken Transport box for optical masks
Beschreibungdescription
Die vorliegende Erfindung bezieht sich auf eine Transportbox für bei der Herstellung von Halbleitersubstraten verwendeten optischen Masken nach dem Oberbegriff des Anspruchs 1.The present invention relates to a transport box for optical masks used in the production of semiconductor substrates according to the preamble of claim 1.
Derartige Transportboxen werden bei der Herstellung, d.h. Beschichtung von optischen Masken verwendet, um diese von einem zum anderen Verfahrensgang transportieren und Zwischenlagern zu können.Such transport boxes are used in the manufacture, i.e. Coating of optical masks used to be able to transport them from one process to the other and to store them temporarily.
Bekannte Transportboxen sind im Oberteil mit einer Haltevorrichtung inform von im Deckel des Oberteils vorgesehenen Anformungen versehen, die den Nachteil besitzen, dass ein nur labiles Positionieren der Masken innerhalb der Transportbox gegeben ist.Known transport boxes are provided in the upper part with a holding device inform of the projections provided in the cover of the upper part, which have the disadvantage that the masks are only positioned in an unstable manner within the transport box.
Aufgabe der vorliegenden Erfindung ist es deshalb, eine Transportbox der eingangs genannten Art zu schaffen, die ein erschütterungsfreies Positionieren der Masken ermöglicht.The object of the present invention is therefore to create a transport box of the type mentioned at the outset which enables the masks to be positioned without vibration.
Zur Lösung dieser Aufgabe sind bei einer Transportbox der genannten Art die im Anspruch 1 angegebenen Merkmale vorgesehen.To solve this problem, the are in a transport box mentioned type provided the features specified in claim 1.
Durch die erfindungsgemäßen Maßnahmen ist erreicht, dass die Haltevorrichtung nicht nur ein geführtes und ausgerichtetes Niederhalten der Masken sondern auch eine seitliche Ausrichtung der Masken innerhalb der Transportbox ermöglicht. Da die Seitenführungen beim Aufsetzen des Oberteils auf das Unterteil die Masken in seitlicher Richtung ausrichten, sind danach die so ausgerichteten Masken auch in einer Richtung quer und senkrecht hierzu von den Zungen geordnet gehalten.The measures according to the invention ensure that the holding device not only enables the masks to be held down and aligned, but also enables the masks to be aligned laterally within the transport box. Since the side guides align the masks in the lateral direction when the upper part is placed on the lower part, the masks aligned in this way are then also arranged in a direction transverse and perpendicular to the tongues.
Bevorzugt sind die Zungen mit den Merkmalen nach Anspruch 2 ausgestaltet, was zu einem federnden Andrücken unabhängig von Abmessungstoleranzen führt. Dabei sind zweckmäßiger Weise die Merkmale nach Anspruch 3 und/oder 4 vorgesehen, wobei im letzteren Fall erreicht, dass die optische Fläche der Masken sowenig wie möglich von der Haltevorrichtung berührt wird.The tongues are preferably designed with the features according to claim 2, which leads to a resilient pressing independently of dimensional tolerances. The features according to claim 3 and / or 4 are expediently provided, in the latter case achieving that the optical surface of the masks is touched as little as possible by the holding device.
Mit den Merkmalen nach Anspruch 5 und/oder 6 ist eine bevorzugte Ausgestaltung der Seitenführungen gegeben und erreicht, dass die optischen Flächen der Masken nicht berührt werden.With the features according to claim 5 and / or 6, a preferred embodiment of the side guides is provided and ensures that the optical surfaces of the masks are not touched.
Mit den Merkmalen gemäß Anspruch 6 ist eine verrastende Verbindung des auf das Unterteil aufgesetzten Oberteils erreichbar. Dies erfolgt in einfacher Weise durch den verrastend überschiebbaren Verbindungsschieber, der Oberteil und Unterteil zusammenhält und der damit nicht unbeabsichtigt lösbar ist.With the features according to claim 6, a latching connection of the upper part placed on the lower part can be achieved. This is done in a simple manner by the connecting slide which can be pushed over and which holds the upper part and lower part together and which is therefore not inadvertently detachable.
Eine zweckmäßige Ausgestaltung dieser Rastverbindung ergibt sich nach den Merkmalen des Anspruch 7. Sind dabei die Merkmale nach Anspruch 8 vorgesehen, ist eine einfache und federnde Ausgestaltung der Rastnoppe gegeben.An expedient embodiment of this latching connection results from the features of claim 7. If the features are provided according to claim 8, the latching knob is simple and resilient.
Weitere Einzelheiten der Erfindung sind der folgenden Beschreibung zu entnehmen, in der die Erfindung anhand des in der Zeichnung dargestellten Ausführungsbeispieles näher beschrieben und erläutert ist. Es zeigen:Further details of the invention can be found in the following description, in which the invention is described and explained in more detail with reference to the embodiment shown in the drawing. Show it:
Figur 1 in schematischer längsgeschnittener Darstellung eine Transportbox für optische Masken, gemäß einem bevorzugten Ausführungsbeispiel vorliegender Erfindung,1 shows a schematic longitudinal section of a transport box for optical masks, according to a preferred embodiment of the present invention,
Figur 2 in schematischer quergeschnittener Darstellung, die Transportbox nach Figur 1 in einem Schnitt senkrecht dazu,FIG. 2 in a schematic cross-sectional illustration, the transport box according to FIG. 1 in a section perpendicular to it,
Figur 3 in perspektivischer Darstellung eine bei der Transportbox verwendete Haltevorrichtung,FIG. 3 shows a perspective view of a holding device used in the transport box,
Figur 4 in vergrößerter Darstellung eine Einzelheit gemäß Kreisausschnitt IV der Figur 2,Figure 4 shows an enlarged view of a detail Circular section IV of FIG. 2,
Figurencharacters
5A u. 5B eine ausschnittsweise perspektivische Ansicht gemäß Pfeil V der Figur 1 der Verbindungsvorrichtung von Boxenunterteil und -Oberteil in geöffnetem bzw. geschlossenem Zustand und5A u. 5B is a partial perspective view according to arrow V of FIG. 1 of the connecting device of the lower and upper parts of the box in the open and closed state and
Figur 6 in perspektivischer Innansicht denFigure 6 in a perspective interior view
Verbindungsschieber nach Figuren 5A bzw. 5B.Connection slide according to Figures 5A and 5B.
Die in der Zeichnung dargestellte Transportbox 10 dient zum Aufnehmen von mehreren bei der Herstellung von Halbleitersubstraten verwendeten optischen Masken 11, die im wesentlichen rechteckförmiger Grundform sind und aus einem Quarzglas von beispielsweise 6 bis 8 mm Dicke bestehen.The transport box 10 shown in the drawing is used to hold a plurality of optical masks 11 used in the production of semiconductor substrates, which are essentially rectangular in shape and consist of a quartz glass of, for example, 6 to 8 mm thick.
Die Transportbox 10 besitzt ein Unterteil 12 und ein Oberteil 13, die in einer Trennebene 14 aufeinander setzbar sind. Die Grundfläche der Transportbox 10 bzw. von Unterteil 12 und Oberteil 13 ist etwa rechteckförmig. Unterteil 12 und Oberteil 13 besitzen jeweils einen Boden 16 bzw. 18 und umlaufende trapezförmige Wände 17 bzw. 19, die an ihren freien offenen Enden aufeinander setzbar sind.The transport box 10 has a lower part 12 and an upper part 13 which can be placed on one another in a parting plane 14. The base of the transport box 10 or of the lower part 12 and upper part 13 is approximately rectangular. Lower part 12 and upper part 13 each have a bottom 16 or 18 and circumferential trapezoidal walls 17 and 19, which can be placed one on top of the other at their free open ends.
In das Unterteil 12 ist gemäß den Figuren 1 und 2 ein Einsatz 21 mit seiner Grundplatte 22 unverrückbar eingesetzt. Die Grundplatte 22 besitzt zwei hohe parallele Seitenwände 23, zwischen denen niedrige parallele Stege 24 vorgesehen sind, die untereinander und mit den Seitenwänden 23 Aufnahmenuten 26 bilden, in denen untere Längsrandbereiche der Masken 11 aufgenommen sind. In die Aufnahmenuten 26 des Einsatzes 21 im Unterteil 12 werden die Masken bei abgenommenen Oberteil 13 hintereinander bzw. nebeneinander eingesetzt. Die Aufnahmenuten 26 sind gemäß Figur 1 an ihren Enden von einem niedrigen Wandsteg 27 verschlossen.According to FIGS. 1 and 2, an insert 21 with its base plate 22 is immovably inserted into the lower part 12. The Base plate 22 has two high parallel side walls 23, between which low parallel webs 24 are provided, which form receiving grooves 26 with one another and with the side walls 23, in which lower longitudinal edge regions of the masks 11 are received. In the receiving grooves 26 of the insert 21 in the lower part 12, the masks are inserted one behind the other or side by side with the upper part 13 removed. The receiving grooves 26 are closed at their ends by a low wall web 27 according to FIG.
Das Oberteil 13 ist mit einer die Masken 11 ausrichtetenden und fixierenden Haltevorrichtung 30 bestückt, die im wesentlichen aus zwei im Abstand und parallel zueinander angeordneten Winkelleisten 31 und 32 besteht, die an der Innenseite des Bodens 18 des Oberteils 13 in symmetrisch spiegelbildlichen Anordnung befestigt und identisch ausgebildet sind.The upper part 13 is equipped with a holding device 30 aligning and fixing the masks 11, which essentially consists of two angular strips 31 and 32 arranged at a distance and parallel to one another, which are fastened to the inside of the bottom 18 of the upper part 13 in a symmetrically mirror-image arrangement and are identical are trained.
Die Winkelleiste 31, 32 besitzt in Figur 3 einen ununterbrochenen Schenkel 33, der in Abständen entsprechend der Anordnung der Masken 11 mit Seitenführungen 34 inform von quer zur Längserstreckung des Schenkels 33 verlaufenden Noppen gebildet ist. Jede Noppe 34 ist der freien Kante des Schenkels 33 zugewandt mit einer Einführungsschräge 36 (Figur 1) versehen.The angle bar 31, 32 has in Figure 3 an uninterrupted leg 33, which is formed at intervals corresponding to the arrangement of the masks 11 with side guides 34 inform of knobs extending transversely to the longitudinal extension of the leg 33. Each knob 34 is facing the free edge of the leg 33 with an insertion bevel 36 (Figure 1).
Der zum undurchbrochenen Schenkel 33 im wesentlichen etwa rechtwinklig angeordnete durchbrochene Schenkel 37 ist mit federnden Zungen 38 versehen, zwischen denen jeweils ein Schlitz 39 vorgesehen ist, wodurch die Zungen 38 der insgesamt aus einem Kunststoff hergestellten Winkelleiste 31, 32 federnd beweglich ist. Jede Zunge 38 ist über einen Arm 41 an einem durchgehenden Steg 42, der mit dem undurchbrochenen Schenkel 33 einstückig ist, gehalten. Das vordere freie Ende der Zungen 38 ist nach Art einer Rinne 43 ausgebildet, die mit konisch aufeinander zulaufenden und im Abstand angeordneten Schrägflächen 44 versehen ist. Die Zuordnung der Führungsnoppen 34 zu den Zungen 38 ist derart, dass die Führungsnoppen 34 etwa in der Längsmittelebene der Zungen 38 bzw. deren Rinne 43 angeordnet sind.The approximately to the unbroken leg 33 perforated legs 37 arranged at right angles is provided with resilient tongues 38, between each of which a slot 39 is provided, as a result of which the tongues 38 of the angle bar 31, 32, which is made entirely of plastic, is resiliently movable. Each tongue 38 is held by an arm 41 on a continuous web 42 which is integral with the unbroken leg 33. The front free end of the tongues 38 is designed in the manner of a groove 43 which is provided with inclined surfaces 44 which taper towards one another and are spaced apart. The assignment of the guide knobs 34 to the tongues 38 is such that the guide knobs 34 are arranged approximately in the longitudinal center plane of the tongues 38 or their groove 43.
Wie eingangs erwähnt, werden die Masken 11 bei abgenommenem Oberteil 13 in den Einsatz 21 des Unterteils 12 eingesetzt. Mit dem Aufsetzen des Oberteils 13 gelangen zunächst die Seitenführungsnoppen 34 der Winkelleisten 31 und 32 an die aufrechten Querränder 51 und 52 der Eckbereiche der Masken 11, so dass die Masken 11 in Längsrichtung ausgerichtet werden. Die Führungsnoppen 34 liegen dabei an den ebenen Stirnflächen 53 der Querränder 51, 52 an. Bei weiterem Aufsetzen des Oberteils 13 auf das Unterteil 12 gelangen die Zungen 38 auf die oberen Längsränder 56 in den Eckbereiche der Masken 11 und drücken die Masken 11 aufgrund der federnden Ausgestaltung der Zungen 38 mit ihren unteren Längsrändern 57 nach unten in den Einsatz 21. Die Zungen 38 überdecken die oberen Längsränder 56 derart, dass die Schrägflächen 44 , 45 der Rinne 43 auf Randfasen 54 und 55, die zwischen der ebenen Stirnfläche der oberen Längsränder 56 und den flächigen optischen Oberflächen 58, 59 angeordnet sind, gelangen, mit anderen Worten, die Masken 11 werden von der Haltevorrichtung 30 bzw. den Zungen 38 in einem Bereich, nämlich den Randfasen 54 und 55, der außerhalb des Bereichs der optischen Flächen 58, 59 liegt, gehalten und zentriert.As mentioned at the beginning, the masks 11 are inserted into the insert 21 of the lower part 12 when the upper part 13 is removed. When the upper part 13 is put on, the side guide knobs 34 of the angle strips 31 and 32 first reach the upright transverse edges 51 and 52 of the corner regions of the masks 11, so that the masks 11 are aligned in the longitudinal direction. The guide knobs 34 rest on the flat end faces 53 of the transverse edges 51, 52. When the upper part 13 is placed further on the lower part 12, the tongues 38 reach the upper longitudinal edges 56 in the corner regions of the masks 11 and, due to the resilient configuration of the tongues 38, press the masks 11 with their lower longitudinal edges 57 downward into the insert 21 Tongues 38 overlap the upper longitudinal edges 56 in such a way that the inclined surfaces 44, 45 of the groove 43 reach the bevels 54 and 55, which are arranged between the flat end surface of the upper longitudinal edges 56 and the flat optical surfaces 58, 59, in other words the masks 11 are held and centered by the holding device 30 or the tongues 38 in a region, namely the edge chamfers 54 and 55, which lies outside the region of the optical surfaces 58, 59.
Die Transportbox 10 ist ferner mit einerThe transport box 10 is also with a
Rastverschlussvorrichtung 61 im Bereich der Trennungsebene 14 zum verrastenden Verbinden und Zusammenhalten des Oberteils 13 auf dem Unterteil 12 versehen. Wie den Figuren 5A und 5B zu entnehmen ist, sind Unterteil 12 und Oberteil 13 im Bereich der Trennungsebene 14 mit einer umlaufenden Verdickung 62 bzw. 63 versehen, die gemäß Figur 1 an den beiden Querseiten mit einer hinterschnittenen Verbreiterung 64 bzw. 65 versehen sind. Die Hinterschneidungen sind nach Art eines Schwalbenschwanzes ausgebildet. Der dazu passende Schwalbenschwanz ist an der Innenseite eines Verbindungsschiebers 66 (Figur 6) vorgesehen. Die Schwalbenschwanznut 67 befindet sich an seitlichen Schieberleisten 68. Gemäß den Figuren 5A und 5B dient der Verbindungsschieber 66 zum überschiebenden Zusammenhalten von Oberteil 13 und Unterteil 12 im Bereich der hinterschnittenen Verdickungsverbreiterungen 64 und 65. Zur Verrastung der Rastverschlussvorrichtung 61 sind die Verdickungen 62 und 63 in Höhe der hinterschnittenen Verbreiterungen 64 und 65 jeweils der Trennebene 14 benachbart mit einer Profilleiste 71 versehen, die an beiden Enden eine Auflauf- bzw. Abiauffläche 72, 73 und zwischen diesen beiden Schrägflächen 72 und 73 eine Rastmulde 74 besitzt. Zum Einrasten in die Rastmulde 74 besitzt der Verbindungsschieber 66 an seiner Innenseite mittig einen stegförmigen Rastnoppen 76, der quer zur Bewegungsrichtung des Doppelpfeils A des Verbindungsschiebers 66 verläuft. Dem leistenförmigen Rastnoppen 76 ist an dessen beiden Enden jeweils ein Schlitz 77 in der Deckwand 78 des Verbindungsschiebers 66 benachbart, so dass der mit dem Rastnoppen 76 versehen Bereich des Vebindungsschiebers 66 elastisch in Richtung senkrecht zur Deckwandfläche ausgebildet ist. Auf diese Weise kann der Verbindungsschieber 66 beim Zusammenhalten von Unterteil und Oberteil 12, 13 mit seinem Rastnoppen 76 in die Rastmulde 74 verrastend geschoben werden.Locking device 61 provided in the region of the parting plane 14 for the latching connection and holding together of the upper part 13 on the lower part 12. As can be seen from FIGS. 5A and 5B, the lower part 12 and upper part 13 are provided in the area of the separation plane 14 with a circumferential thickening 62 and 63, which according to FIG. 1 are provided with an undercut widening 64 and 65 on the two transverse sides. The undercuts are designed in the manner of a dovetail. The matching dovetail is provided on the inside of a connecting slide 66 (FIG. 6). The dovetail groove 67 is located on the side slide strips 68. According to FIGS. 5A and 5B, the connecting slide 66 serves to hold the upper part 13 and lower part 12 together in the area of the undercut thickened extensions 64 and 65. To lock the snap closure device 61, the thickenings 62 and 63 are provided at the level of the undercut extensions 64 and 65, each adjacent to the parting plane 14, with a profiled strip 71 which has a run-up or drain surface 72, 73 at both ends and between these two inclined surfaces 72 and 73 has a recess 74. For locking into the locking trough 74, the connecting slide 66 has a web-shaped locking knob 76 in the center on its inside, which extends transversely to the direction of movement of the double arrow A of the connecting slide 66. At the two ends of the strip-shaped locking knob 76 there is a slot 77 in the top wall 78 of the connecting slide 66, so that the area of the connecting slide 66 provided with the locking knob 76 is formed elastically in the direction perpendicular to the top wall surface. In this way, the connecting slide 66 can be pushed with its locking knobs 76 into the locking recess 74 while holding the lower part and the upper part 12, 13 together.
Das Überscheiben des Verbindungsschiebers 66 erfolgt gegen den federnden Widerstand der auf den Masken 11 aufliegenden Zungen 38 und führt zum fugenfreien Verschluss zwischen Oberteil 13 und Unterteil 12 an der Trennebene 14 der Transportbos 10. The connecting slide 66 is slid over against the resilient resistance of the tongues 38 resting on the masks 11 and leads to a joint-free closure between the upper part 13 and lower part 12 at the parting plane 14 of the transport bos 10.

Claims

Schutzansprüche protection claims
1. Transportbox (10) für bei der Herstellung von Halbleitersubstraten verwendeten optischen Masken (11) , mit einem verschließbaren Gehäuse, das aus einem Oberteil (13) und einem Unterteil (12) zusammensetzbar ist, zwischen denen die Masken (11), in paralleler Anordnung gehalten sind, wobei im Unterteil (12) eine mit Fächern (26) versehene und einen Längsrand (57) der Maske (11) abstützende Aufnahme (21) und im Oberteil1. Transport box (10) for optical masks (11) used in the production of semiconductor substrates, with a closable housing which can be assembled from an upper part (13) and a lower part (12), between which the masks (11), in parallel Arrangement are held, in the lower part (12) provided with compartments (26) and a longitudinal edge (57) of the mask (11) supporting the receptacle (21) and in the upper part
(13) eine Haltevorrichtung (30) vorgesehen ist, dadurch gekennzeichnet, dass die Haltevorrichtung (30) durch zwei parallele an den Eckbereichen der Masken (11) ansetzende Winkelleisten (31, 32) gebildet ist und dass der eine Schenkel (37) jeder Winkelleiste (31, 32) hintereinanderliegende Niederhaltezungen (38) besitzt, in deren Nuten (43) ein Maskenlängsrandbereich (56) aufgenommen ist, und dass der andere Schenkel (33) jeder Winkelleiste (31, 32) hintereinanderliegende Seitenführungen (34) aufweist.A holding device (30) (13) is provided, as in d urch in that the holding device (30) by two parallel to the corner areas of the mask-faceted angle bars (11) (31, 32) is formed and that the one leg (37) each angle bar (31, 32) has successive hold-down tongues (38), in the grooves (43) of which a longitudinal edge area of the mask (56) is received, and that the other leg (33) of each angle bar (31, 32) has side guides (34) located one behind the other.
2. Transportbox nach Anspruch 1, dadurch gekennzeichnet, dass die Zungen (38) des einen Schenkels (37) der Winkelleiste (31, 32) federnd ausgebildet sind.2. Transport box according to claim 1, characterized in that the tongues (38) of one leg (37) of the angle bar (31, 32) are resilient.
3. Transportbox nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Zungen (38) Aufnahmerinnen (43) für die Masken (11) bilden.3. Transport box according to claim 1 or 2, characterized characterized in that the tongues (38) form receiving grooves (43) for the masks (11).
4. Transportbox nach Anspruch 3,' dadurch gekennzeichnet, dass die Zungen (38) längsseitige Schrägflächen (44), besitzen, deren Neigung und Abstand voneinander derart sind, dass sie den Masken (11) mit ihren beidseitigen Randfasen (54, 55) als Auflage dienen.4. Transport box according to claim 3, ' characterized in that the tongues (38) have longitudinal inclined surfaces (44), the inclination and spacing of which are such that they are the masks (11) with their bilateral bevels (54, 55) Serve edition.
5. Transportbox nach mindestens einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass die Seitenführungen (34) des anderen Schenkels (33) der Winkelleisten (31, 32) mit Einführungsschrägen (36) versehen sind.5. Transport box according to at least one of claims 1 to 4, characterized in that the side guides (34) of the other leg (33) of the angle strips (31, 32) are provided with chamfers (36).
6. Transportbox nach Anspruch 1 oder 5, dadurch gekennzeichnet, dass die Seitenführungen (34) durch Stege gebildet sind, die den Stirnflächen (51, 52) der Masken (11) zugewandt sind.6. Transport box according to claim 1 or 5, characterized in that the side guides (34) are formed by webs which face the end faces (51, 52) of the masks (11).
7. Transportbox nach mindestens einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass durch veschließbaren Ausgestaltung der Transportbox (10) das Oberteil (13) und das Unterteil (12) an zwei gegenüberliegenden Bereichen und an Bereichen der aneinanderliegenden Ränder längshinterschnittene Verdickungen (62, 63) vorgesehen sind, über die ein Verbindungsschieber (66) verrastend schiebbar ist. 7. Transport box according to at least one of the preceding claims, characterized in that by means of a closable design of the transport box (10) the upper part (13) and the lower part (12) on two opposite areas and on areas of the adjoining edges thickened portions (62, 63) are provided, via which a connecting slide (66) can be pushed in a latching manner.
8. Transportbox nach Anspruch 6, dadurch gekennzeichnet, dass die Verdickungen (62, 63) mit einem Rastprofil (71) versehen sind, über das eine zur Bewegungsrichtung quer verlaufende Rastnoppe (76) an der Innenseite des Verbindungsschiebers (66) ver- und entrastend bewegbar ist.8. Transport box according to claim 6, characterized in that the thickened portions (62, 63) are provided with a latching profile (71) via which a latching knob (76) extending transversely to the direction of movement locks and unlatches on the inside of the connecting slide (66) is movable.
9. Transportbox nach Anspruch 7, dadurch gekennzeichnet, dass der mit der Rastnoppe (76) versehen Bereich des Verbindungsschiebers (66) mit Längsschlitzen (77) versehen ist. 9. Transport box according to claim 7, characterized in that the area of the connecting slide (66) provided with the locking knob (76) is provided with longitudinal slots (77).
PCT/EP2002/004305 2001-04-21 2002-04-18 Transport box for optical masks WO2002086949A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2002338441A AU2002338441A1 (en) 2001-04-21 2002-04-18 Transport box for optical masks

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE20106909.1 2001-04-21
DE20106909U DE20106909U1 (en) 2001-04-21 2001-04-21 Transport box for optical masks

Publications (2)

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WO2002086949A2 true WO2002086949A2 (en) 2002-10-31
WO2002086949A3 WO2002086949A3 (en) 2003-02-27

Family

ID=7956039

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Application Number Title Priority Date Filing Date
PCT/EP2002/004305 WO2002086949A2 (en) 2001-04-21 2002-04-18 Transport box for optical masks

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Country Link
AU (1) AU2002338441A1 (en)
DE (1) DE20106909U1 (en)
WO (1) WO2002086949A2 (en)

Citations (4)

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US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
EP0769807A2 (en) * 1995-10-19 1997-04-23 Svg Lithography Systems, Inc. Reticle container with corner holding
US5904251A (en) * 1997-05-13 1999-05-18 Zeon Kasei Co. , Ltd. Container for flat panel

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US4687097A (en) * 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4697704A (en) * 1986-06-30 1987-10-06 Royal Master Systems, Inc. Storage container for floppy discs
US4696395A (en) * 1986-11-14 1987-09-29 Northrop Corporation Substrate container
US4718548A (en) * 1986-12-19 1988-01-12 Advanced Micro Devices, Inc. Protective housing for a leadless chip carrier or plastic leaded chip carrier package
US4798305A (en) * 1987-11-16 1989-01-17 National Semiconductor Corporation Adjustable shipping tray
JPH10163310A (en) * 1996-11-28 1998-06-19 Komatsu Electron Metals Co Ltd Wafer holding structure of semiconductor wafer packaging container
US5921397A (en) * 1996-12-10 1999-07-13 Empak, Inc. Disk cassette
JP3556480B2 (en) * 1998-08-17 2004-08-18 信越ポリマー株式会社 Precision substrate storage container

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
EP0769807A2 (en) * 1995-10-19 1997-04-23 Svg Lithography Systems, Inc. Reticle container with corner holding
US5904251A (en) * 1997-05-13 1999-05-18 Zeon Kasei Co. , Ltd. Container for flat panel

Also Published As

Publication number Publication date
DE20106909U1 (en) 2002-08-29
WO2002086949A3 (en) 2003-02-27
AU2002338441A1 (en) 2002-11-05

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