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WO1999035668A3 - Analyseurs d'energie de particules chargees - Google Patents

Analyseurs d'energie de particules chargees Download PDF

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Publication number
WO1999035668A3
WO1999035668A3 PCT/GB1999/000009 GB9900009W WO9935668A3 WO 1999035668 A3 WO1999035668 A3 WO 1999035668A3 GB 9900009 W GB9900009 W GB 9900009W WO 9935668 A3 WO9935668 A3 WO 9935668A3
Authority
WO
WIPO (PCT)
Prior art keywords
electrons
axis
analyser
sample
electrodes
Prior art date
Application number
PCT/GB1999/000009
Other languages
English (en)
Other versions
WO1999035668A2 (fr
Inventor
Martin Prutton
Gomati Mohamed Mochtar El
Marcus Jacka
Original Assignee
Univ York
Shimadzu Res Lab Europe Ltd
Martin Prutton
Gomati Mohamed Mochtar El
Marcus Jacka
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ York, Shimadzu Res Lab Europe Ltd, Martin Prutton, Gomati Mohamed Mochtar El, Marcus Jacka filed Critical Univ York
Priority to EP99900537A priority Critical patent/EP1051735A2/fr
Priority to AU19755/99A priority patent/AU1975599A/en
Priority to JP2000527963A priority patent/JP2002501285A/ja
Publication of WO1999035668A2 publication Critical patent/WO1999035668A2/fr
Publication of WO1999035668A3 publication Critical patent/WO1999035668A3/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46—Static spectrometers
    • H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/24485—Energy spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

L'invention concerne un analyseur d'énergie électronique, comprenant une colonne électronique (10) destinée à exciter un échantillon (11) placé sur un porte-échantillon (12). L'excitation de cet échantillon (11) provoque une émission d'électrons, certains de ces électrons pénétrant par l'intermédiaire d'une ouverture (13) dans ledit analyseur, à l'intérieur duquel ils sont soumis à un champ sensiblement hyperbolique défini par rapport à l'axe des x et à l'axe des y, chacun de ces axes se trouvant à son potentiel sensiblement constant et s'approchant par défaut d'un petit nombre d'électrodes, E1 à E6. Les électrons sont détournés par ce champ sensiblement hyperbolique de manière à heurter un détecteur (14), lequel est placé sensiblement sur l'axe des x et comprend par exemple une galette de microcanaux et un écran fluorescent, à proximité desquels les électrons sont focalisés. Les électrodes E1 à E6 sont placées de manière à former un plan incliné par rapport à l'axe général de l'analyseur (c'est-à-dire l'axe des x parallèle au détecteur (14)), l'électrode E6 étant inclinée de manière identique, mais dans le sens opposé. L'analyseur d'énergie électronique de cette invention présente l'avantage de pouvoir détecter les électrons sur une vaste gamme d'énergies, en parallèle.
PCT/GB1999/000009 1998-01-12 1999-01-12 Analyseurs d'energie de particules chargees WO1999035668A2 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP99900537A EP1051735A2 (fr) 1998-01-12 1999-01-12 Analyseurs d'energie de particules chargees
AU19755/99A AU1975599A (en) 1998-01-12 1999-01-12 Charged particle energy analysers
JP2000527963A JP2002501285A (ja) 1998-01-12 1999-01-12 荷電粒子エネルギ・アナライザ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
GBGB9800488.0A GB9800488D0 (en) 1998-01-12 1998-01-12 Electron energy analyser
GB9800488.0 1998-01-12

Publications (2)

Publication Number Publication Date
WO1999035668A2 WO1999035668A2 (fr) 1999-07-15
WO1999035668A3 true WO1999035668A3 (fr) 1999-09-23

Family

ID=10825086

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/GB1999/000009 WO1999035668A2 (fr) 1998-01-12 1999-01-12 Analyseurs d'energie de particules chargees

Country Status (5)

Country Link
EP (1) EP1051735A2 (fr)
JP (1) JP2002501285A (fr)
AU (1) AU1975599A (fr)
GB (1) GB9800488D0 (fr)
WO (1) WO1999035668A2 (fr)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1183527A1 (fr) * 1999-06-16 2002-03-06 Shimadzu Research Laboratory (Europe) Ltd. Analyseurs d'energie de particules chargees electriquement
GB2390740A (en) * 2002-04-23 2004-01-14 Thermo Electron Corp Spectroscopic analyser for surface analysis and method therefor
US7635842B2 (en) 2007-02-19 2009-12-22 Kla-Tencor Corporation Method and instrument for chemical defect characterization in high vacuum
US7855362B1 (en) 2007-10-25 2010-12-21 Kla-Tencor Technologies Corporation Contamination pinning for auger analysis
US8237120B1 (en) * 2008-09-24 2012-08-07 Kla-Tencor Corporation Transverse focusing action in hyperbolic field detectors
GB201011716D0 (en) 2010-07-13 2010-08-25 Shimadzu Corp Charged particle energy analysers and methods of operating charged particle energy analysers

Non-Patent Citations (3)

* Cited by examiner, † Cited by third party
Title
HAMILTON D C ET AL: "NEW HIGH-RESOLUTION ELECTROSTATIC ION MASS ANALYZER USING TIME OF FLIGHT", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 61, no. 10 PART 02, 1 October 1990 (1990-10-01), pages 3104 - 3106, XP000171706, ISSN: 0034-6748 *
LEAL-QUIROS E ET AL: "A HYPERBOLIC ENERGY ANALYZER", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 61, no. 6, 1 June 1990 (1990-06-01), pages 1708 - 1712, XP000166153, ISSN: 0034-6748 *
MOBIUS E ET AL: "HIGH MASS RESOLUTION ISOCHRONOUS TIME-OF-FLIGHT SPECTROGRAPH FOR THREE-DIMENSIONAL SPACE PLASMA MEASUREMENTS", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 61, no. 11, 1 November 1990 (1990-11-01), pages 3609 - 3612, XP000174341, ISSN: 0034-6748 *

Also Published As

Publication number Publication date
AU1975599A (en) 1999-07-26
EP1051735A2 (fr) 2000-11-15
JP2002501285A (ja) 2002-01-15
WO1999035668A2 (fr) 1999-07-15
GB9800488D0 (en) 1998-03-04

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