WO1999035668A3 - Charged particle energy analysers - Google Patents
Charged particle energy analysers Download PDFInfo
- Publication number
- WO1999035668A3 WO1999035668A3 PCT/GB1999/000009 GB9900009W WO9935668A3 WO 1999035668 A3 WO1999035668 A3 WO 1999035668A3 GB 9900009 W GB9900009 W GB 9900009W WO 9935668 A3 WO9935668 A3 WO 9935668A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrons
- axis
- analyser
- sample
- electrodes
- Prior art date
Links
- 239000002245 particle Substances 0.000 title 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 abstract 1
- 230000005284 excitation Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/44—Energy spectrometers, e.g. alpha-, beta-spectrometers
- H01J49/46—Static spectrometers
- H01J49/48—Static spectrometers using electrostatic analysers, e.g. cylindrical sector, Wien filter
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/244—Detection characterized by the detecting means
- H01J2237/24485—Energy spectrometers
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
An electron energy analyser has an electron column (10) to excite a sample (11) on a sample holder (12). Excitation of the sample (11) causes electrons to be emitted, and some of the electrons enter the analyser through an aperture (13), where they are subjected to a substantially hyperbolic field defined with reference to an x-axis and a y-axis, each of which axes is at a substantially constant potential, and which is approximated with a small number of electrodes E1 to E6. The electrons are deflected by the substantially hyperbolic field to impinge upon a detector (14) which is arranged substantially along the x-axis and comprises, for example, a microchannel plate and phosphor screen, in the vicinity of which the electrons are focussed. The electrodes E1 to E5 are arranged in a plane which is inclined to the general axis of the analyser (i.e. the x-axis parallel to the detector (14)), and the electrode E6 is similarly inclined, but in an opposite direction. The prime feature of the electron energy analyser is the ability to detect electrons with a large range of energies, in parallel.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP99900537A EP1051735A2 (en) | 1998-01-12 | 1999-01-12 | Charged particle energy analysers |
| AU19755/99A AU1975599A (en) | 1998-01-12 | 1999-01-12 | Charged particle energy analysers |
| JP2000527963A JP2002501285A (en) | 1998-01-12 | 1999-01-12 | Charged particle energy analyzer |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GBGB9800488.0A GB9800488D0 (en) | 1998-01-12 | 1998-01-12 | Electron energy analyser |
| GB9800488.0 | 1998-01-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1999035668A2 WO1999035668A2 (en) | 1999-07-15 |
| WO1999035668A3 true WO1999035668A3 (en) | 1999-09-23 |
Family
ID=10825086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/GB1999/000009 WO1999035668A2 (en) | 1998-01-12 | 1999-01-12 | Charged particle energy analysers |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP1051735A2 (en) |
| JP (1) | JP2002501285A (en) |
| AU (1) | AU1975599A (en) |
| GB (1) | GB9800488D0 (en) |
| WO (1) | WO1999035668A2 (en) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1183527A1 (en) * | 1999-06-16 | 2002-03-06 | Shimadzu Research Laboratory (Europe) Ltd. | Electrically-charged particle energy analysers |
| GB2390740A (en) * | 2002-04-23 | 2004-01-14 | Thermo Electron Corp | Spectroscopic analyser for surface analysis and method therefor |
| US7635842B2 (en) | 2007-02-19 | 2009-12-22 | Kla-Tencor Corporation | Method and instrument for chemical defect characterization in high vacuum |
| US7855362B1 (en) | 2007-10-25 | 2010-12-21 | Kla-Tencor Technologies Corporation | Contamination pinning for auger analysis |
| US8237120B1 (en) * | 2008-09-24 | 2012-08-07 | Kla-Tencor Corporation | Transverse focusing action in hyperbolic field detectors |
| GB201011716D0 (en) | 2010-07-13 | 2010-08-25 | Shimadzu Corp | Charged particle energy analysers and methods of operating charged particle energy analysers |
-
1998
- 1998-01-12 GB GBGB9800488.0A patent/GB9800488D0/en not_active Ceased
-
1999
- 1999-01-12 WO PCT/GB1999/000009 patent/WO1999035668A2/en not_active Application Discontinuation
- 1999-01-12 AU AU19755/99A patent/AU1975599A/en not_active Abandoned
- 1999-01-12 EP EP99900537A patent/EP1051735A2/en not_active Withdrawn
- 1999-01-12 JP JP2000527963A patent/JP2002501285A/en active Pending
Non-Patent Citations (3)
| Title |
|---|
| HAMILTON D C ET AL: "NEW HIGH-RESOLUTION ELECTROSTATIC ION MASS ANALYZER USING TIME OF FLIGHT", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 61, no. 10 PART 02, 1 October 1990 (1990-10-01), pages 3104 - 3106, XP000171706, ISSN: 0034-6748 * |
| LEAL-QUIROS E ET AL: "A HYPERBOLIC ENERGY ANALYZER", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 61, no. 6, 1 June 1990 (1990-06-01), pages 1708 - 1712, XP000166153, ISSN: 0034-6748 * |
| MOBIUS E ET AL: "HIGH MASS RESOLUTION ISOCHRONOUS TIME-OF-FLIGHT SPECTROGRAPH FOR THREE-DIMENSIONAL SPACE PLASMA MEASUREMENTS", REVIEW OF SCIENTIFIC INSTRUMENTS, vol. 61, no. 11, 1 November 1990 (1990-11-01), pages 3609 - 3612, XP000174341, ISSN: 0034-6748 * |
Also Published As
| Publication number | Publication date |
|---|---|
| AU1975599A (en) | 1999-07-26 |
| EP1051735A2 (en) | 2000-11-15 |
| JP2002501285A (en) | 2002-01-15 |
| WO1999035668A2 (en) | 1999-07-15 |
| GB9800488D0 (en) | 1998-03-04 |
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