WO1998015819A1 - Element d'etancheite pour capteurs et procede de fabrication - Google Patents
Element d'etancheite pour capteurs et procede de fabrication Download PDFInfo
- Publication number
- WO1998015819A1 WO1998015819A1 PCT/DE1997/002012 DE9702012W WO9815819A1 WO 1998015819 A1 WO1998015819 A1 WO 1998015819A1 DE 9702012 W DE9702012 W DE 9702012W WO 9815819 A1 WO9815819 A1 WO 9815819A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- metal layer
- layer
- light metal
- sensor according
- sensor
- Prior art date
Links
- 238000007789 sealing Methods 0.000 title claims abstract description 44
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 229910052751 metal Inorganic materials 0.000 claims abstract description 38
- 239000002184 metal Substances 0.000 claims abstract description 38
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 20
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 19
- 239000007789 gas Substances 0.000 claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 10
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 8
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000001301 oxygen Substances 0.000 claims abstract description 5
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 5
- 238000002485 combustion reaction Methods 0.000 claims abstract 3
- 238000003780 insertion Methods 0.000 claims abstract 3
- 230000037431 insertion Effects 0.000 claims abstract 3
- 229910000851 Alloy steel Inorganic materials 0.000 claims abstract 2
- 238000007669 thermal treatment Methods 0.000 claims description 10
- 229910045601 alloy Inorganic materials 0.000 claims description 5
- 239000000956 alloy Substances 0.000 claims description 5
- 230000001681 protective effect Effects 0.000 claims description 5
- 238000005260 corrosion Methods 0.000 claims description 4
- 230000007797 corrosion Effects 0.000 claims description 4
- 150000002739 metals Chemical class 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 2
- UPHIPHFJVNKLMR-UHFFFAOYSA-N chromium iron Chemical compound [Cr].[Fe] UPHIPHFJVNKLMR-UHFFFAOYSA-N 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 229910052749 magnesium Inorganic materials 0.000 claims description 2
- 229910052759 nickel Inorganic materials 0.000 claims description 2
- 229910052721 tungsten Inorganic materials 0.000 claims description 2
- 229910019582 Cr V Inorganic materials 0.000 claims 1
- 229910017060 Fe Cr Inorganic materials 0.000 claims 1
- 229910002544 Fe-Cr Inorganic materials 0.000 claims 1
- 238000009997 thermal pre-treatment Methods 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 abstract description 3
- 239000007787 solid Substances 0.000 abstract description 2
- 239000004411 aluminium Substances 0.000 abstract 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 3
- 239000010410 layer Substances 0.000 description 33
- 239000007784 solid electrolyte Substances 0.000 description 13
- 239000004020 conductor Substances 0.000 description 6
- 239000011241 protective layer Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- BPQQTUXANYXVAA-UHFFFAOYSA-N Orthosilicate Chemical compound [O-][Si]([O-])([O-])[O-] BPQQTUXANYXVAA-UHFFFAOYSA-N 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 239000000615 nonconductor Substances 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229910052596 spinel Inorganic materials 0.000 description 2
- 239000011029 spinel Substances 0.000 description 2
- 239000003381 stabilizer Substances 0.000 description 2
- 239000002344 surface layer Substances 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 150000004645 aluminates Chemical class 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000003518 caustics Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000011195 cermet Substances 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000018109 developmental process Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 229910052839 forsterite Inorganic materials 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 238000007496 glass forming Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- HCWCAKKEBCNQJP-UHFFFAOYSA-N magnesium orthosilicate Chemical compound [Mg+2].[Mg+2].[O-][Si]([O-])([O-])[O-] HCWCAKKEBCNQJP-UHFFFAOYSA-N 0.000 description 1
- CPLXHLVBOLITMK-UHFFFAOYSA-N magnesium oxide Inorganic materials [Mg]=O CPLXHLVBOLITMK-UHFFFAOYSA-N 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 239000004071 soot Substances 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
Definitions
- the invention relates to a sensor according to the preamble of claim 1.
- Sensors according to the preamble of claim 1 have a solid electrolyte body which, for. B. executed as a closed tube and tightly fixed in a metallic housing. A seal must be implemented between the solid electrolyte body and the housing.
- Solid electrolyte base in which electrically conductive metal or graphite sealing rings are used for the tight fixation of the solid electrolyte body in the housing.
- This type of sealing leads to oxidation and corrosion of the metal or graphite surface at elevated temperatures. Furthermore, it can lead to diffusion of the resulting metal ions into the solid electrolyte. This changes and affects its properties with regard to its trouble-free function.
- Aluminum-clad steel foils are known from the literature (RG DELAGI & S. IHA, Adv. Mat. Proc. 1995, 27) Treatment form a highly stable Fe / Al alloy and its surface is converted to A1 2 0 3 .
- the inventive sensor with the characterizing features of the main claim has the advantage that temperature and corrosion-resistant sealing elements can be used to seal the ceramic body, which also have a ductile surface layer made of a light metal or an alloy of a light metal. Due to the deformability of the compact seal, the sealing element lies against the surface of the ceramic body without any gaps. This ensures that even under extreme thermal
- the surface coating of the sealing element which is particularly advantageous for the sealing function, by means of readily deformable aluminum, is irreversibly oxidized in whole or in part after the assembly by thermal treatment and thus additionally acts as an electrical insulator.
- the measures listed in the subclaims enable advantageous developments and improvements of the sensor according to the invention and of the method according to the invention.
- the additional metal layer on the aluminum layer improves the adhesion to the solid electrolyte ceramic. During a thermal treatment, this metal layer oxidizes and forms a stable mixed oxide layer in the form of metal aluminates with the aluminum layer, which is also oxidized. As a result, the metal oxides formed during the oxidation or the metal cations are diffused into sensitive surface layers of the Sensor element hindered.
- the aluminum layer on the outside is also oxidized to A1 2 0 3 and acts as an electrical insulator.
- the metallic carrier forms a high-temperature and corrosion-resistant Fe-Al alloy with the non-oxidized part of the aluminum. This process advantageously combines the ductility of metals with the toughness and resistance of ceramics and specific alloys.
- FIG. 1 shows a longitudinal section through the exhaust-side part of a sensor
- FIG. 2 shows an enlarged section of a sealing zone according to FIG. 1
- FIG. 3 shows a coated sealing ring
- FIG. 4 shows the enlarged section of the sealing zone with the sealing element according to FIG. 3 before the thermal treatment
- FIG 5 the enlarged section of the sealing zone with a sealing ring according to FIG. 3 after the thermal treatment.
- the electrochemical measuring sensor 10 shown in FIG. 1 has a metallic housing 11, which has a key hexagon 12 on its outside and a thread 13 as a fastening means for installation in a measuring gas tube, not shown.
- the housing 11 has a longitudinal bore 17 with a sealing seat 20 which carries a sealing ring 21.
- a sealing surface 28 on the sensor element side is formed on the bead-shaped head 15 of the sensor element 14 between the sealing ring 21 and the sensor element 14 out.
- the sealing seat 20 in turn forms a sealing surface on the house side.
- the sealing zone 55 which forms on the sealing ring 21 is shown enlarged in FIGS. 2, 4 and 5.
- the sensor element 14 is an oxygen probe which is known per se and which is preferably used for measuring the oxygen partial pressure in exhaust gases.
- the sensor element 14 has a tubular solid electrolyte body 29, the end section on the measuring gas side of which is closed by means of a base 30.
- On the outside exposed to the measuring gas is a layered, gas-permeable measuring electrode 31 on the solid electrolyte body 29 and on the side facing the interior a reference gas, for. B. air, exposed, gas-permeable and layered reference electrode 32.
- the measuring electrode 31 is guided with a measuring electrode conductor 33 to a first electrode contact 39 and the reference electrode 32 with a reference electrode conductor 34 to a second electrode contact 40.
- the electrode contacts 39, 40 are each located on an end face 42 formed by the open end of the solid electrolyte body 29.
- a porous protective layer 35 is placed over the measuring electrode 31 and partly over the measuring electrode conductor tracks 33.
- the electrodes 31, 32 and the conductor tracks 27, 28 are advantageously constructed as cermet layers and are co-sintered.
- the sensor element 14 protruding from the longitudinal bore 18 of the housing 11 on the measuring gas side is surrounded at a distance by a protective tube 50 which has openings 51 for the entry and exit of the measuring gas and is held at the end of the housing 11 on the measuring gas side.
- the interior of the sensor element 14 is filled, for example, by a rod-shaped heating element 46, which, not shown, is locked away from the sample gas and is provided with line connections.
- a first contact part 44 rests on the first electrode contact 39 and a second contact part 45 rests on the second electrode contact 40.
- the contact parts 44, 45 are shaped such that they bear against the tubular heating element 40 and are contacted with a measuring electrode connection 47 and a reference electrode connection 48.
- the connections 47, 48 are not shown
- an insulating sleeve 49 is also introduced, which preferably consists of a ceramic material. With the help of a mechanical means, not shown, the insulating sleeve 49 is pressed onto the contact parts 44, 45, as a result of which the electrical connection to the electrode contacts 39 and 40 is produced.
- Solid electrolyte body 29 and the housing 11 can be seen in FIG. 2.
- the cover layer 27 has a layer thickness of 20 to 100 ⁇ m.
- the cover layer 27 is drawn over the entire area of the conductor track 33 and around the circumference of the solid electrolyte body 29, which is adjacent to the housing 11.
- the protective layer 30 consists, for. B. from plasma-sprayed magnesium spinel.
- the material of the cover layer 27 is selected so that it withstands the compressive forces of the sealing ring 21, which occur when the sensor element 14 is joined in the housing 11. In addition, it must withstand application temperatures up to 700 ° C in the area of the joint. This is achieved in that a crystalline, non-metallic material forms a load-bearing protective structure in a glaze layer in a homogeneous distribution and the transformation temperature of the glaze is above the application temperature.
- Possible materials are: A1 2 0 3 , Mg spinel, forsterite, MgO stabilized Zr0 2 , CaO and / or Y 2 0 3 stabilized Zr0 2 with low stabilizer contents, advantageously with a maximum of 2/3 of the stabilizer oxide of the full stabilization, non-stabilized Zr0 2 or Hf0 2 or a mixture of these substances.
- Alkaline earth silicate for example Ba-Al silicate, is used as the glass-forming material.
- the Ba-Al silicate for example, has a thermal one
- the sealing ring 21 In order to realize an electrically insulating and gas-tight fastening of the sensor element 14 in the housing 11, the shoulder 16 formed on the bead-shaped head 15 is seated on the housing 11 by means of the sealing ring 21.
- the sealing ring 21 according to FIG. 2 consists of a solid core 23 which forms a support and is made of an iron-chromium or V2A alloy, preferably of Fe-22Cr-MM stainless steel with a thickness of approximately 1.5 mm which is covered on each side by an aluminum layer 24 which is at least 0.01 mm thick. The material is particularly gas, water and fuel impermeable due to its high compression.
- FIG. 3 shows an exemplary embodiment of the sealing ring 21, which is composed of several different metal layers.
- the additional metal layer 25 is deposited without current, for example.
- the thickness of the additional metal layer 25 is, for example, 0.8 ⁇ m.
- FIG. 4 shows the sealing zone 55 with the metallic sealing ring according to FIG. 3 before the thermal treatment.
- the additional metal layer 25 lies on the protective layer 27 of the sensor element 14.
- the second aluminum layer 24 lies against the metallic housing 11.
- FIG. 5 shows the sealing zone 55 from FIG. 4 after the thermal treatment.
- the protective layer 27 of the sensor element 10 remained unchanged.
- the layer 58 which follows it consists of an Fe-Al alloy which has ceramic-like properties.
- the core 23 remained unchanged.
- Another layer 58 made of the Fe-Al alloy follows above it. Part of the aluminum from layer 24 has converted on the surface to an A10 3 layer 59, which at the same time has an electrically insulating effect. In contrast, the metallic housing 11 of the sensor 10 remained unchanged.
- the sealing ring 21 it is also possible, for example, to subject the sealing ring 21 to a thermal treatment of approximately 600 ° C. under a protective gas before it is inserted into the housing 11, only the Fe-Al alloy 58 being at least partially formed.
- the core 23 remains unchanged.
- the sensor is heated again to at least 500 ° C., on the sealing ring 21 the surface of the aluminum layer oxidizes to an Al 2 0 3 layer 59, or the additional metal layer 25 with the mixed oxide layer 57 forms the non-oxidized part of the aluminum layer 24.
Landscapes
- Chemical & Material Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Molecular Biology (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Measuring Oxygen Concentration In Cells (AREA)
Abstract
La présente invention porte sur un capteur électrochimique (10) conçu pour déterminer la teneur de gaz en oxygène, notamment en ce qui concerne les gaz d'échappement de moteurs à combustion interne. Il comprend un corps électrolytique solide (29) placé dans un logement (11) avec une bague d'étanchéité (21). La bague d'étanchéité (21) est constituée de diverses couches métalliques, dont l'agencement part d'un support (23) de métal réalisé dans un alliage à l'acier. Ce support (23) est revêtu, des deux côtés de la bague, d'une couche d'aluminium (24). L'une des couches d'aluminium (24) peut être recouverte d'une autre couche métallique (25). Lors d'un traitement thermique, avant ou après le processus d'insertion, une partie de la couche d'aluminium (24) forme avec le support (23) un alliage Fe-Al ayant les propriétés de la céramique. La surface de la couche d'aluminium (24) est oxydé et forme une couche d'oxyde d'aluminium. Lorsque qu'une couche métallique supplémentaire est appliquée sur la couche d'alluminium, il se forme une couche d'oxyde mixte.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10517063A JP2000502456A (ja) | 1996-10-10 | 1997-09-10 | センサ用のシール部材及びその製造方法 |
| EP97909120A EP0865608A1 (fr) | 1996-10-10 | 1997-09-10 | Element d'etancheite pour capteurs et procede de fabrication |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE1996141808 DE19641808A1 (de) | 1996-10-10 | 1996-10-10 | Dichtelement für Meßfühler und Verfahren zu seiner Herstellung |
| DE19641808.9 | 1996-10-10 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO1998015819A1 true WO1998015819A1 (fr) | 1998-04-16 |
Family
ID=7808382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/DE1997/002012 WO1998015819A1 (fr) | 1996-10-10 | 1997-09-10 | Element d'etancheite pour capteurs et procede de fabrication |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP0865608A1 (fr) |
| JP (1) | JP2000502456A (fr) |
| DE (1) | DE19641808A1 (fr) |
| WO (1) | WO1998015819A1 (fr) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8257564B2 (en) | 2004-11-30 | 2012-09-04 | Ngk Spark Plug Co., Ltd. | Gas sensor, and gas sensor manufacturing method |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4605783B2 (ja) * | 2004-11-30 | 2011-01-05 | 日本特殊陶業株式会社 | ガスセンサ及びガスセンサの製造方法 |
| JP2007163307A (ja) * | 2005-12-14 | 2007-06-28 | Denso Corp | ガスセンサ |
| JP5931664B2 (ja) * | 2011-11-04 | 2016-06-08 | 日本特殊陶業株式会社 | ガスセンサ |
| JP7131365B2 (ja) * | 2018-12-21 | 2022-09-06 | 株式会社デンソー | ガスセンサ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4342731A1 (de) * | 1993-07-27 | 1995-02-02 | Bosch Gmbh Robert | Elektrochemischer Meßfühler mit einem potentialfrei angeordneten Sensorelement und Verfahren zu seiner Herstellung |
| DE9409684U1 (de) * | 1994-06-16 | 1995-10-12 | Robert Bosch Gmbh, 70469 Stuttgart | Elektrochemischer Meßfühler |
| DE4447306A1 (de) * | 1994-12-31 | 1996-07-04 | Bosch Gmbh Robert | Elektrochemischer Meßfühler mit einem potentialfrei angeordneten Sensorelement |
-
1996
- 1996-10-10 DE DE1996141808 patent/DE19641808A1/de not_active Withdrawn
-
1997
- 1997-09-10 JP JP10517063A patent/JP2000502456A/ja active Pending
- 1997-09-10 WO PCT/DE1997/002012 patent/WO1998015819A1/fr not_active Application Discontinuation
- 1997-09-10 EP EP97909120A patent/EP0865608A1/fr not_active Withdrawn
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4342731A1 (de) * | 1993-07-27 | 1995-02-02 | Bosch Gmbh Robert | Elektrochemischer Meßfühler mit einem potentialfrei angeordneten Sensorelement und Verfahren zu seiner Herstellung |
| DE9409684U1 (de) * | 1994-06-16 | 1995-10-12 | Robert Bosch Gmbh, 70469 Stuttgart | Elektrochemischer Meßfühler |
| DE4447306A1 (de) * | 1994-12-31 | 1996-07-04 | Bosch Gmbh Robert | Elektrochemischer Meßfühler mit einem potentialfrei angeordneten Sensorelement |
Non-Patent Citations (1)
| Title |
|---|
| R. G. DELAGI ET AL: "High-aluminum ferritic stainless alloys synthesized for catalytic converters", ADVANCED MATERIALS & PROCESSES, vol. 147, no. 1, January 1995 (1995-01-01), pages 27 - 28, XP002052744 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8257564B2 (en) | 2004-11-30 | 2012-09-04 | Ngk Spark Plug Co., Ltd. | Gas sensor, and gas sensor manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| DE19641808A1 (de) | 1998-04-16 |
| EP0865608A1 (fr) | 1998-09-23 |
| JP2000502456A (ja) | 2000-02-29 |
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