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WO1990002878A3 - Pompe cryogenique a commande electronique - Google Patents

Pompe cryogenique a commande electronique Download PDF

Info

Publication number
WO1990002878A3
WO1990002878A3 PCT/US1989/003932 US8903932W WO9002878A3 WO 1990002878 A3 WO1990002878 A3 WO 1990002878A3 US 8903932 W US8903932 W US 8903932W WO 9002878 A3 WO9002878 A3 WO 9002878A3
Authority
WO
WIPO (PCT)
Prior art keywords
cryopump
pressure gauge
electronic module
password
rough pumping
Prior art date
Application number
PCT/US1989/003932
Other languages
English (en)
Other versions
WO1990002878A2 (fr
Inventor
Peter W Gaudet
Donald A Olsen
Michael J Eacobacci
John T Harvell
Robert J Lepofsky
David E Roche
Steven A Bender
Original Assignee
Helix Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=22919801&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=WO1990002878(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Helix Tech Corp filed Critical Helix Tech Corp
Priority to DE90901179T priority Critical patent/DE68910692T2/de
Publication of WO1990002878A2 publication Critical patent/WO1990002878A2/fr
Publication of WO1990002878A3 publication Critical patent/WO1990002878A3/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

Une pompe à vide cryogénique comprend, dans un ensemble intégré, des capteurs de température (58, 60) et des éléments chauffants (69) associés aux premier et second étages (52, 56) du groupe de cryopompage, une soupape de dégrossissage et une soupape de purge. Un module électronique (24) couplé à distance à l'ensemble répond à tous les capteurs et commande toutes les opérations de la cryopompe y compris sa régénération. Des paramètres du système sont mémorisés dans une mémoire rémanente dans le module. Sont inclus dans les procédés de régénération en zéro-automatique de la jauge de pression, le chauffage du circuit pendant tout le pompage brut, et un changement dans le test du taux de pression pour déterminer un blocage lors du pompage brut. Le module électronique fait redémarrer le système après une alimentation défaillante, limite l'utilisation de la jauge de pression à des conditions sûres, donne des avertissements avant d'ouvrir les vannes pendant que la cryopompe fonctionne et mémorise les informations relatives à l'étalonnage des capteurs. La commande par l'intermédiaire d'un mini clavier de commande de la pompe peut être limitée par un mot de passe. Une annulation de l'effet du mot de passe est également prévue.
PCT/US1989/003932 1988-09-13 1989-09-12 Pompe cryogenique a commande electronique WO1990002878A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
DE90901179T DE68910692T2 (de) 1988-09-13 1989-09-12 Elektronisch gesteuerte Cryopumpe.

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US243,707 1988-09-13
US07/243,707 US4918930A (en) 1988-09-13 1988-09-13 Electronically controlled cryopump

Publications (2)

Publication Number Publication Date
WO1990002878A2 WO1990002878A2 (fr) 1990-03-22
WO1990002878A3 true WO1990002878A3 (fr) 1990-05-17

Family

ID=22919801

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1989/003932 WO1990002878A2 (fr) 1988-09-13 1989-09-12 Pompe cryogenique a commande electronique

Country Status (6)

Country Link
US (3) US4918930A (fr)
EP (2) EP0436673B1 (fr)
JP (1) JP2873031B2 (fr)
CA (1) CA1322105C (fr)
DE (2) DE68910692T2 (fr)
WO (1) WO1990002878A2 (fr)

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Also Published As

Publication number Publication date
EP0553935A1 (fr) 1993-08-04
EP0436673A1 (fr) 1991-07-17
EP0436673B1 (fr) 1993-11-10
US4918930A (en) 1990-04-24
DE68923184T2 (de) 1995-11-30
DE68923184D1 (de) 1995-07-27
DE68910692T2 (de) 1994-04-28
DE68910692D1 (de) 1993-12-16
JPH04501751A (ja) 1992-03-26
WO1990002878A2 (fr) 1990-03-22
CA1322105C (fr) 1993-09-14
US5450316A (en) 1995-09-12
EP0553935B1 (fr) 1995-06-21
JP2873031B2 (ja) 1999-03-24
US5343708A (en) 1994-09-06

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