+

EP0336992A1 - Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie - Google Patents

Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie Download PDF

Info

Publication number
EP0336992A1
EP0336992A1 EP88105857A EP88105857A EP0336992A1 EP 0336992 A1 EP0336992 A1 EP 0336992A1 EP 88105857 A EP88105857 A EP 88105857A EP 88105857 A EP88105857 A EP 88105857A EP 0336992 A1 EP0336992 A1 EP 0336992A1
Authority
EP
European Patent Office
Prior art keywords
cryopump
temperature
stage
cold
diagnostic device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP88105857A
Other languages
German (de)
English (en)
Inventor
Hans-Ulrich Dr. Häfner
Manfred Klotz
Wilhelm Strasser
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers und Leybold Deutschland Holding AG
Original Assignee
Leybold AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold AG filed Critical Leybold AG
Priority to EP88105857A priority Critical patent/EP0336992A1/fr
Priority to JP1087177A priority patent/JPH0211870A/ja
Priority to US07/337,670 priority patent/US4958499A/en
Publication of EP0336992A1 publication Critical patent/EP0336992A1/fr
Withdrawn legal-status Critical Current

Links

Images

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00—Pumps
    • Y10S417/901—Cryogenic pumps

Definitions

  • the invention relates to a method for checking the function of a refrigerator-operated cryopump with a cold head with at least one cold stage, which is equipped with a pump surface.
  • the invention also relates to a cryopump and to an apparatus for carrying out this method.
  • cryopump In the industrial use of refrigerator-operated cryopumps, it is often difficult to determine whether a malfunction indicated by the cryopump (poor end temperature, rise in temperatures or the like) is justified in the cryopump itself or has arisen as a result of external changes. On the basis of this ignorance, hasty and expensive measures are sometimes taken (pump replacement or the like) that would be avoidable if more information were provided.
  • the present invention is based on the object of specifying a method of the type mentioned at the outset and a device or cryopump suitable for carrying out this method, which allow the function of a cryopump to be checked.
  • this object is achieved in that data of the cryopump are queried under different operating states and in that the queried data are compared with target data. Based on the comparison of the queried data with the target data, it can be determined whether e.g. B. a poor performance of Refrigerators of the cryopump itself is present or whether there have been external changes, e.g. B. a change in gas composition, a changed gas load, a changed radiation load or the like.
  • a typical procedure for diagnosing a cryopump is e.g. B. the following: First, the cryopump is regenerated, pre-pumped to approx. 10 ⁇ 2 mbar and then cold-run with the high vacuum valve closed. The temperature profile of the refrigeration level of the refrigerator is monitored or recorded during the cold operation. If it is a cryopump with several cooling levels, it is advisable to record the temperature of all cooling levels. If the development of the temperatures over time is too slow or the time until the specific temperature is to be reached is too long (i.e. greater than known reference values), there may be an inadmissible heat source or a leak. Another possibility is that the refrigerator itself has poor performance.
  • the net cooling capacity of the cooling stage (s) can be measured to further determine the function of the pump. This can e.g. B. happen that the cold stages are heated with the help of a manually or automatically controlled heating output and the temperature of the cold stages is observed. If the net cooling capacity is lower than the typical, known reference values for the respective pump, the refrigerator will no longer provide sufficient performance.
  • the cryopump 1 with the housing 2 shown in the figure comprises the only partially illustrated two-stage refrigerator 3, the cooling stages of which are designated 4 (first stage) and 5 (second stage).
  • the pot-shaped pump surface or shield 6 is fastened in a heat-conducting manner, so that it encloses the interior 8 of the pump together with the baffle 7 carried and cooled by the shield 6.
  • the pump surfaces 10 of the second refrigerator stage which are connected to the second cooling stage 5 with good thermal conductivity.
  • the inlet opening 9 of the pump equipped with the baffle 7 is preceded by a schematically illustrated valve 11. It comprises a fixed disk 12 and a rotatable disk 13, each of which has essentially radial slot openings. The valve can be actuated by rotating the disk 13.
  • the housing 2 of the cryopump 1 is equipped with a connecting piece 14 which carries a monitoring device designated by 15.
  • a monitoring device designated by 15 there is a circuit for supplying electrical heating devices 16 and 17 with which the cooling stages 4 and 5 of the two-stage refrigerator 3 are equipped.
  • a vacuum-tight bushing 23 is provided for the connecting lines 18 and 19 between the monitoring device 15 and the heating devices 16, 17 in the region of flanges 21, 22 on the supply device 15 and on the connecting piece 14.
  • thermosensor 24 and 25 In the cryopump there are also temperature sensors 24 and 25 (one each is provided on the cold stages 4 and 5), the measuring lines 26 and 27 of which likewise lead to the monitoring device 15. Finally, a pressure sensor 28 is also accommodated in the pump 1, the measuring line 29 also leading to the monitoring device 15.
  • the monitoring device 15 is equipped with sockets 31 to 34, into which plugs 35 to 38 of the diagnostic device 39 can be inserted. Plug 31 and socket 25 are used for power supply.
  • the socket 31 is to be supplied with voltage from another power source (plug 41).
  • the heaters 16, 17 can then z. B. serve the regeneration of the pump surfaces 6, 7, 10 of the cryopump 1.
  • the diagnostic device 39 is equipped with instruments 42 to 44 which allow the values supplied by the sensors 24, 25 and 28 to be read.
  • the scales 42 and 43 are used to display the temperatures T1 and T2.
  • the scale 44 shows the pressure prevailing in the pump.
  • the pressure measuring device 44 in the diagnostic device is not required if the cryopump itself - as is often the case - is equipped with a pressure measuring device.
  • Two further instruments 45 and 46 each with a potentiometer, adjustable with the knobs 47, 48, are provided. With the help of these instruments, the heating power of the heating devices 16 and 17 is adjustable and measurable. This makes it possible to measure the net cooling capacity of the two cooling stages 4 and 5. This is done in such a way that the cold heads are brought to a certain temperature (e.g. 80 K at the first stage and 20 K at the second stage). The heating capacity required for this is the net cooling capacity of the pump.
  • the diagnostic device 39 is first connected to the supply device 15 by inserting the plugs shown into the associated sockets. Depending on the condition of the cryopump to be examined, a complete diagnosis begins either with regeneration of the cryopump or with cold driving, if necessary also during the pumping process.
  • the temperature change or the time at which certain temperatures can be observed can be achieved. If these values do not match the target values, the refrigerator itself may be defective.
  • the measurement of the net cooling capacity of the cooling stages also provides information about this point. The simultaneous observation of the pressure enables statements about the tightness of the valve 11 or other possible leaks at flange connections, at the cryopump safety valve or the like.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Compressor (AREA)
EP88105857A 1988-04-13 1988-04-13 Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie Withdrawn EP0336992A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP88105857A EP0336992A1 (fr) 1988-04-13 1988-04-13 Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie
JP1087177A JPH0211870A (ja) 1988-04-13 1989-04-07 冷凍機で運転されるクライオポンプの機能を検査する方法及び装置
US07/337,670 US4958499A (en) 1988-04-13 1989-04-13 Method and apparatus for checking the operation of a refrigerator-operated cryogenic pump

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP88105857A EP0336992A1 (fr) 1988-04-13 1988-04-13 Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie

Publications (1)

Publication Number Publication Date
EP0336992A1 true EP0336992A1 (fr) 1989-10-18

Family

ID=8198883

Family Applications (1)

Application Number Title Priority Date Filing Date
EP88105857A Withdrawn EP0336992A1 (fr) 1988-04-13 1988-04-13 Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie

Country Status (3)

Country Link
US (1) US4958499A (fr)
EP (1) EP0336992A1 (fr)
JP (1) JPH0211870A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4006755A1 (de) * 1990-03-03 1991-09-05 Leybold Ag Zweistufige kryopumpe
DE4491062B4 (de) * 1993-02-26 2004-03-18 Helix Technology Corp., Mansfield Cryogene Vakuumpumpe mit elektronisch gesteuerter bzw. geregelter Regeneration
TWI485327B (zh) * 2011-05-13 2015-05-21 Sumitomo Heavy Industries Cryogenic pump system, cryogenic pump regeneration method
GB2601321A (en) * 2020-11-25 2022-06-01 Edwards Vacuum Llc Monitoring the performance of a cryopump

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6022195A (en) 1988-09-13 2000-02-08 Helix Technology Corporation Electronically controlled vacuum pump with control module
US4918930A (en) * 1988-09-13 1990-04-24 Helix Technology Corporation Electronically controlled cryopump
US6318093B2 (en) 1988-09-13 2001-11-20 Helix Technology Corporation Electronically controlled cryopump
US5157928A (en) * 1988-09-13 1992-10-27 Helix Technology Corporation Electronically controlled cryopump
JPH0497538A (ja) * 1990-08-14 1992-03-30 Horiba Ltd クライオスタット
DE59101463D1 (de) * 1990-11-19 1994-05-26 Leybold Ag Verfahren zur regeneration einer kryopumpe sowie zur durchführung dieses verfahrens geeignete kryopumpe.
JPH04303186A (ja) * 1991-03-29 1992-10-27 Aisin Seiki Co Ltd クライオポンプの再生装置
US5651667A (en) * 1991-10-11 1997-07-29 Helix Technology Corporation Cryopump synchronous motor load monitor
US6902378B2 (en) * 1993-07-16 2005-06-07 Helix Technology Corporation Electronically controlled vacuum pump
US5513499A (en) * 1994-04-08 1996-05-07 Ebara Technologies Incorporated Method and apparatus for cryopump regeneration using turbomolecular pump
EP0919722B1 (fr) * 1994-04-28 2003-07-16 Ebara Corporation Régénération d'une pompe cryogénique
US6257001B1 (en) * 1999-08-24 2001-07-10 Lucent Technologies, Inc. Cryogenic vacuum pump temperature sensor
US6318091B1 (en) 1999-10-28 2001-11-20 Helix Technology Corporation Cryopump system with modular electronics
US7127901B2 (en) 2001-07-20 2006-10-31 Brooks Automation, Inc. Helium management control system
US20040261424A1 (en) * 2003-06-27 2004-12-30 Helix Technology Corporation Integration of automated cryopump safety purge with set point
US6895766B2 (en) * 2003-06-27 2005-05-24 Helix Technology Corporation Fail-safe cryopump safety purge delay
DE602004005047T2 (de) * 2003-06-27 2007-09-27 Helix Technology Corp., Mansfield Integration einer automatisierten kryopumpensicherheitsspülung
US6920763B2 (en) * 2003-06-27 2005-07-26 Helix Technology Corporation Integration of automated cryopump safety purge
JP4686572B2 (ja) * 2008-05-14 2011-05-25 住友重機械工業株式会社 クライオポンプ、真空排気システム、及びその診断方法
JP5184995B2 (ja) 2008-07-04 2013-04-17 住友重機械工業株式会社 クライオポンプ
JP5123103B2 (ja) * 2008-08-20 2013-01-16 住友重機械工業株式会社 クライオポンプ
JP4912438B2 (ja) * 2009-07-16 2012-04-11 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
JP5084794B2 (ja) * 2009-07-22 2012-11-28 住友重機械工業株式会社 クライオポンプ、及びクライオポンプの監視方法
US9174144B2 (en) * 2012-04-20 2015-11-03 Sumitomo (Shi) Cryogenics Of America Inc Low profile cryopump
EP3456979B1 (fr) * 2017-09-18 2022-03-30 Pfeiffer Vacuum Gmbh Appareil a vide et procédé de génération d'une information sur le fonctionnement d'un appareil a vide
JP2023120890A (ja) * 2022-02-18 2023-08-30 住友重機械工業株式会社 クライオポンプおよびクライオポンプの運転方法
CN116428172A (zh) * 2023-04-14 2023-07-14 合肥吉麦智能装备有限公司 一种低温泵性能测试系统及方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984000404A1 (fr) * 1982-07-06 1984-02-02 Helix Tech Corp Organe de desorption periodique d'une cryopompe
US4614093A (en) * 1985-04-06 1986-09-30 Leybold-Heraeus Gmbh Method of starting and/or regenerating a cryopump and a cryopump therefor
EP0250613A1 (fr) * 1986-06-23 1988-01-07 Leybold Aktiengesellschaft Pompe cryogénique et procédé de cryopompage

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4380236A (en) * 1981-09-14 1983-04-19 Baxter Travenol Laboratories, Inc. Fluid pump
US4667477A (en) * 1985-03-28 1987-05-26 Hitachi, Ltd. Cryopump and method of operating same

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1984000404A1 (fr) * 1982-07-06 1984-02-02 Helix Tech Corp Organe de desorption periodique d'une cryopompe
US4614093A (en) * 1985-04-06 1986-09-30 Leybold-Heraeus Gmbh Method of starting and/or regenerating a cryopump and a cryopump therefor
EP0250613A1 (fr) * 1986-06-23 1988-01-07 Leybold Aktiengesellschaft Pompe cryogénique et procédé de cryopompage

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4006755A1 (de) * 1990-03-03 1991-09-05 Leybold Ag Zweistufige kryopumpe
DE4491062B4 (de) * 1993-02-26 2004-03-18 Helix Technology Corp., Mansfield Cryogene Vakuumpumpe mit elektronisch gesteuerter bzw. geregelter Regeneration
TWI485327B (zh) * 2011-05-13 2015-05-21 Sumitomo Heavy Industries Cryogenic pump system, cryogenic pump regeneration method
GB2601321A (en) * 2020-11-25 2022-06-01 Edwards Vacuum Llc Monitoring the performance of a cryopump

Also Published As

Publication number Publication date
US4958499A (en) 1990-09-25
JPH0211870A (ja) 1990-01-16

Similar Documents

Publication Publication Date Title
EP0336992A1 (fr) Procédé et dispositif pour vérifier le fonctionnement d'une pompe de cryogénie
DE102010062531A1 (de) System und Verfahren zum Auswechseln einer Ionenquelle in einem Massenspektrometer
DE60121530T2 (de) Wartungseinrichtung und -methode einer Klimaanlage
EP2008073A2 (fr) Procede et dispositif de determination de l'etancheite d'un objet a controler
DE69310185T2 (de) Verfahren und vorrichtung zur diagnose der kühlmittelmenge in einer klimaanlage
DE102018118208A1 (de) Prüfverfahren zum Prüfen eines Kabels auf Dichtheit sowie Dichtheitsprüfeinrichtung zur Durchführung des Verfahrens
EP0522283A1 (fr) Système de ventilation du réservoir et procédé et dispositif pour vérifier son fonctionnement
EP0829712A2 (fr) Méthode de décalage du zéro d'une cellule de mesure de la conductivité de la chaleur pour la mesure du CO2 dans un incubateur à circulation de gaz
DE10129695A1 (de) Verfahren und Vorrichtung zur Tankleckdiagnose mittels einer Referenzmessmethode
DE102009026744B4 (de) Verfahren zur Dichtheitsprüfung von Bauteilen
EP0398156A2 (fr) Procédé et dispositif pour préréfrigérer le réservoir d'hélium d'un cryostat
EP2688757B1 (fr) Procédé et testeur de diagnostic pour détecter une défaillance dans un circuit de refroidissement d'un véhicule à moteur
EP0637376B1 (fr) Procede et dispositif pour mesurer la concentration d'un gaz indicateur dans un gaz de mesure contenant un gaz pertubateur
DE102006039925B4 (de) Verfahren zur Bestimmung des Kältemittelverlusts von Kälteanlagen
DE10133826C2 (de) Verfahren und Vorrichtung zur Prüfung der Funktionsfähigkeit eines Behältnisses, insbesondere einer Tankanlage
DE2331284A1 (de) Verfahren und einrichtung zur bestimmung der dichte eines gases
DE102018123674A1 (de) ESR-Messvorrichtung und Verfahren zum Bestimmen eines Alterungszustands eines Schmiermittels
DE4139064C2 (de) Verfahren zur Überwachung des Füllungsgrads eines Kältemittelverdampfers
DE19920767A1 (de) Vorrichtung zur Leckprüfung von Kraftfahrzeug-Karosserien
DE112023002609T5 (de) Verbessertes Verfahren zur Leckerkennung und zugehörige Vorrichtung
DE4412762A1 (de) Verfahren und Einrichtung zur Prüfung der Wasserdichtigkeit von Gehäusen
DE2755743A1 (de) Verfahren und vorrichtung zur frueherkennung von betriebsstoerungen einer rechnischen anlage
DE102008046551B4 (de) Verfahren zur Prüfung der Dichheit eines Kühlkanals bei einem Gussbauteil, insbesondere eines Zylinderkopfes oder eines Motorblocks einer Verbrennungskraftmaschine
DE19826583A1 (de) Verfahren zur Messung von gasförmigen chemischen Bestandteilen in einem Prozessreaktor zum Behandeln von elektrischen Bauelementen, insbesondere Wafern
DD221018A1 (de) Pruefeinrichtung zur endpruefung hermetischer kaeltemittelverdichter

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE CH DE FR GB IT LI NL

17P Request for examination filed

Effective date: 19900530

17Q First examination report despatched

Effective date: 19910531

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 19911011

点击 这是indexloc提供的php浏览器服务，不要输入任何密码和下载