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WO2019035321A1 - Dispositif d'irradiation par lumière polarisée - Google Patents

Dispositif d'irradiation par lumière polarisée Download PDF

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Publication number
WO2019035321A1
WO2019035321A1 PCT/JP2018/027692 JP2018027692W WO2019035321A1 WO 2019035321 A1 WO2019035321 A1 WO 2019035321A1 JP 2018027692 W JP2018027692 W JP 2018027692W WO 2019035321 A1 WO2019035321 A1 WO 2019035321A1
Authority
WO
WIPO (PCT)
Prior art keywords
lamp
light
region
light shielding
shielding portion
Prior art date
Application number
PCT/JP2018/027692
Other languages
English (en)
Japanese (ja)
Inventor
和重 橋本
敏成 新井
Original Assignee
株式会社ブイ・テクノロジー
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2017182602A external-priority patent/JP2019035930A/ja
Application filed by 株式会社ブイ・テクノロジー filed Critical 株式会社ブイ・テクノロジー
Priority to KR1020207001133A priority Critical patent/KR20200035943A/ko
Priority to CN201880047529.5A priority patent/CN110892319A/zh
Publication of WO2019035321A1 publication Critical patent/WO2019035321A1/fr

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers

Definitions

  • the light shielding portion 17 a is provided to overlap the region A ⁇ b> 1 on the + x side in the long strip-like region in the x direction to which the light from the lamp 11 is irradiated. Further, in plan view, the light shielding portion 18a is provided so as to overlap the region A2 on the ⁇ x side in the long strip-like region in the x direction to which the light from the lamp 12 is irradiated.
  • the areas A1 and A2 are parts of a band-like area which is long in the x direction and to which light from the lamps 11 and 12 is irradiated. Although the areas A1 and A2 are not visible, in FIG. 4 the ends of the areas A1 and A2 are indicated by dotted lines for the sake of explanation.
  • the regions A1 and A2 have substantially the same position in the x direction, and the regions A1 and A2 are defined as joint region.
  • the apertures 17B and 18B have light shielding portions 17e and 18e and openings 17f and 18f.
  • the light shielding portions 17e and 18e have a substantially triangular shape in plan view.
  • the shape of the light shielding portion 17e in plan view is a shape in which the light shielding portion 18e is rotated approximately 180 degrees around the point 18u, and the shape of the light shielding portion 18e in plan view is approximately 180 around the point 17u. It is a rotated shape.
  • the exposure amount of light irradiated to the workpiece W in the joint area is slightly reduced, but the distribution of the exposure amount of light irradiated to the workpiece W is irradiated with light from one long lamp.
  • the lamps 11 and 12 can be used in a wider range in a state of being substantially the same as the distribution of the exposure amount.
  • the lamps 11 and 12 are deteriorated.
  • the form for avoiding the use of the area where the exposure dose decreases sometimes is not limited to this.
  • the density of the dot pattern changes stepwise, but in practice the density of the dot pattern changes continuously. Although it is possible to change the density of the dot pattern stepwise, it is desirable to change the density of the dot pattern continuously in order to eliminate the unevenness of the light shielding amount.
  • Polarized light irradiation device 10 Polarized irradiation part 11, 12: Lamps 11a, 11b, 12a, 12b: Electrodes 11c, 12c: End 13: Reflector 14: Specific wavelength transmission filter 15 : Polarizing member 16: Cover glass 17, 17A, 17B, 17C, 17D: Apertures 17a, 17c, 17e, 17g, 17i: Light shielding parts 17b, 17d, 17f, 17h, 17j: Openings 17m, 17n, 17o, 17p, Sides 18, 18A, 18B, 18C, 18D: Apertures 18a, 18c, 18e, 18g, 18i: Light shields 18b, 18d, 18f, 18h, 18j: Openings 18m, 18n, 18o, 18p: Side 20: Stage 30 : Stage driver 31: Stage guide rail 32 : Stage scan axis 33: Drive part 40: Robot 50: Device frame

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  • Physics & Mathematics (AREA)
  • Nonlinear Science (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mathematical Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Liquid Crystal (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

Selon la présente invention, une exposition peut être effectuée à un moment donné sur une pièce de grande taille. Une première lampe et une seconde lampe, dont les directions longitudinales sont approximativement perpendiculaires à la direction de transport d'un objet cible, sont disposées de manière décalée l'une par rapport à l'autre dans la direction de transport et une direction perpendiculaire qui est approximativement perpendiculaire à la direction de transport, et dans la direction perpendiculaire, une première extrémité de la première lampe chevauche la seconde lampe, et une seconde extrémité de la seconde lampe chevauche la première lampe. Dans une vue en plan, une première partie de protection contre la lumière est disposée de manière à chevaucher une première région, qui est une partie d'une longue région en forme de bande, dans la direction perpendiculaire dans laquelle la lumière est émise par la première lampe ; une seconde partie de protection contre la lumière est disposée de manière à chevaucher une seconde région, qui est une partie d'une longue région en forme de bande, dans la direction perpendiculaire dans laquelle la lumière est émise par la seconde lampe ; et les positions de la première région et de la seconde région sont approximativement les mêmes dans la direction perpendiculaire. De plus, la somme des surfaces de la première partie de protection contre la lumière et de la seconde partie de protection contre la lumière est approximativement la même que la surface de la première région et de la seconde région.
PCT/JP2018/027692 2017-08-14 2018-07-24 Dispositif d'irradiation par lumière polarisée WO2019035321A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
KR1020207001133A KR20200035943A (ko) 2017-08-14 2018-07-24 편광 광 조사 장치
CN201880047529.5A CN110892319A (zh) 2017-08-14 2018-07-24 偏振光照射装置

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
JP2017-156565 2017-08-14
JP2017156565 2017-08-14
JP2017-182602 2017-09-22
JP2017182602A JP2019035930A (ja) 2017-08-14 2017-09-22 偏光光照射装置

Publications (1)

Publication Number Publication Date
WO2019035321A1 true WO2019035321A1 (fr) 2019-02-21

Family

ID=65362312

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2018/027692 WO2019035321A1 (fr) 2017-08-14 2018-07-24 Dispositif d'irradiation par lumière polarisée

Country Status (1)

Country Link
WO (1) WO2019035321A1 (fr)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0855782A (ja) * 1994-08-16 1996-02-27 Nikon Corp 露光装置
JP2007114647A (ja) * 2005-10-24 2007-05-10 Ushio Inc 光配向用偏光光照射装置
JP2010117734A (ja) * 2006-01-26 2010-05-27 Sharp Corp 液晶表示装置の製造方法及び液晶表示装置
WO2011089772A1 (fr) * 2010-01-25 2011-07-28 シャープ株式会社 Appareil d'exposition, dispositif d'affichage à cristaux liquides et procédé de fabrication d'un dispositif d'affichage à cristaux liquides
WO2013031461A1 (fr) * 2011-08-29 2013-03-07 シャープ株式会社 Procédé de fabrication d'un dispositif d'affichage à cristaux liquides
WO2017126459A1 (fr) * 2016-01-21 2017-07-27 シャープ株式会社 Procédé de fabrication de panneau à cristaux liquides, procédé de fabrication de lame de retard et lame polarisante à grille métallique

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0855782A (ja) * 1994-08-16 1996-02-27 Nikon Corp 露光装置
JP2007114647A (ja) * 2005-10-24 2007-05-10 Ushio Inc 光配向用偏光光照射装置
JP2010117734A (ja) * 2006-01-26 2010-05-27 Sharp Corp 液晶表示装置の製造方法及び液晶表示装置
WO2011089772A1 (fr) * 2010-01-25 2011-07-28 シャープ株式会社 Appareil d'exposition, dispositif d'affichage à cristaux liquides et procédé de fabrication d'un dispositif d'affichage à cristaux liquides
WO2013031461A1 (fr) * 2011-08-29 2013-03-07 シャープ株式会社 Procédé de fabrication d'un dispositif d'affichage à cristaux liquides
WO2017126459A1 (fr) * 2016-01-21 2017-07-27 シャープ株式会社 Procédé de fabrication de panneau à cristaux liquides, procédé de fabrication de lame de retard et lame polarisante à grille métallique

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