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WO2019031327A1 - Appareil optique - Google Patents

Appareil optique Download PDF

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Publication number
WO2019031327A1
WO2019031327A1 PCT/JP2018/028798 JP2018028798W WO2019031327A1 WO 2019031327 A1 WO2019031327 A1 WO 2019031327A1 JP 2018028798 W JP2018028798 W JP 2018028798W WO 2019031327 A1 WO2019031327 A1 WO 2019031327A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
wavelength
emitted
reflected
laser
Prior art date
Application number
PCT/JP2018/028798
Other languages
English (en)
Japanese (ja)
Inventor
佐藤　充
孝典 落合
亮 出田
柳澤　琢麿
小笠原　昌和
Original Assignee
パイオニア株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by パイオニア株式会社 filed Critical パイオニア株式会社
Publication of WO2019031327A1 publication Critical patent/WO2019031327A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G01S17/10—Systems determining position data of a target for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems

Definitions

  • the present invention relates to an optical device that receives reflected light obtained by reflecting emitted light from an object.
  • a movable mirror such as a micro electro mechanical systems (MEMS) mirror or a galvano mirror is often used to scan a predetermined range when irradiating light onto an object.
  • MEMS micro electro mechanical systems
  • the amount of moving the mirror increases as the range of light scanning increases, and problems may occur in terms of device reliability, heat generation, and vibration.
  • the degree of difficulty in manufacturing increases as the size of the reflecting surface increases.
  • Patent Document 1 describes that the laser light is scanned by changing the diffraction angle of the diffraction grating by changing the wavelength of the laser light.
  • the laser beam can be scanned without using a movable part.
  • the diffraction grating is known to diffract at a diffraction angle corresponding to the wavelength of light. Therefore, the reflected light emitted from the light source and irradiated by the diffraction grating and reflected in a predetermined direction by the object is reflected by the diffraction grating at the same angle as the incident angle of the light emitted from the light source.
  • the light receiving element may receive light of wavelengths other than the above-described reflected light as an example.
  • the invention according to claim 1 made for the purpose of solving the above problems is a first optical element for guiding the emitted light irradiated from the emitting portion in the direction according to the wavelength, and changing the wavelength of the emitted light
  • a first control means for scanning a predetermined range with the emitted light via the first optical element, and a light receiving unit for receiving the reflected light that is reflected by the scanned output light and transmitted through the first optical element are transmitted.
  • changing a wavelength of the light to cause the light receiving unit to not receive at least a part of environmental light traveling toward the light receiving unit via the first optical element.
  • FIG. 1 It is a schematic block diagram of the optical apparatus concerning the 1st Example of this invention. It is explanatory drawing of the effect
  • An optical device includes: a first optical element for guiding emitted light emitted from an emitting unit in a direction according to the wavelength; and a first optical element by changing a wavelength of the emitted light And a first control unit configured to scan a predetermined range with emitted light via Furthermore, by changing the wavelength of light to be transmitted by changing the wavelength of light to be transmitted by changing the wavelength of the light to be transmitted, at least a part of the environmental light directed to the light receiving unit And a second optical element that does not allow the light receiving unit to receive light.
  • a second control unit may be provided to control the wavelength of light transmitted through the second optical element in accordance with the wavelength of the emitted light. By doing this, it is possible to change the wavelength according to the wavelength of the outgoing light emitted from the emitting part of the second optical element. Therefore, it is possible to prevent the light receiving unit from receiving at least a part of the environmental light traveling toward the light receiving unit via the first optical element by the second optical element.
  • a distance measuring device which has an optical apparatus of Claim 1 or 2, and measures distance to a subject based on time required from emission of emitted light to light reception of emitted light by a light sensing portion. By doing this, in the distance measuring device, it is possible to suppress the light reception of the light of the wavelength other than the reflected light in the light receiving portion, and improve the distance measurement accuracy.
  • the optical device 1 includes the light source 2, the lens 3, the beam splitter 4, the scanning unit 5, the Fabry-Perot (FP) filter 6, and the focusing lens 7. , A light receiving element 8 and a wavelength control unit 9.
  • the optical device 1 includes the light source 2, the lens 3, the beam splitter 4, the scanning unit 5, the Fabry-Perot (FP) filter 6, and the focusing lens 7. , A light receiving element 8 and a wavelength control unit 9.
  • FP Fabry-Perot
  • the light source 2 as the emitting unit is configured of a variable-wavelength light source capable of changing the wavelength of the emitted laser beam in a wavelength range corresponding to the range scanned by the scanning unit 5 described later.
  • the variable-wavelength light source include those using well-known Littrow external resonators and Littman external resonators, but other methods may be used without particular limitation.
  • the light source 2 intermittently emits (irradiates) laser light as pulse light.
  • the lens 3 turns the laser beam emitted from the light source 2 into loose convergent light.
  • the beam splitter 4 outputs the laser light collimated by the lens 3 to the scanning unit 5 and reflects the later-described reflected light reflected by the scanning unit 5 toward the FP filter 6.
  • the scanning unit 5 as the first optical element is configured of a diffraction grating.
  • the scanning unit 5 is an optical element that guides the emitted light in the direction corresponding to the wavelength.
  • the scanning unit 5 diffracts the laser beam transmitted through the beam splitter 4 at a diffraction angle according to the wavelength of the laser beam, and the direction in which the laser beam is diffracted is continuously changed, whereby a predetermined region where the object 100 exists Can be scanned horizontally. Further, the scanning unit 5 receives the reflected light or the like reflected by the object 100, diffracts the reflected light at a diffraction angle corresponding to the wavelength, and outputs the light to the beam splitter 4.
  • a blazed diffraction grating having a sawtooth-like groove shape is used as the diffraction grating that constitutes the scanning unit 5.
  • the use of a blazed diffraction grating is desirable because the diffraction efficiency of + 1st order light can be theoretically made 100% by the blazed diffraction grating.
  • a reflection type diffraction grating is described, a transmission type diffraction grating may be used.
  • the FP filter 6 is provided between the beam splitter 4 and the focusing lens 7.
  • the FP filter 6 is a known optical element having two parallel reflective surfaces.
  • the FP filter 6 is a wavelength selection filter having a characteristic of transmitting only light having a wavelength of 2 d, where d is a distance between two reflecting surfaces.
  • the FP filter 6 can change the wavelength to be transmitted by changing the distance between the two reflecting surfaces using an electrostatic drive actuator or the like.
  • the FP filter 6 is described as the second optical element, the present invention is not limited thereto.
  • an optical element capable of transmitting only light of a specific wavelength such as another wavelength selection filter such as a linear variable filter, which is a well-known filter having different transmission wavelengths continuously in one dimensional direction of planar space, a spectroscope, etc. You may use.
  • the condensing lens 7 is provided between the FP filter 6 and the light receiving element 8 and condenses the light of the wavelength transmitted through the FP filter 6 onto the light receiving element 8.
  • the light receiving element 8 as a light receiving unit receives the light condensed by the condensing lens 7.
  • the light receiving element 8 is formed of, for example, an avalanche photodiode (APD).
  • the light receiving element 8 outputs a signal (light receiving intensity) having a value corresponding to the intensity of the received light.
  • the wavelength control unit 9 as the first control unit and the second control unit sequentially changes the wavelength of the laser light emitted from the light source 2 according to the irradiation direction of the laser light in the scanning of the scanning unit 5.
  • the wavelength control unit 9 changes the wavelength of light to be transmitted by the FP filter 6 according to the wavelength of the laser light emitted by the light source 2.
  • the laser light emitted in a pulse form from the light source 2 is converted to a loose convergent light by the lens 3 and is diffracted by the scanning unit 5 (diffraction grating) so as to irradiate the outside of the optical device 1.
  • the scanning unit 5 diffraction grating
  • the diffraction angle ⁇ 2 is expressed by the following equation (1).
  • the diffraction angle changes by changing the wavelength of the laser beam emitted from the light source 2, and the position of the beam spot irradiated toward the region where the object 100 exists is Change.
  • a predetermined region on the object 100 can be scanned by continuously changing the wavelength from the wavelength ⁇ min to ⁇ max (or from ⁇ max to ⁇ min ) .
  • the reflected light of the laser beam reflected (scattered) by the object 100 is incident on the scanning unit 5 (diffraction grating).
  • the diffraction angle of the incident laser light is ⁇ 1 which is the same as the incident angle of the laser light emitted from the light source 2 on the scanning unit 5 (see the time of light reception in FIG. 2).
  • the reflected light of the laser light reflected by the beam splitter 4 passes through the FP filter 6 and is condensed on the light receiving element 8 by the lens 7.
  • a predetermined area is scanned by changing the wavelength of the light source 2 to change the diffraction angle of the laser light at the scanning unit 5, and the reflected light is received by the light receiving element 8.
  • light other than the reflected light of the laser light is also incident from the outside to the diffraction grating that constitutes the scanning unit 5, and light within the wavelength range that can be scanned by the diffraction grating is a beam splitter depending on the incident angle Since the light is diffracted toward 4, it is received by the light receiving element 8 together with the reflected light of the laser light.
  • FIG. 3 is a view showing a case where laser light is irradiated to A to E which are directions different from each other with respect to the diffraction grating (scanning unit 5).
  • the wavelength of the laser light in the case of irradiation in the direction of A is ⁇ 1
  • the wavelength of the laser light in the case of irradiation in the direction of B is ⁇ 2 .
  • the wavelength of the laser light in the case of irradiation in the direction of 3 and D is ⁇ 4
  • the wavelength of the laser light in the case of irradiation in the direction of E is ⁇ 5 .
  • the reflected light of the irradiated laser light is incident on the diffraction grating from the direction of A and is diffracted toward the beam splitter 4.
  • environmental light including light of wavelengths ⁇ 1 to ⁇ 5
  • light of various wavelengths other than reflected light is incident on the diffraction grating from all directions. Therefore, light of wavelengths ⁇ 1 to ⁇ 5 is also incident on the diffraction grating from the directions of A to E, and therefore these light may be diffracted toward the beam splitter 4 depending on the incident angle to the diffraction grating. is there.
  • FIG. 4 is a diagram showing the relationship between the wavelength and the light intensity in the above description.
  • the vertical axis is the light intensity
  • the horizontal axis is the wavelength.
  • the laser light emitted from the light source 2 is L
  • the ambient light is S.
  • the laser beam L, and S A is the same wavelength as the laser beam L of the ambient light S
  • from the direction of B of the ambient light S is a S B is the wavelength of the incident lambda 2
  • the wavelength of the lambda 4 enters from the direction of D out of the S C is the wavelength of lambda 3 which enters from the direction and C
  • ambient light S of ambient light S It becomes S E which is the wavelength of ⁇ 5 which is incident from the direction of E among the ambient light S and S D.
  • the light received by the light receiving element 8 is limited by the FP filter 6 so as not to pass light of wavelengths other than the wavelength of the irradiated laser light L.
  • the light receiving element 8 it is possible to cause the light receiving element 8 to receive environmental light other than the same wavelength as the wavelength ( ⁇ 1 ) of the laser light L in the example of FIGS. 3 and 4 described above. Become. This is because even when the wavelength of the laser light is changed to ⁇ 2 , ⁇ 3, etc., the wavelength to be transmitted by the FP filter 6 is changed to similarly limit the light to the same wavelength as the wavelength of the laser light L
  • the FP filter 6 changes at least one of the environmental light traveling toward the light receiving element 8 (light receiving section) through the scanning section 5 (first optical element) by changing the wavelength of light to be transmitted.
  • the light receiving portion is not made to receive light.
  • the wavelength control unit 9 changes the wavelength of the light to be transmitted to the FP filter 6 into the wavelength of the light to be emitted to the light source 2.
  • laser light is emitted from the light source 2 at the determined wavelength.
  • the laser beam emitted from the light source 2 is diffracted by the scanning unit 5 through the lens 3 and the beam splitter 4 in the direction according to the wavelength and is irradiated.
  • the laser beam emitted through the scanning unit 5 is reflected by the object 100 and diffracted toward the beam splitter 4 by the scanning unit 5, passes through the FP filter 6, and is received by the light receiving element 8 by the condenser lens 7. Ru.
  • the FP filter 6 is set to transmit only light of the same wavelength as the emitted laser light, so environmental light of a wavelength different from the reflected light of the emitted laser light can not be transmitted through the FP filter 6 Light is not received by the light receiving element 8.
  • the optical device 1 includes the light source 2 capable of changing the wavelength of the laser light, the scanning unit 5 scanning the predetermined range by diffracting the laser light according to the wavelength, and the laser And a wavelength control unit 9 configured to scan a predetermined range with laser light through the scanning unit 5 by changing the wavelength of light. Furthermore, by changing the wavelength of the light to be transmitted by changing the wavelength of the light to be transmitted through the light receiving element 8 that receives the reflected light that the scanned laser light is reflected by the object 100, at least And an FP filter 6 that does not allow part of the light receiving element 8 to receive light.
  • the wavelength control unit 9 controls the wavelength of light transmitted through the FP filter 6 in accordance with the wavelength of the laser light. By doing this, it becomes possible to change the wavelength of the FP filter 6 according to the wavelength of the laser light emitted from the light source 2. Therefore, it is possible to prevent the light receiving element 8 from receiving environmental light having a wavelength different from that of the laser light among environmental light traveling toward the light receiving element 8 through the scanning unit 5 by the FP filter 6.
  • the present optical device can use the distance to the object for measurement. That is, the CPU or the like of the distance measuring device equipped with the present optical device measures the time from when the light source 2 emits laser light to when it is received by the light receiving element 8 as reflected light reflected by the object 100. The distance from the optical device to the object 100 can be measured.
  • the optical device 1A includes the light source 2, the lens 3, the beam splitter 4, the scanning unit 5, the FP filter 6, the condensing lens 7, and the wavelength control unit A lens 9, a lens 10, a cylindrical lens 11, and a line sensor 12 are provided.
  • the light source 2, the lens 3, the beam splitter 4, the scanning unit 5, the FP filter 6, the condensing lens 7, and the wavelength control unit 9 are the same as those in the first embodiment.
  • the lens 10 and the cylindrical lens 11 convert the laser light emitted from the light source 2 from point-like into linear light with uniform intensity distribution (that is, a line beam whose light beam cross section is band-like light). That is, the light source 2, the lens 10, and the cylindrical lens 11 constitute an emitting unit according to the present embodiment.
  • the line sensor 12 is a light receiving sensor in which a plurality of light receiving elements are formed in a line along the extension direction of the line beam reflected by the beam splitter 4. Each light receiving element of the line sensor 12 outputs the light receiving intensity of the received light.
  • the line sensor 12 can be comprised by APD as a light receiving element, for example.
  • the optical apparatus 1A of this embodiment projects a line beam onto the object 100, and scans the area where the object 100 is present in one axis direction by the line beam toward the area where the object 100 is present.
  • the position of the beam spot to be irradiated is temporally changed.
  • the reflected light of the line beam is received by the line sensor 12 to obtain the received light intensity at each position in the extending direction of the line beam.
  • the FP filter 6 prevents the light receiving element 8 from receiving environmental light having a wavelength different from that of the line beam among the environmental light traveling toward the light receiving element 8 through the scanning unit 5 by the FP filter 6. Since this can be performed, it is possible to suppress the reception of light of wavelengths other than the reflected light of the laser light in the light receiving portion.
  • the light source 2, the lens 10 and the cylindrical lens 11 emit a laser beam having a belt-like cross section.
  • light can be simultaneously irradiated in the direction orthogonal to the direction in which the scanning unit 5 scans, and it becomes possible to use a configuration that does not use a movable unit.
  • the present invention is not limited to the above embodiment. That is, those skilled in the art can carry out various modifications without departing from the gist of the present invention in accordance with conventionally known findings. As long as the configuration of the optical device of the present invention is provided even by such a modification, it is of course included in the scope of the present invention.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Optics & Photonics (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

L'invention concerne un appareil optique avec lequel il est possible de supprimer la réception de lumière ayant une longueur d'onde à l'extérieur de la lumière réfléchie. Cet appareil optique (1) comprend : une source de lumière (2) dans laquelle il est possible de modifier la longueur d'onde de la lumière laser ; une unité de balayage (5) qui diffracte la lumière laser en fonction de sa longueur d'onde, ce qui permet de balayer une plage prescrite ; et une unité de commande de longueur d'onde (9) qui modifie la longueur d'onde de la lumière laser, balayant ainsi la plage prescrite à l'aide de la lumière laser par l'intermédiaire de l'unité de balayage (5). En outre, l'appareil optique comprend : un élément de réception de lumière (8) qui reçoit la lumière réfléchie obtenue par la lumière laser balayée qui est réfléchie par un objet (100) ; et un filtre FP (6) qui modifie la longueur d'onde de la lumière transmise, ce qui empêche l'élément de réception de lumière (8) de recevoir au moins une partie de la lumière ambiante qui est orientée vers l'élément de réception de lumière (8) par l'intermédiaire de l'unité de balayage (5).
PCT/JP2018/028798 2017-08-07 2018-08-01 Appareil optique WO2019031327A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-152324 2017-08-07
JP2017152324 2017-08-07

Publications (1)

Publication Number Publication Date
WO2019031327A1 true WO2019031327A1 (fr) 2019-02-14

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2021235185A1 (fr) * 2020-05-22 2021-11-25 株式会社Ｓｃｒｅｅｎホールディングス Scanner optique, dispositif de reconnaissance d'objet et procédé de balayage optique
JPWO2021260949A1 (fr) * 2020-06-26 2021-12-30
JP7628126B2 (ja) 2020-01-03 2025-02-07 オーロラ・オペレイションズ・インコーポレイティッド ソリッドステートビームステアリングを含む高解像度周波数変調連続波ＬｉＤＡＲ

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63189823A (ja) * 1987-02-03 1988-08-05 Fujitsu Ltd ホログラム偏向装置
JP2009047434A (ja) * 2007-08-13 2009-03-05 Ihi Corp 電磁波距離測定装置
JP2016217971A (ja) * 2015-05-25 2016-12-22 富士通株式会社 レーザ測距装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63189823A (ja) * 1987-02-03 1988-08-05 Fujitsu Ltd ホログラム偏向装置
JP2009047434A (ja) * 2007-08-13 2009-03-05 Ihi Corp 電磁波距離測定装置
JP2016217971A (ja) * 2015-05-25 2016-12-22 富士通株式会社 レーザ測距装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7628126B2 (ja) 2020-01-03 2025-02-07 オーロラ・オペレイションズ・インコーポレイティッド ソリッドステートビームステアリングを含む高解像度周波数変調連続波ＬｉＤＡＲ
WO2021235185A1 (fr) * 2020-05-22 2021-11-25 株式会社Ｓｃｒｅｅｎホールディングス Scanner optique, dispositif de reconnaissance d'objet et procédé de balayage optique
TWI804861B (zh) * 2020-05-22 2023-06-11 日商斯庫林集團股份有限公司 光掃描裝置、對象物辨識裝置及光掃描方法
JP7509578B2 (ja) 2020-05-22 2024-07-02 株式会社Ｓｃｒｅｅｎホールディングス 光走査装置、対象物認識装置および光走査方法
JPWO2021260949A1 (fr) * 2020-06-26 2021-12-30

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