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WO2019065069A1 - Composant de dispositif de mesure - Google Patents

Composant de dispositif de mesure Download PDF

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Publication number
WO2019065069A1
WO2019065069A1 PCT/JP2018/032225 JP2018032225W WO2019065069A1 WO 2019065069 A1 WO2019065069 A1 WO 2019065069A1 JP 2018032225 W JP2018032225 W JP 2018032225W WO 2019065069 A1 WO2019065069 A1 WO 2019065069A1
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WO
WIPO (PCT)
Prior art keywords
flow path
filter
base
filter portion
flow
Prior art date
Application number
PCT/JP2018/032225
Other languages
English (en)
Japanese (ja)
Inventor
井上　将吾
Original Assignee
京セラ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 京セラ株式会社 filed Critical 京セラ株式会社
Priority to JP2019544461A priority Critical patent/JP6920451B2/ja
Publication of WO2019065069A1 publication Critical patent/WO2019065069A1/fr

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01N—GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR MACHINES OR ENGINES IN GENERAL; GAS-FLOW SILENCERS OR EXHAUST APPARATUS FOR INTERNAL COMBUSTION ENGINES
    • F01N3/00—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust
    • F01N3/02—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust
    • F01N3/021—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters
    • F01N3/022—Exhaust or silencing apparatus having means for purifying, rendering innocuous, or otherwise treating exhaust for cooling, or for removing solid constituents of, exhaust by means of filters characterised by specially adapted filtering structure, e.g. honeycomb, mesh or fibrous
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/60—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrostatic variables, e.g. electrographic flaw testing

Definitions

  • the present disclosure relates to parts for measurement devices.
  • Patent Document 1 As a part for a measuring device used to measure the amount of particulate matter in exhaust gas discharged from a diesel engine, for example, one described in JP-A-2014-159783 (hereinafter referred to as Patent Document 1) It has been known.
  • the component for a measuring apparatus described in Patent Document 1 is provided so as to sandwich the filter when at least one cell is a measurement cell and a filter divided into a plurality of cells by porous partition walls. And a pair of electrodes.
  • a part for a measuring apparatus is a filter made of a ceramic, a base having a flow path in which gas flows inside, and a porous ceramic filter provided in the flow path so as to divide the flow path into a plurality. Section, and a pair of electrodes for capacitance formation provided on the base portion so as to sandwich the filter section, and on the surface of the filter section facing the flow path, the flow path advances It has a groove extending in a direction intersecting the direction.
  • the part for a measuring apparatus is made of a ceramic base made of a ceramic and having a flow path through which gas flows, and porous ceramic provided inside the flow path to divide the flow path into a plurality.
  • a pair of electrodes for forming a capacitance formed on the base portion so as to sandwich the filter portion, and the base portion is an outer surface located along the traveling direction of the flow path.
  • the outer surface has a plurality of grooves extending in a direction intersecting the direction of travel of the flow path.
  • (A) is a perspective view of a modification of a part for a measuring apparatus
  • (b) is a sectional view showing a cross section (longitudinal section) taken along the line CC of (a)
  • (c) is a D 7 is a cross-sectional view showing a cross section (longitudinal cross section) along the line D-D.
  • FIG. 32 is a cross-sectional view showing a longitudinal cross section taken along line XX of the part for a measuring apparatus shown in FIG. 31. It is a cross-sectional view which shows another example of parts for measuring devices. It is a cross-sectional view which shows another example of parts for measuring devices. It is a perspective view showing an example of parts for measuring devices of this indication. It is a perspective view which shows the other example of the components for measuring devices. It is a perspective view which shows the other example of the components for measuring devices. It is a cross-sectional view which shows another example of parts for measuring devices. It is a cross-sectional view which shows another example of parts for measuring devices. It is a cross-sectional view which shows another example of parts for measuring devices. It is a cross-sectional view which shows another example of parts for measuring devices.
  • FIG. 1 is a perspective view showing the configuration of a measuring apparatus component 100.
  • the measuring device component 100 includes a base 1 having a flow passage 11 inside, and a filter unit 2 provided inside the flow passage 11.
  • the measuring apparatus component 100 further includes a pair of electrodes 3 for capacitance formation on the base 1.
  • the measuring device component 100 is used, for example, to measure the amount of particulate matter in the exhaust gas emitted from a diesel engine.
  • the base 1 is a member for forming a gas flow channel 11.
  • the base 1 is made of, for example, an insulating ceramic such as alumina.
  • the base 1 has, for example, one or more flow channels 11 inside.
  • the base 1 has a rectangular parallelepiped outer shape, and has two flow paths 11 inside.
  • the flow channel 11 extends in the longitudinal direction of the main surface of the base 1.
  • Each flow path 11 is divided into a plurality of parts by the filter unit 2, and each one of the divided spaces is also called a flow path 11.
  • the flow passage 11 opens at one side of the base 1 and at the side opposite to the one.
  • the two flow paths 11 are arranged in the thickness direction of the base 1.
  • the base 1 can set, for example, the length in the longitudinal direction of the main surface to 40 mm, the length (width) in the lateral direction to 10 mm, and the thickness to 5 mm.
  • the flow path 11 (flow path 11 between the filter parts 2) which was able to be divided by the filter part 2 can set the space
  • the length of the flow passage 11 is equal to the length of the base 1 and can be set to 40 mm.
  • the filter unit 2 is a member for collecting particulate matter in gas. As shown in FIG. 2, the filter unit 2 is provided inside the flow passage 11. As shown in FIG. 3, in the measuring apparatus component 100 of the present embodiment, the filter unit 2 has a plate shape, and is provided along the longitudinal direction of the base 1 (along the longitudinal direction of the flow passage 11) It is done. A plurality of filter portions 2 are provided to divide the flow path 11 of the base 1 into a plurality of regions. In the measuring apparatus component 100 of the present embodiment, four filter units 2 are provided for one flow passage 11. Each of the four filter units 2 is arranged in parallel.
  • the filter unit 2 is made of porous ceramic. As porous ceramics, porous alumina is mentioned, for example.
  • the filter portion 2 is made of porous alumina so that the gas flowing through the flow path 11 can pass through the filter portion 2. At this time, the filter unit 2 can collect (deposit) a part of the particulate matter contained in the gas.
  • the wall surface of the flow passage 11 of the base 1 may be denser than the surface of the filter unit 2.
  • the deposition of the particulate matter can be easily concentrated on the filter portion 2, and the linearity between the deposition amount of the particulate matter and the measurement value can be enhanced.
  • the measurement accuracy of the measuring device component 100 can be improved.
  • the wall surface of the flow path 11 of the base 1 is denser than the surface of the filter part 2 can be confirmed, for example, by the following method. Specifically, the wall surface of the flow passage 11 of the base 1 and the surface of the filter unit 2 are observed using a scanning electron microscope (SEM). Then, image processing is performed on the obtained SEM image to determine the porosity of the surface. As a result, it can be considered that the smaller porosity is more precise.
  • the porosity of the wall surface of the flow path 11 of the base 1 can be set, for example, to 3% or less.
  • the porosity of the surface of the filter portion 2 can be set to, for example, 40 to 70%.
  • the wall surface of the flow path 11 here means the whole inner surface of the base 1 which faces gas among the flow paths 11. As shown in FIG. That is, the ceiling surface and the bottom surface are also included in the wall surface here.
  • the porosity of the wall surface of the flow path 11 of the base 1 By setting the porosity of the wall surface of the flow path 11 of the base 1 to 3% or less, it is possible to make it difficult for the particulate matter to enter the inside of the base 1. As a result, the possibility of the particulate matter adhering to the electrode 3 can be reduced, so that the particulate matter adheres to the electrode 3 and the electrostatic capacitance between the electrodes 3 can not be measured correctly. It can be reduced. As a result, the measurement accuracy of the measuring device component 100 can be further improved.
  • the base 1 and the filter part 2 are integrally formed.
  • integrally forming the base portion 1 and the filter portion 2 the long-term reliability of the measuring device component 100 can be improved.
  • the base 1 and the filter unit 2 are separately formed and then joined, for example, there is a possibility that peeling may occur from the interface of the base 1 and the filter unit 2.
  • the filter material 2 may not be properly fixed to the base 1 due to deterioration of the bonding material.
  • integrally forming (baking) the base 1 and the filter portion 2 the possibility of deterioration from the interface between the base 1 and the filter portion 2 can be reduced.
  • the thermal expansion coefficients of the base 1 and the filter part 2 can be made close to each other. This can improve the long-term reliability of the measuring device component 100 under the heat cycle.
  • “consists of the same ceramic” means that the main components (components occupying 80% by mass or more) of the ceramic constituting the base 1 and the filter unit 2 are the same.
  • the base 1 and the filter part 2 consist of alumina.
  • Alumina is preferable in that it is easy to control the porosity of the surface as described below, in addition to being inexpensive to produce.
  • the base 1 having a surface with a porosity of 3% or less and the filter portion 2 having a surface with a porosity of about 40 to 70% can be integrally formed, for example, by the following method. Specifically, for the portion to be the base 1, a ceramic paste containing 93% by mass of alumina powder and 7% by mass of a resin binder is used. Moreover, about the part used as the filter part 2, the ceramic paste containing 55 mass% of alumina powder, 38 mass% of pore forming materials, and 7 mass% of resin binders is used. These ceramic pastes are processed into green sheets of a predetermined shape using a doctor blade method. At this time, the electrode 3 for capacitance formation can be formed by printing the conductive paste on the green sheet. Then, these green sheets are pressure-laminated using a uniaxial press. If necessary, the surface is processed and then fired at 1500 ° C. to form the above-described porosity filter portion 2 and base portion 1.
  • the dimensions of the filter portion 2 are, for example, 0.3 mm in length along the width direction of the base 1 and 1 equal to the distance between the bottom of the flow passage 11 and the ceiling surface in length along the thickness direction of the base 1
  • the length along the length direction of the base 1 can be set to 40 mm.
  • the electrode 3 is a member for forming a capacitance. As shown in FIG. 2, the electrodes 3 are provided in a pair on the base 1 so as to sandwich the filter portion 2. More specifically, when a plurality of flow paths 11 are provided, the electrodes 3 are provided so as to sandwich the filter portion 2 located in each of the flow paths 11. The electrodes 3 may be provided, for example, to cover the plurality of filter units 2 or may be provided to correspond to each of the filter units 2. And as shown in FIG. 2, when two flow paths 11 are provided in the up-down direction like the measurement apparatus component 100 of the present embodiment, the electrode 3 is located above the upper flow path 11, It may be located between the upper flow passage 11 and the lower flow passage 11 and below the lower flow passage 11. The electrode 3 located between the upper flow path 11 and the lower flow path 11 can form a capacitance with the upper electrode 3 of the upper flow path 11, and Capacitance can be formed between the lower flow path 11 and the lower electrode 3 as well.
  • a capacitance is formed between the pair of electrodes 3 sandwiching the filter portion 2.
  • the capacitance between the pair of electrodes 3 changes.
  • an external detection device it is possible to measure the deposition amount of particulate matter collected by the filter unit 2.
  • the electrode 3 is embedded in the base 1. This can reduce the risk of the electrode 3 being affected by gas corrosion and the like. Further, since the possibility of particulate matter or the like adhering to the surface of the electrode 3 can be reduced, the measurement accuracy of the measuring device component 100 can be improved.
  • the electrode 3 is provided in the inside of the base 1 (it embed
  • the electrode 3 has, for example, a linear wiring pattern, and is provided along the filter unit 2.
  • the provision of the electrode 3 along the filter unit 2 improves the linearity between the amount of particulate matter collected by the filter unit 2 and the change in capacitance between the electrodes 3. be able to.
  • the electrode 3 is provided along the filter portion 2 so that the change in capacitance due to particulate matter adhering to other than the filter portion 2 (for example, the wall surface of the flow path 11) can be reduced.
  • the shape of the electrode 3 in plan view is not limited to a linear shape, and may be, for example, a circular shape or a rectangular shape.
  • the electrode 3 by forming the electrode 3 into a linear wiring pattern, the resistance value can be increased as compared with the case where the electrode 3 is formed into a circular shape or a rectangular shape. Therefore, it can also function as a heater by applying a high voltage to this electrode 3. Thereby, the particulate matter collected by the filter unit 2 can be removed by heating.
  • a direct current may be supplied or an alternating current may be supplied.
  • an alternating current may be supplied.
  • the electrode 3 has a linear wiring pattern, and is provided in the region of the base 1 that sandwiches the filter portion 2 and the region that does not sandwich the filter portion 2 At this time, the portion of the electrode 3 located in the region not sandwiching the filter portion 2 may be narrower than the portion located in the region sandwiching the filter portion 2.
  • the width of a portion of the electrode 3 located in the region sandwiching the filter portion 2 is secured to form an electrostatic capacitance between the electrodes 3 favorably, while the portion located in the region where the filter is not sandwiched
  • the resistance value can be increased by narrowing the width of.
  • each of the pair of electrodes 3 sandwiching the filter portion 2 connects the end portions of the portions provided along each of the plurality of filter portions 2 and meanders meandered It is a single linear wiring pattern. And the edge part of the one electrode is pulled out to the outer surface of the base 1, and each of a pair of electrodes 3 becomes wiring of one system.
  • each of the pair of electrodes 3 is configured by two meander-shaped linear wiring patterns, and is a two-system wiring. In the example shown in FIG. 11, the two wiring patterns are arranged side by side in the width direction of flow passage 11, and in the example shown in FIG. 12, the two wiring patterns are arranged side by side in the length direction of flow passage 11. ing.
  • each of the pair of electrodes 3 arranged across the filter portion 2 is a two-system wiring
  • the particulate matter collected by the electrode 3 can be removed. Therefore, the particulate matter can be detected continuously without stopping the detection of the particulate matter for removing the particulate matter.
  • each of a pair of electrodes 3 arranged on both sides of the filter part 2 is wiring of 2 systems, since it is sufficient if it is multiple systems, 3 or more systems It may be a wiring.
  • the electrode 3 For example, a metal material such as platinum or tungsten can be used as the electrode 3.
  • the width can be set to 2 mm, the length to 38 mm, and the thickness to 30 ⁇ m.
  • the base 1 has a shape having the flow passage 11 inside, but the invention is not limited thereto. Specifically, for example, as shown in FIG. 6, a space is separated between a pair of bases 1 and a pair of bases 1 which are plate-like members made of ceramics and whose main surfaces are opposed to each other.
  • Filter portion 2 made of porous ceramic provided so as to form a flow path, and a pair of electrodes for capacitance formation provided respectively on a pair of base portions 1 so as to sandwich the filter portion 2 3 and the opposing main surfaces of the pair of base portions 1 may be denser than the surface of the filter portion 2.
  • the flow path 11 is formed by dividing the space between the base 1 and the base 1 by the filter unit 2.
  • the particulate matter is collected by the filter unit 2 by flowing a gas through the flow passage 11, and the amount of the particulate matter can be measured by detecting a change in capacitance between the electrodes 3. Also in such a measuring apparatus component 100, measurement accuracy can be improved as in the case of the measuring apparatus component 100 described above.
  • three base portions 1 are provided side by side with two spaces in between, and six filter portions 2 are provided in each of the two spaces. It is provided.
  • the number of the bases 1 may be two or three or more, and the number of the filter portions 2 may be appropriately changed.
  • the base 1 in contact with the filter unit 2 may be provided as a side wall outside the outer filter unit 2. This is the same as that in the measuring device part 100 shown in FIG. 2, in which the outer filter part 2 is in contact with the side wall of the base 1.
  • the rigidity of the measuring device component 100 can be improved, and the exposed area of the relatively small strength filter portion 2 can be reduced, so that deformation due to thermal stress or damage due to external force can be suppressed. Be reliable and reliable.
  • all the wall surfaces facing the flow path 11 become the filter portion 2, and the collection efficiency is higher and the sensitivity is higher.
  • the edge part of the flow path 11 was opening, it is not restricted to this.
  • the end of the flow path 11 may be partially sealed by the sealing portion 4.
  • one end of the flow passage 11 is partially open, and a portion of the other end facing the opening of the one end is sealed.
  • One end of the second end may be partially sealed, and a portion opposite to the sealed end of the other end may be open.
  • the gas flowing inside the flow passage 11 can easily pass through the filter unit 2, so that the particulate matter can be easily collected by the filter unit 2.
  • the measurement accuracy of the measuring device component 100 can be improved.
  • the flow of gas is indicated by arrows.
  • sealing part 4 resin materials, such as a fluorine resin, can be used, for example.
  • other sealing part 4 it is preferable to consist of the same ceramics as the filter part 2 or the base 1. As shown in FIG. Thereby, since the thermal expansion difference of the filter part 2 or the base 1 and the sealing part 4 can be made small, the long-term reliability under a heat cycle can be improved.
  • the filter portion 2 is made of ceramics and integrally formed (fired) together with the base 1 and the sealing portion 4. As a result, the possibility of deterioration from the interface between the sealing portion 4 and the base 1 or between the sealing portion 4 and the filter portion 2 can be reduced.
  • the measuring apparatus component 100 shown in FIGS. 8 to 10 has a plurality of filters 2 having different degrees of porosity.
  • Higher value added components such as measuring device parts 100 that can know the particle size distribution of particulate matter and long-life measuring device parts 100 that can capture particulate matter continuously for a long time can do.
  • the filter section 2 made of porous ceramic has three types of filter sections 2a, 2b, 2c having different pore sizes and pore diameters.
  • it has a first filter portion 2a having a relatively large pore diameter, a third filter portion 2c having a small pore diameter, and a second filter portion 2b having a pore diameter in between. ing.
  • the particulate matter collected by each of the filter parts 2a, 2b and 2c have different average particle sizes from one another. . Therefore, the particle size distribution of the collected particulate matter can be understood from the capacitance detected by the electrodes 3 sandwiching each of the plurality of filter parts 2a, 2b, 2c having different pore diameters, for example, the exhaust containing the particulate matter It is possible to estimate the combustion state in the engine that discharges gas and the state of the PM filter located upstream of the measuring device part 100.
  • the measuring device part 100 can measure water or a gas such as butane gas, in addition to the particulate matter.
  • the plurality of filter portions 2a, 2b and 2c having different pore diameters are arranged in the order of the size of the pore diameter.
  • three stages of spaces (channels 11) are arranged in the vertical direction of the drawing in the filter unit 2, and the first filter unit 2 a is disposed in the upper stage, and the middle stage
  • the second filter unit 2 b is disposed in the lower part
  • the third filter unit 2 c is disposed in the lower part. That is, the filter parts 2 of the same pore diameter are arranged in a line at each stage.
  • the electrodes 3 sandwiching the filter portion 2 having the same pore diameter can be arranged side by side, and these can be put together as shown in the example shown in FIG.
  • the type of the pore size of the filter portion 2 is not limited to three, and may be two or four or more. Moreover, in the example shown in FIG. 8, although the filter part 2 of the same pore diameter is arranged in a line in a horizontal direction, you may arrange in a line in a vertical direction. They may be randomly arranged, but are preferably arranged in a line as described above.
  • the pore size is an average pore size.
  • an SEM image of the surface or cross section of the filter unit 2 may be taken, and the average pore diameter of pores in the range of the SEM image may be calculated by image analysis.
  • the magnification of the SEM is 100 ⁇ , and it may be performed using an SEM image of a 1.0 mm ⁇ 1.3 mm field of view.
  • the pore diameter of the filter portion 2 is, for example, 1 ⁇ m to 60 ⁇ m.
  • the pore diameter of the first filter unit 2a is 10 .mu.m to 60 .mu.m.
  • the pore diameter of the filter portion 2b may be 5 ⁇ m to 30 ⁇ m, and the pore diameter of the third filter portion 2c may be 1 ⁇ m to 15 ⁇ m.
  • the filter part 2 which consists of porous ceramics has two types of filter parts 2d and 2e from which a porosity differs.
  • it has the 4th filter part 2d with a relatively large porosity, and the 5th filter part 2e with a small porosity.
  • the porosity of the filter portion 2 located outside is larger than the porosity of the filter portion 2 located inside.
  • the fourth filter portion 2d is disposed outside, and the fifth filter portion 2e is disposed inside.
  • the fourth filter portion 2d is disposed outside in the vertical direction, and the fifth filter portion 2e is disposed inside.
  • Three stages of spaces (flow channels 11) are arranged in the vertical direction of the drawing, the fourth filter portion 2d is disposed in the upper and lower spaces (flow channels 11), and the middle space (flow channels 11)
  • a fifth filter unit 2e is disposed.
  • the fourth filter portion 2d is disposed on the outer side in the left-right direction of the drawing, and the fifth filter portion 2e is disposed on the inner side.
  • Spaces (channels 11) of three tiers are arrayed in the vertical direction, and six filter portions 2 are arranged in the horizontal direction in each space. Of the six filter units 2, two on each side are the fourth filter unit 2d, and two located between them are the fifth filter unit 2e.
  • the gas containing the particulate matter flows in the space (flow path 11) in the measuring device part 100, it flows in the central portion of the space (the inner region in a cross sectional view perpendicular to the length direction of the flow path 11)
  • the flow rate of the gas tends to be larger than the flow rate of the gas flowing on the outer peripheral portion of the space (the outer area in a cross sectional view perpendicular to the length direction of the flow path 11).
  • the inner filter portion 2 collects more particulate matter than the outer filter portion 2, and clogging of the particulate matter also becomes faster. If the clogging of the particulate matter is early, the frequency of regeneration for removing the particulate matter by heating with the heater becomes high, so that the deterioration of the part 100 for the measuring apparatus also becomes fast.
  • the porosity of the filter portion 2 (fourth filter portion 2d) positioned outside is the filter portion 2 positioned inside
  • gas easily flows toward the filter portion 2 (fourth filter portion 2d) having a large porosity, and a cross section perpendicular to the longitudinal direction of the flow path ,
  • the gas flow rate difference by position becomes smaller. Therefore, only the inner filter portion 2 is not quickly clogged with the particulate matter, so that the particulate matter can be continuously collected for a long time, and a long-life measuring instrument component 100 can be obtained.
  • the filter portion 2 in which the porosity of the filter portion 2 (fourth filter portion 2 d) located in the outer side in the vertical direction and the outer side in the lateral direction is respectively
  • the porosity of the filter section 2 located on the outer side in the vertical and horizontal directions and the outer periphery in the cross section, which is larger than the porosity of 2e) is the inner side of the vertical and horizontal directions and the central part in the cross section. It may be larger than the porosity of the filter part 2 located.
  • the fourth filter unit 2d is arranged on the outer side in the vertical direction and the fifth
  • the structure in which the filter portion 2e is disposed can be easily manufactured by the manufacturing method as described later.
  • the mercury intrusion method JIS specification R1655: 2003
  • the image analysis of a SEM image can be performed by capturing an SEM image of the cross section of the filter unit 2 and calculating the area ratio of pores within the range of the SEM image by image analysis.
  • the magnification of the SEM is 100 ⁇ , and it may be performed using a SEM image of a 1.0 mm ⁇ 1.3 mm field of view.
  • the porosity of the filter portion 2 is 40 to 70%
  • the porosity of the filter portion 2d having a relatively high porosity and the filter portion 2e having a relatively low porosity is 50 to 70% and 40 to 60, respectively. %And it is sufficient.
  • the method is characterized by including the steps of laminating the sheets 22 to form the laminate 102, and firing the laminate 102.
  • the above-described measuring device component 100 in which the dense base 1 made of ceramic and the filter part 2 made of porous ceramic are integrally formed.
  • FIG. 13 is a schematic view showing a method of manufacturing a part for measuring apparatus in each process.
  • a plurality of first ceramic green sheets 12 and a plurality of second ceramic green sheets 22 are prepared.
  • the first ceramic green sheet 12 is a portion to be sintered to be the base 1 in a later firing step
  • the second ceramic green sheet 22 is a portion to be the filter portion 2 as well.
  • the filter portion 2 is made of porous ceramic in contrast to the base 1 made of dense ceramic. Therefore, the second ceramic green sheet 22 is such that pores are increased (the porosity is increased) when the first ceramic green sheet 12 is sintered in the later firing step.
  • the second ceramic green sheet 22 contains a large amount of components that become pores when sintered in the firing step. Specifically, those having a large amount of an organic binder component, those containing a pore forming material, and the like. Or it is a thing with few sintering adjuvant components, in order to reduce sinterability and to increase porosity.
  • a pore former in that adjustment of pore diameter and porosity is easy.
  • the pore former is in the form of particles burned off in the subsequent firing step.
  • a pore forming material an acrylic resin bead (methacrylic acid ester type copolymer), carbon powder, crystalline cellulose is mentioned, for example.
  • the particle diameter of the pore former may be 1 to 1.2 times the pore diameter of the filter portion 2.
  • a pore-forming material having an average particle diameter of 1 ⁇ m to 72 ⁇ m may be used.
  • the adjustment of the porosity can be adjusted by the particle size and the amount of the pore forming material.
  • the first ceramic green sheet 12 is a base 1 made of alumina ceramic, first, an alumina powder and a sintering aid (powder such as SiO 2 , MgO, CaO, etc.) and an organic binder such as an acrylic resin An organic solvent such as toluene or acetone or a solvent such as water is mixed to prepare a slurry.
  • the slurry may be formed into a sheet by a film forming method such as a doctor blade method.
  • the second ceramic green sheet 22 may be prepared by adding a pore former to the slurry for the first ceramic green sheet 12.
  • the second ceramic green sheet 22 includes a pore forming material with respect to the first ceramic green sheet 12.
  • the filter portion 2 has a different pore diameter, for example, as a pore forming material to be added to the slurry for the second ceramic green sheet 22, one having an average particle diameter different from one another is used. A plurality of types of second ceramic green sheets 22 having different average particle sizes may be produced.
  • the filter portion 2 has different porosity, for example, the amounts of the pore forming materials added to the slurry for the second ceramic green sheet 22 are made different from each other, and the average particle sizes of the included pore forming materials differ.
  • a plurality of types of second ceramic green sheets 22 may be produced.
  • the electrode layer 32 is formed on the first ceramic green sheet 12.
  • the electrode layer 32 is sintered in the later firing step to be the electrode 3.
  • the electrode layer 32 may be formed by applying a metal paste containing a metal material such as platinum or tungsten as a main component of the electrode 3 on the first ceramic green sheet 12.
  • the metal paste can be prepared by adding a resin binder and a solvent to the powder of the metal material and kneading it.
  • the metal paste may be applied to the wiring pattern of the electrode 3 by screen printing or the like.
  • the through holes 112 are formed in the second ceramic green sheet 22.
  • the through hole 112 is a portion to be the flow path 11.
  • the through holes 112 may be formed in the second ceramic green sheet 22 by punching using a die or laser processing.
  • a laminate is formed by laminating the first ceramic green sheet 12 in which the electrode layer 32 is formed and the second ceramic green sheet 22 in which the through holes 112 are formed.
  • Form 102 In the example shown in FIG. 13 (d), two first ceramic green sheets 12 are laminated to form three base 1 portions, and two second ceramic layers are formed as filter portions 2.
  • the green sheets 22 are laminated and formed. Any one or three or more ceramic green sheets may be used.
  • the example shown in FIG. 13D is a laminate 102 in the case of producing the measuring device component 100 in which the electrode 3 is embedded in the base 1 as in the example shown in FIG. Of the first ceramic green sheet 12.
  • the first ceramic green sheet 12 in which the electrode layer 32 is not formed is laminated on the first ceramic green sheet 12 in which the electrode layer 32 is formed.
  • the first ceramic green sheet in which the electrode layer 32 is not formed on the first ceramic green sheet 12 in which the electrode layer 32 is formed It is sufficient to superimpose only the portion to be the filter portion 2 of the second ceramic green sheet 22 on the layer 12 and further to superimpose the frame-shaped first ceramic green sheet 12 so as to surround the periphery.
  • the base 1 in contact with the filter unit 2 is provided as a side wall outside the filter unit 2 of the outside of the measuring apparatus component 100 as shown in FIG.
  • the first ceramic green sheet 12 may be further attached to the side surface of the laminate 102.
  • the inner side surface of the frame-shaped first ceramic green sheet 12 may be in contact with the portion of the second ceramic green sheet 22 to be the filter portion 2 located on the outside.
  • the first ceramic green sheet 12 in which the electrode layer 32 is formed and the second ceramic green sheet 22 in which the through holes 112 are formed are overlapped, and are applied by uniaxial pressing or the like. It may be integrated by pressing and pressing.
  • the through holes 112 are filled with a resin or the like that is burnt away in a later firing process, deformation of portions of the first ceramic green sheet 12 located above and below the through holes can be suppressed.
  • the laminated body 102 is fired to form the measuring device component 100 in which the dense base 1 made of ceramic and the filter part 2 made of porous ceramic are integrally formed as described above.
  • the firing temperature may be 1500 ° C. to 1600 ° C. if the base 1 and the filter portion 2 are made of alumina ceramic.
  • the interval between the adjacent filter parts 2 located on the center side (central part) of the flow path 11 is adjacent to the end side (peripheral part) of the space (flow path 11) It may be larger (wider) than the interval between the matching filter units 2.
  • the flow rate of the gas flowing in the central portion of the flow passage 11 tends to be larger than the flow rate of the gas flowing in the outer peripheral portion, so the gas can be increased by increasing the distance between the filter portions 2 in the central portion. It can flow smoothly.
  • the thickness of the filter portion 2 located on the center side (central portion) of the space (flow path 11) is the thickness of the filter portion 2 located on the end side (outer periphery) of the flow path 11 It may be smaller than the thickness.
  • the electrode 3 is provided up to the end of the base 1 (for example, the electrode 31 is provided at the upper right end of the base 1).
  • forming the electrode 3 (31 or the like) at the end of the base 1 depends on the magnitude of the voltage to be applied to the electrode 3 in order to secure the insulation distance from the outside. There may be a need for improvement such as increasing the
  • the thickness of the filter portion 2 located on the center side of the flow path 11 may be smaller than the thickness of the filter portion 2 located on the end side of the flow path 11.
  • the electrode 3 provided on the center side of the flow passage 11 is preferable even without providing the electrode 3 at the end of the base 1 Detection of particulate matter. This makes it possible to improve the particulate matter detection system while preventing the upsizing of the measuring device component 100.
  • the gas easily flows to the end side.
  • the gas originally tends to flow to the center side, but the configuration shown in FIG. 16 makes it easy to flow the gas to the end side, so the gas flow rate in each flow path 11 Can be brought closer to uniformity.
  • the fact that the flow rate of the gas approaches uniform means that the amount of particulate matter collected in each of the filter portions 2 also approaches uniform.
  • the time required to remove the particulate matter by heating can be shortened.
  • the long-term reliability of the measuring device component 100 can be improved.
  • the thickness of the filter portion 2 decreases with distance from the center side, but the thickness of the filter portion 2 located at the outermost periphery is not limited to this. Specifically, "the filter portion 2 located at the outermost periphery is thicker than the filter portion 2 located at the end of the filter portions 2 other than the filter portion 2 located at the outermost periphery". .
  • the flow rate of the gas in each of the flow paths 11 is made to be uniform, the escape of the gas from the filter part 2 on the outermost periphery is easily reduced. Therefore, the flow rate of the gas in each flow path 11 can be made to approach uniformly uniformly, ensuring the gas volume which passes components 100 for measurement apparatuses.
  • the wall surface of the filter unit 2 facing the flow passage 11 may be recessed.
  • the wall surface of the filter unit 2 facing the flow passage 11 may have a shape in which the center is recessed in an arc shape.
  • the outer wall surface of the filter portion 2 positioned at the outermost periphery of the plurality of filter portions 2 is recessed It may be More specifically, the center may have an arc-shaped recessed shape. As a result, the possibility of the filter unit 2 coming into contact with the outside can be reduced, so that the possibility of the filter unit 2 being broken can be reduced. Thus, the long-term reliability of the measuring device component 100 can be improved.
  • the base 1 has a glass component, as shown in FIG. 19, this glass component may spread to a part of the filter portion 2.
  • the filter unit 2 has the glass diffusion region 20 in the vicinity of the base 1.
  • the porosity of the upper layer 22 and lower layer 24 adjacent to the base 1 is middle layer 23 It may be larger than the porosity in.
  • the thermal stress generated in the filter portion 2 and the base 1 can be absorbed by the upper layer 22 and the lower layer 24 under the heat cycle.
  • This can reduce the possibility of thermal stress in the middle layer 23 where the gas flows most.
  • the possibility of the middle layer 23 being damaged can be reduced, and the long-term reliability of the measuring device component 100 can be improved.
  • the portion of the base 1 facing the flow path 11 may be raised in an arc shape.
  • strength to a bending stress can be improved.
  • the long-term reliability of the measuring device component 100 can be improved.
  • the portion of the base 1 facing the flow path 11 may be recessed in an arc.
  • the movement of the gas flowing through the flow path 11 can be made smoother. Specifically, stagnation of the gas in the vicinity of the corner formed by the surface of the base 1 and the wall surface of the filter portion 2 can be reduced. Thereby, the sensitivity of the measuring apparatus component 100 can be improved.
  • the corners of the flow path 11 be smooth. More specifically, the portion of the base portion 1 facing the flow passage 11 is recessed in an arc shape, the wall surface of the filter portion 2 facing the flow passage 11 is recessed in an arc shape, and these are smoothly and continuously Is preferred. Thereby, the flow of gas can be made smoother, and the sensitivity of the measuring device component 100 can be further improved.
  • a corner portion formed of a portion of the base 1 facing the flow passage 11 and a wall surface of the filter portion 2 facing the flow passage 11 is arc-shaped It is also good. Thereby, the flow of gas at the corners can be made smoother.
  • angular part which consists of the part which faces the flow path 11 among the base 1 and the wall surface which faces the flow path 11 among the filter parts 2 is arc-shaped
  • angular part is arc is a flow path 11 may be continuous in the longitudinal direction. Thereby, the flow of gas at the corners can be made smoother.
  • a recess may be provided on the wall surface of the filter portion 2 facing the flow passage 11.
  • the flow channel 11 extends from one side surface of the base 1 to the side surface located opposite to this, but the invention is not limited thereto.
  • one end of the flow channel 11 opens to one side surface of the base 1 and the other end opens to a surface (lower surface) located at one end of the base 1 Good.
  • it may be open to two opposing side surfaces of the base 1 and a surface (lower surface) located at one end of the base 1.
  • gas inlets and outlets may be provided on adjacent surfaces.
  • the filter part 2 may consist of two parts from which width differs.
  • the filter unit 2 may be composed of a portion with a large width (large portion) and a portion with a small width (small portion).
  • the filter part 2 has a thick part, when external force is applied to the measuring device component 100 in the vertical direction, the possibility of the filter part 2 being broken can be reduced.
  • the width of the flow path 11 is increased toward the outer side in the vertical direction (in the upper side in the upper side flow path 11 in the upper side, in the lower side in the flow path 11 positioned in the lower side).
  • the shape may be wide. More specifically, the flow path 11 may have a trapezoidal shape in which the long side is located outside. Generally, when viewed in a longitudinal cross section, the gas tends to be less likely to flow on the outer side than the inner side (center side) of the flow path 11, but by making the flow path 11 into the above shape Gas retention outside the passage 11 can be reduced.
  • the flow path 11 is trapezoidal shape by a wall surface being linear form, it is not restricted to this.
  • the wall surface may have one step or a plurality of steps.
  • the base 1 may protrude outside rather than the filter part 2 located in the outermost side. Therefore, when a foreign material hits the filter part 2 located in the outermost side, a possibility that the filter part 2 may be damaged can be reduced.
  • the base 1 may protrude outside with respect to the outermost filter portion 2, and the surface of the outermost filter portion 2 may be covered by the protective layer 5. .
  • This further reduces the risk of damage to the filter unit 2. Moreover, it can reduce that gas flows outside from the flow path 11 via the filter part 2 located in the outermost side.
  • the protective layer for example, a resin material or the like in which ceramic powder is dispersed can be used.
  • the end of the flow path 11 is partially sealed by the sealing portion 4, and the surface of the sealing portion 4 in the flow path 11
  • the shape of the portion to be formed may be an arc shape which is concave on the flow path side. Thereby, it can reduce that gas retains in the vicinity of the sealing part 4 among the flow paths 11.
  • the surface of the filter unit 2 facing the flow passage 11 has a groove 6 extending in the direction intersecting the traveling direction of the flow passage 11.
  • the gas flowing through the flow channel 11 can be easily made to flow irregularly. Therefore, by making the particulate matter in the gas flow more easily to the filter unit 2, the particulate matter in the gas can be easily collected in the filter unit 2. Therefore, the amount of particulate matter flowing to the end on the outlet side of the flow path 11 can be reduced. Therefore, the risk of the particulate matter accumulating at the end of the flow passage 11 on the outlet side can be reduced. As a result, in the measuring device component 100, the measurement accuracy can be improved.
  • the shape of the groove portion 6 is, for example, a rectangular shape or an elliptical shape in which the shape of the opening portion facing the flow path 11 has a longitudinal direction and a short direction.
  • the groove 6 may extend, for example, in a direction perpendicular to the traveling direction of the flow path 11. At this time, the groove 6 is provided 0.15 to 0.9 mm in the traveling direction of the flow passage 11, and 0.15 to 0.8 mm in the direction perpendicular to the traveling direction of the flow passage 11.
  • the groove 6 may have a shape that narrows toward the bottom of the groove.
  • the depth of the groove 6 is, for example, 0.08 to 0.5 mm.
  • a plurality of grooves 6 may be positioned along the traveling direction of the flow path 11.
  • the gas flowing through the flow passage 11 can be easily made to flow irregularly.
  • the gas which has not flowed irregularly in one groove portion 6 provided on the upstream side of the flow path 11 among the plurality of groove portions 6 can also be made to flow turbulently in another groove portion 6 provided on the downstream side. Therefore, by making the particulate matter in the gas flow more easily to the filter unit 2, the particulate matter in the gas can be easily collected in the filter unit 2. Therefore, the amount of particulate matter flowing to the end on the outlet side of the flow path 11 can be reduced. Therefore, the risk of the particulate matter accumulating at the end of the flow passage 11 on the outlet side can be reduced. As a result, in the measuring device component 100, the measurement accuracy can be improved.
  • 8 to 70 grooves 6 may be positioned along the traveling direction of the flow path 11.
  • the groove portions 6 are provided in the two filter portions 2 on the center side among the four filter portions 2, and the groove portions 6 extend along the traveling direction of the flow path 11. , Eight are located.
  • the groove part 6 may be located at equal intervals. Thereby, when external force, such as a vibration, is added to the components 100 for measurement apparatuses, a possibility that stress may concentrate on a part of groove part 6 can be reduced. Therefore, it is possible to reduce the possibility that the measuring device component 100 may be damaged in the groove 6. As a result, the durability of the measuring device component 100 can be enhanced.
  • the grooves 6 are provided at an interval of, for example, 0.4 to 1.7 mm.
  • the groove 6 may extend on the entire surface of the filter portion 2 facing the flow channel 11 in the direction perpendicular to the direction in which the flow channel 11 advances.
  • the gas flowing through the flow path 11 can be turbulently flowed from the upper end to the lower end of the surface of the filter unit 2. Therefore, the particulate matter in the gas can easily flow to the filter unit 2.
  • the particulate matter can be collected from the upper end to the lower end of the surface of the filter unit 2. Therefore, the risk of the particulate matter accumulating in a part of the flow path 11 in the vertical direction can be reduced. Further, the possibility of the particulate matter collecting at the end of the flow passage 11 on the outlet side can be reduced.
  • FIG. 32 shows a cross section taken along line XX of the measuring apparatus component 100 shown in FIG.
  • the filter portion 2 has a first major surface 21 facing the flow path 11 and a second major surface 22 facing the first major surface 21, and the groove 6 has a first major surface 21. And the second main surface 22 may be located.
  • the filter portion 2 can be made thinner at the portion where the groove portion 6 is located in both the first major surface 21 and the second major surface 22. Therefore, for example, even if the filter unit 2 is deformed so as to be recessed inward due to the pressure difference between the inside and the outside of the measuring device component 100, the filter unit 2 is bent Stress can be reduced. As a result, the durability of the measuring device component 100 can be improved.
  • a plurality of grooves 6 are provided in both of the first main surface 21 and the second main surface 22, and each of the grooves 6 is alternately positioned along the traveling direction of the flow passage 11. It may be done. Thereby, the surface area of the filter portion 2 can be increased while reducing the thickness of the filter portion 2 as a whole.
  • the thickness of the filter unit 2 is entirely small, for example, when an external force is applied to the measuring device component 100, the filter unit 2 can be easily deformed. Therefore, the stress generated in the filter unit 2 can be reduced. As a result, the durability of the measuring device component 100 can be improved.
  • a plurality of grooves 6 are provided in both of the first main surface 21 and the second main surface 22, and the grooves 6 are alternately positioned along the traveling direction of the flow path 11, thereby making the filter
  • the surface area of part 2 can be increased. Therefore, the amount of particulate matter in the gas that can be collected in the groove 6 can be increased. Thereby, the amount of particulate matter flowing to the end of the flow path 11 can be reduced. Therefore, the risk of the particulate matter accumulating at the end of the flow passage 11 on the outlet side can be reduced. As a result, in the measuring device component 100, the measurement accuracy can be improved.
  • a groove may be provided which extends in a direction intersecting the traveling direction of the flow passage 11.
  • base 1 can be made thin. Therefore, for example, even if the base 1 is deformed toward the flow path 11 due to the pressure difference between the inside and the outside of the measuring device component 100, the base 1 is bent at the portion where the base 1 is thinned. Stress can be reduced. As a result, the durability of the measuring device component 100 can be improved.
  • the base has an outer side surface located along the flow direction of the flow path, and the outer side surface extends a plurality of grooves extending in a direction intersecting the flow direction of the flow path. You may have.
  • the outer side surface of the base expands toward the inside of the groove, thereby suppressing deformation of the base in the traveling direction of the flow path due to the thermal expansion. Therefore, the risk of peeling between the base and the electrode can be reduced. As a result, the durability of the parts for measuring apparatus can be enhanced.
  • 2 to 100 grooves are provided on the outer side surface.
  • the groove on the outer side can be, for example, 0.1 to 2.0 mm in width, 0.2 to 2.0 mm in length, and 0.1 to 1.0 mm in depth.
  • the groove portions may be provided at equal intervals from one end on the inlet side of the flow path to the other end on the outlet side of the outer surface.
  • the difference in the amount of thermal expansion can be reduced from one end on the inlet side of the flow path to the other end on the outlet side of the outer surface. Therefore, distortion of the base can be suppressed, and fluctuations in the inter-electrode distance can be suppressed. As a result, detection accuracy can be enhanced.
  • the groove portion may extend on the entire outer surface in the direction perpendicular to the flow direction of the flow passage.
  • the groove portions may be provided on both outer side surfaces of the base and may be provided at symmetrical positions across the flow path.
  • the thermal expansion amount of one outer side surface and the other outer side surface can be equalized. Therefore, the distortion of the both sides which pinched
  • the base has an end face surrounding the opening of the flow passage, and the end face has a plurality of grooves extending along the side surface when viewed from the direction perpendicular to the end face. May be Thus, the risk of deformation of the end face due to thermal expansion can be reduced. Therefore, distortion of the base can be suppressed, and fluctuations in the inter-electrode distance can be suppressed. As a result, detection accuracy can be enhanced.
  • 1 to 20 grooves are provided on the end face.
  • the groove on the outer side can be, for example, 0.1 to 2.0 mm in width, 0.2 to 2.0 mm in length, and 0.1 to 1.0 mm in depth.

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Abstract

La présente invention concerne un composant de dispositif de mesure (100) comprenant : une base (1) qui comprend une céramique et comprend à l'intérieur de ce dernier un trajet d'écoulement (11) permettant un écoulement de gaz à travers ce dernier, une partie filtre (2) qui comprend une céramique poreuse située à l'intérieur du trajet d'écoulement (11) de façon à diviser le trajet d'écoulement (11) en une pluralité de sections, et une paire d'électrodes (3) situées sur la base (1) de façon à présenter la partie filtre (2) interposée entre ces dernières et permettant de générer une capacité. Sur la surface de la partie filtre (2) faisant face au trajet d'écoulement (11), une partie rainure (6) s'étend dans une direction croisant la direction de déplacement du trajet d'écoulement (11).
PCT/JP2018/032225 2017-09-27 2018-08-30 Composant de dispositif de mesure WO2019065069A1 (fr)

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Publication number Priority date Publication date Assignee Title
CN111220517A (zh) * 2019-12-06 2020-06-02 南京大学 一种基于卫星遥感的pm2.5不同粒径组分反演方法
US20220298410A1 (en) * 2021-03-22 2022-09-22 Korea Electronics Technology Institute Quantum dot microcapsule and display panel including the same

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JPS5027220U (fr) * 1973-07-05 1975-03-28
JPH02207846A (ja) * 1989-02-06 1990-08-17 Ngk Insulators Ltd セラミックハニカム構造体の製造法
JP2006266179A (ja) * 2005-03-24 2006-10-05 Isuzu Motors Ltd 排気ガス処理装置及び排気ガス処理方法
WO2008034662A1 (fr) * 2006-09-18 2008-03-27 Robert Bosch Gmbh élément de filtration, en particulier pour la filtration des gaz d'échappement d'un moteur à combustion interne
WO2008096852A1 (fr) * 2007-02-09 2008-08-14 Ngk Insulators, Ltd. Structure en nid d'abeille pour un capteur de fine particule
JP2013139022A (ja) * 2005-07-21 2013-07-18 Ibiden Co Ltd ハニカム構造体及び排ガス浄化装置
WO2017090587A1 (fr) * 2015-11-26 2017-06-01 京セラ株式会社 Composant de dispositif de mesure de matières particulaires et son procédé de fabrication

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Publication number Priority date Publication date Assignee Title
JPS5027220U (fr) * 1973-07-05 1975-03-28
JPH02207846A (ja) * 1989-02-06 1990-08-17 Ngk Insulators Ltd セラミックハニカム構造体の製造法
JP2006266179A (ja) * 2005-03-24 2006-10-05 Isuzu Motors Ltd 排気ガス処理装置及び排気ガス処理方法
JP2013139022A (ja) * 2005-07-21 2013-07-18 Ibiden Co Ltd ハニカム構造体及び排ガス浄化装置
WO2008034662A1 (fr) * 2006-09-18 2008-03-27 Robert Bosch Gmbh élément de filtration, en particulier pour la filtration des gaz d'échappement d'un moteur à combustion interne
WO2008096852A1 (fr) * 2007-02-09 2008-08-14 Ngk Insulators, Ltd. Structure en nid d'abeille pour un capteur de fine particule
WO2017090587A1 (fr) * 2015-11-26 2017-06-01 京セラ株式会社 Composant de dispositif de mesure de matières particulaires et son procédé de fabrication

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111220517A (zh) * 2019-12-06 2020-06-02 南京大学 一种基于卫星遥感的pm2.5不同粒径组分反演方法
CN111220517B (zh) * 2019-12-06 2020-12-22 南京大学 一种基于卫星遥感的pm2.5不同粒径组分反演方法
US20220298410A1 (en) * 2021-03-22 2022-09-22 Korea Electronics Technology Institute Quantum dot microcapsule and display panel including the same

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