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WO2018139845A2 - Procédé de production, dispositif de production et contenant pour matériau de référence certifié gaz de type cellulaire - Google Patents

Procédé de production, dispositif de production et contenant pour matériau de référence certifié gaz de type cellulaire Download PDF

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Publication number
WO2018139845A2
WO2018139845A2 PCT/KR2018/001045 KR2018001045W WO2018139845A2 WO 2018139845 A2 WO2018139845 A2 WO 2018139845A2 KR 2018001045 W KR2018001045 W KR 2018001045W WO 2018139845 A2 WO2018139845 A2 WO 2018139845A2
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WIPO (PCT)
Prior art keywords
container
gas
cell
weight
type gas
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PCT/KR2018/001045
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English (en)
Korean (ko)
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WO2018139845A3 (fr
Inventor
이정순
임정식
이진복
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한국표준과학연구원
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Publication of WO2018139845A2 publication Critical patent/WO2018139845A2/fr
Publication of WO2018139845A3 publication Critical patent/WO2018139845A3/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only

Definitions

  • the present invention relates to a method for manufacturing a cell type gas certified standard material, a manufacturing apparatus, and a container, and more particularly, in the manufacture of cell type gas certified standard material, even when a toxic or highly reactive gas is injected safely.
  • the present invention relates to a method for manufacturing a cell type gas certified reference material, a manufacturing apparatus, and a container, which are capable of minimizing uncertainty in measurement and analysis.
  • Reference material refers to a substance that can be a standard as a chemical species in the same way as the base group in the metrology form, and in most cases refers to a pure substance. Standards are the basis for the analysis, investigation, and testing of materials, and these standards are essential, especially for analyzes and tests that require high accuracy and precision. Depending on the type of material in the room temperature and pressure environment, the standard material may have various phases in the solid state, liquid state, and gaseous state.
  • gas standard material may be used as the term “ultra high purity gas” itself. It may be used to refer to a "container containing a standard gas (ultra high purity gas).
  • spectroscopic analysis is widely used as a method for analyzing gas samples.
  • Spectroscopic analysis is a method of examining the emission spectrum or absorption spectrum of a substance to determine the type and amount of elements or compounds in it. Also known as spectral analysis, it is faster to operate than general chemical analysis. There is also an advantage that can be analyzed.
  • Spectroscopic analysis using emission spectra uses the spectrum of light emitted from an atom to be unique for each element. The type or amount of element based on the emission spectra of a standard sample that is emitted by emitting light and inspecting the spectra How to find out.
  • the method of arc discharge is carried out using a normal sample as one pole, or the method of discharge
  • Spectroscopic analysis by absorption spectrum uses the following principle. When irradiating light with continuous spectrum to a gas or liquid, the single-element substance or compound in the gas or liquid selectively absorbs light of a specific wavelength, so that the absorption line has a unique arrangement according to the type of material in the spectrum of transmitted light. Appears.
  • FTIR Fourier Transform Inf Rared Spectroscopy
  • FIG. 1 shows a brief analysis of the analysis cell of the conventional gas analyzer.
  • the analysis cell 10 of the gas analyzer is, as shown in Figure 1, both ends of the body portion in the form of a cylindrical container closed at both ends, and toward both ends of the body portion 15, respectively It is arranged to include an inlet pipe 11 and the discharge pipe 12 for receiving or discharging the gas sample.
  • the inlet pipe 11 is connected to the raw material container 20 containing the sample to be analyzed
  • the pump pipe 30 is connected to the discharge pipe 12.
  • the sample is sucked from the raw material container 20 by the suction force of the pump unit 30, and consequently flows into the analysis cell 10 through the inlet pipe 11 to the discharge pipe 12 It flows through.
  • the light is analyzed.
  • the light of the selective wavelength is absorbed by the gas sample flowing in the analysis cell 10 while passing through the (10).
  • the light emitted through the analysis cell 10 has an absorption spectrum determined according to a gas sample, which is measured by the measurement unit 50 disposed on the other side of the analysis cell 10. That is, ultimately, by analyzing the absorption spectrum, it is possible to analyze what kind of material the gas sample in the analysis cell 10 is made of.
  • a method of performing an analysis while continuously distributing a gas sample to the analysis cell 10 is commonly referred to as a continuous injection formula.
  • the standard method used in this analysis is as follows. In the same manner as described above, when the analysis is first performed while passing the reference material to be the reference to the analysis cell 10, the absorption spectrum as well as the absorption spectrum of the standard material can be obtained. It is well known that this absorbance is directly related to the gas concentration in the assay cell 10 and the length of the assay cell 10. Next, the analysis is performed while passing the analyte to the assay cell 10 to obtain an absorption spectrum and an absorbance of the analyte. If the analyte is the same as the standard, the absorption spectrum will appear the same but the absorbance will be different. For example, it is known that the standard has a concentration of 1 and an absorbance of 1, but the analyte has an absorption of 0.5.
  • the analyte can obtain an analysis result of [the same substance as the standard substance and concentration 0.5].
  • the sample is analyzed by continuously flowing gas into the analysis cell.
  • various problems in the continuous injection analysis method as follows.
  • the absorbance of light passing through the analysis cell is related to the gas concentration in the analysis cell and the length of the analysis cell, and the gas concentration is obviously greatly influenced by the pressure.
  • the pressure continues to change (even if there is a device to keep the flow rate constant), which causes uncertainty in absorbance measurement. Increase the reliability of the analysis results.
  • Korean Patent Registration No. 1582745 Metal and Method for Manufacturing Liquid Standard Hydrocarbon Mixture Certified Standards
  • Korean Patent Registration No. 1277733 Standard Source for Calibration of Radioactive Material Measuring Instrument and Its Manufacturing Method
  • Korean Patent Registration No. 0656415 Liquid Injector for Standard Gas Production", 2006.12.05
  • an object of the present invention is to produce a cell type in the form of a sealed container and is produced by injecting a gas of a precisely predetermined concentration by weight method
  • the present invention provides a method, a manufacturing apparatus, and a container for producing a cell-type gas certified standard material, by which a predetermined concentration and length value can be produced.
  • Another object of the present invention is to provide a cell type gas certified standard material manufacturing method, apparatus and container which can be manufactured in such a manner to minimize the uncertainty in the analysis and maximize the reliability of the analysis result.
  • Another object of the present invention is to form a form as described above, can be analyzed in a small amount, and can be used repeatedly for unlimited within the expiration date, even if the gas having adsorption, toxicity, reactivity is dangerous to the human body or equipment
  • the present invention provides a method, a manufacturing apparatus and a container for manufacturing a cell type gas certified standard material, which enable a stable analysis without any problems.
  • Cell type gas certified standard material manufacturing method of the present invention for achieving the object as described above, is formed on the body 150 of the column-shaped body 150, the both ends are closed, the space is formed inside and closed
  • a container manufacturing step in which the cell type container 100 including the inlet 110 and the outlet 120 provided with possible valves 115 and 125, respectively, is manufactured, and the length measurement of the length of the container 100 is measured.
  • a length determining step comprising a step; As the pressure is measured at the inlet 110 of the vessel 100 in which the moisture of the source gas is removed, the purity analysis step of spectroscopic analysis of the source gas from which moisture is removed, and the source gas analyzed for purity are evacuated.
  • a concentration determining step including a weight measuring step of measuring a weight of the raw material gas in the container 100 by a weight difference, and calculating a concentration using a weight value of the raw material gas in the container 100; It may be made, including.
  • the length measurement step the length of the container 100 can be measured through a three-dimensional shape measurement method using a laser.
  • the method for manufacturing a cell type gas certified standard material may include a container heating step in which the container 100 is heated between the length determining step and the concentration determining step, and a container in which the container 100 is evacuated in a heated state.
  • a usage-based ratio step including a vacuum step and a container cooling step of cooling after the inlet 110 and the outlet 120 of the container 100 are closed; It may be made to include more.
  • the reference container 100R is manufactured by injecting a predetermined reference gas into a selected one of the plurality of containers 100 by a predetermined injection amount under a predetermined pressure and temperature conditions and closing the container.
  • a first value calculation step of calculating a first difference value, which is a difference between the weight and the weight of the vacuumed container 100, and a second weight at which the weights of the reference container 100R and the remaining containers 100 into which the raw material gas is injected are measured.
  • Remaining container (100) For each may comprise a gas weight calculation step that calculates the weight of the raw material gas injected into a difference value between the first differential value and the second differential value.
  • the weighing step is carried out by using a top-loading scale that measures the weight by placing a measurement object on the top, but the position where the measurement object is placed on the balance is kept constant.
  • the weight measurement can be made by the automatic loading device.
  • the cell type gas certified standard material manufacturing apparatus of the present invention in the cell type gas certified standard material manufacturing apparatus using the cell type gas certified standard material manufacturing method as described above, the moisture to pass through the source gas to remove moisture Removal device 210; Gas analyzer 220 for spectroscopic analysis of the target gas flowing through the analysis cell; A vacuum pump 230 for evacuating the container 100; Pressure gauge 240 for measuring the pressure of the raw material gas injected into the container 100; Weighing apparatus for measuring the weight of the container 100; A length measuring device measuring a length of the container 100; It may be made, including.
  • the weighing apparatus may include a top-loading scale that measures a weight by placing a measurement object on an upper portion thereof, and an automatic loading device that maintains a constant position of the measurement object on the balance.
  • the water removal device 210 may be made to remove water by using a freezer method or a moisture absorbent.
  • the cell type gas authentication standard material manufacturing apparatus may further include a generator for producing a storage tank or raw material gas is produced and stored in advance the raw material gas.
  • the cell type gas certified standard material container of the present invention in the cell type gas certified standard material container 100 used in the method for manufacturing a cell type gas certified standard material, wherein the body 150 has a space formed therein. It may include a pillar portion 151 and a pair of windows 152 provided at both ends of the pillar portion 151 and closed.
  • the body 150, both ends of the body 150 may be formed perpendicular to the extending direction of the body 150.
  • the body 150, the anti-reflection coating may be made to the window 152.
  • the body 150 may have both ends of the body 150 inclined with respect to the extending direction of the body 150.
  • the body 150, both ends of the pillar portion 151 is formed to be inclined with respect to the extending direction of the body 150, the window 152 closes the inclined cross section of the pillar portion 151 As a result, it may be disposed to be inclined with respect to the extending direction of the body 150.
  • both ends of the pillar portion 151 is formed perpendicular to the extending direction of the body 150, the window 152 closes the vertical section of the pillar portion 151
  • a pair of prisms disposed perpendicular to the extending direction of the body 150 and provided on the outside of each of the windows 152, wherein the window side surface is vertically formed, and the window opposite side surface is inclined. 153 may be further included.
  • the body 150 may be coated in a region except for the central portion of both ends so that light can be passed only through the central portion of both ends.
  • a gaseous certified reference material CCM, Certified Reference Material
  • CCM Certified Reference Material
  • a gas analyzer using spectroscopic analysis analyzes a sample using an absorption spectrum and an absorbance.
  • the pressure of the gas sample is substantially changed during the analysis, thereby affecting the concentration and uncertainty. There was a problem of rising.
  • the sample since the sample is known in advance and contained in a sealed container, the possibility of a change in concentration is basically excluded, and thus there is an effect that can completely solve this problem.
  • the gas-certified standard manufactured according to the present invention when using the gas-certified standard manufactured according to the present invention as a reference, the analysis accuracy of the sample can also be greatly improved.
  • the gas certified standard material manufactured according to the present invention has a great effect that it can be used for calibration of the gas analyzer itself because the uncertainty of the concentration and length is accurately evaluated in advance as described above.
  • the analysis is performed using the gas in a sealed container, and thus, various effects as follows can be obtained.
  • the amount of gas sample used for analysis can be drastically reduced, and accordingly, even a small amount of sample.
  • the gas since the gas is safely sealed, the gas concentration is changed due to adsorption or reaction of gas having high adsorption or high reactivity as it flows in the equipment, a problem that the toxic gas leaks and harms the human body, Highly corrosive gas leaks out and has a great effect of breaking down the equipment to corrode and damage equipment.
  • 1 is a schematic diagram of an analysis cell of a conventional gas analyzer.
  • FIG. 2 is a flow chart of a method for manufacturing a cell type gas authentication standard material of the present invention.
  • Figure 3 is a schematic diagram of a cell type gas certification standard material manufacturing apparatus of the present invention.
  • Figure 5 shows several embodiments of the cell type gas certification standard container of the present invention.
  • moisture removal device 220 gas analyzer
  • FIG. 2 is a flowchart of a method for manufacturing a cell type gas certified standard material of the present invention
  • FIG. 3 is a schematic view of an apparatus for manufacturing cell type gas certified standard material of the present invention, respectively.
  • 5 also shows various embodiments of the cell type gas certified standard material container of the present invention.
  • the biggest difference from the existing is that it is a sealed type.
  • the spectroscopic analysis was performed by continuous injection.
  • the amount of gas required for the analysis process is excessively increased, and even if the flow rate in the analysis cell is constantly adjusted, the pressure is inevitably changed.
  • the reliability is lowered.
  • the reliability of the analysis result is further lowered as the gas concentration is changed by the gas being adsorbed on the pipeline or reacting with other substances such as the pipeline or moisture.
  • toxic and corrosive gas there is a problem that there is a risk factor such as harmful to human body or damage to equipment by leaking gas.
  • a cell type gas certification standard material is formed in a sealed form in which a raw material gas is placed in a cell type container.
  • This essentially excludes the possibility of changing the concentration of gas in the vessel. That is, the gas concentration change due to the pressure change inevitably generated by the flow of the gas, or the gas concentration change due to the adsorption, reaction, etc. generated in the process of flowing the gas does not occur at all.
  • the use of airtight seals minimizes the risk of leaking toxic and corrosive gases, thus maximizing safety during the analysis.
  • the gas consumption is too high during the spectroscopic analysis, and since it is a closed type, it does not need any more gas other than the source gas injected into the container after it is manufactured once, so it is used unlimitedly within the expiration date. This is possible.
  • gas analysis uses an absorption spectrum, which measures the extent to which light is absorbed, that is, the absorbance when light is passed through the gas to be analyzed. Absorption is directly related to concentration and length, and it is an object of the present invention to produce a certified reference material as a gas container in which the uncertainty of the concentration and length is accurately evaluated.
  • the method for manufacturing a cell-type gas certified standard material of the present invention as shown in the flow chart of Figure 2, the length determination step for accurately grasping and determining the length of the container, and accurately grasp and confirm the concentration of the gas injected into the container Including the concentration determination step.
  • the length determination step and the concentration determination step may further comprise a content ratio step of performing a preparatory work for injecting gas into the container.
  • the length determining step includes a container manufacturing step and a length measuring step.
  • the container 100 itself is produced.
  • the container 100 has a shape similar to the analysis cell of the gas analyzer, so that the container 100 can be easily replaced with the analysis cell of the gas analyzer. That is, in the present invention, the container 100 has a space formed therein and a pillar-shaped body 150 having both ends closed, and formed on the body 150 and provided with opening and closing valves 115 and 125, respectively. It comprises an inlet 110 and outlet 120 which is.
  • the length measuring device for measuring the length of the container 100 may be made so that the length of the container 100 is measured through a three-dimensional shape measurement method using a laser.
  • a three-dimensional shape measurement method There are two methods of measuring three-dimensional shape, which can be largely contacted and non-contacted. In the case of contact type, the accuracy is guaranteed, but the measurement takes a lot of time and requires expensive equipment. Contactless methods are widely used.
  • Concentration determination step to be described below, the process of injecting gas into the container 100 made in the length determination step previously. In this case, a process of preparing the container to exclude impurities such as moisture remaining in the container 100 is necessary.
  • This is the usage-base ratio step, wherein the usage-base ratio step includes a container heating step, a container vacuum step, and a container cooling step.
  • the vessel 100 is heated to an appropriate temperature (for example, about 50 °C). In this way, an environment in which the water in the container 100 can be evaporated and removed more smoothly is created.
  • an appropriate temperature for example, about 50 °C.
  • the inside of the container 100 is evacuated while the container 100 is heated. That is, by extracting air for a suitable time (for example, about 3 hours) by using equipment such as a vacuum pump, so that impurities do not remain in the container 100.
  • the inlet 110 and the outlet 120 of the vessel 100 evacuated in this manner are closed and then cooled to room temperature.
  • a raw material gas is injected into the container 100 to prepare a gas certification standard material.
  • the concentration determination step includes a water removal step, purity analysis step, gas injection step, container sealing step, weighing step, concentration calculation step.
  • a water removal device 210 for removing water by passing raw material gas may be used.
  • the water removal device 210 may be a freezer method or Mg (ClO 4 ) 2. It may be made to remove moisture using an absorbent such as.
  • the source gas may be supplied from a receiving tank in which the source gas has been produced and stored in advance, or may be supplied from a generator that produces the source gas.
  • highly stable raw material gases such as CO 2
  • the source gas from which moisture is removed is spectroscopically analyzed. More specifically, as shown in FIG. 3, spectroscopic analysis may be performed using a gas analyzer 220 that spectroscopically analyzes a target gas flowing through an analysis cell. That is, the gas analyzer 220 may be used. While passing through, the purity of the source gas is analyzed and impurities are removed well.
  • the analysis cell 10 of the gas analyzer 220 may be a conventional type in which spectroscopic analysis is performed while a gas sample (as shown in FIG. 1) flows.
  • the raw material gas analyzed for purity is injected while the pressure is measured to the inlet 110 of the vessel 100 in which the vacuum is evacuated. More specifically, as shown in FIG. 3, the container 100 is connected to the outlet 120 side of the container 100 by using a vacuum pump 230 for evacuating the inside of the container 100. By lowering the pressure in the c), the raw material gas is removed and the purity of the source gas can be smoothly flowed into the container 100 through the above steps.
  • the pressure measurement of the source gas injected into the container 100 may be made using a pressure gauge 240 provided on the outlet 120 side of the container 100. .
  • the inlet port 110 and the outlet port 120 of the container 100 is closed.
  • a gas injection amount can be determined to a desired degree, and when a desired amount of gas is injected, the container 100 is provided at the inlet 110 and the outlet 120, respectively.
  • the inlet valve 115 and the outlet valve 125 are closed.
  • the container 100 is in a state of being sealed with the outside while injecting as much gas as desired.
  • the weight of the source gas in the container 100 is measured by the difference between the weight of the container 100 into which the source gas is injected and the weight of the container 100 in a vacuum state.
  • a scale of the top-loading method for measuring the weight by placing a measurement object on the top may be used.
  • the weighing device preferably includes, in addition to the balance, an automatic loading device for maintaining a constant position where the measurement object is placed on the balance.
  • the concentration is calculated using the weight value of the source gas in the container 100.
  • the weight of the source gas in the container 100 is measured by the difference between the weight of the container 100 into which the source gas is injected and the weight of the container 100 in a vacuum state.
  • the weighing step, the reference container production step, the first weighing step, the first value calculation step, the second weight measurement step, the second difference value calculation Step, gas weight calculation step can be made. Referring to Figure 4, each step is described below.
  • a predetermined reference gas is injected and sealed by a predetermined injection amount under a predetermined pressure and temperature conditions to one of the selected one of the plurality of containers 100 to seal the reference container 100R.
  • the reference gas may be, for example, nitrogen, and the reference container 100R may be manufactured under atmospheric pressure and room temperature conditions.
  • the weight of the reference container (100R) and the remaining vacuum container 100 is measured.
  • the weight of the reference container (100R) is (weight of the container itself W c + weight of the injected reference gas W gas _ref )
  • the weight of the vacuumized container 100 is (The weight of the container itself W c ).
  • the weighing apparatus used at this time is the maximum measurable weight of 1000g, the resolution of 0.01mg, the uncertainty can be up to 5/5000 if the weight of the injected gas is 0.05g.
  • the weight of the remaining container 100 into which the reference container 100R and the source gas are injected is measured.
  • the reference weight of the container (100R) is the same manner as above (weight W gas _ref the weight W c + implanted reference gas in the container itself), the container of the source gas is injected ( The weight of 100 is equal to (weight of container itself W c + weight of injected raw material gas W gas_mea ).
  • the weight of the source gas injected as the difference between the first and second difference values is calculated for each of the remaining containers 100.
  • the average, standard deviation, etc. of the first difference value, the second difference value, the weight of the raw material gas, etc. are obtained using the plurality of the vessels 100, thereby maximizing the uncertainty of the weight value of the raw material gas finally obtained. Can be evaluated accurately
  • the container 100 has a shape similar to the analysis cell of the gas analyzer, so that the container 100 can be easily replaced with the analysis cell of the gas analyzer. Therefore, if the gas certified standard material made by the method described above is replaced with the analysis cell of the gas analyzer, the concentration and length of the gas certified standard material itself are accurately evaluated in advance, and thus the calibration of the gas analyzer may be performed based on this. . As such, by performing the calibration of the gas analyzer using the gas certified standard material and analyzing the other sample, it is obvious that the reliability of the analysis result of the other sample can be much increased.
  • the gas certification standard container of the present invention needs only to be replaced with the analysis cell of the gas analyzer. That is, the container 100 has a space formed therein and an inlet port (150) formed on the body 150 and closed at both ends thereof and provided with valves 115 and 125 which can be opened and closed, respectively. 110) and the outlet 120 only need to be made, not necessarily the same shape as the analysis cell. More specifically, the body 150 includes a pillar portion 151 having a space formed therein, and a pair of windows 152 provided at both ends of the pillar portion 151 and closed. According to various needs of the user, the present invention may have various embodiments as shown in FIG. 5.
  • the body 150 both ends of the body 150 is formed perpendicular to the extending direction of the body 150.
  • This shape is the same shape as the analysis cell of the gas analyzer, it can be easily replaced with the analysis cell.
  • the window 152 is completely facing each other, the multi-reflection is generated, there may be a problem that the reliability of the analysis result is lowered.
  • the body 150, both ends of the body 150 are formed to be inclined with respect to the extending direction of the body 150, more specifically, the extension of the body 150
  • Both ends of the pillar portion 151 are formed to be inclined with respect to the direction
  • the window 152 is disposed to be inclined with respect to the extending direction of the body 150 by closing the inclined cross section of the pillar portion 151.
  • the above-described multi reflection problem is naturally prevented by the shape.
  • the body 150 has both ends of the body 150 inclined with respect to the extending direction of the body 150. More specifically, the window 152 may be formed in the body 150. By closing the vertical section of the pillar portion 151 is disposed perpendicular to the extending direction of the body 150, provided on the outside of each of the windows 152, the window side surface is formed vertically and the window The opposite side may further include a pair of prisms 153 that are formed to be inclined.
  • a task such as closing and placing a window on an inclined portion may be difficult.
  • the embodiment of FIG. There is an advantage that the difficulty of manufacturing is reduced.
  • both ends are formed to be inclined to prevent the problem of multi-reflection, while there is a problem that the length of the container 100 varies depending on the position.
  • the container length is a parameter having direct relevance, it is necessary to select the container length at an appropriate position as the reference container length.
  • the length of the center portion of the container is selected as the reference length of the container, and as a configuration for implementing this, the coating may be made in an area except the center of both ends so that light can pass through only the center of both ends.
  • the amount of gas sample used for analysis can be significantly reduced. Accordingly, even a small amount of samples can be analyzed as much as possible, and there are various effects that unlimited repetition can be used within an expiration date.
  • the gas concentration is changed due to adsorption or reaction of gas having high adsorption or high reactivity as it flows in the equipment, a problem that the toxic gas leaks and harms the human body, Highly corrosive gas leaks out and has a great effect of breaking down the equipment to corrode and damage equipment.

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Abstract

Un objet de la présente invention est de fournir un procédé de production, un dispositif de production et un contenant qui sont destinés à un matériau de référence certifié gaz de type cellulaire et qui permettent la production d'un matériau de référence certifié gaz de type cellulaire présentant une concentration et une valeur de longueur prédéfinies connues, le matériau de référence certifié gaz de type cellulaire étant de type cellulaire sous la forme d'un contenant étanche et étant fabriqué au moyen d'un procédé de pesée permettant d'injecter avec précision un gaz à une concentration prédéfinie. Un autre objet de la présente invention est de fournir un procédé de production, un dispositif de production et un contenant pour un matériau de référence certifié gaz de type cellulaire qui, du fait qu'il est produit au moyen dudit procédé, peut réduire au minimum l'incertitude au cours d'une analyse et augmenter au maximum la fiabilité de résultats d'analyse. Encore un autre objet de la présente invention est de fournir un procédé de production, un dispositif de production et un contenant pour un matériau de référence certifié gaz de type cellulaire qui, du fait qu'il est produit sous la forme décrite ci-dessus, permet une analyse y compris en petites quantités, peut être utilisé de manière répétée un nombre illimité de fois jusqu'à la date d'expiration, et permet d'analyser de manière stable des gaz y compris adsorbants, toxiques et réactifs sans risque pour un corps humain ou un équipement.
PCT/KR2018/001045 2017-01-25 2018-01-24 Procédé de production, dispositif de production et contenant pour matériau de référence certifié gaz de type cellulaire WO2018139845A2 (fr)

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KR10-2017-0011788 2017-01-25
KR1020170011788A KR101890404B1 (ko) 2017-01-25 2017-01-25 셀타입 가스인증표준물질 제조방법, 제조장치 및 용기

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WO2018139845A2 true WO2018139845A2 (fr) 2018-08-02
WO2018139845A3 WO2018139845A3 (fr) 2018-12-06

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