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WO2018139071A1 - Dispositif de mandrin et procédé de mandrin - Google Patents

Dispositif de mandrin et procédé de mandrin Download PDF

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Publication number
WO2018139071A1
WO2018139071A1 PCT/JP2017/044280 JP2017044280W WO2018139071A1 WO 2018139071 A1 WO2018139071 A1 WO 2018139071A1 JP 2017044280 W JP2017044280 W JP 2017044280W WO 2018139071 A1 WO2018139071 A1 WO 2018139071A1
Authority
WO
WIPO (PCT)
Prior art keywords
hand
sheet
chuck
axis
end side
Prior art date
Application number
PCT/JP2017/044280
Other languages
English (en)
Japanese (ja)
Inventor
勲 植木
田中　克己
佳亮 溝江
Original Assignee
株式会社日本マイクロニクス
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社日本マイクロニクス filed Critical 株式会社日本マイクロニクス
Publication of WO2018139071A1 publication Critical patent/WO2018139071A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/04—Gripping heads and other end effectors with provision for the remote detachment or exchange of the head or parts thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J15/00—Gripping heads and other end effectors
    • B25J15/06—Gripping heads and other end effectors with vacuum or magnetic holding means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M10/00—Secondary cells; Manufacture thereof
    • H01M10/04—Construction or manufacture in general
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Definitions

  • the present invention relates to a technique for chucking a sheet.
  • Patent Document 1 discloses an apparatus for bonding a sheet and a substrate.
  • the apparatus of Patent Document 1 includes a substrate holder that holds a substrate and a sheet holder that holds a sheet. Then, the sheet is bonded to the substrate by moving the substrate holder and the sheet holder. Furthermore, the apparatus of Patent Document 1 includes an elastic roller that nips a substrate and a sheet. Therefore, according to the apparatus of Patent Document 1, the sheet can be bonded to the substrate without bubbles.
  • Patent Document 1 has a problem that the apparatus configuration becomes large and complicated. For example, a mechanism for driving the substrate holder, the sheet holder, and the elastic roller is required. Therefore, it is difficult to make the apparatus simple.
  • the present invention has been made in view of the above problems, and an object thereof is to provide a technique for appropriately chucking a sheet with a simple configuration.
  • a chuck device has a chuck surface, a hand for chucking a sheet placed on the placement surface, and the placement surface before the hand contacts the sheet. Rotation that holds the hand so that the angle of the chuck surface becomes a predetermined angle, and holds the hand rotatably so that the predetermined angle decreases after the hand contacts the sheet.
  • the chuck device is configured to reduce the predetermined angle while lowering the hand after the hand contacts the sheet so that the chuck surface approaches the other end side of the sheet.
  • a control unit for controlling the elevating mechanism for controlling the elevating mechanism.
  • the hand may chuck the sheet by an electrostatic chuck. Thereby, a hand can be inserted in a narrow space.
  • a chuck method includes a hand having a chuck surface and chucking a sheet placed on the placement surface, and the hand so as to change an angle of the chuck surface with respect to the placement surface.
  • a chuck method using a chuck device comprising: a rotation holding mechanism that holds the hand in a rotatable manner; and an elevating mechanism that lowers the hand, wherein the hand is in contact with the seat before the hand is in contact with the seat.
  • the rotation holding mechanism is configured such that the predetermined angle is decreased while the hand is lowered and the chuck surface approaches the other end side of the sheet.
  • the elevating mechanism may be controlled. Thereby, a sheet
  • the hand may chuck the sheet by an electrostatic chuck. Thereby, a hand can be inserted in a narrow space.
  • FIG. 3 is an XZ plan view showing the configuration of the chuck device according to the first embodiment
  • FIG. 1 is a YZ plan view showing a configuration of a chuck device according to a first embodiment
  • 3 is an XY plan view showing the configuration of the hand of the chuck device according to the first embodiment
  • FIG. 6 is an XZ plan view showing the operation of the chuck device according to the first exemplary embodiment.
  • FIG. 6 is an XZ plan view showing the operation of the chuck device according to the first embodiment.
  • FIG. 6 is an XZ plan view showing the operation of the chuck device according to the first exemplary embodiment. It is XY top view which shows the structure of the hand which has an air hole.
  • FIG. 1 is a YZ plan view showing a configuration of a chuck device according to a first embodiment
  • 3 is an XY plan view showing the configuration of the hand of the chuck device according to the first embodiment
  • FIG. 6 is an XZ plan view showing the operation of the chuck
  • FIG. 9 is a perspective view illustrating an operation of the chuck device according to the second embodiment.
  • FIG. 5 is an XZ plan view showing a configuration of a chuck device according to a second embodiment.
  • FIG. 9 is a perspective view illustrating a configuration of a chuck device according to a third embodiment.
  • FIG. 1 is an XZ plan view showing the configuration of the chuck device 100.
  • FIG. 2 is a YZ plan view showing the configuration of the chuck device 100.
  • FIG. 3 is an XY plan view showing the configuration of the hand 10 of the chuck device 100. Note that the edge of the square sheet 70 is placed so as to be parallel to the X direction and the Y direction.
  • the chuck device 100 includes a hand 10 and an arm mechanism 20.
  • the sheet 70 to be chucked is placed on the stage 50.
  • the placement surface 51 of the stage 50 is parallel to the XY plane. Therefore, the sheet 70 is disposed on the stage 50 in a state parallel to the XY plane.
  • the sheet 70 has a charging layer or the like provided on the base sheet. A metal material such as aluminum is used for the base sheet.
  • the hand 10 chucks the sheet 70 placed on the placement surface 51. Therefore, the lower surface of the hand 10 is the chuck surface 11.
  • the chuck surface 11 is a flat surface.
  • the hand 10 is a parallel plate type member.
  • the hand 10 chucks the sheet 70 by an electrostatic chuck or a vacuum chuck.
  • the hand 10 has a ceramic and an electrode. When a voltage is applied to the electrode built in the ceramic, a Coulomb force for chucking the sheet 70 is generated.
  • the sheet 70 is adsorbed by exhausting the air in the adsorption holes provided in the chuck surface 11.
  • the electrostatic chuck is used, the hand 10 can be made thinner than when the vacuum chuck is used. Therefore, when the electrostatic chuck is used, the hand 10 can be inserted in a narrower space.
  • the sheet 70 is a square of 300 mm ⁇ 300 mm.
  • the electrostatic chuck range of the hand 10 is a square of 310 mm ⁇ 310 mm. Therefore, the chuck surface 11 is larger than the sheet 70.
  • the arm mechanism 20 is, for example, a robot arm for operating the hand 10.
  • the arm mechanism 20 holds the hand 10 so as to be movable.
  • the arm mechanism 20 holds the hand 10 above the stage 50.
  • the arm mechanism 20 includes a rotation mechanism 21, an elevating mechanism 22, and a control unit 25.
  • the rotation mechanism 21 is attached to the upper surface of the hand 10.
  • the rotation mechanism 21 holds the hand 10.
  • the rotation mechanism 21 has an actuator 21a such as a motor.
  • the rotation axis of the rotation mechanism 21 is parallel to the Y direction. That is, the rotation axis of the rotation mechanism 21 is parallel to the end side of the sheet 70.
  • the actuator 21a is driven, the hand 10 rotates around the Y axis.
  • the rotation mechanism 21 is driven, the inclination of the chuck surface 11 of the hand 10 changes.
  • the rotation mechanism 21 rotates the hand 10 so as to change the inclination of the chuck surface 11 with respect to the sheet 70.
  • the elevating mechanism 22 raises and lowers the hand 10.
  • the lifting mechanism 22 includes an actuator 22a such as a motor.
  • the elevating mechanism 22 holds the rotating mechanism 21.
  • the rotation mechanism 21 moves in the vertical direction (Z direction). Thereby, the hand 10 can be moved up and down.
  • the control unit 25 includes a processor, a memory, and the like, and controls the rotation mechanism 21 and the lifting mechanism 22.
  • the control unit 25 generates a drive signal for driving the actuator 21a and the actuator 22a.
  • the actuators 21a and 22a are servo motors or the like, and are driven with a drive amount corresponding to a drive signal from the control unit 25.
  • the rotation amount of the rotation mechanism 21 and the movement amount of the elevating mechanism 22 can be controlled. That is, the control unit 25 can control the angle of the chuck surface 11 of the hand 10 and the position of the hand 10 in the Z direction.
  • FIGS. 1 and 4 to 6 are XZ plan views for explaining the operation of the chuck device 100.
  • FIG. The operations of the rotation mechanism 21 and the lifting mechanism 22 of the chuck device 100 described below are controlled by the control unit 25.
  • FIG. 1 shows a state in which the hand 10 is in a standby position before starting chucking.
  • the hand 10 is not in contact with the sheet 70 before the chuck is started. That is, the hand 10 is disposed above the seat 70 so as to be spaced apart.
  • the chuck surface 11 is inclined with respect to the sheet 70. Specifically, the distance between the sheet 70 and the chuck surface 11 in the Z direction is smaller on one end side ( ⁇ X side) of the sheet 70 than on the other end side (+ X side) of the sheet 70. That is, the chuck surface 11 has a predetermined angle with respect to the mounting surface 51.
  • the ⁇ X side end of the sheet 70 is one end of the sheet 70
  • the + X side end of the sheet 70 is the other end of the sheet 70.
  • One end of the sheet 70 is closer to the chuck surface 11 than the other end.
  • FIG. 4 shows a state where the hand 10 is descending.
  • the chuck surface 11 is inclined with respect to the sheet 70 as in FIG. 1. That is, the lifting mechanism 22 lowers the hand 10 while the chuck surface 11 is inclined with respect to the sheet 70.
  • Chucking is started from the part where the hand 10 and the sheet 70 approach each other.
  • the hand 10 chucks one end side of the sheet 70 earlier than the other end side.
  • the hand 10 chucks only one end side of the sheet 70 and does not chuck the other end side.
  • At one end of the sheet 70 since the distance between the sheet 70 and the chuck surface 11 is shorter than the other end, only one end side of the sheet 70 is chucked by the Coulomb force of the electrostatic chuck.
  • one end side of the sheet 70 is in contact with the chuck surface 11 and the other end side is not in contact. Therefore, as the inclination of the chuck surface 11 decreases, the sheet 70 is chucked by the hand 10 while gradually deforming one end side from the state of being placed on the placement surface 51.
  • the lifting mechanism 22 lowers the hand 10 so that the hand 10 chucks one end side of the sheet 70 with the chuck surface 11 inclined with respect to the sheet 70.
  • the rotation angle of the rotation mechanism 21 is constant without changing between FIGS.
  • the control unit 25 changes the inclination of the chuck surface 11 while lowering the hand 10, so that the chuck surface 11 approaches the other end side of the sheet 70, And the lifting mechanism 22 is controlled. Specifically, the control unit 25 controls the actuator 21a and the actuator 22a so that the lowering by the elevating mechanism 22 and the rotation by the rotating mechanism 21 are performed in synchronization. As a result, while the hand 10 is descending in the direction of arrow B, the hand 10 rotates in the direction of arrow A so that the other end side of the sheet 70 approaches the chuck surface 11.
  • FIG. 5 shows a state where the lowering of the hand 10 is finished.
  • the rotating mechanism 21 rotates the hand 10 until the chuck surface 11 becomes horizontal.
  • fall of the hand 10 by the raising / lowering mechanism 22 is complete
  • a mechanical stopper may be provided in the rotation mechanism 21 so that the rotation amount of the actuator 21a does not become too large.
  • the rotation mechanism 21 gradually changes the inclination of the chuck surface 11. Therefore, the hand 10 gradually chucks the sheet 70 from one end of the sheet 70 toward the other end. By doing so, air between the sheet 70 and the chuck surface 11 can be released from the other end side of the sheet 70 when the sheet 70 is chucked. It is possible to prevent bubbles from being generated between the sheet 70 and the chuck surface 11. Therefore, the hand 10 can chuck the sheet 70 without generating wrinkles on the sheet 70. Further, since the chuck surface 11 is parallel to the placement surface 51 of the stage 50, the sheet 70 is chucked flat.
  • the lifting mechanism 22 raises the hand 10 as shown in FIG. That is, the hand 10 moves away from the stage 50.
  • the rotation mechanism 21 rotates the hand 10 so that the chuck surface 11 returns to the original inclination. That is, in the state shown in FIG. 6, the chuck surface 11 is parallel to the chuck surface 11 shown in FIG.
  • the inclination of the chuck surface 11 after the hand 10 chucks the sheet 70 is not particularly limited.
  • the chuck device 100 can handle the sheet 70 with a simple configuration without generating wrinkles.
  • the arm mechanism 20 conveys the sheet 70 to another apparatus (not shown).
  • another apparatus since the process can be performed in a state where no bubbles are generated in the sheet 70, the process for the sheet 70 can be appropriately performed.
  • the rotation axis of the rotation mechanism 21 is arranged along the Y direction.
  • the rotation axis of the rotation mechanism 21 is parallel to the sheet 70 before chucking. Therefore, as the rotation mechanism 21 rotates, the sheet 70 is gradually chucked from the ⁇ X side end side of the sheet 70 toward the + X side end side. Accordingly, it is possible to more effectively prevent bubbles from being generated between the sheet 70 and the chuck surface 11.
  • FIG. 7 shows an example of the configuration of the hand 10 having the air holes 12.
  • FIG. 7 is an XY plan view schematically showing the chuck range of the hand 10.
  • the hand 10 is provided with air holes 12 at regular intervals.
  • the air hole 12 is a through hole in the hand 10.
  • the air holes 12 are arranged at a pitch of 30 mm in the X direction and the Y direction.
  • Ten air holes in the X direction and ten air holes in the Y direction are arranged in an array.
  • the diameter of the air hole 12 is 1 mm.
  • the hand 10 is provided with two electrode holes 13. It is provided to connect to the chuck electrode of the electrostatic chuck.
  • the electrode hole 13 is disposed at a position that does not overlap the air hole 12.
  • the rotating shaft of the rotating mechanism 21 may be a driven shaft instead of a driving shaft. That is, the rotation mechanism 21 does not need to be provided with the actuator 21a.
  • the rotation mechanism 21 is a rotation holding mechanism that holds the hand 10 at a predetermined angle before the hand 10 contacts the sheet 70. When an external force is applied to the hand 10, the hand 10 moves around the Y axis. Rotate.
  • the control unit 25 controls only the lifting mechanism 22 and does not need to control the rotating mechanism 21. That is, the control part 25 should just raise / lower only the raising / lowering mechanism 22 with a stroke.
  • the rotating mechanism 21 holds the hand 10 so that the angle of the chuck surface 11 with respect to the placement surface 51 becomes a predetermined angle before the hand 10 contacts the sheet 70. That is, before the hand 10 contacts the sheet 70, the angle between the placement surface 51 and the chuck surface 11 is a predetermined angle that is not 0 degrees. Then, when the lifting mechanism 22 lowers the hand 10 and the hand 10 contacts the sheet 70, the angle between the chuck surface 11 and the placement surface 51 gradually decreases as the hand 10 descends. When the angle between the chuck surface 11 and the mounting surface 51 is 0 degree, that is, when the chuck surface 11 and the mounting surface 51 are parallel, the elevating mechanism 22 ends the lowering.
  • the rotation angle of the chuck surface 11 may be regulated by a mechanical stopper or the like.
  • the chuck device holds the hand 10 so that the chuck surface 11 is at a predetermined angle with respect to the placement surface 51 before the hand 10 contacts the sheet 70, and the hand 10 A rotation holding mechanism is provided that holds the hand 10 rotatably so that the predetermined angle decreases after contacting the sheet 70. Further, in the chuck device, the lifting mechanism 22 lowers the hand 10 so that the hand 10 chucks one end side of the sheet 70 with the chuck surface 11 kept at a predetermined angle with respect to the placement surface 51. . After the sheet 70 comes into contact with the chuck surface 11, the angle between the placement surface 51 and the chuck surface 11 gradually decreases as the lifting mechanism 22 rotates.
  • the chucking method includes a step of holding the hand 20 so that the angle of the chuck surface 11 with respect to the mounting surface 51 becomes a predetermined angle before the hand 10 contacts the sheet 70, and the mounting surface In the state where the chuck surface 11 is at a predetermined angle with respect to 51, the step of lowering the hand 10 so that the hand 10 chucks one end side of the sheet 70, and the hand 10 contacts the one end side of the sheet And a step of decreasing a predetermined angle by rotating the hand 10 later.
  • FIG. 8 is a perspective view schematically showing an arm mechanism 20A of the chuck device according to the present embodiment.
  • FIG. 9 is a side view showing the hand 10 attached to the arm mechanism 20A. Since the configuration and operation other than the arm mechanism 20A are the same as those in the first embodiment, description thereof will be omitted as appropriate.
  • the arm mechanism 20A is a six-axis robot arm.
  • the arm mechanism 20A has an S axis, an L axis, a U axis, an R axis, a T axis, and a B axis.
  • Each axis is a joint mechanism provided with an actuator such as a servo motor.
  • the arm mechanism 20 ⁇ / b> A includes a main body 26, an arm 27, and a wrist 28.
  • the hand 10 (not shown in FIG. 8) shown in the first embodiment is attached to the tip of the wrist 28.
  • the main body 26 holds an arm 27 so as to be movable.
  • the arm 27 holds the wrist 28 movably.
  • the S axis is a rotation axis that rotates the main body 26 of the arm mechanism 20A.
  • the L axis is a rotation axis that moves the main body 26 of the arm mechanism 20A back and forth.
  • the U axis is a rotation axis that moves the arm 27 up and down.
  • the R axis is a rotation axis that rotates the arm 27.
  • the T axis is a rotation axis for rotating the wrist 28.
  • the B axis is a rotation axis that swings the wrist 28 up and down.
  • the T-axis of the arm mechanism 20A corresponds to the rotation mechanism 21 of the first embodiment.
  • the hand 10 rotates in the direction of arrow A in FIG. 9 by driving the T-axis of the arm mechanism 20A.
  • the U-axis corresponds to the lifting mechanism 22 of the first embodiment.
  • Driving the U axis of the arm mechanism 20A causes the hand 10 to move in the direction of arrow B in FIG.
  • the sheet 70A is placed on the stage 50A.
  • the U-axis lowers the hand 10A while the chuck surface 11A is inclined with respect to the sheet 70A.
  • the hand 10A chucks one end side of the sheet 70A.
  • the T-axis changes the inclination of the chuck surface 11A, so that the chuck surface 11A approaches the other end side of the sheet 70A.
  • the hand 10 can be operated by the 6-axis arm mechanism 20A as in the first embodiment. Therefore, similarly to the first embodiment, the sheet 70 can be properly chucked. Further, the chucked sheet 70 can be moved to an arbitrary position by the arm mechanism 20A. Therefore, handling of the sheet 70 becomes easy.
  • the number of rotation axes of the arm mechanism 20A is not limited to six axes.
  • the hand 10 was moved up and down by driving only the U axis, the hand 10 may be moved up and down by driving another rotating shaft together with the U axis.
  • FIG. 10 is a perspective view schematically illustrating a main configuration of the chuck device 100B according to the third embodiment.
  • a 6-axis arm mechanism 20B is used as in the arm mechanism 20A shown in the second embodiment. Therefore, the arm mechanism 20B has an S axis, an L axis, a U axis, an R axis, a T axis, and a B axis. Since the basic configuration and operation of the chuck device 100B according to the third embodiment are the same as those in the first and second embodiments, description thereof will be omitted as appropriate.
  • the rotation mechanism is constituted by two axes, the B axis and the T axis.
  • the hand 10A rotates around the rotation axis along the diagonal line of the sheet 70B. That is, the rotating shaft of the rotating mechanism is different from that of the first embodiment.
  • the rotation axis of the rotation mechanism 21 is not parallel to the end side of the sheet 70.
  • the raising / lowering mechanism is comprised by the U-axis.
  • the sheet 70B and the hand 10B are closest to each other at the corners of the sheet 70B on the + X side and the + Y side, and are most distant from each other at the corners on the ⁇ X side and the ⁇ Y side.
  • the arm mechanism 20B changes the inclination of the chuck surface while lowering the hand 10B. Specifically, the U-axis lowers the hand 10B so that the hand 10B chucks one end side of the sheet 70 with the chuck surface inclined with respect to the sheet 70B. Thereafter, the U-axis lowers the hand 10 ⁇ / b> B, changes the inclination of the chuck surface, and brings the chuck surface closer to the other end side of the sheet 70.
  • one end of the sheet 70B is a corner portion on the + X side and the + Y side
  • the other end side is a corner portion on the ⁇ X side and the ⁇ Y side.
  • the hand 10B gradually chucks the sheet 70B from the + X side and + Y side corners of the sheet 70B toward the ⁇ X side and ⁇ Y side corners. Therefore, generation of bubbles can be prevented as in the first embodiment. Thereby, the sheet 70B can be properly chucked.
  • the lifting mechanism may be constituted by two axes.
  • the above-described chuck device is suitable for a chuck of a sheet-like secondary battery manufactured by a roll-to-roll method.
  • the chuck object in the chuck device is not limited to the sheet-like secondary battery, and may be a sheet-like device other than the secondary battery.
  • a device is manufactured on a sheet by forming a charging layer, an electrode layer, or the like on one side or both sides of a base material by a roll-to-roll method.
  • a roll on which a sheet-like device is formed is manufactured.
  • the chuck device chucks.
  • the chuck device conveys the sheet to the next step and performs the process.
  • the chuck object is not limited to a sheet-like device, and may be a film or a sheet for various uses.
  • the planar shape of the sheet 70 to be chucked is not limited to a square, and may be another shape such as a rectangle or a circle.
  • this invention includes the appropriate deformation

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manipulator (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Secondary Cells (AREA)

Abstract

Un dispositif de mandrin (100) selon un mode de réalisation de la présente invention comprend : une main (10), qui a une surface de mandrin (11), et qui serre une feuille (70) placée sur une surface de placement (51) ; un mécanisme de rotation (21), qui maintient, avant que la main (10) ne soit en contact avec la feuille (70), la main (10) de sorte que l'angle de la surface de mandrin (11) par rapport à la surface de placement (51) est un angle prédéterminé, et qui maintient de manière rotative, après que la main (10) est en contact avec la feuille (70), la main (10) de telle sorte que l'angle prédéterminé diminue ; et un mécanisme d'élévation/abaissement (22) qui abaisse la main (10) de telle sorte que la main (10) serre un côté d'extrémité de la feuille (70) dans un état dans lequel l'angle de la surface de mandrin (11) par rapport à la surface de placement (51) est maintenu à un angle prédéterminé.
PCT/JP2017/044280 2017-01-25 2017-12-11 Dispositif de mandrin et procédé de mandrin WO2018139071A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017011363A JP6832720B2 (ja) 2017-01-25 2017-01-25 チャック装置、及びチャック方法
JP2017-011363 2017-01-25

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WO2018139071A1 true WO2018139071A1 (fr) 2018-08-02

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JP6592662B1 (ja) * 2018-10-31 2019-10-23 株式会社プロセス・ラボ・ミクロン ワーク運搬装置

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JP2015202946A (ja) * 2014-04-15 2015-11-16 曙機械工業株式会社 製品取り出し装置とその製品取り出し方法

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JP2006156550A (ja) * 2004-11-26 2006-06-15 Tsukuba Seiko Co Ltd ダイボンディング装置
JP2012171032A (ja) * 2011-02-18 2012-09-10 Ihi Corp フィルム吸着装置
JP2014108878A (ja) * 2012-12-04 2014-06-12 Kawada Industries Inc 多関節型ロボットによるフィルム剥離方法およびその剥離方法を用いた多関節型ロボットによるワーク装着方法
JP2015202946A (ja) * 2014-04-15 2015-11-16 曙機械工業株式会社 製品取り出し装置とその製品取り出し方法

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TWI655711B (zh) 2019-04-01
JP2018120746A (ja) 2018-08-02
JP6832720B2 (ja) 2021-02-24

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