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WO2018121907A1 - Élément sensible pour la détection d'au moins une caractéristique d'un gaz de mesure dans un espace de gaz de mesure - Google Patents

Élément sensible pour la détection d'au moins une caractéristique d'un gaz de mesure dans un espace de gaz de mesure Download PDF

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Publication number
WO2018121907A1
WO2018121907A1 PCT/EP2017/078150 EP2017078150W WO2018121907A1 WO 2018121907 A1 WO2018121907 A1 WO 2018121907A1 EP 2017078150 W EP2017078150 W EP 2017078150W WO 2018121907 A1 WO2018121907 A1 WO 2018121907A1
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WO
WIPO (PCT)
Prior art keywords
sensor element
electrode
iron
gas
sensor
Prior art date
Application number
PCT/EP2017/078150
Other languages
German (de)
English (en)
Inventor
Andreas KNUEBEL
Sebastian Fuchs
Enno Baars
Veronika Jochmann
Paul Justus Sieffert
Carolin Maria Schilling
Steffen Christopher Styra
Astrid Netsch
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Priority to EP17801366.0A priority Critical patent/EP3563145A1/fr
Priority to KR1020197018630A priority patent/KR102518560B1/ko
Priority to CN201780081448.2A priority patent/CN110140044B/zh
Publication of WO2018121907A1 publication Critical patent/WO2018121907A1/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06—Investigating concentration of particle suspensions
    • G01N15/0656—Investigating concentration of particle suspensions using electric, e.g. electrostatic methods or magnetic methods
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4073—Composition or fabrication of the solid electrolyte
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4077—Means for protecting the electrolyte or the electrodes

Definitions

  • Sensor element for detecting at least one property of a sample gas in a sample gas space
  • Sensor elements for detecting at least one property of a measurement gas are known from the prior art. These include in particular sensor elements for detecting at least one parameter of the measurement gas, in particular at least one property of an exhaust gas of an internal combustion engine, such as a proportion of a component of the exhaust gas, including a proportion of oxygen, nitrogen oxide and / or gaseous hydrocarbons. Other properties that can be detected with such sensor elements may relate to particle loading, temperature and / or pressure of the sample gas.
  • Such sensor elements may in particular be a
  • Lambda probes can preferably be used in the exhaust system of an internal combustion engine, for example by one
  • Lambda sensors are described for example in Konrad Reif, eds., Sensors in the motor vehicle, 2nd edition, Springer Vieweg, 2012, pages 160 to 165. Lambda probes,
  • Concentration profile across the diffusion barrier is by a constant control point in the electrode cavity, in particular a constant
  • Target voltage resulting in an oxygen concentration and uniquely determined by an exhaust gas oxygen concentration.
  • An influx of oxygen molecules from the sample gas space to the electrode cavity adjusts according to this unique concentration profile and corresponds to the adjusted pumping current. Therefore, the pumping current can serve as a measured value for the oxygen concentration in the measuring gas space, in particular for the oxygen concentration on the exhaust gas side.
  • Such sensor elements can also be sensor elements for detecting particles of a measurement gas in a measurement gas space, in particular of soot or dust particles.
  • sensor elements can also be sensor elements for detecting particles of a measurement gas in a measurement gas space, in particular of soot or dust particles.
  • A2 particle sensors are known in which one or more metallic electrodes on an electrically insulating Carrier are applied.
  • the accumulating under the action of a voltage particles form in a collecting phase of the sensor element electrically conductive bridges between, for example, as a comb-like interdigitated interdigital electrodes electrodes and close this short.
  • the electrodes are usually baked by means of an integrated heating element.
  • the particle sensors evaluate the changed due to the particle accumulation electrical properties of an electrode structure. For example, a decreasing resistance or current at constant applied voltage can be measured.
  • such sensor elements comprise at least one electrode, which can be acted on by the measurement gas, and it can often be an advantage to use the electrodes in a mold
  • Temperature measurement in particular in the particle sensor or in a Temperature sensor to be exposed to the exhaust stream.
  • the surfaces of the electrodes of the sensor elements are functionally dependent either directly and unprotected the measurement gas, such as exposed to the exhaust gas of the internal combustion engine, or exposed through a particular gas-permeable cover layer of this sample gas, especially for longer periods at high operating temperatures of the internal combustion engine.
  • Exhaust gases from internal combustion engines in particular diesel engines or gasoline engines, may contain the chemical element phosphorus (P), in particular in the form of chemical compounds, which are at high
  • Operating temperatures of the internal combustion engine can be decomposable.
  • An example of this is (di) phosphorus pentoxide P4O10.
  • the phosphor can thus have an influence on a chemical composition and / or spatial structure of the surface of the electrode when a surface of the electrode of the sensor element exposed to the measurement gas is affected.
  • the phosphor contained in the measurement gas may form a mixed phase with a metallic constituent present at least in the surface of the electrode, to which in particular the metal platinum (Pt) may belong.
  • Mixed phase platinum phosphide Pt2oP7 has a melting point of only 588 ° C.
  • the melting point of the mixed phase can even be lower than the operating temperature of the sensor element of 600 ° C. to 1300 ° C., so that the surface of the electrode of the sensor element exposed to the measurement gas can have a significantly reduced temperature resistance.
  • temperature-driven aging processes in such mixed phases can proceed more rapidly than aging processes in pure platinum in the same environment.
  • the surface of the electrode of the sensor element may already undergo changes during its manufacture, in particular with regard to the chemical composition and / or the spatial structure, which are not always desirable.
  • the surface of the electrode of the sensor element may already undergo changes during its manufacture, in particular with regard to the chemical composition and / or the spatial structure, which are not always desirable.
  • Temperature sensor in a combined process comprising screen printing, sintering and laser ablation produce. For this purpose, first a full surface of platinum can be applied to a carrier and sintered before the
  • Interdigital electrodes in particular by removal of material between webs of the electrode fingers by means of a laser, are subsequently produced thereon.
  • the methods used to produce the interdigital electrodes can cause changes in the surface, which can prove disadvantageous for the formation of measurement signals of the sensor element.
  • At least the platinum present in the surface of the electrodes can assume a catalytically active state after the production process, which can promote a premature soot burn-off and thus adversely affect the measurement signal. Disclosure of the invention
  • a sensor element is understood to mean any device which is suitable for qualitatively and / or quantitatively detecting the selected property of the measurement gas and which, in particular, can generate an electrical measurement signal corresponding to the selected property of the measurement gas, such as, for example Voltage or a current.
  • the selected property of the measurement gas may in this case preferably relate to a portion of a constituent of the measurement gas, in particular a proportion of oxygen, nitrogen oxide and / or gaseous hydrocarbons, a particle load, a temperature and / or a pressure of the measurement gas.
  • the sensor element can be set up in particular for use in a motor vehicle.
  • the measuring gas may be an exhaust gas of the motor vehicle.
  • gases and gas mixtures are possible in principle.
  • the sensor elements may preferably be lambda probes, in particular broadband lambda probes, or particle sensors, in particular soot particle sensors, which act on the exhaust gas flow can be suspended. However, other types of sensor elements are also possible.
  • the measuring gas space may basically be any, open or closed space which is adapted to the
  • Measuring gas is to be received and / or to be traversed by the sample gas.
  • the measuring gas space may be an exhaust gas tract of an internal combustion engine, for example an internal combustion engine.
  • the sensor element for detecting at least one property of a
  • Measuring gas in a measuring gas space comprises at least one electrode which has a surface which can be acted upon at least partially by the measuring gas.
  • the at least one electrode can be arranged in the sensor element such that the surface can be exposed directly or indirectly to the measurement gas.
  • directly refers to one
  • the term “indirect” designates an arrangement of the electrode in which the outer surface of the electrode is provided with at least one further layer, which can first be at least partially traversed by the measurement gas in order to reach the surface of the electrode is in the context of the present invention, an electrical
  • Voltage measurement is suitable and / or which can act on at least one element in contact with the electrode element with a voltage and / or current.
  • at least the surface of the electrode of the sensor element exposed to the measurement gas preferably has a noble metal, in particular a platinum metal.
  • Platinum metals in addition to the metal platinum (Pt) include the other elements of groups 8 to 10 of the 5th period and the 6th period of the periodic table of the chemical elements.
  • the platinum metals ruthenium (Ru) are examples of the platinum metals.
  • Rhodium (Rh) and palladium (Pd) of the 5th period also called “light platinum metals” and the platinum metals osmium (Os), iridium (Ir) and platinum (Pt) of the 6th period are also referred to as "heavy platinum metals"
  • the shape of the electrode is fundamentally irrelevant, but the at least one electrode may preferably be designed in the form of a planar electrode or of electrode fingers.
  • the term "flat electrode” basically refers to any shape of the electrode whose dimension in two dimensions is the dimension in the other
  • Dimension significantly exceeds, for example, at least a factor of 2, preferably at least a factor of 10, more preferably at least by a factor of 100.
  • electrode finger is basically understood to mean any shape of the electrode whose dimension in one dimension clearly exceeds the dimension in at least one other dimension, for example at least a factor of 2, preferably at least a factor of 3, particularly preferably at least a factor of 5.
  • a plurality of the electrode fingers can preferably be provided, which can engage with one another, in particular mesh with one another like a comb.
  • the plurality of electrode fingers may have a structure selected from the group consisting of a herringbone structure, a zigzag structure and a winding structure.
  • the at least one electrode may preferably be applied to a carrier.
  • a carrier is basically understood to mean any substrate which is suitable for carrying the at least one electrode, and / or onto which the at least one electrode can be applied.
  • the carrier may comprise at least one electrically insulating material, in particular at least one ceramic material.
  • the carrier may have a carrier surface.
  • a carrier surface is basically understood to mean any layer which surrounds the carrier from its surroundings delimits, and on soft the applied by the measurement gas electrode of the sensor element are applied.
  • iron-containing designates in principle a proportion of iron atoms, iron ions or iron complexes which is present in the region of the sensor element
  • the iron-containing region of the sensor element can be an iron oxide and / or an iron oxide
  • iron mixed oxide As iron oxide here stoichiometric
  • iron (III) oxide Fe2Ü3 or iron (II, III) oxide, Fe30 4 , or non-stoichiometric phases occur.
  • iron mixed oxide here denotes an iron oxide in which further metallic elements are introduced, a non-iron metal oxide which additionally has iron atoms or iron ions introduced therein, or a compound of an iron oxide and a non-iron metal oxide this is the iron mixed oxide AlFeC.
  • the iron-containing region of the sensor element facing the measurement gas may contain a proportion of iron from
  • 0.1% by weight preferably from 1% by weight, to 10% by weight, preferably up to 5% by weight.
  • the iron can fulfill a so-called “getter function” or “catcher function” in the sensor element, in particular in the lambda probe or the particle sensor.
  • the iron present in the region in particular in the form of iron oxide, can be arranged to bind phosphorus (P) in the region of the sensor element, which, as described above, belongs to the sensor element can be fed through the sample gas stream before the phosphorus (P) with the platinum (Pt) can enter a mixed phase (Pt-P).
  • the iron (Fe) can thus rather form iron phosphates with the phosphorus (P), as a result of which the phosphate can no longer be used for a mixed phase, which may comprise at least iron and platinum
  • Robustness of the electrode can be achieved against the influence of phosphorus, which can be expressed in particular in a higher quality of the sensor measurement signal and slower running aging process.
  • the presence of the iron in the region of the sensor element can be advantageous in that it can already at least partially suppress changes in the chemical composition and / or the spatial structure of the surfaces of the electrodes during the production of the sensor element.
  • it can be partially prevented, in particular, that the platinum present in the surface of the electrodes can assume a catalytically active state after the production process, which can promote a premature soot burn-off and thus adversely affect the measurement signal.
  • the iron-containing region of the sensor element may comprise at least one outer layer of the sensor element, which directly faces the measurement gas and / or which to another outer layer of the
  • Measuring gas is accessible, regardless of whether the sensor element in
  • At least one protective tube is included or not.
  • the iron-containing region of the sensor element facing the measurement gas may comprise the at least one surface of the electrode of the sensor element facing the measurement gas.
  • the electrode may in particular be selected from the group comprising an outer electrode of a lambda probe, in particular a broadband lambda probe, an interdigital electrode of a particle sensor, a
  • Resistor track for temperature measurement especially in one
  • the volume of the electrode may be ferrous or merely a surface layer of the electrode facing the measuring gas.
  • the electrode in this embodiment the above-described "getter function", the bound from the sample gas Phosphorus (P) to meet meet, since the surface of the electrode to the along with the measurement gas supplied phosphorus (P) in a particularly simple manner is accessible.
  • the iron-containing region of the sensor element facing the measurement gas may comprise at least one layer adjoining the electrode.
  • the at least one, preferably directly adjacent to the electrode layer be iron-containing.
  • the iron-containing layer adjacent to the electrode can be at least partly located on the surface of the sample gas
  • an adhesion layer to a layer adjacent to the electrode may be configured as the iron-containing region.
  • the iron-containing layer applied to the surface of the electrode can thus capture in a particularly simple manner the phosphorus (P) carried along with the measurement gas and thus likewise bind the "getter function" described above, the phosphorus (P) brought from the measurement gas, in particular to meet advantageously.
  • the iron-containing region of the sensor element may comprise at least one insulating layer adjoining the electrode or a ceramic matrix of a metal-containing, in particular platinum-containing, metal
  • the iron may be in the form of AIFeO 3 in the insulating layer or the ceramic matrix, which has a particularly high miscibility with Al 2 O 3 present there.
  • the iron-containing region of the sensor element may comprise a heater provided for heating the electrode, in the electrically conductive material of which additional iron-containing constituents are introduced.
  • a method for producing a sensor element for detecting at least one property of a measurement gas in a measurement gas space is proposed.
  • a region of the sensor element facing the measurement gas is provided with an iron-containing substance, it being possible for the iron-containing substance to be applied after at least one of the processes described in more detail below.
  • the iron-containing substance by means of a
  • Impregnation can be applied to the sensor element.
  • the sensor element can be completely or partially introduced into an iron-containing solution, wherein subsequently fixing of the iron-containing substance takes place on the introduced into the solution areas of the sensor element, preferably by heating the sensor element.
  • the iron-containing substance can be applied by displacing the region of the sensor element facing the measurement gas with a paste, wherein the paste contains iron-containing particles, in particular
  • the application of the paste may in this case comprise directly on the electrode facing the sample gas and / or on at least one adjacent to the electrode layer, wherein the to the electrode
  • adjacent layer may preferably be arranged on the at least partially acted upon by the sample gas surface of the electrode.
  • the iron-containing substance can be effected by applying an iron-containing layer to the region of the sensor element facing the measurement gas.
  • the iron-containing layer can preferably be applied directly to the electrode facing the sample gas.
  • the iron-containing layer may comprise an insulating layer adjoining the electrode, a ceramic matrix of a metal-containing, in particular platinum-containing, functional layer or comprise an adhesive layer to a layer adjoining the electrode.
  • a structuring method such as laser ablation
  • spatial structures are introduced.
  • a baking process can be improved, thereby, that a crystalline structure of the platinum components of the
  • Electrode layer is optimized.
  • platinum-containing areas on the surface of the electrode which after application of the
  • Structuring method e.g. the laser ablation
  • amorphous structures have to be forced back into a fine-grained, crystalline structure back.
  • the sensor element produced in this way can have a comparatively higher signal quality of the sensor measurement signal.
  • the method can be used, in particular, for producing a sensor element according to the present invention, that is to say according to one of the above-mentioned
  • the proposed sensor element and the proposed method for its production have numerous advantages over known sensor elements and associated production methods.
  • the presently described structure and composition of the sensor elements makes it possible to largely prevent the disadvantageous influence that phosphorus can have on the chemical composition and / or the spatial structure and thus on the functionality of the electrode of the sensor element.
  • a significantly increased robustness of the electrode against the influence of phosphorus can be achieved, which can be manifested in particular in a higher quality of the sensor measurement signal and a slowing down of the aging process of the electrode.
  • Sensor elements are prevented, that at least located in the surface of the electrodes platinum assumes a catalytically active state, which can also cause a higher quality of the sensor measurement signal.
  • the proposed sensor element and the proposed manufacturing method is widely applicable, among other types of sensor elements, preferably on lambda probes, in particular broadband lambda probes, or
  • Particle sensors in particular soot particle sensors, or temperature sensors.
  • Figure 1 shows an embodiment of a sensor element of
  • FIGS. 2A to 2D different embodiments of the sensor element from FIG. 1 in a cross-sectional view
  • Figure 1 shows schematically an embodiment of a sensor element 110 according to the invention for detecting at least one property of a
  • Measuring gas 112 in a measuring gas chamber in a plan view Measuring gas 112 in a measuring gas chamber in a plan view.
  • a motor vehicle preferably as a lambda probe, in particular a broadband lambda probe, or as a particle sensor, in particular as a soot particle sensor. This can be the
  • Sensor element 110 in particular one or more, not shown in the figures, further functional elements include, such as more
  • Electrodes other electrode leads or contacts, multiple layers, one or more heating elements, electrochemical cells or other elements such as disclosed in the above-mentioned prior art.
  • the sensor element 110 may be received, for example, in a protective tube, also not shown here.
  • the sensor element 110 comprises at least one electrode 114, wherein the electrode 114, in order to perform the function of the sensor element 110,
  • a surface 116 of the electrode 114 facing the sample gas 112 can be acted upon at least partially by the sample gas 112.
  • the at least one electrode 114 may be, for example, a
  • Outer electrode of a lambda probe in particular a broadband lambda probe, or to act an interdigital electrode of a particle sensor or a resistor track for temperature measurement, in particular in a particle sensor or temperature sensor.
  • Other applications are possible.
  • the sensor element may comprise at least one carrier 118, wherein the at least one electrode 114 may be applied in particular to a carrier surface 120 of the carrier 118.
  • the carrier 118 may comprise at least one electrically insulating material, preferably at least one ceramic material.
  • at least one electrode lead 122 can be applied to the electrode 114 on the carrier 118, as shown schematically in FIG. Other versions of the
  • electrode leads 122 are possible, e.g. through cavities located within the carrier 118.
  • the at least one electrode 114 thus has the highest possible electrical conductivity and at the same time high strength
  • Corrosion in particular by the sample gas 112, may be at least on the surface 116 of the electrode 114 exposed to the sample gas 112
  • Sensor element 110 is preferably a noble metal, in particular a platinum metal, in particular platinum (Pt), ruthenium (Ru), rhodium (Rh), palladium (Pd), osmium (Os) and / or iridium (Ir), with platinum (Pt) particularly is preferred.
  • the present sensor element 110 is therefore explained without restriction of generality using the example of the metal platinum (Pt); However, a use of the remaining platinum metals for the sensor element 110 is also possible.
  • the present sensor element 110 has a region 124 facing the measurement gas, which region can be acted upon by the measurement gas 112.
  • the measurement gas 112 may in particular be an exhaust gas of the motor vehicle.
  • Such exhaust gases may contain the chemical element phosphorus (P), in particular in the form of chemical compounds, which may be decomposable at the high operating temperatures. Without any further measures, the phosphor can thus have an adverse effect on a chemical composition and / or spatial effect upon application of the region 124 of the sensor element 110 facing the sample gas 112
  • the region 124 of the sensor element 110 facing the sample gas is therefore designed as an iron-containing region 126.
  • the iron-containing region 126 of the sensor element 110 can this particular iron oxide or a
  • iron mixed oxide In this case iron (III) oxide Fe 2 O 3, iron (II, III) oxide, Fe 3 O 4 , or non-stoichiometric phases can occur as iron oxide.
  • the iron mixed oxide may comprise an iron oxide in which further metallic elements are introduced, a non-iron metal oxide which additionally has iron atoms or iron ions introduced therein, or a compound of an iron oxide and a non-iron metal oxide, such as AIFeO 3 , Other mixed iron oxides are possible.
  • sensor element 110 has an iron content of 0.1% by weight, preferably from 1% by weight, to 10% by weight, preferably up to 5% by weight.
  • Sensor element 110 can for this purpose in a particularly advantageous manner, the above-described "getter function", the bound from the sample gas 112 Phosphorus (P) to bind meet, since the iron-containing region 126 of the
  • FIGS. 2A to 2D each schematically show an embodiment of the sensor element 110 from FIG. 1 in a cross-sectional view, wherein in the sensor element 110 the electrode 114 is respectively applied to the carrier 118.
  • the embodiments of the invention shown individually in FIGS. 2A to 2D are schematically shown individually in FIGS. 2A to 2D
  • Sensor element 110 can also be combined with each other, for example, the embodiments of Figures 2A and 2B, from Figures 2A, 2B and 2C, from Figures 2B and 2C, or from Figure 2D with Figure 2A or 2A and 2B or 2A and 2B and 2C. Further combinations are possible.
  • the electrode 114 can in this case have a volume 128 and the surface 116 set up to be acted upon by the measurement gas 112.
  • the volume 128 of the electrode 114 may take over the function of the iron-containing region 126. Alternatively, only one can
  • the preferred embodiment according to FIG. 2A can fulfill the above-mentioned getter function in a particularly advantageous manner since the surface 116 of the electrode 114 has the phosphorus carried along with the measurement gas 112
  • (P) is accessible in a particularly simple manner.
  • Covering layer 132 may be provided here the function of the iron-containing
  • Area 126 can take over.
  • the preferred embodiment according to FIG. 2B can also advantageously fulfill the getter function, since the iron-containing covering layer 132 arranged on the surface 116 of the electrode 114 is likewise easily accessible to the measuring gas 112 and thus to the phosphorus (P) added thereto.
  • Cover layer 134 may be provided an iron-containing adhesive layer 136, which here in addition to the function of the primer layer and the function of the iron-containing Area 126 can take over.
  • the cover layer 134 may be made of iron or non-ferrous.
  • the electrode 114 facing the carrier surface 120 of the carrier 118 may be provided an iron-containing carrier layer 140.
  • the iron-containing carrier layer 140, the carrier 118 and / or a near-surface layer 142 of the carrier 118 can take over the function of the iron-containing region 126.
  • a region 124 of the sensor element 110 facing the measurement gas 112 is provided with an iron-containing substance, wherein an application of the iron-containing substance by means of impregnation with the iron-containing substance, application of an iron-containing substance
  • Paste or application of an iron-containing layer can take place.
  • the sensor element 110 may be completely or partially immersed in an iron-containing solution, e.g. an iron nitrate solution, incorporated, e.g. Example, immersed, wherein then fixing the iron-containing substance takes place on the introduced into the solution areas 124 of the sensor element 110, preferably by 110 can form by baking the sensor element resistant iron oxide from the iron nitrate.
  • an iron-containing solution e.g. an iron nitrate solution, incorporated, e.g. Example
  • the region 124 of the sensor element 110 facing the measurement gas 112 may be provided with a paste, wherein the paste may comprise iron-containing particles, in particular iron oxide particles.
  • the application of the paste may in particular be effected directly on the electrode 114 facing the measurement gas 112, on the covering layer 134 and / or on the layer 142 of the carrier 118 close to the surface.
  • the iron-containing substance can be carried out by applying an iron-containing layer on the region 124 of the sensor element facing the measurement gas 112.
  • the iron-containing cover layer 132 can preferably directly onto the electrode 114 facing the measurement gas 112 be applied.
  • Carrier layer 140 may be applied directly to the carrier 118, before this can be done, the application of the electrode 114.
  • the electrodes 114 in particular the
  • Interdigital electrodes of the particle sensor preferably in a combined process comprising screen printing, sintering and laser ablation are produced.
  • the laser process in particular for generating a
  • Electrode structure with small electrode distances is advantageous, material is now removed from the electrode full area. This removal can not only cause a structuring of the electrode surface, but also the surface of the isolated in the region of the removal
  • Platinum grains change, the surface of the platinum grains here even one
  • Phase transformation can experience.
  • the observable phase transformation of the platinum or the catalytic activation of the electrode can generally be caused by the production process of the platinum structures independently of the use of a laser process.
  • FIG. 3A shows a scanning electron micrograph of the surface of a conventional electrode after laser machining of the surface and FIG. 3B after the heating process has been completed.
  • FIG. 3C shows a scanning electron micrograph of FIG.
  • Cover layer of the electrode 114 may affect the effectiveness of a later
  • Conditioning to improve the signal quality of the sensor element 110 be improved or also directly effective for an improved platinum structure.
  • an application of an iron-containing substance can take place after the sintering or laser process and can be supplemented by a subsequent conditioning or a subsequent annealing process in order to make the iron effective for the platinum structure.

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Abstract

La présente invention concerne un élément sensible (110) permettant de déterminer au moins une propriété d'un gaz de mesure (112) dans une chambre de gaz de mesure. L'élément sensible (110) comprend au moins une électrode (114) sur laquelle le gaz de mesure (114) peut être au moins partiellement appliqué. Une zone (124) de l'élément sensible (110) tournée vers le gaz de mesure (112) contient du fer.
PCT/EP2017/078150 2016-12-28 2017-11-03 Élément sensible pour la détection d'au moins une caractéristique d'un gaz de mesure dans un espace de gaz de mesure WO2018121907A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP17801366.0A EP3563145A1 (fr) 2016-12-28 2017-11-03 Élément sensible pour la détection d'au moins une caractéristique d'un gaz de mesure dans un espace de gaz de mesure
KR1020197018630A KR102518560B1 (ko) 2016-12-28 2017-11-03 측정 가스 챔버 내의 측정 가스의 적어도 하나의 특성을 검출하기 위한 센서 요소
CN201780081448.2A CN110140044B (zh) 2016-12-28 2017-11-03 用于感测在测量气体室中的测量气体的至少一个特性的传感器元件

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102016226276.9 2016-12-28
DE102016226276 2016-12-28
DE102017205064.0 2017-03-24
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WO2003006976A2 (fr) 2001-07-10 2003-01-23 Robert Bosch Gmbh Detecteur servant a la detection de particules, et procede de reglage de son fonctionnement
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CN110140044A (zh) 2019-08-16
KR102518560B1 (ko) 2023-04-07
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CN110140044B (zh) 2023-11-28
KR20190102196A (ko) 2019-09-03

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