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WO2018116846A1 - Tête d'éjection de liquide et dispositif d'éjection de liquide - Google Patents

Tête d'éjection de liquide et dispositif d'éjection de liquide Download PDF

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Publication number
WO2018116846A1
WO2018116846A1 PCT/JP2017/043977 JP2017043977W WO2018116846A1 WO 2018116846 A1 WO2018116846 A1 WO 2018116846A1 JP 2017043977 W JP2017043977 W JP 2017043977W WO 2018116846 A1 WO2018116846 A1 WO 2018116846A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid chamber
circulating fluid
nozzle
chamber
liquid
Prior art date
Application number
PCT/JP2017/043977
Other languages
English (en)
Japanese (ja)
Inventor
克智 塚原
祐馬 福澤
Original Assignee
セイコーエプソン株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2017026372A external-priority patent/JP6950194B2/ja
Application filed by セイコーエプソン株式会社 filed Critical セイコーエプソン株式会社
Priority to US16/473,203 priority Critical patent/US10870274B2/en
Priority to CN201780078088.0A priority patent/CN110087887B/zh
Publication of WO2018116846A1 publication Critical patent/WO2018116846A1/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14233—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
    • B41J2002/14241—Structure of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm having a cover around the piezoelectric thin film element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14411—Groove in the nozzle plate
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14419—Manifold
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14491—Electrical connection
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/11—Embodiments of or processes related to ink-jet heads characterised by specific geometrical characteristics
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/12—Embodiments of or processes related to ink-jet heads with ink circulating through the whole print head

Definitions

  • the present invention relates to a technique for ejecting a liquid such as ink.
  • Patent Document 1 discloses a liquid jet head having a laminated structure in which a flow path forming substrate is installed on the surface on one side of a communication plate and a nozzle plate is installed on the surface on the other side.
  • a pressure generating chamber filled with the liquid supplied from the common liquid chamber (reservoir) is formed, and a nozzle is formed in the nozzle plate.
  • the pressure generating chamber and the nozzle communicate with each other through the communication passage formed in the communication plate.
  • a circulation flow passage communicating with the common liquid chamber and a groove-like circulation communication passage communicating the communication passage with the circulation flow passage are formed. According to the above configuration, it is possible to circulate the liquid inside the communication passage to the common liquid chamber through the circulation communication passage and the circulation passage.
  • a liquid jet head includes a nozzle plate provided with a nozzle, a pressure chamber to which liquid is supplied, the nozzle, and the pressure chamber And a pressure generating portion for generating a pressure change in the pressure chamber, and a flow passage forming portion provided with a communication passage communicating with the pressure chamber, and a circulating fluid chamber communicating with the communication passage;
  • the height at the first point is greater than the height at the second point on the side of the communication passage when viewed from the first point.
  • the height at the first point in the circulating fluid chamber is larger than the height at the second point on the communication passage side as viewed from the first point, the height at the first point throughout the circulating fluid chamber It is possible to suppress the decrease in mechanical strength of the flow path forming portion as compared with the configuration in which the length is large.
  • the circulating fluid chamber does not overlap the pressure chamber in plan view.
  • the circulating fluid chamber does not overlap the pressure chamber in plan view, it is possible to suppress the decrease in mechanical strength of the flow path forming portion as compared with the configuration in which the circulating fluid chamber overlaps the pressure chamber. is there.
  • the maximum value of the height of the circulating fluid chamber is smaller than the flow path length of the communication path.
  • the maximum value of the height of the circulating fluid chamber is smaller than the flow passage length of the communication passage. Therefore, it is possible to suppress a decrease in mechanical strength of the flow passage forming portion as compared with a configuration in which the maximum value of the height of the circulating liquid chamber is equal to or greater than the flow passage length of the communication passage.
  • the flow path forming portion includes a first flow path substrate on which the communication path and the circulating liquid chamber are formed, and a second on which the pressure chamber is formed.
  • the maximum value of the height of the circulating fluid chamber is equal to or less than half the thickness of the first flow path substrate.
  • the maximum value of the height of the circulating liquid chamber is equal to or less than half the thickness of the first flow path substrate. Therefore, it is possible to suppress a decrease in mechanical strength of the flow path forming portion, as compared with a configuration in which the maximum value of the height of the circulating liquid chamber is larger than half of the thickness of the first flow path substrate. .
  • ⁇ Aspect A5> In the preferred embodiment (Aspect A5) according to any of the aspects A1 to A4, the maximum value of the height of the circulating fluid chamber is smaller than the width of the circulating fluid chamber. In the above aspect, the maximum value of the height of the circulating fluid chamber is smaller than the width of the circulating fluid chamber. Therefore, it is possible to suppress a reduction in mechanical strength of the flow path forming portion as compared with a configuration in which the maximum value of the height of the circulating fluid chamber is larger than the width.
  • ⁇ Aspect A6> In the preferred embodiment (Aspect A6) according to any of the aspects A1 to A5, the height of the circulating fluid chamber monotonously decreases from the position at which the height is maximum to the end in the width direction.
  • the circulating fluid chamber is elongated in a first direction, and the plurality of groove portions are convex on a first side of the first direction in a plan view.
  • the plurality of groove portions are formed to be convex on the first side in the first direction which is the longitudinal direction of the circulating fluid chamber. Therefore, it is possible to facilitate the flow of the liquid flowing into the circulating fluid chamber to the second side opposite to the first side.
  • the nozzle plate is provided with a first nozzle and a second nozzle as the nozzles, and the flow path forming portion is provided with the pressure chamber corresponding to the first nozzle.
  • the groove portion formed in the region on the first nozzle side of the upper surface of the circulating fluid chamber provided with the circulating fluid chamber elongated in one direction is on the first side of the first direction in plan view
  • the groove is convex
  • the groove formed in the region on the second nozzle side is convex on a second side opposite to the first side in a plan view.
  • the liquid flowing into the circulating fluid chamber from the communication passage corresponding to the first nozzle can easily flow to the second side in the first direction, and the liquid flowing into the circulating fluid chamber from the communication passage corresponding to the second nozzle There is an advantage that it is easy to make the fluid flow to the first side in the first direction.
  • the nozzle plate is provided with a first nozzle and a second nozzle as the nozzles, and the flow path forming portion is provided with the pressure chamber corresponding to the first nozzle.
  • the circulating fluid chamber elongated in one direction is provided, and the groove portion formed in the region on the first nozzle side of the upper surface of the circulating fluid chamber and the region formed in the region on the second nozzle side
  • the groove portion is convex on the first side in the first direction in plan view.
  • the nozzle plate is provided with a plurality of nozzles arranged in the first direction, and in the flow path forming portion, the pressure corresponding to each of the plurality of nozzles A chamber, the communication passage, and the circulating fluid chamber elongated in the first direction are provided, and the groove positioned on the first side in the first direction among the plurality of grooves is the first groove in a plan view
  • the groove is convex on the second side opposite to the side, and the groove on the second side in the first direction among the plurality of grooves is convex on the first side in plan view.
  • the liquid that has flowed into the circulating fluid chamber from the nozzle located on the first side in the first direction tends to flow to the first side, and flows into the circulating fluid chamber from the nozzle located on the second side in the first direction. It has the advantage that it is easy to make the liquid flow to the second side.
  • a first circulating fluid chamber positioned opposite to each other with the communication passage interposed therebetween and in communication with the communication passage
  • a second circulating fluid chamber is provided as the circulating fluid chamber.
  • the first circulating fluid chamber and the second circulating fluid chamber are provided on the opposite sides to each other across the communication passage, only one of the first circulating fluid chamber and the second circulating fluid chamber is provided. It is possible to increase the circulation volume of the liquid as compared with ⁇ Aspect A13>
  • the first circulating fluid chamber does not overlap the pressure chamber in plan view
  • the second circulating fluid chamber overlaps the pressure chamber in plan view.
  • both the first circulating fluid chamber and the second circulating fluid chamber overlap with the pressure chamber.
  • ⁇ Aspect A16> In a preferred example of the aspect A13 (aspect A16), the height of the first circulating fluid chamber is smaller than the height of the second circulating fluid chamber. According to the above aspect, there is an advantage that the mechanical strength of the flow path forming portion can be easily maintained.
  • the width of the first circulating fluid chamber In a preferred example of the aspect A13 (aspect A17), the width of the first circulating fluid chamber is larger than the width of the second circulating fluid chamber.
  • the width of the first circulating fluid chamber is smaller than the width of the second circulating fluid chamber.
  • the flow path forming portion is provided with a supply liquid chamber for storing the liquid supplied to the pressure chamber, and the height of the circulating liquid chamber Is equal to the height of the feed chamber.
  • the height of the circulating fluid chamber and the height of the supply fluid chamber are equal, there is an advantage that the process of forming the circulating fluid chamber and the supply fluid chamber is simplified.
  • the circulating fluid chamber is formed between a first space and flow path walls facing each other on the communication path side when viewed from the first space.
  • the second point is located in the second space.
  • the second point is located in the second space.
  • the circuit board is provided with a wiring board having an end disposed opposite to the nozzle plate across the flow path forming portion, and the circulating fluid chamber And overlap the end of the wiring board in plan view.
  • an external force easily acts on the flow path forming portion from the distribution substrate when the wiring substrate is mounted. Therefore, the above-mentioned mode which can control a fall of mechanical strength of a channel formation part is exceptionally preferred.
  • a liquid ejecting apparatus according to a preferred aspect (aspect A23) of the present invention includes the liquid ejecting head according to any one of the aspects exemplified above.
  • a good example of the liquid ejecting apparatus is a printing apparatus that ejects ink, but the application of the liquid ejecting apparatus according to the present invention is not limited to printing.
  • a circulation communication passage is formed on the surface of the communication plate to which the nozzle plate is joined.
  • a preferred embodiment of the present invention has an object to efficiently circulate the liquid in the vicinity of the nozzle.
  • the circulation fluid chamber and the first communication passage are communicated with each other.
  • the configuration of the liquid jet head is simplified as compared with the configuration in which the circulating fluid chamber communicating with the two circulation paths is separately provided.
  • the first nozzle has a first section and a second section which is larger in diameter than the first section and is located on the flow path forming portion side with respect to the first section. And.
  • the first nozzle since the first nozzle includes the first section and the second section having different inner diameters, there is an advantage that the flow path resistance of the first nozzle can be easily set to a desired characteristic.
  • the first circulation path has the same depth as the second section.
  • the first circulation path and the second section of the first nozzle have the same depth, the first circulation is compared with a configuration in which the depths of the first circulation path and the second section are different. There is an advantage that it is easy to form the road and the second section.
  • the first circulation path is deeper than the second section.
  • the flow resistance of the first circulation passage is smaller compared to the configuration in which the first circulation passage is shallower than the second section. Therefore, it is possible to increase the amount of circulation as compared with the configuration in which the first circulation passage is shallower than the second section.
  • the first circulation path is shallower than the second section.
  • the flow resistance of the first circulation passage is larger compared to the configuration in which the first circulation passage is deeper than the second section. Therefore, it is possible to increase the injection amount as compared with the configuration in which the first circulation path is deeper than the second section.
  • the said 2nd area is continuous with a said 1st circuit.
  • the second section of the first nozzle and the first circulation path are continuous.
  • ⁇ Aspect B8> In a preferred example of the aspect B7 (aspect B8), a flow path length La of a portion of the first circulation path overlapping the circulating fluid chamber and a flow path of a portion of the first circulation path overlapping the first communication path The length Lb satisfies La> Lb. According to the above aspect, there is an advantage that the liquid in the first communication passage is easily supplied to the circulating fluid chamber via the first circulation passage.
  • a flow path length Lc of a portion of the first circulation path overlapping the partition portion between the first communication path and the circulating fluid chamber in the flow path forming portion is , La>Lb> Lc is satisfied.
  • the liquid in the first communication passage is easily supplied to the circulating fluid chamber via the first circulation passage.
  • the flow path length La of a portion of the first circulation path overlapping the circulating fluid chamber, and the flow path formation portion of the first circulation path in the flow path formation portion The flow path length Lc of the portion overlapping the partition wall portion between the first communication path and the circulating fluid chamber satisfies La> Lc.
  • the liquid in the first communication passage is easily supplied to the circulating fluid chamber via the first circulation passage.
  • the flow passage width of the first circulation path is smaller than the maximum diameter of the first nozzle.
  • the flow passage width of the first circulation passage is larger than the maximum diameter of the first nozzle.
  • the flow path resistance of the circulation path is large. Therefore, it is possible to increase the injection amount.
  • the flow passage width of the first circulation passage is smaller than the flow passage width of the first pressure chamber, the flow passage width of the first circulation passage is compared with the configuration larger than the flow passage width of the first pressure chamber The flow resistance of the first circulation path is large. Therefore, it is possible to increase the injection amount.
  • the channel width of the portion on the circulating fluid chamber side of the first circulation path is larger than the channel width of the portion on the first nozzle side wide.
  • the flow passage width of the portion on the circulating fluid chamber side of the first circulation passage is wider than the flow passage width of the portion on the first nozzle side, the liquid in the first communication passage runs the first circulation passage. It is easy to be supplied to the circulating fluid chamber via Therefore, there is an advantage that it is easy to secure the amount of circulation.
  • the flow path width of the middle portion of the first circulation path is the flow path width of the portion on the circulating fluid chamber side as viewed from the middle portion It is narrower than the channel width of the portion on the first nozzle side.
  • the flow passage width of the first circulation passage is constant because the flow passage width of the middle portion of the first circulation passage is narrower than the circulation liquid chamber side and the first nozzle side. In comparison, the flow path resistance of the first circulation path is large. Therefore, it is possible to increase the injection amount.
  • the flow path width of the middle portion of the first circulation path is the flow path width of the portion on the circulating fluid chamber side as viewed from the middle portion It is wider than the flow passage width of the portion on the first nozzle side.
  • the flow passage width of the first circulation passage is constant because the flow passage width of the middle part of the first circulation passage is wider than the circulation liquid chamber side and the first nozzle side. In comparison, the flow resistance of the first circulation path is small. Therefore, it is possible to increase the amount of circulation.
  • the central axis of the first nozzle is located on the opposite side to the circulating fluid chamber with respect to the central axis of the first communication passage.
  • the central axis of the first nozzle is located on the opposite side to the circulating fluid chamber when viewed from the central axis of the first communication passage, the central axis of the first nozzle is circulated when viewed from the central axis of the first communication passage. Compared with the configuration located on the liquid chamber side, it is possible to reduce the circulation amount and to increase the injection amount.
  • the central axis of the first nozzle is at the same position as the central axis of the first communication passage.
  • the central axis of the first nozzle and the central axis of the first communication passage are at the same position, the central axis of the first nozzle and the central axis of the first communication passage are at different positions. In comparison, there is an advantage that it is easy to achieve both securing of the injection amount and securing of the circulating amount.
  • the central axis of the first nozzle is located on the circulating fluid chamber side as viewed from the central axis of the first communication passage.
  • the central axis of the first nozzle is located on the circulating fluid chamber side as viewed from the central axis of the first communication passage, the central axis of the first nozzle is the circulating fluid chamber as viewed from the central axis of the first communication passage. It is possible to increase the amount of circulation and to reduce the amount of injection compared to the configuration on the opposite side.
  • an intermediate portion of the first circulation path is closer to the circulating fluid chamber side and the portion on the first nozzle side as viewed from the intermediate portion. deep.
  • the first circulation path since the middle portion of the first circulation path is deeper than the portion on the circulating fluid chamber side and the portion on the first nozzle side, the first circulation path has a constant depth over the entire length as compared to the configuration 1 The flow path resistance of the circulation path is small. Therefore, it is possible to increase the amount of circulation.
  • ⁇ Aspect B20> In a preferable example (aspect B20) according to any one of the aspects B1 to B19, when a pressure change is generated in the first pressure chamber, an amount of the liquid supplied to the circulation liquid chamber through the first circulation path. Is larger than the amount of liquid ejected from the first nozzle. In the above aspect, the circulation amount is larger than the injection amount.
  • the liquid jet head can be easily miniaturized as compared with, for example, a configuration in which the first circulation passage and the first pressure chamber do not overlap with each other.
  • Aspect B22 In the preferred embodiment (Aspect B22) according to any one of Aspect B1 to Aspect B20, the first circulation path and the circulating fluid chamber overlap each other, and the first circulation path and the pressure generating portion overlap each other, and The circulating fluid chamber and the pressure generator do not overlap with each other.
  • the first circulation passage overlaps the circulating fluid chamber and the pressure generating portion
  • the circulating fluid chamber and the pressure generating portion do not overlap each other.
  • an end face of the first pressure chamber on the side of the first communication passage is an inclined surface inclined with respect to the upper surface of the first pressure chamber The first circuit and the upper surface of the first pressure chamber do not overlap with each other.
  • the first pressure chamber and the circulating fluid chamber communicate with each other through the first communication passage and the first circulation passage.
  • each of the nozzle plate and the flow path forming portion includes a substrate formed of silicon.
  • the flow path can be formed with high accuracy to the nozzle plate and the flow path forming portion by using, for example, a semiconductor manufacturing technology.
  • a liquid ejecting apparatus includes the liquid ejecting head according to each aspect exemplified above.
  • a good example of the liquid ejecting apparatus is a printing apparatus that ejects ink, but the application of the liquid ejecting apparatus according to the present invention is not limited to printing.
  • FIG. 2 is a cross-sectional view of a liquid jet head.
  • FIG. 2 is a partial exploded perspective view of a liquid jet head. It is sectional drawing of a piezoelectric element.
  • FIG. 6 is an explanatory view of circulation of ink in the liquid jet head.
  • FIG. 7A is a plan view and a cross-sectional view of the vicinity of the circulating fluid chamber in the liquid jet head.
  • FIG. 7 is a partial exploded perspective view of a liquid jet head according to a second embodiment. It is the top view and sectional drawing of the vicinity of the circulating fluid chamber in 2nd Embodiment.
  • FIG. 13 is a cross-sectional view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 13 is a cross-sectional view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 13 is a cross-sectional view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 13 is a cross-sectional view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 13 is a cross-sectional view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 14 is a plan view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 14 is a plan view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 14 is a plan view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 14 is a plan view and a cross-sectional view of the vicinity of the circulating fluid chamber in the liquid jet head of the modified example.
  • FIG. 14 is a plan view and a cross-sectional view of the vicinity of the circulating fluid chamber in the liquid jet head of the modified example.
  • FIG. 13 is a cross-sectional view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 13 is a cross-sectional view of the vicinity of a circulating fluid chamber in a liquid jet head of a modified example.
  • FIG. 13 is a cross-sectional view of the vicinity
  • FIG. 1 is a configuration diagram illustrating a liquid ejecting apparatus 100 according to a first embodiment of the present invention.
  • the liquid ejecting apparatus 100 according to the first embodiment is an ink jet printing apparatus that ejects an ink, which is an example of a liquid, to the medium 12.
  • the medium 12 is typically a printing paper, but a print target of any material such as a resin film or fabric may be used as the medium 12.
  • the liquid ejecting apparatus 100 is provided with a liquid container 14 storing ink.
  • a cartridge removable from the liquid ejecting apparatus 100, a bag-like ink pack formed of a flexible film, or an ink tank capable of refilling ink is used as the liquid container 14.
  • a plurality of types of ink having different colors are stored in the liquid container 14.
  • the liquid ejecting apparatus 100 includes a control unit 20, a transport mechanism 22, a moving mechanism 24, and a liquid ejecting head 26.
  • the control unit 20 includes, for example, a processing circuit such as a central processing unit (CPU) or a field programmable gate array (FPGA) and a storage circuit such as a semiconductor memory, and centrally controls each element of the liquid ejecting apparatus 100.
  • the transport mechanism 22 transports the medium 12 in the Y direction under the control of the control unit 20.
  • the moving mechanism 24 reciprocates the liquid jet head 26 in the X direction under the control of the control unit 20.
  • the X direction is a direction intersecting (typically orthogonal) to the Y direction in which the medium 12 is transported.
  • the moving mechanism 24 according to the first embodiment includes a substantially box-shaped transport body 242 (carriage) accommodating the liquid jet head 26 and a transport belt 244 to which the transport body 242 is fixed.
  • a configuration in which the plurality of liquid jet heads 26 are mounted on the transport body 242 or a configuration in which the liquid container 14 is mounted on the transport body 242 together with the liquid jet heads 26 may be adopted.
  • the liquid jet head 26 jets the ink supplied from the liquid container 14 from the plurality of nozzles N (jet holes) to the medium 12 under the control of the control unit 20.
  • a desired image is formed on the surface of the medium 12 by the ink jetted onto the medium 12 by each liquid jet head 26 in parallel with the conveyance of the medium 12 by the conveyance mechanism 22 and the repetitive reciprocation of the conveyance body 242.
  • the direction perpendicular to the XY plane (for example, a plane parallel to the surface of the medium 12) is hereinafter referred to as the Z direction.
  • the jetting direction (typically, the vertical direction) of the ink by each liquid jet head 26 corresponds to the Z direction.
  • the plurality of nozzles N of the liquid jet head 26 are arranged in the Y direction.
  • the plurality of nozzles N in the first embodiment are divided into a first row L1 and a second row L2 arranged in parallel at intervals in the X direction.
  • Each of the first row L1 and the second row L2 is a set of a plurality of nozzles N linearly arranged in the Y direction.
  • a plane (YZ plane) O which passes through a central axis parallel to the Y direction and is parallel to the Z direction will be referred to as a "central plane" in the following description.
  • FIG. 2 is a cross-sectional view of the liquid jet head 26 in a cross section perpendicular to the Y direction
  • FIG. 3 is a partial exploded perspective view of the liquid jet head 26.
  • the liquid jet head 26 according to the first embodiment includes an element associated with each nozzle N of the first row L1 (exemplary first nozzle) and each nozzle N of the second row L2.
  • An element related to is a structure in which the elements are arranged in plane symmetry with respect to the central plane O.
  • first portion P1 a portion (hereinafter referred to as a “first portion”) P1 on the positive side in the X direction across the central plane O of the liquid jet head 26 and a portion P2 on the negative side (hereinafter referred to as “second portion”) in the X direction.
  • the structure is substantially common.
  • the plurality of nozzles N in the first row L1 are formed in the first portion P1
  • the plurality of nozzles N in the second row L2 are formed in the second portion P2.
  • the center plane O corresponds to the interface between the first portion P1 and the second portion P2.
  • the liquid jet head 26 includes a flow path forming unit 30.
  • the flow path forming unit 30 is a structure forming a flow path for supplying the ink to the plurality of nozzles N.
  • the flow path forming unit 30 according to the first embodiment is configured by stacking the first flow path substrate 32 (communication plate) and the second flow path substrate 34 (pressure chamber formation plate).
  • Each of the first flow path substrate 32 and the second flow path substrate 34 is a plate-like member elongated in the Y direction.
  • the second flow path substrate 34 is installed on the surface Fa on the negative side in the Z direction of the first flow path substrate 32 using, for example, an adhesive.
  • the vibration portion 42 As illustrated in FIG. 2, on the surface Fa of the first flow path substrate 32, in addition to the second flow path substrate 34, the vibration portion 42, the plurality of piezoelectric elements 44, the protective member 46, and the housing portion 48 are included. And (not shown in FIG. 3).
  • the nozzle plate 52 and the vibration absorber 54 are disposed on the surface Fb of the first flow path substrate 32 on the positive side in the Z direction (ie, the side opposite to the surface Fa).
  • the respective elements of the liquid jet head 26 are generally plate-like members elongated in the Y direction similarly to the first flow path substrate 32 and the second flow path substrate 34, and for example, mutually using an adhesive agent It is joined.
  • the nozzle plate 52 is a plate-like member in which a plurality of nozzles N are formed, and is installed on the surface Fb of the first flow path substrate 32 using, for example, an adhesive.
  • Each of the plurality of nozzles N is a circular through hole through which the ink passes.
  • a plurality of nozzles N constituting a first row L1 and a plurality of nozzles N constituting a second row L2 are formed.
  • a plurality of nozzles N in the first row L1 are formed along the Y direction in the region on the positive side in the X direction with respect to the central plane O of the nozzle plate 52, and in the region on the negative side in the X direction.
  • the plurality of nozzles N in the second row L2 are formed along the Y direction.
  • the nozzle plate 52 of the first embodiment is a single plate-like member that is continuous over a portion in which the plurality of nozzles N in the first row L1 is formed and a portion in which the plurality of nozzles N in the second row L2 is formed.
  • the nozzle plate 52 of the first embodiment is manufactured by processing a silicon (Si) single crystal substrate using semiconductor manufacturing technology (for example, processing technology such as dry etching or wet etching). However, known materials and manufacturing methods can be arbitrarily adopted for manufacturing the nozzle plate 52.
  • the space Ra is an opening formed in a long shape along the Y direction in plan view (that is, viewed from the Z direction), and the supply passage 61 and the communication passage 63 are through holes formed for each nozzle N.
  • the supply liquid chamber 60 is a space formed in a long shape along the Y direction across the plurality of nozzles N, and allows the space Ra and the plurality of supply paths 61 to communicate with each other.
  • the plurality of communication paths 63 are arranged in the Y direction in plan view, and the plurality of supply paths 61 are arranged in the Y direction between the arrangement of the plurality of communication paths 63 and the space Ra.
  • the plurality of supply paths 61 commonly communicate with the space Ra.
  • any one communication passage 63 overlaps the nozzle N corresponding to the communication passage 63 in a plan view.
  • any one communication passage 63 of the first portion P1 communicates with one nozzle N corresponding to the communication passage 63 in the first row L1.
  • any one communication passage 63 of the second portion P2 communicates with one nozzle N corresponding to the communication passage 63 in the second row L2.
  • the second flow path substrate 34 is a plate-like member in which a plurality of pressure chambers C are formed for each of the first portion P1 and the second portion P2.
  • the plurality of pressure chambers C are arranged in the Y direction.
  • Each pressure chamber C (cavity) is a long space formed for each nozzle N and extending in the X direction in plan view.
  • the first flow path substrate 32 and the second flow path substrate 34 are manufactured by processing a single crystal silicon substrate using, for example, a semiconductor manufacturing technology, as in the case of the nozzle plate 52 described above. However, known materials and manufacturing methods may be arbitrarily adopted for manufacturing the first flow path substrate 32 and the second flow path substrate 34.
  • the flow path forming portion 30 (the first flow path substrate 32 and the second flow path substrate 34) and the nozzle plate 52 in the first embodiment include a substrate formed of silicon. Therefore, there is an advantage that fine flow paths can be formed in the flow path forming portion 30 and the nozzle plate 52 with high accuracy by utilizing the semiconductor manufacturing technology as exemplified in the above-mentioned example, for example.
  • a vibrating portion 42 is provided on the surface of the second flow path substrate 34 opposite to the first flow path substrate 32.
  • the vibrating portion 42 of the first embodiment is a plate-like member (diaphragm) that can elastically vibrate.
  • the second flow path substrate 34 and the vibrating portion 42 are integrally formed by selectively removing a part in the thickness direction of a region corresponding to the pressure chamber C in the plate-like member having a predetermined thickness. It is also possible.
  • the pressure chamber C is a space located between the surface Fa of the first flow path substrate 32 and the vibrating portion 42, and generates pressure change in the ink filled in the space.
  • Each pressure chamber C is a space whose longitudinal direction is, for example, the X direction, and is formed individually for each nozzle N.
  • a plurality of pressure chambers C are arranged in the Y direction for each of the first row L1 and the second row L2. As illustrated in FIG. 2 and FIG.
  • the end on the central plane O side of any one pressure chamber C overlaps the communication passage 63 in plan view, and the end on the opposite side to the central plane O is a flat It overlaps with the supply path 61 visually. Therefore, in each of the first portion P1 and the second portion P2, the pressure chamber C communicates with the nozzle N through the communication passage 63, and communicates with the space Ra through the supply passage 61. In addition, it is also possible to add predetermined
  • a plurality of piezoelectric elements corresponding to different nozzles N for each of the first portion P1 and the second portion P2 on the surface of the vibrating portion 42 opposite to the pressure chamber C. 44 are installed.
  • the piezoelectric element 44 is a passive element that is deformed by the supply of a drive signal.
  • the plurality of piezoelectric elements 44 are arranged in the Y direction so as to correspond to the pressure chambers C.
  • the optional one piezoelectric element 44 is a laminate in which a piezoelectric layer 443 is interposed between the first electrode 441 and the second electrode 442 facing each other, as illustrated in FIG. 4.
  • one of the first electrode 441 and the second electrode 442 may be an electrode continuous across the plurality of piezoelectric elements 44 (that is, a common electrode).
  • a portion where the first electrode 441, the second electrode 442, and the piezoelectric layer 443 overlap in a plan view functions as the piezoelectric element 44.
  • the liquid jet head 26 according to the first embodiment includes the first piezoelectric element and the second piezoelectric element.
  • the first piezoelectric element is the piezoelectric element 44 on one side (for example, the right side in FIG.
  • the second piezoelectric element is the other side of the central axis O in the X direction (for example, It is the piezoelectric element 44 of the left side in FIG.
  • the protective member 46 in FIG. 2 is a plate-like member for protecting the plurality of piezoelectric elements 44, and is disposed on the surface of the vibrating portion 42 (or the surface of the second flow path substrate 34).
  • the protection member is obtained by processing the single crystal substrate of silicon (Si), for example, by the semiconductor manufacturing technology, like the first flow path substrate 32 and the second flow path substrate 34. 46 may be formed.
  • the plurality of piezoelectric elements 44 are accommodated in the recess formed on the surface of the protective member 46 on the side of the vibrating portion 42.
  • the end of the wiring board 28 is bonded to the surface of the vibrating portion 42 opposite to the flow path forming portion 30 (or the surface of the flow path forming portion 30). That is, the end portion of the wiring board 28 is joined to the opposite side to the nozzle plate 52 across the flow path forming portion 30.
  • the wiring substrate 28 is a flexible mounting component on which a plurality of wires (not shown) for electrically connecting the control unit 20 and the liquid jet head 26 are formed. An end portion of the wiring substrate 28 which passes through the opening formed in the protective member 46 and the opening formed in the housing 48 and is extended to the outside is connected to the control unit 20.
  • a flexible wiring substrate 28 such as a flexible printed circuit (FPC) or a flexible flat cable (FFC) is preferably employed.
  • the housing portion 48 is a case for storing the ink supplied to the plurality of pressure chambers C (and further, the plurality of nozzles N).
  • the surface of the housing portion 48 on the positive side in the Z direction is bonded to the surface Fa of the first flow path substrate 32 with, for example, an adhesive.
  • a well-known technique and manufacturing method can be arbitrarily employ
  • the housing 48 can be formed by injection molding of a resin material.
  • a space Rb is formed for each of the first portion P1 and the second portion P2.
  • the section Rb of the housing portion 48 and the space Ra of the first flow path substrate 32 communicate with each other.
  • a space configured by the space Ra and the space Rb functions as a liquid storage chamber (reservoir) R that stores the ink supplied to the plurality of pressure chambers C.
  • the liquid storage chamber R is a common liquid chamber shared by the plurality of nozzles N.
  • a liquid storage chamber R is formed in each of the first portion P1 and the second portion P2.
  • the liquid storage chamber R of the first portion P1 is located on the positive side in the X direction with respect to the center plane O, and the liquid storage chamber R for the second portion P2 is located on the negative side with respect to the X direction as viewed from the central surface O.
  • An inlet port 482 for introducing the ink supplied from the liquid container 14 into the liquid storage chamber R is formed on the surface of the housing 48 opposite to the first flow path substrate 32.
  • the liquid in the liquid storage chamber R is supplied to the pressure chamber C via the supply liquid chamber 60 and the respective supply paths 61.
  • vibration absorbers 54 are provided on the surface Fb of the first flow path substrate 32 for each of the first portion P1 and the second portion P2.
  • the vibration absorbing body 54 is a flexible film (compliance substrate) that absorbs pressure fluctuations of the ink in the liquid storage chamber R.
  • the vibration absorber 54 is installed on the surface Fb of the first flow path substrate 32 so as to close the space Ra of the first flow path substrate 32 and the plurality of supply paths 61, and the liquid storage chamber
  • the wall of R (specifically, the bottom) is configured.
  • a space (hereinafter referred to as a “circulating liquid chamber”) 65 is formed on the surface Fb of the first flow path substrate 32 facing the nozzle plate 52.
  • the circulating fluid chamber 65 of the first embodiment fluid is a long-long bottomed hole (groove) extending in the Y direction in plan view. The opening of the circulating fluid chamber 65 is closed by the nozzle plate 52 bonded to the surface Fb of the first flow path substrate 32.
  • FIG. 5 is a block diagram of the liquid jet head 26 focusing on the circulating liquid chamber 65.
  • the circulating fluid chamber 65 is continuous across the plurality of nozzles N along the first row L1 and the second row L2. Specifically, the circulating fluid chamber 65 is formed between the arrangement of the plurality of nozzles N in the first row L1 and the arrangement of the plurality of nozzles N in the second row L2. Therefore, as illustrated in FIG. 2, the circulating fluid chamber 65 is located between the communication passage 63 of the first portion P1 and the communication passage 63 of the second portion P2.
  • the flow passage forming portion 30 of the first embodiment includes the pressure chamber C (first pressure chamber) and the communication passage 63 (first communication passage) in the first portion P1, and the second portion Circulating fluid chamber 65 located between pressure chamber C (second pressure chamber) and communication passage 63 (second communication passage) at P2, and communication passage 63 of first portion P1 and communication passage 63 of second portion P2. And are formed structures.
  • the flow path forming unit 30 according to the first embodiment includes a wall-shaped portion (hereinafter, referred to as “partition”) 69 that divides between the circulating fluid chamber 65 and each communication passage 63.
  • the circulating fluid chamber 65 overlaps the end of the wiring substrate 28 in plan view.
  • the plurality of pressure chambers C and the plurality of piezoelectric elements 44 are arranged in the Y direction in each of the first portion P1 and the second portion P2. Therefore, it is also possible that the circulating fluid chamber 65 extends in the Y direction so as to be continuous across the plurality of pressure chambers C or the plurality of piezoelectric elements 44 in each of the first portion P1 and the second portion P2. Further, as can be understood from FIGS. 2 and 3, the circulating fluid chamber 65 and the liquid storage chamber R extend in the Y direction at an interval from each other, and within the interval, the pressure chamber C, the communication passage 63 and the nozzle It is also possible that N is located.
  • FIG. 6 is an enlarged plan view and a cross-sectional view of a portion of the liquid jet head 26 in the vicinity of the circulating liquid chamber 65.
  • one nozzle N in the first embodiment includes a first section n1 and a second section n2.
  • the first section n1 and the second section n2 are circular spaces formed coaxially and in communication with each other.
  • the second section n2 is located on the flow path forming portion 30 side as viewed from the first section n1.
  • the inner diameter d2 of the second section n2 is larger than the inner diameter d1 of the first section n1 (d2> d1).
  • each nozzle N is formed in a step shape, there is an advantage that the flow path resistance of each nozzle N can be easily set to a desired characteristic.
  • the central axis Qa of each nozzle N in the first embodiment is located on the opposite side of the circulating fluid chamber 65 as viewed from the central axis Qb of the communication passage 63.
  • a plurality of circulation paths 72 are formed on each of the first portion P1 and the second portion P2 on the surface of the nozzle plate 52 facing the flow path forming portion 30.
  • the plurality of circulation paths 72 (example of the first circulation path) of the first portion P1 correspond to the plurality of nozzles N (or the plurality of communication paths 63 corresponding to the first line L1) of the first row L1 one to one.
  • the plurality of circulation paths 72 (example of the second circulation path) of the second portion P2 is in one-to-one correspondence with the plurality of nozzles N in the second row L2 (or the plurality of communication passages 63 corresponding to the second row L2).
  • Each circulation path 72 is a groove (that is, a long bottomed hole) extending in the X direction, and functions as a flow path through which the ink flows.
  • the circulation passage 72 in the first embodiment is formed at a position separated from the nozzle N (specifically, on the side of the circulating fluid chamber 65 as viewed from the nozzle N corresponding to the circulation passage 72).
  • the plurality of nozzles N (particularly, the second section n2) and the plurality of circulation paths 72 are collectively formed in a common step by semiconductor manufacturing technology (for example, processing technology such as dry etching or wet etching).
  • each circulation path 72 is formed in a straight line with a flow passage width Wa equivalent to the inner diameter d2 of the second section n2 of the nozzle N.
  • the flow passage width (dimension in the Y direction) Wa of the circulation passage 72 in the first embodiment is smaller than the flow passage width (dimension in the Y direction) Wb of the pressure chamber C. Therefore, as compared with a configuration in which the flow passage width Wa of the circulation passage 72 is larger than the flow passage width Wb of the pressure chamber C, it is possible to increase the flow passage resistance of the circulation passage 72.
  • the depth Da of the circulation path 72 with respect to the surface of the nozzle plate 52 is constant over the entire length.
  • each circulation path 72 is formed to the same depth as the second section n2 of the nozzle N. According to the above configuration, there is an advantage that it is easy to form the circulation passage 72 and the second section n2 as compared with the configuration in which the circulation path 72 and the second section n2 are formed in different depths.
  • the “depth” of the flow path means the depth of the flow path in the Z direction (for example, the height difference between the formation surface of the flow path and the bottom surface of the flow path).
  • One arbitrary circulation path 72 in the first portion P1 is located on the side of the circulating fluid chamber 65 as viewed from the nozzle N corresponding to the circulation path 72 in the first row L1. Further, any one circulation passage 72 in the second portion P2 is located on the side of the circulating fluid chamber 65 as viewed from the nozzle N corresponding to the circulation passage 72 in the second row L2.
  • the end of each circulation passage 72 on the opposite side (the communication passage 63 side) from the center plane O overlaps one communication passage 63 corresponding to the circulation passage 72 in a plan view. That is, the circulation passage 72 communicates with the communication passage 63.
  • an end of the circulation path 72 on the side of the center plane O overlaps the circulating fluid chamber 65 in plan view. That is, the circulation path 72 communicates with the circulating fluid chamber 65.
  • each of the plurality of communication paths 63 communicates with the circulating fluid chamber 65 via the circulation path 72. Therefore, the ink in each communication passage 63 is supplied to the circulating fluid chamber 65 through the circulation passage 72 as illustrated by a broken arrow in FIG. That is, in the first embodiment, the plurality of communication passages 63 corresponding to the first row L1 and the plurality of communication passages 63 corresponding to the second row L2 communicate with one circulating fluid chamber 65 in common.
  • the flow path length La of a portion overlapping the circulating fluid chamber 65 of any one circulation path 72 and the flow path length (dimension in the X direction) of a portion overlapping the communication path 63 of the circulation path 72 Lb and a flow path length (dimension in the X direction) Lc of a portion of the circulation path 72 overlapping the partition portion 69 of the flow path forming portion 30 are illustrated.
  • the flow path length Lc corresponds to the thickness of the partition 69.
  • the partition portion 69 functions as a throttling portion of the circulation passage 72. Therefore, the flow path resistance of the circulation path 72 increases as the flow path length Lc corresponding to the thickness of the partition portion 69 is longer.
  • the flow path length La is longer than the flow path length Lb (La> Lb), and the flow path length La is longer than the flow path length Lc (La> Lc). Furthermore, in the first embodiment, the relationship that the flow path length Lb is longer than the flow path length Lc (Lb> Lc) is established (La> Lb> Lc). According to the above configuration, the ink easily flows from the communication passage 63 into the circulating liquid chamber 65 through the circulation passage 72, as compared with the configuration in which the flow passage length La and the flow passage length Lb are shorter than the flow passage length Lc. It has the advantage of
  • the pressure chamber C indirectly communicates with the circulating fluid chamber 65 via the communication passage 63 and the circulation passage 72. That is, the pressure chamber C and the circulating fluid chamber 65 do not communicate directly.
  • the pressure in the pressure chamber C fluctuates due to the operation of the piezoelectric element 44, a part of the ink flowing in the communication passage 63 is ejected from the nozzle N to the outside, and the remaining part is the communication passage It flows into the circulating fluid chamber 65 from 63 via the circulation passage 72.
  • the amount of ink ejected through the nozzle N (hereinafter referred to as “ejection amount”) out of the ink flowing through the communication passage 63 by one drive of the piezoelectric element 44 corresponds to the communication passage 63.
  • Inertances of the communication passage 63, the nozzle, and the circulation passage 72 are selected so as to exceed the amount of ink flowing into the circulating liquid chamber 65 through the circulation passage 72 (hereinafter referred to as "circulation amount”) among the circulating ink. .
  • the total of the circulating amounts flowing into the circulating fluid chamber 65 from the plurality of communication passages 63 (for example, the circulating fluid chamber 65) than the total of the jetting amounts by the plurality of nozzles N It is also possible to say that the flow rate within the unit time is higher.
  • the ratio of the circulation amount is 70% or more (the injection amount ratio is 30% or less).
  • Each flow path resistance is determined. According to the above configuration, it is possible to effectively circulate the ink in the vicinity of the nozzle to the circulating liquid chamber 65 while securing the ejection amount of the ink.
  • the larger the flow path resistance of the circulation path 72 the smaller the circulation amount, while the injection amount increases, and the smaller the flow path resistance of the circulation path 72, the circulation amount increases, but the injection amount is smaller. There is a tendency to decrease.
  • the liquid ejecting apparatus 100 includes a circulation mechanism 75.
  • the circulation mechanism 75 is a mechanism for supplying (i.e., circulating) the ink in the circulation liquid chamber 65 to the liquid storage chamber R.
  • the circulation mechanism 75 according to the first embodiment includes, for example, a suction mechanism (for example, a pump) for sucking the ink from the circulation liquid chamber 65, a filter mechanism for collecting air bubbles and foreign substances mixed in the ink, and thickening of the ink by heating. And a heating mechanism (not shown).
  • the ink in which bubbles and foreign substances are removed by the circulation mechanism 75 and the viscosity is reduced is supplied from the circulation mechanism 75 to the liquid storage chamber R via the inlet port 482.
  • the liquid storage chamber R ⁇ supply passage 61 ⁇ pressure chamber C ⁇ communication passage 63 ⁇ circulation passage 72 ⁇ circulating liquid chamber 65 ⁇ circulation mechanism 75 ⁇ liquid storage chamber R
  • the ink circulates along the path.
  • the circulation mechanism 75 of the first embodiment sucks the ink from both sides of the circulation liquid chamber 65 in the Y direction.
  • a circulation port 65a located near the end on the positive side in the Y direction and a circulation port 65b located near the end on the negative side in the Y direction are formed.
  • the circulation mechanism 75 sucks the ink from both the circulation port 65 a and the circulation port 65 b.
  • the circulation passage 72 and the communication passage 63 overlap in plan view, and the communication passage 63 and the pressure chamber C overlap in plan view. Therefore, the circulation passage 72 and the pressure chamber C overlap each other in plan view.
  • the circulating fluid chamber 65 and the pressure chamber C do not overlap each other in plan view.
  • the piezoelectric element 44 is formed along the X direction over the entire pressure chamber C, the circulation path 72 and the piezoelectric element 44 overlap each other in plan view, while the circulating liquid chamber 65 and the piezoelectric element 44 They do not overlap each other in plan view.
  • the pressure chamber C or the piezoelectric element 44 overlaps the circulation passage 72 in plan view, but does not overlap the circulating fluid chamber 65 in plan view. Therefore, as compared with a configuration in which the pressure chamber C or the piezoelectric element 44 does not overlap the circulation path 72 in plan view, for example, the liquid jet head 26 can be easily miniaturized.
  • the circulation passage 72 for connecting the communication passage 63 and the circulation liquid chamber 65 is formed in the nozzle plate 52. Therefore, it is possible to efficiently circulate the ink in the vicinity of the nozzle N to the circulating liquid chamber 65 as compared with the configuration of Patent Document 1 in which the circulation communication passage is formed in the communication plate. Further, in the first embodiment, the communication passage 63 corresponding to the first row L1 and the communication passage 63 corresponding to the second row L2 are in common communication with the circulating fluid chamber 65 between them.
  • Second Embodiment A second embodiment of the present invention will be described.
  • symbol used by description of 1st Embodiment is diverted and detailed description of each is abbreviate
  • FIG. 7 is a partial exploded perspective view of the liquid jet head 26 in the second embodiment, and corresponds to FIG. 3 referred to in the first embodiment.
  • FIG. 8 is an enlarged plan view and a sectional view of a portion in the vicinity of the circulating fluid chamber 65 in the liquid jet head 26, and corresponds to FIG. 6 referred to in the first embodiment.
  • the circulation passage 72 and the nozzle N are continuous with each other. That is, one circulation path 72 of the first portion P1 is continued to one nozzle N of the first row L1, and one circulation path 72 of the second portion P2 is one nozzle N of the second row L2.
  • the second section n2 of each nozzle N is continuous with the circulation path 72. That is, the circulation path 72 and the second section n2 are formed to have the same depth, and the inner circumferential surface of the circulation path 72 and the inner circumferential surface of the second section n2 are continuous with each other.
  • the nozzle N (first section n1) may be formed at the bottom of one circulation path 72 extending in the X direction. Specifically, a first section n1 of the nozzle N is formed in the vicinity of the end of the bottom surface of the circulation path 72 opposite to the central plane O.
  • the other configuration is the same as that of the first embodiment.
  • the flow path length La of a portion overlapping the circulating fluid chamber 65 in the circulation path 72 is the flow path length Lc of a portion overlapping the partition portion 69 of the flow path forming portion 30 in the circulation path 72. Longer than (La> Lc).
  • the same effect as that of the first embodiment is realized.
  • the second section n2 of each nozzle N and the circulation path 72 are continuous with each other. Therefore, as compared with the configuration of the first embodiment in which the circulation path 72 and the nozzle N are separated from each other, the effect that ink in the vicinity of the nozzle N can be efficiently circulated in the circulating liquid chamber 65 is outstanding. It is remarkable.
  • FIG. 9 is an enlarged plan view and a sectional view of a portion in the vicinity of the circulating liquid chamber 65 in the liquid jet head 26 in the third embodiment.
  • the surface Fb of the first flow path substrate 32 in the third embodiment includes the circulating fluid chamber 65 (example of the first circulating fluid chamber) similar to that of the first embodiment described above,
  • a circulating fluid chamber 67 (exemplary second circulating fluid chamber) corresponding to each of the first portion P1 and the second portion P2 is formed.
  • the circulating fluid chamber 67 is an elongated bottomed hole (groove) formed on the opposite side of the communicating passage 63 and the nozzle N to the circulating fluid chamber 65 and extending in the Y direction.
  • the openings of the circulating fluid chamber 65 and the circulating fluid chamber 67 are closed by the nozzle plate 52 joined to the surface Fb of the first flow path substrate 32.
  • the height of the circulating fluid chamber 65 and the height of the circulating fluid chamber 67 are equal.
  • the circulation path 72 of the third embodiment is a groove extending in the X direction so as to extend between the circulating fluid chamber 65 and the circulating fluid chamber 67 in each of the first portion P1 and the second portion P2. Specifically, the end of the circulation path 72 on the side of the center plane O (on the side of the circulation fluid chamber 65) overlaps the circulation fluid chamber 65 in plan view, and the side opposite to the center plane O of the circulation pathway 72 (circulation fluid The end of the chamber 67 side overlaps the circulating fluid chamber 67 in plan view. Further, the circulation passage 72 overlaps the communication passage 63 in plan view. That is, each communication passage 63 communicates with both the circulating fluid chamber 65 and the circulating fluid chamber 67 via the circulation passage 72.
  • a nozzle N (first section n1) is formed at the bottom of the circulation passage 72. Specifically, a first section n1 of the nozzle N is formed on the bottom surface of a portion of the circulation path 72 overlapping the communication path 63 in a plan view. As in the second embodiment, it is also possible to express that the circulation path 72 and the nozzle N (second section n2) are continuous with each other in the third embodiment. As understood from the above description, in the first and second embodiments, the communication passage 63 and the nozzle N are located at the end of the circulation passage 72, whereas in the third embodiment, the communication passage 63 and the nozzle N extend in the X direction. The communication passage 63 and the nozzle N are located in the middle of the circulation passage 72.
  • the third embodiment when the pressure in the pressure chamber C fluctuates, part of the ink flowing in the communication passage 63 is ejected from the nozzle N to the outside, and the remaining part is discharged.
  • the fluid is supplied from the communication passage 63 to both the circulating fluid chamber 65 and the circulating fluid chamber 67 via the circulation passage 72.
  • the ink in the circulating fluid chamber 67 is sucked by the circulating mechanism 75 together with the ink in the circulating fluid chamber 65, and bubbles and foreign substances are removed by the circulating mechanism 75 and thickening is reduced before being supplied to the liquid storage chamber R. Ru.
  • FIG. 9 illustrates the configuration in which the circulation passage 72 and the nozzle N are continuous as in the second embodiment, the circulation passage 72 and the nozzle N are similar to the first embodiment in the third embodiment. Can also be spaced apart from one another.
  • FIG. 10 is an enlarged cross-sectional view of a portion near the circulating fluid chamber 65 in the liquid jet head 26 in the fourth embodiment.
  • the configuration in which the upper surface (the ceiling surface) of the circulating fluid chamber 65 is parallel to the XY plane that is, the configuration in which the height of the circulating fluid chamber 65 is constant
  • the height H (H1, H2, Hmax) of the circulating fluid chamber 65 differs depending on the position in the X direction.
  • the height H of the circulating fluid chamber 65 is a distance from the surface Fb of the first flow path substrate 32 (or the surface of the nozzle plate 52) to the upper surface of the circulating fluid chamber 65.
  • the circulating fluid chamber 65 is considered to be a depression formed on the surface Fb of the first flow path substrate 32, it is also possible to consider the depth of the circulating fluid chamber 65 as viewed from the surface Fb to be the height H.
  • a point x1 (example of a first point) and a point x2 (example of a second point) are different in position in the X direction.
  • the point x2 is located on the communication passage 63 side (that is, the side opposite to the center plane O) when viewed from the point x1.
  • the height H1 at the point x1 in the circulating fluid chamber 65 is larger than the height H2 at the point x2 (H1> H2).
  • the height H of the circulating fluid chamber 65 has a maximum value Hmax at the central portion (on the center plane O) in the X direction, and monotonously decreases from the central portion to the end in the width direction (X direction). That is, the upper surface of the circulating fluid chamber 65 is plane symmetric with respect to the center plane O, and has a curved surface convex toward the negative side in the Z direction. It is also possible to say that the thickness of the partition portion 69 is larger on the negative side in the Z direction.
  • the maximum value Hmax of the height H of the circulating fluid chamber 65 is smaller than the flow passage length of the communication passage 63 (that is, the thickness of the first flow passage substrate 32). Specifically, the maximum value Hmax of the height H of the circulating fluid chamber 65 is equal to or less than half the thickness of the first flow path substrate 32. Further, the maximum value Hmax of the height H of the circulating fluid chamber 65 is smaller than the width (maximum width) ⁇ of the circulating fluid chamber 65 (Hmax ⁇ ). As described above, according to the configuration in which the height H of the circulating fluid chamber 65 is limited, it is possible to suppress the decrease in the mechanical strength of the flow path forming portion 30 (specifically, the first flow path substrate 32). It is.
  • the maximum value Hmax of the height H of the circulating fluid chamber 65 is equal to the height of the supply fluid chamber 60.
  • the circulating fluid chamber 65 and the supply fluid chamber 60 are formed by processing a silicon (Si) single crystal substrate by a semiconductor manufacturing technique (for example, wet etching).
  • the circulating fluid chamber 65 and the circulating fluid chamber 65 are compared with the configuration in which the heights of the two are different. There is an advantage that the process of forming the supply liquid chamber 60 is simplified.
  • FIG. 11 is an enlarged cross-sectional view of a portion near the circulating fluid chamber 65 in the liquid jet head 26 according to the fifth embodiment.
  • a cross section parallel to the XZ plane is illustrated.
  • the cross section at the central plane O is the negative side in the X direction. The configuration from the perspective is illustrated.
  • the circulating fluid chamber 65 of the fifth embodiment is configured of a first space 651 and a plurality of second spaces 652.
  • the first space 651 is formed in the same shape as the circulating fluid chamber 65 in the first to third embodiments.
  • the upper surface of the first space 651 in the fifth embodiment is parallel to the XY plane, similarly to the circulating fluid chamber 65 in the first to third embodiments.
  • the height H1 of the first space 651 is, for example, half or less of the thickness of the first flow path substrate 32, and smaller than the width (maximum width) of the first space 651.
  • the plurality of second spaces 652 are formed in one-to-one correspondence with the plurality of communication paths 63 and communicate with the first space 651.
  • the second space 652 corresponding to one arbitrary communication passage 63 overlaps the circulation passage 72 corresponding to the communication passage 63 in a plan view. Therefore, the ink in the communication passage 63 is supplied to the first space 651 through the circulation passage 72 and the second space 652, and is circulated to the liquid storage chamber R by the circulation mechanism 75.
  • the positive side in the X direction with respect to the central plane O is illustrated for convenience in FIG. 11, the negative side in the X direction with respect to the central plane O is also plane symmetric with respect to the central plane O in the same manner. Is formed.
  • the upper surface of the second space 652 is an inclined surface whose height H decreases from the negative side (the first space 651 side) in the X direction to the positive side (the communication path 63 side).
  • a flow passage wall 692 is formed between two second spaces 652 adjacent to each other in the Y direction.
  • the flow path wall 692 is a wall-like portion that divides each second space 652. Between each second space 652 and the communication passage 63, a wall portion (a part of the partition portion 69) of a certain thickness is formed.
  • the height of the first space 651 is larger than the height of the second space 652.
  • the height at the point x1 in the circulating fluid chamber 65 H1 is larger than the height H2 at the point x2 (H1> H2).
  • the point x2 is a point located on the communication passage 63 side as viewed from the point x1.
  • the flow path is compared with the configuration in which the entire circulating fluid chamber 65 (both the first space 651 and the second space 652) has the height H1. It is possible to suppress a decrease in mechanical strength of the forming unit 30 (specifically, the first flow path substrate 32).
  • FIG. 11 illustrates the configuration in which the upper surface of the first space 651 in the circulating fluid chamber 65 is parallel to the XY plane, but the first space 651 in the fifth embodiment corresponds to the fourth embodiment (FIG. 10). It is also possible to make the same shape as the circulating fluid chamber 65.
  • the circulating fluid chamber 65 illustrated in FIG. 12 is configured of a first space 651 and a plurality of second spaces 652, and the first space 651 has a shape in which the height H differs according to the position in the X direction. Is formed.
  • the height H of the first space 651 monotonously decreases from the center to the end in the width direction (X direction).
  • FIG. 13 is a plan view focusing on the vicinity of the circulating liquid chamber 65 in the liquid jet head 26 in the sixth embodiment.
  • the configuration of the circulating fluid chamber 65 as viewed from the positive side in the Z direction (that is, the upper surface of the circulating fluid chamber 65) is illustrated in FIG.
  • the circulating fluid chamber 65 of the sixth embodiment is formed in a shape in which the height H of the circulating fluid chamber 65 differs depending on the position in the X direction. That is, the height H of the circulating fluid chamber 65 monotonously decreases from the center to the end in the width direction (X direction).
  • a plurality of grooves 665 are formed in parallel on the upper surface of the circulating fluid chamber 65.
  • Each of the plurality of groove portions 665 is a recess extending in a curved shape in plan view. Since the ridges are formed between the groove portions 665 adjacent to each other, the configuration may also be said as a configuration in which a plurality of curved ridges are formed on the upper surface of the circulating fluid chamber 65 in plan view.
  • a curve representing the bottom of the groove 665 formed on the upper surface of the circulating fluid chamber 65 is illustrated by a solid line
  • a curve representing the top of the peak i.e., a ridge line
  • the plurality of groove portions 665 are formed in the same process as the circulating liquid chamber 65, for example, by processing technology such as wet etching.
  • the plurality of grooves 665 may be formed in any of the circulating fluid chambers 65 exemplified in the first to fifth embodiments.
  • a plurality of groove portions 665 are formed on the upper surface of the first space 651 of the circulating fluid chamber 65.
  • a plurality of grooves 665 arranged in the direction are formed.
  • the area G1 is an area on the side of the nozzles N (example of the first nozzle) of the first row L1
  • the area G2 is an area on the side of the nozzles N (example of the second nozzle) of the second row L2.
  • Each of the plurality of groove portions 665 in the region G1 is formed in a curved shape convex on the positive side in the Y direction (illustrated on the first side in the first direction) in plan view.
  • a plurality of arc-shaped groove portions 665 which are convex on the positive side in the Y direction are formed.
  • each of the plurality of groove portions 665 in the region G2 is formed in a curved shape convex on the negative side in the Y direction (exemplified on the second side in the first direction) in plan view.
  • a plurality of arc-shaped groove portions 665 which are convex on the negative side in the Y direction are formed.
  • the ink that has flowed into the circulating fluid chamber 65 and reached the vicinity of the upper surface of the circulating fluid chamber 65 is likely to move along the grooves 665. That is, according to the sixth embodiment, it is possible to adjust the range in which the ink flows in the circulating liquid chamber 65.
  • each groove 665 in the region G1 is convex on the positive side in the Y direction. Therefore, the ink that has flowed into the circulating fluid chamber 65 from the communication passage 63 (that is, the positive side in the X direction) in the first portion P1 is along the groove portions 665 in the region G1 as illustrated by the arrow a1 in FIG. It is easy to move to the negative side in the Y direction (the circulation port 65b side).
  • each groove 665 in the region G2 is convex on the negative side in the Y direction.
  • the ink that has flowed into the circulating fluid chamber 65 from the communication passage 63 (that is, the negative side in the X direction) in the second portion P2 is along the groove portions 665 in the region G2 as illustrated by the arrow a2 in FIG. It is easy to move to the positive side in the Y direction (the circulation port 65a side).
  • the ink can be easily flowed to both ends of the circulating liquid chamber 65.
  • both the groove 665 in the region G1 and the groove 665 in the region G2 are formed in a convex curve on the positive side in the Y direction (exemplified on the first side in the first direction). It is also possible.
  • the circulation port 65a of the circulation fluid chamber 65 can be omitted.
  • each groove 665 positioned on the positive side in the Y direction and the groove 665 positioned on the negative side may be convex in the opposite direction.
  • each groove 665 in a region on the positive side in the Y direction (for example, a half region located on the positive side in the Y direction) of the circulating fluid chamber 65 is convex on the negative side in the Y direction in plan view. is there.
  • each groove 665 in a region on the negative side in the Y direction (for example, a half region located on the negative side in the Y direction) of the circulating fluid chamber 65 is convex on the positive side in the Y direction in plan view.
  • the ink that has flowed into the portion on the positive side in the Y direction of the circulating liquid chamber 65 can easily flow to the positive side in the Y direction (as a result, to the circulation port 65a).
  • the ink having flowed into the negative side portion can be easily flowed to the negative side in the Y direction (as a result, to the circulation port 65b).
  • FIG. 16 is a cross-sectional view of the liquid jet head 26 in the seventh embodiment.
  • the first flow path substrate 32 in the liquid jet head 26 according to the seventh embodiment includes the circulating fluid chamber 65 (the first circulating fluid chamber), as in the third embodiment (FIG. 9).
  • a circulating fluid chamber 67 (exemplary second circulating fluid chamber) corresponding to each of the first portion P1 and the second portion P2 is formed.
  • the circulating fluid chamber 67 is an elongated space formed on the opposite side to the circulating fluid chamber 65 across the communication passage 63 and the nozzle N and extending in the Y direction.
  • the circulating fluid chamber 65 does not overlap with the pressure chamber C in plan view, and each circulating fluid chamber 67 overlaps with the pressure chamber C in plan view.
  • the width (dimension in the X direction) ⁇ a of the circulating fluid chamber 65 is larger than the width ⁇ b of each circulating fluid chamber 67 ( ⁇ a> ⁇ b).
  • the heights of both the circulating fluid chamber 65 and the circulating fluid chamber 67 differ according to the position in the X direction. Do. For example, the heights of the circulating fluid chamber 65 and the circulating fluid chamber 67 monotonously decrease from the center to the end in the width direction. Further, as illustrated in FIG. 16, the maximum value Ha of the height of the circulating fluid chamber 65 and the maximum value Hb of the height of the circulating fluid chamber 67 are equal. Therefore, as compared with the configuration in which the circulating fluid chamber 65 and the circulating fluid chamber 67 have different heights, there is an advantage that the process of forming the circulating fluid chamber 65 and the circulating fluid chamber 67 is simplified. In addition, it is also possible to apply the shape of the circulating fluid chamber 65 of the fifth embodiment configured of the first space 651 and the second space 652 to the circulating fluid chambers 67 of the seventh embodiment.
  • the maximum value Ha of the height of the circulating fluid chamber 65 smaller than the maximum value Hb of the height of each circulating fluid chamber 67 (Ha ⁇ Hb).
  • Ha ⁇ Hb the maximum value of the height of each circulating fluid chamber 67
  • an external force that presses the first flow path substrate 32 in the Z direction when the wiring substrate 28 is mounted as compared with the configuration in which the maximum value Ha and the maximum value Hb are equal (FIG. 16).
  • the mechanical strength of the flow path forming portion 30 can be easily maintained.
  • the width (dimension in the X direction) ⁇ a of the circulating fluid chamber 65 smaller than the width ⁇ b of each circulating fluid chamber 67 ( ⁇ a ⁇ b).
  • the configuration in which the width ⁇ a of the circulating fluid chamber 65 is larger than the width ⁇ b of the circulating fluid chamber 67 (FIG. 16) and the configuration in which the width ⁇ a of the circulating fluid chamber 65 is smaller than the width ⁇ b of the circulating fluid chamber 67 (FIG. 16) 19) can be adopted regardless of the shapes of the circulating fluid chamber 65 and the circulating fluid chamber 67.
  • the configurations not particularly mentioned in the above description of the fourth to seventh embodiments may be arbitrarily adopted any of the configurations of the first to third embodiments.
  • the configurations of the first to third embodiments regarding the circulation path 72 or the nozzle N may be applied to any form selected from the fourth to seventh embodiments.
  • the circulation passage 72 is formed in the nozzle plate 52.
  • the communication passage 63 and the circulating fluid chamber 65 are mutually communicated. It is also possible to form a circulation path for the first flow path substrate 32 (for example, the surface Fb).
  • the height of the circulating fluid chamber 65 is made different according to the position in the X direction. According to the above configuration, the mechanical strength of the flow path forming portion 30 is reduced compared to the configurations of the first to third embodiments in which the upper surface of the circulating fluid chamber 65 is parallel to the XY plane. It is possible to suppress In the fourth to seventh embodiments, the circulating fluid chamber 65 overlaps the end of the wiring board 28 in plan view. In the above configuration, the first flow path substrate 32 is pressed in the Z direction when the wiring substrate 28 is mounted.
  • the configurations of the fourth to seventh embodiments capable of securing the mechanical strength of the flow path forming unit 30 prevent the damage and the like of the first flow path substrate 32 caused by the pressure when the wiring board 28 is mounted.
  • the configuration in which the depths of the circulation passage 72 and the second section n2 of the nozzle N are equal is exemplified, but the relationship between the depth of the circulation path 72 and the depth of the second section n2 is It is not limited to the above examples.
  • the configuration of FIG. 20 since the flow path resistance of the circulation passage 72 is smaller than that of the configuration of FIG. 21, it is possible to increase the amount of circulation compared to the configuration of FIG.
  • the configuration of FIG. 21 since the flow path resistance of the circulation path 72 is large as compared with the configuration of FIG. 20, it is possible to increase the injection amount as compared with the configuration of FIG.
  • the configuration in which the depth Da of the circulation passage 72 is constant is illustrated, but it is also possible to change the depth of the circulation passage 72 according to the position in the X direction.
  • the middle part of the circulation path 72 (for example, the part overlapping the partition 69 in plan view) is the part on the circulating fluid chamber 65 side and the part on the nozzle N side A deeper configuration is assumed.
  • the flow path resistance of the circulation path 72 is smaller as compared with the configuration in which the depth Da of the circulation path 72 is constant over the entire length. Therefore, there is an advantage that securing of circulation amount is easy.
  • the flow path width Wa of the circulation path 72 is exemplified to be equal to the maximum diameter of the nozzle N (inner diameter d2 of the second section n2). It is not limited to.
  • a configuration in which the flow passage width Wa of the circulation passage 72 is smaller than the maximum diameter of the nozzle N (for example, the inner diameter d2 of the second section n2) may be employed.
  • the flow path resistance of the circulation path 72 is large as compared with the structure in which the circulation path 72 is larger than the maximum diameter of the nozzle N. Therefore, it is possible to increase the injection amount.
  • a configuration in which the flow passage width Wa of the circulation passage 72 is larger than the inner diameter d1 of the first section n1 may be employed. According to the above configuration, it is possible to achieve both the securing of the circulation amount and the securing of the injection amount.
  • the flow passage width Wa of the circulation passage 72 is constant, but it is also possible to change the flow passage width of the circulation passage 72 according to the position in the X direction.
  • a configuration may be employed in which the flow passage width of the circulation liquid chamber 65 side of the circulation passage 72 is wider than the flow passage width on the nozzle N side.
  • the circulation passage 72 is formed so that the flow passage width of the circulation passage 72 has a planar shape that monotonously increases from the end on the nozzle side to the end on the circulating fluid chamber 65 side.
  • the ink easily flows in the circulation passage 72 from the communication passage 63 toward the circulating liquid chamber 65. Therefore, there is an advantage that securing of circulation amount is easy.
  • the flow passage width of the middle portion (for example, the portion overlapping the partition portion 69 in plan view) of the circulation passage 72 is the flow passage width of the portion on the circulating liquid chamber 65 side as viewed from the middle portion.
  • a configuration narrower than the channel width of the portion on the side of the nozzle N and the nozzle N may also be employed. That is, the flow passage width monotonously decreases from both ends of the circulation passage 72 to the middle portion so that the flow passage width becomes minimum at a part in the middle of the circulation passage 72 (for example, a part overlapping the partition 69 in plan view).
  • the flow path resistance of the circulation path 72 is large as compared with the configuration in which the flow path width of the circulation path 72 is constant. Therefore, it is possible to increase the injection amount.
  • the flow passage width of the middle portion (for example, the portion overlapping the partition portion 69 in plan view) of the circulation passage 72 is the flow passage width of the portion on the circulation liquid chamber 65 side and the nozzle A configuration wider than the channel width of the N-side portion may also be employed. That is, the flow passage width monotonously increases from both ends of the circulation passage 72 to the middle portion so that the flow passage width becomes maximum at a middle portion of the circulation passage 72 (for example, a portion overlapping the partition 69 in plan view). .
  • the flow path resistance of the circulation path 72 is smaller as compared with the configuration in which the flow path width of the circulation path 72 is constant. Therefore, it is possible to increase the amount of circulation.
  • the partition portion 69 In order to secure mechanical strength of the partition portion 69 of the first flow path substrate 32, the partition portion 69 needs to be formed thick. However, the flow path resistance of the circulation path 72 increases as the partition portion 69 is thicker (the flow path length Lc is larger). According to the configuration of FIG. 25, even when the thickness of the partition portion 69 is secured to an extent that a sufficient strength is realized, the flow path resistance of the circulation path 72 can be reduced by widening the middle portion of the circulation path 72. It has the advantage of That is, it is possible to achieve both the securing of the strength of the partition portion 69 and the reduction of the flow path resistance of the circulation path 72.
  • the central axis Qa of the nozzle N is located on the opposite side of the circulating fluid chamber 65 when viewed from the central axis Qb of the communication passage 63.
  • the relationship between the passage 63 and the central axis Qb is not limited to the above example.
  • the central axis Qa of the nozzle N and the central axis Qb of the communication passage 63 may be at the same position. According to the configuration of FIG. 26, there is an advantage that securing of the injection amount and securing of the circulating amount can be easily achieved, as compared with the configuration in which the central axis Qa and the central axis Qb are at different positions.
  • FIG. 27 a configuration in which the central axis Qa of the nozzle N is located on the circulating fluid chamber 65 side (central plane O side) with respect to the central axis Qb of the communication passage 63 may be employed. According to the configuration of FIG. 27, a configuration in which the central axis Qa of the nozzle N is located on the circulating fluid chamber 65 side (central plane O side) with respect to the central axis Qb of the communication passage 63 may be employed. According to the configuration of FIG.
  • the upper surface of the circulating fluid chamber 65 or the circulating fluid chamber 67 is a curved surface, but the height of the circulating fluid chamber 65 or the circulating fluid chamber 67 is a position
  • the shape for making it different accordingly is not limited to the above examples.
  • the upper surface of the circulating fluid chamber 65 is formed into a combination of a surface parallel to the XY plane and a surface having a shape inclined with respect to the XY plane. Is also possible.
  • the inclined surface constituting the upper surface of the circulating fluid chamber 65 has an XY plane such that the channel width (dimension in the X direction) of the circulating fluid chamber 65 increases as the position on the positive side in the Z direction Tilt against
  • the same shape may be adopted for the circulating fluid chamber 67 as well.
  • the end face of the pressure chamber C on the communication passage 63 side (central plane O side) is inclined with respect to the upper surface of the pressure chamber C (lower surface of the vibrating portion 42).
  • the configuration is also suitable.
  • the area (area not covered by the inclined surface 342) 344 of the vibrating portion 42 exposed from the second flow path substrate 34 does not overlap with the circulation path 72 in a plan view.
  • a region 344 in FIG. 29 constitutes the upper surface (ceiling surface) of the pressure chamber C.
  • the elements related to the first row L1 and the elements related to the second row L2 are arranged symmetrically with respect to the center plane O. Is not required.
  • a configuration in which elements corresponding to only the first row L1 are arranged in the same manner as in the above-described embodiments may be employed.
  • the circulation path 72 is formed in the nozzle plate 52 is illustrated in the above-described embodiments, the flow path forming portion 30 (for example, the first flow path substrate) It is also possible to form on the 32 surfaces Fb).
  • the element (pressure generating unit) for applying pressure to the inside of the pressure chamber C is not limited to the piezoelectric element 44 exemplified in the above-described embodiments.
  • a heating element that generates air bubbles inside the pressure chamber C by heating to change the pressure is a portion where the heat generating element generates heat by the supply of the drive signal (specifically, a region where air bubbles are generated in the pressure chamber C).
  • the pressure generating portion is comprehensively expressed as an element which causes the liquid in the pressure chamber C to be jetted from the nozzle N (typically, an element which applies a pressure to the inside of the pressure chamber C).
  • the operation method (piezoelectric method / thermal method) and the specific configuration are irrelevant.
  • the serial type liquid ejecting apparatus 100 for reciprocating the transport body 242 having the liquid ejecting head 26 mounted is exemplified, but a line type liquid in which a plurality of nozzles N are distributed over the entire width of the medium 12 It is possible to apply the present invention to an injector.
  • the liquid ejecting apparatus 100 exemplified in each of the above-described embodiments may be employed not only for equipment dedicated to printing but also for various equipment such as a facsimile machine and a copying machine.
  • the application of the liquid ejecting apparatus of the present invention is not limited to printing.
  • a liquid ejecting apparatus that ejects a color material solution is used as a manufacturing apparatus that forms a color filter of a liquid crystal display device.
  • a liquid ejecting apparatus that ejects a solution of a conductive material is used as a manufacturing apparatus that forms wiring and electrodes of a wiring board.
  • Wiring board , 30 flow passage forming portion, 32: first flow passage substrate, 34: second flow passage substrate, 42: vibration portion, 44: piezoelectric element, 46: protection member, 48: housing portion, 482: introduction port, 52: nozzle plate, 54: vibration absorber, 61: supply passage, 63: communication passage, 65: circulating fluid chamber, 65a, 65b: circulation port, 651: first space, 652: second space, 665: groove portion, 67 ... circulating fluid chamber, 69 ... partition wall, 692 ... flow passage wall, n 1 ... first section, n 2 ... second section, 72 ... circulation path, 75 ... circulation mechanism.

Landscapes

  • Ink Jet (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

Dans cette tête d'éjection de liquide, la réduction de la résistance mécanique, due à l'approvisionnement d'une chambre de liquide servant à faire circuler un liquide, est supprimée. La tête d'éjection de liquide comprend : une partie de formation de trajet d'écoulement comprenant une plaque à buse dotée d'une buse, une chambre de pression à laquelle est fourni un liquide, un trajet de liaison qui relie la buse et la chambre de pression l'une à l'autre, et une chambre de liquide de circulation qui est reliée au trajet de liaison ; et une partie de production de pression qui provoque un changement de pression dans la chambre de pression, la hauteur d'un premier point, dans la chambre de liquide de circulation, étant supérieure à la hauteur d'un second point qui est plus proche du trajet de liaison que le premier point.
PCT/JP2017/043977 2016-12-22 2017-12-07 Tête d'éjection de liquide et dispositif d'éjection de liquide WO2018116846A1 (fr)

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US16/473,203 US10870274B2 (en) 2016-12-22 2017-12-07 Liquid ejecting head and liquid ejecting apparatus
CN201780078088.0A CN110087887B (zh) 2016-12-22 2017-12-07 液体喷射头以及液体喷射装置

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JP2016-249118 2016-12-22
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JP2017026372A JP6950194B2 (ja) 2016-12-22 2017-02-15 液体噴射ヘッドおよび液体噴射装置

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EP3587118A1 (fr) * 2018-06-29 2020-01-01 Seiko Epson Corporation Tête d'éjection de liquide et appareil d'éjection de liquide
CN110654116A (zh) * 2018-06-29 2020-01-07 精工爱普生株式会社 液体喷出头、液体喷出装置以及液体喷出头的制造方法
CN112895711A (zh) * 2019-12-03 2021-06-04 精工爱普生株式会社 液体喷射头以及液体喷射系统

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EP3587118A1 (fr) * 2018-06-29 2020-01-01 Seiko Epson Corporation Tête d'éjection de liquide et appareil d'éjection de liquide
CN110654118A (zh) * 2018-06-29 2020-01-07 精工爱普生株式会社 液体喷出头及液体喷出装置
CN110654117A (zh) * 2018-06-29 2020-01-07 精工爱普生株式会社 液体喷射头和液体喷射装置
CN110654116A (zh) * 2018-06-29 2020-01-07 精工爱普生株式会社 液体喷出头、液体喷出装置以及液体喷出头的制造方法
JP2020001315A (ja) * 2018-06-29 2020-01-09 セイコーエプソン株式会社 液体噴射ヘッドと液体噴射装置
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CN110654118B (zh) * 2018-06-29 2021-04-13 精工爱普生株式会社 液体喷出头及液体喷出装置
CN110654117B (zh) * 2018-06-29 2021-07-09 精工爱普生株式会社 液体喷射头和液体喷射装置
JP7163636B2 (ja) 2018-06-29 2022-11-01 セイコーエプソン株式会社 液体噴射ヘッドと液体噴射装置
CN112895711A (zh) * 2019-12-03 2021-06-04 精工爱普生株式会社 液体喷射头以及液体喷射系统
CN112895711B (zh) * 2019-12-03 2023-07-04 精工爱普生株式会社 液体喷射头以及液体喷射系统

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