WO2018197007A1

WO2018197007A1 - Apparatus for use in the manufacture of a solar cell, system for deposition of a material on a substrate used in the manufacture of a solar cell, and method for processing of a deposition material used in the manufacture of a solar cell

Info

Publication number: WO2018197007A1
Application number: PCT/EP2017/060238
Authority: WO
Inventors: Andrea Baccini; Davide Colla; Marco Galiazzo; Luigi De Santi
Original assignee: Applied Materials Italia S.R.L.
Priority date: 2017-04-28
Filing date: 2017-04-28
Publication date: 2018-11-01

Abstract

An apparatus (100) for use in the manufacture of a solar cell is provided. The apparatus (100) includes a first actuator (110), wherein a first material processing device (112) is connectable to the first actuator (110), and a second actuator (120). A second material processing device (122) is connectable to the second actuator (120). The second actuator (120) is connected to the first actuator (110). The first actuator (110) is configured to move the second actuator (120).

Description

APPARATUS FOR USE IN THE MANUFACTURE OF A SOLAR CELL, SYSTEM

FOR DEPOSITION OF A MATERIAL ON A SUBSTRATE USED IN THE MANUFACTURE OF A SOLAR CELL, AND METHOD FOR PROCESSING OF A DEPOSITION MATERIAL USED IN THE MANUFACTURE OF A SOLAR CELL

FIELD [0001] Embodiments of the present disclosure relate to an apparatus for use in the manufacture of a solar cell, a system for deposition of a material on a substrate used in the manufacture of a solar cell, and a method for processing of a deposition material used in the manufacture of a solar cell. Embodiments of the present disclosure particularly relate to an apparatus, system and method for the screen printing of a material on a substrate.

BACKGROUND

[0002] Solar cells are photovoltaic devices that convert sunlight directly into electrical power. Within this field, producing solar cells on a crystalline silicon base by means of deposition techniques, particularly printing techniques, which achieve a structure of selective emitters on the front surface of the solar cells, is known. A processing cycle can include at least one printing operation during which material is deposited on the substrate using a printing device and an optional further material processing operation. The productivity and/or throughput of the apparatus can be limited by the cycle time of the processing cycle. [0003] In view of the above, new apparatuses for use in the manufacture of a solar cell, systems for deposition of a material on a substrate used in the manufacture of a solar cell, and methods for the processing of a deposition material used in the manufacture of a solar cell, that overcome at least some of the problems in the art, are beneficial. The present disclosure particularly aims to provide an apparatus, system and method that can reduce the cycle time of a processing cycle to increase at least one of a productivity and throughput. SUMMARY

[0004] In light of the above, an apparatus for use in the manufacture of a solar cell, a system for deposition of a material on a substrate used in the manufacture of a solar cell, and a method for processing of a deposition material used in the manufacture of a solar cell are provided. Further aspects, benefits, and features of the present disclosure are apparent from the claims, the description, and the accompanying drawings.

[0005] According to an aspect of the present disclosure, an apparatus for use in the manufacture of a solar cell is provided. The apparatus includes a first actuator, wherein a first material processing device is connectable to the first actuator, and a second actuator, wherein a second material processing device is connectable to the second actuator, wherein the second actuator is connected to the first actuator, and wherein the first actuator is configured to move the second actuator.

[0006] According to a further aspect of the present disclosure, a system for deposition of a material on a substrate used in the manufacture of a solar cell is provided. The system includes a process head moveable at least in a first process direction along a substrate support. The process head includes the apparatus for use in the manufacture of a solar cell according to the present disclosure, the first material processing device and the second material processing device. [0007] According to another aspect of the present disclosure, a method for processing of a deposition material used in the manufacture of a solar cell is provided. The method includes operating a first actuator to move a first material processing device and a second actuator connected to the first actuator, wherein a second material processing device connected to the second actuator is moved together with the second actuator when the first actuator moves the second actuator, and performing material processing using at least one of the first material processing device and the second material processing device.

[0008] Embodiments are also directed at apparatuses for carrying out the disclosed method and include apparatus parts for performing each described method aspect. These method aspects may be performed by way of hardware components, a computer programmed by appropriate software, by any combination of the two or in any other manner. Furthermore, embodiments according to the disclosure are also directed at methods for operating the described apparatus. The methods for operating the described apparatus include method aspects for carrying out every function of the apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

[0009] So that the manner in which the above recited features of the present disclosure can be understood in detail, a more particular description of the disclosure, briefly summarized above, may be had by reference to embodiments. The accompanying drawings relate to embodiments of the disclosure and are described in the following:

FIGs. 1 A and B show schematic views of an apparatus for use in the manufacture of a solar cell according to embodiments described herein;

FIG. 2A shows a schematic view of an apparatus for use in the manufacture of a solar cell according to further embodiments described herein;

FIG. 2B shows a schematic view of an apparatus for use in the manufacture of a solar cell according to further embodiments described herein;

FIG. 3 shows a schematic view of an apparatus for use in the manufacture of a solar cell according to yet further embodiments described herein;

FIG. 4 shows a schematic view of a system for the screen printing of a material on a substrate used in the manufacture of a solar cell according to embodiments described herein;

FIGs. 5A and B show schematic views of a system having a process head according to embodiments described herein; FIG. 6 shows a flow chart of a method for the processing of a deposition material used in the manufacture of a solar cell according to embodiments described herein;

FIGs. 7, 8A and B show schematic views of a working scheme of the apparatus for use in the manufacture of a solar cell according to embodiments described herein; and

FIGs. 9, lOA and B show schematic views of a working scheme of the apparatus for use in the manufacture of a solar cell according to further embodiments described herein.

DETAILED DESCRIPTION OF EMBODIMENTS

[0010] Reference will now be made in detail to the various embodiments of the disclosure, one or more examples of which are illustrated in the figures. Within the following description of the drawings, the same reference numbers refer to same components. Generally, only the differences with respect to individual embodiments are described. Each example is provided by way of explanation of the disclosure and is not meant as a limitation of the disclosure. Further, features illustrated or described as part of one embodiment can be used on or in conjunction with other embodiments to yield yet a further embodiment. It is intended that the description includes such modifications and variations. [0011] A processing cycle for forming conductive line patterns on a substrate can include multiple material processing tasks. As an example, at least one deposition process using a first material processing device to deposit material on the substrate and at least one further process using a second material processing device can be performed. In order to achieve high-quality material processing, the multiple material processing tasks, and particularly a positioning of the first material processing device and the second material processing device, should be precisely controlled.

[0012] The present disclosure uses an integrated actuator assembly in which a first actuator, such as a linear motor, having the first material processing device is configured to move the first material processing device together with a second actuator, such as a pneumatic actuator, having the second material processing device. In other words, the second actuator is mounted on the first actuator, i.e., the first actuator and the second actuator are connected in series. When the first actuator moves the first material processing device, for example, to adjust the distance between the first material processing device and a substrate support, the second actuator and the second material processing device are simultaneously and optionally synchronously moved. A positioning of the first material processing device and the second material processing device can be precisely controlled. Further, the serial configuration allows for using actuators of a different technology so that the combination of the actuators may be beneficial as compared to that of a parallel configuration. For example, a serial configuration of a linear-motor controlled actuator and an air-actuated on-off actuator can provide an improved performance with lower costs.

[0013] FIGs. 1A and B show schematic views of an apparatus 100 for use in the manufacture of a solar cell according to embodiments described herein. [0014] The apparatus 100 includes a first actuator 110 and a second actuator 120. A first material processing device 112 is connectable or connected to the first actuator 110 and a second material processing device 122 is connectable or connected to the second actuator 120. The second actuator 120 is connected to, or mounted on, the first actuator 110, wherein the first actuator 110 is configured to move the second actuator 120. The first actuator 110 and the second actuator 120 can be operated independently from each other. By attaching the second actuator 120 to the first actuator 110, a relative positioning of the first material processing device 112 and the second material processing device 122 can be precisely controlled and adjusted.

[0015] According to some embodiments, which can be combined with other embodiments described herein, the first actuator 110 is configured to move the second actuator 120 together with the first material processing device 112. For example, the first actuator 110 can move the second actuator 120 and the first material processing device 112 simultaneously and/or synchronously. The second material processing device 122 is attached to the second actuator 120 and can move together with the second actuator 120. [0016] In some embodiments, the first actuator 110 is configured for linearly moving the first material processing device 112 and optionally changing an angular orientation of the first material processing device 112. Likewise, the first actuator 110 can be configured for linearly moving the second actuator 120 and optionally for changing an angular orientation of the second actuator 120. The second actuator 120 can be configured for linearly moving the second material processing device 122 and optionally for changing an angular orientation of the second material processing device 122.

[0017] The first actuator 110 can be configured for moving, such as linearly moving, the second actuator 120 in a first direction 1, which can be an essentially vertical direction. For example, the movement in the first direction 1 can include an upward movement and a downward movement. The upward movement can move the second actuator 120 away e.g. from the substrate and/or a screen. The downward movement can move the second actuator 120 towards e.g. the substrate and/or the screen.

[0018] The first actuator 110 can be configured for moving, such as linearly moving, the first material processing device 112 in a second direction 2, which can be an essentially vertical direction. For example, the movement in the second direction 2 can include an upward movement and a downward movement. The upward movement can move the first material processing device 112 away e.g. from the substrate and/or a screen. The downward movement can move the first material processing device 112 towards e.g. the substrate and/or the screen.

[0019] The first direction 1 and the second direction 2 can be substantially parallel to each other or can coincide. As an example, the first direction 1 and the second direction 2 can be essentially vertical directions. The term "vertical direction" or "vertical orientation" is understood to distinguish over "horizontal direction" or "horizontal orientation". The vertical direction can be substantially parallel to the force of gravity.

[0020] The second actuator 120 can be configured for moving, such as linearly moving, the second material processing device 122 in the first direction 1 , which can be the essentially vertical direction. For example, the movement in the first direction 1 can include an upward movement and a downward movement. The upward movement can move the second material processing device 122 away e.g. from the substrate and/or a screen. The downward movement can move the second material processing device 122 towards e.g. the substrate and/or the screen. In view of the foregoing, the second material processing device 122 can be moved, e.g., linearly moved, by a movement of the second actuator 120 provided by the first actuator 110 and a movement provided by the second actuator 120. [0021 ] According to some embodiments, which can be combined with other embodiments described herein, the first actuator 110 can be configured to adjust a relative position and/or distance of both the first material processing device 112 and the second material processing device 122 e.g. with respect to the substrate and/or the screen. The second actuator 120 can be configured to adjust a relative position of the first material processing device 112 and the second material processing device 122 with respect to each other. For example, the movement of the first material processing device 112 and the movement of the second actuator 120 caused by the first actuator 110 can be coupled or linked. The movement of the second material processing device 122 caused by the second actuator 120 can be independent from the movement of the second actuator 120 caused by the first actuator 110. [0022] In some implementations, the first actuator 110 can be configured for changing an angular orientation, such as an angle al, of the first material processing device 112 e.g. with respect to a plane defined by the first direction 1 and/or the second direction 2, such as a vertical plane. The angle al can be defined between the plane and a longitudinal axis of the first material processing device 112. The changing of the angular orientation can be done to change an angular orientation of the first material processing device 112 with respect to the substrate and/or screen.

[0023] The first actuator 110 can be configured for changing an angular orientation of the second actuator 120 e.g. with respect to the plane defined by the first direction 1 and/or the second direction 2, such as the vertical plane. By changing the angular orientation of the second actuator 120, an angular orientation of the second material processing device 122, which is attached to the second actuator 120, can be changed too. The change in the angular orientation or angle of the second actuator 120 can correspond to the change in the angular orientation or angle of the first material processing device 112.

[0024] According to some embodiments, the second actuator 120 can be configured for changing an angular orientation, such as an angle a2, of the second material processing device 122 e.g. with respect to the plane defined by the first direction 1 and/or the second direction 2, such as the vertical plane. The angle a2 can be defined between the plane and a longitudinal axis of the second material processing device 122. The changing of the angular orientation can be done to change an angular orientation of the second material processing device 122 with respect to at least one of the first material processing device 112, the substrate and the screen.

[0025] In some implementations, the first actuator 110 can be configured to adjust the angular orientation of both the first material processing device 112 and the second material processing device 122 e.g. with respect to the substrate and/or the screen. The second actuator 120 can be configured to adjust the angular orientation of the first material processing device 112 and the second material processing device 122 with respect to each other. For example, the angular movement of the first material processing device 112 and the angular movement of the second actuator 120 caused by the first actuator 110 can be coupled or linked. The angular movement of the second material processing device 122 caused by the second actuator 120 can be independent from the angular movement of the second actuator 120 caused by the first actuator 110.

[0026] In some implementations, the apparatus 100 includes one or more rotating actuators configured to rotate a unit, such as a process head, including the first actuator, the first material processing device 112, the second actuator 120, and the second material processing device 122. The one or more rotating actuators can be configured to adjust an angle of the unit or process head with respect to the screen and/or the substrate support.

[0027] According to some embodiments, which can be combined with other embodiments described herein, the apparatus 100 can include one or more further material processing devices, such as a third material processing device and optionally a fourth material processing device. As an example, the second material processing device 122 and the third material processing device can be configured similarly or identically. In particular, the third material processing device can be attached to the second actuator 120 so as to be movable. In other embodiments, as shown in FIGs. 5A and B, the third material processing device can be attached to a third actuator attached to the first actuator 110 so as to be movable. The first material processing device 112 can be provided between the second material processing device 122 and the third material processing device. [0028] According to some embodiments, which can be combined with other embodiments described herein, the first material processing device 112, the second material processing device 122, the third material processing device and/or to fourth material processing device can be selected from the group consisting of a printing device and a material distribution device for providing an essentially uniform film of a material on a screen. For example, the first material processing device 112 (and optionally the fourth material processing device) can be a printing device and the second material processing device 122 (and optionally the third material processing device) can be the material distribution device for providing an essentially uniform film of a material on a screen. [0029] The printing device can be selected from the group consisting of a diamond squeegee, a squeegee having a rectangular-shaped tip, an angled squeegee, and any combination thereof. The material distribution device can be a floodbar. The printing and material processing (material distribution) is further explained with respect to FIGs. 4, 5A and 5B. [0030] According to some embodiments, which can be combined with other embodiments described herein, the first actuator 110 can be selected from the group consisting of a linear motor, a stepper motor, a pneumatic actuator, an electric motor, and any combination thereof. Optionally or alternatively, the second actuator 120 can be selected from the group consisting of a linear motor, a stepper motor, a pneumatic actuator, an electric motor, and any combination thereof. In particular, the first actuator 110 can be a linear motor and the second actuator can be a pneumatic motor. The linear motor can apply a printing force and/or keep a specific position. The pneumatic actuator, which can have an intrinsic on/off mode, can be provided for changing a relative position between the first material processing device and the second material processing device. [0031] FIG. 2A shows a schematic view of an apparatus 200 for use in the manufacture of a solar cell according to further embodiments described herein.

[0032] The apparatus 200 includes the first actuator 210 and the second actuator 220. The first material processing device 212 is an angled squeegee for the screen printing of a material on the substrate. The angled squeegee can be configured for printing in only one direction, such as a first process direction. The second material processing device 222 is a floodbar that can provide an essentially uniform layer of the material on the screen which is to be transferred e.g. to a subsequent substrate that follows the processed substrate.

[0033] FIG. 2B shows a schematic view of an apparatus 200' for use in the manufacture of a solar cell according to yet further embodiments described herein. [0034] The apparatus 200' includes the first actuator 210 and the second actuator 220. The first material processing device 212' is a squeegee having an essentially rectangular tip for the screen printing of a material on the substrate. The tip can be essentially symmetrical to allow for printing in a first process direction and a second process direction opposite to the first direction. The second material processing device 222' is a floodbar that can provide an essentially uniform layer of the material on the screen which is to be transferred e.g. to a subsequent substrate that follows the processed substrate.

[0035] FIG. 3 shows a schematic view of an apparatus 300 for use in the manufacture of a solar cell according to embodiments described herein.

[0036] The apparatus 300 includes the first actuator 310 and the second actuator 320. The first actuator 310 includes, or is, a linear motor 314. The linear motor may include a stator 316. The first material processing device 312 is connectable or connected to the first actuator 310, e.g., the linear motor 314, and the second material processing device 322 is connectable or connected to the second actuator 320. The second actuator 320 is connected to, or mounted on, the first actuator 310, e.g., the linear motor 314, wherein the first actuator 310 is configured to move the second actuator 320.

[0037] The second actuator 320 can be a pneumatic actuator having a cylinder 326 and a piston 327, wherein the piston 327 is moveable in the cylinder 326. The cylinder 326 can be mounted on a support 328. The support 328 can be connected to, or provided by, the linear motor 314. The piston 327 can be connected to the second material processing device 322 to move the second material processing device 322. In some implementations, the second actuator 320 includes a guide assembly, such as a linear guide assembly, configured for guiding a movement of the second material processing device 322, e.g., in the first direction 1. For example, the guide assembly can include a guiding track 324, which can be a linear guiding track, and a guided element 325 movably provided at the guiding track 324 such that the guided element 325 is guided by or in the guiding track 324. The guided element 325 can be connected to the second material processing device 322 for guiding a movement of the second material processing device 322 in the first direction 1.

[0038] According to some embodiments, the apparatus 300 includes a stopper assembly 5 configured for limiting a movement of the second material processing device 322 e.g. in the first direction 1 such as an upward direction. The stopper assembly can include a first stopping element 330 provided at the first actuator 310, e.g., the linear motor 314, and a second stopping element 332 provided at the second actuator 320. The second stopping element 332 can be provided at the second material processing device 322 and/or the piston 10 327.

[0039] According to an aspect of the present disclosure, a system for deposition of a material on a substrate 10 used in the manufacture of a solar cell is provided. FIG. 4 shows a schematic view of such a system 400, which can be configured for screen printing. The material can be a material suitable for forming conductive line patterns, such as fingers 15 and/or busbars, on a surface 12 of the substrate 10. For example, the material can be a paste, such as a silver paste.

[0040] The system 400 includes a process head 410 moveable at least in a first process direction 5 along a substrate support 20. The process head 410 includes, or is, the apparatus for use in the manufacture of a solar cell according to the present disclosure. The system 20 400, and in particular the process head 410, includes the first material processing device 112 and the second material processing device 122.

[0041] The system 400 can include a driving device configured for moving the process head 410 in the first process direction 5 along the substrate support 20 for at least one of printing, e.g. using the first material processing device 112, and material distribution, e.g. 25 using the second material processing device 122.

[0042] According to some embodiments, the process head 410 is movable in a second process direction opposite the first process direction 5 along the substrate support 20. The driving device can be configured for moving the process head 410 in the second process direction along the substrate support 20 for at least one of printing, e.g. using the first material processing device 112, and material processing, e.g. using the second material processing device 122.

[0043] According to some embodiments, the system 400 is further configured to adjust at least one of a distance and an angle of the process head 410 with respect to the substrate support 20 and/or the screen 154. For example, the system 400 includes one or more rotating actuators configured to rotate the process head 410 around a rotational axis, which can be an essentially horizontal axis. The one or more rotating actuators can be configured to adjust an angle of the process head 410 with respect to the screen 154 and/or the substrate support 20. The angle between the screen 154 and/or the substrate support 20 and the process head 410 can be defined with respect to a vertical plane. The process head 410 can have an angle +a, which may correspond to a tilt of the process head 410 in a clockwise direction when moving in the first process direction 5. Likewise, the process head 410 can have an angle -a, which may correspond to a tilt of the process head 410 in a counterclockwise direction when moving in the second process direction. [0044] For example, the angles +a and -a may be 70° or less with respect to the vertical plane or direction, specifically 60° or less, more specifically 40° or less, and even more specifically 20° or less. For example, the angles +a and -a may be in a range between 20° and 70°, and more specifically in a range between 40° to 70°

[0045] The system 400 includes the first material processing device 112 configured for transferring the material from the screen 154 to the substrate 10 and the second material processing device 122 for the processing of the material on the screen 154. The drive device is configured for moving the process head 410 at least in the first process direction and optionally the second process direction along the substrate support 20 for the transference of the material from the screen 154 to the substrate 10 and the processing of the material on the screen 154 during a deposition process. In some implementations, the first material processing device 112 can be a printing device, such as a squeegee. The second material processing device 122, which can be the material distribution device, such as a flood bar, can provide an essentially uniform layer of the material on the screen 154 which is to be transferred e.g. to a subsequent substrate that follows the processed substrate. [0046] The system 400 can include a screen device 150 provided between the substrate support 20 and the process head 410. The screen device 150 can include a frame 152 and the screen 154 attached to the frame 152. According to some embodiments, which can be combined with other embodiments described herein, the first material processing device 112 can be the printing device, such as the squeegee. The squeegee can be configured to contact the screen 154 for printing. In some embodiments, a tip of the squeegee makes contact with the screen 154 and forces material to be printed onto the substrate 10 through the screen 154. The squeegee can be a diamond squeegee or an angled squeegee.

[0047] The screen 154 may include at least one of a net, a printing mask, a sheet, a metal sheet, a plastic sheet, a plate, a metal plate, and a plastic plate. In some embodiments, the screen 154 defines a pattern corresponding to a structure to be printed on the substrate 10, wherein the pattern may include at least one of holes, slots, incisions or other apertures. The pattern can correspond to the conductive line pattern to be printed on the substrate 10, such as fingers and/or busbars of the solar cell. As an example, the screen 154 can have openings defining the conductive line pattern and a wire mesh provided within the openings. The material to be deposited on the substrate 10 can be provided as an essentially uniform layer on the screen 154 by use of the second material processing device 122, which can be a floodbar. The material does not flow through the openings due to the presence of the wire mesh. During the deposition process, the first material processing device 112, for example, the squeegee, exerts a force or pressure on the material on the screen 154 and forces the material through the openings such that the material is transferred to (i.e., deposited on) the substrate 10.

[0048] According to some embodiments, the deposition, such as the printing, and the material distribution are performed during one stroke or cycle. In other words, the deposition and the material distribution are performed simultaneously. The combined flood movement during the deposition process can reduce a process time, such as a critical path time. For example, the critical path time can be reduced by about one third.

[0049] In the example of FIG. 4, the process head 410 is one single process head, wherein the first material processing device 112 and the second material processing device 122 are attached to the process head 410. However, the present disclosure is not limited thereto and the process head can include two or more process head units, which can be provided independently from each other. For example, a first process head unit of the two or more process head units can include the first actuator with the first material processing device and the second actuator with the second material processing device. A second process head unit of the two or more process head units can include another first actuator with another first material processing device and another second actuator with another second material processing device. In further examples, the second process head unit can include one actuator having either another first material processing device or another second material processing device.

[0050] In some implementations, the deposition and the material distribution are simultaneously performed during at least a part of a duration of the deposition process performed using the first material processing device 112. For example, the material distribution can be performed during 50% or more, specifically 70%> or more, and more specifically 90%> or more of the duration of the deposition process. According to some embodiments, the deposition and the material distribution are simultaneously performed during essentially the entire duration of the deposition process, such as 100%> of the duration of the deposition process. The deposition process may correspond to one stroke or movement performed by the process head 410, for example, between a first position A and a second position B. A distance between the first position A and the second position B can be equal to, or larger than, an extension of the substrate 10 or of the conductive line pattern such that the conductive line pattern or a layer thereof can be deposited on the substrate 10 during one stroke.

[0051 ] According to some embodiments, which can be combined with other embodiments described herein, the drive device is configured for moving the process head 410 in the first process direction 5 at least from the first position A to the second position B to perform the deposition/transferring and processing, e.g., distributing, of the material on the screen 154 at least during the movement from the first position A to the second position B. A movement from the first position A to the second position B or vice versa can correspond to one stroke performed by the process head 410 such as a first stroke and a second stroke, respectively. The first process direction 5 can be a horizontal direction 3, perpendicular to a vertical direction 4. Likewise, the second process direction can be a horizontal direction 3. [0052] The first position A and the second position B can be defined as respective positions of the process head 410 with respect to at least one of the substrate 10, the substrate support 20 and/or the screen 154. The position of the process head 410 may in turn define respective positions of the first material processing device 112 and the second material processing device 122 with respect to at least one of the substrate 10, the substrate support 20 and/or the screen 154.

[0053] As an example, the second material processing device 122 can be at a position (a) and first material processing device 112 can be at a position (b) when the process head 410 is in the first position A and moving in the first process direction 5. Likewise, the second material processing device 122 can be at a position (c) and the first material processing device 112 can be at a position (d) when the process head 410 is in the second position B and moving in the second process direction opposite to the first process direction 5.

[0054] According to some embodiments, a distance or spacing can be provided between the first material processing device 112 and the second material processing device 122. Specifically, the distance or spacing can be provided between adjacent or neighboring material processing devices. For example, the distance or spacing in the first process direction 5 can be 50 mm or less, specifically 40 mm or less, and can more specifically be about 30 mm. The distance or spacing can provide room for accumulation of material ("paste roll"). [0055] In some embodiments, the system 400 is configured at least for double printing. For example, the conductive line pattern, such as the fingers and/or busbars of the solar cell, can include two or more material layers. A first material layer can be printed on the substrate 10 and a second material layer can be printed at least partially on top of the first material layer to form the conductive line pattern. In some implementations, the system 400 can print the first material layer during a first deposition process including the movement or first stroke from the first position A to the second position B. The system 400 can, in some embodiments, print the second material layer during a second deposition process including the movement or second stroke from the second position B to the first position A. However, the present disclosure is not limited thereto and the double printing can be performed with the process head 410 moving in the same direction, for example, the first process direction 5 or the second process direction. In some embodiments, the substrates are printed alternately, e.g. one substrate using the first process direction 5, another substrate using the second process direction, and so on (e.g. for every processing or printing station).

[0056] In some implementations, the first process direction 5 and the second process direction can be substantially horizontal directions. The term "horizontal direction" is understood to distinguish over "vertical direction". That is, the "horizontal direction" relates to a substantially horizontal movement e.g. of the process head 410, wherein a deviation of a few degrees, e.g. up to 5° or even up to 10°, from an exact horizontal direction is still considered as a "substantially horizontal direction". The vertical direction 4 can be substantially parallel to the force of gravity. [0057] As described with respect to FIGs. 1 to 3, the apparatus, and particularly the process head 410, includes the first actuator 110 and the second actuator 120. In some implementations, the distance (e.g., in the vertical direction) between the second material processing device 122 and the screen 154 and/or the substrate support 20 can be adjusted or controlled during the movement of the process head 410, e.g., between the first position A and the second position B. For example, the distance can be adjusted by adjusting a vertical position of the second material processing device 122 using the second actuator 120. The real-time adjustment of the vertical position can ensure that the second material processing device does not interfere with the screen 154, particularly when the screen 154 is deformed due to contact made between the screen 154 and the first material processing device 112. According to some embodiments, the distance between the second material processing device 122 and the screen 154 and/or the substrate support 20 can be adjusted e.g. using the second actuator 120 to follow a screen profile. For example, the distance between the second material processing device 122 and the screen 154 and/or the substrate support 20 can be adjusted or controlled during the movement of the process head 410 so as to be essentially constant.

[0058] FIGs. 5A and B show schematic views of a process head 510 moving in the first process direction 5 and the second process direction 6 for deposition, such as printing, and material distribution according to embodiments described herein.

[0059] The process head 510 includes the first actuator 110 having the first material processing device 112 attached thereto and the second actuator 120 having the second material processing device 122 attached thereto. According to some embodiments, the apparatus according to the embodiments described herein, and particularly to process head 510, includes one or more further material processing devices, such as a third material processing device 532. The apparatus, and particularly process head 510, can include a third actuator 530 connected to the first actuator 110. The third actuator 530 can be configured similarly or identically to the first actuator 110, and the description given with respect to the first actuator 110 also applies to the third actuator 530 and is not repeated. In particular, the first actuator 110 can be configured to move the third actuator 530, e.g. in synchronization with the second actuator 120. [0060] The first actuator 110 can be configured for changing at least one of a distance and an angular orientation of the first material processing device 112 with respect to the screen 154 and/or the substrate support 20. The second actuator 120 can be configured for changing at least one of a distance and an angular orientation of the second material processing device 122 with respect to the screen 154 and/or the substrate support 20. The third actuator 530 can be configured for changing at least one of a distance and an angular orientation of the third material processing device 532 with respect to the screen 154 and/or the substrate support 20.

[0061] Turning now to Fig. 5 A, when the process head 510 is in the first position A, the second material processing device 122 is at position (a), the first material processing device 112 is at position (b), and the third material processing device 532 is at a position (a'). As shown in FIG. 5B, when the process head 510 is in the second position B, the second material processing device 122 is at position (c), the first material processing device 112 is at position (d), and the third material processing device 532 is at position (c').

[0062] According to some embodiments, the first material processing device 112 can be a printing device, such as a squeegee. The second material processing device 122 and the third material processing device 532 can be material distribution devices for providing an essentially uniform film of the material on the screen 154. Although not shown, a fourth material processing device can be attached to the first actuator 110. The fourth material processing device can be another printing device, such as a squeegee. [0063] For example, only one printing device, such as the first material processing device 112, can be provided e.g. when the printing device is configured for printing in two directions, namely the first process direction 5 and the second process direction 6. The printing device configured for printing in two opposite directions can have an essentially symmetric tip, such as the rectangular-shaped tip. In another example, two printing devices, such as the first material processing device 112 and the fourth material processing device can be provided e.g. when the printing device is configured for printing in only one direction, namely the first process direction 5 or the second process direction 6. The printing device configured for printing in only one direction can be, for example, an angled squeegee as illustrated in FIG. 2.

[0064] According to some embodiments, which can be combined with other embodiments described herein, the second material processing device 122 is positioned behind the first material processing device 112 when the process head 510 moves in the first process direction 5. The third material processing device 532 can be positioned behind the first material processing device 112 when the process head 510 moves in the second process direction 6.

[0065] As shown in FIG. 5 A, the process head 510 uses the second material processing device 122 for material distribution during the movement of the process head 510 in the first process direction 5. Further, as shown in FIG. 5B, the process head 510 uses the third material processing device 532 for material distribution during the movement of the process head 510 in the second process direction 6. The material processing device that is used for material distribution during the movement of the process head 510 (i.e., the material distribution device) can be positioned close enough to the screen 154 to allow for material processing, such as providing an essentially uniform material layer on the screen 154. For example, a distance between the material processing device that is used for material distribution and the screen 154 (e.g. the first distance dl or the second distance d2 described in the following paragraphs) may be selected according to at least one of a layer thickness of the material deposited on the screen 154, a rheology of the material, e.g. the paste, and a composition of the material. [0066] According to some embodiments, the first distance dl between the screen 154 and the second material processing device 122 is less than the second distance d2 between the screen 154 and the third material processing device 532 during the movement of the process head 510 in the first process direction 5. In other words, the second material processing device 122 is lowered and the third material processing device 532 is lifted. The second distance d2 between the screen 154 and the third material processing device 532 can be less than the first distance dl between the screen 154 and the second material processing device 122 during the movement of the process head 510 in the second process direction 6. The first distance dl and the second distance d2 can be defined in a vertical direction.

[0067] In some implementations, the larger distance of the first distance dl and the second distance d2 (i.e., the second distance d2 in FIG. 5A and the first distance dl in FIG. 5B) can be in a range between 5 and 25 mm, specifically in a range between 10mm and 20 mm, and can more specifically be about 15 mm. The smaller distance of the first distance dl and the second distance d2 (i.e., the first distance dl in FIG. 5A and the second distance d2 in FIG. 5B) can be in a range between 0.01 and 2 mm, specifically in a range between 0.05 and 1.5 mm, and can more specifically be in a range between 0.1 mm and 1 mm. [0068] In some implementations, the first distance dl and/or the second distance d2 can be adjusted or controlled during the movement between the first position A and the second position B. For example, the first distance dl can be adjusted using the second actuator 120 and the second distance d2 can be adjusted using the third actuator 530. The real-time adjustment of the first distance dl and/or the second distance d2 can ensure that the material processing device does not interfere with the screen 154. According to some embodiments, the first distance dl and/or the second distance d2 can be adjusted to follow a screen profile. According to some embodiments, only the distance of the material processing device in use is adjusted. The distance of the unused material processing device (the third material processing device 532 in FIG. 5A and the second material processing device 122 in FIG. 5B) can be kept constant. For example, the distance of the material processing device in use can be adjusted to keep the distance between said material processing device and the screen 154, such as the first distance dl or the second distance d2, essentially constant.

[0069] FIG. 6 shows a flowchart of a method 600 for the processing of a deposition material used in the manufacture of a solar cell according to embodiments described herein. The method 600 can be implemented using the apparatuses and systems according to the present disclosure. [0070] The method 600 includes in block 610 an operating of a first actuator to move a first material processing device and a second actuator connected to the first actuator. A second material processing device connected to the second actuator is moved together with the second actuator when the first actuator moves the second actuator. The method 600 further includes in block 620 a performing of material processing using at least one of the first material processing device and the second material processing device.

[0071 ] For example, the first material processing device is a printing device and the second material processing device is a material distribution device for providing an essentially uniform film of a material on a screen. The method can include a moving of the first material processing device and the second material processing device along a substrate support to transfer the material from the screen to the substrate using the first material processing device and to perform processing, such as distributing, of the material on the screen using the second material processing device. The second material processing device can follow the first material processing device in order to provide an essentially uniform layer of the material on the screen to be printed on a subsequent substrate.

[0072] According to embodiments described herein, the method for the processing of a deposition material used in the manufacture of a solar cell can be conducted using computer programs, software, computer software products and the interrelated controllers, which can have a CPU, a memory, a user interface, and input and output devices being in communication with the corresponding components of the apparatus according to the present disclosure.

[0073] FIGs. 7, 8A and B show schematic views of a working scheme of the apparatus for use in the manufacture of a solar cell according to embodiments described herein.

[0074] The apparatus can include a process head 700 having the first actuator 710, e.g., a linear motor, and the second actuator 720, e.g., a pneumatic actuator. The first material processing device 712, such as an angled squeegee, is connectable or connected to the first actuator 710, and the second material processing device 722, such as a floodbar, is connectable or connected to the second actuator 720. In FIG. 7, which illustrates an idle position of the apparatus, the first material processing device 712 is shown at a height h (or distance) above the screen 154. [0075] FIG. 8A illustrates a printing stroke. The apparatus, and particularly the process head 700, moves in a printing direction 701 for transferring paste from the screen 154 to the substrate (not shown) under the screen 154. Starting out from the idle position illustrated in FIG. 7, the first actuator 710 lowers the first material processing device 712 and the second 5 actuator 720 by a first amount a to bring the first material processing device 712 and the second actuator 720 in the position illustrated in FIG. 8A. The first amount a may be equal to, or larger than, the height h. In particular, the first actuator 710, which may be a linear motor, can apply suitable pressure to the screen 154, e.g. by keeping a specific position, for performing the printing process.

10 [0076] FIG. 8B illustrates a flooding stroke which can be performed after the printing stroke. The apparatus, and particularly the process head 700, moves in a flood direction 801 for providing paste on the screen 154 for a subsequent printing process. Using the idle position of FIG. 7 as a reference, the first actuator 710 lowers the second actuator 720 by a second amount a' and the second actuator 720 lowers the second material processing device

15 722 by a third amount b to bring the second material processing device 722 into the position illustrated in FIG. 8B. A sum of the second amount a' and the third amount b may be equal to, or less than, the height h. For example, the second amount a' can be about 0.25 times the height h and the third amount b can be about 0.75 times the height h.

[0077] The first actuator 710, which may be a linear motor, can accurately position the 0 second material processing device 722, which can be the fioodbar. The second actuator 720, which can be the pneumatic actuator, can change the relative position between the first material processing device 712 and the second material processing device 722. A positioning of the first material processing device and the second material processing device can be precisely controlled. 5 [0078] FIGs. 9, 10A and B show schematic views of a working scheme of the apparatus for use in the manufacture of a solar cell according to further embodiments described herein.

[0079] The apparatus can include the process head 900 having two first actuators, such as a first linear motor 910 and a second linear motor 911, and two second actuators, such as a first pneumatic actuator 920 connected to the first linear motor 910 and a second pneumatic 30 actuator 921 connected to the second linear motor 911. The first material processing device 912, such as an angled squeegee, is connectable or connected to the first linear motor 910, and the second material processing device 922, such as a fioodbar, is connectable or connected to the first pneumatic actuator 920. A third material processing device 912', such as an angled squeegee, is connectable or connected to the second linear motor 911, and a 5 fourth material processing device 922', such as a fioodbar, is connectable or connected to the second pneumatic actuator 921.

[0080] The first linear motor 910, the first pneumatic actuator 920, the first material processing device 912, and the second material processing device 922 can form a first group (indicated with "1"). Likewise, the second linear motor 911, the second pneumatic actuator 10 921, the third material processing device 912', and the fourth material processing device 922' can form a second group (indicated with "2")

[0081] FIG. 10A illustrates a combined printing and flooding stroke. The apparatus, and particularly the process head 900, moves in the first process direction 901 for simultaneously transferring paste from the screen 154 to the substrate (not shown) using the third material

15 processing device 912' of the second group and flooding using the second material processing device 922 of the first group. FIG. 10B illustrates another combined printing and flooding stroke. The apparatus, and particularly the process head 900, moves in the second process direction 902 for simultaneously transferring paste from the screen 154 to the substrate (not shown) using the first material processing device 912 of the first group and 0 flooding using the fourth material processing device 922' of the second group. The present disclosure uses an integrated actuator assembly in which a first actuator having the first material processing device is configured to move the first material processing device together with a second actuator having the second material processing device. In other words, the second actuator is mounted on the first actuator. When the first actuator moves 5 the first material processing device, for example, to adjust the distance between the first material processing device and a screen and/or substrate support, the second actuator and the second material processing device are simultaneously and optionally synchronously moved. A positioning of the first material processing device and the second material processing device can be precisely controlled. [0082] While the foregoing is directed to embodiments of the disclosure, other and further embodiments of the disclosure may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.

Claims

1. An apparatus for use in the manufacture of a solar cell, comprising: a first actuator, wherein a first material processing device is connectable to the first actuator; and a second actuator, wherein a second material processing device is connectable to the second actuator, wherein the second actuator is connected to the first actuator, and wherein the first actuator is configured to move the second actuator.

2. The apparatus of claim 1, wherein the first actuator is configured to move the second actuator together with the first material processing device.

3. The apparatus of claim 1 or 2, wherein the first actuator is configured for at least one of linearly moving the first material processing device and changing an angular orientation of the first material processing device.

4. The apparatus of any one of claims 1 to 3, wherein the second actuator is configured for at least one of linearly moving the second material processing device and changing an angular orientation of the second material processing device.

5. The apparatus of any one of claims 1 to 4, wherein the first actuator is configured for at least one of linearly moving the second actuator and changing an angular orientation of the second actuator.

6. The apparatus of any one of claims 1 to 5, wherein at least one of the first actuator and the second actuator is selected from the group consisting of a linear motor, a stepper motor, a pneumatic actuator, an electric motor, and any combination thereof.

7. A system for deposition of a material on a substrate used in the manufacture of a solar cell, comprising: a process head moveable at least in a first process direction along a substrate support, wherein the process head includes: the apparatus of any one of claims 1 to 6; and the first material processing device and the second material processing device.

8. The system of claim 7, wherein the first actuator is configured for changing at least one of a distance and an angular orientation of the first material processing device with respect to the substrate support.

9. The system of claim 7 or 8, wherein the second actuator is configured for changing at least one of a distance and an angular orientation of the second material processing device with respect to the substrate support.

10. The system of any one of claims 7 to 9, wherein at least one of the first material processing device and the second material processing device is selected from the group consisting of a printing device and a material distribution device for providing an essentially uniform film of a material on a screen.

11. The system of claim 10, wherein the first material processing device is the printing device and the second material processing device is the material distribution device for providing an essentially uniform film of a material on a screen.

12. The system of any one of claims 7 to 11, further including a driving device configured for moving the process head in the first process direction along the substrate support for at least one of printing and material distribution.

13. The system of any one of claims 7 to 12, wherein the system is further configured to adjust at least one of a distance and an angle of the process head with respect to the substrate support.

14. A method for the processing of a deposition material used in the manufacture of a solar cell, comprising: operating a first actuator to move a first material processing device and a second actuator connected to the first actuator, wherein a second material processing device connected to the second actuator is moved together with the second actuator when the first actuator moves the second actuator; and performing material processing using at least one of the first material processing device and the second material processing device.

15. The method of claim 14, wherein the first material processing device is a printing device and the second material processing device is a material distribution device for providing an essentially uniform film of a material on a screen, or vice versa, wherein the method includes: moving the first material processing device and the second material processing device along a substrate support to transfer the material from the screen to the substrate using the first material processing device and to perform processing of the material on the screen using the second material processing device.