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WO2018186013A1 - Dispositif de détection de grandeur physique et procédé de fabrication de dispositif de détection de grandeur physique - Google Patents

Dispositif de détection de grandeur physique et procédé de fabrication de dispositif de détection de grandeur physique Download PDF

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Publication number
WO2018186013A1
WO2018186013A1 PCT/JP2018/003158 JP2018003158W WO2018186013A1 WO 2018186013 A1 WO2018186013 A1 WO 2018186013A1 JP 2018003158 W JP2018003158 W JP 2018003158W WO 2018186013 A1 WO2018186013 A1 WO 2018186013A1
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WO
WIPO (PCT)
Prior art keywords
physical quantity
circuit board
quantity detection
detection device
intermediate member
Prior art date
Application number
PCT/JP2018/003158
Other languages
English (en)
Japanese (ja)
Inventor
翼 渡辺
浩昭 星加
余語　孝之
ハリダン ファティン ファハナー ビンティ
Original Assignee
日立オートモティブシステムズ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立オートモティブシステムズ株式会社 filed Critical 日立オートモティブシステムズ株式会社
Publication of WO2018186013A1 publication Critical patent/WO2018186013A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02D—CONTROLLING COMBUSTION ENGINES
    • F02D45/00—Electrical control not provided for in groups F02D41/00 - F02D43/00
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
    • G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K13/00—Thermometers specially adapted for specific purposes
    • G01K13/02—Thermometers specially adapted for specific purposes for measuring temperature of moving fluids or granular materials capable of flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/14—Housings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means

Definitions

  • the present invention relates to a physical quantity detection device and a method for manufacturing the physical quantity detection device.
  • the physical quantity detection device As a device for measuring the physical quantity of the gas to be measured flowing through the main passage.
  • the physical quantity detection device has a structure in which, in order to detect a mass flow rate that is one of the physical quantities to be measured, a part of the gas to be measured flowing in the pipe that is the main passage is taken into the sub-passage and led to the flow rate detection unit. ing.
  • a hot wire, a silicon element, and the like are arranged, and the mass flow rate in the pipe is measured by utilizing the fact that the hot wire, the silicon element, etc. are cooled by the air flow and the electric resistance value changes.
  • Patent Document 1 discloses a technology of a physical quantity detection device that provides a static electricity dissipating region in a bypass passage to remove the charge of a pollutant.
  • a physical quantity detection device includes a housing, a circuit board covered with an insulating resin material, a circuit chamber in which the circuit board is arranged by a combination of the housing, and a gas to be measured.
  • a cover that forms a flow path through which the battery passes, a conductor installed in the flow path, and a conductive member that penetrates the resin material and electrically connects the conductor and the circuit board.
  • the conductive member is arranged on the circuit board so that one of the conductive conductive members in the longitudinal direction is in contact with the circuit board provided in the housing.
  • a cover including a conductor disposed at a location to be a flow path through which gas passes is pressed against the conductive member, thereby electrically connecting the conductor and the circuit board, and by combining the housing with the housing Forming a circuit chamber in which a circuit board is disposed, and forming the flow path.
  • the manufacturing cost of the physical quantity detection device can be reduced.
  • FIG. 8A is a view showing the opposing surface of the sub-passage of the front cover 303
  • FIG. 8B is a cross-sectional view taken along the line DD of FIG. 8A.
  • FIG. 9A is a view showing the opposing surface of the sub-passage of the back cover 304
  • FIG. 9A is a view showing the opposing surface of the sub-passage of the back cover 304
  • FIG. 9B is a cross-sectional view taken along the line EE of FIG. 9A.
  • 10A is a cross-sectional view taken along line BB of FIG. 8 before resin sealing
  • FIG. 10B is an enlarged view of a portion A of FIG. 10A.
  • 11A is a cross-sectional view taken along line CC of FIG. 4A after resin sealing
  • 12A is a cross-sectional view taken along the line AA in FIG. 2 after the cover is bonded
  • FIG. 12B is an enlarged view of a portion C in FIG.
  • FIG. 13 is a diagram showing the appearance of a conventional physical quantity detection device 1300.
  • 14A is a view showing the FF cross section of FIG. 13, and FIG.
  • FIG. 14B is an enlarged view of a portion D of FIG. 14A.
  • the figure which shows the some variation of the intermediate member 551 The figure which shows the cross section of the intermediate member 551 vicinity in 4th Embodiment
  • the figure which shows the manufacturing method of the physical quantity detection apparatus 300 in 4th Embodiment The figure which shows the manufacturing method of the physical quantity detection apparatus 300 in 4th Embodiment.
  • FIG. 1 is a diagram showing an electronic fuel injection internal combustion engine control system including a physical quantity detection device 300.
  • a physical quantity detection device 300 Based on the operation of the internal combustion engine 110 including the engine cylinder 112 and the engine piston 114, intake air is sucked from the air cleaner 122 as the measurement target gas 30.
  • the gas 30 to be measured is guided to the combustion chamber of the engine cylinder 112 via the main passage 124, for example, the intake body, the throttle body 126, and the intake manifold 128.
  • the physical quantity of the gas 30 to be measured which is the intake air led to the combustion chamber, is detected by the physical quantity detection device 300.
  • Physical quantities are, for example, flow rate, temperature, humidity, and pressure.
  • fuel is supplied from the fuel injection valve 152 based on the detected physical quantity, and this fuel is introduced into the combustion chamber together with the gas to be measured 30 in the state of air-fuel mixture.
  • the fuel injection valve 152 is provided at the intake port of the internal combustion engine, and the fuel injected into the intake port forms an air-fuel mixture together with the gas to be measured 30 and is guided to the combustion chamber via the intake valve 116 to burn and machine. Generate energy.
  • the fuel and air introduced into the combustion chamber are in a mixed state of fuel and air, and are ignited explosively by the spark ignition of the spark plug 154 to generate mechanical energy.
  • the combusted gas is guided from the exhaust valve 118 to the exhaust pipe, and is discharged from the exhaust pipe to the outside as the exhaust gas 24.
  • the flow rate of the gas 30 to be measured guided to the combustion chamber is controlled by a throttle valve 132 whose opening degree changes based on the operation of the accelerator pedal.
  • the fuel supply amount is controlled based on the flow rate of the intake air guided to the combustion chamber, and the driver controls the flow rate of the intake air guided to the combustion chamber by controlling the opening degree of the throttle valve 132 so that the internal combustion engine is controlled. Control the mechanical energy generated.
  • a physical quantity such as a flow rate, temperature, humidity, and pressure of the measurement target gas 30 taken from the air cleaner 122 and flowing through the main passage 124 is detected by the physical quantity detection device 300, and an electrical signal representing the physical quantity of the intake air is sent from the physical quantity detection device 300 to the control device. 200 is input. Further, the output of the throttle angle sensor 144 that measures the opening degree of the throttle valve 132 is input to the control device 200. Further, the control device 200 receives the position and state of the engine piston 114, the intake valve 116 and the exhaust valve 118 of the internal combustion engine, and the output of the rotation angle sensor 146. Further, the output of the oxygen sensor 148 is input to the control device 200 in order to measure the state of the mixture ratio between the fuel amount and the air amount from the state of the exhaust gas 24.
  • the control device 200 calculates the fuel injection amount and the ignition timing based on the physical quantity of the intake air that is the output of the physical quantity detection device 300 and the rotational speed of the internal combustion engine that is measured based on the output of the rotation angle sensor 146. Based on these calculation results, the amount of fuel supplied from the fuel injection valve 152 and the ignition timing ignited by the spark plug 154 are controlled. The fuel supply amount and ignition timing are actually based on the temperature and throttle angle change state detected by the physical quantity detection device 300, the engine speed change state, and the air-fuel ratio state measured by the oxygen sensor 148. Finely controlled. The control device 200 further controls the amount of air that bypasses the throttle valve 132 by the idle air control valve 156 in the idle operation state of the internal combustion engine, and controls the rotational speed of the internal combustion engine in the idle operation state.
  • FIG. 2 is a front view of the physical quantity detection device 300
  • FIG. 3 is a rear view
  • FIG. 4 (a) is a left side view
  • FIG. 4 (b) is a right side view.
  • the upper side shown in FIG. 2 is called the height direction h
  • the right side shown in FIG. 2 is called the flow direction f
  • the depth of FIG. 2 is called the width direction w.
  • the flow direction f is the direction in which the measurement target gas 30 flows.
  • the dashed-dotted line shown in FIG. 2 is a line which shows the cross section mentioned later.
  • the alternate long and short dash line is shown in the other drawings, but the same cross section is shown except for FIG. In other words, all the alternate long and short dash lines shown in the present embodiment have the same position in the flow direction f and the height direction h.
  • the physical quantity detection device 300 includes a housing 302, a front cover 303, and a back cover 304.
  • the housing 302 is configured by molding a synthetic resin material.
  • the housing 302 includes a flange 311 for fixing the physical quantity detection device 300 to the intake body, which is the main passage 124, and an external connection portion 321 having a connector that protrudes from the flange 311 and is electrically connected to an external device.
  • a measuring part 331 extending from the flange 311 so as to protrude toward the center of the main passage 124.
  • the horizontal direction indicates the width direction w. If the center of the physical quantity detection device 300 in the width direction is the origin of w, the right side in FIG. 4 (a) is the width direction w. 4B is the plus side in the width direction w.
  • FIGS. 5 and 6 are diagram in which the back cover 304 is removed from the rear view of the physical quantity detection device 300 shown in FIG.
  • the circuit board 400 is integrally provided in the measurement unit 331.
  • the circuit board 400 is integrally provided by insert molding when the housing 302 is molded.
  • the circuit board 400 is provided with a plurality of detection units for detecting the physical quantity of the gas 30 to be measured flowing through the main passage 124 and a circuit unit for processing a signal detected by the detection unit.
  • the detection unit is disposed at a position exposed to the measurement target gas 30.
  • the circuit portion is disposed in a circuit chamber formed by the front cover 303 and is covered with a resin sealing material.
  • the front and back surfaces of the measuring unit 331 are provided with sub-passage grooves, and the first sub-passage is formed as shown in FIG. 4 in cooperation with the front cover 303 and the back cover 304. 305 is formed.
  • a first sub-passage inlet 305 a for taking a part of the measurement target gas 30 such as intake air into the first sub-passage 305 and the measurement target gas 30 from the first sub-passage 305 are mainly used.
  • a first sub-passage outlet 305b for returning to the passage 124 is provided.
  • a second sub-passage 306 is provided in the middle of the measurement unit 331 closer to the flange 311 than the first sub-passage 305 for taking a part of the measured gas 30 such as intake air into the sensor chamber Rs.
  • the second sub passage 306 is formed by the cooperation of the measurement unit 331 and the back cover 304.
  • the second sub-passage 306 includes a second sub-passage inlet 306 a that opens to the upstream outer wall 336 to take in the gas to be measured 30, and a downstream side to return the gas to be measured 30 from the second sub-passage 306 to the main passage 124.
  • a second sub-passage outlet 306b that opens to the outer wall 338 is provided.
  • the second sub-passage 306 communicates with the sensor chamber Rs formed on the back side of the measurement unit 331.
  • a pressure sensor and a humidity sensor that are detection units provided on the back surface of the circuit board 400 are arranged.
  • the intermediate member 551 shown in FIG. 7 electrically connects the circuit board 400 and a conductor 501 described later disposed on the front cover 303. Details will be described later.
  • the external connection portion 321 is provided on the upper surface of the flange 311 and has a connector 322 protruding from the flange 311 toward the downstream side in the flow direction of the measurement target gas 30.
  • the connector 322 is provided with an insertion hole 322a for inserting a communication cable for connecting to the control device 200.
  • four external terminals 323 are provided inside the insertion hole 322a.
  • the external terminal 323 serves as a terminal for outputting physical quantity information that is a measurement result of the physical quantity detection device 300 and a power supply terminal for supplying DC power for operating the physical quantity detection device 300.
  • the housing 302 has a structure in which the measuring unit 331 extends from the flange 311 toward the center of the main passage 124.
  • a circuit board 400 is insert-molded on the base end side of the measurement unit 331. As shown in FIG. 7, the circuit board 400 is arranged in parallel along the surface of the measurement unit 331 at an intermediate position between the front surface and the back surface of the measurement unit 331, and is molded integrally with the housing 302. That is, the circuit board 400 divides the base end side of the measurement unit 331 into two in the width direction w.
  • a circuit chamber Rc that accommodates the circuit unit of the circuit board 400 is formed on the surface side of the measurement unit 331.
  • a sensor chamber Rs that accommodates the pressure sensor and the humidity sensor is formed on the back surface side of the measurement unit 331.
  • the circuit chamber Rc is formed by attaching the front cover 303 to the housing 302.
  • the sensor chamber Rs is formed as an indoor space communicating with the outside of the measurement unit 331 via the second sub-passage 306 and the second sub-passage 306 by attaching the back cover 304 to the housing 302.
  • a part of the circuit board 400 protrudes into the first sub-passage 305 from the partition wall 335 that partitions the circuit chamber Rc of the measurement unit 331 and the first sub-passage 305, and the measurement flow path surface of the protruding portion
  • a flow rate detection unit 602 is provided at 430.
  • the front side sub-passage groove 332 is gradually curved toward the flange 311 side, which is the base end side of the measurement unit 331, as it moves from the first sub-passage outlet 305b opening in the downstream side outer wall 338 of the measurement unit 331 toward the upstream side outer wall 336.
  • the measurement unit 331 communicates with an opening 333 that penetrates in the width direction w.
  • the opening 333 is formed along the flow direction f of the measurement target gas 30 in the main passage 124 so as to extend between the upstream outer wall 336 and the downstream outer wall 338.
  • the back side auxiliary passage groove 334 moves from the upstream outer wall 336 toward the downstream outer wall 338, and is divided into two branches between the upstream outer wall 336 and the downstream outer wall 338.
  • One of the two branches extends straight as a discharge passage and opens to the discharge port 305c of the downstream outer wall 338.
  • the other of the two branches is gradually curved to the flange 311 side, which is the base end side of the measurement unit 331, and communicates with the opening 333 as it moves to the downstream outer wall 338.
  • the back side sub-passage groove 334 forms an entrance groove into which the measurement target gas 30 flows from the main passage 124.
  • the front side sub-passage groove 332 forms an outlet groove that returns the measured gas 30 taken from the back side sub-passage groove 334 to the main passage 124.
  • a part of the measurement target gas 30 flowing through the main passage 124 is taken into the back side sub passage groove 334 from the first sub passage inlet 305 a and flows through the back side sub passage groove 334.
  • the large foreign matter contained in the gas to be measured 30 flows into the discharge passage extending straight from the branch together with a part of the gas to be measured, and enters the main passage 124 from the discharge port 305c of the downstream outer wall 338. Discharged.
  • the back side sub-passage groove 334 has a shape that becomes deeper as it travels, and as the gas to be measured 30 flows along the back side sub-passage groove 334, the back side sub-passage groove 334 gradually moves to the front side of the measuring unit 331, that is, the plus side in the width direction w. .
  • the back side sub-passage groove 334 is provided with a steeply inclined portion 334a that becomes deeper in front of the opening 333, and a part of the air having a small mass moves along the steeply inclined portion 334a. It flows on the measurement channel surface 430 side of the circuit board 400.
  • a foreign substance having a large mass is difficult to change rapidly, and therefore flows on the measurement channel surface rear surface 431 side.
  • the gas 30 to be measured that has moved to the front side through the opening 333 flows along the measurement channel surface 430 of the circuit board, and between the flow rate detection unit 602 provided on the measurement channel surface 430. Heat transfer takes place and the flow rate is measured. Both air flowing from the opening 333 to the front side sub-passage groove 332 flows along the front side sub-passage groove 332, and is discharged to the main passage 124 from the first sub-passage outlet 305 b that opens to the downstream side outer wall 338.
  • a substance having a large mass, such as dust, mixed in the measurement target gas 30 has a large inertial force, so that it rapidly advances in the deep direction of the groove along the surface of the steeply inclined portion 334a where the depth of the groove suddenly increases. It is difficult to change. For this reason, the foreign matter having a large mass moves toward the measurement channel surface rear surface 431, and the foreign matter can be prevented from passing near the flow rate detection unit 602.
  • many foreign substances having a large mass other than gas pass through the measurement channel surface rear surface 431 which is the back surface of the measurement channel surface 430, they are caused by foreign matters such as oil, carbon, and dust.
  • the influence of dirt can be reduced, and the decrease in measurement accuracy can be suppressed. That is, since it has a shape in which the path of the gas to be measured 30 is suddenly changed along an axis that crosses the flow axis of the main passage 124, the influence of foreign matter mixed in the gas to be measured 30 can be reduced.
  • the resin sealing material 353 have insulating properties, and thermosetting resins such as epoxy resins and polyurethane resins, and thermoplastic resins such as polyimide and acrylic resins can be used.
  • thermosetting resins such as epoxy resins and polyurethane resins
  • thermoplastic resins such as polyimide and acrylic resins
  • a resin containing an insulating filler such as glass can also be used.
  • FIG. 8A is a view showing the opposing surface of the sub-passage of the front cover 303
  • FIG. 8B is a cross-sectional view taken along the line DD of FIG. 8A
  • FIG. 9A is a view showing the opposing surface of the sub-passage of the back cover 304
  • FIG. 9B is a cross-sectional view taken along line EE of FIG. 9A.
  • the front cover 303 and the back cover 304 form a first sub-passage 305 by closing the front-side sub-passage groove 332 and the back-side sub-passage groove 334 of the housing 302.
  • the front cover 303 further forms a circuit chamber Rc.
  • the back cover 304 further forms a second sub-passage 306 and a sensor chamber Rs communicating with the second sub-passage 306 by closing the recess on the back side of the measuring unit 331.
  • the front cover 303 and the back cover 304 are attached to the front and back surfaces of the measuring unit 331, respectively. And it joins by the laser welding etc. along the edge of the front side subchannel groove 332 and the back side subchannel groove 334, and is joined by the laser welding etc. similarly along the edge of the circuit room Rc and the sensor room Rs.
  • a sixth region 362 for closing the front side sub-passage groove 332 of the housing 302 and a circuit chamber Rc are formed. Seven regions 363 are formed.
  • the front cover 303 is provided with a conductor 501.
  • the conductor 501 is for removing electricity so that foreign matters such as dust contained in the gas to be measured are not charged and adhere to the flow rate detection unit 602 and its surroundings, and has conductivity such as an aluminum alloy. It is comprised by the metal plate.
  • the conductor 501 is integrally formed in the front cover 303 by being insert-molded in the front cover 303.
  • a resin material containing a conductive filler such as carbon or alumina can be used in addition to the conductive metal plate.
  • the conductor 501 has a flat plate portion 502 disposed in the sixth region 362 of the front cover 303 and an arm portion 503 protruding from the flat plate portion 502 and having a tip disposed in the seventh region 363.
  • the flat plate portion 502 is at least partially exposed on the facing surface of the front cover 303, and faces at least the flow rate detection unit 602 on the measurement channel surface 430 of the circuit board 400 in the opening 333 that is the measurement channel of the housing 302. It is arranged opposite to the position.
  • the flat plate part 502 has a convex shape in which the center in the flow direction of the measurement target gas 30 protrudes in a mountain shape in order to increase the flow velocity of the measurement target gas 30 passing between the flat plate part 502 and the flow rate detection part 602.
  • the arm portion 503 has a contact portion 504 for electrical connection with the circuit board 400. The contact portion 504 contacts the intermediate member 551 in a state where the front cover 303 is attached to the housing 302. Details will be described later.
  • a first region 371A for closing the back side sub-passage groove 334 of the housing 302 On the opposite surface of the back cover 304, a first region 371A for closing the back side sub-passage groove 334 of the housing 302, a second region 371B for closing the steeply inclined portion 334a, and a third portion for closing the opening 333 of the housing 302 are provided.
  • a region 372 and a fourth region 373 that forms the sensor chamber Rs are formed.
  • FIGS. 10A is a cross-sectional view taken along the line BB of FIG. 5 before resin sealing
  • FIG. 10B is an enlarged view of a portion A of FIG. 10A
  • FIG. 11A is a cross-sectional view taken along line BB in FIG. 5 after resin sealing
  • FIG. 11B is an enlarged view of a portion B in FIG. 11A
  • 12A is a cross-sectional view taken along the line AA in FIG. 2 after the cover is bonded
  • FIG. 12B is an enlarged view of a portion C in FIG. 12A. That is, FIG. 10 to FIG. 12 are diagrams showing the manufacturing process of the physical quantity detection device 300 in order.
  • the circuit board 400 is integrally provided by insert molding when the housing 302 is molded.
  • the intermediate member 551 is bonded to the ground circuit of the circuit board 400 using a conductive adhesive or the like.
  • the intermediate member 551 has an elongated and substantially cylindrical shape, and a connection portion 555 that is one end is bonded to the circuit board 400.
  • the intermediate member 551 is a non-metallic material having an elastic property and has conductivity. Further, the length of the intermediate member 551 in the longitudinal direction is longer than the distance between the circuit board 400 and the front cover 303 at the time of completion of manufacture.
  • the material of the intermediate member 551 is preferably a material that serves to electrically connect the conductor 501 and the circuit board 400 and does not generate electrolytic corrosion due to corrosive gas, for example, containing a conductive filler such as carbon or alumina. Resin material is good.
  • a rubber-like one that is cured in advance and maintains the connection by elastic deformation due to the pressure reduction at the time of connection is used, the thermal expansion / It is more desirable because it makes it easier to secure a connection even during contraction.
  • the front side of the circuit board 400 that is, the left side in FIG. 11 is sealed with the resin sealing material 353.
  • the connection portion 555 of the intermediate member 551 and the buried portion 554 which is the side surface in the vicinity of the connection portion 555 are sealed with the resin sealing material 353.
  • the contact end 552 that is the end opposite to the connection portion 555 and the exposed portion 553 that is the side surface in the vicinity of the contact end 552 are exposed from the resin sealing material 353.
  • the front cover 303 is attached to the housing 302 as shown in FIG.
  • the conductor 501 is insert-molded in the front cover 303, and the conductor 501 has the contact portion 504.
  • the intermediate member 551 is contracted in the longitudinal direction. Therefore, the contact end 552 of the intermediate member 551 is pressed and electrically connected to the contact portion 504, and the conductor 501 is electrically connected to the ground circuit of the circuit board 400. Therefore, it is possible to remove static electricity from the flow rate detection unit 602 in the measurement channel, which is a place where the measurement target gas 30 in which the conductor 501 is disposed, and the nearby components. Thereby, it is possible to prevent foreign matter such as fine particles contained in the measurement target gas 30 from being charged and firmly attached to the flow rate detection unit 602 and the like, and to prevent deterioration in detection performance due to contamination.
  • the conductor 501 is disposed so as to efficiently prevent the charged foreign matter from adhering to the flow rate detection unit 602.
  • the conductor 501 is arranged so as to include the upstream region of the flow rate detection unit 602.
  • the gas 30 to be measured is arranged in the main passage 124 of the internal combustion engine as shown in FIG.
  • the gas 30 to be measured flows from the left to the right in FIG. 1, but slightly when the intake valve 116 is closed.
  • the gas 30 to be measured may flow in the opposite direction.
  • the conductor 501 is disposed also in the downstream region of the flow rate detection unit 602 in order to prevent foreign matter from entering the flow rate detection unit 602. That is, the range in which the conductor 501 is disposed extends upstream and downstream with the flow rate detection unit 602 as the center.
  • FIG. 13 and FIG. 14 are diagrams showing the configuration of a conventional physical quantity detection device 1300.
  • FIG. 13 is a diagram showing an external appearance of a conventional physical quantity detection device 1300
  • FIG. 14A is a diagram showing an FF cross section of FIG. 13
  • FIG. 14B is an enlarged view of a portion D of FIG.
  • differences in configuration between the conventional physical quantity detection device 1300 and the above-described physical quantity detection device 300 will be mainly described.
  • the configuration of the conventional physical quantity detection device 1300 not specifically described is the same as that of the physical quantity detection device 300.
  • the front cover 1303 is separated into a lower passage cover 1303A and an upper circuit chamber cover 1303B by the separation portion 303C.
  • the passage cover 1303 ⁇ / b> A forms a first sub-passage 305 on the front side in cooperation with the housing 302.
  • the circuit chamber cover 1303 ⁇ / b> B forms a circuit chamber Rc in cooperation with the housing 302.
  • the entire intermediate member 1551 is buried in the resin sealing material 353.
  • the contact portion 1504 of the conductor 1501 extends to the inside of the resin sealing material 353, and the intermediate member 1551 and the contact portion 1504 are in contact with each other at a location sealed with the resin sealing material 353.
  • the intermediate member 1551 does not have to have an elastic property.
  • the conductor 1501 is insert-molded in the passage cover 1303A.
  • FIG. 15 is a diagram illustrating a manufacturing process of the conventional physical quantity detection device 1300.
  • the intermediate member 1551 is bonded to the circuit board 400.
  • the passage cover 1303A is attached to the housing 302 and joined by laser welding or the like.
  • a contact portion 1504 that is the tip of the conductor 1501 formed on the passage cover 1303A is brought into contact with the intermediate member 1551.
  • the circuit board 400, the intermediate member 1551, and the contact part 1504 are sealed with a resin sealing material 353.
  • the circuit chamber cover 1303B is attached to the housing 302 and joined by laser welding or the like, whereby the conventional physical quantity detection device 1300 is manufactured as shown in FIG.
  • the physical quantity detection device 300 includes a housing 302, a circuit board 400 covered with an insulating resin sealing material 353, a circuit chamber Rc in which the circuit board 400 is disposed by a combination of the housing 302, Electrically connect the conductor 501 and the circuit board 400 through the front cover 303 that forms the first sub-passage 305 through which the measurement gas 30 passes, the conductor 501 installed in the first sub-passage 305, and the resin sealing material 353. And an intermediate member 551 connected thereto.
  • the physical quantity detection device 300 can form the circuit chamber Rc and the first sub-passage 305 using the same front cover 303. Conventionally, as shown in FIG. 13, the passage cover 1303A and the circuit chamber cover 1303B are separated. Therefore, the physical quantity detection device 300 can reduce the manufacturing cost, that is, the component cost and the assembly cost, by reducing the number of parts as compared with the related art. In addition, since the front cover 303 is not divided as in the prior art, the rigidity of the housing 302 that has a complicated shape and is likely to decrease in strength can be supplemented.
  • circuit board 400 and the conductor 501 installed in the first sub-passage 305 are electrically connected, foreign matters such as fine particles contained in the measurement target gas 30 are charged and firmly attached to the flow rate detection unit 602 and the like. This prevents adhesion and prevents deterioration in detection performance due to contamination.
  • the intermediate member 551 is a non-metallic material having an elastic property, and is electrically connected to the conductor 501 by being in pressure contact with the contact end 552 of the conductor 501. Therefore, assembly is easy.
  • the conductor 501 is integrally provided in the front cover 303. Since the conductor 501 is integrally provided at a position to be the first sub-passage 305 of the front cover 303, it is not necessary to individually arrange the conductors 501 in the first sub-passage 305, and assembly is simple. In addition, since the conductor 501 and the front cover 303 are integrated, the resistance received by the gas to be measured 30 can be reduced as compared with the case where the two are separate.
  • the intermediate member 551 is connected to the circuit board 400 so that the connection portion 555 that is one of the conductive intermediate members 551 in the longitudinal direction is in contact with the circuit board 400 provided in the housing 302. And the contact end 552 which is the other in the longitudinal direction of the intermediate member 551 is exposed from the resin sealing material 353 by using the insulating resin sealing material 353 for the circuit board 400 on which the intermediate member 551 is disposed.
  • the conductor 501 and the circuit board 400 are electrically connected to each other by press-contacting the intermediate cover 551 with the front cover 303 including the conductor 501 disposed in a location that becomes a flow path through which the measurement target gas 30 passes. Forming a circuit chamber Rc in which the circuit board 400 is disposed and a first sub-passage 305 in combination with the housing 302.
  • the attachment of the cover is reduced once.
  • the passage cover 1303A and the circuit chamber cover 1303B are joined to the housing 302 by laser welding or the like.
  • the front cover 303 may be joined to the housing 302. Therefore, it is possible to reduce the manufacturing process and to manufacture at low cost in a short time.
  • the circuit board 400 is molded integrally with the housing 302.
  • the circuit board 400 may be bonded with an adhesive or the like after the housing 302 is formed by molding.
  • the manufacturing is easy, but the rigidity is lowered. In this case, the effect of supplementing the rigidity of the housing 302 by the front cover 303 is remarkably exhibited.
  • the shape of the intermediate member 551 is not limited to a cylinder.
  • the intermediate member 551 may be a rectangular parallelepiped or a cube, and the cross section may be a polygon other than a quadrangle or an ellipse. Furthermore, the shape may change in the axial direction.
  • the conductor 501 may be disposed only in the upstream region of the flow rate detection unit 602 in the first sub-passage 305.
  • FIG. 16 is a diagram showing a cross section of the circuit board 400 and the intermediate member 551 in the second embodiment. This figure corresponds to FIG. 12B of the first embodiment.
  • the circuit board 400 has a semi-through hole 450.
  • the semi-through hole 450 has an inner diameter smaller than the outer shape of the intermediate member 551, and has a ground circuit on at least one of the inner peripheral surface and the bottom surface.
  • the length of the intermediate member 551 in the longitudinal direction is longer than the distance from the bottom surface of the semi-through hole 450 to the contact portion 504 of the conductor 501.
  • the intermediate member 551 is pressed in the radial direction by being press-fitted into the semi-through hole 450, and is further pressed in the axial direction from the front cover 303 and the circuit board 400. Therefore, the circuit board 400 and the conductor 501 are electrically connected via the intermediate member 551.
  • the intermediate member 551 is a non-metallic material having an elastic property, and is in pressure contact with the half through hole 450 formed in the circuit board 400 to be electrically connected to the circuit board 400. Therefore, the fixing of the intermediate member 551 to the circuit board 400 and the electrical connection between them can be achieved without using a conductive adhesive.
  • FIG. 17 is a diagram illustrating a cross section of the circuit board 400 and the intermediate member 551 in the first modification of the second embodiment.
  • the half through hole 450 in FIG. 16 is replaced with a through hole 460.
  • the through hole 460 has a ground circuit of the circuit board 400 on the inner peripheral side wall.
  • the inner diameter of the through hole 460 is smaller than the outer shape of the intermediate member 551.
  • the intermediate member 551 is press-fitted into the half-through hole 450 and fixed in a fitting relationship.
  • the end of the intermediate member 551 on the circuit board 400 side is sealed with a potting material 440 to prevent a corrosive gas or the like from passing through a region on the right side of the circuit board 400 in the drawing.
  • the shape of the intermediate member 551 is not limited to a cylinder. However, it is desirable to change the shape of the semi-through hole 450 according to the shape of the intermediate member 551, and it is desirable that both contact with each other over a wide area when the intermediate member 551 is press-fitted into the semi-through hole 450.
  • FIG. 3 A third embodiment of the physical quantity detection device 300 will be described with reference to FIG.
  • the same components as those in the first embodiment are denoted by the same reference numerals, and different points will be mainly described. Points that are not particularly described are the same as those in the first embodiment.
  • This embodiment is different from the first embodiment mainly in that a step is provided in the buried portion 554 of the intermediate member 551.
  • the linear expansion coefficient of the intermediate member 551 and the resin sealing material 353 are different, and a gap is generated between the intermediate member 551 and the resin sealing material 353 due to thermal expansion / contraction of each material when the surrounding environment becomes high temperature or low temperature. There is a fear. When this gap is generated, there is a possibility that the connection portion 555 communicates with the space existing between the front cover 303 and the resin sealing material 353. Then, the corrosive gas may reach the connection portion 555 and cause electric corrosion. This embodiment addresses this problem.
  • FIG. 18 is a view showing a cross section of the circuit board 400 and the intermediate member 551 in the third embodiment.
  • a first step portion 557 is provided in the buried portion 554 that is a region buried in the resin sealing material 353 of the intermediate member 551.
  • the intermediate member 551 has a substantially cylindrical shape, and the first step portion 557 has a larger radius than other regions. Therefore, a step is formed in the radial direction of the intermediate member 551 by the first step portion 557. Since the resin sealing material 353 is poured around the intermediate member 551 fixed to the circuit board 400 at the time of manufacturing the physical quantity detection device 300, the first step portion 557 is in contact with the resin sealing material 353 on all surfaces.
  • the resin sealing material 353 positioned between the first step portion 557 and the circuit board 400 becomes a sandwiching portion 558 that is sandwiched between the first step portion 557 and the circuit board 400 by either thermal expansion or thermal contraction.
  • the intermediate member 551 is fixed to the circuit board 400 by an adhesive or press-fitting.
  • the linear expansion coefficient of the intermediate member 551 is larger than that of the resin sealing material 353, a gap is generated between the intermediate member 551 and the resin sealing material 353 when the intermediate member 551 contracts in the radial direction when the temperature becomes low.
  • the natural length of the first step portion 557 to the circuit board 400 in the axial direction of the intermediate member 551 at a low temperature is larger than the natural length of the first step portion 557 to the circuit board 400 in the resin sealing material 353 at the same low temperature. short. Since the intermediate member 551 is fixed to the circuit board 400, the first step part 557 and the circuit board 400 hold the holding part 558 of the resin sealing material 353 at a low temperature, and no gap is generated. That is, in the low temperature state in this case, the first step portion 557 is in contact with the resin sealing material 353 on the right side in the drawing.
  • the intermediate member 551 has a first step portion 557 in the radial direction, and is in contact with the resin sealing material 353 on at least one surface of the first step portion 557. Therefore, even if the intermediate member 551 and the resin sealing material 353 have different linear expansion coefficients, a gap due to a temperature change can be suppressed, and airtightness can be maintained.
  • steps are formed in the intermediate member 551 by so-called protrusions.
  • a step may be formed in the intermediate member 551 by the groove.
  • FIG. 19 is a diagram showing a cross section of the circuit board 400 and the intermediate member 551 in the first modification of the third embodiment.
  • a groove is provided by reducing the diameter of a partial region of the intermediate member 551, thereby forming the first step portion 557 and the second step portion 559 in the radial direction.
  • the resin sealing material 353 that has entered the groove serves as a sandwiching portion 558.
  • the intermediate member 551 may be provided with a plurality of steps. At least one of the plurality of steps is provided so as to cover at least a part of the periphery of the intermediate member 551 in the circumferential direction.
  • FIG. 20 is a diagram illustrating a cross section of the circuit board 400 and the intermediate member 551 according to the second modification of the third embodiment.
  • a first step portion 557 and a second step portion 559 that are two circumferential protrusions are arranged in the buried portion 554 of the intermediate member 551, and the first step portion 557 and the second step portion 559 are arranged.
  • a sandwiching portion 558 is formed between them.
  • the second step portion 559 comes into contact with the surface of the circuit board 400.
  • Both the first step portion 557 and the second step portion 559 are provided so as to cover the radial direction of the intermediate member 551.
  • the depth direction positioning accuracy at the time of press-fitting of the intermediate member 551 can be improved by bringing a part of the circumferential protrusion including the second step portion 559 into contact with the circuit board 400. it can.
  • FIG. 21 is a diagram showing a plurality of variations of the intermediate member 551.
  • FIG. 21A is an appearance of the intermediate member 551 corresponding to the second modification of the third embodiment described above.
  • the cross-sectional shape of the intermediate member 551 shown in FIG. 21A may be changed to a quadrangle, and the shape shown in FIG. In the intermediate member 551 shown in FIG. 21B, all of the first stepped portion 557 and the second stepped portion 559 have four circumferential surfaces that function as steps.
  • the shape of the intermediate member 551 may be the shape shown in FIG. In the intermediate member 551 shown in FIG. 21C, two of the four circumferential surfaces function as steps. That is, in FIG. 21C, only a part of the intermediate member 551 in the circumferential direction is covered with the first step portion 557 and the second step portion 559, respectively.
  • the intermediate member 551 shown in FIG. 21 (c) is manufactured by forming a long shape connected in the normal direction of the plane by extrusion or the like, and then cutting at an arbitrary position, thereby producing a plurality of intermediate members 551 at a time. can do. In this case, the time required for molding can be greatly shortened, and the effects of improving moldability and reducing manufacturing costs can be obtained.
  • FIGS. A fourth embodiment of the physical quantity detection device 300 will be described with reference to FIGS.
  • the same components as those in the first embodiment are denoted by the same reference numerals, and different points will be mainly described. Points that are not particularly described are the same as those in the second embodiment.
  • This embodiment is different from the second embodiment mainly in that a sleeve is used.
  • FIG. 22 is a view showing a cross section in the vicinity of the intermediate member 551 in the fourth embodiment.
  • the intermediate member 551 is not in direct contact with the resin sealing material 353 but is in contact with the sleeve 560 fixed by the resin sealing material 353 and the circuit board 400.
  • the material of the sleeve 560 is preferably a resin material that does not cause electric corrosion.
  • the inner diameter of the sleeve 560 substantially matches the outer shape of the intermediate member 551 and is larger than the inner diameter of the half-through hole 450.
  • FIG. 23 A method of manufacturing the physical quantity detection device 300 according to the fourth embodiment will be described with reference to FIGS. However, the description of the same points as in the first embodiment will be omitted.
  • a sleeve 560 is installed directly above the half through hole 450 of the circuit board 400.
  • the surface of the circuit board 400 and the side surface of the sleeve 560 are covered with a resin sealing material 353 to protect the circuit board 400 and fix the position of the sleeve 560.
  • the intermediate member 551 is press-fitted into the half through hole 450 through the sleeve 560.
  • the cover is attached and the state shown in FIG. 22 is obtained.
  • the circuit board 400 may include a through hole 460 instead of the half through hole 450. Further, the circuit board 400 may not include the semi-through hole 450, and the intermediate member 551 and the circuit board 400 may be connected by an adhesive as in the first embodiment.
  • a device that measures flow rate, pressure, and humidity is shown as a physical quantity detection device.
  • the present invention is not limited to this, and a fluid flow path and a circuit are provided.
  • a chamber is formed and can be used for any physical quantity detection device intended to neutralize the substance in the flow path.
  • the present invention is not limited to the above-described embodiments and modifications, and various design changes can be made.
  • the above-described embodiment has been described in detail for easy understanding of the present invention, and is not necessarily limited to the one having all the configurations described.
  • a part of the configuration of an embodiment can be replaced with the configuration of another embodiment, and the configuration of another embodiment can be added to the configuration of an embodiment.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Fluid Mechanics (AREA)
  • Measuring Volume Flow (AREA)
  • Immunology (AREA)
  • Electrochemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Combined Controls Of Internal Combustion Engines (AREA)

Abstract

L'invention concerne un dispositif de détection de grandeur physique pourvu de : un boîtier ; une carte de circuit imprimé revêtue d'un matériau en résine isolante ; un couvercle qui, conjointement avec le boîtier, forme une chambre de circuit dans laquelle est disposée la carte de circuit imprimé et un trajet d'écoulement par lequel passe un gaz à mesurer ; un conducteur disposé dans le trajet d'écoulement ; et un élément conducteur qui passe à travers le matériau en résine et qui connecte électriquement le conducteur et la carte de circuit imprimé.
PCT/JP2018/003158 2017-04-06 2018-01-31 Dispositif de détection de grandeur physique et procédé de fabrication de dispositif de détection de grandeur physique WO2018186013A1 (fr)

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JP2017-075959 2017-04-06

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JP7077210B2 (ja) * 2018-11-22 2022-05-30 シチズンファインデバイス株式会社 圧力検出装置、回路内蔵部材、圧力検出装置の製造方法
JP7056590B2 (ja) 2019-01-15 2022-04-19 株式会社デンソー 空気流量測定装置
JP2021081307A (ja) 2019-11-19 2021-05-27 株式会社デンソー 物理量検出装置
JP2021089190A (ja) 2019-12-03 2021-06-10 株式会社デンソー 流量検出装置
CN115023591A (zh) 2020-02-20 2022-09-06 日立安斯泰莫株式会社 热式流量计

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WO2016084664A1 (fr) * 2014-11-28 2016-06-02 日立オートモティブシステムズ株式会社 Capteur de débit du type thermique
JP6433407B2 (ja) * 2015-10-28 2018-12-05 日立オートモティブシステムズ株式会社 熱式流量計
JP6475860B2 (ja) * 2015-10-28 2019-02-27 日立オートモティブシステムズ株式会社 流量計
JP6474709B2 (ja) * 2015-10-28 2019-02-27 日立オートモティブシステムズ株式会社 熱式流量計
JP6436925B2 (ja) * 2016-02-22 2018-12-12 日立オートモティブシステムズ株式会社 熱式流量計
JP6527483B2 (ja) * 2016-03-31 2019-06-05 日立オートモティブシステムズ株式会社 熱式流量計
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JP6524017B2 (ja) * 2016-05-16 2019-06-05 日立オートモティブシステムズ株式会社 熱式流量センサ

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JP2021039026A (ja) * 2019-09-04 2021-03-11 株式会社デンソー 空気流量測定装置

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