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WO2018173893A1 - Détecteur de rayonnement et dispositif d'imagerie radiographique - Google Patents

Détecteur de rayonnement et dispositif d'imagerie radiographique Download PDF

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Publication number
WO2018173893A1
WO2018173893A1 PCT/JP2018/010048 JP2018010048W WO2018173893A1 WO 2018173893 A1 WO2018173893 A1 WO 2018173893A1 JP 2018010048 W JP2018010048 W JP 2018010048W WO 2018173893 A1 WO2018173893 A1 WO 2018173893A1
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WO
WIPO (PCT)
Prior art keywords
radiation detector
base material
support member
region
conversion layer
Prior art date
Application number
PCT/JP2018/010048
Other languages
English (en)
Japanese (ja)
Inventor
信一 牛倉
赤松　圭一
中津川　晴康
西納　直行
俊輔 小平
Original Assignee
富士フイルム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 富士フイルム株式会社 filed Critical 富士フイルム株式会社
Priority to JP2018522814A priority Critical patent/JP6707130B2/ja
Priority to CN201880000743.5A priority patent/CN108966642A/zh
Priority to US16/026,056 priority patent/US10838082B2/en
Publication of WO2018173893A1 publication Critical patent/WO2018173893A1/fr

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/20—Measuring radiation intensity with scintillation detectors
    • G01T1/2006—Measuring radiation intensity with scintillation detectors using a combination of a scintillator and photodetector which measures the means radiation intensity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/241—Electrode arrangements, e.g. continuous or parallel strips or the like
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G01T1/16—Measuring radiation intensity
    • G01T1/24—Measuring radiation intensity with semiconductor detectors
    • G01T1/246—Measuring radiation intensity with semiconductor detectors utilizing latent read-out, e.g. charge stored and read-out later
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F30/00—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors
    • H10F30/20—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors
    • H10F30/21—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation
    • H10F30/22—Individual radiation-sensitive semiconductor devices in which radiation controls the flow of current through the devices, e.g. photodetectors the devices having potential barriers, e.g. phototransistors the devices being sensitive to infrared, visible or ultraviolet radiation the devices having only one potential barrier, e.g. photodiodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/12—Image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/40—Optical elements or arrangements
    • H10F77/407—Optical elements or arrangements indirectly associated with the devices

Definitions

  • the present invention relates to a radiation detector and a radiation image capturing apparatus.
  • a radiographic imaging apparatus that performs radiography for the purpose of medical diagnosis.
  • a radiation detector for detecting radiation transmitted through a subject and generating a radiographic image is used.
  • the radiation detector includes a conversion layer such as a scintillator that converts radiation into light, and a sensor substrate provided with a plurality of pixels that store charges generated according to the light converted in the conversion layer. There is.
  • a flexible base material for this sensor substrate.
  • a radiographic image capturing device radiographic detector
  • the base material that is, the sensor substrate is bent.
  • the durability and moisture resistance of the conversion layer may be reduced.
  • a sensor unit is provided by providing a buffer portion between the top plate of the housing for housing the radiation detector and the sensor substrate.
  • a technique is described that increases the rigidity of the plate and enables the top plate and the sensor substrate to be mutually reinforced.
  • a resin base material is less rigid than a glass base material, and thus is easily bent.
  • the entire base material is not bent in an integrated manner but is partially or locally bent. Continuous deflection may occur.
  • bending may occur partially or locally at the boundary between the region where the buffer portion is provided and the region where the buffer portion is not provided.
  • the present disclosure provides a radiation detector and a radiation image capturing apparatus that can suppress a sensor substrate using a flexible base material from being discontinuously bent.
  • the radiation detector includes a flexible substrate and a plurality of charges that are provided on the first surface of the substrate and accumulate charges generated according to light converted from the radiation.
  • a sensor substrate including a layer in which pixels are formed, a conversion layer provided on the side opposite to the side on which the base material is provided in the layer in which pixels are formed, and a protective film that covers at least the conversion layer And a reinforcing member that reinforces the flexible base material, and a supporting member that supports the sensor substrate together with the reinforcing member.
  • the radiation detector according to the second aspect of the present disclosure is the radiation detector according to the first aspect, wherein the reinforcing member is provided on the second surface opposite to the first surface of the base material.
  • the supporting member supports the reinforcing member with the reinforcing member sandwiched between the second surface of the base material.
  • the radiation detector according to the third aspect of the present disclosure is the radiation detector according to the second aspect, in a region outside the pixel region, which is a region where a plurality of pixels are provided on the first surface of the substrate.
  • the reinforcing member is supported by sandwiching the reinforcing member between the corresponding second surface regions.
  • the radiation detector according to the fourth aspect of the present disclosure is the radiation detector according to the second aspect, in which the plurality of pixels are provided on the outer periphery of the plurality of first pixels and the plurality of first pixels, and the radiation.
  • the use in image formation includes a plurality of second pixels different from the plurality of first pixels, and the support member is formed with a region of the second surface of the base material corresponding to the outside of the region where the first pixels are provided.
  • the reinforcing member is supported with the reinforcing member interposed therebetween.
  • the radiation detector according to the fifth aspect of the present disclosure is the radiation detector according to the second aspect, wherein the support member is reinforced between the first region corresponding to the end of the second surface of the substrate.
  • the radiation detector according to the sixth aspect of the present disclosure is the radiation detector according to the fifth aspect, in which the first support member and the second support member are thermally connected.
  • the radiation detector according to the seventh aspect of the present disclosure is the radiation detector according to the fifth aspect or the sixth aspect, in which the sensor substrate is connected to a driving unit that reads charges from a plurality of pixels.
  • One has an outer peripheral part with a connection part to be connected, and the first support member and the second support member are thermally connected outside the region of the outer peripheral part having the connection part.
  • the radiation detector according to the eighth aspect of the present disclosure is the radiation detector according to any one of the second aspect to the seventh aspect, in which the protective film further includes an outer periphery of the second surface of the substrate.
  • the support member covers the predetermined region in the part, and the support member supports the reinforcement member with the reinforcement member sandwiched between the second surface of the base material in the predetermined region.
  • the radiation detector according to the ninth aspect of the present disclosure is the radiation detector according to the eighth aspect.
  • the protective film includes a first protective film that covers at least the conversion layer, a predetermined region, and the entire first protective film. A second protective film covering the region to be included.
  • the radiation detector according to the tenth aspect of the present disclosure is the radiation detector according to the eighth aspect.
  • the protective film of the radiation detector includes a first protective film that covers at least the conversion layer, a predetermined region, and a first region. A second protective film covering a region including the end of the protective film.
  • the radiation detector according to the eleventh aspect of the present disclosure is the radiation detector according to any one of the second aspect to the tenth aspect, opposite to the surface of the conversion layer provided on the sensor substrate. And a reinforcing layer provided on the side of the surface.
  • the radiation detector according to a twelfth aspect of the present disclosure is the radiation detector according to the first aspect, wherein the conversion layer includes a pixel area in which a plurality of pixels contributing to image formation are provided, and the pixel area
  • the support member is outside the region corresponding to the pixel region on the second surface opposite to the first surface of the base material, and at the end of the conversion layer. It is provided in a region across the corresponding region.
  • the radiation detector according to a thirteenth aspect of the present disclosure is the radiation detector according to the twelfth aspect, wherein the reinforcing member is provided outside the region of the second surface of the base material where the support member is provided. Yes.
  • the reinforcing member covers the second surface of the base material in a state where the support member is provided.
  • the radiation detector according to the fifteenth aspect of the present disclosure is the radiation detector according to the twelfth aspect, in which the reinforcing member is provided with a protective film sandwiched between the conversion layer and the side opposite to the side where the sensor substrate is provided.
  • the reinforcing member is provided with a protective film sandwiched between the conversion layer and the side opposite to the side where the sensor substrate is provided.
  • at least a part of the support member and a part of the reinforcing member are opposed to each other with the sensor substrate and the conversion layer interposed therebetween.
  • the radiation detector according to the sixteenth aspect of the present disclosure is the radiation detector according to the twelfth aspect, wherein the reinforcing member is provided on the side of the conversion layer opposite to the side where the sensor substrate is provided with a protective film interposed therebetween. And a second reinforcing member provided on a second surface opposite to the first surface of the base material, with the second reinforcing member, the sensor substrate, and the conversion layer sandwiched therebetween. The at least part of the support member is opposed to the part of the first reinforcing member.
  • the radiation detector according to the seventeenth aspect of the present disclosure is the radiation detector according to the twelfth aspect, wherein the reinforcing member covers the entire sensor substrate in a state where the conversion layer, the protective film, and the support member are provided.
  • the radiation detector according to the eighteenth aspect of the present disclosure is the radiation detector according to any one of the twelfth to seventeenth aspects, wherein the thickness of the support member is greater than the thickness of the support member.
  • a radiation detector according to a nineteenth aspect of the present disclosure is the radiation detector according to any one of the first aspect to the eighteenth aspect, wherein the second detector is a second surface opposite to the first surface of the substrate. Used for imaging where radiation is irradiated on the surface.
  • the radiation detector according to the twentieth aspect of the present disclosure is the radiation detector according to any one of the first aspect to the nineteenth aspect, in which the conversion layer includes CsI.
  • a radiographic imaging device includes the radiation detector according to any one of the first to twentieth aspects and a control signal for reading out charges accumulated in a plurality of pixels.
  • a control unit that outputs a signal, a drive unit that outputs a drive signal for reading out and reading out charges from a plurality of pixels, and an electric signal corresponding to the charges read out from the plurality of pixels are input in response to the control signal.
  • a signal processing unit that generates and outputs image data corresponding to the input electrical signal.
  • the radiographic imaging device of the twenty-second aspect of the present disclosure is the radiographic imaging device of the twenty-first aspect, in which the base material, the layer in which the plurality of pixels are formed, and the conversion layer are arranged in the stacking direction.
  • the control unit and the radiation detector are provided side by side in a direction intersecting with.
  • the radiographic imaging device of the twenty-third aspect of the present disclosure is the radiographic imaging device of the twenty-first aspect, further comprising a power supply unit that supplies power to at least one of the control unit, the driving unit, and the signal processing unit.
  • a power supply unit, a control unit, and a radiation detector are arranged side by side in a direction that intersects the stacking direction in which the base material, the layer in which the plurality of pixels are formed, and the conversion layer are arranged. .
  • FIG. 3 is a cross-sectional view of the radiation detector shown in FIG. 2 along the line AA.
  • FIG. 5 is a cross-sectional view of another example of the radiation detector according to the first embodiment taken along line AA. It is sectional drawing which shows an example of the state by which the radiation detector was provided in the housing
  • FIG. 8 is a cross-sectional view taken along line AA of the radiation detector shown in FIG. 7. It is sectional drawing which shows an example of the state by which the radiation detector was provided in the housing
  • FIG. 6 is a cross-sectional view of an example when the radiation detectors of the first to sixth embodiments are further provided with a reinforcing layer. It is sectional drawing of an example of the radiation detector of 7th Embodiment. It is sectional drawing for demonstrating an example in the state which provided the radiation detector shown in FIG. 20 in the radiographic imaging apparatus. It is sectional drawing of the other example of the radiation detector of 7th Embodiment. It is sectional drawing of an example of the radiation detector of 8th Embodiment. It is sectional drawing of the other example of the radiation detector of 8th Embodiment. It is sectional drawing of the other example of the radiation detector of 8th Embodiment. It is sectional drawing of the other example of the radiation detector of 8th Embodiment. It is sectional drawing of an example of the some radiation detector in the radiographic imaging apparatus provided with two (two) radiation detectors.
  • the radiographic image capturing apparatus has a function of capturing a radiographic image of an imaging target by detecting radiation transmitted through the subject that is an imaging target and outputting image information representing the radiographic image of the subject.
  • FIG. 1 is a block diagram illustrating an example of a main configuration of an electric system in the radiographic image capturing apparatus of the present embodiment.
  • the radiographic imaging apparatus 1 of this embodiment includes a radiation detector 10, a control unit 100, a drive unit 102, a signal processing unit 104, an image memory 106, and a power supply unit 108.
  • the radiation detector 10 includes a sensor substrate 12 (see FIG. 3) and a conversion layer 30 (see FIG. 3) that converts radiation into light.
  • the sensor substrate 12 includes a flexible base material 14 and a plurality of pixels 16 provided on the first surface 14 ⁇ / b> A of the base material 14.
  • the plurality of pixels 16 may be simply referred to as “pixels 16”.
  • each pixel 16 of the present embodiment includes a sensor unit 22 that generates and accumulates charges according to light converted by the conversion layer, and a switching element 20 that reads the charges accumulated in the sensor unit 22.
  • a thin film transistor TFT: Thin Film Transistor
  • the switching element 20 is referred to as “TFT 20”.
  • the sensor unit 22 and the TFT 20 are formed, and a layer in which the pixels 16 are formed on the first surface 14A of the base material 14 is provided as a flattened layer.
  • the layer in which the pixel 16 is formed may also be referred to as “pixel 16” for convenience of explanation.
  • the pixel 16 is provided in the active area 15 of the sensor substrate 12 in one direction (a scanning wiring direction corresponding to the horizontal direction in FIG. 1, hereinafter also referred to as “row direction”) and a direction intersecting the row direction (corresponding to the vertical direction in FIG. Are arranged two-dimensionally along the signal wiring direction (hereinafter also referred to as “column direction”).
  • row direction a scanning wiring direction corresponding to the horizontal direction in FIG. 1, hereinafter also referred to as “row direction”
  • a direction intersecting the row direction corresponding to the vertical direction in FIG.
  • the arrangement of the pixels 16 is shown in a simplified manner. For example, 1024 ⁇ 1024 pixels 16 are arranged in the row direction and the column direction.
  • the radiation detector 10 includes a plurality of scanning wirings 26 for controlling the switching state (ON and OFF) of the TFT 20 provided for each row of the pixels 16, and for each column of the pixels 16.
  • a plurality of signal wirings 24 from which charges accumulated in the sensor unit 22 are read out are provided so as to cross each other.
  • Each of the plurality of scanning wirings 26 is connected to the driving unit 102 via a pad (not shown).
  • a control unit 100 which will be described later, is connected to the drive unit 102, and a drive signal is output in accordance with a control signal output from the control unit 100.
  • a drive signal that is output from the driving unit 102 and drives the TFT 20 to control the switching state flows to each of the plurality of scanning wirings.
  • each of the plurality of signal wirings 24 is connected to the signal processing unit 104 via a pad (not shown), so that the charge read from each pixel 16 is converted into an electric signal. Is output.
  • the signal processing unit 104 generates and outputs image data corresponding to the input electrical signal.
  • the signal processing unit 104 is connected to a control unit 100 described later, and the image data output from the signal processing unit 104 is sequentially output to the control unit 100.
  • An image memory 106 is connected to the control unit 100, and image data sequentially output from the signal processing unit 104 is sequentially stored in the image memory 106 under the control of the control unit 100.
  • the image memory 106 has a storage capacity capable of storing a predetermined number of image data, and image data obtained by imaging is sequentially stored in the image memory 106 every time a radiographic image is captured.
  • the control unit 100 includes a CPU (Central Processing Unit) 100A, a memory 100B including a ROM (Read Only Memory) and a RAM (Random Access Memory), and a nonvolatile storage unit 100C such as a flash memory.
  • a CPU Central Processing Unit
  • a memory 100B including a ROM (Read Only Memory) and a RAM (Random Access Memory)
  • a nonvolatile storage unit 100C such as a flash memory.
  • An example of the control unit 100 is a microcomputer.
  • the control unit 100 controls the overall operation of the radiation image capturing apparatus 1.
  • a common wiring 28 is provided in the wiring direction of the signal wiring 24 in order to apply a bias voltage to each pixel 16.
  • the common wiring 28 is connected to a bias power supply (not shown) outside the sensor substrate 12 via a pad (not shown), whereby a bias voltage is applied to each pixel 16 from the bias power supply.
  • the power supply unit 108 supplies power to various elements and circuits such as the control unit 100, the drive unit 102, the signal processing unit 104, the image memory 106, and the power supply unit 108.
  • various elements and circuits such as the control unit 100, the drive unit 102, the signal processing unit 104, the image memory 106, and the power supply unit 108.
  • FIG. 1 in order to avoid complications, illustration of wiring connecting the power supply unit 108 to various elements and various circuits is omitted.
  • FIG. 2 is a plan view of the radiation detector 10 according to the present embodiment as viewed from the second surface 14B side opposite to the first surface 14A.
  • FIG. 3 is a cross-sectional view taken along line AA of the radiation detector 10 in FIG.
  • the radiation detector 10 of the present embodiment includes a sensor substrate 12 having a base material 14 and pixels 16, a conversion layer 30, a protective film 32, a support member 34, and a reinforcing member. 36, and the reinforcing member 36, the base material 14, the pixel 16, and the conversion layer 30 are provided in this order.
  • the direction in which the reinforcing member 36, the base material 14, the pixel 16, and the conversion layer 30 are arranged is referred to as a stacking direction.
  • the substrate 14 is a resin sheet having flexibility, for example, including a plastic such as polyimide.
  • a specific example of the base material 14 is XENOMAX (registered trademark).
  • the base material 14 should just have desired flexibility, and is not limited to a resin sheet.
  • the substrate 14 may be a thin glass plate having a relatively small thickness.
  • the thickness of the base material 14 is a thickness that provides desired flexibility depending on the hardness of the material and the size of the sensor substrate 12 (area of the first surface 14A or the second surface 14B). Good.
  • the thickness may be 5 ⁇ m to 125 ⁇ m.
  • the base material 14 is a thin glass plate
  • the side is about 43 cm in size and has a thickness of 0.1 mm or less
  • the base material 14 has flexibility and is similar to the resin base material 14. Therefore, it is sufficient that the thickness is 0.1 mm or less.
  • the plurality of pixels 16 are provided in a partial region inside the first surface 14 ⁇ / b> A of the base material 14. That is, in the sensor substrate 12 of the present embodiment, the pixels 16 are not provided on the outer peripheral portion of the first surface 14 ⁇ / b> A of the base material 14.
  • the area where the pixels 16 are provided on the first surface 14 ⁇ / b> A of the base material 14 is defined as the active area 15.
  • the region of the second surface 14B on the opposite side of the active area 15 of the base material 14 is referred to as “region corresponding to the active area 15 of the second surface 14B”.
  • the active area 15 of the present embodiment is an example of the pixel region of the present disclosure.
  • the pixels 16 are provided on the first surface 14A of the base material 14 via an undercoat layer (not shown) using SiN or the like.
  • the conversion layer 30 covers the active area 15.
  • a scintillator including CsI cesium iodide
  • CsI cesium iodide
  • Examples of such a scintillator include CsI: Tl (cesium iodide to which thallium is added) and CsI: Na (cesium iodide to which sodium is added) whose emission spectrum upon X-ray irradiation is 400 nm to 700 nm. It is preferable to include. Note that the emission peak wavelength in the visible light region of CsI: Tl is 565 nm.
  • the CsI conversion layer 30 is formed as a columnar crystal directly on the sensor substrate 12 by a vapor deposition method such as a vacuum deposition method, a sputtering method, and a CVD (Chemical Vapor Deposition) method.
  • a vapor deposition method such as a vacuum deposition method, a sputtering method, and a CVD (Chemical Vapor Deposition) method.
  • the side in contact with the pixel 16 in the conversion layer 30 is the base point side in the columnar crystal growth direction.
  • the CsI conversion layer is formed directly on the sensor substrate 12 by the vapor deposition method, for example, the light converted by the conversion layer 30 is formed on the surface opposite to the side in contact with the sensor substrate 12.
  • a reflective layer (not shown) having a function of reflecting light may be provided.
  • the reflective layer may be provided directly on the conversion layer 30 or may be provided via an adhesive layer or the like.
  • a material using an organic material is preferable.
  • white PET Polyethylene Terephthalate
  • TiO 2 , Al 2 O 3 foamed white PET, polyester-based high reflection sheet, and specular reflection aluminum What used at least 1 of these as a material is preferable.
  • those using white PET as a material are preferable.
  • the conversion layer 30 can be formed on the sensor substrate 12 by a method different from the present embodiment. For example, an aluminum plate or the like obtained by vapor-depositing CsI by vapor deposition is prepared, and the side of the CsI that is not in contact with the aluminum plate is bonded to the pixel 16 of the sensor substrate 12 with an adhesive sheet or the like. Accordingly, the conversion layer 30 may be formed on the sensor substrate 12.
  • GOS Ga 2 O 2 S: Tb
  • the conversion layer 30 instead of CsI.
  • a sheet in which GOS is dispersed in a binder such as a resin is prepared by bonding a support formed of white PET or the like with an adhesive layer or the like, and the GOS support is not bonded.
  • the conversion layer 30 can be formed on the sensor substrate 12 by bonding the side and the pixel 16 of the sensor substrate 12 with an adhesive sheet or the like.
  • the reinforcing member 36 is provided on the second surface 14 ⁇ / b> B of the base material 14.
  • the reinforcing member 36 is provided on the entire second surface 14B of the base material 14.
  • the reinforcing member 36 reinforces the strength (rigidity) of the base material 14. Further, the reinforcing member 36 of the present embodiment has moisture resistance, and suppresses intrusion of moisture (moisture) from the second surface 14B of the substrate 14.
  • Examples of the reinforcing member 36 include an Alpet (registered trademark) sheet in which an aluminum sheet is laminated on an insulating sheet (film) such as polyethylene terephthalate.
  • the end portion of the first protective film 32A is bent at the corner portion 14C which is the boundary where the pixel 16 is formed on the first surface 14A of the base material 14, and the vicinity of the corner portion 14C.
  • the first protective film 32A may cover the surface of the first surface 14A.
  • the protective film 32 for example, a parylene (registered trademark) film or a moisture-proof film such as an insulating sheet such as polyethylene terephthalate is used.
  • the radiation detector 10 of the present embodiment includes a reinforcing member 36 with a reinforcing member 36 interposed between the supporting member 34 and the region 17 of the second surface 14 ⁇ / b> B of the base material 14. 36 is supported. That is, the support member 34 so-called backs the base material 14 via the protective film 32 and the reinforcing member 36 in the region 17.
  • the support member 34 is fixed to the reinforcing member 36 with an adhesive such as double-sided tape or glue.
  • the region 17 is an outer peripheral region other than the region corresponding to the active area 15 of the second surface 14B of the base material 14, and the region 17 of the present embodiment is an example of the first region of the present disclosure and a predetermined region. This corresponds to an example of the area.
  • the support member 34 of the present embodiment has higher rigidity in the in-plane direction of at least the second surface 14B than the base material 14.
  • the support member 34 include plastics such as PET (Polyethylene Terephthalate) and an aluminum plate having such a size that desired rigidity can be obtained.
  • PET Polyethylene Terephthalate
  • permeability and absorption factor of the radiation in the support member 34 are radiation. Does not significantly affect image shooting. Note that the greater the thickness L1 of the support member 34, the longer the distance from the subject to the pixel 16 (see distance L2 in FIG. 5), and thus the captured radiographic image becomes blurred. Therefore, it is preferable that the thickness L1 of the support member 34 is determined according to desired rigidity and desired image quality.
  • the radiographic imaging device 1 of the present embodiment is provided in a casing that transmits radiation and has waterproofness, antibacterial properties, and sealing properties.
  • FIG. 5 shows an example of a state in which the radiation detector 10 is provided in the housing 120 when the radiation image capturing apparatus 1 of the present embodiment is applied to a surface reading method (ISS: Irradiation Side Side Sampling).
  • ISS Irradiation Side Side Sampling
  • control board 110 and the power supply unit 108 are connected by a power supply line 114.
  • seat 116 is a copper sheet
  • FIG. 5 shows a configuration in which both the power supply unit 108 and the control board 110 are provided on one side of the radiation detector 10, specifically, on one side of the rectangular radiation detector 10.
  • the position where the power supply unit 108 and the control board 110 are provided is not limited to the form shown in FIG.
  • the power supply unit 108 and the control board 110 may be distributed on each of the two opposing sides of the radiation detector 10 or may be distributed on each of the two adjacent sides.
  • 5 shows a mode in which the power supply unit 108 and the control board 110 are formed as one component (board), the invention is not limited to the mode shown in FIG. 5, and at least one of the power supply unit 108 and the control board 110 is used. May be a plurality of components (substrates).
  • the power supply unit 108 includes a first power supply unit and a second power supply unit (both not shown), and each of the first power supply unit and the second power supply unit is provided on each of two opposing sides of the radiation detector 10. You may disperse and provide.
  • FIG. 6 shows another example of the state in which the radiation detector 10 is provided in the housing 120 when the radiation image capturing apparatus 1 of the present embodiment is applied to the ISS system.
  • a power supply unit 108 and a control board 110 are arranged in the casing 120 in a direction crossing the stacking direction.
  • the radiation detector 10, the power supply unit 108, and the control board 110 are They are provided side by side in the stacking direction.
  • a base 118 that supports the radiation detector 10 and the control board 110 is provided between the control board 110 and the power supply unit 108 and the sheet 116.
  • the base 118 for example, carbon or the like is used.
  • the base material 14 is a resin sheet or a relatively thin glass plate
  • the rigidity is lower than that of a glass base material (relatively thick glass plate), so that the substrate 14 is easily bent.
  • a resin sheet is more likely to be discontinuous than a glass plate.
  • the substrate 14 when the substrate 14 is a resin sheet or a relatively thin glass thin plate, the entire substrate 14 does not bend integrally, but is partially or locally bent or distorted.
  • the bending method is different for each position in the plane (the first surface 14A and the second surface 14B).
  • the bending and distortion that occur in such a case are bent integrally, but in the present embodiment, they are referred to as “discontinuous bending”.
  • the support member 34 sandwiches the reinforcing member 36 between the second surface 14B in the region 17 that is the outer peripheral region of the base material 14, and is reinforced.
  • the member 36 is supported. Therefore, the distortion generated at the end of the base material 14 can be suppressed by the support member 34 and the reinforcing member 36.
  • the reinforcement member 36 is provided over the whole 2nd surface 14B side of the base material 14 of the sensor board
  • the support member 34 supports the base material 14 via the reinforcing member 36 from the second surface 14B side. Therefore, according to the radiation detector 10 of the present embodiment, the reinforcing member 36 reinforces the boundary portion between the region where the support member 34 is provided in the base material 14 and the region where the support member 34 is not provided. Discontinuous bending that occurs at the boundary portion can be suppressed.
  • FIG. 7 is a plan view of the radiation detector 10 of the present embodiment as viewed from the second surface 14B side of the substrate 14.
  • FIG. 8 is a cross-sectional view taken along line AA of the radiation detector 10 in FIG.
  • FIG. 9 shows an example of a state in which the radiation detector 10 is provided in the housing 120 when the radiographic imaging device 1 of the present embodiment is applied to the ISS system.
  • the radiation detector 10 of this embodiment includes a first support member 34A and a second support member 34B instead of the support member 34 of the first embodiment.
  • the first support member 34A corresponds to the support member 34 of the first embodiment and has the same configuration and function.
  • the second support member 34B is provided in a region corresponding to the active area 15 of the second surface 14B surrounded by the first support member 34A of the reinforcing member 36.
  • the second support member 34B of the present embodiment uses a heat diffusion member having a smaller heat capacity than the first support member 34A. Further, the second support member 34B has higher rigidity than the first support member 34A.
  • a member that transmits radiation is used, and at least from the first support member 34A. Also, a member having a low radiation absorption rate and a high transmittance is used.
  • An example of the second support member 34B having such characteristics is a graphite sheet.
  • the 2nd support member 34B is supporting the reinforcement member 36 in the active area 15, according to the radiation detector 10 of this embodiment, the effect which suppresses the discontinuous bending of the sensor board
  • the radiation detector 10 has the first support member 34 ⁇ / b> A and the second support member 34 ⁇ / b> B connected to the heat transfer member 39, thereby providing the first support.
  • the member 34A and the second support member 34B are thermally connected.
  • thermally connected may be a state in which heat is conducted from one of the first support member 34A and the second support member 34B to the other, and unlike the present embodiment, the first support member 34A and the first support member 34A 2 includes a state in which the first support member 34A and the second support member 34B are not connected to each other by any member or the like, and are separated from each other by a sufficient distance to conduct heat.
  • the ISS type radiographic imaging apparatus 1 radiation is irradiated to the radiation detector 10 from the sensor substrate 12 side.
  • a subject in capturing a radiographic image, a subject is disposed between the imaging surface 120A of the housing 120 and a radiation irradiation device (not illustrated), and the radiation X transmitted through the subject through the imaging surface 120A is generated. Irradiated.
  • the subject When radiographic images are captured in this way, the subject is positioned near the imaging surface 120A, or the imaging surface 120A and the subject are in contact with each other. Therefore, heat such as the body temperature of the subject may be transmitted from the subject to the radiation detector 10 through the housing 120. In this way, the heat transmitted from the subject is often not partially transmitted into the active area 15 but partially transmitted. Therefore, heat distribution may occur in the active area 15 of the sensor substrate 12. Thus, the heat distribution generated in the active area 15 causes image unevenness in the captured radiographic image.
  • the heat transmitted through the housing 120 can be dispersed in the active area 15 by the second support member 34B. Moreover, since heat can be transferred from the second support member 34B to the first support member 34A by the heat transfer member 39, unevenness of heat distribution in the active area 15 can be reduced.
  • the first support member 34 ⁇ / b> A and the side surface of the housing 120 are connected by the heat transfer member 122. Yes.
  • the case 120 is connected to the housing 120 via the heat transfer member 122. Heat can be lost.
  • FIG. 10 shows a cross-sectional view of an example of the radiation detector 10 of the present embodiment.
  • the protective film 32 of the present embodiment covers the conversion layer 30 and further covers the region up to the region 17.
  • the protective film 32 is formed from the surface of the conversion layer 30 (the surface on the side not in contact with the pixel 16), the side surface of the conversion layer 30, the side surface of the pixel 16, and the outer periphery of the first surface 14A.
  • the entire region extending around the region 17 of the reinforcing member 36 is covered around the side surface of the material 14.
  • Examples of such a protective film 32 include a parylene film and an insulating sheet.
  • the protective film 32 can be formed by vapor deposition.
  • the protective film 32 can be provided by bonding with an adhesive or the like.
  • the protective film 32 covers the conversion layer 30 and the pixels 16, and further covers up to the region 17 in the outer peripheral portion of the reinforcing member 36. Even when it bends, the conversion layer 30 becomes difficult to peel off. Further, in the radiation detector 10 of the present embodiment, since the support member 34 supports the region 17 which is the outer peripheral region of the base material 14 with the reinforcing member 36 sandwiched between and the protective film 32, the sensor substrate 12. Even if the flexible base material 14 is bent, the support member 34 suppresses the bending in the region 17. Therefore, since the protective film 32 is less likely to be peeled off from the sensor substrate 12 and the conversion layer 30, the effect of suppressing the peeling of the conversion layer 30 can be further enhanced.
  • the image quality of the generated radiation is lowered.
  • the radiation detector 10 of this embodiment since the peeling of the conversion layer 30 is suppressed and the decrease in moisture proof is suppressed, it is possible to suppress a decrease in image quality of the generated radiation image.
  • the 1st support member 34A, the 2nd support member 34B, the reinforcement member 36, and the heat-transfer member 39 are provided similarly to the radiation detector 10 of 2nd Embodiment. Therefore, similarly to the radiation detector 10 of the second embodiment, the effect of suppressing the discontinuous bending of the sensor substrate 12 can be further enhanced, and the unevenness of the heat distribution in the active area 15 can be reduced. Can do.
  • FIG. 11 shows a cross-sectional view of an example of the radiation detector 10 of the present embodiment.
  • the radiation detector 10 of the present embodiment includes two protective films, a first protective film 32A and a second protective film 32B, instead of the protective film 32 of the radiation detector 10 of the first embodiment. Yes.
  • the first protective film 32A is provided in the same manner as the first protective film 32A of the radiation detector 10 of the first embodiment, and the surface of the conversion layer 30 (on the side not in contact with the pixel 16). Surface), the side surface of the conversion layer 30, and the side surface of the pixel 16.
  • the second protective film 32B covers the region including the region 17 and the entire first protective film 32A. Specifically, the second protective film 32B covers the conversion layer 30 and the pixels 16 covered with the first protective film 32A, and covers the same region as the protective film 32 of the third embodiment.
  • Such a first protective film 32A includes, for example, a parylene film, and in this case, the first protective film 32A can be formed by vapor deposition.
  • the second protective film 32B includes, for example, an insulating sheet. In this case, the second protective film 32B can be provided by bonding with an adhesive or the like.
  • the double-sealing is performed by covering the surface and side surfaces of the conversion layer 30 with the first protective film 32A and the second protective film 32B.
  • the moisture-proof performance for the conversion layer 30 can be further enhanced.
  • CsI is weak against moisture, and there is a concern that the image quality of a radiographic image is deteriorated when moisture penetrates into the radiation detector 10. Therefore, when CsI is used for the conversion layer 30, it is preferable to further improve the moisture-proof performance for the conversion layer 30 as in the radiation detector 10 of the present embodiment.
  • the 1st support member 34A, the 2nd support member 34B, the reinforcement member 36, and the heat-transfer member 39 are provided similarly to the radiation detector 10 of 2nd Embodiment. Therefore, similarly to the radiation detector 10 of the second embodiment, the effect of suppressing the discontinuous bending of the sensor substrate 12 can be further enhanced, and the unevenness of the heat distribution in the active area 15 can be reduced. Can do.
  • FIG. 12 shows a cross-sectional view of an example of the radiation detector 10 of the present embodiment.
  • the radiation detector 10 of the present embodiment includes two protective films, a first protective film 32A and a second protective film 32B, instead of the protective film 32 of the radiation detector 10 of the first embodiment. ing.
  • the first protective film 32A of the present embodiment covers at least the conversion layer 30.
  • the first protective film 32A of the present embodiment is provided in the same manner as the first protective film 32A of the radiation detector 10 of the first embodiment, and the surface of the conversion layer 30 (in contact with the pixel 16). And the side surface of the conversion layer 30 and the side surface of the pixel 16 are covered.
  • the second protective film 32B covers the region 17 and the region including the end portion of the first protective film 32A.
  • the second protective film 32B includes the region 17 of the reinforcing member 36, the side surface of the base material 14, the region 17 of the first surface 14A of the base material 14, and the end region of the first protective film 32A. Covering.
  • the region of the end portion of the first protective film 32A covered by the second protective film 32B is a region within a predetermined range from the outer periphery of the first protective film 32A.
  • the predetermined range includes the position of the end portion of the first protective film 32A on the side surface of the conversion layer 30 or the side surface of the pixel 16, and the second protective film 32B and the first protective film 32A necessary to support the conversion layer 30. Based on the contact area and the like, it may be an experimentally obtained range.
  • the first protective film 32A examples include a parylene film or an insulating sheet. In the case of a parylene film, the first protective film 32A can be formed by vapor deposition. The first protective film 32A can be provided by bonding with an adhesive or the like.
  • the second protective film 32B for example, an insulating sheet or the like can be cited, and in this case, the second protective film 32B can be provided by bonding with an adhesive or the like.
  • the first protective film 32A and the second protective film 32B are integrated by bonding the first protective film 32A and the second protective film 32B with an adhesive or the like. I am letting.
  • the first protective film 32A covers the surface and side surfaces of the conversion layer 30 and the side surfaces of the pixels 16, and the second protective film 32B is formed on the base material 14.
  • the first surface 14A and the reinforcing member 36 corresponding to the region 17 in the outer peripheral portion, the side surface of the base material 14, and the region of the end portion of the first protective film 32A are covered. Therefore, similarly to the radiation detector 10 of the first embodiment, it is possible to enhance the effect of suppressing the peeling of the conversion layer 30 and suppressing the decrease in moisture resistance.
  • the 1st support member 34A, the 2nd support member 34B, the reinforcement member 36, and the heat-transfer member 39 are provided similarly to the radiation detector 10 of 2nd Embodiment. Therefore, similarly to the radiation detector 10 of the second embodiment, the effect of suppressing the discontinuous bending of the sensor substrate 12 can be further enhanced, and the unevenness of the heat distribution in the active area 15 can be reduced. Can do.
  • FIG. 13 shows a cross-sectional view of an example of the radiation detector 10 of the present embodiment.
  • the radiation detector 10 of the present embodiment includes two protective films, a first protective film 32A and a second protective film 32B, instead of the protective film 32 of the radiation detector 10 of the first embodiment. Yes.
  • the first protective film 32A in the radiation detector 10 of the present embodiment is the same as the protective film 32 of the third embodiment.
  • the second protective film 32 ⁇ / b> B of the present embodiment has a first protective film 32 ⁇ / b> A in a region near the corner 14 ⁇ / b> C that is a boundary between the first surface 14 ⁇ / b> A of the substrate 14 and the pixel 16. Covered through. Specifically, the second protective film 32B covers the region from the region corresponding to the region 17 of the base material 14 to the side surface of the pixel 16 and a part of the side surface of the conversion layer 30 via the first protective film 32A. Yes.
  • the conversion layer is formed in the same manner as the radiation detector 10 of the third embodiment.
  • the effect of suppressing the peeling of 30 and suppressing the decrease in moisture resistance can be enhanced.
  • the 1st support member 34A, the 2nd support member 34B, the reinforcement member 36, and the heat-transfer member 39 are provided similarly to the radiation detector 10 of 2nd Embodiment. Therefore, similarly to the radiation detector 10 of the second embodiment, the effect of suppressing the discontinuous bending of the sensor substrate 12 can be further enhanced, and the unevenness of the heat distribution in the active area 15 can be reduced. Can do.
  • the radiation detectors 10 of the first to sixth embodiments are provided on the flexible base material 14 and the first surface 14A of the base material 14, and light converted from radiation.
  • a sensor substrate 12 including a layer on which a plurality of pixels 16 for accumulating electric charges generated according to the above are formed, and a conversion for converting radiation into light provided on the side opposite to the base material 14 in the layer on which the pixels 16 are formed.
  • a support member 34 that supports the reinforcement member 36 with the reinforcement member 36 interposed between the surface 14B and the surface 14B.
  • the support members 34 and 34A (hereinafter collectively referred to as “support member 34” if not distinguished) are provided in the region 17 that is the outer peripheral region of the base material 14.
  • the reinforcing member 36 is sandwiched between the second surface 14B and the reinforcing member 36 is supported. Therefore, the distortion generated at the end of the base material 14 can be suppressed by the support member 34 and the reinforcing member 36.
  • the reinforcement member 36 is provided over the 2nd surface 14B side of the base material 14 of the sensor board
  • the support member 34 supports the base material 14 via the reinforcing member 36 from the second surface 14B side. Therefore, according to the radiation detector 10 of each of the above embodiments, the reinforcing member 36 reinforces the boundary portion between the region where the support member 34 is provided in the base material 14 and the region where the support member 34 is not provided. , It is possible to suppress the discontinuous bending that occurs in the boundary portion.
  • the radiation detector 10 of the first to sixth embodiments it is possible to suppress the sensor substrate 12 using the flexible base material 14 from being bent discontinuously.
  • the form in which the support member 34 is provided in the entire region 17 that is a region outside the region corresponding to the active area 15 of the second surface 14B of the base material 14 has been described.
  • the position, number, and the like of the support member 34 are not limited to the above embodiments.
  • a specific supporting member 34 is provided. It goes without saying that the size and arrangement of the individual support members 34 when there are a plurality of the support members 34 are not limited.
  • support members 34 may be provided at each of the four corners of the sensor substrate 12. Further, for example, as shown in FIG. 15, a support member 34 may be provided at the center of each of the four sides of the sensor substrate 12. Also, for example, as shown in FIG. 16, a plurality of support members 34 (16 in FIG. 16) are placed on the peripheral edge 14S on the inner side by a predetermined distance from the outer periphery 14O of the second surface 14B of the substrate 14, along the peripheral edge 14S. May be provided. In the radiation detector 10 shown in FIG. 16, the peripheral edge 14 ⁇ / b> S where the support member 34 is provided is the boundary between the active area 15 and the region 17, but is not particularly limited.
  • the total length of the plurality of support members 34 along the peripheral edge 14S is not less than one half of the length of the peripheral edge 14S and less than the length of the peripheral edge 14S.
  • the effect which suppresses the bending in 17 can be improved more.
  • the form in which the support members 34 are provided on all sides of the rectangular sensor substrate 12 has been described.
  • the support members 34 may be provided only on a part of the sides of the sensor substrate 12. .
  • the heat transfer member 39 that thermally connects the first support member 34A and the second support member 34B is provided on all sides of the rectangular sensor substrate 12.
  • the heat transfer member 39 may be provided only on a part of the sensor substrate 12.
  • a flexible cable such as the flexible cable 112 that connects at least one of the driving unit 102, the signal processing unit 104, and the control unit 100 (control board 110) and the sensor board 12 (the first cable and the second cable of the present disclosure).
  • the heat transfer member 39 may not be provided on the side of the sensor substrate 12 having a terminal (not shown) to which is connected. For example, FIG.
  • each of the sides 12_l1 and 12_l2 of the sensor substrate 12 has a terminal (not shown) to which a flexible cable is connected.
  • the heat transfer member 39 is not provided on each of the side 12 — 11 and the side 12 — 12.
  • Each circuit unit in the driving unit 102, the signal processing unit 104, and the control unit 100 may be vulnerable to heat.
  • the heat transfer member 39 is not provided on the side of the sensor substrate 12 having a terminal (not shown) to which the flexible cable is connected. The form is preferred.
  • the entire area where the pixels 16 are provided is described as the active area 15.
  • the area as the active area 15 is limited to each of the above embodiments. Is not to be done.
  • the active area 15 may be specified by a region corresponding to some of the pixels 16 among the plurality of pixels 16.
  • the radiation detector 10 has a pixel 16 that is different from the plurality of first pixels 16 ⁇ / b> A substantially corresponding to the pixels of the radiation image in the use in forming the radiation image, and the first pixel.
  • a plurality of second pixels 16B provided on the outer periphery of 16A may be provided.
  • the different usage in the formation of the radiographic image means, for example, the case where it is used for image correction, and also the case where the charge is not used in the formation of the radiographic image and the charge is discarded.
  • the area where the first pixel 16 ⁇ / b> A is provided is defined as the active area 15.
  • the conversion layer 30 may be larger than the active area 15, and the conversion layer 30 may cover the entire active area 15.
  • the conversion layer 30 is made larger than the active area 15 in the case of considering the deviation of the vapor deposition position or the bonding position with respect to the sensor substrate 12 in the formation of the conversion layer 30.
  • the form in which the reinforcing member 36 and the support member 34 are provided to reinforce the bending of the sensor substrate 12 has been described.
  • the bending of the sensor substrate 12 has been described.
  • other members may be further provided.
  • a reinforcing layer may be further provided on the side of the conversion layer 30 opposite to the side provided on the sensor substrate 12.
  • the reinforcing layer 37 is provided on the surface of the conversion layer 30 opposite to the surface provided on the sensor substrate 12.
  • the base member 14 and the conversion layer 30 are sandwiched between the reinforcing member 36 and the reinforcing layer 37.
  • the reinforcing layer 37 faces the support member 34 with the sensor substrate 12 interposed therebetween in a region straddling the end 30 ⁇ / b> C of the conversion layer 30. Therefore, the end 30 ⁇ / b> C of the conversion layer 30 is fixed by the reinforcing member 36 and the reinforcing layer 37, so that the conversion layer 30 can be prevented from peeling from the base material 14.
  • the same member as the reinforcement member 36 may be used, for example, and even if it is the same member, the reinforcement layer 37 is thinner and the thickness is different. The flexibility may be different.
  • the support member 34 supports the reinforcement member 36 with the reinforcement member 36 sandwiched between the second surface 14B of the base material 14, and the reinforcement member 36 is
  • the configuration of the radiation detector 10 other than the support member 34 and the reinforcing member 36 is the same as the radiation detector 10 shown in FIG. Since it is the same as that of the radiation detector 10 of 1st Embodiment, detailed description is abbreviate
  • FIG. 20 sectional drawing of an example of the radiation detector 10 of this embodiment is shown.
  • the support member 34 of the present embodiment is an area outside the area corresponding to the active area 15 and corresponding to the end 30 ⁇ / b> C of the conversion layer 30 on the second surface 14 ⁇ / b> B of the base material 14. It is provided in the area straddling.
  • the reinforcing member 36 is provided outside the region of the second surface 14B of the base material 14 where the support member 34 is provided.
  • the support member 34 covers the entire area of the second surface 14B of the base material 14 where the support member 34 is not provided.
  • the support member 34 and the reinforcing member 36 are similarly provided on the second surface 14B of the base material 14.
  • the thickness is different, and the thickness of the support member 34 is greater than the thickness of the reinforcing member 36.
  • the manufacturing process of the radiographic imaging device 1 When the radiation detector 10 using the flexible base material 14 as the sensor substrate 12 is handled alone as in the first to sixth embodiments and the present embodiment, for example, the manufacturing process of the radiographic imaging device 1
  • the flexible base material 14 in the sensor substrate 12 is bent, for example, when handling in a so-called manufacturing process, for example, until it is provided in the housing 120, it corresponds to the end portion 30C of the conversion layer 30.
  • end position There is a high possibility that discontinuous bending occurs in the base material 14 at the position (hereinafter referred to as “end position”).
  • end position When discontinuous bending occurs in the sensor substrate 12 at the end position, the conversion layer 30 is easily peeled off from the sensor substrate 12.
  • the support member 34 extends beyond the region corresponding to the active area 15 of the second surface 14B of the substrate 14 and straddles the region corresponding to the end 30C of the conversion layer 30. That is, it is provided at the end position. Therefore, according to the radiation detector 10 of this embodiment, even when the base material 14 bends, the conversion layer 30 becomes difficult to peel from the sensor substrate 12.
  • the reinforcing member 36 is provided on the base material 14B of the base material 14, the rigidity of the base material 14 can be reinforced, and a flexible base is provided. It is possible to suppress the sensor board 12 using the material 14 from being bent discontinuously.
  • the radiation detector 10 of the present embodiment When the radiation detector 10 of the present embodiment is housed in the housing 120 to form the radiation image capturing apparatus 1, the base material 14 and the conversion layer 30 are sandwiched between them as in the example shown in FIG. It is preferable that a rib 50 for supporting and fixing the radiation detector 10 is disposed at a position facing the support member 34. In the example shown in FIG. 21, the end 30 ⁇ / b> C of the conversion layer 30 is fixed by the support member 34 and the rib 50, so that the conversion layer 30 can be further prevented from peeling from the base material 14.
  • the specific arrangement of the reinforcing members 36 provided on the second surface 14B of the base material 14 is not limited to the form shown in FIG.
  • the reinforcing member 36 may be provided in a region that covers the second surface 14 ⁇ / b> B of the base material 14 in a state where the supporting member 34 is provided.
  • the first to sixth embodiments are described above.
  • the support member 34 may be provided up to the position of the end of the base material 14.
  • FIG. 23 shows a cross-sectional view of an example of the radiation detector 10 of the present embodiment.
  • the support member 34 is the conversion layer outside the region corresponding to the active area 15 of the second surface 14 ⁇ / b> B of the material 14, similarly to the support member 34 in the radiation detector 10 of the seventh embodiment. It is provided in a region straddling a region corresponding to 30 end portions 30C, that is, an end portion position.
  • the support member 34 is provided up to the position of the end of the base material 14, but is the same as the radiation detector 10 of the seventh embodiment.
  • the support member 34 may be provided only to the inside of the end portion of the base material 14.
  • the reinforcing member 36 of the present embodiment is provided on the opposite side of the conversion layer 30 from the sensor substrate 12 with a protective film 32 interposed therebetween.
  • the support member 34 and a part of the reinforcing member 36 face each other with the sensor substrate 12 and the conversion layer 30 interposed therebetween. ing.
  • the reinforcing member 36 and the support member 34 are opposed to each other with the sensor substrate 12 interposed therebetween in a region (end portion position) straddling the end portion 30C of the conversion layer 30. . Therefore, since the end portion 30 ⁇ / b> C of the conversion layer 30 is fixed by the support member 34 and the reinforcing member 36, it is possible to suppress the conversion layer 30 from peeling from the base material 14.
  • the reinforcing member 36 is provided on the opposite side of the conversion layer 30 from the sensor substrate 12 with the protective film 32 interposed therebetween, the rigidity of the base material 14 is reinforced. It is possible to suppress the sensor substrate 12 using the flexible base material 14 from being bent discontinuously.
  • the reinforcing member 36 only needs to be provided at least at a position in the conversion layer 30 on the opposite side of the sensor substrate 12 from the protective film 32, and the specific arrangement is not limited to the form shown in FIG. .
  • the reinforcing member 36 may be disposed so as to cover the entire sensor substrate 12 in which the conversion layer 30, the protective film 32, and the support member 34 are provided.
  • the radiation detector 10 may include a plurality of reinforcing members 36.
  • the radiation detector 10 includes a first reinforcing member 36 ⁇ / b> A provided on the opposite side of the conversion layer 30 from the sensor substrate 12 with the protective film 30 interposed therebetween, and the base material 14. It is good also as a form containing the 2nd reinforcement member 36B provided in the 2nd surface 14B.
  • the sensor board 12 since the sensor board 12 is sandwiched between the first reinforcing member 36A and the second reinforcing member 36B, it is possible to further suppress the sensor board 12 using the flexible base material 14 from being flexed discontinuously. it can.
  • the radiation detectors 10 of the seventh and eighth embodiments are provided on the flexible base material 14 and the first surface 14A of the base material 14 and light converted from radiation. And a plurality of pixels contributing to image formation on the side opposite to the base material 14 in the layer on which the pixels 16 are formed.
  • a conversion layer 30 that converts the radiation into light a protective film 32 that covers at least the conversion layer 30, and a flexible substrate.
  • the reinforcing member 36 that reinforces the rigidity of the base material 14 is provided and corresponds to the active area 15 of the second surface 14B of the base material 14. Outside the region, the support member 34 is provided in a region straddling the region corresponding to the end 30C of the conversion layer 30, that is, the end position.
  • the radiation detectors 10 of the seventh and eighth embodiments it is possible to suppress the sensor substrate 12 using the flexible base material 14 from being bent discontinuously, and the base material 14.
  • the conversion layer 30 is difficult to peel off from the sensor substrate 12 even when is bent.
  • the radiation image capturing apparatus 1 includes one radiation detector 10.
  • the radiation image capturing apparatus 1 may include a plurality of radiation detectors 10. Good.
  • the radiographic image capturing apparatus 1 may be configured such that the ISS type radiation detectors 10_1 and 10_2 are overlapped in the direction in which the radiation is irradiated.
  • the radiation detector 10_1 in which the conversion layer 30_1 using CsI is formed by directly depositing on the sensor substrate 12_1 in which the pixel 16_1 is provided on the flexible base material 14_1 is used as the radiation detector 10_1. It is arranged at a position close to the irradiation side.
  • the radiation detector 10_1 in which the conversion layer 30_2 is formed by bonding the GOS sheet to the sensor substrate 12_2 provided with the pixel 16_2 on the flexible base material 14_2 is disposed at a position away from the radiation irradiation side. is doing.
  • the radiation detector 10_1 is provided with a protective film 32_1, a support member 34_1, and a reinforcing member 36_1, and the radiation detector 10_2 is protected. The state where the film 32_2, the support member 34_2, and the reinforcing member 36_2 are provided is shown.
  • a buffer layer 40 that is permeable to radiation on the surface of the reinforcing member 36_1 that is not in contact with the base material 14. Further, since the tip of the CsI columnar crystal of the conversion layer 30_1 faces the radiation detector 10_2 side, in order to prevent damage to the tip of the columnar crystal and its peripheral part, the reinforcing member 36_2 and the protective film 32_1 It is preferable to provide a buffer layer 42 having transparency to visible light in between.
  • the mode in which the pixels 16 are two-dimensionally arranged in a matrix as shown in FIG. 1 has been described.
  • the present invention is not limited to this.
  • a one-dimensional arrangement may be used. It may be an array.
  • the shape of the pixel is not limited, and may be a rectangle or a polygon such as a hexagon.
  • the shape of the active area 15 is not limited.
  • the configurations and manufacturing methods of the radiographic imaging device 1 and the radiation detector 10 described in the above embodiments are examples, and can be changed according to the situation without departing from the gist of the present invention. Needless to say.

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Abstract

L'invention concerne un détecteur de rayonnement comprenant : un substrat de capteur qui comprend un substrat flexible et une couche disposée sur une première surface du substrat, ladite couche ayant formé à l'intérieur de celle-ci une pluralité de pixels qui stockent une charge générée en fonction de la lumière convertie à partir du rayonnement ; une couche de conversion qui convertit un rayonnement en lumière, et est disposée sur le côté opposé au substrat de la couche dans laquelle les pixels sont formés ; un film protecteur qui recouvre au moins la couche de conversion ; un élément de renforcement qui est disposé sur une seconde surface du substrat sur le côté opposé à la première surface ; et un élément de support qui supporte l'élément de support, ledit élément de support étant pris en sandwich entre la seconde surface du substrat et l'élément de support. La présente invention concerne un détecteur de rayonnement et un dispositif d'imagerie radiographique qui permettent de supprimer la flexion discontinue d'un substrat de capteur dans lequel un substrat flexible est utilisé.
PCT/JP2018/010048 2017-03-22 2018-03-14 Détecteur de rayonnement et dispositif d'imagerie radiographique WO2018173893A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2018522814A JP6707130B2 (ja) 2017-03-22 2018-03-14 放射線検出器及び放射線画像撮影装置
CN201880000743.5A CN108966642A (zh) 2017-03-22 2018-03-14 放射线检测器以及放射线图像摄影装置
US16/026,056 US10838082B2 (en) 2017-03-22 2018-07-03 Radiation detector and radiographic imaging apparatus

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JP2017056559 2017-03-22
JP2017-056559 2017-03-22
JP2018-025803 2018-02-16
JP2018025803 2018-02-16

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US16/026,056 Continuation US10838082B2 (en) 2017-03-22 2018-07-03 Radiation detector and radiographic imaging apparatus

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JP (2) JP6707130B2 (fr)
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