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WO2018143419A1 - Système de distribution de liquide - Google Patents

Système de distribution de liquide Download PDF

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Publication number
WO2018143419A1
WO2018143419A1 PCT/JP2018/003630 JP2018003630W WO2018143419A1 WO 2018143419 A1 WO2018143419 A1 WO 2018143419A1 JP 2018003630 W JP2018003630 W JP 2018003630W WO 2018143419 A1 WO2018143419 A1 WO 2018143419A1
Authority
WO
WIPO (PCT)
Prior art keywords
space
case portion
supply system
liquid supply
case
Prior art date
Application number
PCT/JP2018/003630
Other languages
English (en)
Japanese (ja)
Inventor
清隆 古田
大澤　芳夫
森　浩一
Original Assignee
イーグル工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by イーグル工業株式会社 filed Critical イーグル工業株式会社
Priority to KR1020197021421A priority Critical patent/KR20190098219A/ko
Priority to US16/482,760 priority patent/US20190353148A1/en
Priority to CN201880007290.9A priority patent/CN110192032A/zh
Priority to EP18747527.2A priority patent/EP3578812A1/fr
Priority to JP2018566132A priority patent/JPWO2018143419A1/ja
Publication of WO2018143419A1 publication Critical patent/WO2018143419A1/fr

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/08—Machines, pumps, or pumping installations having flexible working members having tubular flexible members
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25B—REFRIGERATION MACHINES, PLANTS OR SYSTEMS; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS
    • F25B9/00—Compression machines, plants or systems, in which the refrigerant is air or other gas of low boiling point
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F04B2015/082—Helium
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B15/00—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts
    • F04B15/06—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure
    • F04B15/08—Pumps adapted to handle specific fluids, e.g. by selection of specific materials for pumps or pump parts for liquids near their boiling point, e.g. under subnormal pressure the liquids having low boiling points
    • F04B2015/081—Liquefied gases
    • F04B2015/0824—Nitrogen
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B2201/00—Pump parameters
    • F04B2201/08—Cylinder or housing parameters
    • F04B2201/0801—Temperature
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2210/00—Working fluid
    • F05B2210/10—Kind or type
    • F05B2210/11—Kind or type liquid, i.e. incompressible
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F25—REFRIGERATION OR COOLING; COMBINED HEATING AND REFRIGERATION SYSTEMS; HEAT PUMP SYSTEMS; MANUFACTURE OR STORAGE OF ICE; LIQUEFACTION SOLIDIFICATION OF GASES
    • F25D—REFRIGERATORS; COLD ROOMS; ICE-BOXES; COOLING OR FREEZING APPARATUS NOT OTHERWISE PROVIDED FOR
    • F25D19/00—Arrangement or mounting of refrigeration units with respect to devices or objects to be refrigerated, e.g. infrared detectors

Definitions

  • the present invention relates to a liquid supply system for supplying an ultra-low temperature liquid.
  • the ultra-low temperature liquid is forced to flow directly into the flow path passing through the pump chamber, and it takes a long time to cool the flow path and operate the pump. It was.
  • An object of the present invention is to provide a liquid supply system capable of shortening the time spent for precooling and shortening the time required to operate the pump.
  • the present invention employs the following means in order to solve the above problems.
  • the liquid supply system of the present invention is A container having a pump chamber therein and having a suction port and a delivery port for the cryogenic liquid; A shaft member that reciprocates in the vertical direction in the container; A bellows that expands and contracts as the shaft member reciprocates; A pump chamber formed by a space surrounding the outer peripheral surface of the bellows; A liquid supply system comprising: The container is A first case part in which a flow path passing through the pump chamber is formed; A second case portion provided so as to surround the outer wall surface of the first case portion; With The space between the first case part and the second case part is configured to allow a pre-cooling ultra-low temperature liquid to flow therethrough.
  • the flow path provided in the first case portion can be cooled in advance by circulating the ultra-low temperature liquid for precooling in the space between the first case portion and the second case portion. .
  • the said flow path can be cooled in a short time by flowing an ultra-low-temperature liquid into the said flow path after that. Therefore, it is possible to shorten the time required to operate the pump.
  • the space between the first case part and the second case part may be maintained in a vacuum state by removing the ultra-low temperature liquid after pre-cooling.
  • the space between the first case part and the second case part can have a heat insulating function.
  • a sealed space different from the liquid supply flow path passing through the pump chamber is provided in the first case portion, and the space between the sealed case and the first case portion and the second case portion is provided. It is good that the space of is connected.
  • a third case portion surrounding the second case portion is provided, and a sealed space in which a vacuum state is maintained is formed between the second case portion and the third case portion.
  • the time spent for pre-cooling can be shortened, and the time required for operating the pump can be shortened.
  • FIG. 1 is a schematic configuration diagram of a liquid supply system according to Embodiment 1 of the present invention.
  • FIG. 2 is a schematic configuration diagram of a liquid supply system according to Embodiment 2 of the present invention.
  • Example 1 With reference to FIG. 1, the liquid supply system which concerns on Example 1 of this invention is demonstrated.
  • the liquid supply system according to the present embodiment is suitably used, for example, to maintain the superconducting device in an ultra-low temperature state. That is, in a superconducting device, it is necessary to always cool a superconducting coil or the like. Therefore, the apparatus to be cooled is always cooled by always supplying the cryogenic liquid (liquid nitrogen or liquid helium) to the apparatus to be cooled provided with a superconducting coil. More specifically, by providing a circulation flow path that passes through the apparatus to be cooled and attaching the liquid supply system according to the present embodiment to the circulation flow path, the ultra low temperature liquid is circulated so that the apparatus to be cooled is always kept in place. It can be cooled.
  • the cryogenic liquid liquid nitrogen or liquid helium
  • FIG. 1 is a schematic configuration diagram of the entire liquid supply system according to the first embodiment of the present invention, and is a diagram showing a schematic configuration of the entire liquid supply system in cross-section.
  • FIG. 1 the schematic structure by the cross section cut
  • the liquid supply system 10 includes a liquid supply system main body (hereinafter referred to as the system main body 100), a vacuum container 200 in which the system main body 100 is installed, and piping (a suction pipe 310 and a delivery pipe 320). And. Both the suction pipe 310 and the delivery pipe 320 enter the inside of the vacuum container 200 from the outside of the vacuum container 200 and are connected to the system main body 100. The inside of the vacuum container 200 is sealed, and the space outside the system main body 100, the suction pipe 310, and the delivery pipe 320 is maintained in a vacuum state in the vacuum container 200. Thereby, this space has a heat insulating function.
  • the liquid supply system 10 is usually installed on a horizontal plane. In the state where the liquid supply system 10 is installed, the upper side in FIG. 1 is the upper side in the vertical direction, and the lower side in FIG. 1 is the lower side in the vertical direction.
  • the system main body 100 includes a linear actuator 110 serving as a driving source, a shaft member 120 that reciprocates in the vertical direction by the linear actuator 110, and a container 130.
  • the linear actuator 110 may be fixed at an arbitrary location, and the location to be fixed may be fixed to the container 130 or may be fixed to another location not shown.
  • the container 130 includes a first case portion 131 and a second case portion 132 provided so as to surround the outer wall surface of the first case portion 131.
  • the shaft member 120 is installed so as to enter the inside of the container from the outside of the container 130 through the opening 131 a provided in the ceiling part of the first case part 131. Further, a suction port 131b and a delivery port 131c for fluid (ultra-low temperature liquid) are provided at the bottom of the first case portion 131.
  • the suction pipe 310 is connected to a position where the suction port 131b is provided, and the delivery pipe 320 is connected to a position where the delivery port 131c is provided.
  • a plurality of members are provided inside the first case portion 131, and a plurality of pump chambers, a liquid flow path, and a vacuum chamber for heat insulation are provided by a plurality of spaces partitioned by the plurality of members. Is formed.
  • the internal configuration of the first case portion 131 will be described in more detail.
  • the shaft member 120 includes a shaft main body 121 having a hollow portion therein, a cylindrical portion 122 provided so as to surround the outer peripheral surface side of the shaft main body 121, and a connecting portion 123 that connects the shaft main body 121 and the cylindrical portion 122. And have. Further, an upper end side outward flange portion 122 a is provided at the upper end of the cylindrical portion 122, and a lower end side outward flange portion 122 b is provided at the lower end of the cylindrical portion 122.
  • the first case portion 131 includes a substantially cylindrical body portion 131X and a bottom plate portion 131Y.
  • the body portion 131X is provided with a first inward flange portion 131Xa provided near the center in the height direction and a second inward flange portion 131Xb provided above.
  • a plurality of first flow paths 131Xc provided below the first inward flange portion 131Xa and extending in the axial direction are formed at intervals in the circumferential direction.
  • a second flow path 131Xd configured by a cylindrical space extending in the axial direction is further provided inside the body portion 131X at a radially outer side than a region where the first flow path 131Xc is provided. Yes.
  • a flow path 131d that extends outward in the radial direction and is connected to the first flow path 131Xc is uniformly formed on the bottom of the first case portion 131 in a circumferential shape.
  • a flow path 131e that extends radially outward is uniformly formed in the bottom plate portion 131Y of the first case portion 131 in a circumferential shape. That is, the flow channel 131d and the flow channel 131e are configured such that fluid can flow radially in all directions from 360 ° toward the radially outer side.
  • a first bellows 141 and a second bellows 142 that are expanded and contracted with the reciprocation of the shaft member 120 are provided inside the container 130.
  • the first bellows 141 and the second bellows 142 are arranged side by side in the vertical direction.
  • the upper end side of the first bellows 141 is fixed to the upper end side outward flange portion 122a of the cylindrical portion 122 of the shaft member 120, and the lower end side of the first bellows 141 is the first inward flange portion 131Xa of the first case portion 131. It is fixed to.
  • the upper end side of the second bellows 142 is fixed to the first inward flange portion 131Xa of the first case portion 131, and the lower end side of the second bellows 142 is the lower end side outward flange of the cylindrical portion 122 of the shaft member 120. It is fixed to the part 122b.
  • a first pump chamber P1 is formed by a space surrounding the outer peripheral surface of the first bellows 141, and a second pump chamber P2 is formed by a space surrounding the outer peripheral surface of the second bellows 142.
  • a third bellows 151 and a fourth bellows 152 that are expanded and contracted with the reciprocating movement of the shaft member 120 are also provided inside the container 130.
  • the upper end side of the third bellows 151 is fixed to the ceiling portion of the first case portion 131, and the lower end side of the third bellows 151 is fixed to the shaft member 120. Thereby, the opening part 131a provided in the first case part 131 is closed.
  • the upper end side of the fourth bellows 152 is fixed to a second inward flange portion 131Xb provided in the first case portion 131, and the lower end side of the fourth bellows 152 is fixed to the connecting portion 123 in the shaft member 120. .
  • the space K2 and the third space K3 formed on the inner peripheral surface side of the first bellows 141 and the second bellows 142 are connected.
  • first case portion 131 a flow path passing through the first pump chamber P1 and a flow path passing through the second pump chamber P2 are formed.
  • the second case portion 132 is provided so as to surround the outer wall surface of the first case portion 131.
  • An annular fourth space K4 is formed between the first case portion 131 and the second case portion 132. It is desirable that the fourth space K4 is also connected to the first space K1, the second space K2, and the third space K3.
  • the space formed by the first space K1, the second space K2, the third space K3, and the fourth space K4 is configured to be hermetically sealed.
  • check valves 160 Inside the container 130, there are four check valves 160 (first check valve 160A, second check valve 160B, third check valve 160C and fourth check valve according to the position of attachment). A stop valve 160D). Each of these check valves 160 is constituted by an annular member provided coaxially with the shaft member 120. Each of these check valves 160 is configured to permit the flow of fluid from the radially inner side to the outer side and stop the fluid flow from the radially outer side to the inner side.
  • the first check valve 160A and the third check valve 160C are provided on the flow path passing through the first pump chamber P1.
  • the first check valve 160A and the third check valve 160C play a role of stopping the backflow of the fluid flowing by the pumping action by the first pump chamber P1.
  • the first check valve 160A is provided on the upstream side with respect to the first pump chamber P1
  • the third check valve 160C is provided on the downstream side.
  • the first check valve 160 ⁇ / b> A is provided on a flow path 131 d formed at the bottom of the first case portion 131.
  • the third check valve 160C is provided on a flow path formed in the vicinity of the second inward flange portion 131Xb provided in the first case portion 131.
  • the second check valve 160B and the fourth check valve 160D are provided on the flow path passing through the second pump chamber P2.
  • the second check valve 160B and the fourth check valve 160D play a role of stopping the backflow of the fluid flowing by the pumping action by the second pump chamber P2.
  • the second check valve 160B is provided on the upstream side with respect to the second pump chamber P2, and the fourth check valve 160D is provided on the downstream side.
  • the second check valve 160B is provided on the flow path 131e formed in the bottom plate part 131Y of the first case part 131.
  • the fourth check valve 160D is provided in the vicinity of the first inward flange portion 131Xa of the first case portion 131.
  • the fluid that has passed through the first check valve 160A is sent to the first pump chamber P1 through the first flow path 131Xc inside the body portion 131X in the first case portion 131.
  • the second check valve 160B is closed and the fourth check valve 160D is opened.
  • the fluid in the second pump chamber P2 passes through the fourth check valve 160D and is sent to the second flow path 131Xd inside the body portion 131X (see arrow T12).
  • the fluid passes through the delivery port 131 c and is delivered to the outside of the liquid supply system 10 through the delivery pipe 320.
  • the first bellows 141 is extended and the second bellows 142 is contracted.
  • the first check valve 160A is closed and the third check valve 160C is opened.
  • the fluid in the first pump chamber P1 passes through the third check valve 160C (see arrow T11) and is sent to the second flow path 131Xd inside the trunk portion 131X.
  • the fluid passes through the delivery port 131 c and is delivered to the outside of the liquid supply system 10 through the delivery pipe 320.
  • the second check valve 160B is opened and the fourth check valve 160D is closed.
  • the fluid (see arrow S10) sent from the outside of the liquid supply system 10 through the suction pipe 310 is sucked into the container 130 from the suction port 131b and passes through the second check valve 160B (see arrow S12). ). Then, the fluid that has passed through the second check valve 160B is sent to the second pump chamber P2.
  • the fluid can be flowed from the suction pipe 310 side to the delivery pipe 320 side when the shaft member 120 is lowered or raised. Therefore, so-called pulsation can be suppressed.
  • Pre-cooling As explained in the background art, in order to circulate the cryogenic liquid, the cryogenic liquid is not vaporized in the flow path by pre-cooling the entire container at the first startup or after the maintenance. It is necessary to do so. Therefore, in this embodiment, before flowing the cryogenic liquid into the flow path passing through the pump chambers (the first pump chamber P1 and the second pump chamber P2), the first case portion 131 and the second case portion 132 are interposed. The ultra-low temperature liquid is circulated through the formed fourth space K4.
  • the procedure of pre-cooling it demonstrates in detail according to the procedure of pre-cooling.
  • a first pipe 410 for introducing a precooling fluid and a second pipe 420 for discharging the precooling fluid are connected.
  • these 1st piping 410 and the 2nd piping 420 are not in the position of the cross section shown in FIG. 1, but are provided in another position, it has shown with the dotted line in FIG.
  • a gas having a boiling point equal to or lower than the temperature of the ultra-low temperature liquid for precooling is introduced into the flow path up to 320. After the gas is filled into the interior of the fourth space K4 and the flow path from the suction pipe 310 to the delivery pipe 320, the ultra-low temperature liquid is introduced from the first pipe 410 into the fourth space K4. At this time, the second pipe 420 is opened, and the internal gas is discharged from the fourth space K4.
  • the ultra-low temperature liquid is discharged from the second pipe 420 by a discharge pump (not shown) such as a dry pump.
  • a discharge pump such as a dry pump.
  • the ultra-low temperature liquid is vaporized and passes through a heat exchanger to reach a temperature close to room temperature, and then released to the atmosphere.
  • a valve for releasing the pressure In order to prevent the fluid pressure in the exhaust passage from becoming abnormally high, it is desirable to provide a valve for releasing the pressure.
  • the ultra-low temperature liquid is discharged, so that the fourth space K4 is in a vacuum state.
  • the first space K1, the second space K2, and the third space K3 may be connected to the fourth space K4.
  • the first space K1, the second space K2, and the third space K3 are also in a vacuum state after being cooled by the precooling step.
  • the fourth space K4 (in the present embodiment, including the first space K1, the second space K2, and the third space K3) is cooled, and thereby the flow path passing through the first pump chamber P1, and The flow path passing through the second pump chamber P2 is cooled.
  • the flow path is cooled in a short time by flowing the ultra-low temperature liquid through the flow path, it is possible to shorten the time required to operate the pump.
  • the cryogenic liquid may be discharged from the fourth space K4 to be in a vacuum state.
  • the first liquid is circulated in the space (fourth space K4) between the first case portion 131 and the second case portion 132 by circulating the ultra-low temperature liquid for precooling.
  • the flow path provided in the case part 131 can be cooled in advance. Thereby, the said flow path can be cooled in a short time by flowing an ultra-low-temperature liquid into the said flow path after that. Therefore, it is possible to shorten the time required to operate the pump.
  • the fourth space K4 is configured such that the ultra-low temperature liquid is removed after pre-cooling and the vacuum state is maintained. Therefore, the fourth space K4 can have a heat insulating function.
  • the first case portion 131 has a sealed space (a first space K1, a second space K2, and a second space different from the flow path passing through the first pump chamber P1 and the second pump chamber P2).
  • a third space K3 is provided.
  • these sealed space and the 4th space K4 are connected. Accordingly, during the pre-cooling, the first space K1, the second space K2, and the third space K3 are also cooled, so that the flow path passing through the first pump chamber P1 and the second pump chamber P2 is more reliably cooled. be able to.
  • the heat insulation function can be exhibited also about the 1st space K1, the 2nd space K2, and the 3rd space K3.
  • FIG. 2 shows a second embodiment of the present invention.
  • the configuration in which the second case portion is provided so as to surround the outer wall surface of the first case portion is shown.
  • a configuration in which a third case portion that further surrounds the second case portion is provided is shown. Since the configuration and operation other than the configuration related to the third case portion are the same as those in the first embodiment, the same components are denoted by the same reference numerals, and the description thereof is omitted as appropriate.
  • FIG. 2 is a schematic configuration diagram of the entire liquid supply system according to the second embodiment of the present invention, and is a diagram showing a schematic configuration of the entire liquid supply system in cross-section.
  • FIG. 2 shows a schematic configuration of a cross section cut along a plane including the central axis.
  • the configuration related to the third case portion 133 is different from that in the first embodiment.
  • Other configurations are the same as those of the liquid supply system 10 according to the first embodiment, and thus the description thereof is omitted as appropriate.
  • the container 130 includes a first case portion 131, a second case portion 132 provided so as to surround the outer wall surface of the first case portion 131, and a third case portion 133 surrounding the second case portion 132. It has.
  • the first case 131 has a flow path that passes through the first pump chamber P1 and a flow path that passes through the second pump chamber P2.
  • the second case portion 132 is provided so as to surround the outer wall surface of the first case portion 131.
  • An annular fourth space K4 is formed between the first case portion 131 and the second case portion 132.
  • the fourth space K4 is preferably connected to the first space K1, the second space K2, and the third space K3. And the space formed by these 1st space K1, 2nd space K2, 3rd space K3, and 4th space K4 is comprised so that sealing is possible.
  • the third case part 133 is provided so as to surround the outer wall surface of the second case part 132. Furthermore, the ceiling part of the third case part 133 is configured to cover these with a gap between the ceiling part of the first case part 131 and the ceiling part of the second case part 132. Note that an opening 133 a is provided in the ceiling portion of the third case portion 133.
  • the shaft member 120 is provided so as to enter the inside of the container from the outside of the container 130 through the opening 133a.
  • a fifth bellows 153 that expands and contracts with the reciprocating movement of the shaft member 120 is provided on the upper portion of the third case portion 133. The upper end side of the fifth bellows 153 is fixed to the shaft member 120, and the lower end side of the fifth bellows 153 is fixed to the third case portion 133. As a result, the opening 133a is closed.
  • a sealed space (fifth space K5) is formed between the second case part 132 and the third case part 133. And this 5th space K5 is comprised so that a vacuum state may be maintained. Accordingly, the fifth space K5 exhibits a heat insulating function.
  • the same effect as in the first embodiment can be obtained.
  • the heat insulation function is exhibited by the fifth space K5. Therefore, the fourth space K4 and the like can be cooled more efficiently during the precooling. Moreover, the freezing by the space used for precooling contacting a high temperature part (atmosphere) can be prevented.
  • the first case part is preliminarily cooled. It is possible to prevent the vicinity of the ceiling portion 131 and the ceiling portion of the second case portion 132 from freezing.
  • the second pipe 420 used for pre-cooling is arranged up to the inside of the fourth space K4, and the opening of the second pipe 420 is formed in the fourth space K4. It is desirable to adopt a configuration that is positioned above the inside. As a result, during precooling, it is possible to suppress the occurrence of problems such as gas stagnating above the fourth space K4 and difficulty in filling the ultra-low temperature liquid.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • Reciprocating Pumps (AREA)

Abstract

La présente invention concerne un système de distribution de liquide qui permet de raccourcir le temps passé au prérefroidissement et, par conséquent, raccourcir le temps nécessaire avant qu'une pompe puisse être activée. Le système est caractérisé en ce que : une cuve (130) est pourvu d'une première partie de boîtier (131) dans laquelle des passages d'écoulement sont formés et traversent une première chambre de pompe (P1) et une deuxième chambre de pompe (P2), et d'une deuxième partie de boîtier (132) qui est disposée de façon à entourer la surface de paroi externe de la première partie de boîtier (131) ; et l'espace (quatrième espace K4) entre la première partie de boîtier (131) et la deuxième partie de boîtier (132) est configuré de sorte qu'un liquide à température ultra-basse pour le prérefroidissement puisse s'écouler à travers celui-ci.
PCT/JP2018/003630 2017-02-03 2018-02-02 Système de distribution de liquide WO2018143419A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020197021421A KR20190098219A (ko) 2017-02-03 2018-02-02 액체 공급 시스템
US16/482,760 US20190353148A1 (en) 2017-02-03 2018-02-02 Liquid supply system
CN201880007290.9A CN110192032A (zh) 2017-02-03 2018-02-02 液体供给系统
EP18747527.2A EP3578812A1 (fr) 2017-02-03 2018-02-02 Système de distribution de liquide
JP2018566132A JPWO2018143419A1 (ja) 2017-02-03 2018-02-02 液体供給システム

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2017-019042 2017-02-03
JP2017019042 2017-02-03

Publications (1)

Publication Number Publication Date
WO2018143419A1 true WO2018143419A1 (fr) 2018-08-09

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WO2006003871A1 (fr) 2004-06-30 2006-01-12 Mitsubishi Heavy Industries, Ltd. Pompe de surpression et réservoir pour liquide basse température muni de cette pompe
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US20190353148A1 (en) 2019-11-21

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