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WO2018005987A8 - Systèmes et procédés d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon - Google Patents

Systèmes et procédés d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon Download PDF

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Publication number
WO2018005987A8
WO2018005987A8 PCT/US2017/040325 US2017040325W WO2018005987A8 WO 2018005987 A8 WO2018005987 A8 WO 2018005987A8 US 2017040325 W US2017040325 W US 2017040325W WO 2018005987 A8 WO2018005987 A8 WO 2018005987A8
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WO
WIPO (PCT)
Prior art keywords
sample
pulses
locations
parameters
systems
Prior art date
Application number
PCT/US2017/040325
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English (en)
Other versions
WO2018005987A1 (fr
Inventor
Anish BEKAL
Rachit Sharma
Sameer Dinkar Vartak
Original Assignee
General Electric Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by General Electric Company filed Critical General Electric Company
Priority to RU2018145350A priority Critical patent/RU2729950C2/ru
Priority to EP17740541.2A priority patent/EP3479099A1/fr
Priority to CA3028758A priority patent/CA3028758A1/fr
Priority to CN201780040823.9A priority patent/CN109328300A/zh
Publication of WO2018005987A1 publication Critical patent/WO2018005987A1/fr
Publication of WO2018005987A8 publication Critical patent/WO2018005987A8/fr

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/02001—Interferometers characterised by controlling or generating intrinsic radiation properties
    • G01B9/02007—Two or more frequencies or sources used for interferometric measurement
    • G01B9/02008—Two or more frequencies or sources used for interferometric measurement by using a frequency comb
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
    • G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/45—Interferometric spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/314—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry with comparison of measurements at specific and non-specific wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/069—Supply of sources
    • G01N2201/0696—Pulsed

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Biochemistry (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Un système (100) d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon (108) comprend une première et une seconde source laser ultrarapides (102, 104), un dispositif de référence (110), et des unités de détecteur et de processeur (124, 128). La première et la seconde source laser ultrarapides (102, 104) fournissent une première et une seconde pluralité d'impulsions, respectivement, dans un domaine temporel de l'ordre de la picoseconde ou moins pour interagir avec l'échantillon au niveau de la pluralité d'emplacements dans l'échantillon (108) pour fournir des impulsions traitées. En outre, la première et la seconde source laser ultrarapides (102 et 104) sont configurées pour fournir des fréquences de peigne ayant une première et une seconde fréquence de répétition, respectivement. L'unité de détection (124) est configurée pour détecter au moins une partie des impulsions traitées, de la seconde pluralité d'impulsions et des impulsions référencées. L'unité de processeur (128) est configurée pour traiter les impulsions détectées et fournir des mesures des paramètres pour la pluralité d'emplacements dans l'échantillon (108).
PCT/US2017/040325 2016-06-30 2017-06-30 Systèmes et procédés d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon WO2018005987A1 (fr)

Priority Applications (4)

Application Number Priority Date Filing Date Title
RU2018145350A RU2729950C2 (ru) 2016-06-30 2017-06-30 Системы и способы опроса параметров во множестве мест в образце
EP17740541.2A EP3479099A1 (fr) 2016-06-30 2017-06-30 Systèmes et procédés d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon
CA3028758A CA3028758A1 (fr) 2016-06-30 2017-06-30 Systemes et procedes d'interrogation de parametres a une pluralite d'emplacements dans un echantillon
CN201780040823.9A CN109328300A (zh) 2016-06-30 2017-06-30 用于在样本中的多个位置询问参数的系统和方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IN201641022596 2016-06-30
IN201641022596 2016-06-30

Publications (2)

Publication Number Publication Date
WO2018005987A1 WO2018005987A1 (fr) 2018-01-04
WO2018005987A8 true WO2018005987A8 (fr) 2019-03-14

Family

ID=59363241

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2017/040325 WO2018005987A1 (fr) 2016-06-30 2017-06-30 Systèmes et procédés d'interrogation de paramètres à une pluralité d'emplacements dans un échantillon

Country Status (5)

Country Link
EP (1) EP3479099A1 (fr)
CN (1) CN109328300A (fr)
CA (1) CA3028758A1 (fr)
RU (1) RU2729950C2 (fr)
WO (1) WO2018005987A1 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102022116927A1 (de) 2022-07-07 2024-01-18 Trumpf Laser Gmbh Laserbearbeitungsmaschine mit frequenzkammbasiertem Abstandssensor sowie zugehöriges Verfahren mit frequenzkammbasierter Abstandsmessung

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5814820A (en) * 1996-02-09 1998-09-29 The Board Of Trustees Of The University Of Illinois Pump probe cross correlation fluorescence frequency domain microscope and microscopy
WO2006088841A1 (fr) * 2005-02-14 2006-08-24 Board Of Trustees Of Michigan State University Systeme laser ultra-rapide
RU2384835C1 (ru) * 2008-12-15 2010-03-20 Институт физики полупроводников Сибирского отделения Российской академии наук Эллипсометр
JP5984351B2 (ja) * 2011-09-14 2016-09-06 キヤノン株式会社 計測装置
US9341516B2 (en) * 2013-08-30 2016-05-17 Agilent Technologies, Inc. System for performing optical spectroscopy including interferometer
CN104316186B (zh) * 2014-07-07 2016-08-24 华东师范大学 一种基于光学频率梳的光谱测量方法
CN104316180B (zh) * 2014-11-02 2016-06-01 华东师范大学 基于连续稳频激光的双光学频率梳光学成像方法
US20160153835A1 (en) * 2014-12-02 2016-06-02 Imra America, Inc. Comb resolved fourier transform spectroscopy
CN105548036B (zh) * 2015-12-08 2018-04-06 上海理工大学 一种自适应双光梳光谱系统

Also Published As

Publication number Publication date
EP3479099A1 (fr) 2019-05-08
RU2018145350A (ru) 2020-07-30
CA3028758A1 (fr) 2018-01-04
RU2018145350A3 (fr) 2020-07-30
WO2018005987A1 (fr) 2018-01-04
RU2729950C2 (ru) 2020-08-13
CN109328300A (zh) 2019-02-12

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