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WO2018046535A1 - Capteur de pression micromécanique - Google Patents

Capteur de pression micromécanique Download PDF

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Publication number
WO2018046535A1
WO2018046535A1 PCT/EP2017/072332 EP2017072332W WO2018046535A1 WO 2018046535 A1 WO2018046535 A1 WO 2018046535A1 EP 2017072332 W EP2017072332 W EP 2017072332W WO 2018046535 A1 WO2018046535 A1 WO 2018046535A1
Authority
WO
WIPO (PCT)
Prior art keywords
pressure sensor
micromechanical pressure
media access
protective device
siphon structure
Prior art date
Application number
PCT/EP2017/072332
Other languages
German (de)
English (en)
Inventor
Timo Lindemann
Joachim Fritz
Mike Schwarz
Original Assignee
Robert Bosch Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch Gmbh filed Critical Robert Bosch Gmbh
Publication of WO2018046535A1 publication Critical patent/WO2018046535A1/fr

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0654—Protection against aggressive medium in general against moisture or humidity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/06—Means for preventing overload or deleterious influence of the measured medium on the measuring device or vice versa
    • G01L19/0627—Protection against aggressive medium in general
    • G01L19/0636—Protection against aggressive medium in general using particle filters

Definitions

  • the invention relates to a micromechanical pressure sensor.
  • the invention further relates to a method for producing a micromechanical pressure sensor.
  • Micromechanical pressure sensors in which a pressure difference is measured as a function of a deformation of a sensor membrane are known, for example from DE 10 2004 006 197 A1. In the operation of the known micromechanical pressure sensors, this can cause problems that occur over time external deposits on the sensor membrane, whereby an operating characteristic of the pressure sensors may be degraded.
  • micromechanical pressure sensor comprising:
  • At least one protective device for minimizing the effect of external particles and / or external moisture on the sensor membrane.
  • the object is achieved with a method for producing a micromechanical pressure sensor, comprising the steps:
  • micromechanical pressure sensor Preferred embodiments of the micromechanical pressure sensor are the subject of dependent claims.
  • a preferred embodiment of the micromechanical pressure sensor is characterized in that the protective device is designed as a siphon structure of the media access. In this way, an easily deployable and efficiently acting protective device for the micromechanical pressure sensor is realized.
  • micromechanical pressure sensor A further advantageous development of the micromechanical pressure sensor is characterized in that the protective device has a heating element arranged in a defined proximity to the media access.
  • the protective device has a heating element arranged in a defined proximity to the media access.
  • a further advantageous development of the micromechanical pressure sensor is characterized in that the heating element is arranged at least partially around a defined region of the siphon structure. As a result, moisture that has already penetrated into the media access can be evaporated faster.
  • a further advantageous development of the micromechanical pressure sensor provides that the protective device has an adhesive layer arranged in a defined proximity to the media access. In this way, a further protective mechanism is provided, with which external particles adhere or adhere to the adhesive layer and are thereby prevented from penetrating into the media access or at a further penetration in the media access.
  • a further advantageous development of the micromechanical pressure sensor provides that the adhesive layer is arranged at least in sections in a defined region of the siphon structure. Thereby, the protective effect of the siphon structure can be increased efficiently.
  • micromechanical pressure sensor is characterized in that the following geometric conditions are met: with the parameters: ⁇ clear width of a lower section of the siphon structure tp clear width of an upper section of the siphon structure tG level difference between an upper level of the lower
  • Particles in the media access and a further penetration of particles and moisture within the media access can be minimized.
  • the protective device has at least one capacitor structure arranged in a defined proximity to the media access. In this way an alternative protective mechanism in the form of electrostatic forces is provided which can bind the particles.
  • micromechanical pressure sensor provides that the protective device has a media-permeable layer arranged on the media access. In this way, an alternative way of protecting the sensor membrane is provided.
  • a further advantageous development of the micromechanical pressure sensor provides that the media access with the protection device in one
  • the protective device can be advantageously realized in different ways.
  • Fig. 1 is a cross-sectional view of a micromechanical
  • FIG. 2 is a cross-sectional view of an embodiment of a
  • Fig. 3 is a detail view of the arrangement of Fig. 2; 4 is a schematic detail view of a further embodiment of the micromechanical pressure sensor;
  • Fig. 5 is a detail view of the arrangement of Fig. 4.
  • a central idea of the present invention is the provision of an improved micromechanical pressure sensor which is less sensitive and thus more robust to external environmental influences. This is achieved by a protective device that effectively prevents or minimizes the penetration of external particles or external moisture to the sensitive sensor membrane.
  • Penetrate pressure sensor settle on this and aggregate over time in a disadvantageous manner.
  • Fig. 1 shows a problem of a micromechanical pressure sensor according to the prior art.
  • the pressure sensor 100 is preferably a low-pressure sensor, for example for use in mobile terminals or barometric altimeters for measuring pressures in the range of about 0.3 bar to about 1, 4 bar. It is also conceivable that the pressure sensor 100 is designed as a medium or high pressure sensor, for example for use in the automotive sector.
  • FIG. 1 Shown is a cross-sectional view through a micromechanical pressure sensor 100 with a media access 10, which expands over a sensor membrane 20, so that a media or air exchange can take place. Below the sensor membrane 20, a cavity 21 can be seen. By means of an arrow, an influence of an externally acting media pressure P, for example in the form of air pressure, is indicated. Recognizable are particles 1 (eg dust particles) and elements of moisture 2 (eg in the form of water), which pass through the media access 10 and advance to the sensitive sensor membrane 20 and can be deposited thereon disadvantageously. As a result, a disadvantageous influence on the sensor membrane 20 can take place over time, as a result of which unwanted false signals or incorrect measurements of the micromechanical pressure sensor 100 are brought about. Fig.
  • particles 1 eg dust particles
  • elements of moisture 2 eg in the form of water
  • FIG. 2 shows a cross-sectional view through an embodiment of a proposed micromechanical pressure sensor 100.
  • External particles 1 may adhere to an adhesive layer 13 in a low-lying portion of the siphon structure 1 1 and be prevented from penetrating to the sensor membrane 20.
  • Heating element 12 are evaporated with the moisture entering the media access 10 2 or an evaporation process of moisture penetrated 2 can be accelerated.
  • a heating element 12 is arranged in the high-lying portion of the siphon structure 1 1
  • the integrated heater structure in the form of the heating element 12 is to prevent the ingress of moisture by the moisture is evaporated by a corresponding heating of the heating element 12 and a condensation of moisture is prevented.
  • Fig. 2 further arranged in the low-lying region of the siphon structure 1 1 adhesive or adhesive layer 13 on which the particles 1 adhere and are prevented from penetrating to the sensor membrane 20.
  • the adhesive layer 13 may alternatively or additionally be in the immediate vicinity of
  • FIG. 2 realizes different protective effects in the form of the siphon structure 1 1, the heating element 12 and the adhesion layer 13. It is also conceivable, however, that only a single one of the named elements is provided as the protective device.
  • a second media access 10a can also be seen in FIG. 2, a heating element 12a.
  • a defined number of more than two media accesses 10, 10a are each provided with at least one of the described protective devices, which advantageously supports the fact that when laying one of the Media access 10, 10a with external particles 1 and / or external humidity 2 is still sufficient protection for the sensor membrane 20 is realized. A long-term cheap Operating behavior of the micromechanical pressure sensor 100 is supported in this way.
  • Fig. 3 shows the arrangement of Fig. 2 in a higher level of detail. It can be seen that particles 1 and moisture 2 adhere to the adhesion layer 13 and thereby realize a protective effect for the sensor membrane 20. Visible are qualitative size ratios of the proposed siphon structure 1 1, wherein a dimension tH denotes a clear width or clear height of a lower or low-lying portion of the siphon structure 1 1. t.G denotes a level difference between an upper edge of the lower portion of the siphon structure 11 and a lower portion of a connecting channel of the siphon structure 11. A dimension tp represents a clear width or clear height of the upper or uppermost
  • Section of the siphon structure 1 1.
  • the siphon structure 1 1 provides a low-lying area of sufficient volume so that external particles 1 and / or external moisture 2 can be collected therein. Furthermore, a distance between the low-lying portion of the siphon structure 1 1 and the high-lying portion of the siphon structure 1 1 should be sized so that any external particles 1 and / or external moisture 2 can not overcome this barrier and thus can not reach the membrane area.
  • the following geometric dimensions of the siphon structure 1 1 should be realized for an efficient protective effect of the sensor membrane 20: t H > t P (1) t G > t P (2) with the parameters: tH clear width of a lower section of the siphon structure t P clear width an upper portion of the siphon structure tG level difference between an upper level of the lower
  • the heating element 12 may, for example, consist of current-carrying lines and / or be formed of high-resistance diffusion regions.
  • micromechanical pressure sensor 100 Comprises an adhesion layer 13 arranged directly on the surface of the media access 10, wherein, optionally, a heating element 12 can also be formed directly on the surface of the media access 10.
  • the principle of electrostatics can be used, whereby the heating element 12 is not only used for heating, but is also used as a capacitor with electrodes at different electrical potentials. In this way, a simultaneous realization of a heating element 12 and a capacitor structure is advantageously possible. Corresponding diffusion regions can form the capacitor with which electrostatic forces can be generated which absorb or bind the external particles 1.
  • FIG. 4 shows a detailed view of a corresponding embodiment of a micromechanical pressure sensor 100.
  • a capacitor with two electrodes 30, 31 arranged on both sides of the media access 10 can be seen.
  • Electrodes 30, 31 acts an electric field with corresponding electrostatic effects, so that external particles 1 (not shown) adhere to the upper electrode 30.
  • Fig. 5 shows a top view of the structure of Fig. 4. It can be seen an upper electrode 30 having a serpentine electrical supply line 30a. In this way, an electric voltage with a suitable voltage level can be applied to the upper electrode 30. Visible is a lower electrode 31, which is preferably at ground potential, whereby between the upper Electrode 30 and the lower electrode 31 forms an electric field with electric field lines from the upper electrode 30 to the lower electrode 31. As a result, an electrostatic effect can be generated with which the external particles 1 are attracted and thus fixed in the region of the entrance of the media access 10 and thus made harmless to the sensor membrane 20.
  • the upper electrode 30 can also be provided as a heating element.
  • An embodiment of the micromechanical pressure sensor 100 which is not shown in FIGS., Provides a protective layer over the media access 10, which sufficiently protects the sensor membrane 20 from penetrating external particles 1 and nevertheless allows dynamics for sufficient pressure supply to the sensor membrane 20.
  • a porous material or a single-layer material is conceivable, which is permeable to media or air, for example in the form of GORE TM membrane, graphene layers or organic materials.
  • the implementation of the above-mentioned protective devices can be carried out in a cap structure or in an ASIC cap of the micromechanical pressure sensor 100, whereby advantageously different realization possibilities for the protective device are possible.
  • FIG. 6 shows a basic sequence of a method for producing a micromechanical pressure sensor 100.
  • a step 200 at least one media access 10 is provided.
  • a step 210 a sensor membrane 20 is provided.
  • a step 220 provision of at least one protective device 1 1, 12, 13 is carried out in such a way that an impact of external particles 1 and / or external moisture 2 on the sensor membrane 20 can be minimized by means of the protective device 1 1, 12, 13.

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

Capteur de pression micromécanique (100) présentant: au moins une entrée de fluide (10, 10a) pour une membrane (20) de capteur ; et au moins un dispositif de protection (11; 12; 13) pour réduire l'influence de particules externes (1) et/ou de l'humidité externe (2) sur la membrane (20) du capteur.
PCT/EP2017/072332 2016-09-08 2017-09-06 Capteur de pression micromécanique WO2018046535A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102016217132.1 2016-09-08
DE102016217132.1A DE102016217132A1 (de) 2016-09-08 2016-09-08 Mikromechanischer Drucksensor

Publications (1)

Publication Number Publication Date
WO2018046535A1 true WO2018046535A1 (fr) 2018-03-15

Family

ID=59901497

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2017/072332 WO2018046535A1 (fr) 2016-09-08 2017-09-06 Capteur de pression micromécanique

Country Status (3)

Country Link
DE (1) DE102016217132A1 (fr)
TW (1) TW201813110A (fr)
WO (1) WO2018046535A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11813558B2 (en) 2022-04-08 2023-11-14 Honda Motor Co., Ltd. Atmospheric box

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102020206952B3 (de) 2020-06-03 2021-10-14 Robert Bosch Gesellschaft mit beschränkter Haftung Sensorsystem zur kontinuierlichen Detektion von Fluiden und/oder Partikeln und Verfahren zum Betreiben des Sensorsystems

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4207951A1 (de) * 1992-03-10 1993-09-23 Mannesmann Ag Kapazitiver druck- bzw. differenzdrucksensor in glas-silizium-technik
US20030167852A1 (en) * 2002-03-11 2003-09-11 Mks Instruments, Inc. Surface area deposition trap
US6626044B1 (en) * 2000-10-03 2003-09-30 Honeywell International Inc. Freeze resistant sensor
DE102004006197A1 (de) 2003-07-04 2005-01-27 Robert Bosch Gmbh Mikromechanischer Drucksensor
EP1503197A2 (fr) * 2003-07-28 2005-02-02 Robert Bosch Gmbh Canal d'admission d'un capteur
US20110138900A1 (en) * 2009-12-16 2011-06-16 Tom Kwa Weatherized direct-mount absolute pressure sensor

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7981182B2 (en) 2007-12-31 2011-07-19 Honda Motor Co., Ltd. Labyrinth box structure and method
DE102009003090A1 (de) 2009-05-14 2010-11-18 Robert Bosch Gmbh Sensoranordnung zur Erfassung eines Drucks
US8671766B2 (en) 2011-05-19 2014-03-18 Infineon Technologies Ag Integrated pressure sensor seal
DE102012217979A1 (de) 2012-10-02 2014-04-03 Robert Bosch Gmbh Hybrid integriertes Drucksensor-Bauteil
EP3109612A1 (fr) 2015-06-26 2016-12-28 Nina Wojtas Piège de dépôt de mems pour protection de transducteur à vide

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4207951A1 (de) * 1992-03-10 1993-09-23 Mannesmann Ag Kapazitiver druck- bzw. differenzdrucksensor in glas-silizium-technik
US6626044B1 (en) * 2000-10-03 2003-09-30 Honeywell International Inc. Freeze resistant sensor
US20030167852A1 (en) * 2002-03-11 2003-09-11 Mks Instruments, Inc. Surface area deposition trap
DE102004006197A1 (de) 2003-07-04 2005-01-27 Robert Bosch Gmbh Mikromechanischer Drucksensor
EP1503197A2 (fr) * 2003-07-28 2005-02-02 Robert Bosch Gmbh Canal d'admission d'un capteur
US20110138900A1 (en) * 2009-12-16 2011-06-16 Tom Kwa Weatherized direct-mount absolute pressure sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11813558B2 (en) 2022-04-08 2023-11-14 Honda Motor Co., Ltd. Atmospheric box

Also Published As

Publication number Publication date
TW201813110A (zh) 2018-04-01
DE102016217132A1 (de) 2018-03-08

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