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WO2017047032A1 - Appareil à microclapet antiretour - Google Patents

Appareil à microclapet antiretour Download PDF

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Publication number
WO2017047032A1
WO2017047032A1 PCT/JP2016/004010 JP2016004010W WO2017047032A1 WO 2017047032 A1 WO2017047032 A1 WO 2017047032A1 JP 2016004010 W JP2016004010 W JP 2016004010W WO 2017047032 A1 WO2017047032 A1 WO 2017047032A1
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WO
WIPO (PCT)
Prior art keywords
micro
check valve
chamber
valve device
channel
Prior art date
Application number
PCT/JP2016/004010
Other languages
English (en)
Japanese (ja)
Inventor
牧 平岡
菱田　光起
山田　晃久
利徳 山中
年伸 松野
Original Assignee
パナソニックＩｐマネジメント株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2016146505A external-priority patent/JP2017056545A/ja
Application filed by パナソニックＩｐマネジメント株式会社 filed Critical パナソニックＩｐマネジメント株式会社
Publication of WO2017047032A1 publication Critical patent/WO2017047032A1/fr
Priority to US15/472,404 priority Critical patent/US20170198833A1/en

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B5/00—Devices comprising elements which are movable in relation to each other, e.g. comprising slidable or rotatable elements
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K15/00—Check valves
    • F16K15/02—Check valves with guided rigid valve members
    • F16K15/04—Check valves with guided rigid valve members shaped as balls
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/08—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor using a stream of discrete samples flowing along a tube system, e.g. flow injection analysis
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N37/00—Details not covered by any other group of this subclass

Definitions

  • the present invention relates to a micro check valve device connected to a micro flow channel device.
  • ⁇ -TAS Micro-total-analysis-system
  • ⁇ -TAS Micro-total-analysis-system
  • a card-like chip (thickness is several mm, vertical is several centimeters, horizontal is several centimeters) included in the microchannel device is a network of fine channels having a width of 0.1 mm and a depth of 0.1 mm It has.
  • a card-like chip a small amount of liquid sample is circulated through a fine channel, and the liquid sample is analyzed.
  • the amount of liquid required for this analysis process is on the order of 10 ⁇ L.
  • Chemical processing including mixing of biological sample and drug solution, target extraction, and marker molecule detection, and analysis processing such as medical diagnosis are performed only within the chip of the microchannel device. Since all the analysis steps are completed in the chip, the chip can be made disposable, which reduces the risk of contamination due to the outflow of biological material, and is convenient for handling as a simple diagnostic device.
  • a micro flow channel device for automatically processing a precise minute amount liquid feeding operation is connected to a micro check valve as one of important components.
  • Non-Patent Document 1 discloses a check valve having a spherical body with a taper.
  • Non-Patent Document 2 discloses various micro check valves. However, since the operating flow rate is mL / min and the reverse flow rate is in the order of mL, application to the ⁇ -TAS chip is not suitable.
  • An object of the present invention is to provide a micro check valve device that operates when a floating valve body closes a flow path, and has a small back flow rate and little variation in operation from chip to chip.
  • a check valve device is a micro check valve device connected to a microchannel device, A substrate, A chamber located inside the substrate and having a top surface having protrusions and a tapered portion located at the bottom; A micro discharge channel connected to the side of the chamber; A micro-introduction channel connected to the bottom of the tapered portion of the chamber through an opening; And a spherical valve capable of opening and closing the opening of the micro-introducing channel by moving up and down in the chamber and coming into contact with and separating from the tapered portion.
  • micro check valve device of the above aspect of the present disclosure when a back flow that closes the spherical valve occurs, the flow of pushing the spherical valve by the upper surface having the protrusion is increased, so that the back flow rate is small, A micro check valve device with little variation in operation can be provided.
  • FIG. 3 is a bottom view of the first substrate of the micro check valve device according to the first embodiment.
  • 1 is a longitudinal sectional view of a micro check valve device according to Embodiment 1.
  • FIG. FIG. 6 is a top view of a second substrate of the micro check valve device according to the first embodiment.
  • the longitudinal cross-sectional view of the micro check valve apparatus which concerns on a reference example.
  • the longitudinal cross-sectional explanatory drawing which shows operation
  • FIG. 3 is a bottom view of the first substrate of the micro check valve device according to the first embodiment.
  • 1 is a longitudinal sectional view of a micro check valve device according to Embodiment 1.
  • FIG. 6 is a top view of a second substrate of the micro check valve device according to the first embodiment. The figure which shows a measurement system. The top view of the chamber for a measurement. The top view of the chamber for a measurement. Sectional drawing of the chamber for a measurement.
  • Sectional drawing of the chamber for a measurement The figure which shows a mode that the pump formed in the chip
  • the micro check valve device 100 includes a substrate 101, a micro introduction channel 103, a micro discharge channel 102, a chamber 10, and a spherical valve 200.
  • the micro check valve device 100 means a check valve device used by being connected to a micro flow channel device.
  • the micro introduction channel 103, the micro discharge channel 102, the chamber 10, and the spherical valve 200 are located inside the substrate 101.
  • the substrate 101 may include a plurality of substrates.
  • the substrate 101 includes a first substrate 101a, a second substrate 101b, and a third substrate 101c.
  • FIG. 1A shows a bottom view of the first substrate 101 a in the micro check valve device 100.
  • the first substrate 101a shown in FIG. 1A has a second flow path 102b described later and a part of the chamber 10.
  • FIG. 1B shows a cross-sectional view of the micro check valve device 100 cut along the cutting line AA of FIG. 1A.
  • the first substrate 101a, the second substrate 101b, and the third substrate 101c are sequentially located from top to bottom.
  • the second substrate 101b includes a fifth channel 102a, a fourth channel 102b, a part of the chamber 10, a spherical valve 200, a second channel 103a, and a first channel 103b.
  • FIG. 1C shows a top view of the second substrate 101 b in the micro check valve device 100.
  • the micro discharge channel 102 is connected to the side surface of the chamber 10.
  • the micro introduction channel 103 is connected to the bottom surface of the chamber 10.
  • the liquid introduced upward from the micro introduction channel 103 into the chamber 10 in FIG. 1B passes through the micro introduction channel 103, the chamber 10, and the micro discharge channel 102 and is discharged from the check valve device 100.
  • an example of the micro discharge channel 102 is connected to the fifth channel 102a that flows in the in-plane direction of the substrate 101 and the fifth channel 102a, and A fourth flow path 102b flowing in the direction, and a third flow path 102c connected to the fourth flow path 102b and flowing in the in-plane direction of the substrate 101.
  • the third channel 102 c is connected to the side surface of the chamber 10. As the micro discharge channel 102, the liquid discharged from the chamber 10 is discharged through the third channel 102c, the fourth channel 102b, and the fifth channel 102a in this order.
  • 1A to 1C is connected to the bottom surface of the chamber 10 and is connected to the second flow channel 103a flowing in the direction perpendicular to the surface of the substrate 101 and the second flow channel 103a. And a first flow path 103b flowing in the in-plane direction.
  • the micro introduction channel 103 the liquid introduced into the chamber 10 is introduced through the first channel 103b and the second channel 103a in this order.
  • the width of the micro introduction channel 103 and the width of the micro discharge channel 102 are, for example, 10 ⁇ m or more and 1 mm or less, respectively.
  • the depth of the micro introduction channel 103 and the depth of the micro discharge channel 102 are, for example, 10 ⁇ m or more and 1 mm or less, respectively.
  • the micro introduction channel 103 and the micro discharge channel 102 correspond to a recess functioning as a channel formed in the substrate 101.
  • the chamber 10 is surrounded by a wall surface inside the substrate 101. Each side of the space inside the chamber 10 is larger than the width and depth of the micro introduction channel 103 and the micro discharge channel 102 to be connected.
  • the chamber 10 has a side surface connected to the micro discharge channel 102 and a bottom surface connected to the micro introduction channel 103.
  • the liquid that has entered the chamber 10 from the micro introduction channel 103 flows toward the micro discharge channel 102.
  • the cross section of the chamber 10 cut perpendicularly toward the liquid traveling direction of the micro introduction channel 103 in the chamber 10 gradually increases from the bottom connected to the micro introduction channel 103 in the chamber 10 toward the liquid traveling direction. Become bigger.
  • a portion connected to the micro introduction channel 103 in the chamber 10 has a tapered shape.
  • a portion having a tapered shape in the chamber 10 is also referred to as a tapered portion 10a.
  • the chamber 10 has a protrusion 11 on the upper part (indentation) of the inner wall surface of the chamber, which is the first substrate 101a.
  • the protrusion 11 has a convex shape toward the bottom.
  • An example of the convex shape is a truncated cone shape.
  • the protrusion 11 has a height of 30 ⁇ m or more and 100 ⁇ m or less.
  • the height of the protrusion 11 is the longest distance between the apex of the protrusion 11 and the upper surface of the inner wall surface of the substrate 101 (in other words, the bottom surface of the annular recess 111 around the protrusion 11).
  • the height of the protrusion 11 is a distance between the highest position inside the chamber 10 and the vertex of the protrusion 11 in FIG. 1B above the vertex of the protrusion 11.
  • the protrusion 11 is located above the micro introduction channel 103. More specifically, when viewed from the film thickness direction of the substrate 101, the protrusion 11 is positioned so as to overlap with the opening 103 e of the micro introduction channel 103 connected to the bottom surface of the chamber 10. Further, when viewed from the film thickness direction of the substrate 101, the protrusion 11 is positioned so as to overlap with a spherical valve 200 positioned at a tapered portion 10 a described later, and is smaller than the spherical valve 200. As an example, the shortest distance between the spherical valve 200 and the protrusion 11 located at the position where the opening 103e of the micro introduction channel 103 is closed is 50 ⁇ m or more and 300 ⁇ m or less.
  • the protrusion 11 has the same meaning as that the chamber 10 has an upper surface having a recess 111 adjacent to the protrusion 11 and having a depth of 30 ⁇ m or more. At this time, the recess 111 is preferably formed so as to surround the protrusion 11.
  • a spherical valve 200 is located inside the chamber 10 and is capable of opening and closing the opening 103e of the micro-introducing channel 103 by contacting and separating from the tapered portion 10a.
  • the spherical valve 200 has a diameter larger than the width of the micro introduction channel 103 (opening 103e). Further, the spherical valve 200 has a diameter larger than the side having the longest cross section in the micro introduction channel 103. Thereby, when the spherical valve 200 is positioned inside the chamber 10, the opening 103 e of the micro introduction channel 103 can be closed.
  • Examples of the shape of the spherical bulb 200 are a true sphere, an ellipse, a cylinder, or a cone.
  • the spherical valve 200 may have a spherical shape on the cut surface obtained by cutting the micro check valve device 100 in the film thickness direction of the substrate 101 and can be brought into and out of contact with the tapered portion 10a.
  • the spherical valve 200 Before the liquid enters the inside of the chamber 10, the spherical valve 200 is located at a position in contact with the tapered portion 10 a of the chamber 10 so as to close the opening 103 e of the micro introduction channel 103. Specifically, the spherical valve 200 is positioned at the tapered portion 10 a of the chamber 10, thereby closing the opening 103 e of the micro introduction channel 103.
  • spherical valve 200 for example, a material such as SUS, alumina, or glass can be used.
  • the spherical valve 200 When a liquid enters the inside of the chamber 10 from the opening 103e of the micro introduction channel 103 on the bottom surface of the chamber 10, the spherical valve 200 is pushed up in the chamber 10 from the position where it is in contact with the tapered portion 10a due to the flowing force of the liquid. It is done. The spherical valve 200 that has blocked the micro introduction channel 103 is pushed up, and the liquid flows from the chamber 10 to the micro discharge channel 102.
  • the projection 11 causes a part of the liquid flowing force to move in a direction to return the spherical valve 200 to the position in contact with the tapered portion 10 a.
  • the spherical valve 200 returns to the position in contact with the tapered portion 10a.
  • the spherical valve 200 can quickly return to the position in contact with the tapered portion 10 a, so that the liquid discharged from the chamber 10 to the micro discharge channel 102 by the spherical valve 200 flows back into the chamber 10. Can be reduced.
  • FIGS. 3A to 3C are enlarged views of the chamber 10.
  • FIG. 3A to FIG. 3C show the time series from before the liquid enters the chamber 10 to after the liquid is discharged from the chamber 10.
  • FIG. 3A shows the situation before the liquid is introduced into the chamber 10.
  • the spherical valve 200 is disposed in contact with the tapered portion 10 a in the chamber 10 and closes the opening 103 e of the micro introduction channel 103.
  • the tapered portion 10a means a portion surrounded by a dotted line.
  • FIG. 3B shows a situation in which the spherical valve 200 that has blocked the micro introduction channel 103 is pushed up and the liquid is introduced into the chamber 10.
  • the liquid introduced into the second flow path 103 a of the micro introduction flow path 103 enters the chamber 10 by the spherical valve 200 being pushed up from the bottom of the chamber 10.
  • the arrow 300 shown in FIG. 3B indicates the flow of the liquid that has entered the chamber 10. A force generated by the liquid flow 300 entering the chamber 10 is applied to the spherical valve 200, and the spherical valve 200 is pushed up from the tapered portion 10 a and moves to the upper portion of the chamber 10.
  • the liquid that has entered the chamber 10 proceeds to the micro discharge channel 102 on the side of the chamber 10.
  • the spherical valve 200 moves to the upper part of the chamber 10 and receives the maximum force from the liquid flow 300.
  • the force due to the liquid flow 301 that is separated from the liquid flow 300 and passes through the space between the wall surface of the chamber 10 and the spherical valve 200 and including the recess 111 is more governed by the viscous force than the inertial force. Become.
  • FIG. 3C shows a situation when the introduction of the liquid from the micro introduction channel 103 to the chamber 10 is stopped.
  • the liquid introduced into the chamber 10 from the second flow path 103 a disappears, and only the liquid flow 302 that flows back from the micro discharge flow path 102 and the chamber 10 to the second flow path 103 a of the micro introduction flow path 103 exists.
  • the force applied to the spherical valve 200 by the liquid flow 300 to be introduced is also eliminated, the force applied to the spherical valve 200 by the backflowing liquid flow 302, and the liquid flow 301 between the wall surface of the chamber 10 including the recess 111 and the spherical valve 200.
  • the spherical valve 200 moves downward.
  • the spherical valve 200 moves downward and returns to a position where it contacts the tapered portion 10 a. As a result, the spherical valve 200 closes the opening 103 e of the micro introduction channel 103, and the liquid that has attempted to flow backward from the micro discharge channel 102 and the chamber 10 to the micro introduction channel 103 cannot return to the micro introduction channel 103. That is, the spherical valve 200 can prevent the liquid from flowing back from the chamber 10 to the micro introduction channel 103.
  • the operation until the spherical valve 200 returns to the position where it contacts the tapered portion 10a will be described.
  • the liquid introduced into the chamber 10 from the second flow path 103a of the micro introduction flow path 103 disappears, and the spherical valve 200 and the tapered portion 10a from the inside of the micro discharge flow path 102 and the chamber 10 The liquid flows back to the second flow path 103a through the gap.
  • the spherical valve 200 receives a force attracted in the direction in which the liquid flows backward through the gap between the spherical valve 200 and the tapered portion 10a.
  • the spherical valve 200 moves downward so as to approach the second flow path 103a. That is, the spherical valve 200 approaches the tapered portion 10a.
  • the magnitude of the force due to the liquid flow changes depending on the Reynolds coefficient of the liquid.
  • inertial force and viscous force are variables.
  • the Reynolds coefficient of the liquid in a check valve device having a length or width of several mm or more is large because the inertial force is dominant. That is, the force by the liquid is large. Therefore, in the check valve device having a length or width of several mm or more, a large force acts in the direction of closing the valve due to the flow of liquid.
  • the micro introduction channel 103, the chamber 10, and the micro discharge channel 102 are smaller than a predetermined size (for example, the width and depth are 10 ⁇ m or more and 1 mm or less, respectively). Since the viscous force of the liquid becomes dominant, the Reynolds coefficient is small. Therefore, the force for bringing the spherical valve 200 close to the tapered portion 10a is small. Therefore, since the time until the spherical valve 200 approaches the tapered portion 10a is delayed, the amount of liquid flowing back from the chamber 10 to the micro introduction channel 103 is increased.
  • a predetermined size for example, the width and depth are 10 ⁇ m or more and 1 mm or less, respectively. Since the viscous force of the liquid becomes dominant, the Reynolds coefficient is small. Therefore, the force for bringing the spherical valve 200 close to the tapered portion 10a is small. Therefore, since the time until the spherical valve 200 approaches the tapered portion 10a is delayed, the amount of liquid flowing back from the chamber 10 to the micro introduction channel 103 is increased
  • a liquid flow 301 is generated in the recess 111 by the protrusion 11.
  • the liquid flow 301 causes the spherical valve 200 to generate a liquid force toward the tapered portion 10a.
  • FIG. 3B when there is a liquid flow 300 introduced into the chamber 10 from the second flow path 103 a of the micro introduction flow path 103, the force due to the liquid flow 300 is greater than the force due to the liquid flow 301.
  • the spherical valve 200 does not return to the tapered portion 10a but is positioned at the upper portion of the chamber 10.
  • the liquid flow 300 disappears, and the liquid flow flows backward from the inside of the micro discharge channel 102 and the chamber 10 through the gap between the spherical valve 200 and the tapered portion 10a to the micro introduction channel 103.
  • the liquid flow 301 generated by the protrusion 11 together with the liquid flow 302 also becomes a force to return the spherical valve 200 to the tapered portion 10a, and the spherical valve 200 can be returned to the tapered portion 10a faster.
  • the backflow of the liquid from the discharge channel 102 and the chamber 10 to the micro introduction channel 103 can be reduced.
  • FIGS. 2A to 2C show the operation of the micro check valve device 91 having no protrusion shown in FIGS. 2A to 2C with reference to FIG. 3D.
  • the micro check valve device 91 having no protrusions shown in FIGS. 2A to 2C has the same configuration as the micro check valve device 100 of the present embodiment shown in FIGS. 1A to 1C except that the protrusions 11 are not provided.
  • FIG. 2A shows a top view of the first substrate 101a of the micro check valve device 91 having no protrusion.
  • 2B is a longitudinal sectional view taken along a cutting line BB in FIG. 2A.
  • FIG. 2C shows a top view of the second substrate 101b in the micro check valve device 91 having no protrusion.
  • the inner wall surface of the chamber 10 does not have the protrusion 11 and is a flat surface protruding upward.
  • FIG. 3D shows the same state as FIG. 3C.
  • the liquid flow 301 generated by the protrusion 11 does not occur in the micro check valve device 91 that does not have the protrusion of FIG. 3D.
  • the micro check valve device 91 having no protrusion does not have a force to return the spherical valve 200 to the tapered portion 10a by the liquid flow 301.
  • the micro check valve device 91 having no protrusion has a slower time until the spherical valve 200 returns to the taper portion 10a, and the micro check valve device 91 and the micro discharge valve 102 and the chamber 10 are microscopic. The amount of liquid that flows back to the introduction flow path 103 increases.
  • Example 1 A micro check valve device 100 according to Example 1 shown in FIGS. 4A to 4C was manufactured. Each of FIGS. 4A to 4C corresponds to FIGS. 1A to 1C.
  • the second substrate 101b in the micro check valve device 100 shown in FIGS. 4A to 4C is composed of two substrates 101b-1 and 101b-2.
  • FIG. 4A is a top view of the first substrate 101a of the micro check valve device 100 according to the first embodiment.
  • FIG. 4B is a longitudinal sectional view taken along the section line CC of FIG. 4A.
  • FIG. 4C is a top view of the micro check valve device 100 excluding the first substrate 101a.
  • the micro check valve device 100 described in FIGS. 1A to 1C is the same as the micro check valve device 100 except that the third adhesive layer 403 is provided between the first substrate 101b and the third substrate 101c. Note that having the first adhesive layer 401, the second adhesive layer 402, and the third adhesive layer 403 does not affect the performance of the micro check valve device 100.
  • the material of the substrate 101 was polydimethylsiloxane.
  • the shape of the tapered portion 10a of the chamber 10 was flat.
  • the material of the spherical bulb 200 was glass.
  • the specific gravity of the glass was 2.5.
  • the performance of the micro check valve device 100 was measured by the measurement system shown in FIG. FIG. 5 conceptually shows the measurement system.
  • the measurement system shown in FIG. 5 includes a reservoir 220 for introducing a test solution, a measurement chamber 218 having a diaphragm pump, a plurality of micro check valve devices 100 (100a and 100b), a measurement channel 221, And a connection channel 219.
  • the liquid reservoir 220, the micro check valve device 100a, the measurement chamber 218, the micro check valve device 100b, and the measurement flow channel 221 are connected by the connecting flow channel 219 in this order.
  • the liquid is transported in the direction of the arrow shown in FIG. 5 (the order of the liquid reservoir 220, the micro check valve device 100a, the measurement chamber 218, the micro check valve device 100b, and the measurement flow channel 221).
  • the micro check valve device 100a, the measurement chamber 218, and the micro check valve device 100b function as the diaphragm type pump 230, the performance of the micro check valve device 100 was measured.
  • the inlet of the measurement chamber 218 was connected to the micro check valve device 100a, and the outlet of the measurement chamber 218 was connected to the micro check valve device 100b.
  • the liquid in the connection channel 219 was sucked into the measurement chamber 218 from the fifth channel 102a of the micro check valve device 100a.
  • the liquid is introduced into the micro check valve device 100a from the connection channel 219 through the first flow channel 103b of the micro check valve device 100a.
  • the liquid is sent from the fifth channel 102a of the micro check valve device 100a to the connection channel 219 on the downstream side of the micro check valve device 100a.
  • the liquid flows from the connection channel 219 into the micro check valve device 100b through the first flow channel 103b of the micro check valve device 100b.
  • the introduced liquid was discharged from the fifth channel 102a of the micro check valve device 100b to the connection channel 219 on the downstream side of the micro check valve device 100b.
  • the liquid discharged from the fifth flow path 102a of the micro check valve device 100b reaches the measurement flow path 221 through the connection flow path 219. The flow rate of the liquid that reached the measurement channel 221 was measured.
  • the check valve device 91 according to the comparative example was manufactured in the same manner as the micro check valve device 100 of the example except that the check valve device 91 was not provided.
  • the check valve device 91 according to the comparative example is the same as the check valve device 91 shown in FIGS. 2A to 2C.
  • the measurement method in the measurement system shown in FIG. 5 with the check valve device 91 according to the comparative example was the same as the check valve device 100 according to the example except that the chamber 10 did not have a protrusion.
  • the chamber and the reservoir for constituting the pump were also designed to be integrated with a common substrate, and were simultaneously manufactured by the same method as the valve.
  • the measurement chamber 218 includes a substrate layer 2, a diaphragm layer 1, a top plate layer 3, and a pump chamber 4 surrounded by the diaphragm layer 1 and the substrate layer 2.
  • the substrate layer 2, the diaphragm layer 1, and the top plate layer 3 were positioned in this order from the bottom to the top.
  • An adhesive layer 6 was fixed between the substrate layer 2 and the diaphragm layer 1 and between the diaphragm layer 1 and the top plate layer 3.
  • FIG. 6A is a top view of the measurement chamber 218.
  • the top plate layer 3 includes a top plate 31, a spring 33, and a frame 32.
  • the top plate 31 and the frame 32 are connected by a spring 33.
  • the top plate layer 3 was produced by cutting or injection molding the substrate.
  • the top plate 31 was supported by the spring 33 at three points.
  • FIG. 6B is a top view of the measurement chamber 218 with the top layer 3 removed.
  • Diaphragm layer 1 was produced by injection molding a substrate.
  • FIG. 6C is a cross-sectional view taken along the line DD in FIG.
  • the diaphragm layer 1 includes a fixed portion 12, a pump layer 13, and a deformable portion 110.
  • 6C is a cross-sectional view taken along line EE in FIG.
  • the substrate layer 2 has an introduction channel 21 and a discharge channel 22. A liquid is introduced into the pump chamber 4 via the introduction channel 21. The liquid is discharged from the pump chamber 4 through the discharge channel 22.
  • the deformable portion 110 When a downward force is applied to the top plate 31, the deformable portion 110 is deformed, the pump layer 13 moves toward the substrate layer 2, and the space of the pump chamber 4 disappears. Moreover, when the upward force is applied to the top plate 31 by the spring 33, the deformable portion 110 is deformed and the pump layer 13 is moved upward, so that the space of the pump chamber 4 is increased (the state shown in FIG. 6C). Return). In this way, the measurement chamber 218 functioned as a pump.
  • valve Next, the processing of the valve will be described.
  • Each layer constituting the valve was the same as each layer constituting the pump, and was formed simultaneously with the processing of the pump.
  • the valve body used the stainless steel bulb
  • This liquid is an aqueous solution to which pluronic F127 purchased from Sigma-Aldrich, an amphiphilic polymer, and a dye are imitated as a test liquid for bioanalysis.
  • FIG. 7A shows a state in which liquid is introduced into the pump chamber (chamber) 4.
  • FIG. 7B shows a state where the top plate 31 is pushed, the pump chamber (chamber) 4 is eliminated, and all the liquid in the pump chamber (chamber) 4 is removed.
  • the stroke operation is a stroke operation.
  • the stroke speed was dependent on the speed of pushing or pulling the push rod, and was about 0.5 seconds each.
  • the performance of the check valve device was evaluated by estimating the amount of liquid delivered per stroke from an image of the movement of the liquid in the flow path with a camera.
  • the pump used in the experiment is a pump constituted by a check valve device according to the above-described embodiment of the present invention, a pump constituted by a shallow conventional check valve device, and a pump constituted by a deep conventional check valve device. Three types were produced, and four identical pumps were produced for each pump. For all of these pumps, the amount of liquid delivered for 5 strokes was measured to determine the amount of liquid delivered per stroke.
  • the amount of liquid delivered per stroke was 0.29 ⁇ 0.01 ⁇ L for the pump constituted by the check valve device according to the example, whereas the error from the design value was within 10%.
  • the pump constituted by the shallow conventional check valve device was 0.07 ⁇ 0.05 ⁇ L
  • the pump constituted by the deep conventional check valve device was 0.14 ⁇ 0.04 ⁇ L.
  • the check valve device according to the embodiment is more accurate in the amount of liquid delivery than the conventional check valve device in which the reverse flow rate is large and the liquid feed amount per stroke is unstable. Operates with low reverse flow rate.
  • the performance of the pump constituted by the check valve device having the shallow groove was lower than that of the pump constituted by the check valve device according to the comparative example having the deep groove. This is because the shallower the groove, the smaller the space when the spherical valve is floating, so that the effect of viscous flow works greatly. As a result, even when the liquid is flowing, the amount of movement of the spherical valve is small, and the spherical valve is likely to return to the initial position.
  • check valve device according to the embodiment had a smaller back flow rate than the check valve devices according to both comparative examples.
  • the embodiment of the present invention can be used as a check valve device capable of obtaining an accurate rectifying effect, and can provide a pump with an accurate liquid feeding amount even when configured as a pump component.
  • Table 1 shows the control factors and levels.
  • control factors three factors were used: the type (specific gravity) of the valve body, the shape of the tapered portion, and the shape of the space (a recess or a recess around the protrusion).
  • levels 1 and 3 glass (2.5) and stainless steel, that is, SUS (7.8) and alumina (3.9) were used for the type (specific gravity) of the valve body.
  • the diameter of each sphere as a valve body is 0.5 mm.
  • the shape of the tapered portion is straight (flat), curved with a radius of 0.5 mm, and curved with a radius of 1 mm as levels 1, 2, and 3 for the taper of the section AA in FIG. 4B.
  • the shape (ceiling) of the recess formed in the chamber 10 of the substrate 101 has three levels prototyped in the above example as levels 1, 2 and 3, that is, the shape (projection) of the example of the present invention, a shallow conventional example. (Depth 0.1 mm), a deep conventional shape (depth 0.2 mm).
  • Table 2 shows the noise factors.
  • Level 1 (N1) was set as the condition for operating preferentially, and Level 2 (N2) was set as the condition for operating inferior.
  • concentration or absence of an amphiphilic polymer Pluronic F127, purchased from Sigma-Aldrich, and the stroke speed were used.
  • An amphiphilic polymer usually improves wettability, prevents wall surface deposits such as bubbles, and makes it easy to reliably obtain a fluid effect.
  • Level 1 is an aqueous solution containing approximately 0.5 seconds of stroke and pluronics as a preferential operating condition.
  • Level 1 (N1) is our standard operating condition, and the flow rate is about 38 ⁇ L / min.
  • Level 2 (N2) is a disadvantageous condition for the operation of the check valve device, does not include pluronics, and slows the flow rate to about 5 ⁇ L / min.
  • Fig. 8 shows the experimental results of all 26 elements. Element NO. Since all N2 of 1 could not be tested due to a prototype failure, estimation processing was performed as a missing value. That is, the average value of the S / N ratio of the experimental value excluding the missing value is used as the S / N ratio of the missing value, and the missing value is estimated from the analysis of variance to obtain the temporary value of the binding value, and then the temporary value. The S / N ratio including the unity value of the values was obtained, and the estimated values were converged by the successive approximation method that repeated the work of estimating the missing values from the analysis of variance.
  • Fig. 9 shows the factor effect diagram of the desired characteristics obtained from the analysis of variance of the experimental results.
  • a factor with a larger intensity change has a greater influence on the effect.
  • the unassigned factor is a dummy factor, indicating the magnitude of the experimental error. That is, the experimental result includes an error about the distribution of dummy factors.
  • the shape of the tapered portion hardly affects the performance of the check valve device.
  • the valve body simply shows that the heavier one has a shorter time to fall on the tapered portion, and the valve closes earlier.
  • the shape of the depression on the ceiling the difference in the depth of the depression hardly affects the performance, suggesting that the presence of protrusions greatly improves the performance.
  • the check valve device according to the present embodiment is easy to manufacture by the same manufacturing method and material structure as the conventional one, has a smaller back flow rate than the conventional check valve device, and reverses the accurate rectifying effect.
  • a valve stop device is provided. That is, when a back flow that closes the sphere valve occurs, the flow of pushing the sphere valve by the upper surface having the protrusion increases, so that it is possible to provide a micro check valve device that has a small back flow rate and little operation variation for each chip.
  • the micro check valve device In order to reduce the dead volume of the liquid remaining in the check valve device, it is desirable that the micro check valve device has a fine structure and a small gap, and can be used in a small external device. Therefore, it is desirable to operate automatically according to the flow direction without requiring a power source outside the chip.
  • a check valve device having a cylindrical channel, a tapered portion in the middle of the channel, and a sphere fitted in the tapered portion. That is, when a sphere serving as a valve body is fitted into the taper portion, the valve closes to stop the flow, and when it floats from the taper portion, the valve opens to allow the flow to pass.
  • Patent Document 1 Since the opening and closing of the valve is determined by the direction of the flow, this function realizes the function of stopping the backflow. So far, Patent Document 1 has proposed a structure of a micro check valve suitable for mounting in a card-like chip. Non-Patent Document 1 reports a prototype example of a micro check valve.
  • Non-Patent Document 2 summarizes their efforts.
  • Four examples of non-patent document 1 check valves with a sphere floating from a taper have been reported. However, since the operating flow rate is mL / min and the reverse flow rate is in the order of mL, the ⁇ -TAS chip is used. Application to is not suitable.
  • As another type of check valve a method has been proposed in which a part of a fin-like valve body is fixed to a valve seat. However, the force that blocks the flow path by the elastic force of the fixing part to the valve seat is proposed. However, liquid leakage is unlikely to occur, but it requires a pressure difference to bend the elastic body and open the valve, and high alignment accuracy is required to sufficiently reduce dead volume. Only high-cost technology such as Si-MEMS is available.
  • the flow is viscous in the micro flow path, and the movement of the valve body is basically the Hagen-Poiseuille of the Navier-Stokes equation.
  • the flow around the valve body causes the valve body to move closer to or away from the taper part, and until the valve body reaches the taper part and blocks the flow.
  • Backflow occurs.
  • the range of practical dimensions is roughly limited.
  • the thickness of the tip is preferably about 1 mm to several mm, in order to reduce the installation volume of the check valve device and fit it in the size of the tip, a flow path connected to the check valve device is not provided.
  • Patent Document 1 a configuration is adopted in which the connection is made along the in-plane direction of the substrate constituting the chip, that is, laterally.
  • the micro check valve disclosed in Patent Document 1 the flow path is connected perpendicularly to the taper portion. For this reason, the number of substrates and adhesive layers constituting the flow path increases one by one.
  • a micro check valve that uses a sphere as a valve body is well known as a check valve. Actually, the backflow could not be prevented and sufficient performance could not be demonstrated so far.
  • Non-Patent Document 1 a flow rate of the order of mL / min is required for operation while the basic structure is successfully processed, and the reverse flow rate is also in the order of mL.
  • the function as a check valve is remarkably deteriorated, which indicates that it is not suitable for a liquid feeding operation on the order of ⁇ L. Therefore, although it is easy to manufacture with a space-saving and simple structure and can be manufactured in a size suitable for use in a disposable small ⁇ -TAS chip, the conventional check valve is suitable for use in a ⁇ -TAS device. There wasn't.
  • Patent Document 1 by making the flow of fluid around the valve body linear, such as making the flow path with the taper longer than the size of the valve body, the flow that brings the valve body closer to the taper It can be produced reliably.
  • the volume of the surrounding flow path with respect to the valve body increases, the amount of liquid remaining in the check valve, that is, the dead volume increases, and the characteristics of ⁇ -TAS that can be analyzed in a small amount are impaired.
  • the moving distance of the valve body increases and the reverse flow rate increases.
  • the tip becomes thick and it is difficult to reduce the size.
  • the valve body is made smaller and accommodated in a linear flow, it is difficult to manufacture the small valve body and dispose it on the substrate, which increases the processing cost.
  • the space is formed by fixing a lid (for example, the first substrate 101a) to a substrate (for example, the second substrate 101b) having a groove formed on the surface thereof. , Having a microchannel, and a chamber (for example, chamber 10) is formed in the channel.
  • One channel for example, the micro discharge channel 102 and the micro introduction channel 103 is connected to each of a part of the side surface and the bottom surface of the chamber.
  • a channel on the bottom side of the chamber (for example, the micro introduction channel 103) is connected to an external channel by a through hole formed on the bottom surface of the chamber, and the through hole has a tapered portion (for example, a taper) that narrows toward the bottom surface.
  • a spherical valve body (for example, spherical valve 200) is located at the tapered part, and has a protruding structure (for example, protrusion 11) formed on the chamber side surface of the lid.
  • a micro check valve device (for example, the micro check valve device 100) is provided in which the protruding structure is disposed, for example, in the vicinity of the center line of the through hole.
  • the flow of the fluid that pushes the valve body after the valve body floats in the chamber and the valve opens due to the flow of the fluid that pushes the valve body from the through hole (for example, the micro introduction channel 103).
  • the fluid flow in the chamber is reversed and the valve closes.
  • the viscous fluid around the projecting structure pushes the valve body toward the through hole and causes the taper portion to approach, and the effect that the valve body quickly approaches the taper portion is obtained.
  • the problem of a large amount of backflow occurring before the valve is closed is solved, and the manufacture of a micro check valve device with a low backflow rate is facilitated.
  • the micro check valve device according to the first aspect, wherein the protrusion is formed on a surface of a recess formed in the lid.
  • the protrusion protrudes from the chamber side surface of the lid by 30 ⁇ m or more, and when the valve body is located at the taper portion, the surface of the protrusion and the valve
  • the distance of the body is in the range of 50 ⁇ m to 300 ⁇ m, and the width of the flat part of the top of the protrusion is such that the width facing the valve body is equal to or less than the diameter of the valve body
  • the distance between the surface of the protrusion and the valve body in the range of 50 ⁇ m to 300 ⁇ m, the flow rate of the backflow to the tapered portion is reduced and the viscous resistance is increased, so that the whole is directed toward the through hole. Since the pushing action is relatively large, the effect that the valve body quickly approaches the tapered portion is obtained, and the valve body does not rise greatly.
  • the width of the flat portion of the projection top is equal to or less than the diameter of the valve body, the action of pushing the valve body toward the through hole is increased. Therefore, the valve body floating in the chamber quickly returns to the taper when the valve is closed, and the problem that a large amount of backflow occurs before the valve is closed is solved.
  • the device can be manufactured easily.
  • the spherical valve 200 is applied to the spherical valve 200 as a force that moves in a direction to return to the position where the spherical valve 200 is in contact with the tapered portion 10a. For this reason, the spherical valve 200 can quickly return to the position in contact with the tapered portion 10a, and the liquid discharged from the chamber 10 to the micro discharge channel 102 by the spherical valve 200 is prevented from flowing back into the chamber 10. it can.
  • the micro check valve device for example, as a check valve device configured in a card-like micro flow path, automatically operates according to the flow direction with a small dead volume, and has a low reverse flow rate.
  • a stop valve device can be provided.
  • the micro check valve device according to the present disclosure is arranged before and after the flow generated in the diaphragm type chamber, the flow can be rectified to produce an accurate continuous liquid feed pump with a low reverse flow rate and an accurate flow rate. It can be used as a component of a ⁇ -TAS device.

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Abstract

La présente invention concerne un appareil à microclapet antiretour (100) relié à un dispositif à micro-canaux, l'appareil à microclapet antiretour comprenant : une carte (101) ; une chambre (10) située à l'intérieur de la carte, et ayant une surface supérieure comportant une projection (11), et une partie conique (10a) située dans sa partie inférieure ; un microcanal de décharge (102) joint à la partie latérale de la chambre ; un microcanal d'introduction (103) joint à la partie conique de la chambre ; et une soupape sphérique (200) située dans la partie conique.
PCT/JP2016/004010 2015-09-14 2016-09-02 Appareil à microclapet antiretour WO2017047032A1 (fr)

Priority Applications (1)

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US15/472,404 US20170198833A1 (en) 2015-09-14 2017-03-29 Micro check valve apparatus

Applications Claiming Priority (4)

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JP2015-180254 2015-09-14
JP2015180254 2015-09-14
JP2016-146505 2016-07-26
JP2016146505A JP2017056545A (ja) 2015-09-14 2016-07-26 マイクロ逆止弁装置

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI658985B (zh) * 2017-04-07 2019-05-11 美商惠普發展公司有限責任合夥企業 慣性泵

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988565U (ja) * 1982-12-06 1984-06-15 新潟ウオシントン株式会社 往復動ポンプ用ボ−ルバルブのガイド
JP2006511762A (ja) * 2002-07-26 2006-04-06 アプレラ コーポレイション 微小流体デバイスのための一方向性マイクロボールバルブ

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5988565U (ja) * 1982-12-06 1984-06-15 新潟ウオシントン株式会社 往復動ポンプ用ボ−ルバルブのガイド
JP2006511762A (ja) * 2002-07-26 2006-04-06 アプレラ コーポレイション 微小流体デバイスのための一方向性マイクロボールバルブ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
YAMAHATA, C ET AL.: "A ball valve micropump in glass fabricated by powder blasting", SENSORS AND ACTUATORS B, vol. 110, pages 1 - 7, XP027810825 *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI658985B (zh) * 2017-04-07 2019-05-11 美商惠普發展公司有限責任合夥企業 慣性泵
US11686327B2 (en) 2017-04-07 2023-06-27 Hewlett-Packard Development Company, L.P. Inertial pumps

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