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WO2016198174A1 - Dispositif de service pour un module d'installation - Google Patents

Dispositif de service pour un module d'installation Download PDF

Info

Publication number
WO2016198174A1
WO2016198174A1 PCT/EP2016/054978 EP2016054978W WO2016198174A1 WO 2016198174 A1 WO2016198174 A1 WO 2016198174A1 EP 2016054978 W EP2016054978 W EP 2016054978W WO 2016198174 A1 WO2016198174 A1 WO 2016198174A1
Authority
WO
WIPO (PCT)
Prior art keywords
service device
support
system module
frame
plant
Prior art date
Application number
PCT/EP2016/054978
Other languages
German (de)
English (en)
Inventor
Andreas Birkner
Guido VAN LOON
Arndt Evers
Original Assignee
Integrated Dynamics Engineering Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Integrated Dynamics Engineering Gmbh filed Critical Integrated Dynamics Engineering Gmbh
Priority to EP16709369.9A priority Critical patent/EP3308393A1/fr
Publication of WO2016198174A1 publication Critical patent/WO2016198174A1/fr

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
    • H01L21/6719—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the construction of the processing chambers, e.g. modular processing chambers

Definitions

  • the invention relates to a service facility for
  • the invention relates to a service module for plant modules of a plant used in the field of semiconductor industry, in particular modules of a process plant, or modules of a process control system (for example, a measuring sensor), or modules of a lithographic system (the above systems are referred to as facilities for processing ).
  • the plant module is by means of
  • Equipment for processing substrates are often modular and comprise a plurality of plant modules, which
  • Form processing stations for the substrates may include, for example, lithography equipment, measuring stations, etc.
  • the substrate is thereby from a
  • a similar structure of plant components can also be found in plants of the food and pharmaceutical industry.
  • the disadvantage is that individual system modules are often difficult to access, if they need to be maintained or if components must be repaired. For this purpose, often the system module must be manually or by means of a crane pushed out of the system or lifted out, which is expensive. Furthermore, it is often necessary for the individual system modules to be positioned precisely in order to avoid, in particular, position deviations during the transfer of components from one system module to another.
  • the invention is based on the object to provide a service facility by means of individual plant modules, especially plant modules of a plant for processing substrates, are more easily accessible and can be easily maintained or repaired.
  • the object of the invention is already by a
  • Service device for a system module and solved by a system module with a service device according to one of the independent claims.
  • the invention relates to a service facility for a system module.
  • the service device is designed in particular for a system module for processing wafers or masks. It is also conceivable, however, the use of
  • Invention for plants as they are used in the field of pharmaceutical and food industry and which also consist of individual plant modules in which different process steps are performed with a product to be processed.
  • the service facility includes a circulation for the
  • the system module is placed on this edition. It is specifically intended that the
  • the support may have any configuration for receiving the system module, in particular, the support is designed as a frame, in particular as a metal frame.
  • the support can be moved together with the system module in at least one direction, wherein the support is movable relative to an attachable to the floor frame.
  • the service device thus consists of a component, the frame, which is firmly connected to the ground, and a further component, the support, which is movable relative to the frame.
  • the support may be supported on the ground in particular in a retracted state at the front, in particular by means of rollers. So can heavy
  • the service facility comprises removable rollers and that the rollers fixed to the
  • rollers are part of the edition.
  • the edition is in a retracted
  • the service facility is designed for loads of more than 50 kg, preferably more than 500 kg and more preferably more than 4000 kg.
  • the support is opposite the frame
  • the service facility is preferably designed such that in the locked state support and frame are locked in all three spatial directions to each other. This can be realized, for example, by the fact that the support is movable only in one degree of freedom relative to the frame, namely when moving out. In this case, a lock in one spatial direction is sufficient. On the other hand, if the support is also movable in height, a stop is provided for this purpose in the retracted state or the locking mechanism can also rest in the vertical direction relative to the support
  • the frame may in particular comprise rails for guiding the support.
  • the service device preferably comprises a drive, via which the support is movable.
  • the drive can be operated both mechanically and mechanically.
  • the drive can be done in particular on racks, spindles, in particular threaded spindles, or timing belt.
  • drive means are provided between the frame and support on both sides, which can be moved synchronously.
  • a motorized drive and two drives can be used, not mechanically are coupled together but are synchronized by other means, such as stepper motors.
  • a synchronous drive, manual or motorized has the advantage that thereby the system module can be moved very parallel to the direction of movement, whereby the distance between the modules (for example, 6a, 6b, 6c) can be kept very small.
  • the drive comprises in each case arranged on the sides of the service device drives, in particular racks, over which the support is movable by a synchronous movement on both sides. This has the advantage of a very precise guidance and the support is also positionally secure in the extended or partially extended state within certain limits, that is, this can only move to the game, which has the rack drive.
  • Such a drive can be operated manually or by motor.
  • a receptacle for a hand crank via which the rack drive is actuated via the transmission.
  • Drive and / or locking are in particular designed such that they can be operated by a person.
  • the passage means may in particular comprise a dowel pin and a sliding surface.
  • the passport means arranged on the frame or on the support, height-adjustable
  • the height adjustment can be done for example via mechanically or motor-operated elements, in particular via a threaded spindle. It is also conceivable to set an exact position via corresponding spacer plates.
  • the invention further relates to a plant module which has a service facility as above
  • Service device a greater depth than the system module. In this embodiment, therefore, the plant module is moved by a further distance than the depth of the
  • the service module can also comprise a telescopic extension on the support and / or on the frame.
  • the support can be moved further than the depth of the plant module, without the service facility itself a greater depth than that
  • Plant module has.
  • this includes
  • Plant module or the service facility which is part of the plant module, at least one sensor, via which the position to an adjacent further plant module in at least one spatial direction can be determined.
  • sensors for example, capacitive or
  • inductive proximity switches or optical sensors such as photoelectric sensors or cameras.
  • the invention further relates to a system with a plurality of system modules.
  • a plant module forms the head of a plant and can
  • Fig. 1 and Fig. 2 show a three-dimensional view of a service device in the retracted and extended state.
  • FIG. 6 shows a plant for processing wafers with a plurality of plant modules, which comprises sensors via which an exact positioning of the plant modules
  • FIGS. 7 to 11 details of another embodiment of a
  • Fig. 1 shows a perspective view of a
  • the service device 1 comprises a frame 3, which can be fastened on the floor.
  • the frame 3 is U-shaped in this embodiment.
  • the service device 1 comprises a support 2, which is also configured in this embodiment as a U-shaped frame.
  • a service module (not shown) can be attached.
  • the support 2 relative to the frame 3 is movable.
  • the support 3 In order to be supported at the front even in the extended state, the support 3 comprises rollers 4 on a front side. In this retracted state, the support 2 rests not on the rail system, but on overlapping sliding mating surfaces (not shown) to an exact
  • Fig. 2 shows the service device 1 in the extended state.
  • Sliding surfaces 5 or support surfaces which together with a mounted on the support 2 pin or attached sliding surface (not shown) form a passport.
  • 3 shows a plant for processing wafers.
  • the system is modular and includes in this example the system modules 6a to 6c, which as
  • the plant is from a front over the
  • System module accessible, that is, for example, via the system module 6a, the system can be charged.
  • the system modules 6a and 6b each rest on one
  • Plant modules 6a to 6c are arranged directly adjacent to each other, so that a wafer from system module to system module
  • FIG. 4 now shows how the system module 6a was pulled forward via the service device 1a.
  • the space between the service modules 6a and 6b is now accessible and it can repair the work
  • Service module 6a or 6b are made.
  • Fig. 6 shows a further embodiment of the invention, in which an exact positioning of the system modules and 6b is checked by the sensors 7a to 7c.
  • optical sensors that have a corresponding counterpart, such as
  • a reflector or a mark on the service module 6a (not shown) check whether in the retracted state, the service modules 6a and 6b are exactly aligned with each other.
  • Fig. 7 shows a perspective view of another embodiment of a service device 1 for a
  • the service facility 1 comprises in this
  • Embodiment a support 2, which is designed as a rectangular frame.
  • the support 2 is movable on a frame 3 attachable to the floor and also includes rollers 4 on the front.
  • the frame 3 is in this embodiment in two parts, namely as two rails, formed, which can be fixed to the ground.
  • the edition 2 is here in the retracted state
  • the service device 1 comprises a rack drive.
  • the rack drive includes at the front of the rack drive
  • Pad 2 a drive 9, in which, for example, a crank can be inserted.
  • the drive 9 is connected to a transmission 8, by means of which the rotational movement of the drive 9 is transmitted to gears on
  • the service device 1 comprises a
  • Locking device via which the Service device can be locked in the retracted state.
  • the locking device also comprises a drive 10 which is accessible from the front, but which is connected to the frame 3.
  • the user can unlock the service device via the drive 10, which is also connected via a gear 11 with a locking device on the frame 3, and then via the drive 9, the system module
  • Fig. 8 shows a detail view of the frame.
  • the frame has a rack 12 for the drive and an additional rail 13, which serves as a guide for the support.
  • an additional rail 13 which serves as a guide for the support.
  • Fig. 9 shows a perspective view of the
  • spacer plates can be positioned under the pads.
  • sliding element 18 slides at least the rear part of the support rails on the frame.
  • the sliding elements 18 engage around the rails.
  • a passport in the form of a
  • Pass pin 19 This slides in the retracted state on an actuator of the frame (20 in Fig. 11).
  • Fig. 11 shows a further detail view of the frame seen from the rear side.
  • the support plate 22 is chamfered to achieve that when retracting the support plate of the support on the
  • Platen 22 slides. This can be adjusted for example by means of a threaded spindle and forms in cooperation with another passport means, such as a dowel pin (19 in Fig. 10), a fit in the retracted state.
  • a threaded spindle forms in cooperation with another passport means, such as a dowel pin (19 in Fig. 10), a fit in the retracted state.
  • the locking mechanism 14 which has an engagement element 21, which for locking the support on the frame in a

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

La présente invention concerne un module de service à l'aide duquel un module de l'installation, servant en particulier au traitement de tranches, peut être extrait de l'installation.
PCT/EP2016/054978 2015-06-09 2016-03-09 Dispositif de service pour un module d'installation WO2016198174A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP16709369.9A EP3308393A1 (fr) 2015-06-09 2016-03-09 Dispositif de service pour un module d'installation

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
EP15171212 2015-06-09
EP15171212.2 2015-06-09

Publications (1)

Publication Number Publication Date
WO2016198174A1 true WO2016198174A1 (fr) 2016-12-15

Family

ID=53433003

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2016/054978 WO2016198174A1 (fr) 2015-06-09 2016-03-09 Dispositif de service pour un module d'installation

Country Status (2)

Country Link
EP (1) EP3308393A1 (fr)
WO (1) WO2016198174A1 (fr)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999039386A1 (fr) * 1998-01-30 1999-08-05 Hitachi, Ltd. Portillon de chargement et son chariot de transfert
EP2264749A2 (fr) * 2009-06-15 2010-12-22 Murata Machinery, Ltd. Système de stockage automatique
DE102010048909A1 (de) * 2010-10-11 2012-04-12 Ekra Automatisierungssysteme Gmbh Prozessmaschine, insbesondere zum Bearbeiten und/oder Inspizieren von Substraten

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6298685B1 (en) * 1999-11-03 2001-10-09 Applied Materials, Inc. Consecutive deposition system
DE50101653D1 (de) * 2001-01-25 2004-04-15 Tecan Trading Ag Maennedorf Verschiebeeinrichtung mit einem in eine Zahnstange eingreifenden Zahnriemen
WO2006009723A2 (fr) * 2004-06-15 2006-01-26 Brooks Automation, Inc. Appareil de traitement de substrat a module de composant amovible
US7762755B2 (en) * 2005-07-11 2010-07-27 Brooks Automation, Inc. Equipment storage for substrate processing apparatus
KR101009742B1 (ko) * 2010-10-29 2011-01-19 주식회사 세진아이지비 동력전달장치

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1999039386A1 (fr) * 1998-01-30 1999-08-05 Hitachi, Ltd. Portillon de chargement et son chariot de transfert
EP2264749A2 (fr) * 2009-06-15 2010-12-22 Murata Machinery, Ltd. Système de stockage automatique
DE102010048909A1 (de) * 2010-10-11 2012-04-12 Ekra Automatisierungssysteme Gmbh Prozessmaschine, insbesondere zum Bearbeiten und/oder Inspizieren von Substraten

Also Published As

Publication number Publication date
EP3308393A1 (fr) 2018-04-18

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