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WO2015008843A1 - Scan bist lfsr seed generation method and memory medium for storing program for same - Google Patents

Scan bist lfsr seed generation method and memory medium for storing program for same Download PDF

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Publication number
WO2015008843A1
WO2015008843A1 PCT/JP2014/069103 JP2014069103W WO2015008843A1 WO 2015008843 A1 WO2015008843 A1 WO 2015008843A1 JP 2014069103 W JP2014069103 W JP 2014069103W WO 2015008843 A1 WO2015008843 A1 WO 2015008843A1
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Prior art keywords
scan
circuit
seed
lfsr
test
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PCT/JP2014/069103
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French (fr)
Japanese (ja)
Inventor
哲史 大竹
本田 太郎
孝憲 森保
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国立大学法人大分大学
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Publication of WO2015008843A1 publication Critical patent/WO2015008843A1/en

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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3183Generation of test inputs, e.g. test vectors, patterns or sequences
    • G01R31/318385Random or pseudo-random test pattern
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317Testing of digital circuits
    • G01R31/3181Functional testing
    • G01R31/3185Reconfiguring for testing, e.g. LSSD, partitioning
    • G01R31/318533Reconfiguring for testing, e.g. LSSD, partitioning using scanning techniques, e.g. LSSD, Boundary Scan, JTAG
    • G01R31/318544Scanning methods, algorithms and patterns
    • G01R31/318547Data generators or compressors

Definitions

  • the present invention is a seed generation method for built-in self test of a semiconductor integrated circuit, and more specifically, high failure detection rate can be obtained, seed generation can be performed at high speed, and the number of seeds can be reduced.
  • the present invention relates to a scan BIST LFSR seed generation method and a storage medium for storing the program.
  • testability design incorporating additional circuits in a circuit
  • scan design states can be freely set from the outside to the respective flip flops constituting the sequential circuit, and the states of those flip flops can be observed from the outside.
  • the test generation problem of scan-designed sequential circuits can be treated as a test generation problem of combinational circuits, which improves the test generation ease.
  • BIST built-in self test
  • BIST uses a circuit that generates a test pattern and a circuit that examines the output response to the test pattern.
  • a linear feedback shift register (LFSR) that generates a pseudorandom pattern is mainly used as a pattern generation circuit in BIST, and a circuit that checks an output response uses MISR (multiple-input signature register) .
  • the MISR is a circuit for compressing the output response of the circuit, but in the present invention, only the pattern generation circuit and the circuit to be inspected are handled.
  • the LFSR of the pattern generation circuit can pseudo-randomly generate all patterns except the pattern of all 0 depending on the feedback position. However, since the operation of the LFSR is critical, some circuits can not achieve high fault coverage with pseudorandom patterns. A fault that is resistant to testing with pseudorandom patterns is called a random pattern tolerant fault. In order to achieve high fault coverage in circuits with such faults, reset the initial value of the LFSR's register (called the seed to be set initially to the LFSR's register) (reseed). Is known to be effective.
  • An object of the present invention is to provide a new LFSR seed generation method for improving the failure detection rate of the scan BIST in consideration of these problems.
  • a seed generation model of scan BIST is formed, and a test generation of a target fault is performed on the formed seed generation model to generate a seed of the LFSR.
  • the seed generation model includes an XOR network configured by expanding the time of the scan path length in the scan FF of the circuit under test, and the combinational circuit portion of the circuit under test.
  • a scan BIST LFSR seed generation method comprising: a configuration in which the XOR network output is connected to the combinational circuit portion.
  • a phase shifter group may be connected between the XOR network and a combinational circuit portion of the test circuit.
  • a random inversion circuit group may be connected between the XOR network and the combinational circuit portion of the circuit under test.
  • Each of the random inversion circuits of the random inversion circuit group includes an inversion logic circuit inserted between the XOR network and the combinational circuit portion of the circuit under test, a second XOR network, and a second XOR network.
  • an inversion control circuit for controlling the operation of the inversion logic circuit using an output.
  • the target failure may be a stuck-at failure.
  • test generation of the target failure may be performed using an automatic test pattern generation tool.
  • the seed generation model further includes a multiplexer for temporally switching the XOR network output and the scan FF output and inputting the same to the combinational circuit portion, and timing of switching of the multiplexer.
  • a timing generator may be provided to control.
  • the seed generation model may further include a phase shifter group or a random inversion circuit group.
  • the seed generation model further includes a second combinational circuit portion that is a duplicate of the combinational circuit portion, and an input of the second combinational circuit portion is an output of the XOR network and The output of the combinational circuit portion may be connected.
  • the seed generation model further includes: a second XOR network configured by expanding a scan path length in the scan FF of the circuit under test + 1 scan shift in time with the LFSR of the scan BIST; A multiplexer for temporally switching between the network output and the second XOR network output and inputting the same to the combinational circuit portion may be provided, and a timing generator for controlling the switching timing of the multiplexer.
  • the LFSR of the scan BIST is expanded by time for the scan path length in the scan FF of the circuit under test to form an XOR network, and the XOR network is subjected to the test
  • a computer In order to cause a computer to execute a procedure of forming a seed generation model by connecting to a combinational circuit portion of a circuit, and a procedure of generating a test of a target fault on the seed generation model to generate a seed of the LFSR
  • an XOR network constructed by expanding a scan BIST LFSR for a scan path length in a scan FF of a circuit under test, the XOR network output and the scan A procedure for forming a seed generation model by a multiplexer that temporally switches between the FF output and applies it to the combinational circuit part of the circuit under test, and a timing generator that controls the switching timing of the multiplexer, the seed generation model A storage medium is provided for storing a program for causing a computer to execute a test generation of a target fault with respect to the above to form a seed of the LFSR.
  • an XOR network constructed by expanding a scan BIST LFSR for a scan path length in a scan FF of a circuit under test, and copying the combined circuit portion A second combinational circuit portion, the XOR network output connected to the input of the combinational circuit portion, and the XOR network output and the combinational circuit portion output connected to the input of the second combinational circuit portion
  • a storage medium storing a program for causing a computer to execute a procedure for forming a seed generation model and a procedure for performing test generation of a target fault on the seed generation model to form a seed of the LFSR provide.
  • an XOR network constructed by expanding a scan BIST LFSR for a scan path length in a scan FF of a circuit under test and a combinational circuit of the circuit under test Part, the second XOR network configured by expanding the scan path length in the scan FF + 1 scan shift time in the scan FF, and the combinational circuit by temporally switching the output of the XOR network or the second XOR network
  • a procedure for forming a seed generation model by a multiplexer applied to a part and a timing generator for controlling switching timing of the multiplexer, and a test generation of a target fault on the seed generation model to seed the LFSR The steps to form the computer Storing a program for executing, it provides a storage medium.
  • the scan BIST LFSR seed generation method of the present invention a high failure detection rate can be obtained, seeds can be generated at high speed, and the number of seeds can be reduced. That is, according to the method of the present invention, the same operation as the scan BIST circuit in the test mode can be simulated for the circuit under test. And since it is possible to directly obtain the seed, it is not necessary to generate a test with don't care, and the number of patterns can be reduced compared to the conventional method. In addition, it is not necessary to perform failure simulation again in order to confirm how much failure the seed generated in the process of generating the seed can detect. Therefore, there is also an advantage that the test time can be reduced.
  • FIG. 2 is a diagram showing a seed generation method according to the present invention.
  • FIG. 6 is a timing chart showing a test operation of the LoC method targeted by the model of FIG. 5 (B).
  • FIG. 8 is a timing chart showing a test operation of the LoS method targeted by the model of FIG. 7 (A).
  • FIG. 7 shows a sequential circuit.
  • FIG. 7 shows a circuit with random pattern tolerant failure.
  • generation model (random) with a random inversion.
  • generation model (delay) with a random inversion.
  • Timing chart of LoC (Broadside) method. Time expansion model representation of LoC test (Broadside test).
  • generation model 1 for delay faults. 6 is a timing chart of a seed generation model 1.
  • FIG. 1 is a block diagram conceptually showing a conventional scan BIST LFSR seed generation method.
  • a test pattern is generated by processing a netlist of a circuit under test (CUT) with an automatic test pattern generation tool (ATPG).
  • the test pattern thus obtained is subjected to seed conversion to obtain a seed of LFSR.
  • the seed of the LFSR is obtained through two-step processing (two-pass) of test pattern generation and seed generation.
  • a test pattern may not be converted into a seed, and as a result, there is a problem that the fault detection rate is lowered.
  • the present inventors considered that it is possible to create all seeds if ATPG can directly generate seeds without creating a test pattern from a netlist. .
  • FIG. 2 is a block diagram conceptually showing the procedure of the one-pass seed creation method proposed by the present inventors.
  • this method in order to create a seed directly by ATPG, a circuit obtained by artificially converting a circuit to be manufactured (CUT to be tested, CUT) from a netlist into a circuit suitable for producing a seed and converting the same Apply ATPG to generate seeds.
  • the converted circuit is shown as a seed generation model.
  • the LFSR used as a test pattern generator in the BIST and the state information of each scan FF of the sequential circuit which is a test circuit are temporally expanded.
  • FIG. 3 is a block diagram showing a subject BIST model.
  • 1 indicates an LFSR
  • 2 indicates a circuit under test (CUT)
  • 3 indicates a response compressor (MISR).
  • the CUT 2 is composed of a combinational circuit portion 20 of a sequential circuit and a scan FF chain 30.
  • the response compressor 3 is not considered.
  • FIG. 4 is a diagram showing the configuration of a seed generation model according to the first embodiment of the present invention.
  • the model of this embodiment is a base model, and targets static faults.
  • the combination circuit part of the sequential circuit is constructed by temporally expanding the BSR LFSR 1 by the longest scan path length of the scan FF 30 (see FIG. 3). Configured to connect to 20 inputs.
  • the scan FF 30 is removed from the circuit under test (CUT) 2 shown in FIG. 3, the input from the original scan FF 30 to the combinational circuit portion 20 is a pseudo external input (PPIs).
  • PPIs pseudo external input
  • the outputs to the scan FF 30 of the above are assumed to be pseudo external outputs (PPOs).
  • This model can simulate the same operation as the scan BIST circuit in the test mode. Therefore, if ATPG for a single stuck-at fault model or the like is applied to this seed generation model, as shown in FIG. 2, a seed for detecting a fault of the fault model without generating a test pattern for the CUT Can be determined directly.
  • the XOR network will be described later with reference to FIGS. 8-10.
  • FIGS. 5 (A), 5 (B), 6 and 7 (A) below show seed generation models for delay fault detection.
  • the seed generation model shown in FIG. 5A is a seed generation model 1 for delay fault LoC test
  • FIG. 6 shows a seed generation model 2 for delay fault LoC test
  • the model shown in FIG. 7A is a seed generation model for the delay fault LoS test.
  • the model shown in FIG. 5A is a seed generation model for testing delay faults in a launch-off capture (or broadside, hereinafter LoC) method, and shows a model corresponding to multi-clock capture.
  • This model has a configuration in which a multiplexer 40 and a timing generation circuit 50 for temporally switching the input of the multiplexer 40 are added to the base model (XOR network 10 and combinational circuit portion 20) shown in FIG.
  • the multiplexer 40 serves to switch the input signal to the combinational circuit portion 20 between the output of the XOR network 10 and the output of the scan FF 30.
  • the multiplexer 40 is set to 1 during scan shift and during application of the first pattern, and to 0 during application of the second pattern (0 during capture in multi-cycle capture).
  • FIG. 5B is a diagram showing another example of the model shown in FIG. 5A, which is a model for detecting delay faults in a two-pattern test (two-cycle capture).
  • the circuit indicated by the dotted line 52 is an example of the timing generation circuit in the case of the two pattern test.
  • FIG. 5C is a timing chart of test pattern loading in the LoC test corresponding to the two pattern test.
  • the scan enable signal (SE) to 1 (scan shift mode) and apply the scan clock for a cycle of scan path length (the number of scan FFs in the longest scan path when there are multiple scan paths)
  • SE scan enable signal
  • SO scan output
  • FIG. 6 shows a seed generation model 2 for LoC test.
  • This model comprises an XOR network 10, a combinational circuit portion 20 of the circuit to be detected, and a second combinational circuit portion 20 'duplicating the combinational circuit portion 20.
  • test generation of stuck-at faults can generate two pattern tests for delay faults.
  • This uses a two-time expansion model. Duplicate two combination circuit parts, connect PI to both outputs of XOR network together, connect PPO of the first circuit and PPI of the second circuit and test two patterns only in combination circuit Can be generated.
  • the first combinational circuit is the same portion as the signal line assuming a failure of the target circuit. It may be set to 0, and in the second combinational circuit, test generation may be performed on the same site assuming a 0 stuck-at fault.
  • FIG. 7A shows a seed generation model for testing delay faults by a launch off shift (or skewed load, hereinafter, LoS) method.
  • the second XOR network 10 ′ has a configuration in which a multiplexer 40 and a timing generation circuit 50 are added to temporally select the output of either XOR network 10 ′ and apply it to the combination circuit portion 20.
  • the model shown corresponds to multi-clock capture, but if a circuit that outputs 1 when applying the first pattern and outputs 0 in synchronization with the second pattern capture clock is used as a timing generation circuit, it supports 2 pattern test Model.
  • FIG. 7B shows a timing chart of test pattern loading in the LoS test corresponding to the two pattern test.
  • the LoS test first, in scan shift mode, apply the scan clock for the scan path length cycle to shift in the first pattern of the 2 pattern test from the scan input and simultaneously shift out the response to the 2 pattern test. Do. Next, the scan clock is applied for one more cycle in the scan shift mode.
  • the value set for the scan FF is the second pattern of the two pattern test.
  • SE is set to 0 (normal operation mode) and a normal clock is applied for one cycle.
  • the value loaded to the FF becomes a response to the two pattern test.
  • the period from the last scan clock application to the normal clock application should be equal to the normal clock. Perform the test by repeating this.
  • FIG. 8 is a diagram showing a sample circuit of 3-stage LFSR, 2 external inputs, and 3 scan path lengths.
  • 81 indicates a 3-stage LFSR
  • 82 indicates a CUT
  • 83 indicates a combination circuit portion of the CUT 82
  • 84 indicates a scan path of the CUT 82.
  • the LFSR is configured by XOR and FF. Therefore, when the state information of the scan path 84 is temporally expanded, the circuit to be inspected can be considered as a combination circuit without an FF. Therefore, the values of each scan FF at a certain time and the external input can be expressed as a function of the seed.
  • FIG. 10 shows an XOR network 101 formed based on the input / output relationship of FIG.
  • FIG. 11 is a diagram showing a seed generation model configured by connecting the XOR network 101 shown in FIG. 10 to the combinational circuit portion 83 of the CUT, and the base model shown in FIG. 4 is applied to the sample circuit of FIG. It is a thing.
  • the same operation as the scan BIST circuit in the test mode can be simulated, and ATPG is applied to this model. Can directly determine the seed. As a result, it is not necessary to generate a test with don't care, and the number of patterns can be reduced compared to the conventional method.
  • FIG. 12 is a diagram showing a sample circuit of a 3-stage LFSR, 2 external inputs, and a scan path length of 3 and has 1 stuck-at fault in the combinational circuit portion.
  • FIG. 13 shows an example of generating a seed for a target failure by the seed generation model formed for the circuit of FIG.
  • FIG. 14 shows an example of test generation and seed conversion according to the conventional method, and shows a case where a test pattern: (0, X, X, 1, 1) can not be converted into a seed.
  • LFSR linear feedback shift register
  • FIG. 15A shows a combinational circuit
  • FIG. 15B shows a sequential circuit
  • a circuit that can be expressed as a combination of an input value, an output value, and an internal state value of 0 or 1 is called a logic circuit.
  • Logic circuits can be further classified into combinational circuit (a) and sequential circuit (b).
  • the output value of the circuit is determined only by the input value at that time, and in the sequential circuit, it is not determined only by the input value but depends on the internal state of the circuit.
  • the combinational circuit consists only of the combinational component 152 as shown in FIG. 15 (A).
  • PI and PO represent an external input and an external output, respectively.
  • the sequential circuit as shown in FIG.
  • the 15B comprises a state storage portion constituted by a combinational circuit portion 152 and a plurality of flip-flops (Flip-Flop, FF) 155.
  • the output is determined by the value of the input currently applied and the value of the internal state.
  • the internal state changes to the internal state at the next time according to the current input and the internal state.
  • the D-type flip-flop 166 shown in FIG. 16 is handled.
  • the FF 166 has a data input (D), a data output (Q) and a clock input (CLK), and takes in data by the clock signal.
  • a failure model in which a logic function of a logic circuit changes to another logic function due to a failure is called a logic (static) failure.
  • a typical static fault model is stuck-at-fault.
  • a stuck-at fault is a fault in which the value of the signal line in the circuit is fixed to 1 or 0, and a fault fixed to 1 is referred to as a stuck-at fault (stuck-at-1, sa-1), and is set to 0
  • the fixed fault is called a stuck-at 0 fault (stuck-at-0, s-a-0).
  • a stuck-at fault consider the circuit shown in FIG.
  • Testing is to make sure that the logic circuit is manufactured as designed.
  • a test consists of two processes of test generation (test generation) and test execution (test application), assuming a failure in test generation, setting the value of the failure point opposite to the failure value (activation), Find a test pattern that propagates the value to the external output.
  • test execution a test pattern obtained by test generation is applied to a circuit, and the presence or absence of a failure is determined by comparing the output response with an expected value.
  • Test metrics include fault coverage and fault coverage.
  • the failure detection rate is the number of failures that can be detected among the target failures, and is expressed by equation 1.
  • the fault detection efficiency indicates how many faults have been detected among the targeted faults, as well as how many faults identified as faults that can not be detected by the I / O response called redundant faults are identified. It is a ratio and is expressed by equation 2.
  • FIG. 19 shows an example of the scan designed FF.
  • One of the testability designs is scan design.
  • FF 191 is provided with a scan input (scan in) so that it can be directly input from the outside, and multiplexer (MUX) 192 switches data input (Din) and scan input during normal operation so that they can be input to FF 191 .
  • the output of the FF 191 can be observed from the scan out to the outside. If a scan input output terminal is prepared for each FF 191, an extra terminal is required twice as many as the number of FFs 191, which is not practical. Therefore, the FFs 191 are connected in a line so that they can operate as shift registers.
  • a set of scan designed FFs in this way is called a scan path.
  • FIG. 20 shows an example of a scan-designed sequential circuit.
  • the FF 191 can be operated as a shift register, so that each FF 191 can be easily set to an arbitrary state, and at the same time, those states can be observed. Therefore, the problem of test generation of scan-designed circuits can be treated as a problem of combinational circuits.
  • FIG. 21 shows an example of the LFSR.
  • a linear feed-back shift register (LFSR) is mainly used as a test pattern generation circuit of the built-in self-test system (BIST).
  • BIST built-in self-test system
  • the feedback position to XOR can be expressed by a polynomial, and the polynomial is called a characteristic polynomial.
  • the characteristic polynomial of the LFSR in FIG. 21 can be expressed as Equation 3.
  • the LFSR can be used to perform a pseudorandom test or an exhaustive test in which a pattern other than all zeros is applied.
  • the value of the FF at the next time t + 1 can be expressed by the following equation 4 using the value of the FF at a certain time t and the characteristic polynomial.
  • FIG. 22 shows a 3-bit LFSR.
  • a design method that simplifies external test equipment is the built-in self-test (BIST) method.
  • the BIST method uses a circuit that generates a test pattern and a circuit that examines an output response to the test pattern, and the pattern generation circuit mainly uses an LFSR.
  • FIG. 23 shows a schematic view of BIST.
  • a test pattern is generated by the pattern generation circuit 230, applied to the circuit under test 231, and the output is compared with an expected value by the response analyzer (MISR) 231 to determine the presence or absence of a failure or a failure state.
  • MISR response analyzer
  • the pattern generation circuit 230 for example, the above-mentioned LFSR is used.
  • FIG. 24 shows the BIST of the scan designed circuit.
  • Reference numeral 244 denotes an LFSR as a pattern generator
  • 246 denotes a combination circuit part in the sequential circuit
  • 248 denotes a scan path formed of FFs in the sequential circuit
  • 250 denotes an MISR as a response analyzer.
  • a pseudorandom test is performed by moving the LFSR 244 until the scan path 248 is satisfied, and the values of the scan path 248 and PI at that time are applied to the combinational circuit portion 246 of the circuit under test .
  • the BIST of this structure is used as the BIST model of the present application, as shown in FIG.
  • One problem with BIST is that it is difficult to detect random pattern tolerant faults.
  • a circuit in which the signal line E in FIG. 25 is sa-0 is shown.
  • the pattern for detecting a fault needs a pattern in which all four inputs are 1; however, in the case of a 4-bit LFSR, the probability that this pattern is generated is 1/15.
  • a failure that can be generated by the LFSR a failure that can be detected with only a limited number of patterns is called a random pattern tolerant failure.
  • reseeding of LFSR referred to as reseed
  • reseed is effective for detecting random pattern tolerant failure in BIST.
  • phase shifter is a circuit created using an XOR arranged at the output of the LFSR, and it changes the order of patterns generated by the LFSR. Further, there is a method using a random inversion circuit as a technique for reducing the dependency between the FF, the external input, and the scan path as in the phase shifter.
  • reference numeral 200 denotes a phase shifter, which serves to change the order of patterns generated by the LFSR 1 as described above.
  • the BIST includes a circuit under test (CUT) 2, a scan path for enabling the scan, and a first pattern generation circuit 1 for forming a test pattern supplied to the scan path.
  • the random inversion circuit controls pattern generation for changing the pattern generated by the first pattern generation circuit 1 using a pattern generated by the second pattern generation circuit 1 b provided separately from the first pattern generation circuit 1.
  • the pattern control circuit includes an inversion logic unit 266 capable of inverting the logic of the output value of the first pattern generation circuit 1, and the inversion logic unit using a pattern generated by the second pattern generation circuit 1b.
  • An inversion control circuit 268 capable of controlling the operation of the circuit 266 is included, and the output signal of the inversion logic unit 266 is supplied to the circuit under test 2. Specifically, whether the value generated by the first pattern generation circuit 1b is inverted is determined by the number of 1 values generated by the second pattern generation circuit 1b and the value of the inversion condition setting REG 270.
  • the random inversion circuit is formed of the second pattern generation circuit 1b, the inversion logic unit 266, the inversion control circuit 268, and the inversion condition setting REG 270.
  • FIG. 26 (C) and 26 (D) show a seed generation model corresponding to the BIST model with phase shifter shown in FIG. 26 (A).
  • FIG. 26C shows a seed generation model with a phase shifter for static failure, in which a phase shifter group 200a is inserted between the XOR network 10 and the combinational circuit portion 20 with respect to the base model shown in FIG. Have.
  • the phase shifter group 200a is a circuit in which the phase shifter 200 shown in FIG. 26A is copied in the scan path length and arranged in parallel. Strictly speaking, the phase shifter group 200a in FIGS. 26C and 26D has the phase shifter 200 shown in FIG.
  • FIG. 26A shows a seed generation model with phase shifter for delay fault LoC test, in which the phase shifter group 200a is connected to the output of the XOR network 10 with respect to the seed generation model shown in FIG. 5A. It has composition.
  • FIGS. 26E and 26F show a seed generation model corresponding to the BIST model with a random inversion circuit shown in FIG. 26B.
  • FIG. 26E shows a seed generation model with a random inversion circuit for static failure, which is different from the base model shown in FIG. 4 in the second XOR network 10a, the inversion logic circuit group 266a, and the inversion control circuit group 268a. Equipped with The inversion logic circuit group 266a is a circuit in which the inversion logic unit 266 shown in FIG. 26B is copied in parallel for the scan path length and similarly arranged in the inversion control circuit group 268a. This is a circuit in which long copies are arranged in parallel.
  • the second XOR network 10a is configured by expanding the time of the LFSR constituting the second pattern generation circuit 1b by the scan path length of the scan FF.
  • the first seed input to the (first) XOR network 10 is the seed of the first pattern generation circuit 1 of FIG. 26B, and the second seed input to the second XOR network 10a. Is a seed to be input to the second pattern generation circuit 1b of FIG.
  • FIG. 26F shows a seed generation model with a random inversion circuit for delay fault LoC test, and the second XOR network 10a and the inversion control circuit group 268a with respect to the seed generation model shown in FIG. 5A. , And a configuration in which a random inversion circuit group consisting of inversion logic circuit groups 266a is added.
  • the seed input to the (first) XOR network 10 is the seed of the first pattern generation circuit 1
  • the seed of the second XOR network 10a is the second pattern. It becomes a seed of the generation circuit 1b.
  • a delay fault is a fault model in which a signal can not be propagated within a specified time due to the delay of a gate or a signal line and a malfunction occurs.
  • Delay faults include transition faults, gate delay faults, and path delay faults. The following description is directed to transition faults, but is not limited thereto.
  • FIG. 27 shows an example of transition failure. It is assumed that a transition fault causes a delay fault to occur in a certain signal line in a circuit, and that a delay large enough to be observed by an external output or an FF occurs regardless of a path propagating the delay. There are two types of transition faults: rising transition faults that delay the rise of the signal and falling transition faults that delay the fall.
  • the transition fault test first, the value of the signal at the target point is set, then the value is changed, and the value is propagated to the external output or the FF, and the response is observed. For example, apply a pattern to set the signal line in the first pattern to 0 (low), apply a pattern to set the signal line to 1 (high) to the second pattern, and propagate it to the external output or FF By observing the change in value, it is possible to detect the rising transition fault of the signal line. Such a test method is called a two-pattern test.
  • the LoC method and the LoS method as representative methods for performing two-pattern test at an actual speed (at-speed) in a scan-designed circuit.
  • the LoC test after the first pattern is set by the scan operation, the second pattern is set and the response is stored in the FF at the actual speed by the system clock (FIG. 28). This action is called capture.
  • the first pattern is set in consideration of using the internal state for the signal set as the second pattern FF.
  • a time expansion model in which the operation of the LoC method test is expanded for each time is shown in FIG.
  • the timing chart of the LoC method shown in FIG. 28 corresponds to the timing chart for explaining the operation of the delay fault LoC test seed generation model 1 shown in FIG. 5 (C).
  • FIG. 30 shows a basic timing chart of the delay fault test according to the LoS method.
  • This timing chart is basically the same as the timing chart (FIG. 7B) for explaining the operation of the seed generation model for delay fault LoS test according to the embodiment of the present invention shown in FIG. 7A. Therefore, it is possible to use the operation details of the LoS test as described in the description of FIGS. 7A and 7B.
  • FIG. 31 shows a seed generation model 1 for delay failure.
  • the delay of the control signal m1 of the multiplexer of the seed generation circuit in the LoC test is shown in FIG.
  • the delay fault seed generation model 1 of FIG. 31 is another embodiment of the delay fault seed generation model of FIG. 5 (A).
  • a multiplexer is added to the output of the scan FF.
  • the control signal of the multiplexer is the output of the FF added to the scan enable.
  • the inputs of the multiplexer are the external input connecting the XOR network and the output from the scan FF.
  • FIG. 6 shows the delay fault seed generation model 2
  • FIG. 7 (A) shows the delay fault seed generation model 3 for the LoS test.
  • the LFSR seed generation method of the present invention using the seed generation model (base model) for static failure and the seed generation models 1 to 3 for delay failure described above, seed generation is impossible in the seed generation model It is guaranteed that the failure (which turned out to be non-seed) could not be detected even by the original BIST circuit. Therefore, the fault detection capability of the BIST mechanism can be known.
  • the test generation tool can be used to directly generate the seed by setting constraints on the test generation. In the conventional method, test generation and seed conversion operations are repeated until seed conversion can be performed. Therefore, in order to obtain the same failure detection rate as the proposed method, test generation is frequently retried and it takes time.
  • #PIs, #POs, #Gates, and #FFs respectively represent the number of external inputs, the number of external outputs, the number of gates, and the number of FFs.
  • the experimental method is shown below. First, 10,000 pseudo-random patterns are generated by LFSR using appropriate seeds, and failure simulation is performed on the circuit under test using the generated patterns. Next, as a result of failure simulation, the failure not detected is regarded as random pattern tolerant failure (RPRF), and the seed is obtained for each failure by the conventional method and the proposed method, and the failure detection rate and failure detection efficiency of both methods , Seed generation time, Seed number compared. In addition, the case where a phase shifter was attached to the LFSR was also evaluated. For test generation in this experiment, the abort time was set to 10 seconds. The abort time is the upper limit of the time taken to generate one pattern.
  • RPRF random pattern tolerant failure
  • the used LFSRs were 100 stages LFSR for the first pattern generation circuit without and with the random inversion circuit, and 10 stages for the second pattern generation circuit of the random inversion circuit.
  • the phase shifter with the phase shifter is designed so that the input of each scan path is out of phase by more than the scan path length so that the same partial series generated from the LFSR does not enter the plurality of scan paths.
  • the conversion to seed in the conventional method adopted the method of solving SAT, and used MiniSAT as a SAT solver.
  • Table 4 shows the results of failure simulation with 10,000 pseudo random patterns using LFSR.
  • Table 6 shows the results of failure simulation with 10,000 pseudo random patterns using the LFSR with a phase shifter.
  • Table 7 shows the results of seed generation using the conventional method and the proposed method for the undetected faults in Table 6.
  • Table 8 shows the results of failure simulation with 10,000 pseudo random patterns using LFSR with a random inversion circuit.
  • Table 9 shows the results of seed generation using the conventional method and the proposed method for undetected faults in Table 8.
  • the circuits used for the experiments are ITC'99 benchmark circuits b14, b17, b18, b19, b20, b21 and b22.
  • the experimental environment is identical to that shown in Table 2.
  • Tables 10 to 15 evaluation of seed single-piece quality by the seed generation model 1 for delay fault is described.
  • Tables 10 and 11 show the evaluation environment and the circuit characteristics of the benchmark circuits b14, b17, b18, b19, b20, b21 and b22.
  • Table 11 shows seed generation target faults. It shows the number of undetected failures after the initial pseudo random pattern application.
  • Table 12 shows the results of experiments on seed single quality. Here, an undetected fault after application of 10,000 pseudo random patterns is a seed generation target.
  • Table 13 shows test generation with don't care and seed conversion, and undetected faults after application of 10,000 pseudo random patterns are targets for seed generation. This shows the loss of fault coverage due to the inability to convert to seeds by the conventional method.
  • Table 14 shows the cumulative failure detection rate / detection efficiency. This result shows the case including 10,000 pseudo random pattern application. Undetected faults after application of 10,000 pseudo random patterns are targets for seed generation.
  • Tables 15 to 20 and FIGS. 33 to 36 below show experimental results of the seed deployment quality of the seeds generated using the delay generation function 1 for seed generation for delay faults.
  • Table 15 shows the experimental result of seed quality (128 pattern expansion).
  • the seeds are rearranged so that the rise of the detection rate becomes the fastest, the target generation target failure (only representative failure), the total failure and the undetected failure after applying 10,000 (10 k) pseudo random patterns for b21 For the b19, 50,000 (50 k) pseudo random pattern is not detected after application of the pseudo random pattern.
  • Table 16 shows the status of seed generation.
  • FIG. 33 shows the transition of the detection rate for the total failure of b21.
  • the experimental result shown in FIG. 34 shows the transition of the detection rate with respect to the undetected failure after applying the 10 k pseudo random pattern of b21.
  • Table 18 show the transition of the detection rate for undetected faults after application of the 10 k pseudo random pattern of b21.
  • the maximum detection rate reached by the conventional method is 85%, and the proposed method can reduce the number of seeds required to reach the same detection rate by 44% (44% reduction in test time).
  • the experimental result shown in FIG. 35 is a figure which shows transition of the detection rate with respect to the undetected failure after 50k pseudo random pattern application of b19.
  • Table 19 shows the transition of the detection rate for the undetected failure after applying the 50 k pseudo random pattern of b19.
  • the maximum detection rate reached by the conventional method was 65%, and the proposed method was able to reduce the number of seeds required to reach this detection rate by 25% (25% reduction in test time).
  • the experimental result shown in FIG. 36 shows the transition of the detection rate with respect to the undetected failure after applying the 50 k pseudo random pattern of b19.

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Abstract

Provided is a scan BIST LFSR seed generation method that is provided with procedures for forming a scan BIST seed generation model and for generating an LFSR seed by performing target fault test generation on the formed seed model. The seed generation model is provided with an XOR network configured by subjecting the scan BIST LFSR to time development for the length of a scan pass in a scan FF of a circuit to be inspected, and with a combinational circuit portion for the circuits to be inspected. The XOR network output is connected to the combinational circuit portion.

Description

スキャンBISTのLFSRシード生成法及びそのプログラムを記憶する記憶媒体Scan BIST LFSR seed generation method and storage medium for storing the program
 本発明は、半導体集積回路の組込み自己テストのためのシード生成方法であり、更に具体的には、高い故障検出率が得られ、高速にシード生成することができ、且つシード数も減らすことができるスキャンBISTのLFSRシード生成法及びそのプログラムを記憶する記憶媒体に関するものである。 The present invention is a seed generation method for built-in self test of a semiconductor integrated circuit, and more specifically, high failure detection rate can be obtained, seed generation can be performed at high speed, and the number of seeds can be reduced. The present invention relates to a scan BIST LFSR seed generation method and a storage medium for storing the program.
 近年のデバイス技術の進歩により、ディジタル集積回路の集積度が向上し、大規模なシステムをLSI上に実装することが可能となった。しかし、回路の大規模化に伴い、テストはますます困難となり、テスト生成時間の増加など、テストコストの増大が問題となっている。テストコストとテスト容易性は相関があり、増大するテストコストを少なくするためにはテストを容易にすることが考えられる。テストを容易にするために、回路内に付加回路を組み込んでおくことをテスト容易化設計といい、その1つとしてスキャン設計がある。スキャン設計は順序回路を構成する各フリップフロップに外部から自由に状態を設定でき、それらのフリップフロップの状態を外部から観測できる。スキャン設計された順序回路のテスト生成の問題は、組合せ回路のテスト生成問題として扱うことができ、テスト生成容易性が向上する。 Recent advances in device technology have made it possible to increase the degree of integration of digital integrated circuits and to implement large-scale systems on LSIs. However, with the increase in circuit scale, testing becomes increasingly difficult, and the increase in test cost, such as the increase in test generation time, has become a problem. There is a correlation between test cost and testability, and it may be considered to facilitate testing to reduce the increased test cost. In order to facilitate testing, incorporating additional circuits in a circuit is called testability design, and one of them is scan design. In scan design, states can be freely set from the outside to the respective flip flops constituting the sequential circuit, and the states of those flip flops can be observed from the outside. The test generation problem of scan-designed sequential circuits can be treated as a test generation problem of combinational circuits, which improves the test generation ease.
 外部テスト装置を簡略化する設計法として組込み自己テスト方式(BIST:Built-in self test)がある。BISTではテストパターンを発生する回路およびテストパターンに対する出力応答を調べる回路を用いる。BISTでのパターン発生回路としては、疑似ランダムパターンを発生する線形フィードバックシフトレジスタ(LFSR:Linear feedback shift register)が主に用いられ、出力応答を調べる回路はMISR(multiple-input signature register)を使用する。MISRは回路の出力応答を圧縮する回路であるが、本発明ではパターン発生回路と被検査回路のみを扱う。 There is a built-in self test (BIST) as a design method for simplifying the external test device. BIST uses a circuit that generates a test pattern and a circuit that examines the output response to the test pattern. A linear feedback shift register (LFSR) that generates a pseudorandom pattern is mainly used as a pattern generation circuit in BIST, and a circuit that checks an output response uses MISR (multiple-input signature register) . The MISR is a circuit for compressing the output response of the circuit, but in the present invention, only the pattern generation circuit and the circuit to be inspected are handled.
 パターン発生回路のLFSRはフィードバック位置によってはすべて0のパターンを除くすべてのパターンを疑似ランダムに発生することができる。しかし、LFSRの動作は決定的であるため、回路によっては疑似ランダムパターンでは高い故障検出率を達成できないものがある。疑似ランダムパターンによるテストに耐性がある故障をランダムパターン耐性故障という。このような故障がある回路で高い故障検出率を達成するには、LFSRのレジスタの初期値(LFSRのレジスタへ最初に設定する値のことをシード(seed)と言う)を再設定する(リシードするという)ことが有効であることが知られている。 The LFSR of the pattern generation circuit can pseudo-randomly generate all patterns except the pattern of all 0 depending on the feedback position. However, since the operation of the LFSR is critical, some circuits can not achieve high fault coverage with pseudorandom patterns. A fault that is resistant to testing with pseudorandom patterns is called a random pattern tolerant fault. In order to achieve high fault coverage in circuits with such faults, reset the initial value of the LFSR's register (called the seed to be set initially to the LFSR's register) (reseed). Is known to be effective.
 具体的には、あるシードからいくつかのパターンを生成してテストを行い、それまでに印加されたテストで未検出の故障に対してそれぞれの故障を検出できるシードにリシードし、テストを繰り返す。 Specifically, several patterns are generated from a certain seed and a test is performed, and retesting is performed on a seed that can detect each fault for undetected faults in the test applied so far, and the test is repeated.
特開2009-156761号公報JP, 2009-156761, A 特開平6-52005公報Japanese Patent Laid-Open No. 6-52005 特開2008-117383公報JP, 2008-117383, A
 従来のLFSRシード生成法として、その故障に対してテスト生成し、得られたテストパターンをLFSRのシードに変換する方法があるが、必ずしも変換できるとは限らず、故障検出率が低下することがある。また、シードへの変換率を向上するためのドントケア付きテスト生成によりシード数が多くなるといった問題がある。本発明は、これらの問題点を踏まえたうえで、スキャンBISTの故障検出率向上のための新たなLFSRシード生成法を提供することを課題とする。 As a conventional LFSR seed generation method, there is a method of test generation for the failure and converting the obtained test pattern into a seed of LFSR, but conversion is not always possible and the failure detection rate may be lowered. is there. In addition, there is a problem that the number of seeds increases due to the generation of a test with don't care to improve the conversion rate to seeds. An object of the present invention is to provide a new LFSR seed generation method for improving the failure detection rate of the scan BIST in consideration of these problems.
 本発明の第1の態様では、前記課題を解決する為に、スキャンBISTのシード生成モデルを形成し、前記形成したシード生成モデルに対して対象故障のテスト生成を行って前記LFSRのシードを生成する、各手順を備え、前記シード生成モデルは、前記スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記被検査回路の組合せ回路部分とを備え、前記組合せ回路部分に前記XORネットワーク出力が接続された構成を有する、スキャンBISTのLFSRシード生成方法を提供する。 In the first aspect of the present invention, in order to solve the above-mentioned problem, a seed generation model of scan BIST is formed, and a test generation of a target fault is performed on the formed seed generation model to generate a seed of the LFSR. The seed generation model includes an XOR network configured by expanding the time of the scan path length in the scan FF of the circuit under test, and the combinational circuit portion of the circuit under test. A scan BIST LFSR seed generation method, comprising: a configuration in which the XOR network output is connected to the combinational circuit portion.
 第1の態様において、前記シード生成モデルは、前記XORネットワークと前記被検査回路の組合せ回路部分との間にフェーズシフタグループが接続されていても良い。また、前記XORネットワークと前記被検査回路の組合せ回路部分との間にランダム反転回路グループが接続されていても良い。このランダム反転回路グループのそれぞれのランダム反転回路は、前記XORネットワークと前記被検査回路の組合せ回路部分との間に挿入された反転論理回路と、第2のXORネットワークと、第2のXORネットワークの出力を用いて前記反転論理回路の動作を制御するための反転制御回路とを備える。また、前記対象故障は縮退故障であっても良い。また、対象故障のテスト生成は自動テストパターン生成ツールを用いて行っても良い。 In the first aspect, in the seed generation model, a phase shifter group may be connected between the XOR network and a combinational circuit portion of the test circuit. Also, a random inversion circuit group may be connected between the XOR network and the combinational circuit portion of the circuit under test. Each of the random inversion circuits of the random inversion circuit group includes an inversion logic circuit inserted between the XOR network and the combinational circuit portion of the circuit under test, a second XOR network, and a second XOR network. And an inversion control circuit for controlling the operation of the inversion logic circuit using an output. The target failure may be a stuck-at failure. Also, test generation of the target failure may be performed using an automatic test pattern generation tool.
 さらに、第1の態様において、前記シード生成モデルは更に、前記XORネットワーク出力と前記スキャンFF出力とを時間的に切り替えて前記組合せ回路部分に入力するためのマルチプレクサと、前記マルチプレクサの切り替えのタイミングを制御するタイミング生成器とを備えていても良い。このシード生成モデルは、更に、フェーズシフタグループまたはランダム反転回路グループを備えていても良い。 Furthermore, in the first aspect, the seed generation model further includes a multiplexer for temporally switching the XOR network output and the scan FF output and inputting the same to the combinational circuit portion, and timing of switching of the multiplexer. A timing generator may be provided to control. The seed generation model may further include a phase shifter group or a random inversion circuit group.
 さらに、第1の態様において、前記シード生成モデルは更に、前記組合せ回路部分の複製である第2の組合せ回路部分を有し、当該第2の組合せ回路部分の入力には前記XORネットワークの出力と前記組合せ回路部分の出力とが接続されるようにしても良い。 Furthermore, in the first aspect, the seed generation model further includes a second combinational circuit portion that is a duplicate of the combinational circuit portion, and an input of the second combinational circuit portion is an output of the XOR network and The output of the combinational circuit portion may be connected.
 さらに、第1の態様において、前記シード生成モデルは更に、前記スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長+1スキャンシフト分時間展開して構成した第2のXORネットワークと、前記XORネットワーク出力と前記第2のXORネットワーク出力とを時間的に切り替えて前記組合せ回路部分に入力するためのマルチプレクサと、前記マルチプレクサの切り替えのタイミングを制御するタイミング生成器とを備えるようにしても良い。 Furthermore, in the first aspect, the seed generation model further includes: a second XOR network configured by expanding a scan path length in the scan FF of the circuit under test + 1 scan shift in time with the LFSR of the scan BIST; A multiplexer for temporally switching between the network output and the second XOR network output and inputting the same to the combinational circuit portion may be provided, and a timing generator for controlling the switching timing of the multiplexer.
 本発明の第2の態様では、前記課題を解決する為に、スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開してXORネットワークを形成し、当該XORネットワークを前記被検査回路の組合せ回路部分に接続することによってシード生成モデルを形成する手順と、前記シード生成モデルに対して対象故障のテスト生成を行って前記LFSRのシードを生成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体を提供する。 In the second aspect of the present invention, in order to solve the above-mentioned problems, the LFSR of the scan BIST is expanded by time for the scan path length in the scan FF of the circuit under test to form an XOR network, and the XOR network is subjected to the test In order to cause a computer to execute a procedure of forming a seed generation model by connecting to a combinational circuit portion of a circuit, and a procedure of generating a test of a target fault on the seed generation model to generate a seed of the LFSR A storage medium for storing the program of
 本発明の第3の態様では、前記課題を解決する為に、スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記XORネットワーク出力と前記スキャンFF出力とを時間的に切り替えて前記被検査回路の組合せ回路部分に印加するマルチプレクサと、前記マルチプレクサの切換えタイミングを制御するタイミング生成器と、によってシード生成モデルを形成する手順と、前記シード生成モデルに対して対象故障のテスト生成を行って、前記LFSRのシードを形成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体を提供する。 In a third aspect of the present invention, in order to solve the above-mentioned problem, an XOR network constructed by expanding a scan BIST LFSR for a scan path length in a scan FF of a circuit under test, the XOR network output and the scan A procedure for forming a seed generation model by a multiplexer that temporally switches between the FF output and applies it to the combinational circuit part of the circuit under test, and a timing generator that controls the switching timing of the multiplexer, the seed generation model A storage medium is provided for storing a program for causing a computer to execute a test generation of a target fault with respect to the above to form a seed of the LFSR.
 本発明の第4の態様では、前記課題を解決する為に、スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記組合せ回路部分を複製した第2の組合せ回路部分とを備え、前記XORネットワーク出力を前記組合せ回路部分の入力に接続し、前記XORネットワーク出力と前記組合せ回路部分出力とを前記第2の組合せ回路部分の入力に接続してシード生成モデルを形成する手順と、前記シード生成モデルに対して対象故障のテスト生成を行って、前記LFSRのシードを形成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体を提供する。 In a fourth aspect of the present invention, in order to solve the above problem, an XOR network constructed by expanding a scan BIST LFSR for a scan path length in a scan FF of a circuit under test, and copying the combined circuit portion A second combinational circuit portion, the XOR network output connected to the input of the combinational circuit portion, and the XOR network output and the combinational circuit portion output connected to the input of the second combinational circuit portion A storage medium storing a program for causing a computer to execute a procedure for forming a seed generation model and a procedure for performing test generation of a target fault on the seed generation model to form a seed of the LFSR provide.
 本発明の第5の態様では、前記課題を解決する為に、スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記被検査回路の組合せ回路部分と、前記LFSRを前記スキャンFFにおけるスキャンパス長+1スキャンシフト分時間展開して構成した第2のXORネットワークと、前記XORネットワークまたは前記第2のXORネットワーク出力を時間的に切り替えて前記組合せ回路部分に印加するマルチプレクサと、前記マルチプレクサの切換えタイミングを制御するタイミング生成器とによって、シード生成モデルを形成する手順と、前記シード生成モデルに対して対象故障のテスト生成を行って、前記LFSRのシードを形成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体を提供する。 In a fifth aspect of the present invention, in order to solve the above problems, an XOR network constructed by expanding a scan BIST LFSR for a scan path length in a scan FF of a circuit under test and a combinational circuit of the circuit under test Part, the second XOR network configured by expanding the scan path length in the scan FF + 1 scan shift time in the scan FF, and the combinational circuit by temporally switching the output of the XOR network or the second XOR network A procedure for forming a seed generation model by a multiplexer applied to a part and a timing generator for controlling switching timing of the multiplexer, and a test generation of a target fault on the seed generation model to seed the LFSR The steps to form the computer Storing a program for executing, it provides a storage medium.
 本発明のスキャンBISTのLFSRシード生成法では、高い故障検出率が得られ、高速にシード生成することができ、さらにシード数も減らすことができる優れた作用効果を呈するものである。即ち、本発明の方法によれば、被検査回路に対して、テストモード時のスキャンBIST回路と同じ動作を模擬できる。そして直接シードを求めることが出来るため、ドントケア付きテスト生成をする必要がなく、従来手法と比べてパターン数を抑えることができる。また、シードを生成する過程で生成したシードがどの程度の故障を検出できるか確認するため、改めて故障シミュレーションを行わなくて済む。そのためテスト時間を減らせる利点もある。 According to the scan BIST LFSR seed generation method of the present invention, a high failure detection rate can be obtained, seeds can be generated at high speed, and the number of seeds can be reduced. That is, according to the method of the present invention, the same operation as the scan BIST circuit in the test mode can be simulated for the circuit under test. And since it is possible to directly obtain the seed, it is not necessary to generate a test with don't care, and the number of patterns can be reduced compared to the conventional method. In addition, it is not necessary to perform failure simulation again in order to confirm how much failure the seed generated in the process of generating the seed can detect. Therefore, there is also an advantage that the test time can be reduced.
従来のシード生成方法を示す図。The figure which shows the conventional seed production | generation method. 本発明に係るシード生成方法を示す図。FIG. 2 is a diagram showing a seed generation method according to the present invention. BISTモデルを示す図。A diagram showing a BIST model. 本発明の第1の実施形態に係るシード生成モデルを示す図。The figure which shows the seed production | generation model which concerns on the 1st Embodiment of this invention. 本発明の第2の実施形態に係るシード生成モデルを示す図。The figure which shows the seed production | generation model which concerns on the 2nd Embodiment of this invention. 図5(A)に示すモデルの他の実施例を示す図。The figure which shows the other Example of the model shown to FIG. 5 (A). 図5(B)のモデルで対象とするLoC方式のテスト動作を示すタイミングチャート。FIG. 6 is a timing chart showing a test operation of the LoC method targeted by the model of FIG. 5 (B). 本発明の第3の実施形態に係るシード生成モデルを示す図。The figure which shows the seed production | generation model which concerns on the 3rd Embodiment of this invention. 本発明の第4の実施形態に係るシード生成モデルを示す図。The figure which shows the seed production | generation model which concerns on the 4th Embodiment of this invention. 図7(A)のモデルで対象とするLoS方式のテスト動作を示すタイミングチャート。FIG. 8 is a timing chart showing a test operation of the LoS method targeted by the model of FIG. 7 (A). 3ステージLFSR、外部入力数2、スキャンパス長3のサンプル回路を示す図。The figure which shows the sample circuit of 3 stages LFSR, the number of external inputs 2, and scan path length 3. LFSRの時間展開の一例を示す図。The figure which shows an example of the time expansion | deployment of LFSR. XORネットワークの一例を示す図。The figure which shows an example of XOR network. シード生成モデルの一例を示す図。The figure which shows an example of a seed production | generation model. 縮退故障を有するサンプル回路の一例を示す図。The figure which shows an example of the sample circuit which has a stuck-at fault. 本発明の一実施形態に係るシード生成例を示す図。The figure which shows the example of seed production concerning one embodiment of the present invention. 従来法によるテスト生成とシード変換の一例を示す図。The figure which shows an example of the test production | generation and seed conversion by a conventional method. 組合せ回路を示す図。The figure which shows a combination circuit. 順序回路を示す図。FIG. 7 shows a sequential circuit. D型フリップフロップを示す図。The figure which shows D type flip flop. ANDゲート入力の0縮退故障を示す図。The figure which shows the 0 stuck-at fault of AND gate input. テスト生成を示す図。Diagram showing test generation. スキャン設計されたフリップフロップを示す図。The figure which shows the flip-flop designed scan. スキャン設計された順序回路を示す図。The figure which shows the sequential circuit by which the scan design was carried out. LFSRの構造を示す図。The figure which shows the structure of LFSR. 3ステージLFSRの構造を示す図。The figure which shows the structure of 3 stage LFSR. BISTの構造を示すブロック図。Block diagram showing the structure of BIST. スキャン設計された回路のBISTを示す図。The figure which shows BIST of the circuit by which scan design was carried out. ランダムパターン耐性故障がある回路を示す図。FIG. 7 shows a circuit with random pattern tolerant failure. フェーズシフタを備えたBISTモデルを示す図。The figure which shows the BIST model provided with the phase shifter. ランダム反転回路を備えたBISTモデルを示す図。The figure which shows the BIST model provided with the random inversion circuit. フェーズシフタ付きシード生成モデル(スタティック)を示す図。The figure which shows the seed production | generation model (static) with a phase shifter. フェーズシフタ付きシード生成モデル(遅延)を示す図。The figure which shows the seed production | generation model (delay) with a phase shifter. ランダム反転付きシード生成モデル(スタティック)を示す図。The figure which shows the seed production | generation model (random) with a random inversion. ランダム反転付きシード生成モデル(遅延)を示す図。The figure which shows the seed production | generation model (delay) with a random inversion. 遷移故障を説明するための図。The figure for demonstrating a transition failure. LoC(ブロードサイド)方式のタイミングチャート。Timing chart of LoC (Broadside) method. LoC方式テスト(ブロードサイドテスト)の時間展開モデル表現。Time expansion model representation of LoC test (Broadside test). LoS(スキュードロード)方式のタイミングチャート。Timing chart of LoS (skewed load) method. 遅延故障用シード生成モデル1を示す図。The figure which shows the seed production | generation model 1 for delay faults. シード生成モデル1のタイミングチャート。6 is a timing chart of a seed generation model 1. b21-全故障に対する検出率推移を示す図。b21-A diagram showing the transition of detection rate for all faults. b21-10k印加後未検出故障に対する検出率推移を示す図。The figure which shows the detection rate transition with respect to the undetected failure after b21-10k application. b19-50k印加後未検出故障に対する検出率推移を示す図。The figure which shows the detection rate transition with respect to the undetected failure after b19-50k application. b19-50k印加後未検出故障に対する検出率推移を示す図。The figure which shows the detection rate transition with respect to the undetected failure after b19-50k application.
 以下に、本発明の一実施形態を図面を参照して説明する。なお、以下の実施形態は本発明の説明目的のために提供され、本発明を限定するものではなく、本発明は、特許請求の範囲によってのみ限定される。 Hereinafter, an embodiment of the present invention will be described with reference to the drawings. The following embodiments are provided for the purpose of illustrating the present invention, and do not limit the present invention, and the present invention is limited only by the claims.
 図1は、従来のスキャンBISTのLFSRシード生成方法を概念的に示すブロック図である。従来の手法では、先ず、被検査回路(CUT)のネットリストを自動テストパターン生成ツール(ATPG)によって処理することにより、テストパターンを生成する。次に、このようにして得たテストパターンをシード変換してLFSRのシードを求める。このように、従来の手法では、テストパターン生成とシード生成との2段階の処理(ツーパス)を経てLFSRのシードを求めている。ところがこの方法では、テストパターンをシードに変換できない場合も発生し、その結果、故障の検出率が低下すると言う問題が存在する。 FIG. 1 is a block diagram conceptually showing a conventional scan BIST LFSR seed generation method. In the conventional method, first, a test pattern is generated by processing a netlist of a circuit under test (CUT) with an automatic test pattern generation tool (ATPG). Next, the test pattern thus obtained is subjected to seed conversion to obtain a seed of LFSR. As described above, in the conventional method, the seed of the LFSR is obtained through two-step processing (two-pass) of test pattern generation and seed generation. However, in this method, a test pattern may not be converted into a seed, and as a result, there is a problem that the fault detection rate is lowered.
 このような従来のツーパスシード生成法に対して、本発明者等は、ネットリストからテストパターンを作成することなく、ATPGによって直接シードを生成することができれば全てのシードが作成可能であると考えた。 In contrast to such a conventional two-pass seed generation method, the present inventors considered that it is possible to create all seeds if ATPG can directly generate seeds without creating a test pattern from a netlist. .
 図2は、本発明者等が提案するワンパスシード作成方法の手順を概念的に示すブロック図である。本方法では、ATPGによって直接シードを作成する為に、先ず、ネットリストから、製造する回路(被検査回路、CUT)をシードを作るために適した回路に擬似的に変換し、変換された回路に対してATPGを適用してシードを生成する。図2では、変換された回路をシード生成モデルとして示している。このワンパスシード生成方法を実現することにより、完全なシード生成を行うことができ、シード品質の向上が期待できる。また、シミュレーションの効果が期待できるので、シード数が少なくなる可能性がある。 FIG. 2 is a block diagram conceptually showing the procedure of the one-pass seed creation method proposed by the present inventors. In this method, in order to create a seed directly by ATPG, a circuit obtained by artificially converting a circuit to be manufactured (CUT to be tested, CUT) from a netlist into a circuit suitable for producing a seed and converting the same Apply ATPG to generate seeds. In FIG. 2, the converted circuit is shown as a seed generation model. By implementing this one-pass seed generation method, complete seed generation can be performed, and improvement in seed quality can be expected. In addition, since the effect of simulation can be expected, the number of seeds may be reduced.
 本発明では、図2のワンパスシード生成を実現する為に、BISTにおいてテストパターン発生器として使用されるLFSRと、被テスト回路である順序回路の各スキャンFFの状態情報とを時間的に展開してXOR(Exclusive-OR)ネットワークを構成し、このXORネットワークをCUTの組合せ回路部分に接続した構成のシード生成モデルを提案する。 In the present invention, in order to realize the one-pass seed generation shown in FIG. 2, the LFSR used as a test pattern generator in the BIST and the state information of each scan FF of the sequential circuit which is a test circuit are temporally expanded. Then, we construct an XOR (Exclusive-OR) network and propose a seed generation model of the configuration in which this XOR network is connected to the combinational circuit part of the CUT.
 図3は、対象BISTモデルを示すブロック図である。図3において、1はLFSR、2は被検査回路(CUT)、3は応答圧縮器(MISR)を示す。CUT2は、順序回路の組合せ回路部分20とスキャンFFチェーン30とから構成される。本発明では、応答圧縮器3については考慮しない。 FIG. 3 is a block diagram showing a subject BIST model. In FIG. 3, 1 indicates an LFSR, 2 indicates a circuit under test (CUT), and 3 indicates a response compressor (MISR). The CUT 2 is composed of a combinational circuit portion 20 of a sequential circuit and a scan FF chain 30. In the present invention, the response compressor 3 is not considered.
 図4は、本発明の第1の実施形態に係るシード生成モデルの構成を示す図である。本実施形態のモデルはベースモデルであって、スタティック故障を対象とする。図示するように、本実施形態のシード生成モデルは、BISTのLFSR1をスキャンFF30(図3参照)の最長スキャンパス長分だけ時間的に展開して構成したXORネットワーク10を順序回路の組合せ回路部分20の入力に接続して構成される。ここで、図3に示す被検査回路(CUT)2からスキャンFF30を取り除いたときの、元のスキャンFF30から組合せ回路部分20への入力を擬似外部入力(PPIs)とし、組合せ回路部分20から元のスキャンFF30への出力を擬似外部出力(PPOs)とする。このモデルによって、テストモード時のスキャンBIST回路と同じ動作を模擬することができる。従って、このシード生成モデルに対して単一縮退故障モデルなど向けのATPGを適用すれば、図2に示すように、CUTに対するテストパターンを生成することなく当該故障モデルの故障を検出するためのシードを直接求めることができる。XORネットワークについては、図8~図10を参照して後述する。 FIG. 4 is a diagram showing the configuration of a seed generation model according to the first embodiment of the present invention. The model of this embodiment is a base model, and targets static faults. As shown, in the seed generation model of this embodiment, the combination circuit part of the sequential circuit is constructed by temporally expanding the BSR LFSR 1 by the longest scan path length of the scan FF 30 (see FIG. 3). Configured to connect to 20 inputs. Here, when the scan FF 30 is removed from the circuit under test (CUT) 2 shown in FIG. 3, the input from the original scan FF 30 to the combinational circuit portion 20 is a pseudo external input (PPIs). The outputs to the scan FF 30 of the above are assumed to be pseudo external outputs (PPOs). This model can simulate the same operation as the scan BIST circuit in the test mode. Therefore, if ATPG for a single stuck-at fault model or the like is applied to this seed generation model, as shown in FIG. 2, a seed for detecting a fault of the fault model without generating a test pattern for the CUT Can be determined directly. The XOR network will be described later with reference to FIGS. 8-10.
 以下の図5(A)、図5(B)、図6および図7(A)は、遅延故障検出用のシード生成モデルを示す。図5(A)に示すシード生成モデルは、遅延故障LoCテスト向けシード生成モデル1であり、図6は遅延故障LoCテスト向けシード生成モデル2を示す。更に、図7(A)に示すモデルは、遅延故障LoSテスト向けのシード生成モデルである。 FIGS. 5 (A), 5 (B), 6 and 7 (A) below show seed generation models for delay fault detection. The seed generation model shown in FIG. 5A is a seed generation model 1 for delay fault LoC test, and FIG. 6 shows a seed generation model 2 for delay fault LoC test. Further, the model shown in FIG. 7A is a seed generation model for the delay fault LoS test.
 図5(A)に示すモデルは、ランチオフキャプチャ(或いはブロードサイド、以下LoC)方式で遅延故障をテストするためのシード生成モデルであり、マルチクロックキャプチャに対応するモデルを示す。このモデルは、図4に示すベースモデル(XORネットワーク10と組合せ回路部分20)に対して、マルチプレクサ40とマルチプレクサ40の入力を時間的に切り替えるタイミング生成回路50とを付加した構成を有する。マルチプレクサ40は、組合せ回路部分20への入力信号を、XORネットワーク10の出力とスキャンFF30の出力との間で切り替える働きをする。マルチプレクサ40は、スキャンシフト中、および、第1パターン目印加時は1に設定され、第2パターン目印加時は0(マルチサイクルキャプチャではキャプチャ中0)に設定される。 The model shown in FIG. 5A is a seed generation model for testing delay faults in a launch-off capture (or broadside, hereinafter LoC) method, and shows a model corresponding to multi-clock capture. This model has a configuration in which a multiplexer 40 and a timing generation circuit 50 for temporally switching the input of the multiplexer 40 are added to the base model (XOR network 10 and combinational circuit portion 20) shown in FIG. The multiplexer 40 serves to switch the input signal to the combinational circuit portion 20 between the output of the XOR network 10 and the output of the scan FF 30. The multiplexer 40 is set to 1 during scan shift and during application of the first pattern, and to 0 during application of the second pattern (0 during capture in multi-cycle capture).
 図5(B)は、図5(A)に示すモデルの他の実施例を示す図であって、遅延故障を2パターンテスト(2サイクルキャプチャ)で検出するためのモデルである。点線52で示す回路が、2パターンテストの場合のタイミング生成回路の一例である。図5(C)は、2パターンテストに対応したLoCテストにおけるテストパターン取り込みのタイミングチャートである。 FIG. 5B is a diagram showing another example of the model shown in FIG. 5A, which is a model for detecting delay faults in a two-pattern test (two-cycle capture). The circuit indicated by the dotted line 52 is an example of the timing generation circuit in the case of the two pattern test. FIG. 5C is a timing chart of test pattern loading in the LoC test corresponding to the two pattern test.
 LoCテストにおいては、まず、スキャンイネーブル信号(SE)を1(スキャンシフトモード)にしてスキャンパス長(複数スキャンパスがある場合は最も長いスキャンパスのスキャンFF数)分のサイクルだけスキャンクロックを印加することにより、スキャン入力(SI)からテストパターンをスキャンFFに設定(シフトイン)すると同時にスキャンFFの値(2パターンテストに対する応答)をスキャン出力(SO)から観測(シフトアウト)する。ここで設定されたパターンが2パターンテストの第1パターンに対応する。次に、SEを0(通常動作モード)にして通常クロックを2サイクル印加する。このとき、1サイクル目でFFにロードされた値が2パターンテストの第2パターンとなる。また、2サイクル目でFFにロードされた値が2パターンテストに対する応答になる。これを繰り返すことによりテストを実施する。なお、通常動作モードにおいて通常クロックを2サイクル以上入れるテストをマルチサイクルキャプチャテストという。 In the LoC test, first, set the scan enable signal (SE) to 1 (scan shift mode) and apply the scan clock for a cycle of scan path length (the number of scan FFs in the longest scan path when there are multiple scan paths) By setting (shifting in) the test pattern to the scan FF from the scan input (SI), the value of the scan FF (response to the two pattern test) is observed (shifted out) from the scan output (SO). The pattern set here corresponds to the first pattern of the two-pattern test. Next, the normal clock is applied for two cycles with SE set to 0 (normal operation mode). At this time, the value loaded to the FF in the first cycle becomes the second pattern of the two pattern test. Also, the value loaded to the FF in the second cycle becomes the response to the two pattern test. Perform the test by repeating this. A test in which a normal clock is input for two or more cycles in the normal operation mode is called a multi-cycle capture test.
 図6は、LoCテスト用シード生成モデル2を示す。このモデルは、XORネットワーク10と、被検出回路の組合せ回路部分20と、この組合せ回路部分20を複製した第2の組合せ回路部分20’とからなる。縮退故障のテスト生成により遅延故障のための2パターンテストを生成することができることが知られている。これには2時刻展開モデルを用いる。組合せ回路部分を2つ複製し、PIは2つの回路ともにXORネットワークの出力に接続し、1つ目の回路のPPOと2つ目の回路のPPIを接続することで組合せ回路のみで2パターンテストを生成することができる。例えば、対象とする回路のある信号線に対し立ち上がり遷移故障のテスト生成を行うものとして考えるためには、1つ目の組合せ回路は、対象とする回路の故障を想定した信号線と同じ部位を0に設定し、2つ目の組合せ回路では同じ部位に0縮退故障を想定してテスト生成を行えばよい。 FIG. 6 shows a seed generation model 2 for LoC test. This model comprises an XOR network 10, a combinational circuit portion 20 of the circuit to be detected, and a second combinational circuit portion 20 'duplicating the combinational circuit portion 20. It is known that test generation of stuck-at faults can generate two pattern tests for delay faults. This uses a two-time expansion model. Duplicate two combination circuit parts, connect PI to both outputs of XOR network together, connect PPO of the first circuit and PPI of the second circuit and test two patterns only in combination circuit Can be generated. For example, in order to consider that test generation of a rising transition fault is performed on a signal line of a target circuit, the first combinational circuit is the same portion as the signal line assuming a failure of the target circuit. It may be set to 0, and in the second combinational circuit, test generation may be performed on the same site assuming a 0 stuck-at fault.
 図7(A)は、ランチオフシフト(またはスキュードロード、以下、LoS)方式によって遅延故障をテストするためのシード生成モデルを示す。このモデルは、図4のベースモデルに対して、図3のLFSR1をスキャンFF30の最長スキャンパス長+1スキャンシフト分だけ時間的に展開して構成した第2のXORネットワーク10’と、XORネットワーク10と第2のXORネットワーク10’のいずれかの出力を時間的に選択して組合せ回路部分20に印加するためのマルチプレクサ40とタイミング生成回路50とを付加した構成を有する。図示するモデルはマルチクロックキャプチャに対応しているが、タイミング生成回路として第1パターン印加時に1を出力し第2パターンキャプチャクロックに同期して0を出力する回路を用いれば、2パターンテストに対応するモデルとなる。 FIG. 7A shows a seed generation model for testing delay faults by a launch off shift (or skewed load, hereinafter, LoS) method. In this model, a second XOR network 10 'configured by temporally expanding the LFSR 1 of FIG. 3 by the length of the longest scan path length of one scan FF 30 plus one scan shift with respect to the base model of FIG. And the second XOR network 10 ′ has a configuration in which a multiplexer 40 and a timing generation circuit 50 are added to temporally select the output of either XOR network 10 ′ and apply it to the combination circuit portion 20. The model shown corresponds to multi-clock capture, but if a circuit that outputs 1 when applying the first pattern and outputs 0 in synchronization with the second pattern capture clock is used as a timing generation circuit, it supports 2 pattern test Model.
 図7(B)に2パターンテストに対応したLoSテストにおけるテストパターン取り込みのタイミングチャートを示す。LoSテストにおいては、まず、スキャンシフトモードにしてスキャンパス長分のサイクルだけスキャンクロックを印加することにより、スキャン入力から2パターンテストの第1パターンをシフトインすると同時に2パターンテストに対する応答をシフトアウトする。次に、スキャンシフトモードのまま、スキャンクロックをもう1サイクル印加する。ここでスキャンFFに設定される値が2パターンテストの第2パターンとなる。そして、SEを0(通常動作モード)にして通常クロックを1サイクル印加する。ここでFFにロードされた値が2パターンテストに対する応答になる。ただし、最後のスキャンクロック印加から通常クロックを印加するまでの周期は、通常クロックと等しくなければならない。これを繰り返すことによりテストを実施する。 FIG. 7B shows a timing chart of test pattern loading in the LoS test corresponding to the two pattern test. In the LoS test, first, in scan shift mode, apply the scan clock for the scan path length cycle to shift in the first pattern of the 2 pattern test from the scan input and simultaneously shift out the response to the 2 pattern test. Do. Next, the scan clock is applied for one more cycle in the scan shift mode. Here, the value set for the scan FF is the second pattern of the two pattern test. Then, SE is set to 0 (normal operation mode) and a normal clock is applied for one cycle. Here, the value loaded to the FF becomes a response to the two pattern test. However, the period from the last scan clock application to the normal clock application should be equal to the normal clock. Perform the test by repeating this.
 以下に、図4~図7に示した本発明の各実施形態に係るシード生成モデルを、更に詳細に説明する。
 先ず、XORネットワークについて説明する。
 図8は、3ステージLFSR、外部入力数2、スキャンパス長3のサンプル回路を示す図である。図において、81は3ステージLFSR、82はCUT,83はCUT82の組合せ回路部分、84はCUT82のスキャンパスを示す。LFSRはXORとFFとによって構成されている。従って、スキャンパス84の状態情報を時間的に展開すると、被検査回路はFFのない組合せ回路と考えることができる。そのため、ある時刻の各スキャンFFと外部入力の値を、シードの関数として表現することができる。
The seed generation model according to each embodiment of the present invention shown in FIGS. 4 to 7 will be described in more detail below.
First, an XOR network will be described.
FIG. 8 is a diagram showing a sample circuit of 3-stage LFSR, 2 external inputs, and 3 scan path lengths. In the figure, 81 indicates a 3-stage LFSR, 82 indicates a CUT, 83 indicates a combination circuit portion of the CUT 82, and 84 indicates a scan path of the CUT 82. The LFSR is configured by XOR and FF. Therefore, when the state information of the scan path 84 is temporally expanded, the circuit to be inspected can be considered as a combination circuit without an FF. Therefore, the values of each scan FF at a certain time and the external input can be expressed as a function of the seed.
 図9は、図8のLFSR81のシードを(FF0、FF1、FF2)=(S0、S1、S2)とし、スキャンパス84に値が満たされたときのPI0、PI1およびスキャンパス84の各FF(SFF0、SFF1、SFF2)の値を、上述の通り時間的に展開し、シードだけで表現した図である。図示するように、LFSR81に入力されるシードの値と組合せ回路部分83への外部入力の値とは依存関係があり、従ってこの関係を論理回路に表すことができる。LFSRとスキャンパスの構造をこのようにして時間展開したものをXORネットワークと呼ぶ。図10に、図9の入出力関係に基づいて形成したXORネットワーク101を示す。 In FIG. 9, assuming that the seed of the LFSR 81 in FIG. 8 is (FF 0, FF 1, FF 2) = (S 0, S 1, S 2), each FF of PI 0, PI 1 and scan path 84 when the value is filled in the scan path 84 It is the figure which expanded the value of SFF0, SFF1, SFF2) temporally as mentioned above, and expressed only with the seed. As shown, the value of the seed input to the LFSR 81 and the value of the external input to the combinational circuit portion 83 have a dependency, and this relationship can therefore be expressed in a logic circuit. A time-expanded structure of the LFSR and scan path in this manner is called an XOR network. FIG. 10 shows an XOR network 101 formed based on the input / output relationship of FIG.
 図11は、図10に示したXORネットワーク101をCUTの組合せ回路部分83に接続して構成したシード生成モデルを示す図であり、図4に示したベースモデルを図8のサンプル回路に適用したものである。このように、CUTの組合せ回路部分83のみを抽出して、その入力にXORネットワーク101を接続することにより、テストモード時のスキャンBIST回路と同じ動作を模擬でき、このモデルにATPGを適用することにより、直接シードを求めることができる。その結果、ドントケア付きテスト生成をする必要がなく、従来手法よりパターン数を抑えることができる。また、シードを生成する過程で生成したシードがどの程度の故障を検出できるか確認するため、改めて故障シミュレーションを行わなくて済む。そのためシード生成時間を減らせる利点もある。これらの点について実験により評価する。本発明法の有効性は、後述する実験例におけるITC’99ベンチマーク回路を用いた実験によって評価した結果で紹介する。 FIG. 11 is a diagram showing a seed generation model configured by connecting the XOR network 101 shown in FIG. 10 to the combinational circuit portion 83 of the CUT, and the base model shown in FIG. 4 is applied to the sample circuit of FIG. It is a thing. Thus, by extracting only the combinational circuit portion 83 of the CUT and connecting the XOR network 101 to its input, the same operation as the scan BIST circuit in the test mode can be simulated, and ATPG is applied to this model. Can directly determine the seed. As a result, it is not necessary to generate a test with don't care, and the number of patterns can be reduced compared to the conventional method. In addition, it is not necessary to perform failure simulation again in order to confirm how much failure the seed generated in the process of generating the seed can detect. Therefore, there is also an advantage of reducing the seed generation time. These points are evaluated by experiments. The effectiveness of the method of the present invention is introduced by the results of evaluation by experiments using the ITC'99 benchmark circuit in the experimental examples described later.
 図12は、3ステージLFSR、外部入力数2、スキャンパス長3のサンプル回路を示す図であり、組合せ回路部分に1縮退故障を有している。図13は、図12の回路に対して形成したシード生成モデルによって、対象故障に対するシードを生成する例を示している。図14は、従来手法によるテスト生成とシード変換例を示し、テストパターン:(0、X、X、1、1)がシードに変換できない場合を示している。 FIG. 12 is a diagram showing a sample circuit of a 3-stage LFSR, 2 external inputs, and a scan path length of 3 and has 1 stuck-at fault in the combinational circuit portion. FIG. 13 shows an example of generating a seed for a target failure by the seed generation model formed for the circuit of FIG. FIG. 14 shows an example of test generation and seed conversion according to the conventional method, and shows a case where a test pattern: (0, X, X, 1, 1) can not be converted into a seed.
 以下に、本発明の理解を容易にするために、スキャンBIST:組込み自己テスト方式、LFSR:線形フィードバックシフトレジスタ(LFSR、linear feed-back shift register)等の諸定義と本発明に関係する各例について説明する。 Hereinafter, in order to facilitate understanding of the present invention, definitions such as scan BIST: built-in self test method, LFSR: linear feedback shift register (LFSR), and examples related to the present invention Will be explained.
 図15(A)に組合せ回路を、図15(B)に順序回路を示す。入力値、出力値および内部状態の値が0または1の値の組み合わせとして表現することのできる回路を論理回路(logic circuit)という。論理回路はさらに、組合せ回路(combinational circuit)(a)と順序回路(sequential circuit)(b)に分類できる。組合せ回路では、回路の出力値がそのときの入力値だけにより決まり、順序回路では、入力値だけでは決まらず、回路の内部状態に依存する。組合せ回路は図15(A)に示すように組合せ回路部分(combinational component)152のみから成る。PI、POはそれぞれ外部入力、外部出力を表す。順序回路は、図15(B)に示すように、組合せ回路部分152と複数のフリップフロップ(Flip-Flop、FF)155によって構成される状態記憶部分から成る。順序回路において、出力はそのときに印加された入力の値と内部状態の値によって決められる。また、内部状態は、そのときの入力と内部状態によって次の時刻の内部状態へと変化する。本実施形態では、図16に示すD型のフリップフロップ166を扱う。FF166はデータ入力(D)とデータ出力(Q)およびクロック入力(CLK)があり、クロック信号によってデータを取り込む。 FIG. 15A shows a combinational circuit, and FIG. 15B shows a sequential circuit. A circuit that can be expressed as a combination of an input value, an output value, and an internal state value of 0 or 1 is called a logic circuit. Logic circuits can be further classified into combinational circuit (a) and sequential circuit (b). In the combinational circuit, the output value of the circuit is determined only by the input value at that time, and in the sequential circuit, it is not determined only by the input value but depends on the internal state of the circuit. The combinational circuit consists only of the combinational component 152 as shown in FIG. 15 (A). PI and PO represent an external input and an external output, respectively. The sequential circuit, as shown in FIG. 15B, comprises a state storage portion constituted by a combinational circuit portion 152 and a plurality of flip-flops (Flip-Flop, FF) 155. In a sequential circuit, the output is determined by the value of the input currently applied and the value of the internal state. Also, the internal state changes to the internal state at the next time according to the current input and the internal state. In the present embodiment, the D-type flip-flop 166 shown in FIG. 16 is handled. The FF 166 has a data input (D), a data output (Q) and a clock input (CLK), and takes in data by the clock signal.
 回路を構成する要素に物理的欠陥があれば、回路が正しい動作をしなくなる。このような物理的欠陥を回路の故障という。故障は回路の故障による影響をモデル化した故障モデルとして扱う。論理回路の論理機能が故障により別な論理機能に変化してしまう故障モデルを論理(スタティック)故障という。代表的なスタティック故障モデルには縮退故障(stuck-at-fault)がある。縮退故障とは回路内の信号線の値が1または0に固定される故障で、1に固定される故障を1縮退故障(stuck-at-1、s-a-1)といい、0に固定される故障を0縮退故障(stuck-at-0、s-a-0)という。縮退故障の例として、図17に示す回路について考える。 If there is a physical defect in the elements that make up the circuit, the circuit will not operate correctly. Such physical defects are called circuit failures. Failures are treated as failure models that model the effects of circuit failures. A failure model in which a logic function of a logic circuit changes to another logic function due to a failure is called a logic (static) failure. A typical static fault model is stuck-at-fault. A stuck-at fault is a fault in which the value of the signal line in the circuit is fixed to 1 or 0, and a fault fixed to 1 is referred to as a stuck-at fault (stuck-at-1, sa-1), and is set to 0 The fixed fault is called a stuck-at 0 fault (stuck-at-0, s-a-0). As an example of a stuck-at fault, consider the circuit shown in FIG.
 図17のアンド回路177において、信号線x、yにそれぞれ1を印加したとき、故障がない場合は信号線zに1が出力されるが、x上にs-a-0が存在する場合は0が出力される。なお、故障モデルには、縮退故障の他にブリッジ故障、遅延故障、トランジスタ故障など多くのモデルが考えられている。 In the AND circuit 177 of FIG. 17, when 1 is applied to the signal lines x and y, 1 is output to the signal line z if there is no failure, but if sa−0 exists on x. 0 is output. In addition to stuck-at faults, many models such as bridge faults, delay faults, and transistor faults are considered as fault models.
 論理回路が設計通りに製造されているかどうかを確かめることをテスト(testing)という。テストは、テスト生成(test generation)とテスト実行(test application)の2つの過程からなり、テスト生成では故障を想定し、その故障箇所を故障値とは逆の値を設定(活性化)し、その値を外部出力まで伝搬するテストパターンを求める。テスト実行ではテスト生成で得られたテストパターンを回路に印加し、その出力応答と期待値とを比較することで故障の有無を判断する。 Testing is to make sure that the logic circuit is manufactured as designed. A test consists of two processes of test generation (test generation) and test execution (test application), assuming a failure in test generation, setting the value of the failure point opposite to the failure value (activation), Find a test pattern that propagates the value to the external output. In test execution, a test pattern obtained by test generation is applied to a circuit, and the presence or absence of a failure is determined by comparing the output response with an expected value.
 例えば図18に示す信号線Fがs-a-0である回路のテスト生成について考える。s-a-0を活性化するためにA、Bは1となる。その値を誤り信号として外部出力までに伝搬するためにGを0、Iを1にする必要がある。Gを0にするのはC、Dのどちらかが0、もう片方はドントケア(X)となり、Iを1にするためにEは0となる。以上より、信号線Fのs-a-0を検出するテストパターンの1つは(A、B、C、D、E)=(1、1、0、X、0)であることがわかる。 For example, consider test generation of a circuit in which the signal line F shown in FIG. 18 is sa-0. A and B become 1 to activate s-a-0. It is necessary to set G to 0 and I to 1 in order to propagate the value as an error signal to the external output. To set G to 0, either C or D is 0, the other is don't care (X), and to set I to 1, E is 0. From the above, it can be seen that one of the test patterns for detecting s-a-0 of the signal line F is (A, B, C, D, E) = (1, 1, 0, X, 0).
 テストの評価尺度には故障検出率と故障検出効率がある。故障検出率とは対象とする故障の内、どれだけの故障が検出できたかというものであり、数1で表される。 Test metrics include fault coverage and fault coverage. The failure detection rate is the number of failures that can be detected among the target failures, and is expressed by equation 1.
Figure JPOXMLDOC01-appb-M000001
Figure JPOXMLDOC01-appb-M000001
 故障検出効率は対象とする故障のうち、どれだけの故障を検出できたかに加えて、冗長故障と呼ばれる入出力対応では故障を検出できない故障であると識別された故障をいくつ識別したかを示す比率であり、数2で表される。 The fault detection efficiency indicates how many faults have been detected among the targeted faults, as well as how many faults identified as faults that can not be detected by the I / O response called redundant faults are identified. It is a ratio and is expressed by equation 2.
Figure JPOXMLDOC01-appb-M000002
Figure JPOXMLDOC01-appb-M000002
 図19にスキャン設計されたFFの一例を示す。テスト容易化設計の1つとしてスキャン設計がある。スキャン設計では、FF191に外部から直接入力できるようにスキャン入力(scan in)を設け、通常動作時のデータ入力(Din)とスキャン入力をマルチプレクサ(MUX)192で切り替えてFF191に入力できるようにする。FF191の出力はスキャン出力(scan out)から外部へ観測できるようにする。FF191ごとにスキャン入力出力端子を用意すると余分の端子がFF191の個数の2倍必要となり実用的でない。そこでFF191を一列に連結し、シフトレジスタとして動作できるようにする。このようにスキャン設計されたFFの集合をスキャンパスと呼ぶ。 FIG. 19 shows an example of the scan designed FF. One of the testability designs is scan design. In scan design, FF 191 is provided with a scan input (scan in) so that it can be directly input from the outside, and multiplexer (MUX) 192 switches data input (Din) and scan input during normal operation so that they can be input to FF 191 . The output of the FF 191 can be observed from the scan out to the outside. If a scan input output terminal is prepared for each FF 191, an extra terminal is required twice as many as the number of FFs 191, which is not practical. Therefore, the FFs 191 are connected in a line so that they can operate as shift registers. A set of scan designed FFs in this way is called a scan path.
 図20にスキャン設計された順序回路の一例を示す。スキャン設計された順序回路では、FF191をシフトレジスタとして動作させることができるので、容易に各FF191を任意の状態に設定できると同時に、それらの状態を観測することができる。そのため、スキャン設計された回路のテスト生成の問題は組合せ回路の問題として取り扱うことができる。 FIG. 20 shows an example of a scan-designed sequential circuit. In the scan-designed sequential circuit, the FF 191 can be operated as a shift register, so that each FF 191 can be easily set to an arbitrary state, and at the same time, those states can be observed. Therefore, the problem of test generation of scan-designed circuits can be treated as a problem of combinational circuits.
 図21は、LFSRの一例を示す。
 組込み自己テスト方式(BIST)のテストパターン発生回路としては、主に線形フィードバックシフトレジスタ(LFSR:linear feed-back shift register)が用いられている。図示のLFSRのモデルにおいて、ci=0のとき、XORへフィードバック無、ci=1のとき、XORへフィードバック有である。XORへのフィードバック位置を多項式で表現することができ、その多項式のことを特性多項式という。図21におけるLFSRの特性多項式は数3のように表せる。
FIG. 21 shows an example of the LFSR.
A linear feed-back shift register (LFSR) is mainly used as a test pattern generation circuit of the built-in self-test system (BIST). In the model of the illustrated LFSR, when ci = 0, there is no feedback to XOR, and when ci = 1, there is feedback to XOR. The feedback position to XOR can be expressed by a polynomial, and the polynomial is called a characteristic polynomial. The characteristic polynomial of the LFSR in FIG. 21 can be expressed as Equation 3.
Figure JPOXMLDOC01-appb-M000003
Figure JPOXMLDOC01-appb-M000003
 この式に原始多項式が用いられたとき、すべて0のパターンを除く、すべてのパターンを疑似ランダムに発生することができる。したがって、LFSRを用いて疑似ランダムテストや、すべて0以外のパターンを印加する全数テスト(exhaustive test)を行うことができる。 When primitive polynomials are used in this equation, all patterns can be generated pseudorandomly except for all zero patterns. Therefore, the LFSR can be used to perform a pseudorandom test or an exhaustive test in which a pattern other than all zeros is applied.
 図21に示すLFSRにおいて、ある時刻tのFFの値と特性多項式を用いて、次の時刻t+1のFFの値を次の数4で表現することができる。 In the LFSR shown in FIG. 21, the value of the FF at the next time t + 1 can be expressed by the following equation 4 using the value of the FF at a certain time t and the characteristic polynomial.
Figure JPOXMLDOC01-appb-M000004
Figure JPOXMLDOC01-appb-M000004
 LFSRの例として、図22に3ビットのLFSRを示す。このとき時刻0のときのFFの値をシードとし、値を(FF0、FF1、FF2)=(0、1、0)と設定したときの動作結果を表1に示す。 As an example of the LFSR, FIG. 22 shows a 3-bit LFSR. At this time, the value of FF at time 0 is used as a seed, and the operation result when the value is set as (FF0, FF1, FF2) = (0, 1, 0) is shown in Table 1.
Figure JPOXMLDOC01-appb-T000005
Figure JPOXMLDOC01-appb-T000005
 表1の結果から、すべて0以外のパターンを生成できることがわかる。 It can be seen from the results of Table 1 that all non-zero patterns can be generated.
 外部テスト装置を簡略化する設計法に組込み自己テスト(BIST、built-in self-test)方式がある。BIST方式ではテストパターンを発生する回路とテストパターンに対する出力応答を調べる回路を用い、パターン発生回路は主にLFSRが使用されている。 A design method that simplifies external test equipment is the built-in self-test (BIST) method. The BIST method uses a circuit that generates a test pattern and a circuit that examines an output response to the test pattern, and the pattern generation circuit mainly uses an LFSR.
 図23に、BISTの概略図を示す。BISTでは、パターン発生回路230でテストパターンを生成し、それを被検査回路231に印加し、その出力を、応答解析器(MISR)231で期待値と比較することで故障の有無や故障状態を確認する。パターン発生回路230として、例えば上記のLFSRが用いられる。 FIG. 23 shows a schematic view of BIST. In BIST, a test pattern is generated by the pattern generation circuit 230, applied to the circuit under test 231, and the output is compared with an expected value by the response analyzer (MISR) 231 to determine the presence or absence of a failure or a failure state. Check. As the pattern generation circuit 230, for example, the above-mentioned LFSR is used.
 図24に、スキャン設計された回路のBISTを示す。244はパターン発生器としてのLFSR、246は順序回路における組合せ回路部分、248は順序回路におけるFFで構成されたスキャンパス、250は応答解析器としてのMISRを示す。このBISTにおいて、LFSR244をスキャンパス248に値が満たされるまで動かし、そのときのスキャンパス248の値とPIの値が被検査回路の組合せ回路部分246に印加されることで疑似ランダムテストが行われる。なお、本発明では、この構造のBISTを、図3に示すように、本願のBISTモデルとして用いている。 FIG. 24 shows the BIST of the scan designed circuit. Reference numeral 244 denotes an LFSR as a pattern generator, 246 denotes a combination circuit part in the sequential circuit, 248 denotes a scan path formed of FFs in the sequential circuit, and 250 denotes an MISR as a response analyzer. In this BIST, a pseudorandom test is performed by moving the LFSR 244 until the scan path 248 is satisfied, and the values of the scan path 248 and PI at that time are applied to the combinational circuit portion 246 of the circuit under test . In the present invention, the BIST of this structure is used as the BIST model of the present application, as shown in FIG.
 BISTの問題点として、ランダムパターン耐性故障を検出しにくいことが挙げられる。例として図25の信号線Eがs-a-0である回路を示す。故障を検出するパターンは4つの入力すべてが1であるパターンが必要があるが、4ビットのLFSRの場合、このパターンが生成される確率は15分の1になる。LFSRで発生できるパターンのうち、僅かな限定されたパターンでしか検出できない故障のことをランダムパターン耐性故障と呼ぶ。BISTでランダムパターン耐性故障を検出するためにはLFSRのシードを再設定すること(リシードという)が有効であることが知られている。 One problem with BIST is that it is difficult to detect random pattern tolerant faults. As an example, a circuit in which the signal line E in FIG. 25 is sa-0 is shown. The pattern for detecting a fault needs a pattern in which all four inputs are 1; however, in the case of a 4-bit LFSR, the probability that this pattern is generated is 1/15. Among the patterns that can be generated by the LFSR, a failure that can be detected with only a limited number of patterns is called a random pattern tolerant failure. It is known that re-seeding of LFSR (referred to as reseed) is effective for detecting random pattern tolerant failure in BIST.
 LFSRによる疑似ランダムパターンテストでは一般にスキャンパス内のFF間や、外部入力やスキャンパス間にその値の依存関係が生じる。この依存関係を低減するための技術の1つとして、フェーズシフタを用いる方法がある。フェーズシフタとは、LFSRの出力に配置するXORを用いて作成する回路で、LFSRにより発生するパターンの順番を入れ替えるものである。また、フェーズシフタと同様にFF、外部入力、スキャンパス間の依存関係を低減する技術として、ランダム反転回路を用いる方法がある。 In the pseudo random pattern test based on the LFSR, in general, there is a dependency of the values between the FFs in the scan path, and between the external input and the scan path. One of the techniques for reducing this dependency is to use a phase shifter. A phase shifter is a circuit created using an XOR arranged at the output of the LFSR, and it changes the order of patterns generated by the LFSR. Further, there is a method using a random inversion circuit as a technique for reducing the dependency between the FF, the external input, and the scan path as in the phase shifter.
 フェーズシフタを用いる場合のBIST構成の一例の概略図を図26(A)に示す。図26(A)で、200はフェーズシフタであり、上述したようにLFSR1により発生するパターンの順番を入れ替える働きをする。 A schematic diagram of an example of the BIST configuration in the case of using a phase shifter is shown in FIG. In FIG. 26A, reference numeral 200 denotes a phase shifter, which serves to change the order of patterns generated by the LFSR 1 as described above.
 ランダム反転回路を用いる場合のBIST構成の一例の概略図を図26(B)に示す。このBISTは、被検査回路(CUT)2と、そのスキャンを可能とするスキャンパスと、スキャンパスに供給されるテストパターンを形成するための第1パターン発生回路1とを備えている。ランダム反転回路は、第1パターン発生回路1とは別個に設けられた第2パターン発生回路1bによって発生されるパターンを用いて第1パターン発生回路1で発生されるパターンを変化させるためのパターン制御回路を有し、このパターン制御回路は、第1パターン発生回路1の出力値の論理を反転可能な反転論理部266と、第2パターン発生回路1bによって発生されるパターンを用いて上記反転論理部266の動作を制御可能な反転制御回路268を含んだものであり、上記反転論理部266の出力信号が被検査回路2に供給される。具体的には、第2パターン発生回路1bで生成される1の値の数と反転条件設定REG270の値によって第1パターン発生回路1bで生成した値が反転するかが決まる。なお、ランダム反転回路は、第2パターン発生回路1b、反転論理部266、反転制御回路268および反転条件設定REG270によって構成される。 A schematic diagram of an example of the BIST configuration in the case of using a random inversion circuit is shown in FIG. The BIST includes a circuit under test (CUT) 2, a scan path for enabling the scan, and a first pattern generation circuit 1 for forming a test pattern supplied to the scan path. The random inversion circuit controls pattern generation for changing the pattern generated by the first pattern generation circuit 1 using a pattern generated by the second pattern generation circuit 1 b provided separately from the first pattern generation circuit 1. The pattern control circuit includes an inversion logic unit 266 capable of inverting the logic of the output value of the first pattern generation circuit 1, and the inversion logic unit using a pattern generated by the second pattern generation circuit 1b. An inversion control circuit 268 capable of controlling the operation of the circuit 266 is included, and the output signal of the inversion logic unit 266 is supplied to the circuit under test 2. Specifically, whether the value generated by the first pattern generation circuit 1b is inverted is determined by the number of 1 values generated by the second pattern generation circuit 1b and the value of the inversion condition setting REG 270. The random inversion circuit is formed of the second pattern generation circuit 1b, the inversion logic unit 266, the inversion control circuit 268, and the inversion condition setting REG 270.
 図26(C)および図26(D)に、図26(A)に示すフェーズシフタ付きBISTモデルに対応したシード生成モデルを示す。図26(C)は、スタティック故障用のフェーズシフタ付きシード生成モデルであって、図4に示すベースモデルに対して、XORネットワーク10と組合せ回路部分20間にフェーズシフタグループ200aを挿入した構成を有する。フェーズシフタグループ200aは、図26(A)に示すフェーズシフタ200をスキャンパス長分コピーして並列に配置した回路である。厳密に言うと、図26(C),(D)のフェーズシフタグループ200aは、図26(A)に示すフェーズシフタ200と、フェーズシフタ200のPIに接続するXORを削除したもの(SIに接続するXORのみにしたもの)をスキャンパス長-1個分だけコピーした回路となる。図26(D)は、遅延故障LoCテスト用のフェーズシフタ付きシード生成モデルであって、図5(A)に示すシード生成モデルに対して、XORネットワーク10の出力にフェーズシフタグループ200aを接続した構成を有する。 26 (C) and 26 (D) show a seed generation model corresponding to the BIST model with phase shifter shown in FIG. 26 (A). FIG. 26C shows a seed generation model with a phase shifter for static failure, in which a phase shifter group 200a is inserted between the XOR network 10 and the combinational circuit portion 20 with respect to the base model shown in FIG. Have. The phase shifter group 200a is a circuit in which the phase shifter 200 shown in FIG. 26A is copied in the scan path length and arranged in parallel. Strictly speaking, the phase shifter group 200a in FIGS. 26C and 26D has the phase shifter 200 shown in FIG. 26A and the XOR connected to PI of the phase shifter 200 removed (connected to SI This circuit is a circuit in which the XOR only) is copied by one scan path length. FIG. 26D shows a seed generation model with phase shifter for delay fault LoC test, in which the phase shifter group 200a is connected to the output of the XOR network 10 with respect to the seed generation model shown in FIG. 5A. It has composition.
 図26(E)および図26(F)に、図26(B)に示すランダム反転回路付きBISTモデルに対応したシード生成モデルを示す。図26(E)は、スタティック故障用のランダム反転回路付きシード生成モデルであって、図4に示すベースモデルに対して、第2のXORネットワーク10a、反転論理回路グループ266a、反転制御回路グループ268aを備える。反転論理回路グループ266aは、図26(B)に示す反転論理部266をスキャンパス長分コピーして並列に配置した回路であり、反転制御回路グループ268aも同様に、反転制御回路268をスキャンパス長分コピーして並列に配置した回路である。第2のXORネットワーク10aは、第2パターン発生回路1bを構成するLFSRをスキャンFFのスキャンパス長分時間展開して構成したものである。(第1の)XORネットワーク10に入力される第1のシードは、図26(B)の第1のパターン発生回路1のシードであり、第2のXORネットワーク10aに入力される第2のシードは、図26(B)の第2のパターン発生回路1bに入力されるシードとなる。 FIGS. 26E and 26F show a seed generation model corresponding to the BIST model with a random inversion circuit shown in FIG. 26B. FIG. 26E shows a seed generation model with a random inversion circuit for static failure, which is different from the base model shown in FIG. 4 in the second XOR network 10a, the inversion logic circuit group 266a, and the inversion control circuit group 268a. Equipped with The inversion logic circuit group 266a is a circuit in which the inversion logic unit 266 shown in FIG. 26B is copied in parallel for the scan path length and similarly arranged in the inversion control circuit group 268a. This is a circuit in which long copies are arranged in parallel. The second XOR network 10a is configured by expanding the time of the LFSR constituting the second pattern generation circuit 1b by the scan path length of the scan FF. The first seed input to the (first) XOR network 10 is the seed of the first pattern generation circuit 1 of FIG. 26B, and the second seed input to the second XOR network 10a. Is a seed to be input to the second pattern generation circuit 1b of FIG.
 図26(F)は、遅延故障LoCテスト用のランダム反転回路付きシード生成モデルであって、図5(A)に示すシード生成モデルに対して、第2のXORネットワーク10a、反転制御回路グループ268a、反転論理回路グループ266aからなるランダム反転回路グループを付加した構成を有する。図26(E)のモデルと同様に、(第1の)XORネットワーク10に入力されるシードは第1のパターン発生回路1のシードであり、第2のXORネットワーク10aのシードは第2のパターン発生回路1bのシードとなる。 FIG. 26F shows a seed generation model with a random inversion circuit for delay fault LoC test, and the second XOR network 10a and the inversion control circuit group 268a with respect to the seed generation model shown in FIG. 5A. , And a configuration in which a random inversion circuit group consisting of inversion logic circuit groups 266a is added. As in the model of FIG. 26E, the seed input to the (first) XOR network 10 is the seed of the first pattern generation circuit 1, and the seed of the second XOR network 10a is the second pattern. It becomes a seed of the generation circuit 1b.
 以下に、図5(A)~図7(B)に示した遅延故障検出用のシード生成モデルについて、更に詳細に説明する。
 [遅延故障モデルとテスト手法]
 近年のVLSIの高速化により、論理故障だけでなく、タイミングに関する故障モデルである遅延故障の重要性が高まっている。遅延故障とはゲートや信号線の遅延により規定時間内に信号を伝播させることができず誤動作を起してしまう故障モデルである。遅延故障には遷移故障、ゲート遅延故障、パス遅延故障などある。以下の説明では遷移故障を対象とするが、これに限定するものではない。
The seed generation model for delay fault detection shown in FIGS. 5 (A) to 7 (B) will be described in more detail below.
[Delayed fault model and test method]
Recent VLSI speeds have increased the importance of not only logic faults but also delay faults that are timing models. A delay fault is a fault model in which a signal can not be propagated within a specified time due to the delay of a gate or a signal line and a malfunction occurs. Delay faults include transition faults, gate delay faults, and path delay faults. The following description is directed to transition faults, but is not limited thereto.
 図27に遷移故障の例を示す。遷移故障は回路中のある信号線に遅延故障が生じると仮定し、その遅延を伝播する経路にかかわらず外部出力やFFで観測されるのに十分に大きな遅延が生じるとする。遷移故障には信号の立ち上がりが遅れる立ち上がり遷移故障、立ち下がりが遅れる立ち下がり遷移故障の2種類がある。 FIG. 27 shows an example of transition failure. It is assumed that a transition fault causes a delay fault to occur in a certain signal line in a circuit, and that a delay large enough to be observed by an external output or an FF occurs regardless of a path propagating the delay. There are two types of transition faults: rising transition faults that delay the rise of the signal and falling transition faults that delay the fall.
 遷移故障のテストは、はじめに対象としている箇所の信号の値を設定し、その後その値を変化させ、外部出力やFFへ伝搬し、応答を観測する。例えば、1パターン目にある信号線を0(low)に設定するパターンを印加し、2パターン目にその信号線を1(high)に設定するパターンを印加して、外部出力やFFへ伝搬させ、値の変化を観測すればその信号線の立ち上がり遷移故障を検出することができる。このようなテスト手法を2パターンテストという。 In the transition fault test, first, the value of the signal at the target point is set, then the value is changed, and the value is propagated to the external output or the FF, and the response is observed. For example, apply a pattern to set the signal line in the first pattern to 0 (low), apply a pattern to set the signal line to 1 (high) to the second pattern, and propagate it to the external output or FF By observing the change in value, it is possible to detect the rising transition fault of the signal line. Such a test method is called a two-pattern test.
 スキャン設計した回路において実速度(at-speed)で2パターンテストを行う代表的な手法としてLoC方式と、LoS方式がある。LoC方式のテストはスキャン動作により1パターン目を設定した後にシステムクロックにより実速度で2パターン目の設定と応答のFFへの格納を行う(図28)。この動作をキャプチャという。2パターン目のFFに設定する信号には内部状態を用いることを考慮して1パターン目を設定する。LoC方式テストの動作を時間毎に展開した時間展開モデルを図29に表す。なお、図28に示したLoC方式のタイミングチャートは、図5(C)に示す遅延故障LoCテスト用シード生成モデル1の動作説明のためのタイミングチャートに相当する。 There are the LoC method and the LoS method as representative methods for performing two-pattern test at an actual speed (at-speed) in a scan-designed circuit. In the LoC test, after the first pattern is set by the scan operation, the second pattern is set and the response is stored in the FF at the actual speed by the system clock (FIG. 28). This action is called capture. The first pattern is set in consideration of using the internal state for the signal set as the second pattern FF. A time expansion model in which the operation of the LoC method test is expanded for each time is shown in FIG. The timing chart of the LoC method shown in FIG. 28 corresponds to the timing chart for explaining the operation of the delay fault LoC test seed generation model 1 shown in FIG. 5 (C).
 図30に、LoS方式による遅延故障テストの基本的なタイミングチャートを示す。このタイミングチャートは、図7(A)に示す本発明の一実施形態に係る遅延故障LoSテスト用シード生成モデルの動作説明のためのタイミングチャート(図7(B))と基本的に同じものであり、従ってLoS方式テストの動作詳細は図7(A)および7(B)の説明の項に記載したものを援用することが可能である。 FIG. 30 shows a basic timing chart of the delay fault test according to the LoS method. This timing chart is basically the same as the timing chart (FIG. 7B) for explaining the operation of the seed generation model for delay fault LoS test according to the embodiment of the present invention shown in FIG. 7A. Therefore, it is possible to use the operation details of the LoS test as described in the description of FIGS. 7A and 7B.
  遅延故障用シード生成モデル1
 図31に遅延故障用のシード生成モデル1を示す。LoC方式テストでのシード生成回路のマルチプレクサの制御信号m1の遅延を図32に示す。なお、図31の遅延故障用シード生成モデル1は、図5(A)の遅延故障用シード生成モデルの他の実施形態である。
Delay fault seed generation model 1
FIG. 31 shows a seed generation model 1 for delay failure. The delay of the control signal m1 of the multiplexer of the seed generation circuit in the LoC test is shown in FIG. The delay fault seed generation model 1 of FIG. 31 is another embodiment of the delay fault seed generation model of FIG. 5 (A).
 LoC方式テスト向けの2パターンテストを生成するために2時刻を考慮する必要がある。そのために対象回路のスキャンイネーブル端子、スキャンFFに回路を追加し、XORネットワーク10を接続する。スキャンイネーブル端子にORゲート、FFを順に追加して接続し、追加したFFの出力を分岐させNOTゲート追加してこれを通してORゲートのもう1つの入力とする。これらのORゲート、FFおよびNOTゲートはタイミング生成回路を形成する。 It is necessary to consider 2 time to generate 2 pattern test for LoC test. Therefore, a circuit is added to the scan enable terminal of the target circuit and the scan FF, and the XOR network 10 is connected. An OR gate and an FF are sequentially added and connected to the scan enable terminal, the output of the added FF is branched, a NOT gate is added, and another input of the OR gate is added through this. These OR gates, FFs and NOT gates form a timing generation circuit.
 また、スキャンFFの出力に、マルチプレクサを追加する。マルチプレクサの制御信号はスキャンイネーブルに追加したFFの出力とする。マルチプレクサの入力はXORネットワークを接続する外部入力と、スキャンFFからの出力である。回路の追加により、2パターンテストにおいて1パターン目にPPIにはXORネットワーク10が選択され、2パターン目にはスキャンFFを選択することができる。 Also, a multiplexer is added to the output of the scan FF. The control signal of the multiplexer is the output of the FF added to the scan enable. The inputs of the multiplexer are the external input connecting the XOR network and the output from the scan FF. By the addition of the circuit, the XOR network 10 can be selected for PPI in the first pattern in the two-pattern test, and the scan FF can be selected in the second pattern.
 なお、フェーズシフタおよびランダム反転回路を用いたBIST構成の場合には、それらに対応したLoC遅延故障用のシード生成モデルが必要になる。これらのモデルについては、図26(D)および図26(F)を参照して上記で説明した通りである。 In the case of a BIST configuration using a phase shifter and a random inversion circuit, a seed generation model for LoC delay fault corresponding to them is required. These models are as described above with reference to FIGS. 26 (D) and 26 (F).
  遅延故障用シード生成モデル2および3
 図6に遅延故障用シード生成モデル2を示し、さらに図7(A)においてLoS方式テスト用の遅延故障用シード生成モデル3を示した。
Delay fault seed generation models 2 and 3
FIG. 6 shows the delay fault seed generation model 2 and FIG. 7 (A) shows the delay fault seed generation model 3 for the LoS test.
 以上に示したスタティック故障向けのシード生成モデル(ベースモデル)、遅延故障用のシード生成モデル1~3を使用した、本発明のLFSRシード生成方法によれば、シード生成モデルでシード生成が不可能であった(シードが存在しないと判明した)故障は元のBIST回路でも検出ができないことが保証される。したがってBIST機構の故障検出能力を知ることができる。また、一旦生成したテストパターンからシードへ変換をせずとも、テスト生成に制約を設けることで、テスト生成ツールを用いてシードを直接生成することが出来る。従来法ではシード変換ができるまで、テスト生成とシード変換作業を繰り返すので、提案手法と同じ故障検出率を得るためにはテスト生成のやり直しが多発し、時間がかかると考えられる。 According to the LFSR seed generation method of the present invention using the seed generation model (base model) for static failure and the seed generation models 1 to 3 for delay failure described above, seed generation is impossible in the seed generation model It is guaranteed that the failure (which turned out to be non-seed) could not be detected even by the original BIST circuit. Therefore, the fault detection capability of the BIST mechanism can be known. In addition, even if the test pattern once generated is not converted to the seed, the test generation tool can be used to directly generate the seed by setting constraints on the test generation. In the conventional method, test generation and seed conversion operations are repeated until seed conversion can be performed. Therefore, in order to obtain the same failure detection rate as the proposed method, test generation is frequently retried and it takes time.
 [評価]
 まず、スタティック故障向けシード生成モデルによる提案手法の有効性を実験によって示す。
 実験環境を表2に示す。実験対象回路にはITC’99ベンチマーク回路を用い、ランダムパターン耐性故障(RPRF)を対象としてシード生成の実験を行った。RPRFは10,000パターンを印加して未検出の故障とする。ITC’99ベンチマーク回路の回路特性を表3に示す。
[Evaluation]
First, the effectiveness of the proposed method based on the seed generation model for static faults is shown by experiments.
The experimental environment is shown in Table 2. We used the ITC '99 benchmark circuit for the experiment target circuit, and conducted seed generation experiments for random pattern tolerant failure (RPRF). RPRF applies 10,000 patterns to make it an undetected fault. Table 3 shows the circuit characteristics of the ITC'99 benchmark circuit.
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000006
Figure JPOXMLDOC01-appb-T000007
Figure JPOXMLDOC01-appb-T000007
 表3において、#PIs、#POs、#Gates、#FFsはそれぞれ外部入力数、外部出力数、ゲート数、FF数を表している。 In Table 3, #PIs, #POs, #Gates, and #FFs respectively represent the number of external inputs, the number of external outputs, the number of gates, and the number of FFs.
 ベンチマーク回路b_19についてはスキャンパスの本数を6本、13本、22本に分割した回路を用意し、回路名をそれぞれb19_scan6、b19_scan13、b19_scan22と表記する。 For the benchmark circuit b_19, a circuit in which the number of scan paths is divided into 6, 13, and 22 is prepared, and the circuit names are represented as b19_scan6, b19_scan13, and b19_scan22, respectively.
 実験方法を以下に示す。まず、適当なシードでLFSRにより10,000疑似ランダムパターンを生成し、生成したパターンで被検査回路に対して故障シミュレーションを行う。次に故障シミュレーションの結果、未検出であった故障をランダムパターン耐性故障(RPRF)とし、それらの故障に対して従来手法、提案手法でそれぞれシードを求め、両手法の故障検出率、故障検出効率、シード生成時間、シード数を比較する。また、LFSRにフェーズシフタを付けた場合についても併せて評価した。本実験でのテスト生成については、アボート時間を10秒と設定した。アボート時間とは1つのパターンを生成するのにかける時間の上限である。また、使用したLFSRはランダム反転回路を付けていない場合および付けた場合の第1パターン発生回路については100ステージLFSRを、ランダム反転回路の第2パターン発生回路に10ステージのものを使用した。また、フェーズシフタをつけた場合のフェーズシフタは、複数のスキャンパスにLFSRから生成される同じ部分系列が入らないよう、各スキャンパスの入力はスキャンパス長以上位相がずれるように設計した。従来手法でのシードへの変換はSATを解く方法を採用し、SATソルバとしてMiniSATを用いた。 The experimental method is shown below. First, 10,000 pseudo-random patterns are generated by LFSR using appropriate seeds, and failure simulation is performed on the circuit under test using the generated patterns. Next, as a result of failure simulation, the failure not detected is regarded as random pattern tolerant failure (RPRF), and the seed is obtained for each failure by the conventional method and the proposed method, and the failure detection rate and failure detection efficiency of both methods , Seed generation time, Seed number compared. In addition, the case where a phase shifter was attached to the LFSR was also evaluated. For test generation in this experiment, the abort time was set to 10 seconds. The abort time is the upper limit of the time taken to generate one pattern. The used LFSRs were 100 stages LFSR for the first pattern generation circuit without and with the random inversion circuit, and 10 stages for the second pattern generation circuit of the random inversion circuit. In addition, the phase shifter with the phase shifter is designed so that the input of each scan path is out of phase by more than the scan path length so that the same partial series generated from the LFSR does not enter the plurality of scan paths. The conversion to seed in the conventional method adopted the method of solving SAT, and used MiniSAT as a SAT solver.
 表4に、LFSRを用いた10,000疑似ランダムパターンによる故障シミュレーションの結果を示す。 Table 4 shows the results of failure simulation with 10,000 pseudo random patterns using LFSR.
Figure JPOXMLDOC01-appb-T000008
Figure JPOXMLDOC01-appb-T000008
 表4での未検出故障を対象に従来手法、提案手法でシード生成したところ、表5に示す結果が得られた。
Figure JPOXMLDOC01-appb-T000009
When seeds were generated by the conventional method and the proposed method for the undetected faults in Table 4, the results shown in Table 5 were obtained.
Figure JPOXMLDOC01-appb-T000009
 実験では、従来手法ではテスト生成したパターンの一部をシードに変換できず、故障検出率が低下していることが確認された。また、表5から、すべての回路に対して提案手法の方が高い故障検出率が得られた。シード生成時間の点についてもほとんどの回路で提案手法の方が優れていることがわかる。 In the experiments, it was confirmed that the conventional method can not convert a part of the test generated pattern to the seed, and the failure detection rate is lowered. Table 5 also shows that the proposed method has higher fault coverage for all circuits. Also in terms of seed generation time, it can be seen that the proposed method is better for most circuits.
 次にLFSRにフェーズシフタを付けた場合の従来手法、提案手法について考える。表6にフェーズシフタを付けたLFSRを用いた10,000疑似ランダムパターンによる故障シミュレーションの結果を示す。 Next, we will consider the conventional method and the proposed method when the phase shifter is attached to the LFSR. Table 6 shows the results of failure simulation with 10,000 pseudo random patterns using the LFSR with a phase shifter.
Figure JPOXMLDOC01-appb-T000010
Figure JPOXMLDOC01-appb-T000010
 表6での未検出故障を対象に、従来手法、提案手法でシード生成した結果を表7に示す。 Table 7 shows the results of seed generation using the conventional method and the proposed method for the undetected faults in Table 6.
Figure JPOXMLDOC01-appb-T000011
Figure JPOXMLDOC01-appb-T000011
 表7から、フェーズシフタを付けた場合においても、ほとんどの回路において提案手法の方が高速にシードを求めることができ、シード数も従来手法よりも少なくて済むことがわかる。さらに、故障検出率についても提案手法の方が優れていることがわかる。 From Table 7, it can be seen that even with the phase shifter, the proposed method can obtain seeds faster in most circuits and the number of seeds can be smaller than that of the conventional method in most circuits. Furthermore, it is understood that the proposed method is superior also in the fault detection rate.
 次にLFSRにランダム反転回路を付けた場合の従来手法、提案手法について考える。表8にランダム反転回路を付けたLFSRを用いた10,000疑似ランダムパターンによる故障シミュレーションの結果を示す。 Next, we will consider the conventional method and the proposed method when a random inversion circuit is attached to the LFSR. Table 8 shows the results of failure simulation with 10,000 pseudo random patterns using LFSR with a random inversion circuit.
Figure JPOXMLDOC01-appb-T000012
Figure JPOXMLDOC01-appb-T000012
 表8での未検出故障を対象に、従来手法、提案手法でシード生成した結果を表9に示す。 Table 9 shows the results of seed generation using the conventional method and the proposed method for undetected faults in Table 8.
Figure JPOXMLDOC01-appb-T000013
Figure JPOXMLDOC01-appb-T000013
 次に、遅延故障用のシード生成モデル1を用いた提案法の有効性を実験によって示す。実験に用いた回路はITC’99ベンチマーク回路b14、b17、b18、b19、b20、b21、b22である。実験環境は表2に示したものと同一である。 Next, the effectiveness of the proposed method using the seed generation model 1 for delay faults is shown by experiments. The circuits used for the experiments are ITC'99 benchmark circuits b14, b17, b18, b19, b20, b21 and b22. The experimental environment is identical to that shown in Table 2.
 以下の表10~表15に遅延故障用のシード生成モデル1によるシード単体品質の評価を記載する。表10および表11は、評価環境とベンチマーク回路b14、b17、b18、b19、b20、b21、b22の回路特性を示す。 In Tables 10 to 15 below, evaluation of seed single-piece quality by the seed generation model 1 for delay fault is described. Tables 10 and 11 show the evaluation environment and the circuit characteristics of the benchmark circuits b14, b17, b18, b19, b20, b21 and b22.
Figure JPOXMLDOC01-appb-T000014
Figure JPOXMLDOC01-appb-T000014
 表11はシード生成対象故障を示す。初期疑似ランダムパターン印加後の未検出故障数を示している。 Table 11 shows seed generation target faults. It shows the number of undetected failures after the initial pseudo random pattern application.
Figure JPOXMLDOC01-appb-T000015
Figure JPOXMLDOC01-appb-T000015
 表12にシード単体品質についての実験結果を示す。ここでは、10,000疑似ランダムパターン印加後の未検出故障がシード生成対象である。 Table 12 shows the results of experiments on seed single quality. Here, an undetected fault after application of 10,000 pseudo random patterns is a seed generation target.
Figure JPOXMLDOC01-appb-T000016
Figure JPOXMLDOC01-appb-T000016
 表12において、
 従来法の%FC:各シードから1パターンを展開した場合の故障シミュレーション結果
 提案法の%FC、%FE:シード生成時のATPGのレポートを示す。
In Table 12,
Conventional% FC: Failure simulation results when one pattern is expanded from each seed% FC of the proposed method,% FE: A report of ATPG at the time of seed generation is shown.
 表13はドントケア付きテスト生成とシード変換を示し、10,000疑似ランダムパターンの印加後の未検出故障がシード生成対象である。従来法でシードに変換できないことによる故障検出率の損失を示す。 Table 13 shows test generation with don't care and seed conversion, and undetected faults after application of 10,000 pseudo random patterns are targets for seed generation. This shows the loss of fault coverage due to the inability to convert to seeds by the conventional method.
Figure JPOXMLDOC01-appb-T000017
Figure JPOXMLDOC01-appb-T000017
 表14は累積故障検出率/検出効率を示す。この結果は、10,000疑似ランダムパターン印加も含めた場合を示している。10,000疑似ランダムパターン印加後の未検出故障がシード生成対象である。 Table 14 shows the cumulative failure detection rate / detection efficiency. This result shows the case including 10,000 pseudo random pattern application. Undetected faults after application of 10,000 pseudo random patterns are targets for seed generation.
Figure JPOXMLDOC01-appb-T000018
Figure JPOXMLDOC01-appb-T000018
 以下の表15~表20および図33~図36に、遅延故障用のシード生成モデル1を用いて生成したシードのシード展開品質の実験結果を示す。 Tables 15 to 20 and FIGS. 33 to 36 below show experimental results of the seed deployment quality of the seeds generated using the delay generation function 1 for seed generation for delay faults.
 表15は、シード品質(128パターン展開)の実験結果を示す。この実験では、検出率の立ち上がりが最も早くなるようにシードを並び替え、シード生成対象故障(代表故障のみ)を、b21については全故障および10,000(10k)疑似ランダムパターン印加後未検出故障とし、b19については50,000(50k)疑似ランダムパターン印加後未検出故障とした。 Table 15 shows the experimental result of seed quality (128 pattern expansion). In this experiment, the seeds are rearranged so that the rise of the detection rate becomes the fastest, the target generation target failure (only representative failure), the total failure and the undetected failure after applying 10,000 (10 k) pseudo random patterns for b21 For the b19, 50,000 (50 k) pseudo random pattern is not detected after application of the pseudo random pattern.
Figure JPOXMLDOC01-appb-T000019
Figure JPOXMLDOC01-appb-T000019
 表16にシード生成状況を示す。 Table 16 shows the status of seed generation.
Figure JPOXMLDOC01-appb-T000020
Figure JPOXMLDOC01-appb-T000020
 図33に、b21全故障に対する検出率の推移を示す。 FIG. 33 shows the transition of the detection rate for the total failure of b21.
 表16の実験結果は、b21の全故障に対する検出率推移を示している。この表から、従来法が到達できた最大検出率は86%であり、提案法では同じ検出率に到達するのに要するシード数を12%削減(テスト時間12%削減)することができた。 The experimental results in Table 16 show the transition of the detection rate for all failures in b21. From this table, the maximum detection rate reached by the conventional method was 86%, and the proposed method was able to reduce the number of seeds required to reach the same detection rate by 12% (12% reduction in test time).
Figure JPOXMLDOC01-appb-T000021
Figure JPOXMLDOC01-appb-T000021
 図34に示す実験結果は、b21の10k疑似ランダムパターン印加後未検出故障に対する検出率推移を示している。 The experimental result shown in FIG. 34 shows the transition of the detection rate with respect to the undetected failure after applying the 10 k pseudo random pattern of b21.
 表18の実験結果は、b21の10k疑似ランダムパターン印加後未検出故障に対する検出率推移を示す。従来法が到達できた最大検出率は85%であり、提案法では同じ検出率に到達するのに要するシード数を44%削減(テスト時間44%削減)することができた。 The experimental results in Table 18 show the transition of the detection rate for undetected faults after application of the 10 k pseudo random pattern of b21. The maximum detection rate reached by the conventional method is 85%, and the proposed method can reduce the number of seeds required to reach the same detection rate by 44% (44% reduction in test time).
Figure JPOXMLDOC01-appb-T000022
Figure JPOXMLDOC01-appb-T000022
 図35に示す実験結果は、b19の50k疑似ランダムパターン印加後未検出故障に対する検出率推移を示す図である。 The experimental result shown in FIG. 35 is a figure which shows transition of the detection rate with respect to the undetected failure after 50k pseudo random pattern application of b19.
 表19に示す実験結果は、b19の50k疑似ランダムパターン印加後未検出故障に対する検出率推移を示す。従来法が到達できた最大検出率は65%であり、提案法ではこの検出率に到達するのに要するシード数を25%削減(テスト時間25%削減)することができた。 The experimental result shown in Table 19 shows the transition of the detection rate for the undetected failure after applying the 50 k pseudo random pattern of b19. The maximum detection rate reached by the conventional method was 65%, and the proposed method was able to reduce the number of seeds required to reach this detection rate by 25% (25% reduction in test time).
Figure JPOXMLDOC01-appb-T000023
Figure JPOXMLDOC01-appb-T000023
 図36に示す実験結果は、b19の50k疑似ランダムパターン印加後未検出故障に対する検出率推移を示している。 The experimental result shown in FIG. 36 shows the transition of the detection rate with respect to the undetected failure after applying the 50 k pseudo random pattern of b19.
 表19に示す実験結果は、b19の50k疑似ランダムパターン印加後未検出故障に対する検出率推移を示している。この実験では全シードを並び換えるには時間がかかるため、初めに生成された5,000(5k)個のシードだけを用いた。 The experimental result shown in Table 19 has shown the transition of the detection rate with respect to the undetected failure after 50k pseudo random pattern application of b19. Because in this experiment it took time to sort all the seeds, only the 5,000 (5 k) seeds initially generated were used.
 表20より、初めに生成された5k個のシードだけを用いた場合でも提案法が有意であることが分かる。従来法では到達できた最大検出率は56%であり、提案法ではこの検出率に到達するのに要するシード数を28%削減(テスト時間28%削減)することができた。 From Table 20, it can be seen that the proposed method is significant even when using only the 5 k seeds generated initially. The maximum detection rate reached by the conventional method was 56%, and the proposed method was able to reduce the number of seeds required to reach this detection rate by 28% (a 28% reduction in test time).
 1  LFSR
 2  被検査回路(CUT)
 3  応答圧縮器(MISR)
 10  XORネットワーク
 20  組合せ回路部分
 30  スキャンFF
 40  マルチプレクサ
 50  タイミング生成回路
1 LFSR
2 Circuit under test (CUT)
3 response compressor (MISR)
10 XOR network 20 combination circuit part 30 scan FF
40 multiplexer 50 timing generator

Claims (17)

  1.  スキャンBISTのシード生成モデルを形成し、
     前記形成したシード生成モデルに対して対象故障のテスト生成を行ってLFSRのシードを生成する、各手順を備え、
     前記シード生成モデルは、前記スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記被検査回路の組合せ回路部分とを備え、前記組合せ回路部分に前記XORネットワーク出力が接続された構成を有する、スキャンBISTのLFSRシード生成方法。
    Form a scan BIST seed generation model,
    Each procedure for performing test generation of a target fault on the formed seed generation model to generate a seed of LFSR;
    The seed generation model includes an XOR network configured by expanding the time of the scan path length in the scan FF of the circuit under test, and the combinational circuit portion of the circuit under test; A scan BIST LFSR seed generation method having a configuration in which the XOR network outputs are connected.
  2.  請求項1に記載の方法において、前記シード生成モデルは、前記XORネットワークと前記被検査回路の組合せ回路部分との間にフェーズシフタグループが接続されている、スキャンBISTのLFSRシード生成方法。 The method according to claim 1, wherein the seed generation model is a scan BIST LFSR seed generation method in which a phase shifter group is connected between the XOR network and a combinational circuit portion of the circuit under test.
  3.  請求項1に記載の方法において、前記シード生成モデルは、前記XORネットワークと前記被検査回路の組合せ回路部分との間にランダム反転回路グループが接続されている、スキャンBISTのLFSRシード生成方法。 The method according to claim 1, wherein the seed generation model is a scan BIST LFSR seed generation method in which a random inversion circuit group is connected between the XOR network and the combinational circuit portion of the circuit under test.
  4.  請求項3に記載の方法において、前記ランダム反転回路グループのそれぞれのランダム反転回路は、前記XORネットワークと前記被検査回路の組合せ回路部分との間に挿入された反転論理回路と、第2のXORネットワークと、第2のXORネットワークの出力を用いて前記反転論回路の動作を制御するための反転制御回路とを備える、スキャンBISTのLFSRシード生成方法。 4. The method according to claim 3, wherein each of the random inversion circuits of the random inversion circuit group is an inversion logic circuit inserted between the XOR network and the combinational circuit portion of the circuit under test, and a second XOR. A scan BIST LFSR seed generation method, comprising: a network; and an inversion control circuit for controlling the operation of the inversion theory circuit using an output of a second XOR network.
  5.  請求項1乃至4の何れか1項に記載の方法において、前記対象故障はスタティック故障である、スキャンBISTのLFSRシード生成方法。 5. A method according to any one of the preceding claims, wherein the target fault is a static fault.
  6.  請求項1に記載の方法において、前記シード生成モデルは更に、前記XORネットワーク出力と前記スキャンFF出力とを時間的に切り替えて前記組合せ回路部分に入力するためのマルチプレクサと、前記マルチプレクサの切り替えのタイミングを制御するタイミング生成器とを備える、スキャンBISTのLFSRシード生成方法。 The method according to claim 1, wherein the seed generation model further includes a multiplexer for temporally switching the XOR network output and the scan FF output and inputting the same to the combinational circuit portion, and timing of switching of the multiplexer. A scan BIST LFSR seed generation method, comprising:
  7.  請求項6に記載の方法において、前記シード生成モデルは更に、前記XORネットワーク出力に接続されたフェーズシフタグループを備え、前記フェーズシフタグループの出力が前記被検査回路の組合せ回路部分および前記マルチプレクサに入力される、スキャンBISTのLFSRシード生成方法。 7. The method according to claim 6, wherein the seed generation model further comprises a phase shifter group connected to the XOR network output, the output of the phase shifter group being input to the combinational circuit portion of the circuit under test and the multiplexer. The scan BIST's LFSR seed generation method.
  8.  請求項6に記載の方法において、前記シード生成モデルは更に、前記XORネットワーク出力に接続されたランダム反転回路グループを備え、前記ランダム反転回路グループの出力が前記被検査回路の組合せ回路部分および前記マルチプレクサに入力される、スキャンBISTのLFSRシード生成方法。 7. The method according to claim 6, wherein the seed generation model further comprises a random inversion circuit group connected to the XOR network output, the output of the random inversion circuit group being the combinational circuit portion of the circuit under test and the multiplexer. A scan BIST LFSR seed generation method that is input to.
  9.  請求項8に記載の方法において、前記ランダム反転回路グループのそれぞれのランダム反転回路は、前記XORネットワークと前記被検査回路の組合せ回路部分との間に挿入された反転論理回路と、第2のXORネットワークと、第2のXORネットワークの出力を用いて前記反転論理回路の動作を制御するための反転制御回路とを備える、スキャンBISTのLFSRシード生成方法。 9. The method according to claim 8, wherein each of the random inversion circuits of the random inversion circuit group is an inversion logic circuit inserted between the XOR network and the combinational circuit portion of the circuit under test, and a second XOR. A scan BIST LFSR seed generation method, comprising: a network; and an inversion control circuit for controlling an operation of the inversion logic circuit using an output of a second XOR network.
  10.  請求項1に記載の方法において、前記シード生成モデルは更に、前記組合せ回路部分の複製である第2の組合せ回路部分を有し、当該第2の組合せ回路部分の入力には前記XORネットワークの出力と前記組合せ回路部分の出力とが接続される、スキャンBISTのLFSRシード生成方法。 The method according to claim 1, wherein the seed generation model further comprises a second combinational circuit portion which is a duplicate of the combinational circuit portion, the output of the XOR network being at the input of the second combinational circuit portion. A scan BIST LFSR seed generation method, wherein the combination circuit portion and the output of the combinational circuit portion are connected.
  11.  請求項1に記載の方法において、前記シード生成モデルは更に、前記LFSRを前記スキャンパス長+1スキャンシフト分時間展開して構成した第2のXORネットワークと、前記XORネットワーク出力と前記第2のXORネットワーク出力とを時間的に切り替えて前記組合せ回路部分に入力するためのマルチプレクサと、前記マルチプレクサの切り替えのタイミングを制御するタイミング生成器とを備える、スキャンBISTのLFSRシード生成方法。 The method according to claim 1, wherein the seed generation model further comprises: a second XOR network configured by expanding the LFSR for the scan path length + 1 scan shift time, the XOR network output, and the second XOR. A scan BIST LFSR seed generation method, comprising: a multiplexer for temporally switching to a network output and inputting the combinational circuit portion; and a timing generator for controlling switching timing of the multiplexer.
  12.  請求項6乃至11の何れか1項に記載の方法において、前記対象故障は遅延故障である、スキャンBISTのLFSRシード生成方法。 A method according to any of the claims 6-11, wherein the target failure is a delayed failure.
  13.  請求項1乃至12の何れか1項に記載の方法において、前記対象故障のテスト生成は自動テストパターン生成ツールを用いて行われる、スキャンBISTのLFSRシード生成方法。 A method according to any one of the preceding claims, wherein the test generation of the target fault is performed using an automatic test pattern generation tool, with scan BIST's LFSR seed generation.
  14.  スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開してXORネットワークを形成し、当該XORネットワークを前記被検査回路の組合せ回路部分に接続することによってシード生成モデルを形成する手順と、
     前記シード生成モデルに対して対象故障のテスト生成を行って前記LFSRのシードを生成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体。
    Procedure for forming a seed generation model by expanding the time of the scan path length in the scan FF of the circuit under test to form the XOR network and connecting the XOR network to the combinational circuit part of the circuit under test. When,
    A storage medium storing a program for causing a computer to execute a test generation of a target failure on the seed generation model to generate a seed of the LFSR.
  15.  スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記XORネットワーク出力と前記スキャンFF出力とを時間的に切り替えて前記被検査回路の組合せ回路部分に印加するマルチプレクサと、前記マルチプレクサの切換えタイミングを制御するタイミング生成器と、によってシード生成モデルを形成する手順と、
     前記シード生成モデルに対して対象故障のテスト生成を行って、前記LFSRのシードを形成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体。
    An XOR network configured by expanding a scan path length in the scan FF of the circuit under test for the scan BIST LFSR, and a combinational circuit portion of the circuit under test by temporally switching between the XOR network output and the scan FF output Forming a seed generation model by a multiplexer applied to the circuit and a timing generator controlling the switching timing of the multiplexer;
    A storage medium storing a program for causing a computer to execute a test generation of a target failure on the seed generation model to form a seed of the LFSR.
  16.  スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記被検査回路の組合せ回路部分と、前記LFSRを前記スキャンパス長+1スキャンシフト分時間展開して構成した第2の組合せ回路部分とを備え、前記XORネットワーク出力を前記組合せ回路部分の入力に接続し、前記XORネットワーク出力と前記組合せ回路部分出力とを前記第2の組合せ回路部分の入力に接続してシード生成モデルを形成する手順と、
     前記シード生成モデルに対して対象故障のテスト生成を行って、前記LFSRのシードを形成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体。
    XOR network configured by expanding scan SR length of scan BIST by scan path length in scan FF of test circuit, combined circuit portion of test circuit, and LFSR by scan path length + 1 scan shift time The XOR network output connected to the input of the combinational circuit portion, and the XOR network output and the combinational circuit portion output at the input of the second combinational circuit portion Connecting to form a seed generation model;
    A storage medium storing a program for causing a computer to execute a test generation of a target failure on the seed generation model to form a seed of the LFSR.
  17.  スキャンBISTのLFSRを被検査回路のスキャンFFにおけるスキャンパス長分時間展開して構成したXORネットワークと、前記被検査回路の組合せ回路部分と、前記LFSRを前記スキャンパス長+1スキャンシフト分時間展開して構成した第2のXORネットワークと、前記XORネットワークまたは前記第2のXORネットワーク出力を時間的に切り替えて前記組合せ回路部分に印加するマルチプレクサと、前記マルチプレクサの切換えタイミングを制御するタイミング生成器とによって、シード生成モデルを形成する手順と、
     前記シード生成モデルに対して対象故障のテスト生成を行って、前記LFSRのシードを形成する手順と、をコンピュータに実行させるためのプログラムを記憶する、記憶媒体。
    XOR network configured by expanding scan SR length of scan BIST by scan path length in scan FF of test circuit, combined circuit portion of test circuit, and LFSR by scan path length + 1 scan shift time A multiplexer configured to temporally switch the output of the XOR network or the second XOR network and apply the same to the combinational circuit portion, and a timing generator that controls switching timing of the multiplexer , Forming a seed generation model,
    A storage medium storing a program for causing a computer to execute a test generation of a target failure on the seed generation model to form a seed of the LFSR.
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