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WO2014036842A1 - Tunable laser for outputting non-polarized light - Google Patents

Tunable laser for outputting non-polarized light Download PDF

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Publication number
WO2014036842A1
WO2014036842A1 PCT/CN2013/076160 CN2013076160W WO2014036842A1 WO 2014036842 A1 WO2014036842 A1 WO 2014036842A1 CN 2013076160 W CN2013076160 W CN 2013076160W WO 2014036842 A1 WO2014036842 A1 WO 2014036842A1
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WO
WIPO (PCT)
Prior art keywords
liquid crystal
tunable
optically transparent
transparent material
laser
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PCT/CN2013/076160
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French (fr)
Chinese (zh)
Inventor
高培良
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天津奇谱光电技术有限公司
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Publication of WO2014036842A1 publication Critical patent/WO2014036842A1/en

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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/11Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves
    • G02F1/116Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on acousto-optical elements, e.g. using variable diffraction by sound or like mechanical waves using an optically anisotropic medium, wherein the incident and the diffracted light waves have different polarizations, e.g. acousto-optic tunable filter [AOTF]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/137Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering
    • G02F1/139Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells characterised by the electro-optical or magneto-optical effect, e.g. field-induced phase transition, orientation effect, guest-host interaction or dynamic scattering based on orientation effects in which the liquid crystal remains transparent
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/10Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
    • H01S5/14External cavity lasers
    • H01S5/141External cavity lasers using a wavelength selective device, e.g. a grating or etalon
    • H01S5/142External cavity lasers using a wavelength selective device, e.g. a grating or etalon which comprises an additional resonator
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1065Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using liquid crystals
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/10Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
    • H01S3/106Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity
    • H01S3/1068Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating by controlling devices placed within the cavity using an acousto-optical device

Definitions

  • the invention belongs to the field of optoelectronic technology, in particular to a tunable laser with unpolarized light output.
  • gratings Due to its high spectral resolution over a large spectral range, gratings are widely used in a variety of tunable lasers.
  • the problem is that: Due to the need to use a precision stepper motor to drive the grating for scanning, tunable lasers using such techniques are relatively large in size, susceptible to mechanical shock, and expensive.
  • the traditional optical Fabry-Perot etalon is a filter element fabricated using the principle of multi-beam interference.
  • the multi-wavelength interference effect of the Fabry-Perot cavity formed by the high reflectivity of the multilayer dielectric film on the two light-passing surfaces enables multi-wavelength narrow-band filtering output over a wide spectral range, and has stable performance. It has wide optical aperture, high optical power destruction threshold, simple structure and low cost. Therefore, it is widely used in various types of lasers, optical measuring instruments and optical fiber communication devices.
  • the tuning function of the transmitted optical frequency can be achieved using a conventional optical Fabry-Perot etalon.
  • tuning can be done by changing the angle of incidence of the light, but the tuning range of this method is small; it is also possible to change the Fabry by mechanical means (such as stepper motors).
  • the cavity length of the Perot etalon is tuned. This method can achieve a large tuning range, but the tuning accuracy is low, and the precision of the mechanical components is high and the stability is not good.
  • the PZT piezoelectric ceramic (lead zirconate titanate) technology can improve the tuning accuracy and speed by changing the cavity length of the Fabry-Perot etalon, but it is not easy to miniaturize and the drive circuit is complicated. Changing the temperature of the etalon can also achieve a wider range of tuning, but the disadvantage of this method is that it is slow.
  • the filter output characteristic of a single Fabry-Perot etalon is a multimode output with an optical frequency interval of free spectral range.
  • the Acousto-Optical Tunable Filter is a solid-state, electronically tunable bandpass spectral filter that uses anisotropic acousto-optic interactions.
  • the advancement of crystal growth technology and high-frequency piezoelectric transducer technology has greatly improved the acousto-optic originals, making the AOTF technology mature and entering the industrial application from the laboratory.
  • AOTF implementations typically employ anisotropic birefringent acousto-optic (AO) media with high-speed tuning capabilities, proven long-term stability, and low cost.
  • acousto-optic filters collinear and non-collinear, where non-collinear non-paraxial filters with high RF frequencies can achieve narrowband optical frequency tuning, but it is almost impossible to do It has the same narrowband filtering function as the Fabry-Perot etalon. Therefore, it is difficult to achieve narrowband output with a tunable laser using only an acousto-optic filter.
  • a tunable laser of unpolarized light output comprising a first mirror, a broadband laser gain medium, a tunable Fabry-Perot filter, a tunable acousto-optic filter, a second mirror, a third mirror, and a laser control circuit; the first mirror and the second mirror constitute a first laser resonator cavity, the first mirror and the third mirror constitute a second laser resonator cavity; the wideband beam emitted by the broadband laser gain medium passes the tunable method After filtering the Brill-Perot filter, it is filtered by a tunable acousto-optic filter, and the first-order diffracted beam is split into two polarized lights whose polarization states are perpendicular to each other, and the S-state polarized beam is reflected by the second mirror and is A laser oscillation is formed in a laser resonator cavity, and the P-state polarized beam is reflected by the third mirror and forms a laser oscillation in the second laser reson
  • the zero-order diffracted beam of the tunable acousto-optic filter is used as the output beam of the laser.
  • the laser control circuit is connected to the broadband laser gain medium, the tunable Fabry-Perot filter and the tunable acousto-optic filter respectively to achieve excitation Tunable output control function.
  • the first mirror, the second mirror, and the third mirror are one of three types of mirrors: a plane mirror, a concave mirror, and a convex mirror.
  • the tunable Fabry-Perot filter includes a first liquid crystal cell, a second liquid crystal cell, and a tunable Fabry-Perot filter driving circuit, which are sequentially mounted in front and rear, and two liquid crystal cells are The first optically transparent material, the liquid crystal material and the second optically transparent material are sequentially mounted together, and the second optically transparent material of the first liquid crystal cell is mounted together with the first optically transparent material of the second liquid crystal cell.
  • the first optically transparent material of the first liquid crystal cell is provided with a high-reflectivity multilayer dielectric film to form a first mirror
  • the second optically transparent material of the second liquid crystal cell is provided with a high-reflectivity multilayer dielectric film to form a second a mirror
  • the optical axes of the liquid crystal materials in the two liquid crystal cells are perpendicular to each other and disposed in a Fabry-Perot cavity composed of the first mirror and the second mirror
  • the tunable Fabry-Perot The driving circuit of the filter is connected to the two liquid crystal cells and the tuning function of the filter is realized by controlling the effective refractive index of the liquid crystal material, and the driving circuit and the laser of the tunable Fabry-Perot filter Circuit is connected.
  • the high-reflectivity multilayer dielectric film on the first optically transparent material of the first liquid crystal cell is disposed outside the first optically transparent material, and the inner side of the first optically transparent material is sequentially disposed from the inside to the outside.
  • the high-reflectivity multilayer dielectric film on the first optically transparent material of the first liquid crystal cell is disposed inside the first optically transparent material
  • the transparent electrode is disposed inside the high-reflectivity multilayer dielectric film.
  • An optical antireflection film is disposed on an outer side of the first optically transparent material; an outer side of the second optically transparent material of the first liquid crystal cell is an optically polished surface, and an inner side of the second optically transparent material is optically enhanced from the inside to the outside.
  • a film, a transparent electrode, and a film of a non-conductive material covering a portion other than the clear aperture and a channel approximately 1 mm wide connected to the edge of the second sheet of optically transparent material for providing excess liquid crystal material
  • the high-reflectivity multilayer dielectric film on the second optically transparent material of the second liquid crystal cell is disposed outside the second optically transparent material, and the inner side of the second optically transparent material is sequentially disposed from the inside to the outside.
  • An optical antireflection film and a transparent electrode wherein an outer side of the first optically transparent material of the second liquid crystal cell is an optically polished surface, and an inner side of the first optically transparent material is provided with an optical antireflection film and a transparent electrode from the inside to the outside.
  • a film of a non-conductive material covering a portion other than the clear aperture and a channel connected to the edge of the sheet of optically transparent material about 1 mm wide for providing an outlet for the excess liquid crystal material, and
  • the inside of the second optically transparent material of the two liquid crystal cells constitutes a cavity for providing a liquid crystal material, and the transparent electrode is connected to a driving circuit of the tunable Fabry-Perot filter.
  • a high-reflectivity multilayer dielectric film on the second optically transparent material of the second liquid crystal cell is disposed inside the second optically transparent material, and a transparent electrode is disposed on the inner side of the high-reflectivity multilayer dielectric film.
  • An optical antireflection film is disposed on an outer side of the second optically transparent material, wherein an outer side of the first optically transparent material of the second liquid crystal cell is an optically polished surface, and an inner side of the first optically transparent material is optically disposed from the inside to the outside.
  • the second optically transparent material of the first liquid crystal cell and the first optically transparent material of the second liquid crystal cell are mounted by: bonding together using an optically transparent index matching glue, and making the first reflection The mirror and the second mirror remain parallel to form a Fabry-Perot cavity.
  • liquid crystal material is a nematic liquid crystal having a thickness of several micrometers to ten micrometers.
  • the drive circuit of the tunable Fabry-Perot filter is a frequency from one kilohertz to several kilohertz
  • the square wave pulse circuit has a pulse voltage amplitude adjustable from 0 volts to 5 volts.
  • the free spectral range of the tunable Fabry-Perot filter is greater than the half width of the filter bandwidth of the tunable acousto-optic filter.
  • the tunable acousto-optic filter is a narrow-band, non-coaxial birefringence type acousto-optic filter, and the first-order diffraction splits the incident light into two polarization states that are perpendicular to each other and form a certain angle of linear polarization. Light.
  • the tunable acousto-optic filter is driven by a driving circuit of a tunable acousto-optic filter, the driving circuit of the tunable acousto-optic filter is connected to a laser control circuit, and the driving circuit of the tunable acousto-optic filter It is a frequency and power adjustable RF signal generator with frequencies from a few megahertz to hundreds of megahertz.
  • the laser control circuit is coupled to the broadband laser gain medium by a pumping circuit.
  • the present invention places two nematic liquid crystal materials having mutually perpendicular optical axes in a cavity of a Fabry-Perot etalon and utilizes an electrically controlled birefringence effect of the liquid crystal and an optical phase modulation of the incident light.
  • the continuous, fast and precise tuning of the frequency of the light transmitted through the Fabry-Perot filter over a wide spectral range is achieved regardless of the polarization state of the incident light. Since the thickness of the liquid crystal material is very thin, a wideband tunable Fabry-Perot filter having a small size and a large free spectral range can be fabricated.
  • the multimode optical wave output by the tunable Fabry-Perot filter is filtered by a tunable acousto-optic filter to achieve high-precision, fast, and stable filtering over a large spectral range. Since the present invention employs two laser resonator sub-cavities, the two linearly polarized lights which are separated from each other by the spatially separated polarization states generated by the tunable acousto-optic filter can form laser oscillations, and therefore, the present invention can realize non- Polarized light output.
  • the design of the invention is reasonable, and realizes continuous, rapid and precise tuning of the output light of the laser in a wide spectral range, with no mechanical moving parts, electronic tuning, fast tuning speed, stable and reliable performance, small size and easy Features such as installation and production for reliable operation in demanding small size and extreme operating environments, and are widely used in lasers, optical testing, fiber optic communications, biological, medical devices and fiber optic sensor networks.
  • Figure 1 is a schematic view of a conventional Fabry-Perot etalon
  • FIG. 2 is a schematic structural view of a first liquid crystal cell
  • FIG. 3 is a schematic structural view of a second liquid crystal cell
  • FIG. 4 is a schematic structural view of a tunable Brie-Perot filter
  • Figure 5 is a graph showing the phase of light transmitted through the liquid crystal material as a function of an applied electric field
  • Figure 6 is a schematic diagram of the transmission spectrum of a conventional Fabry-Perot etalon
  • FIG. 7 is a schematic diagram of a transmission spectrum of a tunable Brill-Perot filter
  • Figure 8 is a schematic diagram of a tunable acousto-optic filter
  • Figure 9 is a schematic view showing the structure of the present invention
  • Figure 10 is a schematic diagram of the output spectrum of the tunable acousto-optic filter
  • Figure 11 is a schematic diagram of the synthesized output spectrum of a tunable Fabry-Perot filter and a tunable acousto-optic filter;
  • Figure 12 is a schematic diagram of the output spectrum of the present invention.
  • FIG. 1 A schematic of a conventional Fabry-Perot light etalon 100 is shown in FIG.
  • the material of the Fabry-Perot etalon 100 is generally optical glass such as fused silica or BK7 in the near-infrared and visible-light bands, assuming that the material has a refractive index n and both light-passing surfaces 2 and 4 are plated high.
  • the Fabry-Perot optical etalon's transmission spectrum is characterized by a very narrow bandwidth for each transmission spectrum, a uniform frequency spacing of the transmission spectrum and a very wide optical frequency response bandwidth, typically covering more than
  • the optical spectrum band of 100 nm, the output light spectrum of the optical etalon 100 is shown in Fig. 6.
  • a liquid crystal material generally used as a photovoltaic device has a high electrical resistivity, it can be considered as an ideal dielectric material.
  • the liquid crystal has anisotropic dielectric properties and uniaxial symmetry due to the ordered orientation of the molecules and the stretched morphology. Like a uniaxial crystal, the direction of the optical axis coincides with the alignment of the molecules.
  • an electric dipole is formed. Under the action of the moment formed by the electric dipole, the orientation of the liquid crystal molecules is turned to the direction of the electric field, and the direction of the optical axis of the liquid crystal can be changed by changing the strength of the electric field.
  • an optical phase modulator, a tunable filter or other optoelectronic devices such as an optical switch and a light intensity modulator can be fabricated using this characteristic of the liquid crystal.
  • the thickness of the liquid crystal film layer generally used as a photovoltaic device is from several micrometers to ten micrometers.
  • the present invention is designed by utilizing the fact that liquid crystals change the refractive index of linearly polarized light under the action of an electric field.
  • the polarization-independent tunable Fabry-Perot filter involved in the present invention includes two liquid crystal cells whose optical axis directions are perpendicular to each other.
  • the first liquid crystal cell 200 includes two structures.
  • the first structure includes a first piece of optically transparent material 8.
  • the liquid crystal material 14 and the second optically transparent material 22, the high-reflectivity multilayer dielectric film 6 is disposed on the outer surface of the first optically transparent material 8, and the optical anti-reflection film 10 and the transparent electrode film are disposed on the inner side from the inside to the outside.
  • the outer surface 24 of the second optically transparent material 22 is an optically polished surface, and the optical antireflection film 20, the transparent electrode film layer 18 and the non-conductive material film 16, and the thickness of the non-conductive material film 16 are respectively disposed from the inside to the outside.
  • the non-conductive material film 16 and The first optically transparent material 8 constitutes a cavity for arranging the liquid crystal material 14.
  • the liquid crystal material 14 is a nematic liquid crystal having a thickness of about several micrometers and a few micrometers.
  • the second structure of the liquid crystal cell 200 is different from the first structure in that an optical anti-reflection film 6 is disposed on the outer surface of the first optically transparent material 8, and a high-reflectivity multilayer dielectric is disposed on the inner side from the inside to the outside.
  • the film 10 and the transparent electrode film layer 12 are otherwise disposed in the same manner as the first structure of the liquid crystal cell 200, and the purpose thereof is to change the thickness of the Fabry-Perot cavity.
  • the second liquid crystal cell 300 includes two structures.
  • the first structure comprises a first sheet of optically transparent material 28, a liquid crystal material 36, and a second sheet of optically transparent material 42, the outer surface 26 of the second sheet of optically transparent material 42 being provided with a high reflectivity multilayer dielectric film 44, the inside from the inside out
  • the optical anti-reflection film 40 and the transparent electrode film layer 32 are respectively disposed.
  • the outer surface 26 of the first optically transparent material 28 is an optically polished surface, and the optical antireflection film 30, the transparent electrode film layer 32 and the non-conductive layer are respectively disposed from the inside to the outside.
  • the material film 34, the non-conductive material film 34 has a thickness of several micrometers to ten micrometers, covers other portions except the light-passing aperture, and a channel having a width of about 1 mm to the edge of the optically transparent material 28 for eliminating excess
  • the liquid crystal material, the non-conductive material film 34 and the second sheet of optically transparent material 42 form a cavity for providing the liquid crystal material 36.
  • the portions other than the liquid crystal chambers of the two materials constituting the liquid crystal chamber are bonded together by an epoxy resin or an ultraviolet gel, and the liquid crystal material 36 is a nematic liquid crystal having a thickness of about several micrometers.
  • the road is a dozen microns.
  • the second structure of the liquid crystal cell 300 is different from the first structure in that an optical anti-reflection film 44 is disposed on the outer surface of the second optically transparent material 42, and a high-reflectivity multilayer dielectric film 40 is disposed on the inner side from the inside to the outside.
  • the transparent electrode film layer 38, the other arrangement is the same as the first structure of the liquid crystal cell 300, the purpose of which is to change the thickness of the Fabry-Perot cavity.
  • Figure 4 shows a schematic diagram of a polarization-independent tunable Brie-Perot filter.
  • the Perot filter 400 includes a first liquid crystal cell 200, a second liquid crystal cell 300, and a tunable Fabry-Perot filtered drive circuit 52.
  • the outer side of the second piece of optically transparent material of the liquid crystal cell 200 and the outer side of the first piece of optically transparent material of the liquid crystal cell 300 are bonded together by the optically transparent index matching glue 50 and the first optically transparent material and liquid crystal of the liquid crystal cell 200 are made.
  • the faces of the second optically transparent material of the cartridge 300 provided with the high reflectivity dielectric film remain parallel to form a harmonic Fabry-Perot cavity.
  • the driving circuit 52 is connected to the transparent electrodes of the liquid crystal cell 200 and the liquid crystal cell 300, and the driving signal generated by the driving circuit 52 forms a driving electric field between the two transparent electrode film layers; the Fabry-Perot is changed by the electric field.
  • a typical driving electric field is a square wave signal having a voltage of several volts and a frequency of 1 kHz to several kilohertz.
  • tunable Fabry-Perot can be made in the intrinsic free spectral range (ie, the free spectral range of the tunable filter without an applied electric field) filter. Since the optical axes of the liquid crystals in the first liquid crystal cell 200 and the second liquid crystal cell 300 are perpendicular to each other, the filter 400 is independent of the polarization state of the incident light.
  • the light beam 48 incident on the filter 400 is a collimated beam, assuming that the refractive index of the optically transparent material is n, on the first optically transparent material of the first liquid crystal cell 200 and on the second liquid crystal cell 300.
  • the optical path produced by the incident light is changed by the refraction under the action of an applied electric field.
  • the combination of two different structures of the first liquid crystal cell 200 and the second liquid crystal cell 300 can increase or decrease the length D of the Fabry-Perot cavity, thereby adjusting the filter 400 free spectral range FSR2.
  • Figure 5 is a graph showing the relationship between the phase change of a 1525 nm light wave with a wavelength of about 10 ⁇ m nematic liquid crystal driven by a 2 kHz square wave voltage. A maximum optical phase delay of about 2 ⁇ can be achieved.
  • the tunable Fabry-Perot filter 400 can obtain a tuning range of about 1.5 times the transmitted optical frequency of FSR2 for collimated light near zero incidence, and a band of free spectral range ⁇ and transmitted light. The change in broadband is much smaller.
  • a schematic diagram of the spectrum of the transmitted light 54 of the tunable Fabry-Perot filter is shown in FIG.
  • the tunable Fabry-Perot filter 400 can achieve a large range of transmission light peak frequency tuning under the action of an applied electric field without substantially changing the bandwidth and free spectral range of the transmitted light. This feature is important for many applications in tunable Fabry-Perot filter 400, such as lasers and spectrum instruments.
  • Figure 8 shows a schematic of a tunable acousto-optic filter.
  • the medium generally used for the acousto-optic filter 500 is anisotropic and has birefringence characteristics.
  • One of the substances, cerium oxide (Te02) is widely used in such applications due to its high optical uniformity, low light absorption and high optical power capability in shear mode.
  • Other substances such as lithium niobate (LiNb03), gallium phosphide (GaP) and lead molybdate (PbMo04) are also frequently used in various acousto-optic devices. There are many factors that influence the selection of specific substances.
  • the tunable acousto-optic filter 500 is a non-collinear and non-paraxial acousto-optic filter having birefringence characteristics.
  • An acousto-optic crystal 57 and a transducer 58 comprising cerium oxide are used to directly drive the transducer 58 from a drive circuit 60 of the tunable acousto-optic filter to produce an acoustic wave field 59 in the crystal 57 to form a diffraction grating.
  • a collimated beam 56 enters the crystal 57 and forms a Bragg angle with the acoustic field 59.
  • the first-order diffracted light After being diffracted by the tunable acousto-optic filter, the first-order diffracted light is split into two linearly polarized lights, S-light 62 and neon 64, and zero.
  • the order diffracted beam 66 The angle between the two linearly polarized lights 62 and 64 and the zero order diffracted beam is equal to the Bragg angle ⁇ .
  • the cutting of the acousto-optic crystal 57 causes the incident surface 55 and the exit surface 61 to be perpendicular or nearly perpendicular to the incident light. In order to reduce the loss of light, both the incident surface 55 and the exit surface 61 are plated with an optical antireflection coating.
  • the filter spectrum of the tunable acousto-optic filter 500 is characterized by continuous tunability of the optical frequency over a wide frequency range, as shown in Figure 10.
  • the bandwidth of the filtered spectrum ⁇ V , half width (FWHM) ⁇ V 1/2, resolution and diffraction efficiency are dependent on the size of the acousto-optic crystal, the structure of the transducer, and the RF drive power.
  • FWHM half width
  • resolution and diffraction efficiency are dependent on the size of the acousto-optic crystal, the structure of the transducer, and the RF drive power.
  • a tunable laser of unpolarized light output includes a first mirror 72, a broadband laser gain medium 76, a tunable Fabry-Perot filter 400, a tunable acousto-optic filter 500, a second mirror 84, and a A three mirror 86 and a drive control system.
  • the drive control system includes a laser pumping circuit 74, a drive circuit 52 of the tunable Fabry-Perot filter 400, a drive circuit 60 of the tunable acousto-optic filter 500, and a laser control circuit 88.
  • the beam emitted by the broadband laser gain medium 76 first passes through the filter 400, and after the output beam 78 passes through the tunable acousto-optic filter 500, the output beam is divided into zero-order diffracted light 81, and the first-order diffracted light is split into two polarization states.
  • the vertical linearly polarized light S polarized light 80 and the erbium polarized light 82, the second mirror 84 and the third mirror 86 are disposed at an angle and a position such that the S polarized light 80 and the ⁇ polarized light 82 are reflected back along the original optical path, respectively.
  • Tunable acousto-optic filter 500 and in a first laser resonator sub-chamber consisting of a first mirror 72 and a second mirror 84, respectively, and a second laser consisting of a first mirror 72 and a third mirror 86
  • Laser oscillation is formed in the resonator cavity, and the laser pump circuit 74 controls and adjusts the laser pump circuit 74, the drive circuit 52 of the tunable Fabry-Perot filter 400, and the drive circuit 60 of the tunable acousto-optic filter 500.
  • the collimated beam 76 is incident into the tunable Fabry-Perot filter 400.
  • the spectrum of the transmitted light 78 is shown in Figure 7.
  • the tunable range of the peak frequency of the transmitted light is about 1.5 times the FSR2, in the tunable range.
  • the free spectral range of the tunable Fabry-Perot filter 400 remains substantially unchanged within the spectral range of about 100 nanometers.
  • the intrinsic free spectral range FSR2 of the tuned Fabry-Perot filter 400, the transmitted light 80 and 82 are a single mode beam, the spectral characteristics of which are shown in Figure 12 and the tunable Fabry-Perot filter.
  • the spectral characteristics of a transmission mode of 400 are the same.
  • the acousto-optic filter 500 is tuned.
  • the transmission bandwidth ⁇ ⁇ also needs to be narrower. It is to be noted that the definition of the spectral width ⁇ V of the transmitted light of the tunable Fabry-Perot filter 400 and the tunable acousto-optic filter 500 is based on the noise or edge suppression ratio of the laser output spectrum in practical applications. Need to be determined.
  • the first mirror 72, the second mirror 84, and the third mirror 86 may employ a total reflection mirror or a partial reflection mirror, such as leakage light from a partial reflection mirror.
  • a total reflection mirror or a partial reflection mirror such as leakage light from a partial reflection mirror.
  • Different types of mirrors such as plane mirrors, convex mirrors or concave mirrors, can be used to monitor different types of laser resonators, such as stable chambers, metastable chambers or unstable chambers. .
  • the input beam is required to be a collimated beam, and therefore, if the broadband laser gain medium 76 emits a dispersion A type of beam, such as a semiconductor laser gain medium, can collimate the beam with an intracavity collimating lens.
  • a dispersion A type of beam such as a semiconductor laser gain medium
  • the laser control circuit 88 includes a control circuit centered on a digital signal processor and embedded software. The data analysis software and the data type interface are used to control, tune, and receive external control signals and external output signals.

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Abstract

A tunable laser for outputting non-polarized light comprises a first reflection mirror (72), a broadband laser gain medium (76), a tunable Fabry-Perot filter (400), a tunable acoustooptic filter (500), a second reflection mirror (84), a third reflection mirror (86), and a laser control circuit (88). A broadband light beam sent by the broadband laser gain medium (76) is filtered by the tunable Fabry-Perot filter (400) and then is filtered by the tunable acoustooptic filter (500). A first-grade diffraction light beam of the tunable acoustooptic filter (500) is divided into two beams of polarized light with polarization states perpendicular to each other, and a zero-grade diffraction light beam of the tunable acoustooptic filter (500) serves as an output light beam of the laser. The tunable laser for outputting non-polarized light implements continuous, rapid and precise tuning on the output light of the laser in a wide spectral range, has characteristics of absence of mechanical movement parts, high electronic tuning speed, stable and reliable performance, small sizes, easiness in mounting and production and the like, and can be widely applied in the fields of lasers, optical testing, optical fiber communications, biological and medical instruments, optical fiber sensor networks and the like.

Description

一种非偏振光输出的可调谐激光器 技术领域  Tunable laser with non-polarized light output
本发明属于光电技术领域, 尤其是一种非偏振光输出的可调谐激光器。  The invention belongs to the field of optoelectronic technology, in particular to a tunable laser with unpolarized light output.
背景技术  Background technique
由于光栅在大的光谱范围内具有很高光谱分辨率, 因此, 被广泛应用于各类可调谐激 光器中。 其存在的问题是: 由于需要使用精密步进马达带动光栅进行扫描, 因此, 采用这 类技术的可调谐激光器尺寸比较大, 容易受机械震动的影响, 且价格昂贵。  Due to its high spectral resolution over a large spectral range, gratings are widely used in a variety of tunable lasers. The problem is that: Due to the need to use a precision stepper motor to drive the grating for scanning, tunable lasers using such techniques are relatively large in size, susceptible to mechanical shock, and expensive.
传统的光学法布里-珀罗标准具是一种利用多光束干涉原理制作的滤波器件,主要有两 种类型: 一种是空气间隔的, 一种是光学玻璃间隔的。 通过两个通光面上多层介质膜的高 反射率所形成法布里-珀罗腔的多光束干涉效应,可以实现在宽频谱范围内的多波长窄带滤 波输出, 而且具有性能稳定、通光孔径大、光功率破坏阈值高、 结构简单和成本低等特性, 因此, 被广泛应用于各类激光器、 光学测量仪器和光纤通讯器件中。  The traditional optical Fabry-Perot etalon is a filter element fabricated using the principle of multi-beam interference. There are two main types: one is air-spaced and the other is optical glass-spaced. The multi-wavelength interference effect of the Fabry-Perot cavity formed by the high reflectivity of the multilayer dielectric film on the two light-passing surfaces enables multi-wavelength narrow-band filtering output over a wide spectral range, and has stable performance. It has wide optical aperture, high optical power destruction threshold, simple structure and low cost. Therefore, it is widely used in various types of lasers, optical measuring instruments and optical fiber communication devices.
利用传统的光学法布里-珀罗标准具可以实现透射光频率的调谐功能。对于空气间隔的 法布里-珀罗标准具, 可通过改变光的入射角度进行调谐, 但是这种方法的调谐范围很小; 也可以采用用机械方法(如步进马达)改变法布里-珀罗标准具的腔长进行调谐, 这种方法 可以实现大的调谐范围, 但调谐精度低, 而且对机械部件的精度要求高, 稳定性不好。 另 夕卜, 采用 PZT压电陶瓷 (锆钛酸铅) 技术通过改变法布里-珀罗标准具的腔长, 可以提高 调谐精度和速度, 但是不易做到小型化, 且驱动电路也较复杂; 改变标准具的温度也可以 实现较大范围的调谐, 但是, 该方法的缺点是速度慢。 同时, 单一法布里-珀罗标准具的滤 波输出特性是一个光频率间隔为自由光谱范围的多模输出。  The tuning function of the transmitted optical frequency can be achieved using a conventional optical Fabry-Perot etalon. For air-spaced Fabry-Perot etalons, tuning can be done by changing the angle of incidence of the light, but the tuning range of this method is small; it is also possible to change the Fabry by mechanical means (such as stepper motors). The cavity length of the Perot etalon is tuned. This method can achieve a large tuning range, but the tuning accuracy is low, and the precision of the mechanical components is high and the stability is not good. In addition, the PZT piezoelectric ceramic (lead zirconate titanate) technology can improve the tuning accuracy and speed by changing the cavity length of the Fabry-Perot etalon, but it is not easy to miniaturize and the drive circuit is complicated. Changing the temperature of the etalon can also achieve a wider range of tuning, but the disadvantage of this method is that it is slow. At the same time, the filter output characteristic of a single Fabry-Perot etalon is a multimode output with an optical frequency interval of free spectral range.
声光可调谐滤波器 (AOTF) 是一种固态的、 可电子调谐的带通光谱滤波器, 这类滤 波器大多数使用各向异性的声光互作用。 晶体生长技术与高频压电式换能器技术的进步大 大的改进了声光原件, 使得 AOTF技术上已成熟, 从实验室走进了工业的应用。 AOTF的 实施通常采用各向异性的双折射声光(AO)介质, 并有高速调谐能力、得到证明的长期稳 定性以及低成本等优点。  The Acousto-Optical Tunable Filter (AOTF) is a solid-state, electronically tunable bandpass spectral filter that uses anisotropic acousto-optic interactions. The advancement of crystal growth technology and high-frequency piezoelectric transducer technology has greatly improved the acousto-optic originals, making the AOTF technology mature and entering the industrial application from the laboratory. AOTF implementations typically employ anisotropic birefringent acousto-optic (AO) media with high-speed tuning capabilities, proven long-term stability, and low cost.
声光滤波器的运行原理基于一种叫做布拉格衍射的现象, 即衍射光的方向取决于声波 的波长。 与传统的技术相比, AOTF提供了连续、 快速的调节能力, 但要实现窄的滤波光 谱带宽, 一般要求声光晶体的尺寸比较大。 声光滤波器有两种类型: 共线型与非共线型, 其中具有高射频频率的非共线型非近轴滤波器可以达到窄带光频率调谐, 但几乎不可能做 到象法布里-珀罗标准具一样的窄带滤波功能。 因此, 仅仅采用声光滤波器的可调谐激光器 很难实现窄带输出。 The principle of operation of an acousto-optic filter is based on a phenomenon called Bragg diffraction, in which the direction of the diffracted light depends on the wavelength of the acoustic wave. Compared with traditional technologies, AOTF provides continuous and fast adjustment capability, but to achieve a narrow filter spectral bandwidth, it is generally required that the size of the acousto-optic crystal is relatively large. There are two types of acousto-optic filters: collinear and non-collinear, where non-collinear non-paraxial filters with high RF frequencies can achieve narrowband optical frequency tuning, but it is almost impossible to do It has the same narrowband filtering function as the Fabry-Perot etalon. Therefore, it is difficult to achieve narrowband output with a tunable laser using only an acousto-optic filter.
发明内容  Summary of the invention
本发明的目的在于克服现有技术的不足, 提供一种稳定性强、 精度高、 速度快、 无机 械移动部件、 电子调谐以及大频谱范围的非偏振光输出的可调谐激光器。  SUMMARY OF THE INVENTION It is an object of the present invention to overcome the deficiencies of the prior art and to provide a tunable laser having high stability, high precision, high speed, inorganic mechanical moving parts, electronic tuning, and unpolarized light output in a large spectral range.
本发明解决现有的技术问题是采取以下技术方案实现的:  The present invention solves the prior art problem by adopting the following technical solutions:
一种非偏振光输出的可调谐激光器, 包括第一反射镜、 宽带激光增益介质、 可调谐法 布里-珀罗滤波器、 可调谐声光滤波器、 第二反射镜、 第三反射镜和激光器控制电路; 第一 反射镜和第二反射镜构成第一激光谐振子腔, 第一反射镜和第三反射镜构成第二激光谐振 子腔; 宽带激光增益介质发出的宽带光束通过可调谐法布里-珀罗滤波器滤波后, 再经过可 调谐声光滤波器滤波, 其一级衍射光束分成两束偏振态相互垂直的偏振光, 其 S态偏振光 束由第二反射镜反射并在第一激光谐振子腔中形成激光振荡, 其 P态偏振光束由第三反射 镜反射并在第二激光谐振子腔中形成激光振荡, 可调谐声光滤波器的零级衍射光束作为激 光器的输出光束; 激光器控制电路分别与宽带激光增益介质、可调谐法布里-珀罗滤波器和 可调谐声光滤波器相连接实现对激光器的可调谐输出控制功能。  A tunable laser of unpolarized light output, comprising a first mirror, a broadband laser gain medium, a tunable Fabry-Perot filter, a tunable acousto-optic filter, a second mirror, a third mirror, and a laser control circuit; the first mirror and the second mirror constitute a first laser resonator cavity, the first mirror and the third mirror constitute a second laser resonator cavity; the wideband beam emitted by the broadband laser gain medium passes the tunable method After filtering the Brill-Perot filter, it is filtered by a tunable acousto-optic filter, and the first-order diffracted beam is split into two polarized lights whose polarization states are perpendicular to each other, and the S-state polarized beam is reflected by the second mirror and is A laser oscillation is formed in a laser resonator cavity, and the P-state polarized beam is reflected by the third mirror and forms a laser oscillation in the second laser resonator cavity. The zero-order diffracted beam of the tunable acousto-optic filter is used as the output beam of the laser. The laser control circuit is connected to the broadband laser gain medium, the tunable Fabry-Perot filter and the tunable acousto-optic filter respectively to achieve excitation Tunable output control function.
而且, 所述第一反射镜、 第二反射镜和第三反射镜为以下三种类型反射镜之一: 平面 镜、 凹面镜和凸面镜。  Moreover, the first mirror, the second mirror, and the third mirror are one of three types of mirrors: a plane mirror, a concave mirror, and a convex mirror.
而且, 所述的可调谐法布里-珀罗滤波器包括前后依次安装起来的第一液晶盒、第二液 晶盒和可调谐法布里 -珀罗滤波器的驱动电路,两个液晶盒均包括依次安装一起的第一片光 学透明材料、 液晶材料和第二片光学透明材料, 第一液晶盒的第二片光学透明材料与第二 液晶盒的第一片光学透明材料安装在一起, 在第一液晶盒的第一片光学透明材料上设置高 反射率多层介质膜构成第一反射镜, 在第二液晶盒的第二片光学透明材料上设置高反射率 多层介质膜构成第二反射镜, 两个液晶盒内的液晶材料的光轴相互垂直并设置在由第一反 射镜和第二反射镜构成的法布里 -珀罗腔内, 所述可调谐法布里 -珀罗滤波器的驱动电路与 两个液晶盒相连接并通过控制液晶材料的有效折射率实现滤波器的调谐功能, 该可调谐法 布里-珀罗滤波器的驱动电路与激光器控制电路相连接。  Moreover, the tunable Fabry-Perot filter includes a first liquid crystal cell, a second liquid crystal cell, and a tunable Fabry-Perot filter driving circuit, which are sequentially mounted in front and rear, and two liquid crystal cells are The first optically transparent material, the liquid crystal material and the second optically transparent material are sequentially mounted together, and the second optically transparent material of the first liquid crystal cell is mounted together with the first optically transparent material of the second liquid crystal cell. The first optically transparent material of the first liquid crystal cell is provided with a high-reflectivity multilayer dielectric film to form a first mirror, and the second optically transparent material of the second liquid crystal cell is provided with a high-reflectivity multilayer dielectric film to form a second a mirror, the optical axes of the liquid crystal materials in the two liquid crystal cells are perpendicular to each other and disposed in a Fabry-Perot cavity composed of the first mirror and the second mirror, the tunable Fabry-Perot The driving circuit of the filter is connected to the two liquid crystal cells and the tuning function of the filter is realized by controlling the effective refractive index of the liquid crystal material, and the driving circuit and the laser of the tunable Fabry-Perot filter Circuit is connected.
而且, 所述第一液晶盒的第一片光学透明材料上的高反射率多层介质膜设置在第一片 光学透明材料的外侧, 该第一光学透明材料的内侧从内到外依次设有光学增透膜和透明电 极; 所述第一液晶盒的第二光学透明材料的外侧为光学抛光面, 第二光学透明材料的内侧 从内到外依次设有光学增透膜、 透明电极和非导电材料薄膜, 该非导电材料薄膜覆盖除通 光孔径以外的部分以及一个约 1毫米宽连接到第二片光学透明材料薄片边缘的通道, 用于 为多余的液晶材料提供一个出口, 并与第一片光学透明材料的内侧构成一个空腔用于设置 液晶材料, 该透明电极与可调谐法布里 -珀罗滤波器的驱动电路相连接。 Moreover, the high-reflectivity multilayer dielectric film on the first optically transparent material of the first liquid crystal cell is disposed outside the first optically transparent material, and the inner side of the first optically transparent material is sequentially disposed from the inside to the outside. An optical antireflection film and a transparent electrode; an outer side of the second optically transparent material of the first liquid crystal cell is an optically polished surface, and an inner side of the second optically transparent material is provided with an optical antireflection film, a transparent electrode and a non-infrared from the inside to the outside. a film of a conductive material covering a portion other than the clear aperture and a channel approximately 1 mm wide connected to the edge of the second sheet of optically transparent material for An outlet for the excess liquid crystal material is provided, and a cavity is formed with the inner side of the first optically transparent material for providing a liquid crystal material, and the transparent electrode is connected to a driving circuit of the tunable Fabry-Perot filter.
而且, 所述第一液晶盒的第一片光学透明材料上的高反射率多层介质膜设置在第一片 光学透明材料的内侧, 在高反射率多层介质膜的内侧设置有透明电极, 在第一光学透明材 料的外侧设置光学增透膜; 所述第一液晶盒的第二光学透明材料的外侧为光学抛光面, 第 二光学透明材料的内侧从内到外依次设有光学增透膜、 透明电极和非导电材料薄膜, 该非 导电材料薄膜覆盖除通光孔径以外的部分以及一个约 1毫米宽连接到第二片光学透明材料 薄片边缘的通道, 用于为多余的液晶材料提供一个出口, 并与第一片光学透明材料的内侧 构成一个空腔用于设置液晶材料,该透明电极与可调谐法布里-珀罗滤波器的驱动电路相连 接。  Moreover, the high-reflectivity multilayer dielectric film on the first optically transparent material of the first liquid crystal cell is disposed inside the first optically transparent material, and the transparent electrode is disposed inside the high-reflectivity multilayer dielectric film. An optical antireflection film is disposed on an outer side of the first optically transparent material; an outer side of the second optically transparent material of the first liquid crystal cell is an optically polished surface, and an inner side of the second optically transparent material is optically enhanced from the inside to the outside. a film, a transparent electrode, and a film of a non-conductive material covering a portion other than the clear aperture and a channel approximately 1 mm wide connected to the edge of the second sheet of optically transparent material for providing excess liquid crystal material An outlet, and a cavity formed inside the first piece of optically transparent material for providing a liquid crystal material, the transparent electrode being coupled to a drive circuit of the tunable Fabry-Perot filter.
而且, 所述第二液晶盒的第二片光学透明材料上的高反射率多层介质膜设置在第二片 光学透明材料的外侧, 该第二光学透明材料的内侧从内到外依次设有光学增透膜和透明电 极, 所述第二液晶盒的第一片光学透明材料的外侧为光学抛光面, 第一片光学透明材料的 内侧从内到外依次设有光学增透膜、 透明电极和非导电材料薄膜, 该非导电材料薄膜覆盖 除通光孔径以外的部分以及一个约 1毫米宽连接到该光学透明材料薄片边缘的通道, 用于 为多余的液晶材料提供一个出口, 并与第二液晶盒的第二片光学透明材料的内侧构成一个 空腔用于设置液晶材料, 该透明电极与可调谐法布里 -珀罗滤波器的驱动电路相连接。  Moreover, the high-reflectivity multilayer dielectric film on the second optically transparent material of the second liquid crystal cell is disposed outside the second optically transparent material, and the inner side of the second optically transparent material is sequentially disposed from the inside to the outside. An optical antireflection film and a transparent electrode, wherein an outer side of the first optically transparent material of the second liquid crystal cell is an optically polished surface, and an inner side of the first optically transparent material is provided with an optical antireflection film and a transparent electrode from the inside to the outside. And a film of a non-conductive material covering a portion other than the clear aperture and a channel connected to the edge of the sheet of optically transparent material about 1 mm wide for providing an outlet for the excess liquid crystal material, and The inside of the second optically transparent material of the two liquid crystal cells constitutes a cavity for providing a liquid crystal material, and the transparent electrode is connected to a driving circuit of the tunable Fabry-Perot filter.
而且, 所述第二液晶盒的第二片光学透明材料上的高反射率多层介质膜设置在第二片 光学透明材料的内侧, 在高反射率多层介质膜的内侧设置有透明电极, 在第二光学透明材 料的外侧设置光学增透膜, 所述第二液晶盒的第一片光学透明材料的外侧为光学抛光面, 第一片光学透明材料的内侧从内到外依次设有光学增透膜、 透明电极和非导电材料薄膜, 该非导电材料薄膜覆盖除通光孔径以外的部分以及一个约 1毫米宽连接到该光学透明材料 薄片边缘的通道, 用于为多余的液晶材料提供一个出口, 并与第二液晶盒的第二片光学透 明材料的内侧构成一个空腔用于设置液晶材料,该透明电极与可调谐法布里-珀罗滤波器的 驱动电路相连接。  Moreover, a high-reflectivity multilayer dielectric film on the second optically transparent material of the second liquid crystal cell is disposed inside the second optically transparent material, and a transparent electrode is disposed on the inner side of the high-reflectivity multilayer dielectric film. An optical antireflection film is disposed on an outer side of the second optically transparent material, wherein an outer side of the first optically transparent material of the second liquid crystal cell is an optically polished surface, and an inner side of the first optically transparent material is optically disposed from the inside to the outside. An antireflection film, a transparent electrode, and a film of a non-conductive material covering a portion other than the clear aperture and a channel connected to the edge of the sheet of optically transparent material about 1 mm wide for providing excess liquid crystal material An outlet, and a side of the second piece of optically transparent material of the second liquid crystal cell, forms a cavity for providing a liquid crystal material, the transparent electrode being coupled to a drive circuit of the tunable Fabry-Perot filter.
而且, 所述的第一液晶盒的第二片光学透明材料与第二液晶盒的第一片光学透明材料 的安装方式为: 使用光学透明折射率匹配胶粘接在一起, 并使得第一反射镜和第二反射镜 保持平行以形成法布里-珀罗腔。  Moreover, the second optically transparent material of the first liquid crystal cell and the first optically transparent material of the second liquid crystal cell are mounted by: bonding together using an optically transparent index matching glue, and making the first reflection The mirror and the second mirror remain parallel to form a Fabry-Perot cavity.
而且, 所述的液晶材料采用的是向列相型液晶, 该液晶材料的厚度为几微米至十几微 米。  Further, the liquid crystal material is a nematic liquid crystal having a thickness of several micrometers to ten micrometers.
而且,所述的可调谐法布里-珀罗滤波器的驱动电路是一种频率为从一千赫兹到几千赫 兹的方波脉冲电路, 脉冲电压幅度从 0伏到 5伏可调。 Moreover, the drive circuit of the tunable Fabry-Perot filter is a frequency from one kilohertz to several kilohertz The square wave pulse circuit has a pulse voltage amplitude adjustable from 0 volts to 5 volts.
而且,所述可调谐法布里-珀罗滤波器的自由光谱范围大于所述可调谐声光滤波器的滤 波带宽的半宽度。  Moreover, the free spectral range of the tunable Fabry-Perot filter is greater than the half width of the filter bandwidth of the tunable acousto-optic filter.
而且, 所述可调谐声光滤波器是一种窄带、 非同轴双折射型声光滤波器, 其一级衍射 将入射光分为两个偏振态相互垂直并形成一定的夹角的线偏振光。  Moreover, the tunable acousto-optic filter is a narrow-band, non-coaxial birefringence type acousto-optic filter, and the first-order diffraction splits the incident light into two polarization states that are perpendicular to each other and form a certain angle of linear polarization. Light.
而且, 所述可调谐声光滤波器由可调谐声光滤波器的驱动电路驱动, 该可调谐声光滤 波器的驱动电路与激光器控制电路相连接, 所述可调谐声光滤波器的驱动电路是一种频率 从几兆赫兹到几百兆赫兹的频率和功率可调射频信号发生器。  Moreover, the tunable acousto-optic filter is driven by a driving circuit of a tunable acousto-optic filter, the driving circuit of the tunable acousto-optic filter is connected to a laser control circuit, and the driving circuit of the tunable acousto-optic filter It is a frequency and power adjustable RF signal generator with frequencies from a few megahertz to hundreds of megahertz.
而且, 所述激光器控制电路通过泵浦电路与宽带激光增益介质相连接。  Moreover, the laser control circuit is coupled to the broadband laser gain medium by a pumping circuit.
发明的优点和积极效果是:  The advantages and positive effects of the invention are:
1、 本发明将两个光轴相互垂直的向列相型液晶材料放置在法布里 -珀罗标准具的腔内 并利用液晶的电控双折射效应和对入射光产生的光学相位调制, 实现在宽频谱范围内对透 过法布里-珀罗滤波器的光的频率进行连续、快速和精密调谐且与入射光的偏振态无关。 由 于液晶材料的厚度非常薄, 因此可以制作尺寸小、 自由光谱范围大的宽带可调谐法布里- 珀罗滤波器。 由可调谐法布里-珀罗滤波器输出的多模光波再通过可调谐声光滤波器的滤 波, 实现在大的光谱范围内的高精度、 快速和稳定性好的滤波等特点。 由于本发明采用了 两个激光器谐振子腔, 使得由可调谐声光滤波器衍射产生的两个在空间分开的偏振态相互 垂直的线偏振光都能够形成激光振荡, 因此, 本发明能够实现非偏振光输出。  1. The present invention places two nematic liquid crystal materials having mutually perpendicular optical axes in a cavity of a Fabry-Perot etalon and utilizes an electrically controlled birefringence effect of the liquid crystal and an optical phase modulation of the incident light. The continuous, fast and precise tuning of the frequency of the light transmitted through the Fabry-Perot filter over a wide spectral range is achieved regardless of the polarization state of the incident light. Since the thickness of the liquid crystal material is very thin, a wideband tunable Fabry-Perot filter having a small size and a large free spectral range can be fabricated. The multimode optical wave output by the tunable Fabry-Perot filter is filtered by a tunable acousto-optic filter to achieve high-precision, fast, and stable filtering over a large spectral range. Since the present invention employs two laser resonator sub-cavities, the two linearly polarized lights which are separated from each other by the spatially separated polarization states generated by the tunable acousto-optic filter can form laser oscillations, and therefore, the present invention can realize non- Polarized light output.
2、 本发明设计合理, 实现了在较宽频谱范围内对激光器的输出光进行连续、 快速和 精密的调谐, 具有无机械移动部件、 电子调谐、 调谐速度快、 性能稳定可靠、 尺寸小、 易 于安装及生产等特点, 可满足对于要求尺寸小和极端工作环境下的可靠运行, 可广泛用在 激光器、 光学测试、 光纤通讯、 生物、 医疗器械和光纤传感器网络等领域中。  2. The design of the invention is reasonable, and realizes continuous, rapid and precise tuning of the output light of the laser in a wide spectral range, with no mechanical moving parts, electronic tuning, fast tuning speed, stable and reliable performance, small size and easy Features such as installation and production for reliable operation in demanding small size and extreme operating environments, and are widely used in lasers, optical testing, fiber optic communications, biological, medical devices and fiber optic sensor networks.
附图说明  DRAWINGS
图 1是一个普通法布里-珀罗标准具的示意图;  Figure 1 is a schematic view of a conventional Fabry-Perot etalon;
图 2是第一液晶盒的结构示意图;  2 is a schematic structural view of a first liquid crystal cell;
图 3是第二液晶盒的结构示意图;  3 is a schematic structural view of a second liquid crystal cell;
图 4是一种可调谐布里-珀罗滤波器的结构示意图;  4 is a schematic structural view of a tunable Brie-Perot filter;
图 5是光透过液晶材料的相位随外加电场的变化曲线;  Figure 5 is a graph showing the phase of light transmitted through the liquid crystal material as a function of an applied electric field;
图 6是普通法布里 -珀罗标准具的透射光谱示意图;  Figure 6 is a schematic diagram of the transmission spectrum of a conventional Fabry-Perot etalon;
图 7是可调谐布里 -珀罗滤波器的透射光谱示意图;  7 is a schematic diagram of a transmission spectrum of a tunable Brill-Perot filter;
图 8是一种可调谐声光滤波器的示意图; 图 9是本发明的结构示意图; Figure 8 is a schematic diagram of a tunable acousto-optic filter; Figure 9 is a schematic view showing the structure of the present invention;
图 10是可调谐声光滤波器的输出光谱示意图;  Figure 10 is a schematic diagram of the output spectrum of the tunable acousto-optic filter;
图 11是可调谐法布里-珀罗滤波器和可调谐声光滤波器的合成输出光谱示意图; 图 12是本发明的输出光谱示意图。  Figure 11 is a schematic diagram of the synthesized output spectrum of a tunable Fabry-Perot filter and a tunable acousto-optic filter; Figure 12 is a schematic diagram of the output spectrum of the present invention.
具体实 Ife^式  Specific real Ife^
以下结合附图对本发明实施例做进一步详述。  The embodiments of the present invention are further described in detail below with reference to the accompanying drawings.
图 1给出了一种普通的法布里 -珀罗 ( Fabry-Perot) 光标准具 100的示意图。 该法布 里-珀罗光标准具 100的材料一般在近红外和可见光波段采用象融石英或 BK7这样的光学 玻璃, 假设材料的折射率为 n, 两个通光面 2和 4都镀高反射膜, 其反射率为 R, 厚度为 h, 光以接近零度的入射角入射, 则只有满足 2nh=mA , 才能透过标准具, 其中 m是透射 光的级次。光标准具 100的自由光谱范围 FSR1可以表示为: Δλ =λ 2/(2nh),或用频率表示: △v=c/(2nh),其中 c 是光速。透射光的峰值频率可以表示为: v=mc/(2nh),其中 m是干涉级次, 透射光的频率宽带可以表示为: Δν (FWHM) =c(l-R)/(2nhRl/2), 其中 c是光速。  A schematic of a conventional Fabry-Perot light etalon 100 is shown in FIG. The material of the Fabry-Perot etalon 100 is generally optical glass such as fused silica or BK7 in the near-infrared and visible-light bands, assuming that the material has a refractive index n and both light-passing surfaces 2 and 4 are plated high. The reflective film has a reflectance R and a thickness h. When the light is incident at an incident angle close to zero, the etalon can only be transmitted through 2nh=mA, where m is the order of transmitted light. The free spectral range of the optical etalon 100 FSR1 can be expressed as: Δλ = λ 2 / (2nh), or expressed in frequency: Δv = c / (2nh), where c is the speed of light. The peak frequency of transmitted light can be expressed as: v = mc / (2nh), where m is the interference order, and the frequency broadband of the transmitted light can be expressed as: Δν (FWHM) = c(lR) / (2nhRl/2), where c is the speed of light.
从上述两个公式可以看出, 光标准具 100的自由光谱范围 FSR1与厚度为 h成反比。 假设材料的折射率为 n=1.5, 要实现 FSRl=100GHz, 厚度 h-1毫米。 自由光谱范围 FSR1 越大, 其厚度就越小。 在标准具的材料和厚度确定后, 透射光的频带宽度主要和反射率 R 有关, 反射率越高, 频带宽度或锐度 (finesse)越小。 法布里 -珀罗 ( Fabry-Perot)光标准 具的透射光谱的特点是每个透射谱的带宽可以做到非常窄, 透射光谱的频率间隔相等并且 光频率响应带宽非常宽, 一般可覆盖大于 100纳米的光频谱带, 光标准具 100的输出光频 谱如图 6所示。  As can be seen from the above two equations, the free spectral range FSR1 of the optical etalon 100 is inversely proportional to the thickness h. Assuming that the material has a refractive index of n = 1.5, it is necessary to achieve FSRl = 100 GHz and a thickness of h - 1 mm. The free spectral range FSR1 is larger, the smaller its thickness. After the material and thickness of the etalon are determined, the bandwidth of the transmitted light is mainly related to the reflectance R. The higher the reflectance, the smaller the bandwidth or the finesse. The Fabry-Perot optical etalon's transmission spectrum is characterized by a very narrow bandwidth for each transmission spectrum, a uniform frequency spacing of the transmission spectrum and a very wide optical frequency response bandwidth, typically covering more than The optical spectrum band of 100 nm, the output light spectrum of the optical etalon 100 is shown in Fig. 6.
由于一般用作光电器件的液晶材料具有高的电阻率, 因此, 可以被认为是理想的电介 质材料。 由于构成分子的有序取向和拉伸延长的形态, 液晶具有各向异性的电介质特性和 单轴对称性, 就象一个单轴晶体一样, 其光轴的方向与分子的排列取向一致。 当液晶分子 在外界电场的作用下, 会形成电偶极子。 在电偶极子所形成的力矩作用下, 使得液晶分子 的取向转向电场的方向, 可以通过改变电场的强弱, 改变液晶的光轴的方向。 因此, 可以 利用液晶的这一特性制作光相位调制器, 可调谐滤波器或其他光电器件, 如光开关和光强 调制器等。 一般用作光电器件的液晶膜层的厚度为几微米到十几微米。 本发明正是利用液 晶在电场作用下对线偏振光的折射率产生改变这一特性设计而成。  Since a liquid crystal material generally used as a photovoltaic device has a high electrical resistivity, it can be considered as an ideal dielectric material. The liquid crystal has anisotropic dielectric properties and uniaxial symmetry due to the ordered orientation of the molecules and the stretched morphology. Like a uniaxial crystal, the direction of the optical axis coincides with the alignment of the molecules. When the liquid crystal molecules act under the external electric field, an electric dipole is formed. Under the action of the moment formed by the electric dipole, the orientation of the liquid crystal molecules is turned to the direction of the electric field, and the direction of the optical axis of the liquid crystal can be changed by changing the strength of the electric field. Therefore, an optical phase modulator, a tunable filter or other optoelectronic devices such as an optical switch and a light intensity modulator can be fabricated using this characteristic of the liquid crystal. The thickness of the liquid crystal film layer generally used as a photovoltaic device is from several micrometers to ten micrometers. The present invention is designed by utilizing the fact that liquid crystals change the refractive index of linearly polarized light under the action of an electric field.
本发明中所涉及的偏振无关可调谐法布里-珀罗滤波器包括两个光轴方向相互垂直的 液晶盒。  The polarization-independent tunable Fabry-Perot filter involved in the present invention includes two liquid crystal cells whose optical axis directions are perpendicular to each other.
如图 2所示, 第一个液晶盒 200包括两种结构。第一种结构包括第一片光学透明材料 8、液晶材料 14和第二片光学透明材料 22, 第一片光学透明材料 8外侧表面上设置高反射 率多层介质膜 6, 内侧从内到外分别设置光学增透膜 10和透明电极膜层 12, 第二片光学 透明材料 22外侧表面 24是光学抛光面, 内侧从内到外分别设置光学增透膜 20, 透明电极 膜层 18和非导电材料薄膜 16, 非导电材料薄膜 16的厚度为几微米到十几微米, 覆盖除通 光孔径外的其他部分和一个宽度约为 1毫米的通到光学透明材料 22边缘的通道, 用于排 除多余的液晶材料, 该非导电材料薄膜 16与第一片光学透明材料 8构成一个空腔用于设 置液晶材料 14, 液晶材料 14采用的是向列相型液晶, 该液晶材料的厚度约为几微米道十 几微米。液晶盒 200的第二种结构与第一种结构的不同之处在于所述第一片光学透明材料 8外侧表面上设置光学增透膜 6, 内侧从内到外分别设置高反射率多层介质膜 10和透明电 极膜层 12, 其他设置与液晶盒 200的第一种结构相同, 其目的是改变法布里 -珀罗腔的厚 度。 As shown in FIG. 2, the first liquid crystal cell 200 includes two structures. The first structure includes a first piece of optically transparent material 8. The liquid crystal material 14 and the second optically transparent material 22, the high-reflectivity multilayer dielectric film 6 is disposed on the outer surface of the first optically transparent material 8, and the optical anti-reflection film 10 and the transparent electrode film are disposed on the inner side from the inside to the outside. The outer surface 24 of the second optically transparent material 22 is an optically polished surface, and the optical antireflection film 20, the transparent electrode film layer 18 and the non-conductive material film 16, and the thickness of the non-conductive material film 16 are respectively disposed from the inside to the outside. Between a few micrometers and a dozen micrometers, covering a portion other than the clear aperture and a channel having a width of about 1 mm leading to the edge of the optically transparent material 22 for removing excess liquid crystal material, the non-conductive material film 16 and The first optically transparent material 8 constitutes a cavity for arranging the liquid crystal material 14. The liquid crystal material 14 is a nematic liquid crystal having a thickness of about several micrometers and a few micrometers. The second structure of the liquid crystal cell 200 is different from the first structure in that an optical anti-reflection film 6 is disposed on the outer surface of the first optically transparent material 8, and a high-reflectivity multilayer dielectric is disposed on the inner side from the inside to the outside. The film 10 and the transparent electrode film layer 12 are otherwise disposed in the same manner as the first structure of the liquid crystal cell 200, and the purpose thereof is to change the thickness of the Fabry-Perot cavity.
如图 3所示, 第二个液晶盒 300包括两种结构。第一种结构包括第一片光学透明材料 28、 液晶材料 36、 第二片光学透明材料 42, 第二片光学透明材料 42外侧表面 26设置高 反射率多层介质膜 44, 内侧从内到外分别设置光学增透膜 40, 透明电极膜层 32, 第一片 光学透明材料 28外侧表面 26是光学抛光面, 内侧从内到外分别设置光学增透膜 30, 透明 电极膜层 32和非导电材料薄膜 34, 非导电材料薄膜 34的厚度为几微米到十几微米, 覆盖 除通光孔径外的其他部分和一个宽度约为 1毫米的通到光学透明材料 28边缘的通道, 用 于排除多余的液晶材料, 非导电材料薄膜 34与第二片光学透明材料 42构成一个空腔用于 设置液晶材料 36。一般可用环氧树脂或紫外光胶等把上述构成液晶腔的两片材料的液晶腔 以外的部分粘接起来, 液晶材料 36 采用的是向列相型液晶, 该液晶材料的厚度约为几微 米道十几微米。液晶盒 300的第二种结构与第一种结构的不同之处在于第二片光学透明材 料 42外侧表面上设置光学增透膜 44, 内侧从内到外分别设置高反射率多层介质膜 40和透 明电极膜层 38, 其他设置与液晶盒 300的第一种结构相同, 其目的是改变法布里-珀罗腔 的厚度。  As shown in Fig. 3, the second liquid crystal cell 300 includes two structures. The first structure comprises a first sheet of optically transparent material 28, a liquid crystal material 36, and a second sheet of optically transparent material 42, the outer surface 26 of the second sheet of optically transparent material 42 being provided with a high reflectivity multilayer dielectric film 44, the inside from the inside out The optical anti-reflection film 40 and the transparent electrode film layer 32 are respectively disposed. The outer surface 26 of the first optically transparent material 28 is an optically polished surface, and the optical antireflection film 30, the transparent electrode film layer 32 and the non-conductive layer are respectively disposed from the inside to the outside. The material film 34, the non-conductive material film 34 has a thickness of several micrometers to ten micrometers, covers other portions except the light-passing aperture, and a channel having a width of about 1 mm to the edge of the optically transparent material 28 for eliminating excess The liquid crystal material, the non-conductive material film 34 and the second sheet of optically transparent material 42 form a cavity for providing the liquid crystal material 36. Generally, the portions other than the liquid crystal chambers of the two materials constituting the liquid crystal chamber are bonded together by an epoxy resin or an ultraviolet gel, and the liquid crystal material 36 is a nematic liquid crystal having a thickness of about several micrometers. The road is a dozen microns. The second structure of the liquid crystal cell 300 is different from the first structure in that an optical anti-reflection film 44 is disposed on the outer surface of the second optically transparent material 42, and a high-reflectivity multilayer dielectric film 40 is disposed on the inner side from the inside to the outside. And the transparent electrode film layer 38, the other arrangement is the same as the first structure of the liquid crystal cell 300, the purpose of which is to change the thickness of the Fabry-Perot cavity.
图 4给出了一种与偏振无关的可调谐布里-珀罗滤波器的结构示意图。该可调谐法布里 Figure 4 shows a schematic diagram of a polarization-independent tunable Brie-Perot filter. The tunable Fabri
-珀罗滤波 400, 包括第一个液晶盒 200、 第二个液晶盒 300和可调谐法布里 -珀罗滤波的 驱动电路 52。 液晶盒 200的第二片光学透明材料的外侧和液晶盒 300的第一片光学透明 材料的外侧用光学透明折射率匹配胶 50粘合在一起并使得液晶盒 200的第一光学透明材 料和液晶盒 300 的第二光学透明材料上设有高反射率介质膜的面保持并行而形成谐法布 里-珀罗腔。 驱动电路 52与液晶盒 200和液晶盒 300的透明电极连接, 由驱动电路 52产 生的驱动信号在两透明电极膜层之间形成驱动电场; 利用电场改变法布里 -珀罗 (Fabry-Perot) 腔内液晶的有效折射率 n, 来调节法布里-珀罗滤波器的透射光的光频率 v 和自由光谱范围 (FSR)。 通常的驱动电场是电压为几伏, 频率为 1千赫兹到几千赫兹的方 波信号。 The Perot filter 400 includes a first liquid crystal cell 200, a second liquid crystal cell 300, and a tunable Fabry-Perot filtered drive circuit 52. The outer side of the second piece of optically transparent material of the liquid crystal cell 200 and the outer side of the first piece of optically transparent material of the liquid crystal cell 300 are bonded together by the optically transparent index matching glue 50 and the first optically transparent material and liquid crystal of the liquid crystal cell 200 are made. The faces of the second optically transparent material of the cartridge 300 provided with the high reflectivity dielectric film remain parallel to form a harmonic Fabry-Perot cavity. The driving circuit 52 is connected to the transparent electrodes of the liquid crystal cell 200 and the liquid crystal cell 300, and the driving signal generated by the driving circuit 52 forms a driving electric field between the two transparent electrode film layers; the Fabry-Perot is changed by the electric field. (Fabry-Perot) The effective refractive index n of the liquid crystal in the cavity to adjust the optical frequency v and the free spectral range (FSR) of the transmitted light of the Fabry-Perot filter. A typical driving electric field is a square wave signal having a voltage of several volts and a frequency of 1 kHz to several kilohertz.
由于液晶的厚度很小 (几微米到十几微米), 因此, 可以制作本征自由光谱范围 (即 在无外加电场时的可调谐滤波器的自由光谱范围)的可调谐法布里-珀罗滤波器。 由于第一 液晶盒 200和第二液晶盒 300中液晶的光轴相互垂直, 因此, 滤波器 400与入射光的偏振 态无关。  Since the thickness of the liquid crystal is small (several micrometers to ten micrometers), tunable Fabry-Perot can be made in the intrinsic free spectral range (ie, the free spectral range of the tunable filter without an applied electric field) filter. Since the optical axes of the liquid crystals in the first liquid crystal cell 200 and the second liquid crystal cell 300 are perpendicular to each other, the filter 400 is independent of the polarization state of the incident light.
在图 4中, 入射到滤波器 400的光束 48是一束准直光束, 假设光透明材料的折射率 为 n, 第一液晶盒 200的第一片光学透明材料上和第二液晶盒 300的第二片光学透明材料 上镀高反射介质膜的反射率为 R, 法布里-珀罗腔的长度为 D, 则只有满足 2nD+r=mA 的 光才能透过标准具, 其中 m是透射光的级次。 滤波器 400的自由光谱范围 FSR2和透射光 频率分别为: Δλ =λ 2/(2nD+r),或用频率表示: Av=c/(2nD+r),其中 c 是光速, Γ代表由液 晶在外加电场作用下由折射改变对入射光所产生的光程。 透射光的峰值频率可以表示为: v=mc/(2nD+「 ),其中 m 是干涉级次, 透射光的频率宽带可以表示为: Δν ( FWHM ) =c(l-R)/((2nD+DRl/2), 其中 c 是光速。利用第一个液晶盒 200和第二个液晶盒 300的两 种不同的结构的组合可以增大或减少法布里-珀罗腔的长度 D,从而调节滤波器 400的自由 光谱范围 FSR2。  In FIG. 4, the light beam 48 incident on the filter 400 is a collimated beam, assuming that the refractive index of the optically transparent material is n, on the first optically transparent material of the first liquid crystal cell 200 and on the second liquid crystal cell 300. The reflectivity of the highly reflective dielectric film on the second optically transparent material is R, and the length of the Fabry-Perot cavity is D. Only the light satisfying 2nD+r=mA can pass through the etalon, where m is the transmission. The order of light. The free spectral range FSR2 and transmitted light frequency of the filter 400 are: Δλ = λ 2 / (2nD + r), respectively, or expressed by frequency: Av = c / (2nD + r), where c is the speed of light, and Γ represents the liquid crystal The optical path produced by the incident light is changed by the refraction under the action of an applied electric field. The peak frequency of transmitted light can be expressed as: v = mc / (2nD + "), where m is the interference order, and the frequency broadband of the transmitted light can be expressed as: Δν ( FWHM ) = c(lR) / ((2nD + DRl / 2), where c is the speed of light. The combination of two different structures of the first liquid crystal cell 200 and the second liquid crystal cell 300 can increase or decrease the length D of the Fabry-Perot cavity, thereby adjusting the filter 400 free spectral range FSR2.
图 5给出了一个厚度约为 10微米的向列相型液晶在 2KHz方波电压的驱动下,对光波 长为 1550纳米光波相位变化的关系示意图。 最大可实现约 2π的光相位延迟。 通过实验和 分析,可调谐法布里 -珀罗滤波器 400对于接近零度入射的准直光可以得到约 1.5倍的 FSR2 的透射光频率的调谐范围, 而对自由光谱范围 Δν和透射光的频带宽带的改变要小的多。 可调谐法布里-珀罗滤波器的透射光 54的光谱示意图如图 7所示。  Figure 5 is a graph showing the relationship between the phase change of a 1525 nm light wave with a wavelength of about 10 μm nematic liquid crystal driven by a 2 kHz square wave voltage. A maximum optical phase delay of about 2π can be achieved. Through experiments and analysis, the tunable Fabry-Perot filter 400 can obtain a tuning range of about 1.5 times the transmitted optical frequency of FSR2 for collimated light near zero incidence, and a band of free spectral range Δν and transmitted light. The change in broadband is much smaller. A schematic diagram of the spectrum of the transmitted light 54 of the tunable Fabry-Perot filter is shown in FIG.
由此可见, 可调谐法布里 -珀罗滤波器 400 在外加电场的作用下, 可以实现较大范围 的透射光峰值频率的调谐而基本不改变透射光的频带宽度和自由光谱范围。 这个特性对于 将可调谐法布里 -珀罗滤波器 400许多应用中, 如激光器和频谱仪器等具有重要意义。  It can be seen that the tunable Fabry-Perot filter 400 can achieve a large range of transmission light peak frequency tuning under the action of an applied electric field without substantially changing the bandwidth and free spectral range of the transmitted light. This feature is important for many applications in tunable Fabry-Perot filter 400, such as lasers and spectrum instruments.
图 8给出了一种可调谐声光滤波器的示意图。 该声光滤波器 500—般采用的介质是各 向异性并有双折射特性。 其中一种物质二氧化碲 (Te02), 由于其运行在剪切模式时具有 高光学均匀性、 低光吸收度和耐高光功率能力等特点, 广泛使用于这类应用中。 其他物质 例如铌酸锂(LiNb03)、磷化镓(GaP)和钼酸铅(PbMo04)也经常用于各种声光器件中。 影响选择特定物质的因素有很多, 下面仅列出几种, 如: 声光器件的类型、 高质量晶体是 否容易获得以及应用的类型和需求, 例如衍射效率功率损耗、 入射光与衍射光的分散度和 整体器件的大小等。 Figure 8 shows a schematic of a tunable acousto-optic filter. The medium generally used for the acousto-optic filter 500 is anisotropic and has birefringence characteristics. One of the substances, cerium oxide (Te02), is widely used in such applications due to its high optical uniformity, low light absorption and high optical power capability in shear mode. Other substances such as lithium niobate (LiNb03), gallium phosphide (GaP) and lead molybdate (PbMo04) are also frequently used in various acousto-optic devices. There are many factors that influence the selection of specific substances. Only a few types are listed below, such as: the type of acousto-optic device, the availability of high-quality crystals, and the type and demand of applications, such as diffraction efficiency power loss, dispersion of incident and diffracted light. Degree and The size of the overall device, etc.
可调谐声光滤波器 500是一种具有双折射特性, 非共线和非近轴型声光滤波器。 包括 采用二氧化碲的声光晶体 57和换能器 58, 由可调谐声光滤波器的驱动电路 60直接驱动换 能器 58在晶体 57中产生声波场 59而形成衍射光栅。 一束准直光束 56进入晶体 57并与 声波场 59成布拉格角 ΘΒ, 被衍射可调谐声光滤波器后, 一级衍射光分成两束线偏振光, S 光 62和 Ρ光 64,和零级衍射光束 66.两束线偏振光 62和 64与零级衍射光束形成的夹角等 于布拉格角 ΘΒ。 声光晶体 57的切割使得入射面 55和出射面 61与入射光成垂直或接近垂 直的角度。 为了减少光的损耗, 入射面 55和出射面 61都镀光学增透膜。 可调谐声光滤波 器 500 的滤波光谱的特点是可在一个宽频带的范围内实现光频率的连续可调谐, 如图 10 所示。 滤波光谱的带宽 Δ V 、 半宽度(FWHM) Δ V 1/2、 分辨率和衍射效率等频谱取决于 声光晶体的尺寸、 换能器的结构和射频驱动功率等因素的影响。 如要实现窄带滤波光谱和 高的衍射滤波效率, 需要加大换能器和声光晶体的尺寸。  The tunable acousto-optic filter 500 is a non-collinear and non-paraxial acousto-optic filter having birefringence characteristics. An acousto-optic crystal 57 and a transducer 58 comprising cerium oxide are used to directly drive the transducer 58 from a drive circuit 60 of the tunable acousto-optic filter to produce an acoustic wave field 59 in the crystal 57 to form a diffraction grating. A collimated beam 56 enters the crystal 57 and forms a Bragg angle with the acoustic field 59. After being diffracted by the tunable acousto-optic filter, the first-order diffracted light is split into two linearly polarized lights, S-light 62 and neon 64, and zero. The order diffracted beam 66. The angle between the two linearly polarized lights 62 and 64 and the zero order diffracted beam is equal to the Bragg angle ΘΒ. The cutting of the acousto-optic crystal 57 causes the incident surface 55 and the exit surface 61 to be perpendicular or nearly perpendicular to the incident light. In order to reduce the loss of light, both the incident surface 55 and the exit surface 61 are plated with an optical antireflection coating. The filter spectrum of the tunable acousto-optic filter 500 is characterized by continuous tunability of the optical frequency over a wide frequency range, as shown in Figure 10. The bandwidth of the filtered spectrum Δ V , half width (FWHM) Δ V 1/2, resolution and diffraction efficiency are dependent on the size of the acousto-optic crystal, the structure of the transducer, and the RF drive power. To achieve narrowband filtering spectra and high diffraction filtering efficiency, it is necessary to increase the size of transducers and acousto-optic crystals.
图 9给出了本发明的结构, 下面结合图 9对本发明的技术方案进行说明。 一种非偏振 光输出的可调谐激光器包括第一反射镜 72、 宽带激光增益介质 76、 可调谐法布里-珀罗滤 波器 400、可调谐声光滤波器 500、第二反射镜 84、第三反射镜 86以及一个驱动控制系统。 该驱动控制系统包括激光泵浦电路 74、 可调谐法布里 -珀罗滤波器 400的驱动电路 52、 可 调谐声光滤波器 500的驱动电路 60以及激光器控制电路 88。由宽带激光增益介质 76发出 的光束首先通过滤波器 400, 其输出光束 78通过可调谐声光滤波器 500后, 输出光束分为 零级衍射光 81、 一级衍射光分为两个偏振态相互垂直的线偏振光 S偏振光 80和 Ρ偏振光 82, 第二反射镜 84和第三反射镜 86设置的角度和位置分别使得 S偏振光 80和 Ρ偏振光 82被沿着原光路反射回到可调谐声光滤波器 500, 且分别在由第一反射镜 72和第二反射 镜 84组成的第一激光谐振子腔中以及由第一反射镜 72和第三反射镜 86组成的第二激光 谐振子腔中形成激光振荡, 通过激光控制电路 88控制和调节激光泵浦电路 74、 可调谐法 布里 -珀罗滤波器 400的驱动电路 52以及可调谐声光滤波器 500的驱动电路 60实现对激光 器输出功率和波长的调谐和控制。 准直光束 76入射进入可调谐法布里 -珀罗滤波器 400, 透射光 78的光谱如图 7所示, 透射光的峰值频率的可调谐范围约为 1.5倍的 FSR2 , 在可 调谐的范围内和约 100纳米的光谱范围内,可调谐法布里 -珀罗滤波器 400的自由光谱范围 基本保持不变。 透射光 78透过可调谐声光滤波器 500后, 一级衍射光分离成两束偏振态 相互垂直的光束 80和 82, 当可调谐声光滤波器 500的透射带宽 Δ V 小于 2倍的可调谐法 布里 -珀罗滤波器 400的本征自由光谱范围 FSR2, 透射光 80和 82均是一束单模光束, 其 光谱特性如图 12所示与可调谐法布里 -珀罗滤波器 400的一个透射模的光谱特性相同。 如 果考虑可调谐法布里 -珀罗滤波器 400的透射光的频谱度 Δ ν 时 (参考图 11 ), 要实现单模 输出或高的透射光边摸抑制比, 调谐声光滤波器 500的透射带宽 Δ ν还需要更窄。 需要提 出的是,可调谐法布里 -珀罗滤波器 400和可调谐声光滤波器 500的透射光的频谱宽度 Δ V 的定义是根据实际应用中对激光输出光谱的噪声或边摸抑制比的需要确定的。 Fig. 9 shows the structure of the present invention, and the technical solution of the present invention will be described below with reference to Fig. 9. A tunable laser of unpolarized light output includes a first mirror 72, a broadband laser gain medium 76, a tunable Fabry-Perot filter 400, a tunable acousto-optic filter 500, a second mirror 84, and a A three mirror 86 and a drive control system. The drive control system includes a laser pumping circuit 74, a drive circuit 52 of the tunable Fabry-Perot filter 400, a drive circuit 60 of the tunable acousto-optic filter 500, and a laser control circuit 88. The beam emitted by the broadband laser gain medium 76 first passes through the filter 400, and after the output beam 78 passes through the tunable acousto-optic filter 500, the output beam is divided into zero-order diffracted light 81, and the first-order diffracted light is split into two polarization states. The vertical linearly polarized light S polarized light 80 and the erbium polarized light 82, the second mirror 84 and the third mirror 86 are disposed at an angle and a position such that the S polarized light 80 and the Ρ polarized light 82 are reflected back along the original optical path, respectively. Tunable acousto-optic filter 500, and in a first laser resonator sub-chamber consisting of a first mirror 72 and a second mirror 84, respectively, and a second laser consisting of a first mirror 72 and a third mirror 86 Laser oscillation is formed in the resonator cavity, and the laser pump circuit 74 controls and adjusts the laser pump circuit 74, the drive circuit 52 of the tunable Fabry-Perot filter 400, and the drive circuit 60 of the tunable acousto-optic filter 500. Tuning and control of laser output power and wavelength. The collimated beam 76 is incident into the tunable Fabry-Perot filter 400. The spectrum of the transmitted light 78 is shown in Figure 7. The tunable range of the peak frequency of the transmitted light is about 1.5 times the FSR2, in the tunable range. The free spectral range of the tunable Fabry-Perot filter 400 remains substantially unchanged within the spectral range of about 100 nanometers. After the transmitted light 78 passes through the tunable acousto-optic filter 500, the first-order diffracted light is split into two beams 80 and 82 whose polarization states are perpendicular to each other. When the transmission bandwidth ΔV of the tunable acousto-optic filter 500 is less than 2 times, The intrinsic free spectral range FSR2 of the tuned Fabry-Perot filter 400, the transmitted light 80 and 82 are a single mode beam, the spectral characteristics of which are shown in Figure 12 and the tunable Fabry-Perot filter. The spectral characteristics of a transmission mode of 400 are the same. Such as Considering the spectral degree Δ ν of the transmitted light of the tunable Fabry-Perot filter 400 (refer to FIG. 11 ), to achieve a single mode output or a high transmitted light side touch suppression ratio, the acousto-optic filter 500 is tuned. The transmission bandwidth Δ ν also needs to be narrower. It is to be noted that the definition of the spectral width Δ V of the transmitted light of the tunable Fabry-Perot filter 400 and the tunable acousto-optic filter 500 is based on the noise or edge suppression ratio of the laser output spectrum in practical applications. Need to be determined.
根据不同的激光器增益介质类型和对输出的要求, 第一反射镜 72、 第二反射镜 84、 第三反射镜 86 可以采用全反射镜或部分反射镜, 如可以利用从部分反射镜的泄漏光对激 光器的腔内光功率进行监控等, 也可采用不同的类型的反射镜, 如平面镜, 凸面镜或凹面 镜, 构成不同类型的激光谐振腔, 如稳定腔, 介稳腔或非稳腔等。 另外, 要使得可调谐法 布里 -珀罗滤波器 400和可调谐声光滤波器 500处于最好的工作状态,需要输入光束是准直 光束, 因此, 如果宽带激光增益介质 76发出的是分散型的光束, 如半导体激光增益介质, 可以采用一个腔内准直透镜对光束进行准直。  Depending on the type of laser gain medium and the requirements on the output, the first mirror 72, the second mirror 84, and the third mirror 86 may employ a total reflection mirror or a partial reflection mirror, such as leakage light from a partial reflection mirror. Different types of mirrors, such as plane mirrors, convex mirrors or concave mirrors, can be used to monitor different types of laser resonators, such as stable chambers, metastable chambers or unstable chambers. . In addition, in order to make the tunable Fabry-Perot filter 400 and the tunable acousto-optic filter 500 in the best working condition, the input beam is required to be a collimated beam, and therefore, if the broadband laser gain medium 76 emits a dispersion A type of beam, such as a semiconductor laser gain medium, can collimate the beam with an intracavity collimating lens.
由于本发明是利用可调谐法布里 -珀罗滤波器 400 的滤波功能以及可调谐声光滤波器 500 的衍射滤波功能, 对不同光频率的光束有不同的响应特性, 因此, 要获得精确的激光 器输出功率和频率, 需要对系统进行校准。 激光器控制电路 88包括一个以数字信号处理 器以及嵌入式软件为核心的控制电路, 数据分析软件和数据窜型接口用于控制, 调谐以及 接收外界控制信号和对外输出信号。  Since the present invention utilizes the filtering function of the tunable Fabry-Perot filter 400 and the diffraction filtering function of the tunable acousto-optic filter 500, different response characteristics are obtained for beams of different optical frequencies, and therefore, accurate The laser output power and frequency require calibration of the system. The laser control circuit 88 includes a control circuit centered on a digital signal processor and embedded software. The data analysis software and the data type interface are used to control, tune, and receive external control signals and external output signals.
需要强调的是, 上述说明仅起演示和描述的作用, 并不是一个详细无遗漏的说明, 也 没有意图将本发明限制在所描述的具体形式上。 经过上面的描述, 对本发明的许多改动和 变化都可能出现。 所选择的具体实施仅仅是为了更好的解释本发明的原理和实际中的应 用。 这个说明能够使熟悉此领域的人可以更好的利用本发明, 根据实际需要设计不同的具 体实施和进行相应的改动。  It is to be understood that the foregoing description is not intended to Many modifications and variations of the present invention are possible in the light of the above description. The specific implementation chosen is merely to better explain the principles of the invention and the application in practice. This description enables those skilled in the art to make better use of the present invention, designing different specific implementations and making corresponding changes as needed.

Claims

权利要求书 claims
1、 一种非偏振光输出的可调谐激光器, 其特征在于: 包括第一反射镜、 宽带激光增 益介质、 可调谐法布里-珀罗滤波器、 可调谐声光滤波器、 第二反射镜、 第三反射镜和激光 器控制电路; 第一反射镜和第二反射镜构成第一激光谐振子腔, 第一反射镜和第三反射镜 构成第二激光谐振子腔;宽带激光增益介质发出的宽带光束通过可调谐法布里 -珀罗滤波器 滤波后, 再经过可调谐声光滤波器滤波, 其一级衍射光束分成两束偏振态相互垂直的偏振 光, 其 S态偏振光束由第二反射镜反射并在第一激光谐振子腔中形成激光振荡, 其 P态偏 振光束由第三反射镜反射并在第二激光谐振子腔中形成激光振荡, 可调谐声光滤波器的零 级衍射光束作为激光器的输出光束; 激光器控制电路分别与宽带激光增益介质、 可调谐法 布里-珀罗滤波器和可调谐声光滤波器相连接实现对激光器的可调谐输出控制功能。 1. A tunable laser with non-polarized light output, characterized by: including a first reflector, a broadband laser gain medium, a tunable Fabry-Perot filter, a tunable acousto-optic filter, and a second reflector. , the third reflector and the laser control circuit; the first reflector and the second reflector constitute the first laser resonator subcavity, the first reflector and the third reflector constitute the second laser resonator subcavity; the broadband laser gain medium emits After the broadband beam is filtered by a tunable Fabry-Perot filter, and then filtered by a tunable acousto-optic filter, its first-order diffracted beam is divided into two beams of polarized light whose polarization states are perpendicular to each other, and its S-state polarized beam is divided into two beams. The mirror reflects and forms laser oscillation in the first laser resonator cavity, and its P-state polarized beam is reflected by the third mirror and forms laser oscillation in the second laser resonator cavity. Zero-order diffraction of the tunable acousto-optic filter The beam serves as the output beam of the laser; the laser control circuit is connected to the broadband laser gain medium, the tunable Fabry-Perot filter and the tunable acousto-optic filter to realize the tunable output control function of the laser.
2、 根据权利要求 1 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述第 一反射镜、 第二反射镜和第三反射镜为以下三种类型反射镜之一: 平面镜、 凹面镜和凸面 镜。 2. A tunable laser with non-polarized light output according to claim 1, characterized in that: the first reflector, the second reflector and the third reflector are one of the following three types of reflectors: Plane mirror, concave mirror and convex mirror.
3、 根据权利要求 1 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述的 可调谐法布里-珀罗滤波器包括前后依次安装起来的第一液晶盒、第二液晶盒和可调谐法布 里 -珀罗滤波器的驱动电路, 两个液晶盒均包括依次安装一起的第一片光学透明材料、液晶 材料和第二片光学透明材料, 第一液晶盒的第二片光学透明材料与第二液晶盒的第一片光 学透明材料安装在一起, 在第一液晶盒的第一片光学透明材料上设置高反射率多层介质膜 构成第一反射镜, 在第二液晶盒的第二片光学透明材料上设置高反射率多层介质膜构成第 二反射镜, 两个液晶盒内的液晶材料的光轴相互垂直并设置在由第一反射镜和第二反射镜 构成的法布里 -珀罗腔内, 所述可调谐法布里-珀罗滤波器的驱动电路与两个液晶盒相连接 并通过控制液晶材料的有效折射率实现滤波器的调谐功能,该可调谐法布里-珀罗滤波器的 驱动电路与激光器控制电路相连接。 3. A tunable laser with non-polarized light output according to claim 1, characterized in that: the tunable Fabry-Perot filter includes a first liquid crystal cell and a second liquid crystal cell installed in sequence. A driving circuit for a liquid crystal cell and a tunable Fabry-Perot filter. Both liquid crystal cells include a first piece of optically transparent material, a liquid crystal material and a second piece of optically transparent material installed together in sequence. The first piece of liquid crystal cell Two pieces of optically transparent material are installed together with the first piece of optically transparent material of the second liquid crystal cell. A high-reflectivity multilayer dielectric film is arranged on the first piece of optically transparent material of the first liquid crystal cell to form a first reflecting mirror. A high reflectivity multilayer dielectric film is arranged on the second piece of optically transparent material of the two liquid crystal cells to form a second reflecting mirror. The optical axes of the liquid crystal materials in the two liquid crystal cells are perpendicular to each other and are arranged between the first reflecting mirror and the second reflecting mirror. In the Fabry-Perot cavity composed of mirrors, the driving circuit of the tunable Fabry-Perot filter is connected to the two liquid crystal cells and realizes the tuning function of the filter by controlling the effective refractive index of the liquid crystal material. The driving circuit of the tunable Fabry-Perot filter is connected with the laser control circuit.
4、 根据权利要求 3 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述第 一液晶盒的第一片光学透明材料上的高反射率多层介质膜设置在第一片光学透明材料的 外侧, 该第一光学透明材料的内侧从内到外依次设有光学增透膜和透明电极; 所述第一液 晶盒的第二光学透明材料的外侧为光学抛光面, 第二光学透明材料的内侧从内到外依次设 有光学增透膜、 透明电极和非导电材料薄膜, 该非导电材料薄膜覆盖除通光孔径以外的部 分以及一个约 1毫米宽连接到第二片光学透明材料薄片边缘的通道, 用于为多余的液晶材 料提供一个出口, 并与第一片光学透明材料的内侧构成一个空腔用于设置液晶材料, 该透 明电极与可调谐法布里 -珀罗滤波器的驱动电路相连接。 4. A tunable laser with non-polarized light output according to claim 3, characterized in that: the high reflectivity multilayer dielectric film on the first piece of optically transparent material of the first liquid crystal cell is disposed on the first The outside of the piece of optically transparent material, the inside of the first optically transparent material is provided with an optical anti-reflection film and a transparent electrode in order from the inside to the outside; the outside of the second optically transparent material of the first liquid crystal cell is an optically polished surface, The inner side of the two optically transparent materials is provided with an optical anti-reflection film, a transparent electrode and a non-conductive material film in sequence from the inside to the outside. The non-conductive material film covers the part except the clear aperture and is connected to the second piece with a width of about 1 mm. The channel at the edge of the optically transparent material sheet is used to provide an outlet for the excess liquid crystal material, and forms a cavity with the inside of the first piece of optically transparent material for disposing the liquid crystal material. The transparent electrode is connected with the tunable Fabry-Perot Luo filter drive circuit connected.
5、 根据权利要求 3 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述第 一液晶盒的第一片光学透明材料上的高反射率多层介质膜设置在第一片光学透明材料的 内侧, 在高反射率多层介质膜的内侧设置有透明电极, 在第一光学透明材料的外侧设置光 学增透膜; 所述第一液晶盒的第二光学透明材料的外侧为光学抛光面, 第二光学透明材料 的内侧从内到外依次设有光学增透膜、 透明电极和非导电材料薄膜, 该非导电材料薄膜覆 盖除通光孔径以外的部分以及一个约 1 毫米宽连接到第二片光学透明材料薄片边缘的通 道, 用于为多余的液晶材料提供一个出口, 并与第一片光学透明材料的内侧构成一个空腔 用于设置液晶材料, 该透明电极与可调谐法布里 -珀罗滤波器的驱动电路相连接。 5. A tunable laser with non-polarized light output according to claim 3, characterized in that: the first A high-reflectivity multilayer dielectric film on a first piece of optically transparent material of a liquid crystal cell is arranged inside the first piece of optically transparent material, and a transparent electrode is arranged inside the first piece of optically transparent material. An optical anti-reflection film is provided on the outside of the material; the outside of the second optically transparent material of the first liquid crystal cell is an optically polished surface, and the inside of the second optically transparent material is provided with an optical anti-reflection film, a transparent electrode and A film of non-conductive material covering the portion except the clear aperture and a channel approximately 1 mm wide connected to the edge of the second sheet of optically transparent material to provide an outlet for excess liquid crystal material and with The inside of the first piece of optically transparent material forms a cavity for disposing the liquid crystal material, and the transparent electrode is connected to the driving circuit of the tunable Fabry-Perot filter.
6、 根据权利要求 3 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述第 二液晶盒的第二片光学透明材料上的高反射率多层介质膜设置在第二片光学透明材料的 外侧, 该第二光学透明材料的内侧从内到外依次设有光学增透膜和透明电极, 所述第二液 晶盒的第一片光学透明材料的外侧为光学抛光面, 第一片光学透明材料的内侧从内到外依 次设有光学增透膜、 透明电极和非导电材料薄膜, 该非导电材料薄膜覆盖除通光孔径以外 的部分以及一个约 1毫米宽连接到该光学透明材料薄片边缘的通道, 用于为多余的液晶材 料提供一个出口, 并与第二液晶盒的第二片光学透明材料的内侧构成一个空腔用于设置液 晶材料, 该透明电极与可调谐法布里 -珀罗滤波器的驱动电路相连接。 6. A tunable laser with non-polarized light output according to claim 3, characterized in that: the high reflectivity multilayer dielectric film on the second optically transparent material of the second liquid crystal cell is disposed on the second The outside of the first piece of optically transparent material, the inside of the second optically transparent material is provided with an optical anti-reflection film and a transparent electrode in order from the inside to the outside, the outside of the first piece of optically transparent material of the second liquid crystal cell is an optically polished surface, The inside of the first piece of optically transparent material is provided with an optical anti-reflection film, a transparent electrode and a non-conductive material film in order from the inside to the outside. The non-conductive material film covers the part except the clear aperture and an approximately 1 mm wide connection to the The channel at the edge of the optically transparent material sheet is used to provide an outlet for excess liquid crystal material, and forms a cavity with the inside of the second piece of optically transparent material in the second liquid crystal cell for disposing the liquid crystal material. The transparent electrode is connected to the tunable Fabry-Perot filter driver circuit.
7、 根据权利要求 3 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述第 二液晶盒的第二片光学透明材料上的高反射率多层介质膜设置在第二片光学透明材料的 内侧, 在高反射率多层介质膜的内侧设置有透明电极, 在第二光学透明材料的外侧设置光 学增透膜, 所述第二液晶盒的第一片光学透明材料的外侧为光学抛光面, 第一片光学透明 材料的内侧从内到外依次设有光学增透膜、 透明电极和非导电材料薄膜, 该非导电材料薄 膜覆盖除通光孔径以外的部分以及一个约 1 毫米宽连接到该光学透明材料薄片边缘的通 道, 用于为多余的液晶材料提供一个出口, 并与第二液晶盒的第二片光学透明材料的内侧 构成一个空腔用于设置液晶材料,该透明电极与可调谐法布里-珀罗滤波器的驱动电路相连 接。 7. A tunable laser with non-polarized light output according to claim 3, characterized in that: the high reflectivity multilayer dielectric film on the second optically transparent material of the second liquid crystal cell is disposed on the second Inside the piece of optically transparent material, a transparent electrode is arranged inside the high-reflectivity multilayer dielectric film, and an optical anti-reflection film is arranged outside the second optically transparent material. The first piece of optically transparent material of the second liquid crystal cell The outside is an optically polished surface, and the inside of the first piece of optically transparent material is provided with an optical anti-reflection film, a transparent electrode and a non-conductive material film from the inside to the outside. The non-conductive material film covers the part except the clear aperture and an approximately a 1 mm wide channel connected to the edge of the sheet of optically transparent material for providing an outlet for excess liquid crystal material, and forming a cavity with the inside of the second sheet of optically transparent material of the second liquid crystal cell for disposing the liquid crystal material, The transparent electrode is connected to the drive circuit of the tunable Fabry-Perot filter.
8、 根据权利要求 3 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述的 第一液晶盒的第二片光学透明材料与第二液晶盒的第一片光学透明材料的安装方式为: 使 用光学透明折射率匹配胶粘接在一起, 并使得第一反射镜和第二反射镜保持平行以形成法 布里-珀罗腔。 8. A tunable laser with non-polarized light output according to claim 3, characterized in that: the second piece of optically transparent material of the first liquid crystal cell and the first piece of optically transparent material of the second liquid crystal cell The installation method is: use optically transparent refractive index matching glue to bond them together, and keep the first reflector and the second reflector parallel to form a Fabry-Perot cavity.
9、 根据权利要求 3 所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述的 液晶材料采用的是向列相型液晶, 该液晶材料的厚度为几微米至十几微米。 9. A tunable laser with non-polarized light output according to claim 3, characterized in that: the liquid crystal material adopts nematic liquid crystal, and the thickness of the liquid crystal material is from several microns to more than ten microns. .
10、 根据权利要求 3所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述的 可调谐法布里 -珀罗滤波器的驱动电路是一种频率为从一千赫兹到几千赫兹的方波脉冲电 路, 脉冲电压幅度从 0伏到 5伏可调。 10. A tunable laser with non-polarized light output according to claim 3, characterized in that: the driving circuit of the tunable Fabry-Perot filter is a frequency ranging from one thousand hertz to Square wave pulse electricity of several kilohertz circuit, the pulse voltage amplitude is adjustable from 0 volts to 5 volts.
11、 根据权利要求 1所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述可 调谐法布里-珀罗滤波器的自由光谱范围大于所述可调谐声光滤波器的滤波带宽的半宽度。 11. A tunable laser with non-polarized light output according to claim 1, characterized in that: the free spectral range of the tunable Fabry-Perot filter is greater than that of the tunable acousto-optic filter. The half-width of the filter bandwidth.
12、 根据权利要求 1所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述可 调谐声光滤波器是一种窄带、 非同轴双折射型声光滤波器, 其一级衍射将入射光分为两个 偏振态相互垂直并形成一定的夹角的线偏振光。 12. A tunable laser with non-polarized light output according to claim 1, characterized in that: the tunable acousto-optic filter is a narrow-band, non-coaxial birefringent acousto-optic filter, one of which First-order diffraction divides the incident light into two linearly polarized lights whose polarization states are perpendicular to each other and form a certain angle.
13、 根据权利要求 1或 12所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述可调谐声光滤波器由可调谐声光滤波器的驱动电路驱动, 该可调谐声光滤波器的驱动 电路与激光器控制电路相连接; 所述可调谐声光滤波器的驱动电路是一种频率从几兆赫兹 到几百兆赫兹的频率和功率可调射频信号发生器。 13. A tunable laser with non-polarized light output according to claim 1 or 12, characterized in that: the tunable acousto-optic filter is driven by a driving circuit of the tunable acousto-optic filter, and the tunable acousto-optic filter The drive circuit of the optical filter is connected to the laser control circuit; the drive circuit of the tunable acousto-optic filter is a frequency and power adjustable radio frequency signal generator with a frequency from several megahertz to hundreds of megahertz.
14、 根据权利要求 1所述的一种非偏振光输出的可调谐激光器, 其特征在于: 所述激 光器控制电路通过泵浦电路与宽带激光增益介质相连接。 14. The tunable laser with non-polarized light output according to claim 1, characterized in that: the laser control circuit is connected to the broadband laser gain medium through a pump circuit.
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