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WO2013183138A1 - Récipient de logement de substrat doté d'une fonction d'absorption d'impact - Google Patents

Récipient de logement de substrat doté d'une fonction d'absorption d'impact Download PDF

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Publication number
WO2013183138A1
WO2013183138A1 PCT/JP2012/064645 JP2012064645W WO2013183138A1 WO 2013183138 A1 WO2013183138 A1 WO 2013183138A1 JP 2012064645 W JP2012064645 W JP 2012064645W WO 2013183138 A1 WO2013183138 A1 WO 2013183138A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
lid
substrate support
contact
contact surface
Prior art date
Application number
PCT/JP2012/064645
Other languages
English (en)
Japanese (ja)
Inventor
忠利 井上
稔 冨田
誠治 吉山
亜梨抄 佐々木
隆二 福田
Original Assignee
ミライアル株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ミライアル株式会社 filed Critical ミライアル株式会社
Priority to JP2014519759A priority Critical patent/JPWO2013183138A1/ja
Priority to PCT/JP2012/064645 priority patent/WO2013183138A1/fr
Priority to TW102119421A priority patent/TW201411767A/zh
Publication of WO2013183138A1 publication Critical patent/WO2013183138A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67369—Closed carriers characterised by shock absorbing elements, e.g. retainers or cushions
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports

Definitions

  • the present invention relates to a substrate storage container, and more particularly to a substrate storage container that stores a plurality of substrates such as semiconductor wafers in parallel and has an impact absorbing function.
  • a container for storing a substrate such as a semiconductor wafer
  • a container including a container body, a lid, a side substrate support, a lid side substrate support, and a back substrate support
  • the container body has a cylindrical wall portion in which a container body opening is formed at one end and the other end is closed.
  • a substrate storage space is formed in the container body.
  • the substrate storage space is formed by being surrounded by a wall portion, and can store a plurality of substrates.
  • the lid can be attached to and detached from the container body opening, and the container body opening can be closed.
  • the side substrate support portions are provided on the wall portion so as to form a pair in the substrate storage space.
  • the side substrate support portion can support the edges of a plurality of substrates in a state where adjacent substrates are spaced apart and arranged in parallel when the container body opening is not closed by the lid. is there.
  • the lid-side substrate support portion is provided in a portion of the lid that faces the substrate storage space when the container body opening is closed.
  • the lid-side substrate support portion can support the edges of the plurality of substrates when the container main body opening is closed by the lid.
  • the wall portion substrate support portion is provided on the wall portion so as to form a pair with the lid side substrate support portion.
  • substrate support part can support the edge part of a some board
  • An object of the present invention is to provide a substrate storage container that can suppress as much as possible that an impact is transmitted to a plurality of substrates stored in the substrate storage container during transportation of the substrate storage container.
  • the present invention provides a container main body in which a substrate storage space capable of storing a plurality of substrates is formed, a container main body opening formed at one end thereof and communicating with the substrate storage space, and the container main body opening.
  • a lid that is detachable and is arranged so as to make a pair in the substrate storage space with a lid capable of closing the container body opening, and when the container body opening is not closed by the lid,
  • a side substrate support portion capable of supporting an edge portion of the plurality of substrates in a state where adjacent substrates among the plurality of substrates are spaced apart and arranged in parallel with each other, and a portion of the lid
  • the container body opening is disposed at a portion facing the substrate storage space, and when the container body opening is closed by the lid, the plurality of substrates Lid that can support the edge
  • a side substrate support portion is disposed in a pair with the lid body side substrate support portion in the substrate storage space, and can support edges of the plurality of substrates, and the container body opening is
  • a side substrate support portion, the back side substrate support portion including an elastically deformable leg portion and a substrate receiving portion supported by the leg portion, wherein the substrate receiving portion is formed on a surface of the substrate.
  • a first abutting portion having a first abutting surface capable of abutting on an edge, and a second abutting surface connected to the first abutting surface and capable of abutting on an edge of the back surface of the substrate
  • a second contact portion having a second contact surface.
  • the back side substrate support portion is provided corresponding to each of the substrates, and the leg portion of the one back side substrate support portion is separate from the leg portions of the other back side substrate support portions. It is preferable that it can be elastically deformed independently.
  • the substrate receiving portion is elastically deformable, and the substrate receiving portion and the leg portion are surfaces of the substrate supported by the side substrate supporting portion on the first contact surface of the substrate receiving portion.
  • the first contact surface is pressed and the second contact surface of the substrate receiving portion is in contact with the edge of the back surface of the substrate supported by the side substrate support portion. It is preferable that the second contact surface is pressed so as to be deformable so that an edge of the substrate is sandwiched between the first contact surface and the second contact surface.
  • the leg portion includes a first leg portion and a second leg portion, and one end portion of the first abutting portion is connected to one end portion of the second abutting portion, and the first abutting portion is provided. It is preferable that the other end part of the part is connected to the first leg part, and the other end part of the second contact part is connected to the second leg part.
  • the leg of the back side substrate support part is in contact with at least the second contact surface of the substrate receiving part with the edge of the back surface of the substrate supported by the side substrate support part.
  • the substrate receiving portion is preferably deformable so as to move in a direction from the back surface to the front surface of the substrate supported by the side substrate support portion.
  • One end of the leg is connected to the inner surface of the container body, the other end of the leg is connected to the substrate receiving portion, and one end of the leg is the side substrate support portion. In the direction from the back surface to the front surface of the substrate supported by the substrate, it is preferable to be positioned in front of the other end portion of the leg portion.
  • the surface of the substrate supported by the side substrate support portion has the first contact surface and the second surface in a direction from the back surface to the surface of the substrate supported by the side substrate support portion. It is preferable to be positioned in front of the connection position with the contact surface.
  • One end of the first contact surface is connected to one end of the second contact surface, and the other end of the second contact surface is supported by the side substrate support portion.
  • the side substrate support portion In the direction from the back surface to the front surface, it is preferable to be positioned in front of the back surface of the substrate supported by the side substrate support portion.
  • the present invention it is possible to provide a substrate storage container that can suppress as much as possible that an impact is transmitted to a plurality of substrates stored in the substrate storage container during transportation of the substrate storage container.
  • FIG. 1 is an exploded perspective view showing a substrate storage container according to the first embodiment.
  • FIG. 2 is a perspective view showing the container main body 2 of the substrate storage container 1 according to the first embodiment.
  • FIG. 3 is a side sectional view showing the substrate storage container 1 according to the first embodiment.
  • FIG. 4 is an enlarged side sectional view showing the front retainer of the substrate storage container according to the first embodiment.
  • FIG. 5 is a cross-sectional plan view showing the substrate storage container 1 according to the first embodiment.
  • FIG. 6 is a plan view sectional view showing a state in which the substrate W is held in the substrate storage container 1 according to the first embodiment.
  • FIG. 1 is an exploded perspective view showing a substrate storage container according to the first embodiment.
  • FIG. 2 is a perspective view showing the container main body 2 of the substrate storage container 1 according to the first embodiment.
  • FIG. 3 is a side sectional view showing the substrate storage container 1 according to the first embodiment.
  • FIG. 4 is an enlarged side sectional view showing the
  • FIG. 7 is a schematic diagram illustrating a state in which the substrate W is supported by the substrate receiving portion 61 of the substrate storage container 1 according to the first embodiment.
  • FIG. 7A illustrates a state before the substrate W is supported.
  • a direction (left direction in FIG. 3) from the container body 2 described later to the lid body 3 is defined as a front direction D11, and the opposite direction is defined as a rear direction D12. It is defined as D1.
  • a direction (upward direction in FIG. 3) from the lower wall 24 to the upper wall 23, which will be described later, is defined as an upward direction D21
  • the opposite direction is defined as a downward direction D22, and these are defined as a vertical direction D2.
  • a direction from the second side wall 26 to be described later to the first side wall 25 is defined as the left direction D31
  • the opposite direction is defined as the right direction D32. These are defined as the left-right direction D3.
  • the substrate W (see FIG. 6 and the like) stored in the substrate storage container 1 is a disk-shaped silicon wafer, glass wafer, sapphire wafer, etc., and is a thin one used in the industry.
  • the substrate W in this embodiment is a silicon wafer having a diameter of 450 mm.
  • the substrate storage container 1 includes a container body 2, a lid 3, a seal member 4, a substrate support plate-like portion 5 as a side substrate support portion, a rear retainer 6, And a front retainer 7.
  • the container body 2 has a cylindrical wall portion 20 in which a container body opening 21 is formed at one end and the other end is closed.
  • a substrate storage space 27 is formed in the container body 2.
  • the substrate storage space 27 is formed so as to be surrounded by the wall portion 20.
  • the substrate support plate-like portion 5 and the rear retainer 6 are disposed in a portion of the wall portion 20 that forms the substrate storage space 27.
  • a plurality of substrates W can be stored in the substrate storage space 27.
  • the substrate support plate-like portion 5 is provided on the wall portion so as to form a pair in the substrate storage space 27.
  • the substrate support plate-like portion 5 is arranged in such a manner that adjacent substrates W are separated from each other at a predetermined interval and arranged in parallel.
  • the part can be supported.
  • the rear retainer 6 can support the rear portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3.
  • the lid 3 is detachable from the container body opening 21 and can close the container body opening 21.
  • the front retainer 7 is provided in a portion of the lid 3 that faces the substrate storage space 27 when the container main body opening 21 is closed by the lid 3.
  • the front retainer 7 is disposed so as to make a pair with the rear retainer 6.
  • the front retainer 7 can support the front portions of the edges of the plurality of substrates W when the container main body opening 21 is closed by the lid 3.
  • the front retainer 7 supports a plurality of substrates W in cooperation with the rear retainer 6 when the container main body opening 21 is closed by the lid 3, thereby separating adjacent substrates W at a predetermined interval.
  • the plurality of substrates W are held in a state where they are arranged in parallel.
  • the wall portion 20 of the container body 2 has a back wall 22, an upper wall 23, a lower wall 24, a first side wall 25, and a second side wall 26.
  • the back wall 22, the upper wall 23, the lower wall 24, the first side wall 25, and the second side wall 26 are made of a plastic material or the like. In the first embodiment, they are integrally formed of polycarbonate.
  • the first side wall 25 and the second side wall 26 face each other, and the upper wall 23 and the lower wall 24 face each other.
  • the rear end of the upper wall 23, the rear end of the lower wall 24, the rear end of the first side wall 25, and the rear end of the second side wall 26 are all connected to the back wall 22.
  • the front end of the upper wall 23, the front end of the lower wall 24, the front end of the first side wall 25, and the front end of the second side wall 26 form an opening peripheral portion 28 that forms a container body opening 21 having a positional relationship facing the back wall 22.
  • the opening peripheral edge 28 is provided at one end of the container main body 2, and the back wall 22 is located at the other end of the container main body 2.
  • the outer shape of the container body 2 formed by the outer surface of the wall portion 20 is box-shaped.
  • the inner surface of the wall portion 20, that is, the inner surface of the back wall 22, the inner surface of the upper wall 23, the inner surface of the lower wall 24, the inner surface of the first side wall 25, and the inner surface of the second side wall 26 are surrounded by these. 27 is formed.
  • the container main body opening 21 formed in the opening peripheral edge portion 28 is surrounded by the wall portion 20 and communicates with the substrate storage space 27 formed in the container main body 2. As will be described later, a maximum of 25 substrates W (see FIG. 6 and the like) can be stored in the substrate storage space 27.
  • Latch engaging recesses 231A, 231B, 241A, and 241B that are recessed outward from the substrate storage space 27 are formed in the upper wall 23 and the lower wall 24 and in the vicinity of the opening peripheral edge 28. ing. A total of four latch engaging recesses 231A, 231B, 241A, 241B are formed near the left and right ends of the upper wall 23 and the lower wall 24, one each.
  • the first side wall 25 is provided with side plate locking portions 251A and 251B.
  • the second side wall 26 is provided with side plate locking portions 261A and 261B.
  • the side plate locking portions 251A, 251B, 261A, and 261B are portions of the first side wall 25 and the second side wall 26 that are spaced apart at a predetermined interval in the front-rear direction D1 from the middle part in the front-rear direction D1. In relation, they are provided in pairs.
  • a rear retainer locking portion 252 is provided in a portion of the inner surface of the first side wall 25 and in a portion in the rear direction D12 with respect to the side plate locking portions 251A and 251B.
  • a rear retainer locking portion 262 is provided in a portion of the inner surface of the second side wall 26 and in a portion in the rear direction D12 with respect to the side plate locking portions 251A and 251B.
  • a rib 233 and a flange fixing portion 234 are integrally formed with the upper wall 23.
  • the rib 233 protrudes from the outer surface of the upper wall 23 in the upward direction D21 and extends substantially in the front-rear direction D1.
  • a top flange (not shown) is fixed to the flange fixing portion 234.
  • the top flange is fixed to the upper wall 23 and is hung by being hung on the substrate storage container 1 when the substrate storage container 1 is suspended in an AMHS (automatic wafer transfer system), PGV (wafer substrate transfer carriage) or the like. It is a member which becomes a part.
  • a container main body leg 243 is provided on the outer surface of the lower wall 24.
  • the container main body legs 243 are integrally formed with the left and right end edges of the lower wall 24, and extend in the front-rear direction D ⁇ b> 1 along the left and right end edges of the lower wall 24.
  • the substrate support plate-like portions 5 are provided on the first side wall 25 and the second side wall 26, respectively, and are arranged in the substrate storage space 27 so as to form a pair in the left-right direction D3.
  • the substrate support plate-like portion 5 has a plate portion 51 and a plate portion support portion 52.
  • the plate portion 51 and the plate portion support portion 52 are configured by integrally molding resin.
  • the plate part 51 has a plate-like arc shape.
  • a total of 50 plate portions 51 are provided on each of the first side wall 25 and the second side wall 26, each including 25 plates. Adjacent plate portions 51 are arranged in parallel with each other in the vertical direction D2 so as to be spaced apart from each other at intervals of 10 to 12 mm.
  • the thing of the substantially same shape as the board part 51 is also arrange
  • the 25 plate portions 51 provided on the first side wall 25 and the 25 plate portions 51 provided on the second side wall 26 have a positional relationship facing each other in the left-right direction D3.
  • the 50 plate portions 51 and the members serving as two guides having substantially the same shape as the plate portion 51 have a positional relationship parallel to the inner surface of the lower wall 24.
  • a convex portion 511 is provided on the upper surface of the plate portion 51.
  • substrate W supported by the board part 51 contacts only the protrusion end of the convex part 511, and does not contact the board part 51 by a surface.
  • the plate part support part 52 is comprised by the member extended in the up-down direction D2.
  • the 25 plate portions 51 provided on the first side wall 25 are connected to a plate portion support portion 52 provided on the first side wall 25 side.
  • the 25 plate portions 51 provided on the second side wall 26 are connected to a plate portion support portion 52 provided on the second side wall 26 side.
  • the plate portion support portion 52 has a first side wall locking portion 521.
  • the first side wall locking portions 521 are provided in pairs in a positional relationship spaced at a predetermined interval in the front-rear direction D1, and the side plate locking provided on the first side wall 25 and the second side wall 26, respectively. It can be locked to the portions 251A, 251B, 261A, 261B.
  • the substrate support plate-like portion 5 is fixed to the first side wall 25 and the second side wall 26, respectively.
  • the rear retainer 6 includes a wall substrate support 60 and a support fixing member 67 as a back substrate support.
  • the support portion fixing member 67 has a side wall rear locking portion 671, and the side wall rear locking portion 671 can be locked to the rear retainer locking portions 252 and 262.
  • the rear retainer 6 is fixed to the first side wall 25 and the second side wall 26 by the rear wall locking portion 671 being locked to the rear retainer locking portions 252 and 262, respectively.
  • the wall portion substrate support portion 60 has a virtual diameter extending in the left-right direction D3 from the center C of the substrate W when the substrate W is stored in the substrate storage container 1, as will be described later.
  • substrate support part 60 provided in the 1st side wall 25 and the 2nd side wall 26 has the positional relationship which makes a pair with the front retainer 7 mentioned later in the front-back direction D1.
  • the wall portion substrate support portion 60 includes a substrate receiving portion 61 and leg portions 64.
  • the substrate receiving portion 61 includes a rectangular flat plate-like first plate portion 62 constituting the first contact portion, and a rectangular flat plate-like second plate portion 63 constituting the second contact portion.
  • the first plate portion 62 has a front surface and a back surface, and the normal line of the front surface is directed obliquely downward D22 and obliquely forward D11. As shown in FIG. 7, the surface of the first plate portion 62 constitutes a first contact surface 621.
  • the second plate portion 63 has a front surface and a back surface, and the normal line of the front surface is directed obliquely upward D21 and obliquely forward direction D11.
  • the surface of the second plate portion 63 constitutes a second contact surface 631.
  • one long side that is one end portion of the rectangular first plate portion 62 is connected in a positional relationship that coincides with one long side that is one end portion of the rectangular second plate portion 63. Yes. That is, one long side 621A of the first contact surface 621 of the rectangular first plate portion 62 and the one long side 631A of the second contact surface 631 of the rectangular second plate portion 63 coincide with each other, The first contact surface 621 and the second contact surface 631 are connected. One long side 621A and one long side 631A that coincide with each other extend in a positional relationship parallel to the inner surface of the lower wall 24.
  • a connection position portion (one long side 621A and one long side 631A) between the first contact surface 621 and the second contact surface 631 is an upper surface of the substrate W supported by the substrate support plate-like portion 5. It is located above the surface W1. In other words, the surface W1 of the substrate W supported by the substrate support plate-like portion 5 is in a direction from the back surface W2 that is the lower surface of the substrate W supported by the substrate support plate-like portion 5 to the surface W1 that is the upper surface.
  • the first contact surface 621 and the second contact surface 631 are positioned in front of the connection position.
  • the substrate W when the substrate W is stored in the substrate storage space 27 and the lid 3 is closed as described later, the substrate W is supported by the rear retainer 6 and the front retainer 7.
  • the edge W3 of the edge part of the upper surface (surface W1) of the substrate W can come into contact.
  • the second contact surface 631 when the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the lower surface of the substrate W is supported when the substrate W is supported by the rear retainer 6 and the front retainer 7.
  • the edge W4 of the edge part of (back surface W2) can contact
  • the leg portion 64 has a first leg portion 65 and a second leg portion 66.
  • Each of the first leg portion 65 and the second leg portion 66 has a rectangular flat plate shape.
  • one long side 65 ⁇ / b> A of the first leg portion 65 is fixed to the support portion fixing member 67.
  • one long side 65 ⁇ / b> A of the first leg portion 65 is fixed to the first side wall 25 or the second side wall 26 via the support portion fixing member 67.
  • the other long side 65 ⁇ / b> B of the first leg portion 65 is connected to another long side 62 ⁇ / b> B that is the other end portion of the first plate portion 62.
  • one long side 66 ⁇ / b> A of the second leg portion 66 is fixed to the support portion fixing member 67. Accordingly, one long side 66 ⁇ / b> A of the second leg portion 66 is fixed to the first side wall 25 or the second side wall 26 via the support portion fixing member 67.
  • the other long side 66 ⁇ / b> B of the second leg portion 66 is connected to another long side 63 ⁇ / b> B that is the other end portion of the second plate portion 63. Accordingly, the direction parallel to the connecting portion (one long side 621A, 631A) between the first contact surface 621 of the first plate portion 62 and the second contact surface 631 of the second plate portion 63 (the paper surface in FIG. 7).
  • the wall portion substrate support section 60 viewed from the front side and the back side) has an M-shape as shown in FIG.
  • the second leg portion 66, the second plate portion 63, the first plate portion 62, and the first leg portion 65 are arranged in this order from the bottom to the top.
  • the other long side 631 ⁇ / b> B that is the other end portion of the second contact surface 631 is located below the back surface W ⁇ b> 2 of the substrate W supported by the substrate support plate-like portion 5.
  • the other long side 631B which is the other end portion of the second contact surface 631 is a substrate support plate in a direction from the back surface W2 of the substrate W supported by the substrate support plate-shaped portion 5 to the front surface W1. It is located in front of the back surface W ⁇ b> 2 of the substrate W supported by the shape part 5.
  • 13 wall substrate support portions 60 are arranged in a line in the vertical direction D2 at positions closer to the rear.
  • the remaining 12 wall substrate support portions 60 are aligned in the vertical direction D2 at a position in the front direction D11 with respect to the 13 wall substrate support portions 60. Has been placed.
  • the 13 wall substrate support portions 60 near the rear and the 12 wall substrate support portions 60 near the front direction D11 are seen from the bottom in a side-by-side direction shown in FIG. It is arranged one by one up. That is, a connection formed by connecting the first contact surface 621 of the first plate portion 62 of the 13 wall substrate support portions 60 closer to the rear and the second contact surface 631 of the second plate portion 63.
  • connection lines 601 Lines (hereinafter referred to as “rear side connection lines 601”), the first contact surfaces 621 of the first plate portions 62 of the twelve wall portion substrate support portions 60 near the front direction D11, and the second plate portions 63
  • a connection line formed by connecting the second contact surface 631 (hereinafter referred to as “front connection line 602”) is not in a positional relationship that coincides with the side view shown in FIG.
  • the rear side connection line 601 and the front side connection line 602 are parallel to each other and have a positional relationship in which they are arranged alternately from top to bottom.
  • the 13 wall substrate support portions 60 near the rear D12 and the 12 wall substrate support portions 60 near the front direction D11 alternately form 25 semiconductor wafers from top to bottom. It is possible to support.
  • the first plate portion 62, the second plate portion 63, the first leg portion 65, and the second leg portion 66 are made of an elastically deformable material.
  • the elastically deformable material include PEE (polyether ester elastomer) and PBT (polybutylene terephthalate).
  • PEE polyether ester elastomer
  • PBT polybutylene terephthalate
  • the leg portion 64 of the one wall portion substrate support portion 60 is composed of such a material. It can be elastically deformed independently from the leg portions 64 of the other wall substrate support portions 60. As a result, one wall substrate support 60 can be elastically deformed independently of the other wall substrate support 60.
  • the degree of elastic deformation of the first plate portion 62, the second plate portion 63, the first leg portion 65, and the second leg portion 66 can be controlled by selecting these materials. Also, it is possible to control by the shape of these.
  • the lid 3 has a substantially rectangular shape that substantially matches the shape of the opening peripheral edge 28 of the container body 2.
  • the lid 3 can be attached to and detached from the opening peripheral edge 28 of the container main body 2, and the lid 3 can close the container main body opening 21 by attaching the lid 3 to the opening peripheral edge 28.
  • a seal member fitting groove 31 is formed along the outer peripheral edge of the lid 3 at the outer peripheral edge of the lid 3.
  • an annular seal member 4 made of elastically deformable POE (polyoxyethylene), PEE, fluorine rubber, silicon rubber or the like is fitted.
  • the seal member 4 is arranged so as to go around the outer peripheral edge of the lid 3.
  • the lid body 3 When the lid body 3 is attached to the opening peripheral edge portion 28, the outer peripheral edge portion of the lid body 3 comes into contact with the inner peripheral edge portion of the opening peripheral edge portion 28 of the container body 2 via the seal member 4. Thereby, the seal member 4 is sandwiched between the outer peripheral edge portion of the lid body 3 and the inner peripheral edge portion of the opening peripheral edge portion 28 and elastically deforms, and the lid body 3 closes the container body opening portion 21 in a sealed state.
  • the substrate W By removing the lid 3 from the opening peripheral edge 28, the substrate W can be taken into and out of the substrate storage space 27 in the container body 2.
  • the lid 3 is provided with a latch mechanism.
  • the latch mechanism is provided in the vicinity of both left and right end portions of the lid 3, and as shown in FIG. 1, the two upper latch portions 32 ⁇ / b> A that can project in the upward direction D ⁇ b> 21 from the upper side of the lid 3, And two lower latch portions 32B that can project in the downward direction D22 from the lower side.
  • the two upper latch portions 32 ⁇ / b> A are disposed in the vicinity of the left and right ends of the upper side of the lid 3, and the two lower latch portions are disposed in the vicinity of the left and right ends of the lower side of the lid 3.
  • An operation unit 33 is provided on the outer surface of the lid 3.
  • the upper latch portion 32A and the lower latch portion can be projected from the upper and lower sides of the lid body 3, and are not projected from the upper and lower sides. be able to.
  • the upper latch portion 32A protrudes in the upward direction D21 from the upper side of the lid body 3 and engages with the latch engagement recesses 231A and 231B of the container body 2, and the lower latch portion (not shown) of the lid body 3
  • the lid 3 is fixed to the opening peripheral edge 28 of the container body 2 by projecting in the downward direction D2 from the lower side and engaging with the latch engagement recesses 241A and 241B of the container body 2.
  • a recess 34 that is recessed outward from the substrate storage space 27 is formed.
  • the concave portion 34 has a width that is about half of the width in the left-right direction D3 of the lid 3 at the center position in the left-right direction D3 of the lid 3, and the vicinity of the lower end of the lid 3 in the vertical direction D2 It has been formed until.
  • front retainer locking portions 35 are provided in pairs in the left-right direction D3.
  • a front retainer 7 is provided in the recess 34. That is, the front retainer 7 is a portion of the lid 3 that faces the portion that forms the substrate storage space 27 when the container main body opening 21 of the container main body 2 is closed, that is, the substrate storage space 27. It is arranged in the part to be.
  • the front retainer 7 has a pair of vertical frames 71 extending in parallel with the vertical direction D2, front retainer legs 72, and a front retainer substrate receiving portion 73 as a lid-side substrate support portion.
  • the pair of vertical frame bodies 71, the front retainer leg portions 72, and the front retainer substrate receiving portion 73 are integrally formed of resin.
  • the front retainer substrate receiving portion 73 constitutes a lid side substrate support portion.
  • Front retainer substrate receiving portions 73 are arranged two by two so as to form a pair spaced apart at a predetermined interval in the left-right direction D3.
  • the front retainer substrate receiving portions 73 arranged in pairs so as to form a pair in this way are provided in a state where 25 pairs are juxtaposed in the vertical direction D2.
  • the front retainer substrate receiving portion 73 includes a receiving portion upper portion 731 having a front retainer first contact surface 733 and a receiving portion lower portion 732 having a front retainer second contact surface 734.
  • the normal line of the front retainer first contact surface 733 faces the diagonally downward direction D22 and the diagonally rearward direction D12.
  • the normal line of the front retainer second contact surface 734 faces the diagonally upward direction D21 and the diagonally rearward direction D12.
  • the substrate W is supported by the rear retainer 6 and the front retainer 7 by storing the substrate W (see FIG. 6 and the like) in the substrate storage space 27 and closing the lid 3.
  • the front part of the edge W3 at the edge of the upper surface of the substrate W comes into contact.
  • the front retainer second contact surface 734 when the substrate W is stored in the substrate storage space 27 and the lid 3 is closed, the substrate W is supported by the rear retainer 6 and the front retainer 7.
  • the front part of the edge W4 of the edge part of the lower surface of this is in contact.
  • the front retainer substrate receiving portion 73 can support the edge portions of the plurality of substrates W.
  • the front retainer leg 72 has a right leg 721, a connecting leg 722, and a left leg 723.
  • the right leg 721 extends in the right direction D32 from the right front retainer substrate receiving portion 73.
  • the connecting leg portion 722 connects the two front retainer substrate receiving portions 73 disposed at a predetermined interval in the left-right direction D3.
  • the left leg 723 extends in the left direction D31 from the left front retainer substrate receiving portion 73.
  • the right leg portion 721, the right front retainer substrate receiving portion 73, the connecting leg portion 722, the left front retainer substrate receiving portion 73, and the left leg portion 723 are integrally formed, and in this order. They are connected to each other and extend in the left-right direction D3.
  • the right leg portion 721, the right front retainer substrate receiving portion 73, the connecting leg portion 722, the left front retainer substrate receiving portion 73, and the left leg portion 723, which are integrally formed in this way, have a predetermined distance in parallel positional relationship. 25, and 25 pieces are arranged in the vertical direction D2.
  • the right end of the right leg 721 is integrally molded and connected to the right vertical frame 71, and the left end of the left leg 723 is integrally molded and connected to the left vertical frame 71.
  • the pair of vertical frame bodies 71 are provided with lid body locking portions 711 and 711, respectively.
  • the lid body locking portions 711 and 711 can be locked to the front retainer locking portion 35 of the lid body 3.
  • the lid body locking portions 711 and 711 are locked to the front retainer locking portion 35 of the lid body 3, so that the front retainer 7 is covered with the lid body 3.
  • Fixed to. The front retainer 7 is removed from the lid 3 by releasing the locking of the lid locking portions 711 and 711 with respect to the front retainer locking portion 35 of the lid 3.
  • the front edge W4 of the back surface W2 of each substrate abuts on the front retainer second contact surface 734 of each front retainer 7 and is pushed in the rear direction D12.
  • the rear edge W4 of the back surface W2 of each substrate W abuts on the second abutment surface 631 of the wall substrate support 60, and the second abutment surface 631. Slide up.
  • the rear edge W3 of the front surface W1 of each substrate W is in contact with the first contact surface 621 of the wall substrate support 60.
  • the edge W3 of the front surface W1 and the edge W4 of the back surface W2 of the substrate W push the first contact surface 621 and the second contact surface 631 in the rear direction D12, respectively, so that FIG.
  • the first leg portion 65, the second leg portion 66, the first plate portion 62, and the second plate portion 63 are elastically deformed, and the substrate W is formed by the first contact surface 621 and the second contact surface 631.
  • the rear edges W3 and W4 are sandwiched.
  • the front portion of the edge W4 of the back surface W2 of each substrate W slides on the front retainer second contact surface 734 of the front retainer 7.
  • the front portion of the edge W3 of the surface W1 of each substrate W is in contact with the front retainer first contact surface 733 of the front retainer 7.
  • the rear portions of the edges W3 and W4 of the plurality of substrates W are supported by the wall substrate support portion 60 of the rear retainer 6, and the front portions of the edges W3 and W4 of the edges of the plurality of substrates W are
  • the front retainer 7 is supported by the front retainer substrate receiving portion 73 of the front retainer 7. That is, the wall substrate support part 60 cooperates with the front retainer substrate receiving part 73 of the front retainer 7 to separate the edges of the plurality of substrates W from the substrate support plate-like part 5, so that adjacent substrates W are separated from each other.
  • a plurality of substrates W are supported in a state of being spaced apart by a predetermined interval and in a state of being parallel to each other.
  • the lid 3 is fixed to the opening peripheral portion 28 with all the upper latch portions 32A and the lower latch portions (not shown) of the lid 3 protruding from the upper and lower sides of the lid 3. Then, the container body opening 21 is closed with the lid 3. Thus, the 25 substrates W are stored in the substrate storage space 27.
  • the substrate storage container 1 is disposed so as to be paired with the lid-side substrate support portion (front retainer substrate receiving portion 73) in the substrate storage space 27, and can support the edges of the plurality of substrates W.
  • the lid-side substrate support portion front retainer substrate receiving portion 73
  • the edges of the plurality of substrates W are moved to the side substrate support in cooperation with the lid side substrate support (front retainer substrate receiving portion 73).
  • a back side substrate support portion (wall portion substrate support portion 60) that supports the plurality of substrates W is provided in a state of being separated from the (substrate support plate-like portion 5) and arranged in parallel.
  • the rear substrate support portion (wall substrate support portion 60) includes a leg portion 64 that can be elastically deformed and a substrate receiving portion 61 that is supported by the leg portion 64.
  • a first contact portion (first plate portion 62) having a first contact surface 621 that can contact the edge W3 of the surface W1, and a second contact surface 631 connected to the first contact surface 621.
  • a second contact portion (second plate portion 63) having a second contact surface 631 capable of contacting the edge W4 of the back surface W2 of the substrate W.
  • the back side substrate support part (wall part substrate support part 60) is provided corresponding to each substrate W, and the leg part 64 of one back side substrate support part (wall part substrate support part 60) is Since each of the leg portions 64 can be elastically deformed independently of the legs 64 of the other back side substrate support portions (wall portion substrate support portions 60), the outside of the substrate storage container 1 is separately provided. It can absorb the impact applied from. For this reason, it can suppress more effectively that an impact is transmitted to the some board
  • substrate receiving part 61 is elastically deformable
  • the leg part 64 has the 1st leg part 65 and the 2nd leg part 66, and the one end part of the 1st contact part (1st board part 62). Is connected to one end of the second contact portion (second plate portion 63), the other end of the first contact portion (first plate portion 62) is connected to the first leg portion 65, and the second The other end of the contact portion (second plate portion 63) is connected to the second leg portion 66.
  • the substrate receiving portion 61 and the leg portion 64 contact the first contact surface 621 of the substrate receiving portion 61 with the edge W3 of the surface W1 of the substrate W supported by the substrate supporting plate-shaped portion 5 and The edge W4 of the back surface W2 of the substrate W supported by the side substrate support portion (substrate support plate-like portion 5) is pressed against the first contact surface 621 and the second contact surface 631 of the substrate receiving portion 61.
  • the second contact surface 631 is pressed by the contact, the first contact surface 621 and the second contact surface 631 can be deformed so as to sandwich the edge of the substrate W.
  • the edge of the substrate W is laterally moved. It can be set as the state spaced apart from the board
  • the surface W1 of the substrate W supported by the side substrate support portion is a surface from the back surface W2 of the substrate W supported by the side substrate support portion (substrate support plate-like portion 5). Since the container body opening 21 is closed by the lid 3, the lid side substrate support is provided because it is located in front of the connection position of the first abutment surface 621 and the second abutment surface 631 in the direction toward W 1.
  • the edge W4 of the back surface W2 of the substrate W becomes the second contact surface 631.
  • the edge W4 of the back surface W2 of the substrate W can slide up the second abutting surface 631 until the abutting and the edge W3 of the front surface W1 of the substrate W abut on the first abutting surface 621.
  • One end 621A of the first contact surface 621 is connected to one end 631A of the second contact surface 631, and the other end 631B of the second contact surface 631 is a lateral substrate support (substrate support plate).
  • substrate support plate In the direction from the back surface W2 of the substrate W supported by the shaped portion 5) to the front surface W1, it is positioned in front of the back surface W2 of the substrate W supported by the side substrate support portion (substrate support plate-like portion 5).
  • the substrate W when the substrate W is supported by the lid-side substrate support portion (front retainer substrate receiving portion 73) and the back-side substrate support portion (wall portion substrate support portion 60) by closing the opening with the lid 3, the substrate Until the edge W4 of the back surface W2 of W is in contact with the second contact surface 631, and the edge W3 of the surface W1 of the substrate W is in contact with the first contact surface 621, the edge W4 of the back surface W2 of the substrate W is The second contact surface 631 can be slid up.
  • FIG. 8 is a perspective view showing the container body 2 of the substrate storage container according to the second embodiment.
  • FIG. 9 is a schematic diagram illustrating a state in which the substrate W is supported by the substrate receiving portion 61 of the substrate storage container according to the second embodiment, and (a) illustrates a state before the substrate W is supported, and (b). Indicates a state before the substrate W is supported.
  • the leg portion 64 of one wall substrate support portion 60 has two of the first leg portion 65 and the second leg portion 66, but in the second embodiment, the first leg portion 65 and the second leg portion 66 have the first leg portion. It is different from the first embodiment in that it does not have two legs and a second leg, but has only one inclined leg 65C. Further, the first plate portion 62C and the second plate portion 63C are made of resin that does not easily deform, and the first plate portion 62C is rigidly connected so that the posture with respect to the second plate portion 63C does not easily change. This is different from the first embodiment.
  • the same member is illustrated with the same numerals and explanation is omitted.
  • the resin of the constituent material is selected, but also the shape and structure are devised (for example, formed thicker), etc. It is possible to make the posture of the one plate portion 62C hard so as not to easily change.
  • the first plate portion 62C and the second plate portion 63C are made of a resin that is not easily deformed to the extent that the substrate W comes into contact with and pressed, for example, PC (polycarbonate), PEEK (polyether ether ketone), In the embodiment, it is configured by a PC.
  • PC polycarbonate
  • PEEK polyether ether ketone
  • the side 631D coincides with the first contact surface 621C and the second contact surface 631C.
  • the first plate portion 62C is made of a resin that does not easily deform as described above, the first plate portion 62C is firmly connected so that the posture with respect to the second plate portion 63C does not easily change.
  • the leg portion 64A has an inclined leg portion 65C.
  • the inclined leg portion 65C has a rectangular flat plate shape.
  • One long side 65 ⁇ / b> D of the inclined leg portion 65 ⁇ / b> C is connected to the first side wall 25 or the second side wall 26 via the support portion fixing member 67 by being fixed to the support portion fixing member 67.
  • the other long side 65E of the inclined leg portion 65C has one long side 621D of the first contact surface 621C of the first plate portion 62C and one length of the second contact surface 631C of the second plate portion 63C. It is connected to the connection position with the side 631D.
  • the inclined leg portion 65C is a substrate supported by the substrate support plate-like portion 5 on the second contact surface 631C of the substrate receiving portion 61A as will be described later.
  • the edge of the back surface W2 of W comes into contact, and the second contact surface 631C is pressed in the rear direction D12, whereby a material that can be elastically deformed to move the substrate receiving portion 61A in the upward direction D21, for example, It is comprised by PC (polycarbonate) and PEEK (polyetheretherketone), and is comprised by PC in 2nd Embodiment.
  • the substrate receiving portion 61A in the upward direction D21 in this way POE, PEE, or the like can be used as a material that constitutes the inclined leg portion 65C and is easily elastically deformed.
  • the amount of elastic deformation can be adjusted by devising the shape of the inclined leg 65C (for example, making it thinner, thinner, spring-like, etc.) It is.
  • the one long side 65D which is one end portion of the inclined leg portion 65C is the other end portion of the inclined leg portion 65C in the direction from the back surface W2 of the substrate W supported by the substrate support plate-shaped portion 5 to the front surface W1. It is arranged on the near side, that is, below the other long side 65E. Therefore, the direction parallel to the connection portion (621D, 631D) between the first contact surface 621C of the first plate portion 62C and the second contact surface 631C of the second plate portion 63C (the front side of the paper surface in FIG. 9).
  • the wall portion substrate support portion 60A viewed from the direction connecting the back side) has a y-shape as shown in FIG.
  • the operation when the substrate W is stored in the substrate storage space 27 of the substrate storage container according to the second embodiment will be described.
  • all the upper latch portions 32A (see FIG. 1 and the like) and the lower latch portions (not shown) of the lid body 3 are not projected from the upper and lower sides of the lid body 3, and the lid body 3 is placed in the container body. 2 from the peripheral edge 28 of the opening.
  • each of the 25 substrates W is placed on the substrate support plate-like portion 5 so that the substrate W is supported by the substrate support plate-like portion 5.
  • the lid 3 is brought into contact with the opening peripheral edge 28.
  • the front part of the edge W4 of the back surface W2 of each substrate W comes into contact with the front retainer second contact surface 734 of each front retainer 7 (see FIG. 3 etc.) and is pushed in the rear direction D12. Accordingly, as shown in FIG. 9A, the rear portion of the edge W4 of the back surface W2 of each substrate W abuts on the second abutting surface 631C of the wall portion substrate supporting portion 60A, and the second abutting surface 631C. Slide up. At this time, the inclined leg portion 65C is deformed so as to move the substrate receiving portion 61 in the upward direction D21.
  • the rear portion of the edge W3 of the surface W1 of each substrate W abuts on the first abutting surface 621C of the wall portion substrate supporting portion 60.
  • the front portion of the edge W4 of the back surface W2 of each substrate W abuts on the front retainer second abutting surface 734 (see FIG. 4) of the front retainer 7 and slides on the front retainer second abutting surface 734. Go up.
  • the front portion of the edge W3 of the surface W1 of each substrate W is in contact with the front retainer first contact surface 733 of the front retainer 7.
  • the rear portions of the edges W3 and W4 of the plurality of substrates W are supported by the wall substrate support portion 60A, and the front portions of the edges W3 and W4 of the plurality of substrates W are front retainers. 7 is supported. That is, the wall substrate support 60A cooperates with the lid-side substrate support (front retainer substrate receiving portion 73) to separate the edges of the plurality of substrates W from the substrate support plate-like portion 5 and to adjoin adjacent substrates.
  • a plurality of substrates W are supported in a state where the Ws are separated from each other by a predetermined interval and are in a parallel positional relationship.
  • the lid 3 is opened with all the upper latch portions 32A (see FIG. 1 and the like) and the lower latch portions (not shown) of the lid 3 protruding from the upper and lower sides of the lid 3.
  • the container body opening 21 is closed with the lid 3 by being fixed to the periphery 28 and attached to the opening periphery 28.
  • the 25 substrates W are stored in the substrate storage space 27 formed by being surrounded by the wall portion 20.
  • One end portion 65D of the leg portion 65C is connected to the inner surface of the first side wall 25 or the second side wall 26 constituting the inner surface of the container body 2 via the support portion fixing member 67, and the other end portion 65E of the leg portion 65C is The one end portion of the leg portion 65C is connected to the substrate receiving portion 61A, and the leg portion in the direction from the back surface W2 of the substrate W supported by the side substrate support portion (substrate support plate-like portion 5) to the front surface W1. It is located in front of the other end 65E of 65C.
  • the leg portion 65C of the back side substrate support portion is at least on the second contact surface 631C of the substrate receiving portion 61A and on the side substrate support portion (substrate support plate-like portion 5).
  • the edge W4 of the back surface W2 of the supported substrate W comes into contact with the second contact surface 631C and the substrate receiving portion 61A is pressed from the back surface W2 of the substrate W supported by the side substrate support portion. It can be made deformable so as to move in a direction toward the surface W1.
  • the edge portion of the substrate W is placed on the substrate support plate. It can be in the state separated from the shape part 5.
  • substrate support part 60 was provided in the container main body 2, and was not provided in the cover body 3,
  • a support portion similar to the above-described wall portion substrate support portion 60 may be provided in place of the front retainer leg portion 72 and the front retainer substrate receiving portion 73 of the front retainer 7 of the embodiment.
  • the adjacent plate portions 51 of the substrate support plate-like portion 5 are arranged in a parallel positional relationship apart from each other. However, they may not be strictly in a parallel positional relationship, and may be in parallel.
  • the first plate portion 62 and the second plate portion 63 are configured to be elastically deformable similarly to the first leg portion 65 and the second leg portion 66, but are not limited to this configuration.
  • the first plate portion 62 and the second plate portion 63 may be made of a material that does not easily deform, or may have a shape that does not easily deform.
  • the first plate portion 62C and the second plate portion 63C are made of a material that does not easily deform, but are not limited to this configuration.
  • the first plate portion and the second plate portion may be made of an elastically deformable material, or may be made of an elastically deformable shape.
  • the shape of the container main body and the lid, the number of substrates that can be stored in the container main body, and the dimensions thereof are the shape of the container main body 2 and the lid 3 in this embodiment, and the number of substrates W that can be stored in the container main body 2.
  • the dimensions are not limited.
  • the substrate support plate-like portion is not limited to the configuration of the substrate support plate-like portion 5 of the present embodiment.
  • the 13 wall portion substrate support portions 60 closer to the rear direction D12 and the 12 wall portion substrate support portions 60 from the front direction D11 are arranged in a staggered positional relationship, but the staggered positional relationship is different. It is not limited. Any configuration is possible as long as the substrates can be arranged in parallel in the vertical direction D2 with a predetermined narrow interval.

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Packaging Frangible Articles (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention concerne un récipient de logement de substrat pourvu : d'une section de support de substrat côté couvercle pouvant supporter des sections de bord d'une pluralité de substrats (W) lorsqu'une section d'ouverture de corps de récipient est fermée par un couvercle ; et une section de support de substrat côté intérieur (60) qui est disposée à l'intérieur de l'espace de logement de substrat, qui peut supporter des sections de bord de la pluralité de substrats (W), et qui supporte, lorsque la section d'ouverture de corps de conteneur est fermée par le couvercle et en collaboration avec la section de support de substrat côté couvercle, la pluralité de substrats (W) dans un état maintenant les sections de bord de la pluralité de substrats (W) séparées des sections de plaque (51) des sections de support de substrat côté latéral et en parallèle les unes avec les autres. La section de support de substrat côté intérieur (60) est pourvue de sections de jambe (65, 66) qui sont aptes à se déformer élastiquement, et de sections de réception de substrat (61) supportées par les sections de jambe (65, 66). La section de réception de substrat (61) comprend : une première section de contact (62) comprenant une première face de contact (621) qui peut venir en contact avec un bord d'extrémité (W3) au niveau de la face avant du substrat ; et une seconde section de contact (63) comprenant une seconde face de contact (631) qui est reliée à la première face de contact (621) et qui peut venir en contact avec un bord d'extrémité (W4) au niveau de la face arrière du substrat.
PCT/JP2012/064645 2012-06-07 2012-06-07 Récipient de logement de substrat doté d'une fonction d'absorption d'impact WO2013183138A1 (fr)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2014519759A JPWO2013183138A1 (ja) 2012-06-07 2012-06-07 衝撃吸収機能を備えた基板収納容器
PCT/JP2012/064645 WO2013183138A1 (fr) 2012-06-07 2012-06-07 Récipient de logement de substrat doté d'une fonction d'absorption d'impact
TW102119421A TW201411767A (zh) 2012-06-07 2013-05-31 具有吸收衝擊功能的基板收納容器

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PCT/JP2012/064645 WO2013183138A1 (fr) 2012-06-07 2012-06-07 Récipient de logement de substrat doté d'une fonction d'absorption d'impact

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JPWO2017006406A1 (ja) * 2015-07-03 2018-04-19 ミライアル株式会社 基板収納容器
CN110622292A (zh) * 2017-08-09 2019-12-27 未来儿股份有限公司 基板收纳容器
CN110770889A (zh) * 2017-04-06 2020-02-07 未来儿股份有限公司 基板收纳容器
WO2020136741A1 (fr) * 2018-12-26 2020-07-02 ミライアル株式会社 Récipient de stockage de substrat
CN111403326A (zh) * 2019-01-02 2020-07-10 家登精密工业股份有限公司 基板载具及其抬升结构
JP7441162B2 (ja) 2020-12-22 2024-02-29 信越ポリマー株式会社 基板収納容器
WO2024247264A1 (fr) * 2023-06-02 2024-12-05 ミライアル株式会社 Récipient de stockage de substrat

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WO2019239495A1 (fr) * 2018-06-12 2019-12-19 ミライアル株式会社 Récipient de stockage de substrat

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CN111403326B (zh) * 2019-01-02 2023-08-29 家登精密工业股份有限公司 基板载具及其抬升结构
JP7441162B2 (ja) 2020-12-22 2024-02-29 信越ポリマー株式会社 基板収納容器
WO2024247264A1 (fr) * 2023-06-02 2024-12-05 ミライアル株式会社 Récipient de stockage de substrat

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